KR101196099B1 - Paste applying apparatus and paste applying method - Google Patents

Abstract

In the paste application device 1, the coating head 3A for applying the paste to the coating object K, the supporting member 5A for supporting the coating head 3A, and the supporting member 5A are coated with the coating target ( Laser range finder 7A which measures the separation distance to the movement mechanism 6A, 6B which moves along the surface of K), and the support member 5A in the moving direction of 5 A of support members with a laser beam. ) And a control unit 10 for controlling the application head 3A and the moving mechanisms 6A and 6B so as to draw a paste pattern on the application object K based on the measured separation distance.

Description

Paste application device and paste application method {PASTE APPLYING APPARATUS AND PASTE APPLYING METHOD}

The present invention relates to a paste coating device and a paste coating method for applying a paste to a coating object.

The paste coating device is used to manufacture various devices such as a liquid crystal display panel. This paste coating apparatus is equipped with the application | coating head which apply | coats a paste to an application | coating object, apply | pastes a paste to an application | coating object, moving the application | coating head, and forms a predetermined | prescribed paste pattern on an application object (for example, , Patent Document 1). In particular, in manufacture of a liquid crystal display panel, in order to stick two board | substrates, the paste application device is a paste which has sealing property and adhesiveness, such as a sealing agent, so that the display area of a liquid crystal display panel may be enclosed with respect to the board | substrate which is a coating target object. Apply.

Such a paste application device is configured such that the column supporting the application head and the application head movable along the column are also moved by the movement mechanism using the linear motor, respectively. At this time, the position control of a column and a coating head is performed using a linear scale. As this linear scale, in order to avoid the deformation | transformation by heat, it is possible to use the glass scale with a small thermal expansion coefficient. By the way, in recent years, as the size of the substrate increases, the operating stroke (movement range) becomes longer, and the linear scale becomes larger, so that it is difficult to increase the glass scale with high accuracy as the linear scale. Linear scales are used.

Patent Document 1: Japanese Patent Application Laid-Open No. 2002-346452

However, since the metal linear scale expands or contracts and deforms due to a change in the ambient environment (temperature, etc.), the scale interval of the linear scale changes, a position detection error occurs, and the coating accuracy decreases. In particular, when the ball screw or the linear motor gradually generates heat in accordance with the operation of the paste application device, the heat spreads around and is transmitted to the linear scale, and since the linear scale linearly expands, the interval between the scales of the linear scale becomes wider, resulting in position detection error. Throw it away. In addition, as the size of the substrate increases in recent years, the operating stroke (moving range) becomes long and the linear scale also increases, and thus, the cumulative error due to the expansion of the scale interval due to thermal expansion of the linear scale also increases.

This invention is made | formed in view of the above, The objective is to provide the paste application apparatus and paste application method which can suppress the fall of the application | coating precision with the change of surrounding environment.

According to a first aspect of the present invention, in a paste application device, an application head for applying a paste to an application object, a support member for supporting the application head, and a support member are moved along the surface of the application object. A laser beam is emitted in a moving mechanism, a reflecting portion provided on the supporting member, and a moving direction of the supporting member toward the reflecting portion to receive the reflected light, which is a laser beam reflected by the reflecting portion, and to measure a separation distance from the reflecting portion. It is provided with a control part which controls a coating head and a moving mechanism so that a paste pattern may be drawn on an application object based on the laser part and the separation distance measured by the laser part.

According to a second aspect of the present invention, in the paste application device, an application head for applying a paste to an application object, a support member for supporting the application head, and a support member are moved along the surface of the application object. A reflection mechanism having a moving mechanism to make a change, a slope having a gradually changing height along the direction of movement of the support member, and a reflection light, which is provided on the support member and emits laser light toward the slope, and is reflected by the slope, It is provided with the laser part which measures the separation distance with a reflection part, and the control part which controls an application | coating head and a moving mechanism so that a paste pattern may be drawn on an application object based on the separation distance measured by the laser part.

According to a third aspect of the present invention, in the paste application device, an application head for applying a paste to an application object, a support member for supporting the application head, and a movement for moving the application head along the support member A laser unit for emitting the laser light in the moving direction of the coating head toward the reflecting unit, the reflecting unit provided in the coating head and the reflecting unit, receiving the reflected light which is the laser light reflected by the reflecting unit, and measuring the separation distance from the reflecting unit. And a control unit for controlling the application head and the moving mechanism to draw a paste pattern on the application object based on the separation distance measured by the laser unit.

According to a fourth aspect of the present invention, in the paste application device, an application head for applying a paste to an application object, a support member for supporting the application head, and a movement for moving the application head along the support member Reflector which is provided in a mechanism, a support member, and has a inclined surface which gradually changes in height along the direction of movement of the application head, and a reflected light which is connected to the application head and emits laser light toward the inclined surface and is reflected by the inclined surface. And a control unit for controlling the coating head and the moving mechanism to draw a paste pattern on the coating object based on the separation distance measured by the laser unit and the laser unit measuring the separation distance from the reflecting unit. will be.

According to a fifth aspect of the present invention, in the paste application method, a coating head for applying a paste to an application object, a support member for supporting the application head, and a support member are moved along the surface of the application object. The laser part irradiates a laser beam to a reflection part by using the paste coating apparatus which has a moving mechanism to make it, a reflection part provided in the support member, and the laser part which radiates a laser beam in the moving direction of a support member toward a reflection part. Receiving the reflected light which is the laser light reflected by the reflecting unit, measuring the separation distance from the reflecting unit, controlling the coating head and the moving mechanism based on the measured separation distance, and drawing a paste pattern on the coating object. It is to have a process to do it.

According to a sixth aspect of the present invention, in the paste application method, an application head for applying a paste to an application object, a support member for supporting the application head, and a support member are moved along the surface of the application object. Laser using a paste coating apparatus which has a moving mechanism to make it, a reflection part which has a slope in which a height changes gradually along the moving direction of a support member, and a laser part provided in a support member and which emits a laser beam toward an inclined surface, And the laser beam is irradiated to the inclined surface to receive the reflected light, which is the laser light reflected by the inclined surface, to measure the separation distance from the reflecting portion, and to control the coating head and the moving mechanism based on the measured separation distance. It has a process of drawing a paste pattern on a coating object.

According to a seventh aspect of the present invention, in the paste application method, an application head for applying a paste to an application object, a support member for supporting the application head, and a movement for moving the application head along the support member Using a paste coating device comprising a mechanism, a reflecting portion provided in the coating head, and a laser portion for emitting the laser light in the direction of movement of the coating head toward the reflecting portion, the laser portion irradiates the reflecting portion with the laser light. A step of receiving the reflected light, which is the laser light reflected by the part, measuring the separation distance from the reflecting part, controlling the coating head and the moving mechanism based on the measured separation distance, and drawing a paste pattern on the coating object. To have.

An eighth feature according to an embodiment of the present invention is a paste coating method comprising: an application head for applying a paste to an application object, a support member for supporting the application head, and a movement for moving the application head along the support member. A paste coating device comprising a mechanism, a reflecting portion provided on the support member and having an inclined surface whose height gradually changes along the moving direction of the coating head, and a laser portion connected to the coating head and emitting laser light toward the inclined surface. By using the laser unit, a laser beam is irradiated onto the inclined surface to receive the reflected light, which is the laser light reflected by the inclined surface, and the separation distance from the reflecting portion is measured, and the coating head and the movement are based on the measured separation distance. It has a process of controlling a mechanism and drawing a paste pattern on a coating object.

1 is a perspective view showing a schematic configuration of a paste coating device according to a first embodiment of the present invention.
2 is an explanatory diagram for explaining the relationship between the environment (temperature, humidity, air pressure) and the correction value.
3 is a perspective view showing a schematic configuration of a part of a paste coating device according to a second embodiment of the present invention.
4 is a perspective view showing a schematic configuration of a modification of a part of the paste coating device shown in FIG. 3.
5 is a perspective view showing a schematic configuration of a part of a paste coating device according to a third embodiment of the present invention.
6 is a perspective view showing a schematic configuration of a part of a paste coating device according to a fourth embodiment of the present invention.
7 is a perspective view showing a schematic configuration of a part of a paste coating device according to a fifth embodiment of the present invention.
8 is a perspective view showing a schematic configuration of a part of a paste coating device according to a sixth embodiment of the present invention.

