WO2021049320A1 - Coater, coating device, and coating method - Google Patents

Coater, coating device, and coating method Download PDF

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Publication number
WO2021049320A1
WO2021049320A1 PCT/JP2020/032555 JP2020032555W WO2021049320A1 WO 2021049320 A1 WO2021049320 A1 WO 2021049320A1 JP 2020032555 W JP2020032555 W JP 2020032555W WO 2021049320 A1 WO2021049320 A1 WO 2021049320A1
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WO
WIPO (PCT)
Prior art keywords
shim
coating
shim member
thickness
coating device
Prior art date
Application number
PCT/JP2020/032555
Other languages
French (fr)
Japanese (ja)
Inventor
展雄 堀内
Original Assignee
東レエンジニアリング株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2020134670A external-priority patent/JP7194152B2/en
Application filed by 東レエンジニアリング株式会社 filed Critical 東レエンジニアリング株式会社
Priority to CN202080063588.9A priority Critical patent/CN114423529B/en
Priority to KR1020227002692A priority patent/KR20220056171A/en
Publication of WO2021049320A1 publication Critical patent/WO2021049320A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B05C5/0262—Coating heads with slot-shaped outlet adjustable in width, i.e. having lips movable relative to each other in order to modify the slot width, e.g. to close it
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface

Definitions

  • the present invention relates to a coating device having a shim member for adjusting the opening area of a slit nozzle, a coating device provided with this coating device, and a coating method.
  • a substrate such as glass coated with a coating liquid such as a resist liquid (referred to as a coating substrate) is used.
  • This coating substrate needs to have a coating film uniformly formed, and is formed by a coating device that uniformly applies a coating liquid.
  • a coating device includes a stage 100 on which the substrate W is placed and a coating unit 102 having a coating device 101 for discharging a coating liquid, and a slit nozzle of the coating device 101.
  • a coating film is formed on the substrate W by relatively moving the substrate W and the coating device 101 while discharging the coating liquid from 103.
  • the applicator 101 is formed by combining the half-shaped half-bases 104 that are each divided by the slit nozzle 103, and the shim member 105 is formed between the half-bases 104.
  • the slit width S is adjusted by changing the thickness of the shim member 105 (see FIG. 10B).
  • a shim member 105 is prepared in units of 0.1 mm, and the slit width S is appropriately adjusted by the viscosity of the coating liquid. As a result, it is possible to handle a wide variety of coating liquids with one coating device 101 without remodeling the coating device 101.
  • the coater 101 has a problem that it is difficult to grasp the thickness of the shim member 105 attached to the coater 101. That is, in a state where the shim member 105 is interposed in the applicator 101, it cannot be confirmed from the outside. Even if it is attempted to confirm through the slit nozzle 103, it is difficult to measure the dimensions of the shim member 105 through the slit nozzle 103 because the slit width S of the slit nozzle 103 is formed in an extremely small gap.
  • the center of the slit width S shifts according to the thickness of the shim member 105, so that the thickness of the shim member 105 provided in the applicator 101 is always grasped. Need to keep. Therefore, when the shim member 105 to be interposed in the applicator 101 is selected, it is necessary to record the selected shim member 105, but the work is troublesome, and it is forgotten to record or artificially. There is a risk of recording incorrect dimensions due to mistakes. If there is an error in grasping the dimensions of the shim member 105, the center position of the slit width S will shift, so that the coating start position will shift and the quality of the product will deteriorate. In order to avoid such a problem, there has been a request to confirm the thickness of the shim member 105 with the shim member 105 interposed in the applicator 101 immediately before the start of the coating process.
  • An object of the present invention is to provide a coating method.
  • the coating device of the present invention is a coating device having a slit nozzle formed in a slit shape in which a discharge port for discharging a coating liquid extends in one direction, and the coating device is the slit.
  • a shim that is formed by combining half-split-shaped half-caps that are divided by a nozzle, is formed with a constant thickness, and adjusts the slit width in the application direction of the discharge port by interposing between the half-caps. It is characterized by including a member and a shim detection unit for detecting the dimensions of the shim member interposed between the half caps.
  • the shim detection unit for detecting the dimensions of the shim member since the shim detection unit for detecting the dimensions of the shim member is provided, the dimensions of the shim member provided in the applicator can be measured through the shim detection unit. Therefore, even when the shim member is interposed in the applicator, the type of the shim member intervening in the discharge port of the slit nozzle can be accurately grasped through the shim detection unit without disassembling the applicator.
  • the shim member is formed so that the coating width of the coating liquid discharged from the discharge port can be adjusted, and the depth dimension of the shim member detected by the shim detection unit corresponds to the coating width. It may have a formed configuration.
  • the coating width adjusted by the shim member can be accurately grasped even when the shim member is interposed in the applicator. Can be done.
  • the shim detection portion is formed by exposing an opening formed on the extension of the slit nozzle in the longitudinal direction and larger than the slit width and the shim member extended in the opening.
  • the shim member may be held in a state where a part of the exposed shim member is separated from the wall surface forming the opening.
  • the shim member in the opening is separated from the wall surface forming the opening, the distinction between the shim member and the wall surface becomes clear, and the dimensions of the shim member can be measured optically accurately. it can.
  • the inside of the opening may be formed in black.
  • a shim detection member having at least a thickness related to the thickness dimension of the shim member is provided separately from the shim member, and the shim detection member is detected in place of the shim member to detect the size of the shim detection member. It may be configured to detect the dimensions of the shim member.
  • the type of shim member can be accurately grasped without directly measuring the shim member.
  • the shim detection member has a thickness-related portion related to the thickness dimension of the shim member and an outer wall portion having a height position different from that of the thickness-related portion, and the thickness-related portion and the outer wall portion.
  • the structure may be formed in which the difference in height dimension from the above is made to correspond to the coating width.
  • the thickness dimension and coating width of the shim member can be grasped without directly measuring the shim member.
  • the coating apparatus and coating method of the present invention include any of the above coating devices and a stage on which the substrate is placed, and discharge the coating liquid from the slit nozzle of the coating device.
  • the shim measuring unit can accurately measure the dimensions of the shim member provided on the coating device through the shim detecting unit. Then, since the position information relative to the substrate such as the coating start position is corrected based on the measured dimensions, the position information is corrected according to the type of the shim member to maintain a high coating accuracy. Can be done.
  • the dimensions of the shim member can be accurately grasped even when the shim member is interposed in the coater.
  • FIG. 1 It is a perspective view which shows the coating apparatus of this invention. It is a figure which shows the vicinity of the leg part of a coating unit. It is a perspective view of the applicator seen from the substrate facing surface side. It is a figure which shows a coater and a shim member, (a) is a figure which shows a shim member, (b) is a figure which shows the coater in a state where a shim member is not intervening, (c) is a figure which shows a shim member intervening. It is a figure which shows the coater in the state which was done. It is a figure which shows the shim detection part in a coater.
  • FIG. 1 It is a figure which shows the coating device which has the shim detection member, (a) is the figure which shows the state which the thickness of a shim member is a predetermined thickness, (b) is the thickness of the shim member as compared with (a). It is a figure which shows the thin state. It is a figure which shows the shim detection member, (a) is the figure which shows the state which the height position of the thickness-related part is set to be flush with the flat reference plane, (b) is the height of the thickness-related part. It is a figure which shows the state which the position is set to the position which is higher than the flat reference plane by t.
  • FIG. 1 is a perspective view schematically showing a coating device according to an embodiment of the present invention
  • FIG. 2 is a view showing the vicinity of a leg portion of the coating unit
  • FIG. 3 is a side view of a main part of the coating unit. It is a schematic view seen from the side.
  • the coating apparatus forms a coating film of a liquid substance (hereinafter referred to as a coating liquid) such as a chemical solution or a resist solution on the substrate W, and forms a base 2 and a substrate.
