JPH07275770A - Paste applicator - Google Patents

Abstract

PURPOSE:To provide a paste applicator capable of easily confirming the cross section shape and cross section area of a pattern drawn on a substrate successively after the paste pattern is drawn and formed on the substrate, thereby efficiently controlling the quality and largely contributing to the improvement of productivity. CONSTITUTION:This paste applicator is constituted so as to display the cross section shape and cross section area of the pattern on a monitor 16 by measuring the height of the surface of the substrate 7 by an optical range finder 3 after forming the paste pattern and calculating the coating height and width of the drawn pattern by using the measured data.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention allows a desired substrate to be placed on a substrate placed on a table by moving the substrate relative to the nozzle while ejecting the paste from the nozzle. The present invention relates to a paste applicator for applying and drawing a shaped paste pattern, and particularly to a paste applicator suitable for managing the cross-sectional shape and cross-sectional area of a drawn and formed paste pattern.

[0002]

2. Description of the Related Art A substrate mounted on a table is opposed to a nozzle fixed to the tip of a paste accommodating cylinder in which a paste is accommodated, and the nozzle and the substrate are ejected while ejecting the paste from a paste ejection port of the nozzle. An example of a paste applicator using a discharge drawing technique for applying a paste in a desired pattern on a substrate by moving at least one of the two in the horizontal direction to change the relative positional relationship, It is described in JP-A-2-52742.

Such a paste applicator forms a desired resistance paste pattern on an insulating substrate used as a substrate by discharging a resistance paste from a paste discharge port at the tip of a nozzle. It is going.

[0004]

By the way, in the above-mentioned conventional paste applicator, whether or not the cross-sectional shape of the drawn and formed paste pattern is a desired one has not been examined. Was not particularly a problem. However, when the resistance paste pattern is drawn, the variation of the cross-sectional area becomes the variation of the resistance value as it is, and when the sealant is drawn on the glass substrate of the liquid crystal display device, the cross-sectional shape of the sealing agent is drawn. Variations may cause a seal shortage, display defects, and the like.

Therefore, an object of the present invention is to solve the above-mentioned problems of the prior art, and to easily confirm the cross-sectional shape and cross-sectional area of a paste pattern drawn and formed on a substrate and to perform efficient quality control. To provide a machine.

[0006]

In order to achieve the above object, according to the present invention, a substrate is placed on a table so as to face a paste discharge port of a nozzle, and the paste filled in a paste storage cylinder is discharged. In a paste applicator that changes the relative positional relationship between the nozzle and the substrate while ejecting onto the substrate from an outlet to draw and form a paste pattern of a desired shape on the substrate, the paste ejection port of the nozzle and the substrate Measuring means for measuring the facing distance to the surface of the substrate, moving means for relatively moving the measuring means and the substrate along the surface of the substrate, and measuring data of the measuring means during the relative movement. And a cross-section capturing means for calculating a coating height and a coating width of the drawn paste pattern using a printer.

[0007]

Since the measuring means measures the facing distance between the paste ejection port of the nozzle and the surface of the substrate, the height of the nozzle can be corrected from the measured data when the paste pattern is formed. By calculating the measurement data of the measuring means, the coating height and the coating width of the drawn pattern can be obtained. Therefore, by comparing these coating heights and coating widths with the set allowable values, it is possible to easily determine whether the drawn and formed paste pattern is acceptable. Further, if the coating height and the coating width are known, the sectional shape and sectional area of the drawn pattern can be easily obtained.

[0008]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a schematic perspective view showing an embodiment of a paste coating machine according to the present invention, in which 1 is a nozzle and 2 is a paste.
Stroke storage cylinder (or syringe), 3 is an optical rangefinder, 4
Is a Z-axis table, 5 is an X-axis table, 6 is a Y-axis table, 7 is a substrate, 8 is a θ-axis table, 9 is a mount part, 10 is a Z-axis table support part, 11a is an image recognition camera, 11b.
Is a lens barrel of the image recognition camera 11a, 12 is a nozzle support, 13 is a suction base of the substrate 7, 14 is a control device, and 15a to 15a.
Reference numeral 15c is a servo motor, 16 is a monitor, and 17 is a keyboard.