(1st embodiment)

EMBODIMENT OF THE INVENTION The 1st Embodiment of this invention is described with reference to FIG. 1 and FIG.

As shown in FIG. 1, in the paste application apparatus 1 which concerns on 1st Embodiment of this invention, the board | substrate K which is a coating object is in a horizontal state (in FIG. 1, the Y-axis direction orthogonal to it) And a plurality of coating heads 3A to 3D each applying a paste having sealing property and adhesiveness such as a sealing agent to the substrate stage 2 to be raised to the substrate stage 2 and the substrate K on the substrate stage 2. ), An X-axis moving mechanism 4A and an X-axis moving mechanism 4B for supporting each of the coating heads 3A to 3D so as to be movable in the X-axis direction (in Fig. 1) and moving along the X-axis direction, Support member 5A and support member 5B which support each application | coating head 3A-3D via those X-axis movement mechanism 4A and X-axis movement mechanism 4B, respectively, and those support members 5A. And a Y-axis moving mechanism 6A and a Y-axis moving device for supporting the supporting member 5B so as to be movable in the Y-axis direction (in FIG. 1) to move along the Y-axis direction. 6B, Y which is the movement direction of the laser range finder 7A which measures the separation distance to the support member 5A in the Y-axis direction which is the movement direction of the support member 5A, and the support member 5B. Laser range finder 7B for measuring the separation distance to the supporting member 5B in the axial direction, environmental detector 8 for detecting temperature, humidity, and air pressure, substrate stage 2, and Y-axis moving mechanism A mount 9 for supporting 6A, the Y-axis moving mechanism 6B, and the like, and a control unit 10 for controlling each portion are provided.

The substrate stage 2 is a mounting table which is fixed to the upper surface of the mount 9. This board | substrate stage 2 is equipped with the adsorption mechanism (not shown) which adsorb | sucks the board | substrate K, The board | substrate K is fixed and hold | maintained on the mounting surface of an upper surface by this adsorption mechanism. As the adsorption mechanism, for example, an air adsorption mechanism or the like is used. The substrate K such as a glass substrate is placed on the mounting surface of the substrate stage 2.

Each coating head 3A-3D has the accommodating cylinder 3a, such as a syringe which accommodates paste, and the nozzle 3b which communicates with the accommodating cylinder 3a, and discharges a paste, respectively. These application heads 3A-3D are respectively connected to the gas supply part (all are not shown) through a gas supply tube etc. Each coating head 3A-3D discharges the paste inside from the nozzle 3b by the gas supplied in the accommodation cylinder 3a, respectively.

These application heads 3A to 3D are provided in the X-axis moving mechanism 4A and the X-axis moving mechanism 4B, respectively, via the YZ axis moving mechanism 3c. This YZ-axis movement mechanism 3c is a movement mechanism which supports one coating head 3A-3D, and moves it to a Y-axis direction, Moreover, the Z-axis direction (in FIG. 1) orthogonal to a horizontal plane, ie, a substrate stage It is a moving mechanism which moves to the folding direction which folds application head 3A-3D with respect to (2). As the YZ axis moving mechanism 3c, for example, a feed screw mechanism using a ball screw or the like is used.

4A of X-axis movement mechanisms are provided in the front surface of 5A of support members, and X-axis movement mechanism 4B is provided in the front surface of support member 5B. The X-axis moving mechanism 4A supports the two coating heads 3A and 3B so as to be movable in the X-axis direction, and supports the application heads 3A and 3B in the X-axis direction, that is, the supporting member 5A. It is a moving mechanism to move separately along. Similarly, the X-axis moving mechanism 4B also supports the two coating heads 3C and 3D so as to be movable in the X-axis direction, and supports the coating heads 3C and 3D in the X-axis direction, that is, the supporting member 5B. It is a moving mechanism to move separately along. As the X-axis moving mechanism 4A and the X-axis moving mechanism 4B, for example, a linear motor mechanism using a linear motor, a feed screw mechanism using a ball screw, and the like are used. These X-axis moving mechanisms 4A and X-axis moving mechanisms 4B function as second moving mechanisms for moving the respective application heads 3A to 3D, respectively. Here, in the support members 5A and 5B, the surface which opposes each other is made into the front surface, and the surface which opposes is made into the back surface.

The supporting member 5A is a column supporting the two coating heads 3A, 3B via the 4A moving mechanism 4A, and similarly, the supporting member 5B is also mounted via the X axis moving mechanism 4B. It is a column which supports three application heads 3C and 3D. These supporting members 5A and 5B are each formed by stretching in a direction intersecting in the moving direction (Y-axis direction), for example, in a direction perpendicular to each other (X-axis direction). In addition, 5 A of support members and 5 B of support members are each formed in the rectangular parallelepiped shape, for example, and are provided in parallel with the mounting surface of the board | substrate stage 2. As shown in FIG. The supporting member 5A and the supporting member 5B move in the Y-axis direction by the Y-axis moving mechanism 6A and the Y-axis moving mechanism 6B, and face the mounting surface of the substrate stage 2. Position each application head 3A-3D at a position.

The Y-axis moving mechanism 6A and the Y-axis moving mechanism 6B are respectively provided on the upper surface of the mount 9 so as to sandwich the substrate stage 2 from both sides. These Y-axis moving mechanisms 6A and Y-axis moving mechanisms 6B cooperate with each other to support the supporting member 5A and the supporting member 5B in the Y-axis direction so as to be movable, and the supporting member 5A. And a moving mechanism for individually moving the supporting members 5B along the Y-axis direction. The support member 5A and the support member 5B are provided in these Y-axis movement mechanism 6A and Y-axis movement mechanism 6B. As the Y-axis moving mechanism 6A and the Y-axis moving mechanism 6B, for example, a linear motor mechanism using a linear motor, a feed screw mechanism using a ball screw, and the like are used. This Y-axis moving mechanism 6A and Y-axis moving mechanism 6B function as a first moving mechanism for moving the supporting members 5A and 5B.

The laser range finder 7A includes a laser unit 7a1 that emits laser light and receives reflected light, and a reflector 7b1 that reflects the emitted laser light toward the laser unit 7a1. Similarly, the laser range finder 7B also includes a laser portion 7a2 that emits laser light to receive the reflected light, and a reflecting portion 7b2 that reflects the emitted laser light toward the laser portion 7a2. These laser range finder 7A and the laser range finder 7B are respectively separated from the 1st separation distance with the support members 5A and 5B (support members 5A and 5B in the moving direction of the support members 5A and 5B). Function as a first laser range finder to measure the separation distance).

In addition, the laser range finders 7A and 7B are a well-known laser interference measuring apparatus. The laser interference measuring instrument detects a part of the emitted light extracted using the half mirror (built into the laser parts 7a1 and 7a2) and the reflected light reflected from the reflecting parts 7b1 and 7b2 (laser parts 7a1 and 7a2). And displacement of the reflecting portions 7b1 and 7b2 using interference fringes generated by the difference in the optical path lengths of the emitted light and the reflected light, and by the movement of the reflecting portions 7b1 and 7b2. The periodic change of the generated interference fringe is converted into a pulse, and the amount of movement (movement distance) of the reflecting portions 7b1 and 7b2 is measured based on the count value of this pulse. Therefore, the position of the home position (for example, the support member 5A in the Y-axis movement mechanism 6A) of the support members 5A and 5B on the 6-axis movement mechanism 6A by a limit sensor etc. is located. The moving end is mechanically determined respectively by the origin position of the supporting member 5A and the moving end on the side where the supporting member 5B is located, as the origin position of the supporting member 5B), and the amount of movement from each origin position is determined. By measuring by the laser range finder 7A, 7B, it is possible to measure the 1st separation distance with each support member 5A, 5B.