  • a coating liquid a liquid substance
  • the direction in which the coating unit 30 moves is the X-axis direction
  • the direction orthogonal to this in the horizontal plane is the Y-axis direction
  • the direction orthogonal to both the X-axis and the Y-axis direction is Z.
  • the explanation will proceed as the axial direction.
  • the stage 21 is arranged in the central portion of the base 2.
  • the stage 21 is for mounting the carried-in substrate W.
  • the stage 21 is provided with a substrate holding means, and the substrate W is held by the substrate holding means.
  • a plurality of suction holes are formed on the surface of the stage 21, and by generating a suction force in the suction holes, the substrate W can be attracted to and held on the surface of the stage 21. There is.
  • the stage 21 is provided with a board raising / lowering mechanism for raising / lowering the board W.
  • a board raising / lowering mechanism for raising / lowering the board W.
  • a plurality of pin holes are formed on the surface of the stage 21 in addition to the suction holes, and lift pins (not shown) capable of raising and lowering in the Z-axis direction are embedded in the pin holes. .. That is, when the substrate W is carried in with the lift pin protruding from the surface of the stage 21, the substrate W can be brought into contact with the tip portion of the lift pin to hold the substrate W. Then, by lowering the lift pin from that state and accommodating it in the pin hole, the substrate W can be placed on the surface of the stage 21.
  • the coating unit 30 discharges the coating liquid onto the substrate W.
  • a coating film having a uniform thickness can be formed on the substrate W by discharging the coating liquid from the coating device 5 described later. That is, a predetermined amount of the coating liquid is discharged to the substrate W to form a state in which the substrate W and the slit nozzle 51 of the coating device 5 are connected by the coating liquid, and then the coating device 5 is run at a constant speed.
  • a coating film having a constant film thickness can be formed on the substrate W.
  • the coating unit 30 has a leg portion 31 and a beam portion 39 for supporting the coating device 5, and these are attached to the base 2 so as to have a portal shape. ing. That is, the beam portions 39 are attached to both leg portions 31 so as to straddle the stage 21 in the Y-axis direction.
  • the leg portion 31 is attached so as to be movable in the X-axis direction, and the beam portion 39 can scan on the stage 21 by moving the leg portion 31.
  • rails 22 extending in the X-axis direction are installed at both ends of the base 2 in the Y-axis direction, and the legs 31 are slidably attached to the rails 22.
  • a linear motor 33 is attached to the leg portion 31, and by driving and controlling the linear motor 33, the beam portion 39 moves in the X-axis direction with the applicator 5 facing the stage 21, which is arbitrary. It is possible to stop at the position of.
  • the beam portion 39 supports the coating device 5 so that the distance between the slit of the coating device 5 and the substrate becomes constant in the longitudinal direction by suppressing the bending deformation of the coating device 5.
  • the longitudinal end portions of the beam portion 39 are attached to both leg portions 31 arranged at both ends in the Y-axis direction, so that the applicator 5 has the same height in the longitudinal direction in the attached state. Is located in. That is, they are arranged so that the distance between the coater 5 supported by the beam portion 39 and the stage 21 is the same in the longitudinal direction.
  • the beam portion 39 is attached to the leg portion 31 so as to be able to move up and down.
  • the leg portion 31 is provided with a rail 37 extending in the Z-axis direction and a slider 35 that slides along the rail 37, and these sliders 35 and the beam portion 39 are connected to each other. ..
  • a ball screw mechanism driven by a servomotor is attached to the slider 35, and by driving and controlling the servomotor, the slider 35 can move in the Z-axis direction and can be stopped at an arbitrary position. It has become. That is, the applicator 5 is supported so as to be detachable from the substrate W held by the stage 21.
  • the coating device 5 discharges the coating liquid to form a coating film on the substrate W.
  • the coater 5 is a columnar member having a shape extending in one direction, and is provided in a state in which the longitudinal direction is along the Y-axis direction.
  • the coating device 5 is formed with a slit nozzle 51 formed in a slit shape extending in the longitudinal direction on the substrate facing surface 52 facing the substrate W, and the coating liquid supplied to the coating device 5 is supplied from the slit nozzle 51. It is designed to be uniformly discharged over the longitudinal direction. That is, it is uniformly discharged over the entire coating width (width in the Y-axis direction) determined by the slit nozzle 51.
  • the applicator 5 is formed by combining the half-shaped half-base 50 divided by the slit nozzle 51.
  • the slit nozzle 51 is formed by combining these half caps 50, and the slit width S (the dimension in the X-axis direction of the slit nozzle 51) is determined, so that the coating liquid corresponding to the opening area of the slit nozzle 51 is discharged. It is supposed to be done.
  • the applicator 5 is formed so that the shim member 6 can be attached.
  • the slit width S and the coating width dimension of the slit nozzle 51 can be adjusted.
  • the shim member 6 is formed in a flat plate shape, and is accurately formed so that the entire shim member 6 has a constant thickness.
  • the slit width S can be adjusted by sandwiching and attaching the shim member 6 between the half caps 50. That is, in the example of FIG. 4, the slit width S can be increased by the thickness of the shim member 6 by interposing the shim member 6 with respect to the state where the shim member 6 is not present (FIG. 4B). (Fig. 4 (c)).
  • the shim member 6 has a notch 61 formed in the central portion in the longitudinal direction. Since the notch 61 is usually formed in the coating width of the slit nozzle 51, when it is interposed between the half caps 50, the width dimension of the notch 61 matches the coating width of the applicator 5, and the shim. Even when the member 6 is interposed, the coating liquid can be discharged without changing the coating width of the slit nozzle 51.
  • the shim member 6 can adjust the coating width by adjusting not only the slit width S but also the width of the notch 61. That is, in FIG. 7A, the width dimension of the notch portion 61 is the coating width ⁇ of the normal coating device 5, and in FIG. 7B, the width dimension of the notch portion 61 is applied to the coating device 5. It is formed in a dimension ⁇ ( ⁇ ⁇ ) smaller than the width. By adjusting the width dimension of the notch portion 61 in this way, the coating width can be adjusted while adjusting the slit width S of the slit nozzle 51.
  • end notches 62 different from the notches 61 for adjusting the coating width are formed at both ends of the shim member 6.
  • the end notch 62 is provided in a different shape according to the coating width to be adjusted.
  • the depth direction (Z-axis direction) dimension of the end notch 62 is set according to the coating width, and the smaller the width dimension (coating width) of the notch 61, the smaller the end notch 62. It is formed so that the dimension ⁇ in the depth direction of is large.
  • the applicator 5 is provided with a shim detection unit 7 for detecting the dimensions of the intervening shim member 6 (see FIGS. 3 and 5).
  • the shim detection unit 7 is provided on the substrate facing surface 52 on the extension of the slit nozzle 51 in the longitudinal direction, and has an opening 71 formed wider than the dimension of the slit width S and the opening. It is formed by exposing the shim member 6 to 71.
  • the center of the circular opening 71 is arranged on the extension of the slit nozzle 51 in the longitudinal direction, and the slit nozzle 51 is half formed in the opening 71.
  • a shim member 6 interposed between the bases 50 is fixed so as to cross the opening 71. That is, by fixing the shim member 6 by being sandwiched by the wall surface 72 of the half mouthpiece 50 forming the opening 71, a part of the shim member 6 does not touch the wall surface 72 in a posture of crossing the center of the opening 71. It is fixed. That is, the shim member 6 is fixed so that a portion away from the wall surface 72 of the half mouthpiece 50 is formed in the opening 71, and the portion away from the wall surface 72 measures the size of the shim member 6 as described later. Used to do.
  • the coating width is not adjusted because the forming position of the end notch 62 is formed so as to correspond to the forming position of the opening 71.
  • the shim member 6 (FIG. 7A) is fixed so that the shim member 6 in the opening 71 is flush with the wall surface 72 (board facing surface 52) of the opening 71.
