JP5866094B2 - Paste coating apparatus and paste coating method - Google Patents

Description

  Embodiments described herein relate generally to a paste application apparatus and a paste application method for applying a paste to an object to be applied.

  Paste applicators are used to manufacture various devices such as liquid crystal display panels. The paste coating apparatus includes a coating head that applies a paste to an application target, and applies the paste to a surface to be coated of the coating target while moving the coating head, A paste pattern is formed. For example, in the manufacture of a liquid crystal display panel, a sealing agent having sealing properties and adhesiveness is applied as a paste in a rectangular frame shape on a surface to be applied such as a substrate.

  In such a paste application apparatus, the cross-sectional area of the paste applied in a linear pattern on the surface to be applied of the object to be applied is obtained (see, for example, Patent Document 1). In this measurement, the coating height of the paste is measured with a laser displacement meter. The laser displacement meter is a measuring device using a triangulation method, and the measuring device for measuring the distance between the tip of the nozzle and the upper surface of the substrate is also used as the laser displacement meter.

JP-A-7-275770

  However, the laser displacement meter described above is fixed in a predetermined arrangement direction with respect to the coating head. Moreover, the cross-sectional shape of the paste applied linearly is a semi-ellipse, and its surface is curved. Therefore, when measuring the paste application height, the paste application height may not be accurately measured depending on the relationship between the arrangement direction of the laser displacement meter and the paste stretching direction. In this case, it is difficult to obtain an accurate application height of the paste, and a defective product in which the paste is not applied in a desired application amount is determined to be a non-defective product and used for manufacturing the next process. As a result, the quality of the coated product is degraded.

  The present invention has been made in view of the above, and an object of the present invention is to provide a paste coating apparatus and a paste coating method that can improve the measurement accuracy of the paste coating height and improve the quality of the coated product. is there.

The paste coating apparatus according to the present embodiment is applied to the tip of the nozzle of the coating head and the coating based on the measurement value of a laser displacement meter provided integrally with the coating head and having a different laser light projecting path and light receiving path. The distance between the object and the surface to be coated is maintained at a set value, and the nozzle and the object to be coated are relatively moved in the direction along the surface to be coated while discharging the paste from the nozzle. In a paste coating apparatus that draws a coating pattern having a shape having two intersecting straight lines on the coating surface, and measures the coating height of the paste drawn on the coated surface using the laser displacement meter,
A plurality of the application heads integrally provided with the laser displacement meter are provided,
Wherein the plurality of laser displacement meter provided on at least one of the coating head, the light road including the projection optical path and the light receiving path is provided in the coating head along a straight line one of the two straight lines,
The laser displacement meter provided in at least one other of the plurality of coating heads is provided in the coating head such that the optical path surface is along the other straight line of the two straight lines .

Paste application apparatus according to this embodiment, integrally provided on the coating head, and the light projecting path of the laser beam and the light receiving path based on measurements of different laser displacement meter, coating the tip of the nozzle of the coating head The distance between the object and the surface to be coated is maintained at a set value, and the nozzle and the object to be coated are relatively moved in the direction along the surface to be coated while discharging the paste from the nozzle. In a paste coating apparatus that draws a coating pattern having a shape having two intersecting straight lines on the coating surface, and measures the coating height of the paste drawn on the coated surface using the laser displacement meter,
A rotation drive unit for rotating the laser displacement meter;
By this rotational drive unit, the optical path surface including the light projecting path and the light receiving path of the laser displacement meter extends along the direction in which one of the two straight lines extends and the other straight line in the two straight lines extends. A controller that rotates the laser displacement meter so as to be positioned in a direction along the direction,
Is provided.

The paste coating method according to the present embodiment is applied to the tip of the nozzle of the coating head and the coating based on the measurement value of a laser displacement meter provided integrally with the coating head and having a different laser light projecting path and light receiving path. The distance between the object and the surface to be coated is maintained at a set value, and the nozzle and the object to be coated are relatively moved in the direction along the surface to be coated while discharging the paste from the nozzle. In the paste application method of drawing an application pattern having a shape having two straight lines in an intersecting positional relationship on the application surface, and measuring the application height of the paste drawn on the application surface using the laser displacement meter,
Wherein when measuring the coating height of the paste drawn on the coated surface, for both of the two straight lines, light road including the projection optical path and the light receiving path of the laser displacement gauge, the coating height The laser displacement meter in the state is moved in a direction crossing the extending direction of the paste .

  ADVANTAGE OF THE INVENTION According to this invention, the measurement precision of the application | coating height of a paste can be raised and the quality of an application product can be improved.

It is a front view showing a schematic structure of a paste application device concerning a 1st embodiment. It is a top view which shows schematic structure of the paste coating device shown in FIG. It is explanatory drawing for demonstrating the measuring method of the application | coating height of the paste by the laser displacement meter with which the paste application | coating apparatus shown in FIG.1 and FIG.2 is provided. It is explanatory drawing for demonstrating the measured value of the application | coating height of the paste by the measurement shown in FIG. It is explanatory drawing for demonstrating the measurement of the application | coating height of the paste of a comparative example. It is explanatory drawing for demonstrating the measured value of the application | coating height of the paste by the measurement shown in FIG. It is a flowchart which shows the flow of the paste application | coating operation | movement which the paste application | coating apparatus shown in FIG.1 and FIG.2 performs. It is explanatory drawing for demonstrating the measurement position of the application height of the paste in the paste application | coating operation | movement shown in FIG. It is a top view which shows schematic structure of the laser displacement meter with which the paste coating device which concerns on 2nd Embodiment is provided.

(First embodiment)
A first embodiment will be described with reference to FIGS.

  As shown in FIGS. 1 and 2, the paste coating apparatus 1 according to the first embodiment individually pastes paste onto the stage 2 on which the application target W is placed and the application target W on the stage 2. A plurality of coating units 3A to 3D to be coated, a plurality of X-axis moving devices 4A and 4B that move the coating units 3A to 3D in the X-axis direction, and a plurality of supports that support these X-axis moving devices 4A and 4B 5A and 5B, Y-axis moving devices 6A and 6B that move the supporting portions 5A and 5B in the Y-axis direction, a stage 7 that supports the stage 2, the Y-axis moving devices 6A and 6B, and the like, and controls each part And a control unit 8 for performing the operation.