The laser portion 7a1 of the laser range finder 7A is positioned near the end of the support member 5A side of the Y-axis moving mechanism 6A so that the optical path of the laser beam is parallel to the Y-axis direction, specifically, the laser. It is located side by side outside the Y-axis movement mechanism 6A so that the light transmission surface of the laser beam of the part 7a1 and the edge part at the side of the support member 5A of the Y-axis movement mechanism 6A become substantially coplanar, and the mount 9 It is installed on the upper surface of. The reflecting portion 7b1 of the laser range finder 7A is fixed to the supporting member 5A so as to be able to reflect the laser light emitted from the laser portion 7a1 toward the laser portion 7a1, and the supporting member ( 5A) is installed to be movable. Similarly, the laser portion 7a2 of the laser range finder 7B also has an edge near the end of the support member 5B side of the Y-axis moving mechanism 6A so that the optical path of the laser beam is parallel to the Y-axis direction, specifically, The side of the Y-axis moving mechanism 6A is positioned side by side so that the light transmitting surface of the laser beam of the laser portion 7a2 and the end portion of the supporting member 5B side of the Y-axis moving mechanism 6A are substantially coplanar. It is installed on the upper surface of 9). Moreover, the reflecting part 7b2 of the laser range finder 7B is also fixed to the supporting member 5B so that the laser beam radiate | emitted from the laser part 7a2 can be reflected toward the laser part 7a2, and the supporting member ( 5B) is installed to be movable. Here, as each reflection part 7b1, 7b2, a prism etc. are used, for example.

These laser range finders 7A and 7B are electrically connected to the control section 10, respectively, and input the measured separation distances to the control section 10 as signals. In other words, the separation distance between the laser portion 7a1 and the supporting member 5A and the separation distance between the laser portion 7a2 and the supporting member 5B are measured and input to the controller 10. For this reason, the control part 10 becomes possible to grasp | ascertain the position of the support member 5A and the position of the support member 5B based on the separation distance (position information).

The environmental detector 8 is a sensor that detects air temperature, humidity, and air pressure around the paste application device 1. This environment detector 8 is provided in the vicinity of the optical path of the laser beam of the laser rangefinders 7A and 7B on the mount 9, for example, upwards just below the optical path, respectively. . The environmental detector 8 is electrically connected to the control unit 10, and inputs the detected temperature, humidity, and air pressure to the control unit 10 as a signal. For this reason, the control part 10 becomes possible to grasp | ascertain the change of the surrounding environment, for example, air refractive index, based on those air temperature, humidity, and air pressure (environmental information).

The mount 9 is provided on the bottom and is a mount that supports the substrate stage 2, the Y-axis moving mechanism 6A, the Y-axis moving mechanism 6B, and the like at a predetermined height position from the bottom surface. The upper surface of the mount 9 is formed in a plane, and the substrate stage 2, the Y-axis moving mechanism 6A, the Y-axis moving mechanism 6B, and the like are mounted on the upper surface of the mount 9.

The control part 10 prepares the microcomputer which controls each part intensively, and the memory | storage part (not shown in figure) which stores application | coating information, various programs, etc. concerning paste application | coating. Application | coating information contains the information regarding a predetermined | prescribed application | coating pattern, drawing speed (relative movement speed in the horizontal direction of board | substrate K and nozzle 3b), discharge amount of paste, etc. The control unit 10 controls the X-axis moving mechanism 4A, the X-axis moving mechanism 4B, the Y-axis moving mechanism 6A, the Y-axis moving mechanism 6B, and the like based on the application information and various programs. The nozzle 3b of each coating head 3A-3D and the board | substrate K on the board | substrate stage 2 are relatively moved in parallel to the surface direction of the board | substrate K, and the predetermined | prescribed coating pattern on the board | substrate K is carried out. Of paste is applied. In this coating operation, the control unit 10 controls the Y-axis moving mechanism 6A and the Y-axis moving mechanism 6B based on the separation distance measured by the laser range finder 7A to support the supporting member 5A. The position control of the support member 5B by controlling the Y-axis moving mechanism 6A and the Y-axis moving mechanism 6B based on the separation distance measured by the laser range finder 7B. Do it.

Here, the correction information as shown in FIG. 2 is stored in the storage unit, for example. This correction information is for correcting each separation distance measured by the laser range finder 7A and the laser range finder 7B based on the environmental information of the temperature, humidity, and air pressure detected by the environment detector 8. Information. Therefore, the control part 10 obtains the correction value corresponding to the detected temperature, humidity, and air pressure from correction information, and performs a correction operation | movement which corrects a clearance distance based on the correction value from time to time. In detail, the control part 10 specifies the constant determined by the detected temperature, humidity, and air pressure, and obtains the correction value corresponding to the specific constant from correction information. That is, in the correction information shown in FIG. 2, the vertical axis is a correction value, and the horizontal axis is an integer determined by air temperature, humidity, and air pressure. For example, if the air temperature is 20 ° C., the humidity is 30%, and the air pressure is 1000 hPa, the constant is a numerical value A. If the air temperature is 25 ° C., the humidity is 40% and the air pressure is 1005 hPa, the integer is referred to as a numerical value B. A plurality of constants are set, a correction value corresponding to these constants is set, and correction information shown in FIG. 2 is generated.

Next, the application | coating operation | movement which such paste application apparatus 1 performs is demonstrated.

First, the paste application device 1 moves the supporting member 5A and the supporting member 5B in the Y-axis direction by the Y-axis moving mechanism 6A and the Y-axis moving mechanism 6B, respectively, and moves the X-axis. Each application | coating head 3A-3D is moved to an X-axis direction by the mechanism 4A and the X-axis movement mechanism 4B, respectively, and each application | coating head is applied to each application starting position of the board | substrate K on the board | substrate stage 2, respectively. Oppose each of 3A to 3D. Next, the paste coating device 1 moves each coating head 3A-3D in the Z-axis direction by each YZ-axis movement mechanism 3c, respectively, and each coating head 3A-is applied to a coating position from a standby position. 3D).

Here, the standby position and the application position are height positions with a predetermined gap with respect to the substrate K on the substrate stage 2. Application | coating position is a height position at the time of application | coating head 3A-3D apply | coating. At this time, the gap formed between the tip of the nozzle 3b of the coating heads 3A to 3D and the surface of the substrate K is of a size necessary to apply the paste to the surface of the substrate K at a predetermined coating amount. Is set. The standby position is a height position when the application heads 3A to 3D do not apply, and the gap at this time is much larger than the gap at the application position.

Thereafter, the paste coating device 1 is a Y-axis moving mechanism while discharging the paste from each nozzle 3b of each of the coating heads 3A to 3D based on the coating conditions (discharge pressure, moving speed, etc.). The support member 5A and the support member 5B are moved in the Y-axis direction by 6A and the Y-axis movement mechanism 6B, and the X-axis movement mechanism 4A and the X-axis movement mechanism 4B The application heads 3A to 3D are moved in the X-axis direction, the paste is applied to the surface of the substrate K on the substrate stage 2, and a predetermined paste pattern is formed (drawing). Here, the paste pattern (coating pattern) which each coating head 3A-3D forms is the same, for example, is rectangular frame shape. When the formation of the predetermined paste pattern is completed, the paste coating device 1 moves each of the coating heads 3A to 3D in the Z-axis direction by the respective YZ axis moving mechanisms 3c, respectively, to obtain the original from the coating position. Each coating head 3A-3D is located in a standby position. The discharge pressure is a gas pressure for discharging the paste in the receiving cylinders 3a of the respective coating heads 3A to 3D from the corresponding nozzles 3b, respectively, and the moving speed is a nozzle in the case of applying the paste ( 3b) and the relative movement speed of the substrate K. FIG.

Finally, the paste application device 1 applies the support member 5A and the support member 5B to the retracted position in the Y-axis direction, that is, each application by the 6-axis Y-axis movement mechanism and the 6-axis movement mechanism 6B. The heads 3A to 3D are moved to a retracted position that does not face the substrate K on the substrate stage 2, and wait for replacement of the substrate K on the substrate stage 2. When the replacement of the substrate K is completed, the above-described coating operation is repeated.

In this application | coating operation | movement, the laser range finder 7A and the laser range finder 7B are measuring the separation distance from time to time, and in this embodiment, are always measuring, and the control part 10 controls the laser range finder 7A. The Y-axis moving mechanism 6A and the Y-axis moving mechanism 6B are controlled based on the separation distance measured by, the position control of the support member 5A is performed, and the laser range finder 7B measures it. The Y-axis moving mechanism 6A and the Y-axis moving mechanism 6B are controlled based on the separated separation distance, and the position control of the supporting member 5B is performed. This eliminates the need to perform position control using a linear scale that expands or contracts in response to changes in the surrounding environment. Moreover, the laser distance measuring instruments 7A and 7B have a higher measurement accuracy than the linear scale. Since the position control of each support member 5A, 5B can be performed without being affected by the change of the surrounding environment, the position control can be performed with high accuracy even if the surrounding environment changes. The fall of application | coating precision can be suppressed. In addition, the control unit 10 obtains a correction value corresponding to the detected temperature, humidity, and air pressure from the correction information, and performs a correction operation from time to time to correct the measured value of the separation distance based on the correction value. This makes it possible to control the position of each of the supporting members 5A and 5B according to the change of the surrounding environment, so that even if the surrounding environment changes, the position control can be performed with higher precision, and as a result, the application accuracy is lowered. Not only can it be suppressed, but coating accuracy can be improved.