  • the shim member 6 in the opening 71 is fixed so as to be located at a position away from the substrate facing surface 52 in the depth direction.
  • the stage 21 is provided with a shim measuring unit 8 for detecting the dimensions of the shim member 6 in the shim detecting unit 7 (see FIGS. 1 and 2).
  • the shim measurement unit 8 uses a laser sensor 81 that irradiates the laser beam B (see FIG. 6) and receives the reflected light.
  • the shim measurement unit 8 has a Y on the side surface of the stage 21. Two locations are provided at positions separated in the axial direction. These laser sensors 81 are connected to a control device, and measure the height position of an object to be irradiated with the laser beam B by measuring the time during which the laser beam B is irradiated and the reflected light is received. be able to.
  • the laser sensors 81 are arranged at the formation positions of the shim detection portions 7 of the coater 5 in the Y-axis direction, and are arranged so that the laser beam B is emitted upward. Therefore, when the coating unit 30 moves in the X-axis direction and the coating device 5 passes through the shim measuring unit 8, the shim detecting unit 7 passes over the laser sensor 81, and the shim member 6 exposed in the shim detecting unit 7. It is possible to measure the dimensions of. In the present embodiment, since the opening 71 is formed to be wider (larger diameter) than the slit width S, it is possible to use an inexpensive large-diameter laser light diameter of the laser sensor 81.
  • FIG. 6 is a view showing a cross section of the shim detection unit 7, in which the shim member 6 sandwiched between the half caps 50 is irradiated with the laser beam B, and the applicator 5 and the laser beam B (laser sensor) are irradiated.
  • (81 position) indicates a relatively moved state (for convenience of explanation, the shim detection unit 7 and the laser beam B are described upside down).
  • the laser beam B from the laser sensor 81 (the leftmost laser beam B in FIG. 6) is irradiated to the bottom surface of the opening 71, and the reflected light is received.
  • the opening 71 is formed to be larger than the slit width S, and the laser beam B can irradiate the wall surface 72 forming the opening 71 and the bottom surface of the opening 71 without irradiating the shim member 6. It is formed to the extent.
  • the bottom surface and the side wall surface 72 of the opening 71 are colored black to reduce erroneous detection due to diffused reflection of the laser beam B from the laser sensor 81.
  • the applicator 5 and the laser sensor 81 move relatively as they are, the laser light B is irradiated to the shim member 6, and when the reflected light is received, the time for receiving the reflected light is shortened. The shim member 6 is detected. Then, when the coating device 5 and the laser sensor 81 move relatively as they are and the laser beam B irradiates the bottom surface of the opening 71, the time for receiving the reflected light becomes longer, so that the shim member 6 is detected. Is finished.
  • the thickness dimension of the shim member 6 provided in the applicator 5 is measured. be able to. Thereby, the slit width S can be calculated.
  • the measurement of the laser sensor 81 described above shows not only the thickness dimension of the shim member 6 but also the end.
  • the depth dimension ( ⁇ ) of the portion notch 62 is measured at the same time.
  • the type of the shim member 6 is specified from the measured depth dimension, and the coating width ( ⁇ ) is grasped. In this way, the type of shim member 6 provided on the applicator 5 can be detected from the shim detection unit 7 without disassembling the applicator 5, and the coating width and the slit width S can be grasped.
  • the coating device has a control device that comprehensively controls drive devices such as a linear motor and a servo motor, and these drive devices are driven and controlled through the control device.
  • the control device can calculate the thickness dimension d of the shim member 6 and the depth dimension of the end notch 62 from the time change of the laser beam B measured by the shim measuring unit 8 as described above. Then, in the present embodiment, the true thickness dimension d of the shim member 6 can be obtained with respect to the thickness dimension d of the shim member 6.
  • FIG. 8 is a diagram showing a state in which the thickness of the shim member 6 is measured
  • FIG. 8A is a diagram showing a positional relationship between the shim member 6 and the laser beam B
  • FIG. 8B is a diagram showing the received laser beam. It is a figure which shows the thickness dimension d of the shim member 6 measured by B. That is, as shown in FIG.
  • the dimension of the intervening shim member 6 (dimension d in FIG. 8) is measured as a dimension larger than the actual dimension d (dimension d'). .. This is because when the laser beam B approaches the shim member 6 from the bottom surface of the opening 71, the center of the laser beam B irradiates the bottom surface of the opening 71, but the light that irradiates the shim member 6. This is because the shim measuring unit 8 reacts to the reflected light, so that it is recognized as a thickness dimension d'larger than the actual thickness dimension d of the shim member 6.
  • the error of the thickness dimension d' is constant depending on the speed at which the laser beam B moves at the time of measurement and the diameter of the laser beam, and the bottom surface and the side wall surface 72 of the opening 71 are colored black.
  • the variation of is suppressed as much as possible. Therefore, in the control device, the dimension d corresponding to the measured dimension d'is stored in advance, and the actually measured dimension d'is corrected as the dimension d.
  • the thickness dimension d of the shim member 6 interposed in the applicator 5 can be accurately grasped.
  • the center position of the slit width S is calculated from the measured thickness dimension of the shim member 6, and the deviation of the center position of the slit width S is corrected. That is, when the slit width S when the shim member 6 is not interposed is the dimension s, the slit width S when the shim member 6 is interposed is s + d, and the center position of the slit width S is (s + d) / 2. It becomes. As a result, the coating start position when the shim member 6 is interposed is corrected, and the coating operation can be started accurately from the coating start position regardless of which shim member 6 is interposed. It has become like.
  • the coating device 5 since the shim detection unit 7 for detecting the dimensions of the shim member 6 is provided, it is provided in the coating device 5 through the shim detection unit 7. The dimensions of the shim member 6 can be measured. Therefore, even when the shim member 6 is interposed in the applicator 5, the type of the shim member 6 intervening in the discharge port of the slit nozzle 51 is accurately grasped through the shim detection unit 7 without disassembling the applicator 5. can do.
  • the shim measuring unit 8 can accurately measure the dimensions of the shim member 6 provided on the applicator 5 through the shim detecting unit 7, and based on the measured dimensions, the shim member 6 and the substrate such as the coating start position can be measured. Since the relative position information is corrected, the position information is corrected according to the type of the shim member 6, and a high degree of coating accuracy can be maintained.
  • the shim detection unit 7 is arranged on the extension of the slit nozzle 51, but it may be formed on the side surface or the upper surface of the applicator 5. Since the laser sensor 81 can be arranged on the stage by being arranged on the extension of the slit nozzle 51 as in the above embodiment, the shim detection unit 7 is formed on the side surface or the upper surface of the coating device 5. It can be configured to be advantageous in terms of space as compared with the case where it is used. Further, since the shim detection unit 7 is arranged on the extension of the slit nozzle 51, the shim detection unit 7 is irradiated with laser light regardless of whether or not the coating liquid is filled in the coating device 5.
  • the dimensions of the shim member 6 can be measured. That is, when the coating liquid filled in the coating device 5 is a sensitive material, if the coating liquid is filled in the coating device 5, an expensive laser beam having a small light diameter is used through the slit nozzle 51. Although the size of the shim member 6 cannot be measured, since the shim detection unit 7 is arranged on the extension of the slit nozzle 51 as in the above embodiment, the laser beam irradiates the coating liquid in the coating device 5. Will not be done. Therefore, the size of the shim member 6 can be measured regardless of the filling state of the coating liquid in the coating device 5.
  • the laser sensors 81 are provided at two locations, but one may be provided, or three or more laser sensors 81 may be provided.
  • a plurality of laser sensors 81 it is possible to confirm and grasp the deviation when the coating device 5 is mounted, and it is possible to contribute to the mounting accuracy of the coating device 5.
  • the size of the shim member 6 may be directly measured by the contact type displacement sensor, and the size of the shim member 6 may be measured directly from the image using an optical camera. The size of the shim member 6 may be measured.