  The stage 2 has a placement surface on which the application object W is placed, and is fixed to the upper surface of the gantry 7. On this stage 2, a coating object W such as a glass substrate used for manufacturing a liquid crystal display panel is placed by its own weight. However, the present invention is not limited to this. For example, a mechanism such as an electrostatic chuck or a suction chuck may be provided to hold the application target W.

  Each of the coating units 3A to 3D includes a coating head 3a that discharges a paste such as a sealing agent having sealing properties and adhesiveness, a Z-axis moving device 3b that moves the coating head 3a in the Z-axis direction, and a laser beam projector. A laser displacement meter 3c for measuring a separation distance from the application target W that is a measurement target by receiving light and an imaging unit 3d for positioning the application target W are individually provided.

  The coating head 3a includes a storage cylinder such as a syringe having a nozzle 3a1 for discharging a paste. The coating head 3a is connected to a gas supply unit (both not shown) via a gas supply tube or the like. Moreover, the coating head 3a discharges the paste accommodated in the inside from the nozzle 3a1 by the gas supplied to the inside of the syringe.

  The Z-axis moving device 3b supports the coating head 3a, the laser displacement meter 3c, and the imaging unit 3d, and is provided in the X-axis moving device 4A or 4B. The Z-axis moving device 3b supports one coating head 3a and is in contact with the Z-axis direction orthogonal to the surface to be coated of the coating object W on the stage 2, that is, the contact for moving the coating head 3a to and away from the stage 2. It is a moving device that moves in the separation direction (Z-axis direction). The Z-axis moving device 3b is electrically connected to the control unit 8, and the driving thereof is controlled by the control unit 8. As the Z-axis moving device 3b, for example, a feed screw type moving device using a servo motor as a driving source, a linear motor type moving device using a linear motor as a driving source, or the like is used.

  The laser displacement meter 3c is a distance measuring device using a triangulation method, and receives light such as a light projecting unit 3c1 such as a semiconductor laser that projects laser light and a semiconductor position detecting element that receives laser light (reflected light). Part 3c2 (see FIG. 2). The laser displacement meter 3 c is electrically connected to the control unit 8 and inputs the measured separation distance (measured value) to the control unit 8.

  As shown in FIG. 3, the light projecting unit 3c1 and the light receiving unit 3c2 are arranged so as to be positioned on the same straight line in a plan view. The laser beam is emitted from the light projecting unit 3c1 toward the coated surface of the coating object W on the stage 2, reflected by the coated surface, and received by the light receiving unit 3c2. A plane including a light projecting / receiving optical path, in which the laser light projecting path and the light receiving path are different, is referred to as an optical path surface. The arrangement direction is a direction in which the light projecting unit 3c1 and the light receiving unit 3c2 are arranged on the same straight line, that is, the direction along the optical path surface.

  Here, in the laser displacement meter 3c of the coating unit 3A and the laser displacement meter 3c of the coating unit 3B, the arrangement directions of the light projecting unit 3c1 and the light receiving unit 3c2, that is, the optical path surfaces including the light projecting and receiving optical paths of the laser light intersect each other For example, they are arranged to intersect (orthogonal) at 90 degrees. More specifically, the laser displacement meter 3c of the coating unit 3A is attached so that the arrangement direction is along the Y-axis direction. The laser displacement meter 3c of the coating unit 3B is attached so that the arrangement direction is along the X-axis direction.

  Similarly, in the laser displacement meter 3c of the coating unit 3C and the laser displacement meter 3c of the coating unit 3D, the arrangement directions of the light projecting unit 3c1 and the light receiving unit 3c2, that is, the optical path surfaces including the light projecting and receiving optical paths of the laser light intersect each other For example, they are arranged to intersect (orthogonal) at 90 degrees. More specifically, the laser displacement meter 3c of the coating unit 3C is attached so that the arrangement direction is along the Y-axis direction. The laser displacement meter 3c of the coating unit 3D is attached so that the arrangement direction is along the X-axis direction.

  The imaging unit 3d is a camera for positioning the application target W, and images a positioning mark (alignment mark) formed on the application target surface of the application target W. Furthermore, the imaging unit 3d is also a camera for measuring the width of the paste applied to the application surface of the application object W, and images the paste applied to the application surface of the application object W from above. . The imaging unit 3 d is electrically connected to the control unit 8 and inputs the captured image to the control unit 8.

  The X-axis moving device 4A is provided on the side surface of the support portion 5A (side surface facing the support portion 5B), and the X-axis moving device 4B is provided on the side surface of the support portion 5B (side surface facing the support portion 5A). Yes. The X-axis moving device 4A is a moving drive unit that supports the two coating units 3A and 3B so as to be individually movable in the X-axis direction, and moves these coating units 3A and 3B individually in the X-axis direction. . Similarly, the X-axis moving device 4B also supports two coating units 3C and 3D so as to be movable in the X-axis direction, and is a moving drive unit that individually moves these coating units 3C and 3D in the X-axis direction. is there. These X-axis moving devices 4A and 4B are electrically connected to the control unit 8, and their driving is controlled by the control unit 8. As each X-axis moving device 4A and 4B, for example, a feed screw type moving device using a servo motor as a driving source, a linear motor type moving device using a linear motor as a driving source, or the like is used.

  The support portion 5A is a column and supports the X-axis moving device 4A, thereby supporting the two coating units 3A and 3B. Similarly, the support portion 5B is also a column and supports the X-axis moving device 4B, thereby supporting the two coating units 3C and 3D. These support portions 5A and 5B are each formed in a horizontally long rectangular parallelepiped shape, and the extending direction thereof is made parallel to the X-axis direction, and is further made parallel to the mounting surface of the stage 2 to form a pair of Y-axis. It is provided on the moving devices 6A and 6B.