In FIG. 1, an X-axis table 5 is fixed on a gantry 9, and a Y-axis table 6 is mounted on the X-axis table 5 so as to be movable in the X-axis direction. The θ-axis table 8 is mounted on the Y-axis table 6 so as to be movable and rotatable in the Y-axis direction, and the suction table 13 is fixed on the θ-axis table 8. The substrate 7 is sucked and fixed onto the suction table 13 so that, for example, each side thereof is parallel to the X and Y axes.

The substrate 7 mounted on the suction table 13 can be moved in the X and Y axis directions by the control drive of the controller 14. That is, when the servo motor 15b is driven by the controller 14, the Y-axis table 6 moves in the X-axis direction and the substrate 7 moves in the X-axis direction, and the servo motor 1
When 5c is driven, the θ-axis table 8 moves in the Y-axis direction and the substrate 7 moves in the Y-axis direction. Therefore, when the controller 14 moves the Y-axis table 6 and the θ-axis table 8 respectively by arbitrary distances, the substrate 7 moves by an arbitrary distance in an arbitrary direction within a plane parallel to the pedestal portion 9. Become. It should be noted that the θ-axis table 8 can be rotated by an arbitrary amount in the θ direction about its center position by the servo motor 15d shown in FIG.

A Z-axis table support portion 10 is installed on the pedestal portion 9, and a Z-axis table 4 is attached to the Z-axis table support portion 10 so as to be movable in the Z-axis direction (vertical direction). Then, on the Z-axis table 4, the nozzle 1, the paste container 2, and the optical distance meter 3 are placed. The control device 14 also controls and drives the Z-axis table 4 in the Z-axis direction. That is, when the servomotor 15a is driven by the controller 14, the Z-axis table 4 moves in the Z-axis direction,
Along with this, the nozzle 1, the paste container 2, and the optical range finder 3 move in the Z-axis direction. The nozzle 1 is provided at the tip of the paste storage cylinder 2, but the nozzle 1 and the lower end of the paste storage cylinder 2 are provided with a nozzle support 12 having a connecting portion.
A little farther through.

The optical rangefinder 3 has a tip (lower end) of the nozzle 1.
The distance between the paste discharge port and the upper surface of the substrate 7 is
It is measured by non-contact triangulation.

That is, as shown in FIG. 2, the optical rangefinder 3
Is cut in a triangular shape, and a light emitting element is provided on one of the two slopes facing the cut portion and a light receiving element is provided on the other. The nozzle support 12 is attached to the tip of the paste storage cylinder 2 and is attached to the optical rangefinder 3
The nozzle 1 is attached to the lower surface of the distal end portion of the nozzle 1 extending below the cut portion. Optical distance meter 3
The light emitting element provided in the notch section irradiates the area immediately below the paste ejection port as indicated by the alternate long and short dash line, and the light receiving element receives the reflected light from the area.
When the distance between the paste ejection port of the nozzle 1 and the substrate 7 (see FIG. 1) arranged below the ejection port is within a predetermined range, the light from the light emitting element is received by the light receiving element. As described above, when the positional relationship between the nozzle 1 and the optical distance meter 3 is set, and the distance between the paste ejection port of the nozzle 1 and the substrate 7 changes, the light emitting element is provided immediately below the ejection port. Since the position of the irradiation point (hereinafter referred to as a measurement point) of the light from the substrate on the substrate 7 is changed, and the light receiving state of the light receiving element is changed, the paste discharge port of the nozzle 1 and the substrate 7 are changed. The distance of can be measured.