  • the shim detection unit 7 provides the coating device 5 with an opening 71 and directly measures the thickness of the shim member 6 from the opening 71 has been described, but instead of the shim member 6. It may be the one that detects the thing that becomes, and detects the dimension of the shim member by the dimensional information. Specifically, as shown in FIGS. 11 and 12, a shim detection member 9 is provided on the half-base 50, and by detecting the dimensions of the shim detection member 9, the thickness dimension and coating width of the shim member 6 are detected. May be detected.
  • the shim detection member 9 is attached to the half-base 50 so as to be detachable.
  • the shim detection member 9 has a thickness-related portion 91 and an outer wall portion 92, and the thickness-related portion 91 is integrally formed while being sandwiched between the outer wall portions 92.
  • the shim detection member 9 is fixed in a state in which the outer wall portion 92, the thickness-related portion 91, and the outer wall portion 92 are arranged in this order in the coating direction (left-right direction in FIG. 11). It is provided.
  • the thickness dimension of the shim member 6 can be obtained by the thickness-related portion 91, and the coating width dimension can be obtained from the difference in height dimension between the thickness-related portion 91 and the outer wall portion 92. ing.
  • the thickness-related portion 91 is formed into a plate-shaped member corresponding to the dimensions of the shim member 6, and in the present embodiment, the thickness dimension m of the thickness-related portion 91 is formed to be the same as the thickness dimension of the shim member 6. Has been done.
  • the thickness direction is fixed so as to coincide with the arrangement direction of the outer wall portion 92 and the thickness-related portion 91.
  • the outer wall portion 92 sets a reference height position while sandwiching the thickness-related portion 91.
  • the outer wall portion 92 has a flat reference surface 921 and an inclined surface 922, and the reference height position is set by the flat reference surface 921. That is, the shim detection member 9 can position the thickness-related portion 91 between the two inclined surfaces 922 by sandwiching the thickness-related portion 91 in a state where the inclined surfaces 922 of the outer wall portion 92 face each other. The thickness-related portion 91 can be held away from the outer wall portion 92.
  • the difference between the thickness dimension m of the thickness-related portion 91 and the height dimension between the thickness-related portion 91 and the outer wall portion 92 can be measured by the laser sensor 81 of the shim measuring unit 8 described above. That is, when the applicator 5 and the shim measuring unit 8 move relatively in the coating direction, the laser beam is applied to the flat reference surface 921 of the outer wall portion 92, and the height position of the flat reference surface 921 is detected. After that, the inclined surface 922 is irradiated, but the reflected light is suppressed by coloring the inclined surface 922 black in the same manner as the configuration of the opening 71 described above.
  • the thickness-related portion 91 is detected, and the height position thereof is detected.
  • the difference in height dimension between the flat reference surface 921 (outer wall portion 92) and the thickness-related portion 91 is calculated.
  • the height dimension of the thickness-related portion 91 (vertical direction in FIGS. 11 and 12) is formed in relation to the coating width.
  • the coating width formed in is the same as the coating width ⁇ of the coating device 5, the thickness-related portion 91 is formed flush with the flat reference surface 921 as shown in FIG. 12A, and the coating width is formed.
  • the thickness-related portion 91 is formed at a position higher than the flat reference surface 921 by t.
  • the difference in height between the flat reference surface 921 (outer wall portion 92) and the thickness-related portion 91 is calculated, so that the coating width of the shim member 6 currently used between the half caps 50 can be determined.
  • the thickness dimension m of the thickness-related portion 91 is obtained by calculating the detection time or the detection position of the thickness-related portion 91, as in the above-described embodiment. In this way, the thickness dimension m of the thickness-related portion 91 is formed corresponding to the thickness dimension of the shim member 6, and the difference in height dimension between the flat reference surface 921 (outer wall portion 92) and the thickness-related portion 91 is applied. If the height dimension of the thickness-related portion 91 is set so as to correspond to the width, the applicator 5 can be measured without directly measuring the dimension of the shim member 6 by measuring the dimension of the shim detection member 9. It is possible to accurately grasp the type of the shim member 6 interposed in the discharge port of the slit nozzle 51 with the shim member 6 interposed therebetween.
  • the shim detection member 9 of the present embodiment is provided at a position offset from the shim member 6. If the center position of the shim member 6 (the position that serves as a reference for coating) is to be calculated from the position where the shim detection member 9 is detected, a deviation occurs due to the difference in the thickness dimension m of the shim detection member 9 (FIG. FIG. P) in 11. In this case, it is necessary to correct the center position of the shim member 6 according to the thickness dimension m of the shim detection member 9.
  • the shim detection member 9 As described above, by using the shim detection member 9 separately from the shim member 6 as in the present embodiment, it is troublesome to attach the shim detection member 9 corresponding to the shim member 6, but the same as the above-described embodiment. It is possible to grasp the type of the shim member 6.
  • the shim detecting member 9 has a thickness-related portion 91 and an outer wall portion 92 has been described.
  • the shim detecting member 9 may be formed only by the thickness-related portion 91.
  • the thickness-related portion 91 of the shim detection member 9 has the same dimensions as the thickness dimension of the shim member 6 has been described, but any dimension related to the thickness dimension of the shim member 6 may be used. Any dimension may be sufficient as long as the thickness dimension m of the thickness-related portion 91 and the thickness dimension of the shim member 6 have a correlation.
  • the shim detection member 9 is formed downward on the side surface of the half-base 50 in the X-axis direction, but as shown by the broken line in FIG. 11, it may be formed upward. , It may be formed downward on the substrate facing surface 52, and is not particularly limited as long as the dimensions of the shim detection member 9 can be measured.

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  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

Provided are a coater, a coating device, and a coating method that enable accurate ascertainment of the dimensions of a shim member even if the shim member is provided in an interposed manner in the coater. Specifically, this coater has a slit nozzle in which a discharge port for discharging coating liquid is formed in a slit shape extending in one direction, wherein the coater is formed by combining halved half-ferrules divided by the slit nozzle and is configured to comprise: a shim member that is formed with a constant thickness and that adjusts the slit width of the discharge port in the coating direction by being interposed between the half-ferrules; and a shim detection unit that detects the dimensions of the shim member interposed between the half-ferrules.

Description

塗布器、塗布装置、及び、塗布方法Coating device, coating device, and coating method
　本発明は、スリットノズルの開口面積を調節するシム部材を有する塗布器、この塗布器を備える塗布装置、及び、塗布方法に関するものである。 The present invention relates to a coating device having a shim member for adjusting the opening area of a slit nozzle, a coating device provided with this coating device, and a coating method.
　液晶ディスプレイやプラズマディスプレイ等のフラットパネルディスプレイには、ガラス等の基板上にレジスト液等の塗布液が塗布されたもの（塗布基板という）が使用されている。この塗布基板は、塗布膜が均一に形成されている必要があり、塗布液を均一に塗布する塗布装置によって形成されている。このような塗布装置は、図９に示すように、基板Ｗを載置するステージ１００と、塗布液を吐出する塗布器１０１を有する塗布ユニット１０２とを有しており、塗布器１０１のスリットノズル１０３から塗布液を吐出させながら、基板Ｗと塗布器１０１とを相対的に移動させることにより、基板Ｗ上に塗布膜が形成されるようになっている。 For flat panel displays such as liquid crystal displays and plasma displays, a substrate such as glass coated with a coating liquid such as a resist liquid (referred to as a coating substrate) is used. This coating substrate needs to have a coating film uniformly formed, and is formed by a coating device that uniformly applies a coating liquid. As shown in FIG. 9, such a coating device includes a stage 100 on which the substrate W is placed and a coating unit 102 having a coating device 101 for discharging a coating liquid, and a slit nozzle of the coating device 101. A coating film is formed on the substrate W by relatively moving the substrate W and the coating device 101 while discharging the coating liquid from 103.