As described above, according to the first embodiment of the present invention, the Y-axis is provided on the basis of the respective distances provided by the laser distance measuring devices 7A and 7B and measured by the laser distance measuring devices 7A and 7B. By controlling the movement mechanism 6A and the Y-axis movement mechanism 6B, and performing the position control of each support member 5A, 5B, the position control using the linear scale which expands or contracts according to a change of the surrounding environment is performed. As compared with the case, since the position control of each support member 5A, 5B can be performed without being influenced by the change of surrounding environment, even if the surrounding environment changes, position control can be performed with high precision. Therefore, the fall of the application | coating precision by the change of surrounding environment can be suppressed, As a result, it becomes possible to form the paste pattern of desired shape correctly on the surface of the board | substrate K, and to improve the quality of the liquid crystal display panel manufactured Can be improved.

In addition, an environmental detector 8 is provided, and the separation distances measured by the laser range finders 7A and 7B are corrected and corrected based on the air temperature, humidity, and air pressure detected by the environmental detector 8. By controlling the position of each support member 5A, 5B based on each separation distance, it becomes possible to control the position of each support member 5A, 5B according to the change of the surrounding environment, so that even if the surrounding environment changes, Position control can be performed with precision, and as a result, not only the fall of application | coating precision can be suppressed but application | coating precision can be improved.

In addition, with the recent increase in the size of the liquid crystal display panel, the size of the substrate K increases, and the paste coating device 1 tends to increase in size. For this reason, since the support member 5A and the support member 5B are enlarged and the weight is increased, when the linear motor mechanism is used, a large one capable of obtaining a larger driving force also needs to be used when the linear motor for moving them is used. When the feed screw mechanism is used, the load on the ball screw is increased. Therefore, in the large linear motor, the heat generated by the operation also increases, and the heat generated by the operation also increases in the ball screw. Moreover, there exists a tendency for the number of application heads 3A-3D to increase from the objective of forming many paste patterns in large size board | substrate K at once, and improving productivity. As the number of the application heads 3A to 3D increases, the number of movable members increases accordingly, so that the heat generated by the movement of the application heads 3A to 3D becomes larger. Even in these cases, according to the embodiment of the present invention, occurrence of position detection error due to heat generation of the linear motor or heat generation of the ball screw can be suppressed, and a paste pattern having a desired shape can be accurately formed.

In addition, since the environmental detector 8 is provided in the vicinity of the optical path of the laser beams of the laser range finders 7A and 7B, it is possible to detect a change in the surrounding environment of the optical path of the laser beam in the vicinity thereof. The measured values of 7A and 7B can be accurately corrected according to the change of the surrounding environment of the optical path, and the measurement accuracy of the separation distance by the laser distance measuring instruments 7A and 7B can be further improved.

Moreover, the laser part 7a1 of the laser range finder 7A which measures the separation distance with 5 A of support members is arrange | positioned in the vicinity of the edge part by the side of the support member 5A in the Y-axis movement mechanism 6A, and it supports it. Since the laser part 7a2 of the laser range finder 7B which measures the separation distance with the member 5B was arrange | positioned in the vicinity of the edge part by the side of the support member 5B in the Y-axis movement mechanism 6A, each laser For example, two support members 5A and 5B that can shorten the measurement distance by the distance measuring instruments 7A and 7B support two regions where the substrate K is divided into two in the Y-axis direction. In the case where the paste is coated by the members 5A and 5B, the distance measured by the laser rangefinders 7A and 7B can be suppressed to about half of the dimension in the Y-axis direction of the substrate K. FIG. As a result, since the measured values of the laser range finders 7A and 7B are less likely to be affected by the change in the surrounding environment, the accuracy of the distance measured values by the laser range finders 7A and 7B is improved by that amount, thereby. It is possible to improve the coating accuracy of the drawing paste.

Since the separation distance with the supporting members 5A and 5B was directly detected by using the laser range finders 7A and 7B, the mechanical error is prevented from interfering with the measured value compared with the position detection device using a linear scale or the like. The reliability of precision improves, and it becomes possible to improve the application | coating precision of a paste also by this.

Moreover, since the laser range finders 7A and 7B were arrange | positioned only to the Y-axis movement mechanism 6A side, when the Y-axis movement mechanism 6A side was made into the operation side of the seal application apparatus by an operator, each laser part ( Since 7a1 and 7a2 are arrange | positioned at the operation side by an operator, it becomes possible to perform maintenance of the laser range finder 7A, 7B easily. For this reason, it becomes possible to stably maintain the distance measurement precision by the laser range finders 7A and 7B.

(2nd embodiment)

A second embodiment of the present invention will be described with reference to FIG. 3. In the second embodiment of the present invention, parts different from the first embodiment will be described. In addition, in 2nd Embodiment, the part same as the part demonstrated in 1st Embodiment is represented by the same code | symbol, and the description is abbreviate | omitted.

The paste coating apparatus 1 which concerns on 2nd Embodiment of this invention is the coating head 3A in the X-axis direction which is the moving direction of the coating head 3A, as shown in FIG. Laser distance meter 7C for measuring the separation distance to the laser beam), laser distance meter 7D for measuring the separation distance to the coating head 3B in the X-axis direction which is the moving direction of the coating head 3B, and In the laser distance measuring device 7E which measures the separation distance to the coating head 3C in the X-axis direction which is the moving direction of the coating head 3C, and the X-axis direction which is the moving direction of the coating head 3D. The laser range finder 7F which measures the separation distance to the application | coating head 3D of this is provided. These laser range finders 7C-7F are respectively provided in the support member 5A and the support member 5B. Therefore, in embodiment of this invention, since 4 application | coating heads 3A-3D are provided, 4 laser distance measuring devices 7C-7F are provided correspondingly to them. Each of these laser distance measuring devices 7C to 7F separates the separation distance from the coating heads 3A to 3D to the coating heads 3A to 3D in the moving direction of the coating heads 3A to 3D, respectively. It functions as a 2nd laser range finder measuring ().

The laser range finder 7C includes a laser portion 7a3 that emits laser light to receive the reflected light, and a reflecting portion 7b3 that reflects the emitted laser light toward the laser portion 7a3. Similarly, the laser range finder 7D also includes a laser portion 7a4 that emits laser light to receive the reflected light, and a reflecting portion 7b4 that reflects the emitted laser light toward the laser portion 7a4. The laser range finder 7E also includes a laser unit 7a5 that emits laser light to receive the reflected light, and a reflector 7b5 that reflects the emitted laser light toward the laser unit 7a5. In addition, the laser range finder 7F also includes a laser portion 7a6 that emits laser light to receive the reflected light, and a reflecting portion 7b6 that reflects the emitted laser light toward the laser portion 7a6.

The front side (Y-axis) in FIG. 3 in the support member 5A so that the optical path of a laser beam may become parallel to the X-axis direction (stretching direction of the support member 5A) of the laser part 7a3 of the laser range finder 7C. It is located in the end of 6 A of moving mechanisms, and is provided in the upper surface of 5 A of support members. In addition, the reflecting portion 7b3 of the laser range finder 7C has a YZ axis moving mechanism 3c for the coating head 3A so that the laser beam emitted from the laser portion 7a3 can be reflected toward the laser portion 7a3. It is fixed to), and it is provided so that a movement is possible with 3 A of application heads which move to an X-axis direction. Similarly, the laser part 7a4 of the laser range finder 7D also has the inner side in FIG. 3 in the supporting member 5A so that the optical path of the laser beam becomes parallel to the X-axis direction (the stretching direction of the supporting member 5A). It is located in the end of Y-axis movement mechanism 6B side, and is provided in the upper surface of 5A of support members. Moreover, the reflecting part 7b4 of the laser range finder 7D also has the YZ-axis movement mechanism 3c for the application | coating head 3B so that the laser beam radiate | emitted from the laser part 7a4 can be reflected toward the laser part 7a4. It is fixed to), and it is provided so that a movement is possible with the coating head 3B which moves to an X-axis direction. Here, as each reflection part 7b3, 7b4, a prism etc. are used, for example.

