KR101364661B1 - Apparatus for applying paste and method of applying paste - Google Patents

Abstract

An object of this invention is to raise the measurement precision of the application | coating height of a paste, and to improve the quality of an application | coating product.
The paste application device 1 is provided integrally with the plurality of application heads 3a for applying the paste to the surface to be coated of the application object W, and the application heads 3a, respectively, to measure the displacement of the application surface. A plurality of laser displacement meters 3c and a control unit for controlling are provided. At least one of the plurality of laser displacement meters 3c is arranged such that the optical path surface follows one straight line of two straight lines in the coating pattern, and at least the other is arranged such that the optical path surface follows the other straight line of the two straight lines. . When the control unit measures the coating height of the paste for forming the coating pattern drawn on the surface to be coated, the control unit uses the laser displacement gauge 3c having the optical path surface along the stretching direction of the linear paste in the coating pattern. Control to move in the direction intersecting with the stretching direction of is performed.

Description

Paste application device and paste application method {APPARATUS FOR APPLYING PASTE AND METHOD OF APPLYING PASTE}

Embodiment of this invention relates to the paste application apparatus and paste application method which apply | coat a paste to a coating object.

The paste coating device is used to manufacture various devices such as a liquid crystal display panel. This paste application apparatus is equipped with the application | coating head which apply | coats a paste to an application | coating object, apply | coats a paste to the to-be-coated surface of an application object, moving the application head, and forms a predetermined | prescribed paste pattern on an application object. For example, in manufacture of a liquid crystal display panel, the sealing compound which has sealing property and adhesiveness as a paste is apply | coated in rectangular frame shape to the to-be-coated surface of application objects, such as a board | substrate.

In such a paste coating device, the cross-sectional area of the paste coated in a linear pattern on the surface to be coated of the coating object can be obtained (see Patent Document 1, for example). In this measurement, the coating height of the paste is measured by a laser displacement meter. The laser displacement meter is a measuring instrument using a triangulation method, and a measuring instrument for measuring the distance between the tip of the nozzle and the upper surface of the substrate is also used as the laser displacement meter.

[Patent Document 1] Japanese Patent Application Laid-Open No. 7-275770

However, the laser displacement meter described above is fixed to the application head in a predetermined arrangement direction. In addition, the cross-sectional shape of the paste apply | coated linearly is semi-ellipse, and the surface is curved. Therefore, when measuring the application | coating height of a paste, depending on the relationship of the arrangement direction of a laser displacement meter and the extending | stretching direction of a paste, the application | coating height of a paste may not be measured accurately. In this case, it is difficult to obtain an accurate coating height of the paste, and a defective product that is not coated with a desired coating amount is judged to be good and used for the manufacture of the next step. As a result, the quality of the coated product is deteriorated.

This invention is made | formed in view of the above, The objective is to provide the paste application | coating apparatus and paste application method which can improve the measurement precision of the application | coating height of a paste, and can improve the quality of an application | coating product.

The paste application device according to the present embodiment is integrally provided at each of a plurality of coating heads each having a nozzle for discharging the paste toward the surface to be coated of the coating object, and a plurality of coating heads, and the displacement of the surface to be coated is determined by the laser beam. A plurality of laser displacement meters which can be measured by light transmission / reception and differ in the light transmission path and the light receiving path of the laser beam, and the object to be applied and the plurality of application heads are relatively moved in a direction along the surface to be coated and in a direction crossing the surface to be coated. The application head and the application head to move the application object and the application head relative to the application surface in a direction along the surface to be coated so as to draw an application pattern having a shape having two straight lines intersecting the application surface with paste discharged from the nozzle. The figure is based on the measured value of the laser displacement meter which controls the movement drive part and corresponds to an application head. And a control unit for controlling the moving drive unit to maintain the separation distance between the tip of the nozzle of the head and the surface to be coated at a set value, and at least one of the plurality of laser displacement meters includes an optical path surface including a light transmitting path and a light receiving path. It is arrange | positioned so that one straight line of two straight lines may exist, and at least another one of the some laser displacement meters is arrange | positioned so that an optical path surface may follow the other straight line of two straight lines.

The paste coating device according to the present embodiment is provided integrally with the coating head having a nozzle for discharging the paste toward the surface to be coated of the object to be coated and the coating head, and the displacement of the surface to be coated is measured by light emission / reception of the laser beam. The laser displacement meter which is different from the light transmission path of the laser beam and the light receiving path, a moving drive unit which relatively moves the object to be coated and the application head in the direction along the surface to be coated and the direction intersecting the surface to be coated, and the laser displacement meter on the surface to be coated. The application pattern of the shape which has two straight lines of a positional relationship which intersects the to-be-coated surface with the paste discharged from a nozzle by rotating the rotation drive part which rotates to a direction to follow, and a coating object and a coating head to the direction along a to-be-coated surface, The application head and the moving drive are controlled to draw, based on the measured values of the laser displacement meter. The control part which controls a movement drive part so that the clearance distance of the front end of a nozzle and a to-be-coated surface is set to a set value, and when a measurement height of the application | coating height of the paste drawn on the to-be-coated surface is measured, either of the two straight lines of an application | coating pattern Also, the optical path surface including the light transmission path and the light receiving path of the laser displacement meter is arranged along the stretching direction of the paste applied in a straight line in the coating pattern, and the laser displacement meter in that state intersects with the stretching direction of the paste coated in a straight line. The rotation driving unit and the moving driving unit are controlled to move in the direction to be adjusted.

In the paste coating method according to the present embodiment, two straight lines having a positional relationship intersecting the coated object and the coating head in the direction along the surface to be coated of the coating object and intersecting the surface to be coated by the paste discharged from the nozzle of the coating head. A laser displacement meter which is formed integrally with the application head at the time of drawing and drawing an application pattern having a shape having a shape of a shape, wherein the displacement of the surface to be coated can be measured by the light transmission / reception of the laser light, and the light transmission path and the light reception path of the laser light. Is a paste coating method for maintaining the separation distance between the tip of a nozzle and the surface to be coated at a set value based on a measured value of a laser displacement meter different from each other, when measuring the coating height of the paste drawn on the surface to be coated, two straight lines of the coating pattern. In any of the above, the optical path surface including the light transmitting path and the light receiving path of the laser displacement meter is used in the coating pattern. It follows along the extending | stretching direction of the paste apply | coated linearly, the laser displacement meter in that state is moved to the direction which cross | intersects the extending | stretching direction of the paste apply | coated linearly, and the application | coating height of a paste is measured.

According to the present invention, the measurement accuracy of the coating height of the paste can be increased to improve the quality of the coated product.