　近年では、このような塗布装置が様々な用途で用いられるようになり、塗布液の粘度に対応することが望まれている。一般に、粘度が大きくなるとスリットノズル１０３の圧損が大きくなるためスリットノズル１０３の開口幅（塗布方向における開口幅。スリット幅Ｓともいう。図１０参照。）を大きくする必要がある。通常、スリット幅Ｓの調節は、塗布器１０１を作り替えるとコストがかかるため、塗布器１０１内にシム部材１０５を介在させることにより調節する。すなわち、図１０に示すように、塗布器１０１は、それぞれスリットノズル１０３で分割される半割形状の半口金１０４を合体させることにより形成されており、それぞれの半口金１０４の間にシム部材１０５を介在させて、シム部材１０５の厚みを変えることによりスリット幅Ｓを調節する（図１０（ｂ）参照）。通常、このようなシム部材１０５は、０．１ｍｍ単位で用意されており、塗布液の粘度によってスリット幅Ｓが適切に調節される。これにより、塗布器１０１を作り替えることなく、１つの塗布器１０１で多品種の塗布液に対応することができる。 In recent years, such coating devices have come to be used for various purposes, and it is desired to cope with the viscosity of the coating liquid. Generally, as the viscosity increases, the pressure loss of the slit nozzle 103 increases, so that it is necessary to increase the opening width of the slit nozzle 103 (opening width in the coating direction, also referred to as slit width S, see FIG. 10). Usually, the adjustment of the slit width S is costly if the applicator 101 is remodeled, so the slit width S is adjusted by interposing a shim member 105 in the applicator 101. That is, as shown in FIG. 10, the applicator 101 is formed by combining the half-shaped half-bases 104 that are each divided by the slit nozzle 103, and the shim member 105 is formed between the half-bases 104. The slit width S is adjusted by changing the thickness of the shim member 105 (see FIG. 10B). Usually, such a shim member 105 is prepared in units of 0.1 mm, and the slit width S is appropriately adjusted by the viscosity of the coating liquid. As a result, it is possible to handle a wide variety of coating liquids with one coating device 101 without remodeling the coating device 101.
特開２０１６－１８２５７６号公報Japanese Unexamined Patent Publication No. 2016-182576
　しかし、上記塗布器１０１では、塗布器１０１に取り付けられたシム部材１０５の厚みを把握するのが困難という問題があった。すなわち、塗布器１０１にシム部材１０５を介在させた状態では、外側から確認できない。仮にスリットノズル１０３を通じて確認しようとしても、スリットノズル１０３のスリット幅Ｓが極めて微小な隙間で形成されているため、スリットノズル１０３を通じてシム部材１０５の寸法を計測するのは困難であった。 However, the coater 101 has a problem that it is difficult to grasp the thickness of the shim member 105 attached to the coater 101. That is, in a state where the shim member 105 is interposed in the applicator 101, it cannot be confirmed from the outside. Even if it is attempted to confirm through the slit nozzle 103, it is difficult to measure the dimensions of the shim member 105 through the slit nozzle 103 because the slit width S of the slit nozzle 103 is formed in an extremely small gap.
　また、塗布器１０１にシム部材１０５を介在させると、シム部材１０５の厚みに応じてスリット幅Ｓの中心がずれるため、塗布器１０１内に設けられているシム部材１０５の厚みを常に把握しておく必要がある。そのため、塗布器１０１内に介在させるシム部材１０５が選定された際に、選定されたシム部材１０５を記録しておく必要があるが、その作業が煩わしく、記録するのを失念したり、人為的なミスで誤った寸法を記録してしまう虞がある。仮に、シム部材１０５の寸法把握に誤りがあった場合には、スリット幅Ｓの中心位置がずれてしまうため、塗布開始位置がずれ、製品の品質が低下してしまう。このような問題を回避するため、塗布工程が開始される直前に、塗布器１０１にシム部材１０５を介在させた状態で、シム部材１０５の厚みを確認したいという要望があった。 Further, when the shim member 105 is interposed in the applicator 101, the center of the slit width S shifts according to the thickness of the shim member 105, so that the thickness of the shim member 105 provided in the applicator 101 is always grasped. Need to keep. Therefore, when the shim member 105 to be interposed in the applicator 101 is selected, it is necessary to record the selected shim member 105, but the work is troublesome, and it is forgotten to record or artificially. There is a risk of recording incorrect dimensions due to mistakes. If there is an error in grasping the dimensions of the shim member 105, the center position of the slit width S will shift, so that the coating start position will shift and the quality of the product will deteriorate. In order to avoid such a problem, there has been a request to confirm the thickness of the shim member 105 with the shim member 105 interposed in the applicator 101 immediately before the start of the coating process.
　本発明は、上記の問題点に鑑みてなされたものであり、塗布器にシム部材が介在した状態であっても、シム部材の寸法を正確に把握することができる塗布器、塗布装置、及び、塗布方法を提供することを目的としている。 The present invention has been made in view of the above problems, and the applicator, the applicator, and the applicator can accurately grasp the dimensions of the shim member even when the shim member is interposed in the applicator. , An object of the present invention is to provide a coating method.
　上記課題を解決するために本発明の塗布器は、塗布液が吐出される吐出口が一方向に延びるスリット形状に形成されたスリットノズルを有する塗布器であって、前記塗布器は、前記スリットノズルで分割される半割形状の半口金を合体させて形成されており、一定の厚みで形成され、前記半口金の間に介在させることにより前記吐出口の塗布方向におけるスリット幅を調節するシム部材と、前記半口金の間に介在された前記シム部材の寸法を検出するシム検出部と、を備えることを特徴としている。 In order to solve the above problems, the coating device of the present invention is a coating device having a slit nozzle formed in a slit shape in which a discharge port for discharging a coating liquid extends in one direction, and the coating device is the slit. A shim that is formed by combining half-split-shaped half-caps that are divided by a nozzle, is formed with a constant thickness, and adjusts the slit width in the application direction of the discharge port by interposing between the half-caps. It is characterized by including a member and a shim detection unit for detecting the dimensions of the shim member interposed between the half caps.
　上記塗布器によれば、シム部材の寸法を検出するシム検出部を設けているため、シム検出部を通じて、塗布器内に設けられたシム部材の寸法を計測することができる。したがって、塗布器にシム部材が介在した状態であっても、塗布器を分解することなく、シム検出部を通じてスリットノズルの吐出口に介在するシム部材の種類を正確に把握することができる。 According to the above-mentioned applicator, since the shim detection unit for detecting the dimensions of the shim member is provided, the dimensions of the shim member provided in the applicator can be measured through the shim detection unit. Therefore, even when the shim member is interposed in the applicator, the type of the shim member intervening in the discharge port of the slit nozzle can be accurately grasped through the shim detection unit without disassembling the applicator.
　また、前記シム部材は、前記吐出口から吐出される塗布液の塗布幅を調節可能に形成されており、前記シム検出部で検出されるシム部材の深さ寸法が前記塗布幅と対応させて形成されている構成にしてもよい。 Further, the shim member is formed so that the coating width of the coating liquid discharged from the discharge port can be adjusted, and the depth dimension of the shim member detected by the shim detection unit corresponds to the coating width. It may have a formed configuration.
　この構成によれば、シム検出部からシム部材の深さ寸法を計測することにより、塗布器にシム部材が介在した状態であっても、シム部材により調節された塗布幅を正確に把握することができる。 According to this configuration, by measuring the depth dimension of the shim member from the shim detection unit, the coating width adjusted by the shim member can be accurately grasped even when the shim member is interposed in the applicator. Can be done.
　また、前記シム検出部は、前記スリットノズルの長手方向延長上に形成され、前記スリット幅よりも大きく形成される開口部と、この開口部内に延伸された前記シム部材が露出されることによって形成され、露出されたシム部材の一部が前記開口部を形成する壁面から離れた状態で前記シム部材が保持されている構成にしてもよい。 Further, the shim detection portion is formed by exposing an opening formed on the extension of the slit nozzle in the longitudinal direction and larger than the slit width and the shim member extended in the opening. The shim member may be held in a state where a part of the exposed shim member is separated from the wall surface forming the opening.