  The pair of Y-axis moving devices 6A and 6B are provided on the upper surface of the gantry 7 so as to face each other with the stage 2 sandwiched from both sides in the X-axis direction and along the Y-axis direction. These Y-axis moving devices 6A and 6B support the support portions 5A and 5B, respectively, so as to be movable in the Y-axis direction, and move these support portions 5A and 5B individually along the Y-axis direction. It is a drive part. Each of the Y-axis moving devices 6A and 6B is electrically connected to the control unit 8, and the driving thereof is controlled by the control unit 8. As each of the Y-axis moving devices 6A and 6B, for example, a feed screw type moving device using a servo motor as a driving source, a linear motor type moving device using a linear motor as a driving source, or the like is used.

  The gantry 7 is a gantry that is installed on the floor surface and supports the stage 2, the Y-axis moving devices 6 </ b> A, 6 </ b> B, etc. at a predetermined height position from the floor surface. The upper surface of the gantry 7 is formed in a flat surface, and the stage 2 and the Y-axis moving devices 6A and 6B are placed on the upper surface of the gantry 7.

  The control unit 8 includes a microcomputer that centrally controls each unit, a storage unit that stores various information and various programs (none of which are shown), and is provided in the gantry 7 (see FIG. 1). The various types of information include application information related to paste application. The application information includes a predetermined application pattern, a drawing speed (a relative movement speed in the horizontal direction of the application surface of the application object W and the nozzle 3a1), and a gap setting. This is information relating to a value (a set value of a separation distance between the tip of the nozzle 3a1 and the application surface of the application target W on the stage 2), a discharge amount of paste, and the like. The control unit 8 controls each unit based on various information and various programs.

  Here, as the application pattern, a rectangular pattern having a side parallel to the X-axis direction and a side parallel to the Y-axis direction is set. In addition, in the above description, the coating units 3A and 3C are attached so that the arrangement direction of the laser displacement meters 3c of the coating units 3A and 3C is along the Y-axis direction. This is for keeping the optical path surface of a total of 3c along. The coating units 3B and 3D are attached so that the arrangement direction of the laser displacement meters 3c of the coating units 3B and 3D is along the X-axis direction. This is to keep the light path along.

  Next, the laser displacement meter 3c will be described in detail.

  The laser displacement meter 3c is a measuring instrument that measures the displacement of the measurement object. That is, the laser displacement meter 3c measures the amount of movement when the measurement object moves from the original position to another place within the measurement range. For example, if the laser displacement meter 3c is scanned and moved in the X-axis direction or the Y-axis direction with the coated surface of the coating object W positioned within the measurement range, the undulation of the coated surface on the scanning movement locus It is possible to measure height changes such as unevenness. Therefore, if the Z-axis moving device 3b is controlled so that the measured value of the laser displacement meter 3c maintains a preset value while moving the laser displacement meter 3c in the X-axis direction or the Y-axis direction, the nozzle 3a can be controlled. So-called gap control can be performed in which the distance between the tip and the surface to be coated is kept constant. In addition, if the laser displacement meter 3c is scanned and moved across the line-coated paste with the laser displacement meter 3c fixed in the Z-axis direction, a height change due to the paste appears as a measured value. The application height of the paste can be obtained from the amount of change.

  By the way, as shown in FIG. 3, when measuring the arrangement direction of the light projecting portion 3c1 and the light receiving portion 3c2 of the laser displacement meter 3c, that is, the coating height of the paste P applied in parallel to the optical path surface. The laser displacement meter 3c is scanned across the linear paste P in a state where the optical path surface of the laser displacement meter 3c and the extending direction of the linear paste P are parallel.

  Thereby, as shown in FIG. 4, the measured value (waveform) A1 of the laser displacement meter 3c is obtained. In FIG. 4, the upper diagram is a cross-sectional view of the paste P, and the lower diagram is the measured value A1 of the laser displacement meter 3c. This measured value A1 shows an abnormal value that the measured value is extremely lowered at both ends in the width direction of the paste P. This is because the surface of the paste P at both ends in the width direction of the paste P is substantially vertical, so that the irradiation light from the light projecting unit 3c1 is hardly reflected upward, and as a result, the reflected light is received by the light receiving unit. This is because the light does not enter 3c2 and measurement is impossible. The measured value A1 other than both ends is a value corresponding to the height of the paste at each position.

  Such a maximum value of the measured value A1 is obtained as the coating height H of the paste P. The coating height H is multiplied by the width L of the paste P, and further a predetermined constant K is multiplied to calculate the cross-sectional area S (S = H × L × K) of the paste P. The constant K is set experimentally or theoretically based on the predicted cross-sectional shape (for example, semi-elliptical shape) of the paste P after application. Further, the application width L of the paste P is obtained from the image captured by the imaging unit 3d.

  Here, as a comparative example, as shown in FIG. 5, the arrangement direction of the light projecting unit 3 c 1 and the light receiving unit 3 c 2 of the laser displacement meter 3 c, that is, the coating height of the paste P applied linearly to the optical path surface is The case of measuring will be described. In this case, the laser displacement meter 3c is scanned across the linear paste P in a state where the optical path surface of the laser displacement meter 3c and the extending direction of the linear paste P are orthogonal to each other.

  Thereby, as shown in FIG. 6, the measured value (waveform) A2 of the laser displacement meter 3c is obtained. In FIG. 6, the upper diagram is a cross-sectional view of the paste P, and the lower diagram is the measured value A2 of the laser displacement meter 3c. This measured value A2 shows an abnormal value at both ends in the width direction of the paste P and in the vicinity thereof. A value larger than the measured value to be obtained is output in the vicinity of the inside of both ends.

  The maximum value of the measured value A2 is obtained as the coating height H of the paste P. At this time, the obtained coating height H is not an accurate coating height. That is, the abnormal value at the position near the inside of both ends in the width direction of the paste P shows the maximum value, and since this abnormal value is the application height H, the application height H is higher than the actual application height. It becomes a big value.