1 is a front view showing a schematic configuration of a paste coating device according to a first embodiment.
FIG. 2 is a plan view showing a schematic configuration of the paste coating device shown in FIG. 1. FIG.
It is explanatory drawing for demonstrating the measuring method of the application | coating height of the paste by the laser displacement meter with which the paste application apparatus shown in FIG. 1 and FIG. 2 is equipped.
It is explanatory drawing for demonstrating the measured value of the application | coating height of the paste by the measurement shown in FIG.
It is explanatory drawing for demonstrating the measurement of the application height of the paste of a comparative example.
It is explanatory drawing for demonstrating the measured value of the application | coating height of the paste by the measurement shown in FIG.
FIG. 7 is a flowchart showing the flow of a paste coating operation performed by the paste coating apparatus shown in FIGS. 1 and 2.
It is explanatory drawing for demonstrating the measuring position of the application | coating height of the paste in the paste application | coating operation shown in FIG.
It is a top view which shows schematic structure of the laser displacement meter with which the paste application apparatus which concerns on 2nd Embodiment is equipped.

(First embodiment)

The first embodiment will be described with reference to FIGS. 1 to 8.

As shown in FIG. 1 and FIG. 2, the paste coating device 1 according to the first embodiment includes a stage 2 on which an application object W is disposed, and an application object W on the stage 2. A plurality of application units 3A to 3D for applying the paste to the individual, a plurality of X-axis movement devices 4A and 4B for moving the respective application units 3A to 3D in the X-axis direction, and these X-axis movements A plurality of supports 5A and 5B for supporting the devices 4A and 4B, Y-axis moving devices 6A and 6B for moving these supports 5A and 5B in the Y-axis direction, and a stage 2 or Y The mount 7 which supports 6 A, 6B, etc., and the control part 8 which controls each part is provided.

The stage 2 has an arrangement surface on which the application object W is disposed, and is fixed to the upper surface of the mount 7. In this stage 2, the coating object W, such as a glass substrate used for manufacture of a liquid crystal display panel, is arrange | positioned by self weight. However, the present invention is not limited to this. For example, in order to hold the application object W, a mechanism such as an electrostatic chuck or an adsorption chuck may be provided.

Each coating unit 3A-3D has the coating head 3a which discharges paste, such as a sealing compound which has sealing property and adhesiveness, and the Z-axis moving apparatus which moves the coating head 3a to a Z-axis direction ( 3b), the laser displacement meter 3c for measuring the separation distance of the application | coating object W which is a measurement object by light transmission / reception of a laser beam, and the imaging part 3d for positioning of the application object W separately. Equipped.

The application head 3a is provided with a receiving cylinder such as a syringe having a nozzle 3a1 for discharging the paste. This application head 3a is connected to a gas supply part (all not shown) through a gas supply tube etc. Moreover, the application head 3a discharges the paste accommodated in the inside from the nozzle 3a1 by the gas supplied to the inside of the syringe mentioned above.

The Z-axis moving device 3b supports the application head 3a, the laser displacement meter 3c, and the imaging unit 3d, and is installed in the X-axis moving device 4A or 4B. The Z-axis moving device 3b supports one application head 3a and is applied to the Z axis direction orthogonal to the surface to be coated of the application target W on the stage 2, that is, the stage 2. It is a moving device which moves 3a in the contact / separation direction (Z-axis direction) which contacts / separates. This Z-axis moving apparatus 3b is electrically connected to the control part 8, and the drive is controlled by the control part 8. As shown in FIG. As the Z-axis moving device 3b, for example, a feed screw moving device using a servo motor as a drive source, a linear motor moving device using a linear motor as a drive source, and the like are used.

The laser displacement meter 3c is a distance measuring device using a triangulation method, and includes a light transmitting part 3c1 such as a semiconductor laser that emits laser light, and a light receiving part 3c2 such as a semiconductor position detecting element that receives laser light (reflected light). It is equipped (refer FIG. 2). This laser displacement meter 3c is electrically connected to the control part 8, and inputs the measured separation distance (measured value) to the control part 8.

As shown in FIG. 3, the light transmitting portion 3c1 and the light receiving portion 3c2 are arranged to be positioned on the same straight line in plan view. The laser light is emitted from the light transmitting portion 3c1 toward the surface to be coated of the application target W on the stage 2, and is reflected by the surface to be coated and received by the light receiving portion 3c2. A plane including the light path of the laser beam and the light path of the laser light is different from each other, and is called an optical path surface. Further, the arrangement direction in which the light transmitting portion 3c1 and the light receiving portion 3c2 are arranged on the same straight line, that is, the direction along the optical path surface, is the arrangement direction.

Here, the laser displacement meter 3c of the application unit 3A and the laser displacement meter 3c of the application unit 3B are arranged in the arrangement direction of the light transmitting part 3c1 and the light receiving part 3c2, that is, the optical path of light transmission / reception of laser light. It is arrange | positioned so that the optical path surfaces containing may cross | intersect each other, for example, intersecting (orthogonally) by 90 degrees. More specifically, the laser displacement meter 3c of the coating unit 3A is attached so that the above-mentioned arrangement direction is along the Y-axis direction. In addition, the laser displacement meter 3c of the coating unit 3B is attached so that the above-mentioned arrangement direction may follow the X-axis direction.

Similarly, the laser displacement meter 3c of the coating unit 3C and the laser displacement meter 3c of the coating unit 3D also have a direction in which the light projecting portion 3c1 and the light receiving portion 3c2 are arranged, that is, the light path of light transmission / reception of laser light. The optical path surfaces which it contains are arranged so that they may mutually cross | intersect, for example by 90 degrees (orthogonally). More specifically, the laser displacement meter 3c of the coating unit 3C is attached so that the above-described arrangement direction is along the Y-axis direction. Moreover, the laser displacement meter 3c of the coating unit 3D is attached so that the above-mentioned arrangement direction may follow the X-axis direction.

The imaging unit 3d is a camera for positioning the application target W, and images the positioning mark (alignment mark) formed on the surface to be coated of the application target W. FIG. Moreover, the imaging part 3d is also a camera for measuring the width | variety of the paste apply | coated to the to-be-coated surface of the application object W, and picks up the paste apply | coated to the to-be-coated surface of the application object W from above. This imaging part 3d is electrically connected to the control part 8, and inputs the picked-up captured image to the control part 8.

The X-axis moving device 4A is provided on the side surface (side facing the support part 5B) of the support part 5A, and the X-axis moving device 4B is opposite to the side surface (support part 5A) of the support part 5B. Side]. The X-axis moving apparatus 4A supports the two coating units 3A and 3B to be movable separately in the X-axis direction, and the movement which moves these coating units 3A and 3B individually in the X-axis direction. It is a driving unit. Similarly, the X-axis moving device 4B also supports the two coating units 3C and 3D so as to be movable in the X-axis direction, and moves the individual coating units 3C and 3D in the X-axis direction. It is a driving unit. These X-axis moving apparatuses 4A and 4B are electrically connected to the control unit 8, and the driving thereof is controlled by the control unit 8. As the X-axis moving devices 4A and 4B, for example, a feed screw moving device using a servo motor as a driving source, a linear motor moving device using a linear motor as a driving source, and the like are used.