As will be described later, when the substrate 7 moves in the X- and Y-axis directions to form a paste pattern, the irradiation point of light from the light emitting element on the substrate 7 (hereinafter referred to as measurement point). ) Crosses the already formed paste pattern, an error due to the thickness of the paste pattern occurs in the measurement value of the distance between the paste discharge port of the nozzle 1 and the surface of the substrate 7 by the optical distance meter 3. Therefore, in order to prevent the measurement point from crossing the paste pattern as much as possible, a position shifted from the paste dropping point (hereinafter referred to as a coating point) from the nozzle 1 onto the substrate 7 in an oblique direction with respect to the X and Y axes. Should be used as the measurement point.

FIG. 3 is an explanatory view showing the relationship between the measurement range MR of the optical range finder 3 and the mounting position of the nozzle 1 on a vertical plane. As shown in the figure, the paste discharge port at the tip of the nozzle 1 is arranged between the center C and the upper limit U of the measurement range MR of the optical rangefinder 3, and the substrate 7 on which the paste pattern PP is drawn is If it is placed below the discharge port and above the lower limit L of the measurement range MR, the height position of the surface of the substrate 7 in the vicinity of directly below the nozzle 1 is determined by an optical method using the nozzle 1 as a reference. The distance meter 3 can make non-contact measurement.

When the paste in the paste accommodating cylinder 2 is used up, the nozzle is replaced and the coating point is applied to the substrate 7.
The nozzle 1 is attached so as to match a certain set position where the above paste is to be applied. However, due to variations in the attachment accuracy of the paste storage cylinder 2, the nozzle support 12, and the nozzle 1, etc., before and after nozzle replacement. The position of the nozzle 1 may change. However, as shown in FIG. 2, when the application point is within an allowable range (ΔX, ΔY) of a preset size centered on the set position, the nozzle 1 is assumed to be normally attached. However, ΔX is the width in the X-axis direction of the allowable range, and ΔY is the width in the Y-axis direction.

When data is supplied from the optical rangefinder 3 or the image recognition camera 11a, the control device 14 responds to the data by the servomotors 15a, 15b, 15c and the servomotor 15d for rotating the θ-axis table (see FIG. 4)). In addition, encoders provided in these servo motors provide data on the drive status of each motor to the control device 1.
Feedback to 4.

In such a configuration, the rectangular substrate 7
Is placed on the suction table 13, the suction table 13 holds the substrate 7 by vacuum suction. Then, by rotating the θ-axis table 8, the respective sides of the substrate 7 are set to be parallel to the X and Y axes, respectively. Then, the servo motor 15a is driven and controlled based on the measurement result of the optical distance meter 3, so that the Z-axis table 4 moves downward, and the Z-axis table 4 moves downward between the paste discharge port of the nozzle 1 and the surface of the substrate 7. The nozzle 1 is lowered from above the substrate 7 until the distance reaches a specified distance.

After that, the paste supplied from the paste container 2 through the nozzle support 12 is discharged from the paste discharge port of the nozzle 1 onto the substrate 7, and along with this, the Y table is controlled by the drive control of the servomotors 15b and 15c. 6 and the θ-axis table 8 are appropriately moved, whereby the substrate 7 is moved.
The paste is applied on the pattern of the desired shape. Since the paste pattern to be formed can be converted by the distances in the X and Y axis directions, when the data for forming the pattern of the desired shape is input from the keyboard 17, the control device 1
Reference numeral 4 converts the data into the number of pulses given to the servomotors 15b and 15c, outputs a command, and drawing is automatically performed.

FIG. 4 is a block diagram showing a specific example of the control device 14 in FIG. 1, in which 14a is a microcomputer, 14b is a motor controller, 14ca is a Z-axis driver, 14cb is an X-axis driver, and 14cc is a Y-axis. A driver, 14 cd is a θ-axis driver, 14 d is an image processing device, 14 e is an external interface, 15 d is a servo motor for θ-axis table rotation, and 18 is a conversion for A-D converting the measurement result (distance) of the optical rangefinder 3. A container and E are encoders, and parts corresponding to those in FIG. 1 are denoted by the same reference numerals.