  Therefore, when measuring the coating height H of the paste P, as shown in FIG. 3, the arrangement direction of the light projecting portion 3c1 and the light receiving portion 3c2 of the laser displacement meter 3c, that is, the optical path surface and the linear paste P The laser displacement meter 3c is scanned across the linear paste P in parallel with the stretching direction. Thereby, since an abnormal value does not occur in the position near the inside of both ends in the width direction of the paste P, it is possible to prevent the abnormal value from being set to the coating height H and to obtain an accurate coating height H. it can.

  Next, the paste application | coating operation | movement which the above-mentioned paste application | coating apparatus 1 performs is demonstrated. In addition, the control part 8 of the paste coating apparatus 1 performs a paste coating process based on various information and various programs.

  As shown in FIG. 7, the control unit 8 controls each unit to perform paste application (step S1), and then obtains a cross-sectional area of the paste applied to the application surface of the application object W (step S2). Finally, pass / fail determination is performed (step S3). Here, the cross-sectional area is an example, and in short, it is only necessary to determine whether or not the coating amount of the applied paste is within an appropriate range, so only the coating height H is measured and based on the measured value. The determination may be made, or the coating height H and the coating width L may be measured and determined based on the respective values.

  In step S1, the control unit 8 first, in each of the coating units 3A to 3D, places marks for positioning the coating object W on the stage 2 (for example, a plurality of marks) by the imaging unit 3d prior to paste coating. Take an image. Thereafter, the control unit 8 detects the positioning mark imaged by the imaging unit 3d by image recognition, and specifies the application position where the paste is applied on the application surface of the application object W.

  Next, the control unit 8 controls the coating units 3A to 3D, the X-axis moving devices 4A and 4B, and the Y-axis moving devices 6A and 6B, and the nozzles of the coating heads 3a of the coating units 3A to 3D. 3a1 and the object to be coated W on the stage 2 are moved relative to each other along the surface to be coated, and the paste is discharged from the tip of the nozzle 3a1 of each coating head 3a. A plurality of (for example, four) predetermined application patterns (paste patterns) are simultaneously drawn on the application surface. The controller 8 repeats this drawing and draws a predetermined number of application patterns on the application surface of the application object W on the stage 2. The predetermined number is set in advance according to the size of the application object W and the size of the application pattern.

  During the drawing, the control unit 8 receives the measurement value of the displacement of the application surface of the application object W output from the laser displacement meter 3c in each of the application units 3A to 3D. Based on the received measurement value, the control unit 8 stores the distance between the tip of the nozzle 3a1 of the coating head 3a and the surface to be coated of the coating object W on the stage 2 in the gap information stored in the storage unit. Maintain the set value. In this way, as a result of the separation distance between the tip of the nozzle 3a1 and the application surface of the application object W being maintained at the set value, the amount of paste applied to the application surface of the application object W is made uniform. It becomes possible to do.

  Next, in step S <b> 2, the control unit 8 applies the paste application height H and the paste application to each of a plurality of application patterns applied to the application surface of the application object W at preset measurement positions. The width L is detected. Here, the detection of the paste coating height H is performed using the laser displacement meters 3c of the coating units 3A and 3B. The detection of the paste application width L is performed by imaging the paste applied to the application surface of the application object W using the imaging units 3d of the application units 3A and 3B. At this time, the paste application height H and the paste application width L can be obtained for other application patterns using the other application units 3C and 3D in the same manner as described above. Each of the coating units 3A to 3D is controlled by the control unit 8 so as to operate without interfering with each other.

  Here, for example, as shown in FIG. 8, when the coating pattern has a rectangular frame shape, the above-described measurement positions include three locations for one line and a total of twelve locations (see the bold lines in FIG. 8). ) Is set. FIG. 8 is merely an example, and the measurement position and the number of measurements are not limited to those in FIG. Further, the rectangular frame-shaped coating pattern is a type of coating pattern having a shape having two straight lines that intersect with each other. Specifically, a set of opposing sides is provided in parallel with the Y-axis direction, and another set of opposing sides is provided in parallel with the X-axis direction. In this example, the sides parallel to the Y-axis direction (first line B1 and second line B2 in FIG. 8) correspond to one straight line in the rectangular coating pattern, and the sides parallel to the X-axis direction (FIG. The third line B3 and the fourth line B4) in FIG. 8 correspond to the other straight line.

  When measuring the above-described rectangular frame-shaped coating pattern, the coating units 3A and 3B are combined into one set, and first, the first line B1 of the coating pattern is measured at three locations by the laser displacement meter 3c of the coating unit 3A. At this time, the arrangement direction of the light projecting portion 3c1 and the light receiving portion 3c2 of the laser displacement meter 3c, that is, the optical path surface and the extending direction of the first line B1 (linear paste P) are parallel as in FIG. The controller 8 moves the laser displacement meter 3c in the parallel state in the X-axis direction by the X-axis moving device 4A and scans the first line B1 so as to cross the orthogonal direction. This scanning is performed at every three measurement positions, and the maximum value of each is obtained as the coating height H from the three measurement values obtained by the three scans. When obtaining the paste application height H, a laser displacement meter 3c having an arrangement direction (optical path surface) parallel to the paste stretching direction is selected and used.

  Next, the control unit 8 measures three positions of the second line B2 facing the first line B1 and parallel to the first line B1 with the laser displacement meter 3c of the coating unit 3A. At this time, similarly to the above, the control unit 8 moves the laser displacement meter 3c in the X axis along the arrangement direction of the laser displacement meter 3c, that is, the optical path surface and the extending direction of the second line B2 (linear paste P). It is moved in the X-axis direction by the moving device 4A, and is scanned across the second line B2. This scanning is performed at every three measurement positions, and the maximum value of each is obtained as the coating height H from the three measurement values obtained by the three scans.

  Thereafter, the control unit 8 measures the third line B3 orthogonal to the first line B1 at three points by the laser displacement meter 3c of the coating unit 3B. At this time, the arrangement direction of the laser displacement meter 3c, that is, the optical path surface and the extending direction of the third line B3 (linear paste P) are parallel. The controller 8 moves the laser displacement meter 3c in the parallel state in the Y-axis direction by the Y-axis moving devices 6A and 6B, and scans the third line B3 across the orthogonal direction. This scanning is performed at every three measurement positions, and the maximum value of each is obtained as the coating height H from the three measurement values obtained by the three scans.