5 A of support parts support 4A of X-axis moving apparatuses as a column, and support two application | coating units 3A and 3B by this. Similarly, the support part 5B also supports the X-axis moving apparatus 4B as a column, and supports two application | coating units 3C and 3D by this. These support parts 5A and 5B are each formed in the shape of a horizontally long rectangular parallelepiped, and the extending direction becomes parallel to an X-axis direction, and is parallel to the arrangement surface of the stage 2, and a pair of Y-axis moving apparatuses It is provided on 6A and 6B.

The pair of Y-axis moving apparatuses 6A and 6B are provided along the Y-axis direction on the upper surface of the mount 7 so as to oppose each other by sandwiching the stage 2 from both sides in the X-axis direction. These Y-axis moving apparatuses 6A and 6B respectively support each of the supporting members 5A and 5B so as to be movable in the Y-axis direction, and the movement driving unit for individually moving these supporting members 5A and 5B along the Y-axis direction. to be. Each Y-axis moving apparatus 6A and 6B is electrically connected to the control part 8, and the drive is controlled by the control part 8. As shown in FIG. As the Y-axis moving devices 6A and 6B, for example, a feed screw moving device using a servo motor as a drive source, a linear motor moving device using a linear motor as a drive source, and the like are used.

The mount 7 is provided on the bottom, and is a mount that supports the stage 2, the Y-axis moving devices 6A, 6B, and the like at a predetermined height position from the bottom. The upper surface of the mount 7 is formed in a plane, and the stage 2, the Y-axis moving devices 6A, 6B, and the like are disposed on the upper surface of the mount 7.

The control part 8 is equipped with the microcomputer which centrally controls each part, and the memory | storage part (not shown) which memorize | stores various information, various programs, etc., and is installed in the stand 7 (refer FIG. 1). ). Various information includes application | coating information regarding paste application | coating, and the application | coating information is a predetermined | prescribed application | coating pattern and a drawing speed (relative movement speed in the horizontal direction of the to-be-coated surface of the application target object W and the nozzle 3a1) Information on a gap setting value (a setting value of the separation distance between the tip of the nozzle 3a1 and the surface to be coated of the application target W on the stage 2), the discharge amount of the paste, and the like. This control part 8 controls each part based on various information or various programs.

Here, as the coating pattern, a rectangular pattern having sides parallel to the X axis direction and sides parallel to the Y axis direction is set. As described above, the application of the application units 3A and 3C so that the arrangement direction of the laser displacement meters 3c of the application units 3A and 3C along the Y axis direction is the Y axis direction in the application pattern. This is to follow the optical path surface of the laser displacement meter 3c on the side parallel to the edge. In addition, attaching the coating units 3B and 3D so that the arrangement direction of the laser displacement meters 3c of the coating units 3B and 3D is along the X-axis direction is on the side parallel to the X-axis direction in the coating pattern. This is to follow the optical path surface of the laser displacement meter 3c.

Next, the laser displacement meter 3c will be described in detail.

The laser displacement meter 3c is a measuring device which measures the displacement of a measurement object. That is, the laser displacement meter 3c measures the movement amount when it moves to the other place from the position where the measurement object was originally within the measurement range. For example, if the laser displacement meter 3c is scanned and moved in the X-axis direction or the Y-axis direction while the surface to be coated of the application object W is positioned within the measurement range, wrinkles, irregularities, etc. of the surface to be coated on the scan movement trajectory The change in height can be measured. Therefore, while scanning the laser displacement meter 3c in the X-axis direction or the Y-axis direction, and controlling the Z-axis moving device 3b so that the measured value of the laser displacement meter 3c maintains the preset value, the nozzle ( So-called gap control can be performed which keeps the space | interval between the front-end | tip of 3a) and a to-be-coated surface constant. In addition, when the laser displacement meter 3c is scanned and moved across the line-coated paste while the laser displacement meter 3c is fixed in the Z-axis direction, the height change due to the paste appears as a measured value. The application height of the paste can be obtained from the change amount of.

By the way, as shown in Fig. 3, the application direction of the paste P, which is led in parallel to the optical path surface, in the arrangement direction of the light transmitting portion 3c1 and the light receiving portion 3c2 of the laser displacement meter 3c is measured. In this case, the laser displacement meter 3c is scanned so as to traverse the linear paste P in a state where the optical path surface of the laser displacement meter 3c and the stretching direction of the linear paste P are parallel.

Thereby, as shown in FIG. 4, the measured value (waveform) A1 of the laser displacement meter 3c can be obtained. 4, the upper figure is sectional drawing of the paste P, and the lower figure is the measured value A1 of the laser displacement meter 3c. This measured value A1 has shown the ideal value that the measured value falls extremely at the both ends of the width direction of the paste P. As shown to FIG. This is because the surface of the paste P at both ends in the width direction of the paste P is almost a vertical plane, so that the irradiation light from the light-transmitting portion 3c1 is hardly reflected in the upward direction, and as a result, the reflected light is This is because it is not incident on the light-receiving portion 3c2 and cannot be measured. The measured value A1 other than these both ends is a value corresponding to the height of the paste in each position.

The maximum value of such measured value A1 is obtained as application height H of paste P. FIG. The width L of the paste P is multiplied by this coating height H, and a predetermined constant K is multiplied so that the cross-sectional area S of the paste P (S = H × L × K) is increased. Is calculated. In addition, the constant K is set experimentally or theoretically based on the predicted cross-sectional shape (for example, semi-ellipse shape) of the paste P after application | coating. In addition, the application | coating width L of the paste P is calculated | required from the image image | photographed by the imaging part 3d.

Here, as a comparative example, as shown in FIG. 5, the application of the paste P, which is led orthogonally to the direction of the arrangement of the light transmitting portion 3c1 and the light receiving portion 3c2 of the laser displacement meter 3c, that is, the optical path surface, is applied. The case of measuring a height is demonstrated. In this case, the laser displacement meter 3c is scanned so as to cross the linear paste P in a state where the optical path surface of the laser displacement meter 3c and the stretching direction of the linear paste P are orthogonal to each other.

Thereby, as shown in FIG. 6, the measured value (waveform) A2 of the laser displacement meter 3c can be obtained. In addition, in FIG. 6, the upper figure is sectional drawing of the paste P, and the lower figure is the measured value A2 of the laser displacement meter 3c. This measured value A2 has shown the abnormal value in the both ends of the width direction of the paste P, and its inner side vicinity. In the inner vicinity of both ends, a value larger than the measured value to be obtained is output.