More specifically, the control device 14 includes a microcomputer 14a containing a ROM storing a processing program, a RAM storing various data, a CPU for calculating various data, and each servo motor 15a.
˜15d motor controller 14b, servomotors 15a to 15d drivers 14ca to 14cd, an image processing device 14d that processes an image read by the image recognition camera 11a, the image processing device 14d, the keyboard 17 and the AD. An external interface 14e to which the converter 18 and the like are connected is provided. Data indicating the paste drawing pattern from the keyboard 17 and nozzle replacement,
The data measured by the optical range finder 3 and various data generated by the processing of the microcomputer 14a are stored in the RAM built in the microcomputer 14a.

Next, the paste coating operation and the processing operation of the control unit 14 in determining the shape of the paste pattern drawn by coating will be described. In the flowcharts of FIG. 5 and subsequent figures, the symbol S in the figure means a step.

In FIG. 5, when the power is turned on (step 100), the initial setting of the paste applicator is executed (step 200). This initial setting is, as shown in FIG. 6, a Y-axis table 6, a θ-axis table 8 and a Z-axis table 4.
Etc. at the predetermined origin position (Step 2
01), paste pattern data and substrate 7 position data
Data is set (step 202), and the ejection end position data of the paste and the shape measurement data are set (step 20).
3) and the data input for setting is key.
It starts from the board 17. The setting of the shape measurement data performed in step 203 is performed by setting the number of measurement points, the start and end positions of each measurement point, the number of measurement points (sampling number) at each measurement point, and the like. is there. Also,
The data thus inputted from the keyboard 17 is the RA built in the microcomputer 14a as described above.
Stored in M.

After the above initial setting process is completed, in FIG. 5, the substrate 7 for drawing the paste pattern is mounted on the suction table 13 and held by suction (step 300), and the substrate preliminary positioning process is performed (step 400). ).

The step 400 will be described in detail below with reference to FIG.

In FIG. 7, first, the positioning marks (plurality) previously attached to the substrate 7 mounted on the suction table 13 are photographed by the image recognition camera 11a (step 40).
1), the barycentric position of the positioning mark in the visual field of the image recognition camera 11a is obtained by image processing (step 40).
2). Then, the amount of deviation between the center of the field of view and the position of the center of gravity of the positioning mark is calculated (step 403), and this amount of deviation is used to move the Y-axis table 6 required to move the substrate 7 to the desired position. And the amount of movement of the θ-axis table 8 is calculated (step 404). Then, these calculated movement amounts are converted into the operation amounts of the servo motors 15b to 15d (step 405), and the servo motors 15b to 15d are driven according to the operation amounts to move the tables 6 and 8. The substrate 7 moves toward the desired position (step 406).

Along with this movement, the positioning mark on the substrate 7 is again photographed by the image recognition camera 11a, and the center (center of gravity position) of the positioning mark within the field of view is measured (step 407). , The deviation between the center of the field of view and the center of the mark is obtained, and this deviation is stored in the RAM of the microcomputer 14a as the positional deviation amount of the substrate 7 (step 40).
8). Then, it is confirmed whether or not the positional deviation amount is within a range of, for example, 1/2 or less of the allowable range described in FIG. 2 (step 409). If it is within this range, step 4
This means that the processing of 00 has been completed. If it is out of this range, the process returns to step 404 and the above-mentioned series of processes is performed again, and the process is repeated until the positional deviation amount of the substrate 7 falls within the range of the above value.

As a result, the substrate 7 is positioned so that the coating point on the substrate 7 which is about to start coating does not deviate beyond the predetermined range from directly below the paste discharge port of the nozzle 1. become.

Referring again to FIG. 5, when the process of step 400 is completed, the process proceeds to the paste film forming process (process) of step 500. This will be described below with reference to FIG.

In FIG. 8, first, the substrate 7 is moved to the coating start position.
Is moved (step 501), and then the height of the nozzle 1 is set (step 502). That is, the distance from the discharge port of the nozzle 1 to the surface of the substrate 7 is set to be equal to the thickness of the paste film to be formed. Since the substrate 7 is positioned at the desired position in the substrate preliminary positioning process (step 400 in FIG. 5) described above, the above step 50 is performed.
In No. 1, the substrate 7 can be accurately moved to the coating start position, and the process proceeds to step 503, where the nozzle 1 starts the ejection of the paste from this coating start position.