　この構成によれば、開口部内のシム部材が開口部を形成する壁面から離れているため、シム部材と壁面との区別が明確になり、シム部材の寸法を光学的に精度よく計測することができる。 According to this configuration, since the shim member in the opening is separated from the wall surface forming the opening, the distinction between the shim member and the wall surface becomes clear, and the dimensions of the shim member can be measured optically accurately. it can.
　また、前記開口部内は、黒色に形成されている構成にしてもよい。 Further, the inside of the opening may be formed in black.
　この構成によれば、シム部材の寸法を光学的に計測する場合、開口部内の乱反射が抑えられるため、計測精度を向上させることができる。 According to this configuration, when the size of the shim member is optically measured, diffused reflection in the opening is suppressed, so that the measurement accuracy can be improved.
　また、前記シム部材の少なくとも厚み寸法と関連する寸法を有するシム検出用部材を前記シム部材とは別に有しており、前記シム部材に代えて前記シム検出用部材の寸法を検出することにより、前記シム部材の寸法を検出する構成にしてもよい。 Further, a shim detection member having at least a thickness related to the thickness dimension of the shim member is provided separately from the shim member, and the shim detection member is detected in place of the shim member to detect the size of the shim detection member. It may be configured to detect the dimensions of the shim member.
　この構成によれば、シム部材を直接計測することなく、シム部材の種類を正確に把握することができる。 According to this configuration, the type of shim member can be accurately grasped without directly measuring the shim member.
　また、前記シム検出用部材は、前記シム部材の厚み寸法と関連する厚み関連部と、この厚み関連部と高さ位置が異なる外壁部とを有しており、前記厚み関連部と前記外壁部との高さ寸法の差が前記塗布幅と対応させて形成されている構成にしてもよい。 Further, the shim detection member has a thickness-related portion related to the thickness dimension of the shim member and an outer wall portion having a height position different from that of the thickness-related portion, and the thickness-related portion and the outer wall portion. The structure may be formed in which the difference in height dimension from the above is made to correspond to the coating width.
　この構成によれば、シム部材の厚み寸法と塗布幅をシム部材を直接計測することなく把握することができる。 According to this configuration, the thickness dimension and coating width of the shim member can be grasped without directly measuring the shim member.
　また、上記課題を解決するために本発明の塗布装置及び塗布方法は、上記いずれかの塗布器と、基板が載置されるステージと、を備え、塗布器のスリットノズルから塗布液を吐出した状態で、前記塗布器と前記ステージとを相対的に移動させることにより基板上に塗布膜を形成する塗布装置であって、前記シム検出部に露出したシム部材の寸法を検出するシム計測部を備えており、前記レーザ計測部により計測されたシム部材の寸法に基づいて、塗布器とステージ上の基板との相対位置が補正されることを特徴としている。 Further, in order to solve the above problems, the coating apparatus and coating method of the present invention include any of the above coating devices and a stage on which the substrate is placed, and discharge the coating liquid from the slit nozzle of the coating device. A coating device that forms a coating film on a substrate by relatively moving the coating device and the stage in this state, and a shim measuring unit that detects the dimensions of the shim member exposed to the shim detecting unit. It is characterized in that the relative position between the applicator and the substrate on the stage is corrected based on the dimensions of the shim member measured by the laser measuring unit.
　上記塗布装置、塗布方法によれば、シム計測部によりシム検出部を通じて塗布器に設けられたシム部材の寸法を精度よく計測することができる。そして、その計測された寸法に基づいて、塗布開始位置等の基板との相対的な位置情報が補正されるため、シム部材の種類に応じて位置情報が補正され高度な塗布精度を維持することができる。 According to the above coating device and coating method, the shim measuring unit can accurately measure the dimensions of the shim member provided on the coating device through the shim detecting unit. Then, since the position information relative to the substrate such as the coating start position is corrected based on the measured dimensions, the position information is corrected according to the type of the shim member to maintain a high coating accuracy. Can be done.
　本発明の塗布器、塗布装置、及び、塗布方法によれば、塗布器にシム部材が介在した状態であっても、シム部材の寸法を正確に把握することができる。 According to the coating device, the coating device, and the coating method of the present invention, the dimensions of the shim member can be accurately grasped even when the shim member is interposed in the coater.
本発明の塗布装置を示す斜視図である。It is a perspective view which shows the coating apparatus of this invention. 塗布ユニットの脚部付近を示す図である。It is a figure which shows the vicinity of the leg part of a coating unit. 塗布器を基板対向面側から見た斜視図である。It is a perspective view of the applicator seen from the substrate facing surface side. 塗布器とシム部材を示す図であり、（ａ）は、シム部材を示す図、（ｂ）は、シム部材が介在していない状態の塗布器を示す図、（ｃ）はシム部材が介在した状態の塗布器を示す図である。It is a figure which shows a coater and a shim member, (a) is a figure which shows a shim member, (b) is a figure which shows the coater in a state where a shim member is not intervening, (c) is a figure which shows a shim member intervening. It is a figure which shows the coater in the state which was done. 塗布器におけるシム検出部を示す図である。It is a figure which shows the shim detection part in a coater. シム検出部の断面を示す図であり、シム部材に対しレーザ光が照射された状態で塗布器とレーザ光とが相対的に移動している状態を示す図である。It is a figure which shows the cross section of the shim detection part, and is the figure which shows the state which the coater and the laser light are relatively moving in the state which the shim member is irradiated with the laser light. シム検出部の断面（上段）と介在されるシム部材（下段）を示す図であり、（ａ）は通常の塗布幅に対応するシム部材を示す図、（ｂ）は（ａ）よりも塗布幅を小さくするシム部材を示す図である。It is a figure which shows the cross section (upper part) of a shim detection part and the shim member (lower part) intervening, (a) is the figure which shows the shim member corresponding to a normal coating width, (b) is coating more than (a). It is a figure which shows the shim member which reduces the width. シム部材の厚みを計測する状態を示す図であり、（ａ）はシム部材とレーザ光との位置関係を示す図、（ｂ）は受光されたレーザ光により計測されたシム部材の厚み寸法を示す図である。It is a figure which shows the state of measuring the thickness of a shim member, (a) is a figure which shows the positional relationship between a shim member and a laser beam, and (b) is the thickness dimension of a shim member measured by the received laser beam. It is a figure which shows. 従来の塗布装置を示す図である。It is a figure which shows the conventional coating apparatus. 従来の塗布器を示す図であり、（ａ）はシム部材が介在していない状態の塗布器を示す図、（ｂ）はシム部材が介在した状態の塗布器を示す図である。It is a figure which shows the conventional coating device, (a) is the figure which shows the coating device in the state which the shim member is not intervening, (b) is the figure which shows the coating device in the state which the shim member is intervening. シム検出用部材を有する塗布器を示す図であり、（ａ）は、シム部材の厚みが所定の厚みである状態を示す図、（ｂ）は、（ａ）に比べてシム部材の厚みが薄い状態を示す図である。It is a figure which shows the coating device which has the shim detection member, (a) is the figure which shows the state which the thickness of a shim member is a predetermined thickness, (b) is the thickness of the shim member as compared with (a). It is a figure which shows the thin state. シム検出用部材を示す図であり、（ａ）は、厚み関連部の高さ位置が平坦基準面と面一に設定されている状態を示す図であり、（ｂ）厚み関連部の高さ位置が平坦基準面よりｔだけ高い位置に設定されている状態を示す図である。It is a figure which shows the shim detection member, (a) is the figure which shows the state which the height position of the thickness-related part is set to be flush with the flat reference plane, (b) is the height of the thickness-related part. It is a figure which shows the state which the position is set to the position which is higher than the flat reference plane by t.