Although the maximum value of such measured value A2 is obtained as the application height H of the paste P, the application | coating height H obtained at this time does not become an accurate application | coating height. That is, since the abnormal value in the position of the inner side vicinity of the both ends of the width direction of the paste P has shown the maximum value, and this abnormal value turns into application | coating height H, application | coating height H is an actual application | coating. It becomes larger than height.

Therefore, when measuring the application height H of the paste P, as shown in FIG. 3, the arrangement | positioning direction of the light transmission part 3c1 and the light receiving part 3c2 of the laser displacement meter 3c, ie, the optical path surface, The laser displacement meter 3c is scanned to cross the linear paste P with the stretching direction of the linear paste P being parallel. Thereby, since an abnormal value in the position of the inner side vicinity of the both ends of the width direction of the paste P does not generate | occur | produce, it prevents the abnormal value from becoming an application | coating height H, and obtains an accurate application | coating height H. Can be.

Next, the paste application | coating operation | movement which the above-mentioned paste coating apparatus 1 performs is demonstrated. Moreover, the control part 8 of the paste application apparatus 1 performs a paste application process based on various information and various programs.

As shown in FIG. 7, the control part 8 controls each part, performs paste application | coating (step S1), and then calculates the cross-sectional area of the paste apply | coated to the to-be-coated surface of the application target W (step S2). Finally, pass / fail judgment is performed (step S3). In addition, here, the cross-sectional area is an example, and what is needed is just to determine whether the application amount of the apply | coated paste is in the appropriate range, and only coating height H may be measured and it may judge based on the measured value, The application height H and the application width L may be measured and determined based on the respective values.

In step S1, the control part 8 is a mark for positioning of the application | coating object W on the stage 2 by the imaging part 3d before each paste unit 3A-3D. For example, there exist a plurality). Then, the control part 8 detects the positioning mark image | photographed by the imaging part 3d by image recognition, and specifies the application | coating position which apply | coats a paste in the to-be-coated surface of the application | coating object W. Then, as shown in FIG.

Next, the control part 8 further controls each coating unit 3A-3D, each X-axis moving apparatus 4A and 4B, and each Y-axis moving apparatus 6A and 6B, and each coating unit 3A-A From the tip of the nozzle 3a1 of each coating head 3a while relatively moving the nozzle 3a1 of each application | coating head 3a of 3D and the application | coating object W on the stage 2 along the to-be-coated surface. The paste is discharged to simultaneously draw a plurality of (for example, four) predetermined coating patterns (paste patterns) on the surface to be coated of the application target W on the stage 2. Moreover, the control part 8 repeats this drawing, and draws a predetermined number of application | coating patterns on the to-be-coated surface of the application target W on the stage 2. This predetermined number is preset according to the size of the application | coating object W and the size of an application | coating pattern.

During this drawing, the control part 8 receives the measured value of the displacement of the to-be-coated surface of the application object W output from the laser displacement meter 3c in each application unit 3A-3D. The controller 8 stores the distance between the tip of the nozzle 3a1 of the coating head 3a and the surface to be coated of the application target W on the stage 2 based on the received measured value. The gap information is kept at the set value. In this way, the distance between the tip of the nozzle 3a1 and the surface to be coated of the application object W is maintained at a set value, whereby the application amount of the paste applied to the surface to be coated of the application object W can be made uniform. Become.

Next, in step S2, the control part 8 applies the application | coating height H of a paste and the application | coating width of a paste with respect to each of the some application | coating pattern apply | coated to the to-be-coated surface of the application object W at a preset measurement position. (L) is detected. Here, detection of the application height H of a paste is performed using each laser displacement meter 3c of each application unit 3A and 3B. In addition, detection of the application | coating width L of a paste is performed by image | photographing the paste apply | coated to the to-be-coated surface of the application object W using each imaging part 3d of each coating unit 3A and 3B. At this time, also about another application | coating pattern, using the other application | coating unit 3C and 3D, the application | coating height H of a paste and the application | coating width L of a paste can be calculated | required. Moreover, each coating unit 3A-3D is controlled by the control part 8 so that it may operate | move without disturbing each other's operation | movement.

Here, for example, as shown in FIG. 8, the measurement position described above is set to three points per one line and 12 points in total (refer to the thick line in FIG. 8) when the coating pattern has a rectangular frame shape. It is. In addition, FIG. 8 is an illustration to the last, and a measurement position and a measurement number are not limited to FIG. In addition, the application pattern of the rectangular frame shape is a kind of application | coating pattern of the shape which has two straight lines of an intersecting positional relationship. Specifically, one set of opposing sides is provided in parallel to the Y-axis direction, and the other set of opposing sides is provided in parallel to the X-axis direction. In this example, the sides parallel to the Y-axis direction (first line B1 and second line B2 in FIG. 8) correspond to one straight line in a rectangular coating pattern, and X A side parallel to the axial direction (third line B3 and fourth line B4 in FIG. 8) corresponds to the other straight line.

When measuring the application pattern of the rectangular frame shape mentioned above, the application | coating unit 3A and 3B are made into one set, and the 1st line B1 of an application | coating pattern is first performed by the laser displacement meter 3c of the application unit 3A. Measure 3 points). At this time, the arrangement direction of the light transmitting portion 3c1 and the light receiving portion 3c2 of the laser displacement meter 3c, that is, the stretching direction of the optical path surface and the first line B1 (linear paste P) is parallel as in FIG. 3. Do. The control part 8 moves the laser displacement meter 3c of the parallel state in the X-axis direction by 4A of X-axis movement devices, and scans the 1st line B1 so that it may cross in a orthogonal direction. This scanning is performed for every three measuring positions, and each maximum value is calculated | required as each application height H from three measured values obtained by these three scans. In addition, when obtaining the application | coating height H of a paste, the laser displacement meter 3c by which the arrangement direction (optical path surface) is provided in parallel with the extending | stretching direction of a paste is selected and used.

Next, the control part 8 measures the 3rd point by the laser displacement meter 3c of 3 A of application | coating units 3A to the 2nd line B2 which opposes the 1st line B1, and is parallel to the 1st line B1. do. At this time, the control part 8 is a laser displacement meter in which the arrangement direction of the laser displacement meter 3c, ie, the extending direction of the optical path surface and the 2nd line B2 (linear paste P), is parallel, as mentioned above. (3c) is moved in the X-axis direction by the X-axis moving device 4A, and scanned so as to cross the second line B2. This scanning is performed for every three measuring positions, and each maximum value is calculated | required as each application height H from three measured values obtained by these three scans.