The front side (Y-axis) in FIG. 3 in the support member 5B in the laser part 7a5 of the laser range finder 7E so that the optical path of a laser beam may become parallel to the X-axis direction (stretching direction of the support member 5B). It is located in the end of 6 A of moving mechanisms, and is provided in the upper surface of the support member 5B. Moreover, the reflecting part 7b5 of the laser range finder 7E has the YZ-axis movement mechanism 3c for 3 C of application heads so that the laser beam radiate | emitted from the laser part 7a5 can be reflected toward the laser part 7a5. It is fixed to), and is movable so that it may move with 3 C of coating heads which move to an X-axis direction. Similarly, the laser part 7a6 of the laser range finder 7F also has the inner side in FIG. 3 in the support member 5B so that the optical path of a laser beam may become parallel to the X-axis direction (stretching direction of the support member 5B). It is located in the end of the Y-axis movement mechanism 6B side, and is provided in the upper surface of the support member 5B. In addition, the reflecting portion 7b6 of the laser range finder 7F also has a YZ axis moving mechanism 3c for the coating head 3D so that the laser beam emitted from the laser portion 7a6 can be reflected toward the laser portion 7a6. It is fixed to) and is movable so that it may move with the coating head 3D which moves to an X-axis direction. Here, as each reflection part 7b5, 7b6, a prism etc. are used, for example.

These laser range finders 7C-7F are electrically connected to the control part 10, respectively, and input the measured separation distance to the control part 10 as a signal. In other words, the separation distance between the laser portion 7a3 and the application head 3A, the separation distance between the laser portion 7a4 and the application head 3B, the separation distance between the laser portion 7a5 and the application head 3C, and the laser The separation distance between the portion 7a6 and the application head 3D is measured and input to the controller 10. For this reason, the control part 10 can grasp | ascertain the position of each application | coating head 3A-3D based on these separation distance (positional information).

In addition, although illustration is abbreviate | omitted, also about these laser range finders 7C-7F like the laser range finders 7A and 7B, the optical direction side is located in the vicinity of the optical path, for example in the side of an optical path, for example. Each of the environmental detectors.

The control unit 10 controls the X-axis moving mechanism 4A and the X-axis moving mechanism 4B based on the separation distances measured by the respective laser range finders 7C to 7F, and each coating head 3A to ... 3D) position control. This makes it possible to perform the position control of each of the coating heads 3A to 3D without being influenced by changes in the surrounding environment (temperature, etc.), so that the position control can be performed with high accuracy, and as a result, the coating accuracy is lowered. Can be suppressed. Further, the control unit 10 obtains correction values corresponding to the temperature, humidity, and air pressure detected by the environmental detector from the correction information, and calculates the separation distances with the respective application heads 3A to 3D based on the correction values. A correction operation to correct is performed at any time. This makes it possible to control the positions of the respective coating heads 3A to 3D in accordance with the change of the surrounding environment, so that the position control can be performed with high accuracy even if the surrounding environment changes, and as a result, the decrease in the coating accuracy is suppressed. In addition, the coating accuracy can be improved.

As described above, according to the second embodiment of the present invention, the same effects as in the first embodiment can be obtained. Moreover, 4 A-axis movement mechanisms 4A are provided for each application | coating head 3A-3D, and each laser distance measuring device 7C-7F is installed, and based on each separation distance measured with those laser distance measuring devices 7C-7F. ) And the X-axis moving mechanism 4B, and the position control of each coating head 3A to 3D is performed, compared with the case of performing position control using a linear scale that expands or contracts according to changes in the surrounding environment. Since the position control of each coating head 3A-3D can be performed without being influenced by the change of surrounding environment, position control can be performed with high precision, As a result, the fall of the application | coating precision by the change of surrounding environment is suppressed. can do.

Moreover, the environmental detector 8 is provided, each separation distance is correct | amended based on the temperature, humidity, and air pressure which were detected by the environmental detector 8, and each application | coating head 3A-based on each correction distance which was corrected. By controlling the position of 3D), it becomes possible to control the positions of the respective coating heads 3A to 3D in accordance with the change of the surrounding environment, so that the position control can be performed with higher accuracy even if the surrounding environment changes. Not only can the fall of the coating accuracy be suppressed, but the coating accuracy can be improved.

In addition, as shown in FIG. 4, when 1 application | coating head 3E is newly provided in the support member 5A which supports two application | coating heads 3A, 3B, the application head 3E moves. The laser range finder 7G which measures the separation distance to the application | coating head 3E in the X-axis direction which is a direction is provided. This laser range finder 7G is equipped with the laser part 7a7 and the reflecting part 7b7, and is the same structure as the other laser range finders 7C-7F. The laser range finder 7G is located on the same side as the laser range finder 7D, and is provided so that the position detection of the application | coating head 3E is possible.

(Third embodiment)

A third embodiment of the present invention will be described with reference to FIG. 5. In 3rd Embodiment of this invention, the part different from 1st Embodiment is demonstrated. In addition, in 3rd Embodiment, the part same as the part demonstrated in 1st Embodiment is represented by the same code | symbol, and the description is abbreviate | omitted.

As shown in FIG. 5, the support member 5B is a columnar (moon-shaped) column which supports each coating head 3C, 3D. This support member 5B is located so that the extending | stretching part may follow the X-axis direction, and the leg part is provided on 6 A of Y-axis movement mechanisms, and 6 Y-axis movement mechanisms. 5A of support members are also formed in the same structure.

The reflecting portion 7b2 of the laser range finder 7B is provided inside the Y axis moving mechanism 6A, that is, inside the leg portion of the supporting member 5B. The laser part 7a2 is provided on the support stand 11 in accordance with the position of this reflecting part 7b2. This support 11 is mounted on the mount 9. Moreover, the reflecting part 7b1 and the laser part 7a1 of the laser range finder 7A for 5A of support members are also formed in the same structure.

In addition, the lid member 12 is located on the substrate stage 2 side on which the substrate K is placed and on the laser distance measuring devices 7A, 7B side, that is, on the optical path side of the laser beam emitted from the laser units 7a1, 7a2. It is fixed to the inner side surface (surface located in the board | substrate stage 2 side) of 6 A of Y-axis movement mechanisms, and is provided so that it may divide. In particular, the lid member 12 measures the separation distance by the laser portion 7a2 and the reflecting portion 7b2, the measurement of the separation distance by the laser portion 7a1 and the reflecting portion 7b1, and further, the support member ( 5A) and the support member 5B are formed so as not to disturb the movement.

The cover member 12 has the wind (air) of the downflow blowing toward the substrate stage 2 between the laser portion 7a2 and the reflecting portion 7b2 and between the laser portion 7a1 and the reflecting portion 7b1. ) To prevent passage. For this reason, since it is suppressed that the wind of a downflow will adversely affect the surrounding environment of the optical path of a laser beam, etc., it becomes possible to suppress that the measurement precision of the separation distance by a laser beam falls, as a result, The coating precision can be improved.

Further, the downflow flows from the upper surface of the box covering the entire corner portion on the mount 9 toward the substrate stage 2, flows outward along the surface of the substrate stage 2, toward the side of the box, and on the side stand of the box. It is a flow of air which goes out of a box from the some outlet formed in the (9) side.

Here, even when such down flow is generated, since the above-mentioned lid member 12 is provided, the wind of downflow flowing from the substrate stage 2 side is between the laser portion 7a2 and the reflecting portion 7b2. And direct passage between the laser portion 7a1 and the reflecting portion 7b1, thereby preventing the surrounding environment of the optical path of the laser beams of the laser rangefinders 7A and 7B from fluctuating due to the passage of the downflow. It becomes possible. Therefore, the measurement precision of the laser range finders 7A and 7B can be maintained precisely.