　次に、本発明の塗布装置について詳細に説明する。図１は、本発明の一実施形態における塗布装置を概略的に示す斜視図であり、図２は、塗布ユニットの脚部付近を示す図であり、図３は、塗布ユニットの要部を側面側から見た概略図である。 Next, the coating apparatus of the present invention will be described in detail. FIG. 1 is a perspective view schematically showing a coating device according to an embodiment of the present invention, FIG. 2 is a view showing the vicinity of a leg portion of the coating unit, and FIG. 3 is a side view of a main part of the coating unit. It is a schematic view seen from the side.
　図１～図３に示すように、塗布装置は、基板Ｗ上に薬液やレジスト液等の液状物（以下、塗布液と称す）の塗布膜を形成するものであり、基台２と、基板Ｗを載置するためのステージ２１と、このステージ２１に対し特定方向に移動可能に構成される塗布ユニット３０とを備えている。 As shown in FIGS. 1 to 3, the coating apparatus forms a coating film of a liquid substance (hereinafter referred to as a coating liquid) such as a chemical solution or a resist solution on the substrate W, and forms a base 2 and a substrate. A stage 21 for mounting the W and a coating unit 30 configured to be movable in a specific direction with respect to the stage 21 are provided.
　なお、以下の説明では、塗布ユニット３０が移動する方向（塗布方向）をＸ軸方向、これと水平面上で直交する方向をＹ軸方向、Ｘ軸およびＹ軸方向の双方に直交する方向をＺ軸方向として説明を進めることとする。 In the following description, the direction in which the coating unit 30 moves (coating direction) is the X-axis direction, the direction orthogonal to this in the horizontal plane is the Y-axis direction, and the direction orthogonal to both the X-axis and the Y-axis direction is Z. The explanation will proceed as the axial direction.
　前記基台２には、その中央部分にステージ２１が配置されている。このステージ２１は、搬入された基板Ｗを載置するものである。このステージ２１には、基板保持手段が設けられており、この基板保持手段により基板Ｗが保持されるようになっている。具体的には、ステージ２１の表面には、複数の吸引孔が形成されており、この吸引孔に吸引力を発生させることにより基板Ｗをステージ２１の表面に吸着させて保持できるようになっている。 The stage 21 is arranged in the central portion of the base 2. The stage 21 is for mounting the carried-in substrate W. The stage 21 is provided with a substrate holding means, and the substrate W is held by the substrate holding means. Specifically, a plurality of suction holes are formed on the surface of the stage 21, and by generating a suction force in the suction holes, the substrate W can be attracted to and held on the surface of the stage 21. There is.
　また、ステージ２１には、基板Ｗを昇降動作させる基板昇降機構が設けられている。具体的には、ステージ２１の表面には上記吸引孔とは別に複数のピン孔が形成されており、このピン孔にはＺ軸方向に昇降動作可能なリフトピン（不図示）が埋設されている。すなわち、ステージ２１の表面からリフトピンを突出させた状態で基板Ｗが搬入されるとリフトピンの先端部分に基板Ｗを当接させて基板Ｗを保持することができる。そして、その状態からリフトピンを下降させてピン孔に収容させることにより、基板Ｗをステージ２１の表面に載置することができるようになっている。 Further, the stage 21 is provided with a board raising / lowering mechanism for raising / lowering the board W. Specifically, a plurality of pin holes are formed on the surface of the stage 21 in addition to the suction holes, and lift pins (not shown) capable of raising and lowering in the Z-axis direction are embedded in the pin holes. .. That is, when the substrate W is carried in with the lift pin protruding from the surface of the stage 21, the substrate W can be brought into contact with the tip portion of the lift pin to hold the substrate W. Then, by lowering the lift pin from that state and accommodating it in the pin hole, the substrate W can be placed on the surface of the stage 21.
　また、塗布ユニット３０は、基板Ｗ上に塗布液を吐出するものである。具体的には、後述する塗布器５から塗布液を吐出することにより、基板Ｗ上に均一厚さの塗布膜が形成できるようになっている。すなわち、基板Ｗに所定量の塗布液を吐出し、基板Ｗと塗布器５のスリットノズル５１とが塗布液で連結される状態を形成し、その後、塗布器５を一定速度で走行させることにより、基板Ｗ上に一定膜厚の塗布膜を形成することができる。 Further, the coating unit 30 discharges the coating liquid onto the substrate W. Specifically, a coating film having a uniform thickness can be formed on the substrate W by discharging the coating liquid from the coating device 5 described later. That is, a predetermined amount of the coating liquid is discharged to the substrate W to form a state in which the substrate W and the slit nozzle 51 of the coating device 5 are connected by the coating liquid, and then the coating device 5 is run at a constant speed. , A coating film having a constant film thickness can be formed on the substrate W.
　この塗布ユニット３０は、図２、図３に示すように、脚部３１と塗布器５を支持するビーム部３９を有しており、これらが門型形状を有するように基台２に取付けられている。すなわち、両脚部３１にビーム部３９がステージ２１をＹ軸方向に跨ぐ状態で取付けられている。そして、脚部３１は、Ｘ軸方向に移動可能に取り付けられており、脚部３１が移動することにより、ビーム部３９がステージ２１上を走査できるようになっている。具体的には、基台２のＹ軸方向両端部分にはそれぞれＸ軸方向に延びるレール２２が設置されており、脚部３１がこのレール２２にスライド自在に取り付けられている。そして、脚部３１にはリニアモータ３３が取り付けられており、このリニアモータ３３を駆動制御することにより、ビーム部３９は塗布器５がステージ２１と対向する状態でＸ軸方向に移動し、任意の位置で停止できるようになっている。 As shown in FIGS. 2 and 3, the coating unit 30 has a leg portion 31 and a beam portion 39 for supporting the coating device 5, and these are attached to the base 2 so as to have a portal shape. ing. That is, the beam portions 39 are attached to both leg portions 31 so as to straddle the stage 21 in the Y-axis direction. The leg portion 31 is attached so as to be movable in the X-axis direction, and the beam portion 39 can scan on the stage 21 by moving the leg portion 31. Specifically, rails 22 extending in the X-axis direction are installed at both ends of the base 2 in the Y-axis direction, and the legs 31 are slidably attached to the rails 22. A linear motor 33 is attached to the leg portion 31, and by driving and controlling the linear motor 33, the beam portion 39 moves in the X-axis direction with the applicator 5 facing the stage 21, which is arbitrary. It is possible to stop at the position of.
　また、ビーム部３９は、塗布器５が撓み変形を生じるのを抑えることにより、塗布器５のスリットと基板との距離が長手方向において一定となるように支持するものである。そして、ビーム部３９の長手方向端部は、Ｙ軸方向両端部に配置された両脚部３１にそれぞれ取付けられており、取付けられた状態では塗布器５が長手方向に亘って同一高さとなるように配置されている。すなわち、ビーム部３９に支持される塗布器５とステージ２１との距離が長手方向に亘って同一になるように配置されている。 Further, the beam portion 39 supports the coating device 5 so that the distance between the slit of the coating device 5 and the substrate becomes constant in the longitudinal direction by suppressing the bending deformation of the coating device 5. The longitudinal end portions of the beam portion 39 are attached to both leg portions 31 arranged at both ends in the Y-axis direction, so that the applicator 5 has the same height in the longitudinal direction in the attached state. Is located in. That is, they are arranged so that the distance between the coater 5 supported by the beam portion 39 and the stage 21 is the same in the longitudinal direction.