Then, the undulation of the surface of the substrate 7 is measured by inputting the measured data of the facing distance between the paste discharge port of the nozzle 1 and the substrate 7 by the optical distance meter 3 (step 504). Further, it is judged from this measured data whether or not the above-mentioned measurement point of the optical distance meter 3 crosses over the paste film (step 505). For example, when the measured data of the optical distance meter 3 deviates from the set tolerance value of the facing distance, it is determined that the measurement point is on the paste film.

When the measuring point of the optical range finder 3 is not on the paste film, the correction data for moving the Z-axis table 4 is calculated based on the measured data (step 50).
6). Then, the height of the nozzle 1 is corrected using the Z-axis table 4, and the position of the nozzle 1 in the Z-axis direction is maintained at the set value (step 507). On the other hand, when it is determined that the measurement point is passing over the paste film, the height of the nozzle 1 is not corrected and the height before the determination is maintained. It should be noted that when the measurement point is passing over the paste film having a slight width, the swell of the substrate 7 hardly changes, so the nozzle 1
Even if the height correction is not performed, there is no change in the ejection shape of the paste, and a paste pattern having a desired thickness can be drawn.

Next, it is judged whether or not the set pattern operation is completed (step 508). If it is completed, the paste ejection is terminated (step 509), and if it is not completed, the paste ejection is continued while returning to the substrate surface waviness measurement processing (step 504). Therefore, when the measurement point has finished passing over the paste film, the height correction process of the nozzle 1 described above is restarted. Note that step 508 is a processing operation for determining whether or not the end point of the paste pattern which has been continuously drawn until then is reached, and this end point is not necessarily the desired shape to be drawn on the substrate 7. It is not the end of the overall pattern. That is, the pattern of the entire desired shape may be composed of a plurality of partial patterns that are separated from each other, and it is determined in step 511 whether or not the end points of all patterns including all of them have been reached. In addition, before moving to step 511, the Z-axis table 4 is read at step 510.
Is driven to raise the nozzle 1 to the retracted position. When it is determined in step 511 that the partial patterns have been formed but the drawing of all the patterns has not been completed,
The substrate 7 is again moved to the coating start position (step 50
1), the above series of steps are repeated.

In this way, when the paste film is formed over the entire pattern of the desired shape, the paste film forming step (step 500) is completed.

Referring again to FIG. 5, when the process of step 500 is completed, the process proceeds to step 550, and it is determined whether or not the cross-sectional shape of the drawn and formed paste film is to be measured. The process proceeds to the process (step 600), and if not performed, the process proceeds to the substrate discharging process (step 800).

The cross-sectional shape measuring step (step 600) of the paste film will be described below with reference to FIG.

First, the substrate 7 on which the paste pattern is drawn
Is moved to the measurement start position (step 601), and the height of the optical rangefinder 3 is set (step 602). Then, from the measurement start position, the height of the substrate surface (paste pattern surface) is measured by the optical distance meter 3 (step 603), and the measurement result is stored in the RAM of the microcomputer 14a (step 604). Then substrate 7
Is moved to the next measurement point by pitch (step 605).
The distance of such pitch movement is based on setting data that divides the shape measurement section into n equal parts. If the value of n is increased, the number of measurement points (sampling number) increases. Next, it is determined whether or not the height measurement in the shape measurement section is completed (step 60).
6) If not finished, the process returns to step 603, and the height of the substrate surface is measured at a new measurement point. Therefore, when n + 1 times are moved back and forth between step 603 and step 606, the measurement in this shape measurement section ends. Since the measurement data by the optical distance meter 3 is a discrete value for each pitch and is not a continuous value, the number of measurement points increases as the value of n increases, and the cross-sectional shape of the drawn pattern in the measurement section is increased. The judgment result of will be accurate.