Then, the control part 8 measures the 3rd line B3 orthogonal to the 1st line B1 with the laser displacement meter 3c of the application | coating unit 3B by three points. At this time, the arrangement direction of the laser displacement meter 3c, that is, the stretching direction of the optical path surface and the third line B3 (linear paste P) is parallel. The control part 8 moves the laser displacement meter 3c of the parallel state to the Y-axis direction by Y-axis movement apparatus 6A and 6B, and scans the 3rd line B3 so that it may cross in a perpendicular direction. This scanning is performed for every three measuring positions, and each maximum value is calculated | required as each application height H from three measured values obtained by these three scans.

Finally, the control part 8 measures 3 points of the 4th line B4 which opposes the 3rd line B3 with the laser displacement meter 3c of the application | coating unit 3B. At this time, the control part 8 carries out the laser displacement meter 3c which has the arrangement direction of the laser displacement meter 3c, ie, the extending direction of the optical path surface and 4th line B4 (linear paste P) parallel. It moves in the Y-axis direction by the axial shifting devices 6A and 6B, and makes it scan so that 4th line B4 may be crossed. This scanning is performed for every three measuring positions, and each maximum value is calculated | required as each application height H from three measured values obtained by these three scans.

In this way, the control unit 8 obtains three coating heights H and 12 coating heights H in total for each line. Moreover, the control part 8 multiplies the application | coating height H of the paste by the application | coating width L of the paste calculated | required from the picked-up image, and multiplies the value by the predetermined constant K for every measurement position, and the cross-sectional area of a paste ( S) (S = H × L × K) is calculated. In addition, the constant K is set experimentally or theoretically based on the predicted cross-sectional shape (for example, semi-ellipse shape) of the paste after application | coating as mentioned above. In addition, about the application | coating width L, the said measurement position by the imaging part 3d image | photographed continuously after the scan of the laser displacement meter 3c in each measurement position of each application line B1-B4. It is calculated based on the picked-up image of. The control part 8 detects the both ends of the width direction of the paste apply | coated linearly using well-known image processing technique from the picked-up image of the imaging part 3d. And the distance between the detected both ends is calculated | required as application | coating width L of a paste.

Next, in step S3, the control part 8 determines whether the cross-sectional areas of the paste for each of the measurement positions obtained in step S2 are within a predetermined allowable range. In the case where it is determined that the cross-sectional area of all 12 pastes is within a predetermined allowable range, the application target W on which the application is completed is conveyed to the next step and used. On the other hand, when it is determined that any one of the twelve pieces has a cross-sectional area of not within the predetermined allowable range, the application object W on which the application is completed is removed without being conveyed to the next step.

In such a paste application process, the arrangement direction of any one laser displacement meter 3c of four application units 3A-3D, ie, an optical path, with respect to all four lines B1-B4 of a rectangular frame-shaped application pattern. Surface becomes parallel to the extending | stretching direction of the paste which comprises the said lines B1-B4. The laser displacement meter 3c in the parallel state is moved in the direction orthogonal to the stretching direction of the paste, and the coating height of the paste can be measured. Thereby, while the parallelism of the optical path surface of the laser displacement meter 3c and the extending | stretching direction of a linear paste is maintained, the application | coating height of a paste is measured. Therefore, as shown in Fig. 5, due to the irregular reflection of the laser light by the curved surface of the paste, such as when measured in a state where the arrangement direction of the laser displacement meter 3c is orthogonal to the stretching direction of the paste, The measurement abnormality which outputs the measurement value which is extremely larger than the measured value to be obtained is suppressed, and the measurement precision of the application | coating height of a paste becomes high, and an accurate application | coating height can be obtained. For this reason, pass / fail determination of whether the cross section area of a paste exists in an allowable range can be performed correctly.

In addition, when the coating pattern is a coating pattern having two straight lines of orthogonal positional relations, such as a coating pattern having a rectangular frame shape, two or more laser displacement meters 3c of the coating units 3A to 3D are connected to a light transmitting portion ( 3c1) and the light-receiving part 3c2 are arrange | positioned so that the optical path surface may become a state parallel to one of the two straight lines mentioned above, and a state parallel to the other straight line. By this arrangement, the above-described measuring method can be performed.

As described above, according to the first embodiment, two or more laser displacement meters 3c in the application units 3A to 3D are arranged in the arrangement direction of the light transmitting portion 3c1 and the light receiving portion 3c2, that is, the light transmission / reception of laser light. The optical path surfaces including the optical paths of are arranged to cross each other. More specifically, one of the two laser displacement meters 3c is disposed so that the optical path surface is parallel to one of two orthogonal straight lines in the rectangular coating pattern, and the other laser displacement meter 3c is different. It is arrange | positioned so that an optical path surface may become parallel to a straight line. Thus, even when the paste is applied to the surface to be coated of the application target W by a coating pattern having a shape (rectangular shape) having two straight lines that intersect (orthogonally), both the straight lines of the coating pattern are applied. In the state where the optical path surface is in the stretching direction of the paste (for example, in a parallel direction), the laser displacement meter 3c is moved in the direction intersecting with the stretching direction of the paste (for example, orthogonal direction), so that Application height can be measured.

From this, measurement abnormality caused because the arrangement direction of the optical path surface of the laser displacement meter 3c as described with reference to FIGS. 5 and 6 is orthogonal to the stretching direction of the paste can be prevented. Thereby, even the paste apply | coated along either direction of the orthogonal positional relationship in a rectangular application | coating pattern, the application height of a paste can be measured with precision, and an accurate application | coating height can be obtained. As a result, since the cross-sectional area of the paste calculated using the measured coating height can be obtained accurately, the determination of whether the cross-sectional area of the paste is within the allowable range is accurate. Therefore, the defective product whose cross-sectional area of the paste is outside the permissible range is not used for the manufacture of the next process, and as a result, the quality of the coated product can be improved.

In addition, the gap displacement laser displacement meter 3c is useful for measuring the application height of the paste. Thereby, it is not necessary to provide a new laser displacement meter 3c in order to measure the application | coating height of a paste, and complexity of a device, high cost, etc. can be suppressed. Similarly, the positioning image pickup section 3d is useful for detecting the width of the paste. As a result, it is not necessary to provide a new imaging unit 3d in order to detect the width of the paste, and the complexity of the apparatus, the high cost, and the like can be suppressed.

For the above-mentioned reasons, the application height of the paste is applied to the paste applied along all directions in the application pattern of the shape having two straight lines of the intersecting (orthogonal) position relationship while using the gap control laser displacement meter 3. Since the measurement can be performed with high accuracy, it is possible to accurately determine whether the coating pattern formed by the paste is successful.