Moreover, although the cable bear (trademark) for wiring may be provided in the outer side of 6 A of Y-axis movement mechanisms, even in this case, the laser distance measuring devices 7A and 7B are made inside 6 A of Y-axis movement mechanisms. Since the laser range finders 7A and 7B do not interfere with the installation of the cable bear, the installation is less likely to be affected by changes in the surrounding environment due to the movement of the cable bear. For this reason, the measurement accuracy of the laser range finders 7A and 7B can be maintained with high precision.

As described above, according to the third embodiment of the present invention, the same effects as in the first embodiment can be obtained. In addition, when the laser range finder 7B and the laser range finder 7A are provided inside the Y-axis movement mechanism 6A, by providing the cover member 12, the wind of downflow adversely affects the laser beam. It is suppressed and it becomes possible to suppress that the measurement precision of the separation distance by a laser beam falls. For this reason, position control can be performed with high precision, and as a result, application | coating precision can be improved.

(4th embodiment)

A fourth embodiment of the present invention will be described with reference to FIG. 6. In 4th Embodiment of this invention, the part different from 1st Embodiment is demonstrated. In addition, in 4th Embodiment, the part same as the part demonstrated in 1st Embodiment is represented by the same code | symbol, and the description is abbreviate | omitted.

As shown in FIG. 6, the laser range finder 7H includes a laser unit 7a8 and a laser unit 7a9 for emitting laser light and receiving reflected light, and a laser unit 7a8 and a laser unit for the emitted laser light. The reflection part 7b8 which has the inclined surface M which reflects toward 7a9 is provided.

The laser portion 7a8 is provided at the end of the supporting member 5A, that is, at the end face, and reflects the laser light which is emitted from the laser beam toward the inclined surface M of the reflecting portion 7b8 and reflected by the inclined surface M. Is received and the separation distance with the reflecting part 7b8 is measured.

The laser portion 7a9 is provided at the end of the support member 5B, that is, at the end face. Like the laser portion 7a8 described above, the laser portion 7a9 emits laser light toward the inclined surface M of the reflecting portion 7b8, and the inclined surface thereof. The reflected light which is the laser light reflected by (M) is received, and the separation distance with the reflecting part 7b8 is measured.

The reflecting portion 7b8 is provided on the mount 9 so as to be outside the Y-axis moving mechanism 6A and along the Y-axis moving mechanism 6A. The reflecting portion 7b8 changes so that its height gradually decreases (continuously) from one end of the support member 5A and the support member 5B, that is, from one end in the Y-axis direction to the other end. It has an inclined surface (M). As the reflection part 7b8, a mirror etc. are used, for example. That is, the reflecting part 7b8 can be made into the structure which provided the glass mirror which has the thickness uniform with this inclined surface M on the said inclined surface M, and has uniform thickness in the same shape (square shape). Moreover, the reflecting part 7b8 may be formed by forming the above-mentioned flat inclined surface M from metals, such as stainless steel, and mirror-processing the inclined surface M. As shown in FIG.

The control unit 10 grasps the position in the Y-axis direction of the supporting member 5A from the separation distance measured by the laser unit 7a8, and further supports the support member (from the separation distance measured by the laser unit 7a9. The position of the Y-axis direction of 5B) is grasped | ascertained. At this time, the control unit 10 uses the distance information indicating the relative relationship between the positions of the support members 5A and 5B in the Y-axis direction and the separation distance, and the Y of the support members 5A and 5B is measured from the measured separation distance. Determine the position in the axial direction. The distance information is stored in advance in the storage unit.

Here, the maximum value of the separation distance of the laser part 7a8 and the reflection part 7b8, and the maximum value of the separation distance of the laser part 7a9 and the reflection part 7b8 are 1st Embodiment (refer FIG. 1). The maximum value of the separation distance between the laser portion 7a1 and the reflecting portion 7b1 and the maximum value of the separation distance between the laser portion 7a2 and the reflecting portion 7b2 are very small.

The larger the maximum value of this separation distance is, the longer the optical path of the laser beam is, so that the laser beam is likely to be adversely affected by wind (air) in the downflow. Therefore, the adverse effect by the wind of downflow is suppressed by making the maximum value of the separation distance as small as possible. For this reason, since it is suppressed that the wind of a downflow adversely affects a laser beam, it can prevent that the measurement precision of the separation distance by a laser beam falls, and as a result, application | coating precision can be improved.

As described above, according to the fourth embodiment of the present invention, the same effects as in the first embodiment can be obtained. Moreover, the laser part 7a8 is provided in the edge part of the support member 5A, the laser part 7a9 is provided in the edge part of the support member 5B, and the reflection part 7b8 is 6A of Y-axis movement mechanisms. ), The maximum value of the separation distance between the laser portion 7a8 and the reflecting portion 7b8 and the maximum value of the separation distance between the laser portion 7a9 and the reflecting portion 7b8 are determined according to the first embodiment. Since the maximum value of the separation distance between the laser portion 7a1 and the reflecting portion 7b1 and the maximum value of the separation distance between the laser portion 7a2 and the reflecting portion 7b2 becomes smaller, the wind of the downflow is reduced to the laser beam. The adverse influence is suppressed, and it becomes possible to suppress that the measurement accuracy of the separation distance falls. For this reason, position control can be performed with high precision, and as a result, application | coating precision can be improved.

(5th embodiment)

A fifth embodiment of the present invention will be described with reference to FIG. 7. In the fifth embodiment of the present invention, parts different from the fourth embodiment will be described. In addition, in 5th Embodiment, the part same as the part demonstrated in 4th Embodiment is represented by the same code | symbol, and the description is abbreviate | omitted.

As shown in FIG. 7, the support member 5B is a columnar (moon-shaped) column which supports each coating head 3C, 3D. This support member 5B is located so that the extending | stretching part may follow the X-axis direction, and the leg part is provided on 6 A of Y-axis movement mechanisms, and 6 Y-axis movement mechanisms. 5A of support members are also formed in the same structure.

The laser portion 7a9 is provided inside the Y axis moving mechanism 6A, that is, inside the leg portion of the supporting member 5B. Similarly, the laser portion 7a8 is also provided inside the leg portion of the supporting member 5A. The reflecting portion 7b8 is provided on the mount 9 so as to follow the Y-axis movement mechanism 6A inside the 6-axis movement mechanism 6A.

In addition, the lid member 13 includes a laser portion 7a9 and covers the optical path of the laser beam from the laser portion 7a9 to the reflecting portion 7b8 and moves on the supporting member 5B together with the supporting member 5B. It is possibly installed. In particular, the lid member 13 is formed so as not to disturb the measurement of the separation distance by the laser portion 7a9 and the reflection portion 7b8 and the movement of the supporting member 5B. Similarly, the lid member 13 for the laser portion 7a8 is provided in the supporting member 5A.

The lid member 13 for the laser portion 7a9 prevents the wind (air) in the downflow from passing between the laser portion 7a9 and the reflecting portion 7b8. Similarly, the lid member 13 for the laser portion 7a8 also prevents the wind (air) in the downflow from passing between the laser portion 7a8 and the reflecting portion 7b8. For this reason, since it is suppressed that the wind of a downflow adversely affects a laser beam, it can prevent that the measurement precision of the separation distance by a laser beam falls, and as a result, application | coating precision can be improved.

As described above, according to the fifth embodiment of the present invention, the same effects as in the fourth embodiment can be obtained. In addition, in the case where the reflecting portion 7b8 is provided inside the Y-axis movement mechanism 6A, by providing the lid member 13, it is suppressed that the wind of the downflow adversely affects the laser beam, It becomes possible to suppress that measurement accuracy falls. For this reason, position control can be performed with high precision, and as a result, application | coating precision can be improved.

(6th embodiment)

A sixth embodiment of the present invention will be described with reference to FIG. 8. In the sixth embodiment of the present invention, parts different from the second embodiment will be described. In addition, in 6th Embodiment, the part same as the part demonstrated in 2nd Embodiment is represented by the same code | symbol, and the description is abbreviate | omitted.

As shown in FIG. 8, the laser range finder 7I includes a laser unit 7a10 and a laser unit 7a11 that emit laser light to receive reflected light, and a laser unit 7a10 and a laser unit that emit the emitted laser light. The reflection part 7b9 which has the inclined surface M which reflects toward 7a11 is provided.