When the measurement in the shape measurement section is completed,
The optical distance meter 3 is raised (step 607), and it is determined in step 608 whether or not the measurement is completed for all preset measurement points. If not, the step of moving the substrate 7 to the measurement start position. Back to 601
A series of processes up to step 607 is repeated. Then, if the measurement is completed at all the measurement points, the sectional shape measuring step (step 600) is ended, and the procedure moves to the sectional shape determining step (step 700) in FIG.

The cross-sectional shape determining step (step 700) will be described below with reference to FIG.

First, in step 701, the inclination of the measurement result is corrected. That is, the gantry unit 9 of FIG.
Is supposed to be installed horizontally, so the measurement result of the optical distance meter 3 measuring the height of the substrate surface is as shown in FIG.
As shown in FIG. 1A, the height position of the substrate surface should be maintained at the zero level in the paste film absent region.
As shown in (b) and (c), the measurement result may rise to the right or fall to the right. Therefore, the shape measurement section M
From the difference between the measurement data Ds at the measurement start position and the measurement data De at the measurement end position in A, the inclination of the substrate surface necessary for correcting the measurement result is obtained, and the error in the measurement data due to this inclination is eliminated. In order to do so, a correction process is performed in step 701. Note that, in FIG. 11, the measurement data are shown as continuous values for the sake of convenience, but the measurement data are discrete values as described above.

Next, the zero-cross positions P1 and P2 are obtained from the measurement data whose inclination has been corrected, and these zero-cross positions P are obtained.
The interval between 1 and P2 is obtained, and the interval is set as the coating width of the paste pattern (step 702). After that, the inclination-corrected measurement data (each discrete value) is sequentially compared between the measurement start position measurement data Ds and the measurement end position measurement data De to obtain the maximum value. Is the coating height Dh of the paste pattern (step 703).

Next, in step 704, the coating width (P2-P1) and the coating height Dh of the paste pattern obtained in the processes of steps 702 and 703 are set to the preset reference value values. -It is determined whether or not it is within the reference value by comparing with If it is out of the standard value,
In step 705, abnormality processing such as displaying the details of the abnormality on the monitor 16 of FIG. 1 is performed. Then, if it is within the reference value or if the abnormality processing is completed, step 706.
To determine whether or not the sectional shape determination processing of all measurement points is completed. If not completed, return to step 701 to repeat the series of processing described above, and if completed, determine the shape of all measurement points. Display the results (step 70
7), the cross-sectional shape determination step (step 700) is completed.

Referring again to FIG. 5, step 70 described above.
When 0 is completed, the process proceeds to step 800, where the substrate discharge process is performed, and the substrate 7 is removed from the suction table 13. Thereafter, it is determined whether or not all the above steps are stopped (step 900), and when a paste is applied and drawn on another substrate with the same pattern, the process returns to step 300 and the substrate is processed. A series of steps 300 to 900 is repeated.

As described above, in the above embodiment, the optical distance meter 3 for measuring the data necessary for the height correction of the nozzle 1 in the paste film forming step (step 500) is used, and the drawing formation is performed after the paste film formation. Since the sectional shape of the paste film can be determined (steps 600 and 700), efficient quality control can be performed.

For example, in the case of manufacturing a liquid crystal display device, the seal agent formed by drawing is a kamaboko-shaped paste pattern PP having a desired width and height as shown in FIG. 12 (a). If so, a sufficient sealing effect can be expected when the glass substrates are bonded to each other, but FIGS.
As shown in FIG. 7, if either the coating width or the coating height of the paste pattern PP is not a desired value, a sufficient sealing effect cannot be expected. That is, as shown in FIG. 12B, when the coating width is undesirably reduced, pattern breakage is likely to occur and a seal defect is likely to occur, and when the paste pattern PP is a resistance paste. Causes high resistance and disconnection.
Further, as shown in FIG. 12 (c), when a recess is formed in the central portion and the coating height is insufficient, the recess is confined between the two glass substrates when the two glass substrates are bonded together. It becomes voids and reduces the sealing effect. Further, although not shown, if the width or height of the paste pattern is larger than a desired value, the resistance paste causes a reduction in resistance or a short circuit. When the two glass substrates are bonded together, the excess sealant is liable to protrude to the side, which easily causes a display defect such that the TFT provided on the glass substrate is covered with the sealant.