(Second Embodiment)

A second embodiment of the present invention will be described with reference to FIG. 9.

The second embodiment is basically the same as the first embodiment. In 2nd Embodiment, the difference with 1st Embodiment is demonstrated, the part same as the part demonstrated in 1st Embodiment is represented by the same code | symbol, and the description is also abbreviate | omitted.

In the paste application device 1 according to the second embodiment, each coating unit 3A to 3D is a direction along the surface to be coated of the application target W, as shown in FIG. 9, In other words, the rotation drive part 3e which rotates about the axis orthogonal to a to-be-coated surface is provided separately. This rotation drive part 3e is electrically connected to the control part 8, and the drive is controlled by the control part 8. As shown in FIG. The laser displacement meter 3c is comprised by the rotation drive part 3e so that rotation is possible in the direction along the to-be-coated surface of the application object W. FIG.

In step S2 according to the first embodiment (see FIG. 7), the control unit 8 uses the laser displacement meter 3c of the coating unit 3A at a predetermined measurement position with respect to one coating pattern to apply the coating object. The application height of the paste apply | coated to the to-be-coated surface of (W) is measured. In addition, the paste apply | coated to the to-be-coated surface of the application object W in the same measurement position is imaged using the imaging part 3d of 3 A of application | coating units, and the application | coating width is detected and calculated | required.

At this time, it is possible to obtain the coating height of the paste and the coating width of the paste, as described above, using the other coating units 3B to 3D also for the other coating patterns. If the application unit 3A and the application unit 3B also have the same direction in which the laser displacement meter 3c is moved, the measurement can be performed simultaneously. Similarly, the application unit 3C and the application unit 3D also have a laser displacement meter ( If the direction of moving 3c) is the same, it is possible to measure simultaneously. Moreover, each coating unit 3A-3D is controlled by the control part 8 so that it may operate | move without disturbing each other's operation | movement.

Here, the measurement position mentioned above is set to 12 points (refer to a thick line in FIG. 8) with 3 points and 4 lines with respect to one line, for example, when an application | coating pattern is a rectangular frame shape similarly to 1st Embodiment. (See FIG. 8). In addition, FIG. 8 is an illustration to the last, and a measurement position and a measurement number are not limited to FIG. In addition, the application pattern of the rectangular frame shape is a kind of application | coating pattern of the shape which has two straight lines of an intersecting positional relationship.

When measuring the application pattern of the rectangular frame shape mentioned above, the 1st line B1 of an application | coating pattern is measured at the measurement position of three points by the laser displacement meter 3c of 3 A of application | coating units. At this time, the controller 8 controls the laser displacement meter 3c by the rotation driving unit 3e so that the optical path surface including the light emitting part 3c1 and the light receiving part 3c2 in the arrangement direction of the light projecting part 3c2 is included. It rotates until it becomes parallel with the extending | stretching direction of 1st line B1 (linear paste P). More specifically, the control part 8 determines the extension direction (whether in the X-axis direction or Y-axis direction) of the paste in this measurement position from the information of the application | coating pattern memorize | stored in the memory | storage part, and the information of a measurement position, The rotation drive part 3e is controlled so that the optical path surface of the laser displacement meter 3c may become parallel to the direction determined in this case (in this case, the Y-axis direction). And the control part 8 moves the laser displacement meter 3c of the parallel state in the X-axis direction by 4A of X-axis moving apparatuses, and makes it scan so that it may cross the 1st line B1. This scanning is performed for every three measuring positions, and each maximum value is calculated | required as each application height H from three measured values obtained by these three scans.

Next, the control part 8 measures the 2nd line B2 which opposes the 1st line B1 by the laser displacement meter 3c of 3 A of application | coating units at the measurement position of three points. At this time, as described above, the controller 8 controls the laser displacement meter 3c by the rotation driving unit 3e to arrange the light transmitting unit 3c1 and the light receiving unit 3c2, that is, the optical path surface of the second line B2. ) Is rotated until it is parallel to the stretching direction of [linear paste P]. However, in this case, since the 1st line B1 and the 2nd line B2 are parallel, it is not necessary to change the direction of the optical path surface of the laser displacement meter 3c. And the control part 8 moves the laser displacement meter 3c of the parallel state in the X-axis direction by 4A of X-axis moving apparatuses, and makes it scan so that it may cross the 2nd line B2. This scanning is performed for every three measuring positions, and each maximum value is calculated | required as each application height H from three measured values obtained by these three scans.

Then, the control part 8 measures the 3rd line B3 orthogonal to the 2nd line B2 by the laser displacement meter 3c of 3 A of application | coating units at the measurement position of three points. At this time, the control part 8 makes the laser displacement meter 3c by the rotation drive part 3e make the arrangement direction, ie, the optical path surface, parallel with the extending direction of the 3rd line B3 (linear paste P). Rotate until In this case, since the extending direction of the second line B2 and the third line B3 is rotated by 90 °, the control unit 8 moves the laser displacement meter 3c clockwise or counterclockwise. The rotation drive part 3e is controlled to rotate by 90 degrees. And the control part 8 moves the laser displacement meter 3c of the parallel state to Y-axis direction by Y-axis movement apparatus 6A and 6B, and makes it scan so that it may cross 3rd line B3. This scanning is performed for every three measuring positions, and each maximum value is calculated | required as each application height H from three measured values obtained by these three scans.

Finally, the control part 8 measures the 4th line B4 which opposes the 3rd line B3 with the laser displacement meter 3c of 3 A of application | coating units at the measurement position of three points. At this time, the control unit 8 causes the laser displacement meter 3c to rotate in parallel with the stretching direction of the fourth line B4 (linear paste P) by the rotation driving unit 3e. Rotate until However, in this case, since the 3rd line B3 and the 4th line B4 are parallel, it is not necessary to change the direction of the optical path surface of the laser displacement meter 3c. And the control part 8 moves the laser displacement meter 3c of the parallel state to Y-axis direction by Y-axis movement apparatus 6A and 6B, and makes it scan so that 4th line B4 may be crossed. This scanning is performed for every three measuring positions, and each maximum value is calculated | required as each application height H from three measured values obtained by these three scans.

In this way, the control unit 8 obtains three coating heights H and 12 coating heights H in total for each line. Moreover, the control part 8 multiplies the paste application height H and the application | coating width L of the paste calculated | required from the picked-up image, multiplies the value by the predetermined constant K, and the cross-sectional area S of a paste (S = H × L × K) is calculated. In addition, the constant K is set experimentally or theoretically based on the predicted cross-sectional shape (for example, semi-ellipse shape) of the paste after application | coating similarly to 1st Embodiment.