The laser portion 7a10 is connected to the application head 3C by the connecting member 14a, and moves in the X axis direction together with the application head 3c. The laser portion 7a10 emits laser light toward the inclined surface M of the reflecting portion 7b9, receives the reflected light which is the laser light reflected by the inclined surface M, and sets the separation distance from the reflecting portion 7b9. Measure

The laser part 7a11 is connected to the application | coating head 3D by the connection member 14b, and moves to an X-axis direction with the application | coating head 3D. Like the laser unit 7a10 described above, the laser unit 7a11 emits laser light toward the inclined surface M of the reflecting unit 7b9 and receives the reflected light which is the laser light reflected by the inclined surface M. , The separation distance from the reflecting portion 7b9 is measured.

The reflecting portion 7b9 is provided on the outer surface of the supporting member 5B so as to follow the extending direction of the supporting member 5B. This reflection part 7b9 has the inclined surface M which changes so that the height may become low gradually (continuously) from the extending direction of the support member 5B, ie, from one edge part to the other edge part of the X-axis direction. have. As the reflection part 7b9, a mirror etc. are used, for example. That is, the reflecting part 7b8 can be made into the structure which provided the glass mirror which has the thickness uniform with this inclined surface M on the said inclined surface M, and has uniform thickness in the same shape (square shape). Moreover, the reflecting part 7b8 may be formed by forming the above-mentioned flat inclined surface M from metals, such as stainless steel, and mirror-processing the inclined surface M. As shown in FIG.

The control unit 10 grasps the position in the X-axis direction of the coating head 3C from the separation distance measured by the laser unit 7a10, and furthermore, from the separation distance measured by the laser unit 7a11. 3D) finds the position in the X-axis direction. At this time, the control unit 10 uses the distance information indicating the relative relationship between the position of the coating heads 3C and 3D in the X axis direction and the separation distance, and the X axis of the coating heads 3C and 3D from the measured separation distance. Identify the location of the direction. The distance information is stored in advance in the storage unit.

Here, the maximum value of the separation distance of the laser part 7a10 and the reflection part 7b9, and the maximum value of the separation distance of the laser part 7a11 and the reflection part 7b9 are 2nd Embodiment (refer FIG. 3). The maximum value of the separation distance between the laser portion 7a5 and the reflecting portion 7b5 and the maximum value of the separation distance between the laser portion 7a6 and the reflecting portion 7b6 are very small.

The larger the maximum value of this separation distance is, the longer the optical path of the laser beam is, so that the laser beam is likely to be adversely affected by wind (air) in the downflow. Therefore, the adverse effect by the wind of downflow is suppressed by making the maximum value of the separation distance as small as possible. For this reason, since it is suppressed that the wind of a downflow adversely affects a laser beam, it can prevent that the measurement precision of the separation distance by a laser beam falls, and as a result, application | coating precision can be improved.

As described above, according to the sixth embodiment of the present invention, the same effects as in the second embodiment can be obtained. In addition, by connecting the laser portion 7a10 to the coating head 3C, connecting the laser portion 7a11 to the coating head 3D, and providing the reflecting portion 7b9 along the supporting member 5B. The maximum value of the separation distance between the laser portion 7a10 and the reflecting portion 7b9 and the maximum value of the separation distance between the laser portion 7a11 and the reflecting portion 7b9 are the laser portion 7a5 in the second embodiment. ) Is smaller than the maximum value of the separation distance between the reflecting portion 7b5 and the maximum value of the separation distance between the laser portion 7a6 and the reflecting portion 7b6, so that the wind of the downflow adversely affects the laser light. It becomes possible to suppress that the measurement accuracy of the separation distance decreases. For this reason, position control can be performed with high precision, and as a result, application | coating precision can be improved.

(Other Embodiments)

In addition, this invention is not limited to embodiment mentioned above, A various change is possible in the range which does not deviate from the summary.

For example, in the above-mentioned embodiment, four application heads 3A-3D are provided in the support member 5A and the support member 5B, respectively, but it is not limited to this, but six Three application heads may be provided in the supporting member 5A and the supporting member 5B, respectively, and the number thereof is not limited. Moreover, in the above-mentioned embodiment, although the two support members 5A and 5B are provided, it is not limited to this, The number is not limited.

In addition, in the above-mentioned embodiment, although the sealing compound which has sealing property and adhesiveness is used as a paste, it is not necessary to necessarily have sealing property and adhesiveness, The paste etc. which have only one of sealing property and adhesiveness etc. It may be a paste having different properties.

Moreover, in embodiment mentioned above, although the laser range finder 7A, 7B was arrange | positioned at one end side of the support member 5A, 5B, it is not limited to this, but of the support member 5A, 5B, You may arrange | position also to the other end side. In this case, since the separation distances are measured at both ends of the supporting members 5A and 5B, respectively, the difference is obtained by comparing the separation distances at both ends for each of the supporting members 5A and 5B, thereby obtaining the respective supporting members 5A and 5B. The presence or absence of the rotation deviation in the horizontal plane of the Therefore, when the rotational deviation of the support members 5A and 5B is detected, when the Y-axis movement mechanisms 6A and 6B are controlled to eliminate this rotational deviation, the support members 5A and 5B cause the rotational deviation. Since the supporting members 5A and 5B are not moved in the Y-axis direction or the application heads 3A to 3D are moved on the supporting members 5A and 5B in the state of being held, the paste is applied on the substrate K. It becomes possible to apply | coat more precisely with a predetermined | prescribed coating pattern.

Moreover, in embodiment mentioned above, the board | substrate stage 2 is fixed on the mount 9, each application | coating head 3A-3D, the support member 5A, and the support member 5B are moved, and a board | substrate is moved Although it demonstrates by apply | coating paste on the surface of (K), it is not limited to this, The board | substrate stage 2 is rotated in the plane containing a Y-axis direction, an X-axis direction, and (theta) direction (X-axis and Y-axis). Direction) or the like, and for example, the substrate stage 2 may be configured to be movable in the same direction as the moving direction (Y-axis direction) of the supporting member 5A and the supporting member 5B. do. In this case, when the substrate K and the application heads 3A to 3D are relatively moved in the Y-axis direction, the substrate stage 2 and the supporting members 5A and 5B are moved in directions opposite to each other. Compared with the case where only the supporting members 5A and 5B are moved, the moving speeds of the substrate stage 2 and the supporting members 5A and 5B can be halved. For this reason, since the inertia force accompanying the movement of the board | substrate stage 2 and the support members 5A and 5B becomes small, the vibration which arises due to the acceleration or deceleration of the board | substrate stage 2 and the support members 5A and 5B can be reduced. Can be. As a result, the shape of the beginning and end of the paste pattern along the Y-axis direction, and the shape of the corner portion of the paste pattern to which the application direction is switched can be precisely applied to a desired shape, and a good quality liquid crystal display panel can be manufactured. have.

In addition, in the above-described embodiment, an example in which a laser interference measuring device is used as a laser distance measuring device for measuring the separation distance to the supporting members 5A and 5B and the separation distance to the application heads 3A to 3E has been described. You may use another laser range finder, for example, the laser range finder of the system which irradiates a laser beam toward a reflecting part, and measures the distance to a reflecting part according to the time to reflect and return.

Moreover, in 1st Embodiment mentioned above, the laser part 7a1 of the laser range finder 7A is arrange | positioned in the vicinity of the edge part by the side of the support member 5A in the Y-axis movement mechanism 6A, and a laser distance Although the laser part 7a2 of the measuring device 7B was arrange | positioned in the vicinity of the edge part by the side of the support member 5B in 6 A of Y-axis movement mechanisms, each laser part 7a1 and 7a2 is Y-axis movement mechanism. You may make it concentrate on one end side of 6A. For example, when arrange | positioning each laser part 7a1 and 7a2 in the vicinity of the edge part by the side of the support member 5A in the Y-axis movement mechanism 6A, the laser part 7a1 is provided on the upper surface of the mount 9. Are arranged, and the laser units 7a2 are disposed thereon, and the two laser units 7a1 and 7a2 are arranged with different heights, and the respective reflecting units 7b1 and 7b2 are also arranged in the respective laser units 7a1 and 7a2. The height is changed so as to correspond to the light path irradiated therefrom, and it is fixedly placed on the bottoms of the supporting members 5A and 5B. Thus, when each laser part 7a1, 7a2 is arrange | positioned centrally in the one end side of 6A of Y-axis movement mechanisms, when the end side is made into the operation side of the seal application apparatus by an operator, each laser Since the parts 7a1 and 7a2 are arranged on the operation side by the operator, it becomes possible to easily perform the maintenance of the laser range finders 7A and 7B. For this reason, it becomes possible to stably maintain the distance measurement precision by the laser range finders 7A and 7B.