Therefore, when the coating width and coating height of the drawn pattern deviates from the permissible values, the cross-sectional shape can be displayed on the monitor 16 so as to be confirmed.
The finished state of the product to be manufactured can be estimated, and good products and defective products can be sorted in the middle of the manufacturing process, so that efficient quality control can be performed and the productivity can be greatly improved. Moreover, since it is possible to move directly to the cross-sectional shape determination process of the drawn pattern without removing the substrate on which the paste pattern is applied and drawn from the device or replacing the parts of the device, it is complicated for the judgment. No preparation work is required and there is no need to worry about complicating the production line.

When the application height of the paste pattern is 0, it means that the pattern is cut off. As a cause of the pattern cut, the paste in the paste storage cylinder 2 is consumed. Since there is a possibility that it has been done, if the abnormal coating height is displayed on the monitor 16 and confirmed, the remaining amount of the paste in the paste storage cylinder 2 can be checked.

Finally, with reference to FIG. 13, the arithmetic processing of the microcomputer 14a (see FIG. 4) for displaying the cross-sectional shape of the drawn pattern will be described.

In FIG. 13, MPx indicated by black dots is a measurement point at each pitch obtained by dividing the shape measurement section into n equal parts, and Hx is a measurement data of the coating height of the drawn pattern obtained at each measurement point MPx. Data and each measurement data Hx
Are stored in the RAM of the microcomputer 14a. Therefore, by sequentially (in time series) displaying each measurement data Hx on the monitor 16, the contour of the cross-sectional shape of the drawn pattern can be displayed.

When the cross-sectional area is displayed in addition to the display of the cross-sectional shape, the following processing is performed. That is, assuming that the interval of each pitch obtained by dividing the shape measurement section into n equal parts is Wx, the application height of the drawn pattern can be regarded as equivalent within the range of each pitch interval Wx. , The product of each measurement data Hx stored in the RAM of the micro computer 14a and the pitch interval Wx is summed up to obtain the value of Σ (Wx × Hx], the drawing shown by the broken line in FIG. A cross-sectional area approximate to the area of the actual cross-sectional shape of the pattern can be obtained, and the approximation degree can be increased by setting the equal fraction n large.

By making it possible to grasp the cross-sectional area of the drawn pattern in this way, it is effective to confirm whether or not the desired resistance value is obtained, especially when the resistance paste is drawn. In other words, in the case of the resistance paste, the desired resistance value can be obtained if the cross-sectional area is within the allowable value even if the width and height of the pattern deviate from the desired values.
In the cross-sectional shape determination step (step 700) described above, instead of determining whether the coating width or coating height is within the reference value, it may be determined whether the cross-sectional area is within the reference value.

The initial setting process of the applicator (step 20)
0) In order to shorten the time required, the external interface 14e (see FIG. 4) is loaded with an IC card or an external storage means such as a floppy disk or a hard disk. Connected to the equipment, on the other hand, previously set the data necessary for the initial setting process of the applicator with a personal computer, and connected to the external interface 14e during the initial setting process of the applicator. Various data may be transferred from the external storage means to the RAM of the microcomputer 14a via the storage / readout device.
Further, the measured data is stored in an IC card or an external storage means such as a floppy disk or a hard disk to enlarge the memory capacity of the RAM of the microcomputer 14a or to judge the judgment result. The data may be stored in an external storage means so that it can be used at a later date.

[0054]

As described above, the paste applicator according to the present invention uses the data of the measuring means for measuring the facing distance between the paste discharge port of the nozzle and the surface of the substrate to draw and form the pattern on the substrate. -By calculating the coating height and coating width of the strike pattern, it is possible to easily determine whether or not the drawn pattern has a desired cross-sectional shape or cross-sectional area, so efficient quality control can be performed and determination can be performed. Since it does not require complicated preparatory work for, it is extremely important to contribute to productivity improvement.