In such a measurement process, the straight direction of the arrangement | positioning direction of the laser displacement meter 3c, ie, the optical path surface, is applied to all four lines B1-B4 of the application pattern of the rectangular frame shape on the surface to be coated of the application object W ( It is made parallel to the extending direction of P). And the laser displacement meter 3c whose optical path surface is parallel can be moved to the direction orthogonal to the extending | stretching direction of the paste P, and the coating height of the paste P can be measured. Thereby, while the parallel of the optical path surface of the laser displacement meter 3c and the extending direction of the linear paste P is maintained, the application height of the paste P is measured. Therefore, similarly to the first embodiment, it is suppressed that the laser light is diffusely reflected by the curved surface of the paste, and the measurement accuracy of the coating height of the paste is increased to obtain an accurate coating height. For this reason, pass / fail determination of whether the cross section area of a paste exists in an allowable range can be performed correctly.

In addition, when an application | coating pattern is an application | coating pattern which has two straight lines of an orthogonal positional relationship like the application | coating pattern of a rectangular frame shape, the application object W is provided with the laser displacement meter 3c of 1 or more of the application | coating units 3A-3D. It may be configured to be rotatable in the direction along the surface to be coated. Thereby, about the coating pattern which each of the four coating units 3A-3D apply | coated using the coating unit in which the laser displacement meter 3c was rotatably among the four coating units 3A-3D, it mentioned above. The measuring method can be performed.

As described above, according to the second embodiment, the same effects as in the first embodiment can be obtained. Specifically, even when the paste is applied to the surface to be coated of the application target W in a coating pattern having a shape of two straight lines intersecting with each other, the optical path surface of the paste is applied to both straight lines of the coating pattern. Following the stretching direction (for example, in parallel), the laser displacement meter 3c is moved in a direction intersecting with the stretching direction of the paste (for example, a direction orthogonal) to measure the coating height of the paste. Thereby, since the measurement accuracy of the application | coating height of a paste becomes high and an accurate application | coating height can be obtained, pass / fail judgment of whether the cross-sectional area of a paste is in an allowable range is accurate. Therefore, the defective product whose cross-sectional area of the paste is outside the permissible range is not used for the manufacture of the next process, and as a result, the quality of the coated product can be improved.

(Other Embodiments)

The above-mentioned embodiment which concerns on this invention is an illustration, The scope of the invention is not limited to these. The above-mentioned embodiment can be variously changed, for example, several components may be deleted from all the components shown by the above-mentioned embodiment, and the component which concerns on other embodiment may be combined suitably.

In the above-mentioned embodiment, although the measurement in the measurement position of three points is performed for every line of the application pattern of a rectangular frame shape, it is not limited to this. For example, in FIG. 8, the laser displacement meter 3c is first scanned from the first line B1 side toward the second line B2 side. During this scan, the measurement is performed at the first measurement position of the first line B1 (the thickest line of the leftmost part in the first line B1), and then the first measurement of the second line B2. The measurement is performed at the position (the thickest line on the leftmost part in the second line B2). Subsequently, the scanning direction is reversed, and the measurement is performed at the second measurement position of the second line B2 (thick center line in the second line B2), and the scanning state of the first line B1 is measured. The measurement is performed at the second measurement position (thick center line in the first line B1). After that, the scanning direction is reversed again, and the measurement is performed at the third measurement position (the thickest line in the rightmost part in the first line B1) of the first line B1, and the second line ( The measurement may be performed at the third measurement position (the thickest line in the rightmost part in the second line B2) in B2). In this case, the laser displacement meter 3c of the coating unit 3A continuously reciprocates while crossing the first line B1 and the second line B2. This measuring method is effective when the size of an application pattern is comparatively small. Moreover, also in 3rd line B3 and 4th line B4, the laser displacement meter 3c of the application | coating unit 3B reciprocates continuously in 3rd line B3 and 4th line B4, and reciprocates. It is possible to use the same measuring method as described above.

In addition, in embodiment mentioned above, although the 2nd line B2 is measured after the completion of the measurement of the 1st line B1, it is not limited to this, For example, after the completion of the measurement of the 1st line B1, The three lines B3 may be measured, or the fourth line B4 may be measured. The measurement start line is not limited to the first line B1 but may be another line.

Moreover, in embodiment mentioned above, when performing paste application | coating or application | coating height measurement of paste, the application | coating head 3a or the laser displacement meter 3c is moved to the X-axis direction or the Y-axis direction, and the coating head 3a or the laser is carried out. Although the displacement meter 3c and the application | coating object W are moved relatively, it is not limited to this. For example, the stage 2 on which the application target W is mounted may be moved in the X-axis direction or the Y-axis direction to relatively move the application head 3a or the laser displacement meter 3c and the application target W. FIG. Alternatively, the combination may be performed such that the application head 3a or the laser displacement meter 3c and the application target W are relatively moved. That is, what is necessary is just to make the application | coating head 3a or the laser displacement meter 3c and the application | coating object W relatively move, and the drive method regarding a relative operation is not limited.

In addition, in embodiment mentioned above, although the direction along the to-be-coated surface of the application object W was made into the direction along the X-axis direction and the Y-axis direction, ie, the direction along a horizontal direction, it is not limited to this. For example, the direction along the to-be-coated surface of the application object W may be a direction along a Z-axis direction and an X-axis direction or a Y-axis direction, ie, a direction along a vertical direction. In addition, although the direction which intersects the to-be-coated surface of the application object W was made into the direction orthogonal to a to-be-coated surface, it is not limited to this. For example, the direction may be inclined with respect to the surface to be coated.

In addition, although the above-mentioned embodiment demonstrated that the application | coating pattern which has two straight lines which intersect is a rectangular application | coating pattern, it demonstrated, but it is not limited to this, For example, application | coating of rectangular (rhombus, trapezoid, etc.) other than a rectangle. It may be a pattern or a coating pattern of polygons other than squares such as triangles and pentagons. In such an application pattern, when there are three or more linear portions having different stretching directions (extension directions), such as triangles, one or more laser displacement meters 3c whose optical path surfaces are parallel to each linear portion are present. What is necessary is just to arrange | position the laser displacement meter 3c with respect to the some coating head 3a.

In addition, in the above-mentioned embodiment, although two application | coating units are provided with respect to one support part, it is not limited to this, You may provide one or three or more application | coating units. For example, in the case of drawing a coating pattern having two straight lines that intersect the surface to be coated of the application target W, in the case where six coating units are provided for one supporting portion, the optical path surface is one of the two straight lines. The laser displacement gauge 3c in which the optical path surface is parallel with respect to the straight line different from the laser displacement gauge 3c in parallel may be alternately arranged with respect to the six coating units. Alternatively, the six coating units may be divided into three of one half and three of the opposite half.