  Finally, the control unit 8 measures the fourth line B4 facing the third line B3 at three locations by the laser displacement meter 3c of the coating unit 3B. At this time, the control unit 8 converts the laser displacement meter 3c in a state where the arrangement direction of the laser displacement meter 3c, that is, the optical path surface and the extending direction of the fourth line B4 (linear paste P) is parallel, to the Y-axis moving device 6A and 6B is moved in the Y-axis direction, and scanning is performed across the fourth line B4. This scanning is performed at every three measurement positions, and the maximum value of each is obtained as the coating height H from the three measurement values obtained by the three scans.

  In this way, the control unit 8 obtains three coating heights H for each line and a total of twelve coating heights H. Further, for each measurement position, the control unit 8 multiplies the paste application height H by the paste application width L obtained from the captured image, and multiplies the value by a predetermined constant K to obtain the paste cross-sectional area S. (S = H × L × K) is calculated. As described above, the constant K is set experimentally or theoretically based on the predicted cross-sectional shape (for example, semi-elliptical shape) of the paste after application. In addition, about the application | coating width | variety L here, based on the picked-up image of the said measurement position by the imaging part 3d imaged after the scanning of the laser displacement meter 3c in each measurement position of each application | coating line B1-B4. Calculated. The control unit 8 detects both end portions in the width direction of the paste applied linearly from the captured image of the imaging unit 3d using a known image processing technique. Then, the detected distance between both ends is obtained as the paste application width L.

  Next, in step S3, the control unit 8 determines whether or not the cross-sectional area of the paste at each measurement position obtained in step S2 is within a predetermined allowable range. When it is determined that the cross-sectional areas of all the twelve pastes are within the predetermined allowable range, the coated application target W is transported to the next step and used. On the other hand, if it is determined that the cross-sectional area of the paste is not within the predetermined allowable range, the coated application object W is removed without being transferred to the next step.

  In such a paste application process, for any of the four lines B1 to B4 of the rectangular frame-shaped application pattern, the arrangement direction of the laser displacement meter 3c of any of the four application units 3A to 3D, that is, the optical path surface Becomes parallel to the extending direction of the paste constituting the lines B1 to B4. It is possible to move the parallel laser displacement meter 3c in a direction perpendicular to the extending direction of the paste and measure the coating height of the paste. Thereby, the coating height of the paste is measured while maintaining the parallel of the optical path surface of the laser displacement meter 3c and the extending direction of the linear paste. Therefore, as shown in FIG. 5, the laser beam is irregularly reflected by the curved surface of the paste as measured when the laser displacement meter 3c is arranged in a state perpendicular to the extending direction of the paste. Therefore, measurement abnormality in which a measurement value extremely larger than the measurement value to be obtained is output is suppressed, the measurement accuracy of the paste application height is increased, and an accurate application height can be obtained. For this reason, it is possible to accurately determine whether or not the cross-sectional area of the paste is within the allowable range.

  In addition, when the application pattern is an application pattern having two straight lines in an orthogonal positional relationship like a rectangular frame-like application pattern, at least two laser displacement meters 3c of the application units 3A to 3D are connected to the light projecting unit. The arrangement direction of 3c1 and the light receiving part 3c2, that is, the optical path surface is arranged so as to be in a state parallel to one of the two straight lines and in a state parallel to the other straight line. This arrangement makes it possible to perform the measurement method described above.

  As described above, according to the first embodiment, at least two laser displacement meters 3c of the coating units 3A to 3D are arranged in the arrangement direction of the light projecting unit 3c1 and the light receiving unit 3c2, that is, the light projecting / receiving optical path of the laser light. The optical path surfaces including are arranged so as to cross each other. More specifically, one of the two laser displacement meters 3c is arranged so that the optical path surface is parallel to one of two orthogonal straight lines in the rectangular coating pattern, and the other laser displacement meter. 3c is arranged so that the optical path surface is parallel to the other straight line. As a result, even if the paste is applied to the application pattern of a shape (rectangular shape) having two straight lines intersecting (orthogonal) on the surface to be coated W of the application object W, the paste is applied to either of the two straight lines of the application pattern. In contrast, in a state where the optical path surface is along the extending direction of the paste (for example, a state along the parallel direction), the laser displacement meter 3c is moved in a direction crossing the extending direction of the paste (for example, an orthogonal direction), It becomes possible to measure the coating height of the paste.

  From this, it is possible to prevent a measurement abnormality that occurs because the arrangement direction of the optical path surface of the laser displacement meter 3c is orthogonal to the extending direction of the paste as described with reference to FIGS. Thereby, even if it is the paste apply | coated along which direction of the orthogonal positional relationship in a rectangular-shaped application pattern, the application | coating height of a paste can be measured accurately and the exact application | coating height is obtained. It becomes possible. As a result, it is possible to accurately obtain the cross-sectional area of the paste calculated using the measured application height, and therefore it is possible to accurately determine whether or not the cross-sectional area of the paste is within the allowable range. Accordingly, a defective product whose cross-sectional area of the paste is out of the allowable range is not used for manufacturing the next process, and as a result, the quality of the coated product can be improved.

  Further, a laser displacement meter 3c for gap control is used for measuring the coating height of the paste. Thereby, it is not necessary to provide a new laser displacement meter 3c in order to measure the paste application height, and the complexity and cost of the apparatus can be suppressed. Similarly, the imaging unit 3d for positioning is used to detect the width of the paste. Thereby, it is not necessary to provide a new image pickup unit 3d for detecting the width of the paste, and it is possible to suppress complication of the apparatus and increase in cost.

  For the reasons described above, the paste application is applied to the paste applied along any direction in the application pattern having the shape of two intersecting (orthogonal) positional relations while using the laser displacement meter 3 for gap control. Since the height can be measured with high accuracy, it is possible to accurately determine the quality of the coating pattern formed by the paste.