As mentioned above, although embodiment of this invention was described, it is only what illustrates the specific example and does not specifically limit this invention, The concrete structure etc. of each part can be changed suitably. In addition, the action and effect described in embodiment only enumerate the most suitable action and effect which arise from this invention, and the action and effect by this invention are not limited to what was described in embodiment of this invention. . The present invention is used in, for example, a coating device for applying a paste to a coating object, a coating method, a manufacturing device for manufacturing a display panel, a manufacturing method, or the like.

Claims (12)

A paste coating device which draws a paste pattern on a coating object using a coating head,
A first support member,
A second support member provided in a positional relationship parallel to the first support member;
A first application head for applying a paste to an application object supported by the first support member;
A second application head for applying a paste to the application object supported by the second support member;
A moving mechanism for separately moving the first support member and the second support member along the surface of the application object;
A first reflecting portion provided in the first supporting member;
A second reflecting portion provided in the second supporting member;
It is arrange | positioned at the edge part by the side of the said 1st support member in the said moving mechanism, and emits a laser beam toward the said 1st reflecting part, receives the reflected light which is the laser beam reflected by the said 1st reflecting part, and the said 1st reflection A first laser unit for measuring a first separation distance that is a separation distance from the negative;
It is arrange | positioned at the edge part by the side of the said 2nd support member in the said moving mechanism, and emits a laser beam toward the said 2nd reflecting part, receives the reflected light which is the laser beam reflected by the said 2nd reflecting part, and the said 2nd reflection A second laser unit for measuring a second separation distance, which is a separation distance from a part;
The first coating head and the drawing to draw a paste pattern on the application object based on the first separation distance measured by the first laser unit and the second separation distance measured by the second laser unit. And a control unit for controlling the second coating head and the moving mechanism. An application head for applying the paste to the application object,
A support member for supporting the application head;
A moving mechanism for moving the support member along the surface of the application object;
A reflector having an inclined surface whose height gradually changes along a moving direction of the support member;
A laser unit provided in the support member, for emitting the laser light toward the inclined surface to receive the reflected light which is the laser light reflected by the inclined surface, and for measuring the separation distance from the reflecting unit;
And a control unit for controlling the application head and the moving mechanism to draw a paste pattern on the application object based on the separation distance measured by the laser unit. An application head for applying the paste to the application object,
A support member for supporting the application head;
A moving mechanism for moving the application head along the support member;
A reflector provided in the application head;
A laser unit which emits laser light toward the reflecting unit in a moving direction of the coating head, receives reflected light which is laser light reflected by the reflecting unit, and measures a separation distance from the reflecting unit;
An environmental detector for detecting air temperature, humidity and air pressure,
Correcting the separation distance measured by the laser unit based on the air temperature, the humidity and the air pressure detected by the environmental detector, and drawing a paste pattern on the application object based on the corrected separation distance. And a control unit for controlling the application head and the movement mechanism so as to be effective. An application head for applying the paste to the application object,
A support member for supporting the application head;
A moving mechanism for moving the application head along the support member;
A reflection portion provided on the support member and having an inclined surface that gradually changes in height along a moving direction of the coating head;
A laser unit connected to the application head and configured to emit laser light toward the inclined surface to receive reflected light, which is a laser light reflected by the inclined surface, and to measure a separation distance from the reflecting unit;
And a control unit for controlling the application head and the moving mechanism to draw a paste pattern on the application object based on the separation distance measured by the laser unit. The method according to any one of claims 1, 2 or 4,
Further comprising an environmental detector for detecting air temperature, humidity and air pressure,
The control unit corrects the separation distance measured by the laser unit based on the air temperature, the humidity, and the air pressure detected by the environmental detector, and based on the corrected separation distance, the coating head and the A paste coating device, characterized in that the movement mechanism is controlled. The method according to claim 1,
The moving mechanism supports both ends of the first support member and both ends of the second support member, moves the first support member and the second support member separately, and sandwiches the application object therebetween. It is composed of a pair of moving mechanisms,
The first reflecting portion is provided on the first supporting member between one of the pair of moving mechanisms and the application object,
The second reflecting portion is provided on the second supporting member between one of the pair of moving mechanisms and the application object;
And a lid member for dividing the coating object side and the optical path side of the laser beam emitted from the first laser portion and the second laser portion. The method according to claim 2,
The said moving mechanism is comprised by the pair of moving mechanism which supports both ends of the said support member, and moves the said support member,
The laser portion is provided on the support member inside the pair of moving mechanisms,
And a lid member which is provided on the support member so as to be movable together with the support member and divides the application target side and the optical path side of the laser beam emitted from the laser unit. As a paste coating method which draws a paste pattern on a coating object using an application head,
A first support member, a second support member provided in a positional relationship parallel to the first support member, a first application head for applying a paste to an application object supported by the first support member, and the second A second application head for applying a paste to the application object supported by the support member, a moving mechanism for individually moving the first support member and the second support member along the surface of the application object, and The laser beam toward the said 1st reflection part arrange | positioned at the 1st reflection part provided in the 1st support member, the 2nd reflection part provided in the said 2nd support member, and the said edge part by the side of the said 1st support member in the said moving mechanism. And a first laser portion for emitting a light and a second laser portion disposed at an end portion on the side of the second supporting member in the moving mechanism and emitting a laser beam toward the second reflecting portion. Using the agent application device,
The first laser unit receives laser light reflected by the first reflecting unit by irradiating laser light to the first reflecting unit, and receives a first separation distance that is a separation distance from the first reflecting unit. Measuring process,
The second laser unit receives laser light reflected by the second reflecting unit by irradiating laser light to the second reflecting unit, and adjusts a second separation distance, which is a separation distance from the second reflecting unit. Measuring process,
And controlling the first coating head, the second coating head, and the moving mechanism based on the measured first separation distance and the second separation distance, and drawing a paste pattern on the coating object. Paste application method. An application head for applying a paste to an application object, a support member for supporting the application head, a moving mechanism for moving the support member along the surface of the application object, and a height gradually along the moving direction of the support member By using the paste coating apparatus which has a reflecting part which has a changing inclined surface, and the laser part provided in the said support member, and emitting a laser beam toward the inclined surface,
Irradiating a laser beam to the inclined surface by the laser unit to receive reflected light which is laser light reflected by the inclined surface, and measuring a separation distance from the reflecting unit;
And a step of controlling the coating head and the moving mechanism based on the measured separation distance and drawing a paste pattern on the coating object. A coating head for applying a paste to an application object, a supporting member for supporting the coating head, a moving mechanism for moving the coating head along the supporting member, a reflecting portion provided in the coating head, and a reflecting portion. By using a paste coating device comprising a laser unit for emitting a laser beam in a moving direction of the coating head, and an environmental detector for detecting temperature, humidity, and air pressure,
Irradiating laser light to the reflecting unit to receive the reflected light, the laser light reflected by the reflecting unit, and measuring a separation distance from the reflecting unit;
Detecting temperature, humidity, and air pressure by the environmental detector;
Correcting the separation distance based on the detected air temperature, the humidity, and the air pressure; controlling the application head and the moving mechanism based on the corrected separation distance; and drawing a paste pattern on the application object. Paste coating method characterized by having a process to. An application head for applying a paste to an application object, a support member for supporting the application head, a moving mechanism for moving the application head along the support member, and a movement direction of the application head provided in the support member. By using a paste coating device having a reflecting portion having an inclined surface gradually changing in height along with the laser, and a laser portion connected to the application head, and emitting a laser light toward the inclined surface,
Irradiating a laser beam to the inclined surface by the laser unit to receive reflected light which is laser light reflected by the inclined surface, and measuring a separation distance from the reflecting unit;
And a step of controlling the coating head and the moving mechanism based on the measured separation distance and drawing a paste pattern on the coating object. The method according to any one of claims 8, 9 or 11,
Further has a process of detecting temperature, humidity and air pressure,
In the controlling step, the separation distance is corrected based on the detected air temperature, the humidity, and the air pressure, and the coating head and the moving mechanism are controlled based on the corrected separation distance. Way.

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