Moreover, in embodiment mentioned above, although the direction of the optical path surface of the laser displacement meter 3c is arrange | positioned by 90 degrees between two application | coating units on one support part, it is not limited to this, It is apply | coated between two support parts. The direction of the optical path surface of the laser displacement meter 3c of the unit may be varied. That is, the laser displacement meter in which an optical path surface is parallel with respect to each of the linear parts from which the extension pattern which the application | coating pattern which draws on the to-be-coated surface of the application object W is equipped in the some application unit with the paste application apparatus 1 differs. (3c) only needs to exist one or more.

In addition, in 2nd Embodiment mentioned above, control which rotates the laser displacement meter 3c so that the optical path surface of the laser displacement meter 3c may become parallel to the extending | stretching direction (extension direction) of a paste, the laser displacement meter 3c for every measurement point. May be performed by setting the rotation angle of the control panel and controlling the rotation driving unit 3e based on the set rotation angle.

In addition, in embodiment mentioned above, although the laser displacement meter 3c is automatically moved to the X-axis direction or the Y-axis direction when measuring the application height of the paste drawn on the to-be-coated surface, it is not limited to this, for example, The operator may move the laser displacement meter 3c in the X-axis direction or the Y-axis direction by manual operation.

1: paste applicator
3a: application head
3c: laser displacement meter
3d: imaging unit
3e: rotary drive unit
4A: X axis moving device (moving drive part)
4B: X axis moving device (moving drive part)
5A: Support
5B: Support
6A: Y axis moving device (moving drive part)
6B: Y-axis moving device (moving drive part)
8:
W: coating object

Claims (10)

A plurality of coating heads each having a nozzle for discharging the paste toward the surface to be coated of the coating object;
A plurality of laser displacement meters, each of which is integrally provided in the plurality of application heads, and the displacement of the surface to be coated can be measured by light transmission / reception of laser light, and the light transmission path and the light reception path of the laser light are different;
A movement driving unit for relatively moving the application object and the plurality of application heads in a direction along the surface to be coated and in a direction crossing the surface to be coated;
The application object and the application head are relatively moved in the direction along the surface to be coated, so that the paste discharged from the nozzle draws an application pattern having a shape having two straight lines intersecting the surface to be coated by the paste. The moving drive unit is controlled to control the application head and the movement drive unit, and to maintain a distance between the front end of the nozzle of the application head and the surface to be coated on the basis of the measured value of the laser displacement meter corresponding to the application head. Control unit
And,
At least one of the plurality of laser displacement meters is disposed such that an optical path surface including the light transmitting path and the light receiving path is parallel to one of the two straight lines in the coating pattern,
At least another one of the said plurality of laser displacement meters is arrange | positioned so that the said optical path surface may be parallel with the other straight line of the said two straight lines. The said control part of Claim 1 WHEREIN: When the said control part measures the application | coating height of the said paste drawn on the to-be-coated surface, the said control part in the state in which the extending direction of the paste apply | coated linearly in the said application pattern and the said optical path surface are parallel. And the moving drive unit is controlled to move a laser displacement meter in a direction crossing the stretching direction of the linearly applied paste. The apparatus according to claim 1, further comprising: a plurality of supporting parts which are provided by being stretched in a first direction along the surface to be coated and movable in a second direction perpendicular to the first direction along the surface to be coated;
The plurality of application heads are provided so as to be movable along the first direction, each of the plurality of application heads for each of the support portions.
The plurality of laser displacement meters are provided on at least one of the supporting portions, at least one of which the optical path surface is parallel to one of the two straight lines, and at least the other of the laser displacement meters is different from the other straight line of the two straight lines. It is arrange | positioned so that it may become parallel, The paste application apparatus characterized by the above-mentioned. The paste coating apparatus according to claim 3, wherein the plurality of laser displacement meters are arranged on one of the supporting portions such that the direction of the optical path surface is different between adjacent coating heads. An application head having a nozzle for discharging the paste toward the surface to be coated of the application object,
A laser displacement meter which is provided integrally to the application head, the displacement of the surface to be coated can be measured by light transmission / reception of laser light, and the light transmission path and the light reception path of the laser light are different;
A movement driving unit for relatively moving the application object and the application head in a direction along the surface to be coated and in a direction crossing the surface to be coated;
A rotation driver for rotating the laser displacement meter in a direction along the surface to be coated;
The application object and the application head are relatively moved in the direction along the surface to be coated, so that the paste discharged from the nozzle draws an application pattern having a shape having two straight lines intersecting the surface to be coated by the paste. A control unit which controls the application head and the moving drive unit and controls the moving drive unit to maintain the separation distance between the front end of the nozzle and the surface to be coated at a set value based on the measured value of the laser displacement meter.
And,
When the control unit measures the application height of the paste drawn on the surface to be coated, the control unit applies an optical path surface including the light transmitting path and the light receiving path of the laser displacement meter to the coating pattern for both straight lines of the coating pattern. Controlling the rotational drive unit and the moving drive unit so as to be parallel to the stretching direction of the linearly applied paste in such a manner and to move the laser displacement meter in the state intersecting the stretching direction of the linearly applied paste. Paste coating apparatus characterized by the above-mentioned. According to claim 5, Stretched in the first direction along the surface to be coated, provided with a support portion movable in a second direction orthogonal to the first direction along the surface to be coated,
The said application head is provided in multiple numbers by the said support part so that a movement along the said 1st direction is possible,
And the laser displacement meter is rotatably provided to at least one of the plurality of application heads by the rotation driving unit. The paste coating apparatus according to any one of claims 1 to 6, further comprising an imaging unit for measuring the width of the paste drawn on the surface to be coated. The paste coating apparatus according to claim 7, wherein the imaging unit is a camera for positioning the coating object. The application object and the application head are moved relatively in the direction along the application surface of the application object, and a coating pattern having a shape of two straight lines having a positional relationship intersecting the application surface by paste discharged from the nozzle of the application head is formed. A laser displacement meter which is integrally formed with the application head during the drawing, wherein the displacement of the surface to be coated can be measured by light transmission / reception of laser light, and the light transmission path and the light receiving path of the laser light differ from each other. A paste coating method for maintaining a distance between the tip of the nozzle and the surface to be coated at a set value based on a measured value,
When measuring the coating height of the paste drawn on the surface to be coated, the optical path surface including the light transmitting path and the light receiving path of the laser displacement meter is straight in the coating pattern with respect to both straight lines of the coating pattern. Paste coating method characterized in that it is parallel to the stretching direction of the applied paste, the laser displacement meter in that state is moved in the direction intersecting with the stretching direction of the paste applied in a straight line, and the coating height of the paste is measured. . 10. The paste coating method according to claim 9, wherein the quality of the coating pattern drawn on the surface to be coated is determined based on the measured coating height.

Images