(Second Embodiment)
A second embodiment of the present invention will be described with reference to FIG.

  The second embodiment is basically the same as the first embodiment. In the second embodiment, differences from the first embodiment will be described, the same parts as those described in the first embodiment will be denoted by the same reference numerals, and the description thereof will also be omitted.

  In the paste coating apparatus 1 according to the second embodiment, each of the coating units 3A to 3D moves the laser displacement meter 3c along the coated surface of the coating object W, in other words, as illustrated in FIG. A rotation drive unit 3e that rotates about an axis orthogonal to the surface is individually provided. The rotation drive unit 3 e is electrically connected to the control unit 8, and the drive is controlled by the control unit 8. The laser displacement meter 3c is configured to be rotatable in a direction along the surface to be coated of the coating object W by a rotation driving unit 3e.

  In step S2 according to the first embodiment (see FIG. 7), the control unit 8 uses the laser displacement meter 3c of the application unit 3A with respect to one application pattern at a preset measurement position to apply the object. The coating height of the paste applied to the coated surface of W is measured. Furthermore, using the imaging unit 3d of the application unit 3A, the paste applied to the application surface of the application object W is imaged at the same measurement position, and the application width is detected and obtained.

At this time, the paste application height and the paste application width can be obtained for other application patterns using the other application units 3B to 3D in the same manner as described above. The coating unit 3A and the coating unit 3B can perform measurement at the same time if the moving direction of the laser displacement meter 3c is the same. Similarly, the coating unit 3C and the coating unit 3D also move the laser displacement meter 3c. If the directions are the same, it is possible to measure simultaneously. Each of the coating units 3A to 3D is controlled by the control unit 8 so as to operate without interfering with each other.

  Here, as in the first embodiment, for example, when the application pattern is a rectangular frame, the above-described measurement positions are three locations for one line and a total of twelve locations (four in FIG. 8). (Refer to FIG. 8). FIG. 8 is merely an example, and the measurement position and the number of measurements are not limited to those in FIG. Further, the rectangular frame-shaped coating pattern is a type of coating pattern having a shape having two straight lines that intersect with each other.

  When measuring the above-described rectangular frame-shaped coating pattern, the first line B1 of the coating pattern is measured at three measurement positions by the laser displacement meter 3c of the coating unit 3A. At this time, the control unit 8 uses the rotation driving unit 3e to place the laser displacement meter 3c in the direction in which the light projecting unit 3c1 and the light receiving unit 3c2 are arranged, that is, the optical path surface including the light projecting / receiving optical path is the first line B1 The paste P) is rotated until it becomes parallel to the stretching direction. More specifically, the control unit 8 determines the extending direction (X-axis direction or Y-axis direction) of the paste at the current measurement position from the application pattern information and the measurement position information stored in the storage unit. Then, the rotation drive unit 3e is controlled so that the optical path surface of the laser displacement meter 3c is parallel to the determined direction (in this case, the Y-axis direction). Then, the control unit 8 moves the laser displacement meter 3c in the parallel state in the X-axis direction by the X-axis moving device 4A and scans it across the first line B1. This scanning is performed at every three measurement positions, and the maximum value of each is obtained as the coating height H from the three measurement values obtained by the three scans.

  Next, the control unit 8 measures the second line B2 facing the first line B1 at three measurement positions by the laser displacement meter 3c of the coating unit 3A. At this time, similarly to the above, the control unit 8 uses the rotational drive unit 3e to place the laser displacement meter 3c into the arrangement direction of the light projecting unit 3c1 and the light receiving unit 3c2, that is, the optical path surface is the second line B2 (linear paste P). Rotate until parallel to stretching direction. However, in this case, since the first line B1 and the second line B2 are parallel, it is not necessary to change the direction of the optical path surface of the laser displacement meter 3c. Then, the control unit 8 moves the laser displacement meter 3c in the parallel state in the X-axis direction by the X-axis moving device 4A and scans across the second line B2. This scanning is performed at every three measurement positions, and the maximum value of each is obtained as the coating height H from the three measurement values obtained by the three scans.

  Then, the control part 8 measures the 3rd line B3 orthogonal to the 2nd line B2 in the three measurement positions with the laser displacement meter 3c of the application | coating unit 3A. At this time, the control unit 8 rotates the laser displacement meter 3c by the rotation driving unit 3e until the arrangement direction, that is, the optical path surface is parallel to the extending direction of the third line B3 (linear paste P). In this case, since the extending direction of the second line B2 and the third line B3 is 90 ° rotated, the control unit 8 rotates the laser displacement meter 3c to rotate 90 ° clockwise or counterclockwise. The drive unit 3e is controlled. Then, the control unit 8 moves the laser displacement meter 3c in the parallel state in the Y-axis direction by the Y-axis moving devices 6A and 6B, and scans across the third line B3. This scanning is performed at every three measurement positions, and the maximum value of each is obtained as the coating height H from the three measurement values obtained by the three scans.

  Finally, the control unit 8 measures the fourth line B4 facing the third line B3 at three measurement positions by the laser displacement meter 3c of the coating unit 3A. At this time, the control unit 8 rotates the laser displacement meter 3c by the rotation driving unit 3e until the arrangement direction, that is, the optical path surface is parallel to the extending direction of the fourth line B4 (linear paste P). However, in this case, since the third line B3 and the fourth line B4 are parallel, it is not necessary to change the direction of the optical path surface of the laser displacement meter 3c. Then, the control unit 8 moves the laser displacement meter 3c in the parallel state in the Y-axis direction by the Y-axis moving devices 6A and 6B, and scans across the fourth line B4. This scanning is performed at every three measurement positions, and the maximum value of each is obtained as the coating height H from the three measurement values obtained by the three scans.

  In this way, the control unit 8 obtains three coating heights H for each line and a total of twelve coating heights H. Further, the control unit 8 multiplies the paste application height H by the paste application width L obtained from the captured image, multiplies the value by a predetermined constant K, and obtains a cross-sectional area S (S = H × L) of the paste. XK) is calculated. Note that the constant K is set experimentally or theoretically based on the predicted cross-sectional shape (for example, semi-elliptical shape) of the paste after application, as in the first embodiment.