[Brief description of drawings]

FIG. 1 is a schematic perspective view showing an embodiment of a paste applicator according to the present invention.

FIG. 2 is a perspective view showing a positional relationship between a nozzle and an optical distance meter of the embodiment.

FIG. 3 is a perspective view showing a relationship between a mounting position of a nozzle and a measurement range of an optical distance meter in the same embodiment as a vertical plane.

FIG. 4 is a block diagram showing a specific example of a control device of the same embodiment.

FIG. 5 is a flowchart showing the overall operation of the same embodiment.

FIG. 6 is a flowchart showing an initial setting process of the paste applicator in FIG.

FIG. 7 is a flowchart showing a substrate preliminary positioning process in FIG.

8 is a flowchart showing a paste film forming process in FIG.

9 is a flowchart showing a cross-sectional shape measuring process of the paste film in FIG.

10 is a flowchart showing a cross-sectional shape determination process of the paste film in FIG.

FIG. 11 is a view for explaining the data processing for calculating the coating height and coating width of the drawn pattern in the same example.

FIG. 12 is a diagram showing a specific example of a case where a cross-sectional shape of a drawn paste pattern is desired or undesired.

FIG. 13 is a diagram for explaining the data processing for determining the cross-sectional shape and cross-sectional area of the drawn pattern in the embodiment.

[Explanation of symbols]

 1 Nozzle 2 Paste Storage Cylinder 3 Optical Distance Meter 4 Z-axis Table 5 X-axis Table 6 Y-axis Table 7 Substrate 8 θ-axis Table 9 Stand 10 Z-axis Table Support 11a Image recognition camera 12 Nozzle support 13 Suction table 14 Control device 15a to 15d Servo motor 16 Monitor 17 Key board

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Fukuo Yoneda 5-2, Koyodai, Ryugasaki-shi, Ibaraki Hitachi Techno Engineering Co., Ltd. R & D Laboratory (72) Shozo Igarashi 5-2, Koyodai, Ryugasaki-shi, Ibaraki Hitachi Techno Engineering Co., Ltd. Ryugasaki Factory

Claims (6)

[Claims] 1. A substrate is placed on a table so as to face a paste discharge port of a nozzle, and the nozzle and the substrate are separated from each other while discharging the paste filled in the paste storage cylinder from the discharge port onto the substrate. In a paste coating machine that changes and forms a relative positional relationship to draw and form a paste pattern of a desired shape on the substrate, a measuring unit that measures a facing distance between the paste discharge port of the nozzle and the surface of the substrate, and the measuring unit. And moving means for relatively moving the substrate along the surface of the substrate, and measurement data of the measuring means during the relative movement.
And a cross-section capturing means for calculating a coating height and a coating width of a drawn paste pattern using a paste coating machine. 2. The data processing apparatus according to claim 1, wherein the cross-section capturing means removes an inclination of the surface of the substrate obtained by comparing and calculating the measurement data at both the measurement start time and the measurement end time. A paste applicator, which is equipped with a correction means capable of correcting data. 3. The coating width of the drawn paste pattern is obtained from the distance between two zero-cross measurement points of the measurement data corrected by the correction means by the cross-section capturing means. A paste applicator characterized by being a thing. 4. The cross-section capturing means according to claim 2, wherein the coating height of the drawn paste pattern is determined by sequentially comparing the measurement data corrected by the correction means. And paste applicator. 5. The cross-section capturing means according to claim 2, wherein the measurement data corrected by the correction means is arranged in time series to obtain a contour approximate to the cross-sectional shape of the drawn paste pattern, and A paste coating machine comprising a contour display means for displaying a contour on a monitor. 6. The cross-section capturing means according to claim 1 or 2, wherein the applied width of the drawn paste pattern is
An abnormality determining means for determining whether or not at least one of the coating height and the cross-sectional area is within a setting allowable range,
A paste applicator comprising: an abnormality processing unit that performs abnormality processing when the abnormality determination unit determines that the abnormality is outside the allowable range.