  In such a measurement process, the arrangement direction of the laser displacement meter 3c, that is, the optical path surface is a straight line on the surface to be coated of the coating object W with respect to any of the four lines B1 to B4 of the rectangular frame-shaped coating pattern. In parallel with the stretching direction of the paste P. Then, it is possible to measure the coating height of the paste P by moving the laser displacement meter 3c whose optical path surface is parallel to the direction perpendicular to the extending direction of the paste P. Thereby, the coating height of the paste P is measured while maintaining the parallel of the optical path surface of the laser displacement meter 3c and the extending direction of the linear paste P. Therefore, similarly to the first embodiment, the laser beam is prevented from being irregularly reflected by the curved surface of the paste, the measurement accuracy of the paste application height is increased, and an accurate application height can be obtained. . For this reason, it is possible to accurately determine whether or not the cross-sectional area of the paste is within the allowable range.

  In addition, when the application pattern is an application pattern having two straight lines in an orthogonal positional relationship, such as a rectangular frame-like application pattern, at least one laser displacement meter 3c of the application units 3A to 3D is attached to the application object W. What is necessary is just to comprise so that rotation in the direction along the to-be-coated surface is possible. As a result, among the four coating units 3A to 3D, using the coating unit provided with the laser displacement meter 3c so as to be rotatable, the above-described measurement method is applied to the coating patterns applied by the four coating units 3A to 3D. Can be done.

  As described above, according to the second embodiment, the same effect as that of the first embodiment can be obtained. Specifically, even when the paste is applied to the application pattern of the application object W on the application pattern having a shape having two intersecting straight lines, the optical path surface is set to both of the two straight lines of the application pattern. Along the extending direction of the paste (for example, parallel), the laser displacement meter 3c is moved in a direction crossing the extending direction of the paste (for example, an orthogonal direction), and the coating height of the paste is measured. As a result, the measurement accuracy of the paste application height is increased, and an accurate application height can be obtained. Therefore, whether or not the cross-sectional area of the paste is within the allowable range is determined accurately. Accordingly, a defective product whose cross-sectional area of the paste is out of the allowable range is not used for manufacturing the next process, and as a result, the quality of the coated product can be improved.

(Other embodiments)
The above-described embodiments according to the present invention are examples, and the scope of the invention is not limited thereto. The above-described embodiment can be variously modified. For example, some components may be deleted from all the components shown in the above-described embodiment, and further, components according to different embodiments may be appropriately combined. Also good.

  In the above-described embodiment, the measurement is performed at three measurement positions for each line of the rectangular frame-shaped application pattern, but is not limited thereto. For example, in FIG. 8, first, the laser displacement meter 3c is scanned from the first line B1 side toward the second line B2 side. During this scan, measurement is performed at the first measurement position of the first line B1 (the leftmost thick line in the first line B1), and then the first measurement position of the second line B2 (the leftmost in the second line B2). (Measure thick line). Next, the scanning direction is turned back, the measurement is performed at the second measurement position of the second line B2 (the central thick line in the second line B2), and the second measurement position of the first line B1 (in the first line B1) is kept as it is. Measure at the middle thick line). Thereafter, the scanning direction is turned back again, the measurement is performed at the third measurement position of the first line B1 (the rightmost thick line in the first line B1), and the third measurement position (second second) of the second line B2 is kept as it is. You may make it measure by the thick line of the rightmost part in line B2. In this case, the laser displacement meter 3c of the coating unit 3A reciprocates across the first line B1 and the second line B2. This measurement method is effective when the size of the coating pattern is relatively small. In the third line B3 and the fourth line B4, the same measurement method as described above in which the laser displacement meter 3c of the coating unit 3B continuously reciprocates across the third line B3 and the fourth line B4 is used. Is possible.

  In the above-described embodiment, the measurement of the second line B2 is performed after the measurement of the first line B1 is completed. However, the present invention is not limited to this. For example, the third line B3 is measured after the measurement of the first line B1 is completed. May be measured, or the measurement of the fourth line B4 may be performed. Further, the measurement start line is not limited to the first line B1, and may be another line.

  Further, in the above-described embodiment, when performing paste application or measurement of paste application height, the application head 3a or laser displacement meter is moved by moving the application head 3a or laser displacement meter 3c in the X-axis direction or Y-axis direction. Although 3c and the application | coating target object W are moved relatively, it is not restricted to this. For example, the stage 2 on which the application object W is mounted may be moved in the X-axis direction or the Y-axis direction so that the application head 3a or the laser displacement meter 3c and the application object W are relatively moved. By combining them, the coating head 3a or the laser displacement meter 3c and the coating object W may be moved relative to each other. That is, the application head 3a or the laser displacement meter 3c and the application target W may be relatively moved, and the driving method related to the relative operation is not limited.

  In the above-described embodiment, the application pattern having two intersecting straight lines is described as an example of a rectangular application pattern. However, the present invention is not limited to this. It may be a trapezoidal coating pattern or a polygonal coating pattern other than a quadrangle such as a triangle or a pentagon. In such a coating pattern, when there are three or more straight portions having different extending directions (extension directions), such as a triangle, a laser displacement meter whose optical path surface is parallel to each of the straight portions. The laser displacement meter 3c may be arranged with respect to the plurality of coating heads 3a so that at least one 3c exists.

  In the above-described embodiment, two coating units are provided for one support portion. However, the present invention is not limited to this, and one or three or more coating units may be provided. For example, when drawing a coating pattern having two straight lines intersecting the surface to be coated of the coating object W, and when six coating units are provided for one support portion, one of the two straight lines The laser displacement meter 3c whose optical path surface is parallel to a straight line and the laser displacement meter 3c whose optical path surface is parallel to another straight line may be alternately arranged with respect to the six coating units. . Or you may make it arrange | position separately with respect to six application | coating units into three of the half of one side, and three of the other half.

  In the above-described embodiment, the direction of the optical path surface of the laser displacement meter 3c is different by 90 ° between the two application units on one support portion. However, the present invention is not limited to this. You may make it make the direction of the optical path surface of the laser displacement meter 3c of an application | coating unit differ between two support parts. That is, the optical path surface is parallel to each of the linear portions having different extending directions provided in the coating pattern drawn on the coated surface of the coating object W in the plurality of coating units provided in the paste coating apparatus 1. It is sufficient that at least one laser displacement meter 3c exists.

  In the second embodiment described above, the laser displacement meter 3c is controlled to rotate at each measurement point so that the optical path surface of the laser displacement meter 3c is parallel to the paste extending direction (extension direction). The rotation angle of the total 3c may be set, and the rotation driving unit 3e may be controlled based on the set rotation angle.

DESCRIPTION OF SYMBOLS 1 Paste coating apparatus 3a Coating head 3c Laser displacement meter 3d Image pick-up part 3e Rotation drive part 4A X-axis movement apparatus (movement drive part)
4B X-axis movement device (movement drive unit)
5A support part 5B support part 6A Y-axis movement device (movement drive part)
6B Y-axis movement device (movement drive unit)
8 Control part W Application object

Claims (11)

The separation distance between the tip of the nozzle of the coating head and the surface to be coated based on the measurement value of a laser displacement meter provided integrally with the coating head and having a different laser light projecting path and light receiving path Is maintained at the set value, and while the paste is ejected from the nozzle, the nozzle and the application object are moved relative to each other in the direction along the application surface. In a paste coating apparatus that draws a coating pattern having a shape having a straight line and measures the coating height of the paste drawn on the coated surface using the laser displacement meter,
A plurality of the application heads integrally provided with the laser displacement meter are provided,
Wherein the plurality of laser displacement meter provided on at least one of the coating head, the light road including the projection optical path and the light receiving path is provided in the coating head along a straight line one of the two straight lines,
The laser displacement meter provided in at least one other of the plurality of coating heads is provided in the coating head such that the optical path surface is along the other straight line of the two straight lines. Paste applicator. A movement drive unit that relatively moves the coating head and the coating object in a direction along the surface to be coated;
A control unit for controlling the movement drive unit,
The laser is provided so that the optical path surface is along the extending direction of the paste for which the application height is measured when the application height of the paste drawn on the application surface is measured. The paste application apparatus according to claim 1, wherein the movement driving unit is controlled so that a displacement meter is moved relative to the application object in a direction intersecting with the extending direction of the paste. Provided with a plurality of support portions provided extending in a first direction along the coated surface and movable in a second direction perpendicular to the first direction along the coated surface;
A plurality of the application heads are provided on each of the support parts, and are movable along the first direction.
A laser displacement meter provided on at least one of the plurality of coating heads on the support portion is provided on the coating head such that the optical path surface is along one of the two straight lines. The laser displacement meter provided in at least one other of the coating heads is provided in the coating head so that the optical path surface is along the other straight line of the two straight lines. The paste coating apparatus according to 1 or 2 . 4. The paste coating apparatus according to claim 3 , wherein the laser displacement meters provided in the plurality of coating heads are arranged so that directions of the optical path surfaces are different between the adjacent coating heads. It provided integrally with the coating head, and the light projecting path of the laser beam and the light receiving path based on measurements of different laser displacement gauge, the distance between the coated surface of the tip and the object to be coated of the nozzle of the coating head Is maintained at the set value, and while the paste is ejected from the nozzle, the nozzle and the application object are moved relative to each other in the direction along the application surface. In a paste coating apparatus that draws a coating pattern having a shape having a straight line and measures the coating height of the paste drawn on the coated surface using the laser displacement meter,
A rotation drive unit for rotating the laser displacement meter;
By this rotational drive unit, the optical path surface including the light projecting path and the light receiving path of the laser displacement meter extends along the direction in which one of the two straight lines extends and the other straight line in the two straight lines extends. A controller that rotates the laser displacement meter so as to be positioned in a direction along the direction,
Paste coating apparatus comprising: a. A movement drive unit that relatively moves the coating head and the coating object in a direction along the surface to be coated;
When the control unit measures the coating height of the paste drawn on the surface to be coated, it follows the direction in which the paste is to be measured for both of the two straight lines. The movement driving unit is controlled to move the laser displacement meter having the optical path surface positioned in a direction in a direction crossing the extending direction of the paste with respect to the application target. The paste coating apparatus according to claim 5. Provided with a support portion that is provided extending in a first direction along the surface to be coated and movable in a second direction perpendicular to the first direction along the surface to be coated;
A plurality of the application heads are provided on the support portion so as to be movable along the first direction.
At least the laser displacement gauge provided in one, the paste coating apparatus according to claim 5 or 6 further characterized in that is provided rotatably by the rotary drive to the coating head of the plurality of coating heads . Paste coating apparatus according to any one of claims 1 to 7, characterized in that it comprises an imaging unit for measuring the width of the drawn in the coated surface paste. A positioning camera for imaging a mark for positioning the coating object;
The paste coating apparatus according to claim 8, wherein the positioning camera is also used as the imaging unit . The separation distance between the tip of the nozzle of the coating head and the surface to be coated based on the measurement value of a laser displacement meter provided integrally with the coating head and having a different laser light projecting path and light receiving path Is maintained at the set value, and while the paste is ejected from the nozzle, the nozzle and the application object are moved relative to each other in the direction along the application surface. In the paste coating method of drawing a coating pattern having a shape having a straight line, and measuring the coating height of the paste drawn on the coated surface using the laser displacement meter,
Wherein when measuring the coating height of the paste drawn on the coated surface, for both of the two straight lines, light road including the projection optical path and the light receiving path of the laser displacement gauge, the coating height A paste coating method, wherein the laser displacement meter is moved in a direction crossing the extending direction of the paste along the extending direction of the paste to be measured . The paste application method according to claim 10 , wherein the quality of the application pattern drawn on the application surface is determined based on the measured application height.

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