　また、ビーム部３９は、脚部３１に昇降動作可能に取付けられている。具体的には、この脚部３１にはＺ軸方向に延びるレール３７と、このレール３７に沿ってスライドするスライダ３５が設けられており、これらのスライダ３５とビーム部３９とが連結されている。そして、スライダ３５にはサーボモータにより駆動されるボールねじ機構が取り付けられており、このサーボモータを駆動制御することにより、スライダ３５がＺ軸方向に移動するとともに、任意の位置で停止できるようになっている。すなわち、塗布器５が、ステージ２１に保持された基板Ｗに対して接離可能に支持されている。 Further, the beam portion 39 is attached to the leg portion 31 so as to be able to move up and down. Specifically, the leg portion 31 is provided with a rail 37 extending in the Z-axis direction and a slider 35 that slides along the rail 37, and these sliders 35 and the beam portion 39 are connected to each other. .. A ball screw mechanism driven by a servomotor is attached to the slider 35, and by driving and controlling the servomotor, the slider 35 can move in the Z-axis direction and can be stopped at an arbitrary position. It has become. That is, the applicator 5 is supported so as to be detachable from the substrate W held by the stage 21.
　また、塗布器５は、塗布液を吐出して基板Ｗ上に塗布膜を形成するものである。この塗布器５は、一方向に延びる形状を有する柱状部材であり、長手方向がＹ軸方向に沿う状態で設けられている。この塗布器５には、基板Ｗと対向する基板対向面５２に長手方向に延びるスリット状に形成されたスリットノズル５１が形成されており、塗布器５に供給された塗布液がスリットノズル５１から長手方向に亘って一様に吐出されるようになっている。すなわち、スリットノズル５１で決定される塗布幅（Ｙ軸方向幅）全体に亘って一様に吐出される。したがって、このスリットノズル５１から塗布液を吐出させた状態で塗布ユニット３０をＸ軸方向に走行させることにより、スリットノズル５１の長手方向に亘って基板Ｗ上に一定厚さの塗布膜が形成されるようになっている。 Further, the coating device 5 discharges the coating liquid to form a coating film on the substrate W. The coater 5 is a columnar member having a shape extending in one direction, and is provided in a state in which the longitudinal direction is along the Y-axis direction. The coating device 5 is formed with a slit nozzle 51 formed in a slit shape extending in the longitudinal direction on the substrate facing surface 52 facing the substrate W, and the coating liquid supplied to the coating device 5 is supplied from the slit nozzle 51. It is designed to be uniformly discharged over the longitudinal direction. That is, it is uniformly discharged over the entire coating width (width in the Y-axis direction) determined by the slit nozzle 51. Therefore, by running the coating unit 30 in the X-axis direction in a state where the coating liquid is discharged from the slit nozzle 51, a coating film having a constant thickness is formed on the substrate W over the longitudinal direction of the slit nozzle 51. It has become so.
　また、塗布器５は、スリットノズル５１で分割される半割形状の半口金５０を合体させることによって形成されている。これらの半口金５０を合体させることによりスリットノズル５１が形成され、スリット幅Ｓ（スリットノズル５１のＸ軸方向寸法）が決定されることにより、スリットノズル５１の開口面積に応じた塗布液が吐出されるようになっている。 Further, the applicator 5 is formed by combining the half-shaped half-base 50 divided by the slit nozzle 51. The slit nozzle 51 is formed by combining these half caps 50, and the slit width S (the dimension in the X-axis direction of the slit nozzle 51) is determined, so that the coating liquid corresponding to the opening area of the slit nozzle 51 is discharged. It is supposed to be done.
　また、塗布器５は、シム部材６を取り付け可能に形成されている。このシム部材６を取り付けることにより、スリットノズル５１のスリット幅Ｓ、塗布幅寸法を調節することができる。これにより、塗布器５を作り替えることなく、粘度を含めた様々な特性の塗布液に対応することができる。シム部材６は、具体的には、図４（ａ）に示すように、平板状に形成されており、全体が一定の厚みになるように精度よく形成されている。このシム部材６を半口金５０の間に挟んで取り付けることにより、スリット幅Ｓを調節することができる。すなわち、図４の例では、シム部材６がない状態（図４（ｂ））に対して、シム部材６を介在させることにより、シム部材６の厚み分だけスリット幅Ｓを大きくすることができる（図４（ｃ））。 Further, the applicator 5 is formed so that the shim member 6 can be attached. By attaching the shim member 6, the slit width S and the coating width dimension of the slit nozzle 51 can be adjusted. As a result, it is possible to deal with coating liquids having various characteristics including viscosity without remodeling the coating device 5. Specifically, as shown in FIG. 4A, the shim member 6 is formed in a flat plate shape, and is accurately formed so that the entire shim member 6 has a constant thickness. The slit width S can be adjusted by sandwiching and attaching the shim member 6 between the half caps 50. That is, in the example of FIG. 4, the slit width S can be increased by the thickness of the shim member 6 by interposing the shim member 6 with respect to the state where the shim member 6 is not present (FIG. 4B). (Fig. 4 (c)).
　このシム部材６は、長手方向中央部分に切欠部６１が形成されている。この切欠部６１は、通常、スリットノズル５１の塗布幅に形成されていることにより、半口金５０の間に介在させると、切欠部６１の幅寸法が塗布器５の塗布幅に一致し、シム部材６を介在させた場合でもスリットノズル５１の塗布幅を変えることなく塗布液を吐出することができる。 The shim member 6 has a notch 61 formed in the central portion in the longitudinal direction. Since the notch 61 is usually formed in the coating width of the slit nozzle 51, when it is interposed between the half caps 50, the width dimension of the notch 61 matches the coating width of the applicator 5, and the shim. Even when the member 6 is interposed, the coating liquid can be discharged without changing the coating width of the slit nozzle 51.
　このシム部材６は、スリット幅Ｓだけでなく、図７に示すように、切欠部６１の幅を調節することにより、塗布幅を調節することができる。すなわち、図７（ａ）は、切欠部６１の幅寸法を通常の塗布器５の塗布幅αにしたものであり、図７（ｂ）では、切欠部６１の幅寸法を塗布器５の塗布幅よりも小さい寸法β（β＜α）に形成されている。このように切欠部６１の幅寸法を調節することにより、スリットノズル５１のスリット幅Ｓを調節しつつ、塗布幅についても調節することができる。 As shown in FIG. 7, the shim member 6 can adjust the coating width by adjusting not only the slit width S but also the width of the notch 61. That is, in FIG. 7A, the width dimension of the notch portion 61 is the coating width α of the normal coating device 5, and in FIG. 7B, the width dimension of the notch portion 61 is applied to the coating device 5. It is formed in a dimension β (β <α) smaller than the width. By adjusting the width dimension of the notch portion 61 in this way, the coating width can be adjusted while adjusting the slit width S of the slit nozzle 51.
　この塗布幅を調節できるシム部材６については、本実施形態では、シム部材６の両端部分に塗布幅を調節する切欠部６１とは別の端部切欠部６２が形成されている。この端部切欠部６２は、調節される塗布幅に応じて形状を変えて設けられている。本実施形態では、端部切欠部６２の深さ方向（Ｚ軸方向）寸法が塗布幅に応じて設定されており、切欠部６１の幅寸法（塗布幅）が小さくなるほど、端部切欠部６２の深さ方向寸法γが大きくなるように形成されている。 Regarding the shim member 6 whose coating width can be adjusted, in the present embodiment, end notches 62 different from the notches 61 for adjusting the coating width are formed at both ends of the shim member 6. The end notch 62 is provided in a different shape according to the coating width to be adjusted. In the present embodiment, the depth direction (Z-axis direction) dimension of the end notch 62 is set according to the coating width, and the smaller the width dimension (coating width) of the notch 61, the smaller the end notch 62. It is formed so that the dimension γ in the depth direction of is large.
　また、塗布器５には、介在するシム部材６の寸法を検出するためのシム検出部７が設けられている（図３、図５参照。）。本実施形態では、シム検出部７は、スリットノズル５１の長手方向延長上の基板対向面５２に設けられており、スリット幅Ｓの寸法よりも幅広に形成される開口部７１と、この開口部７１にシム部材６が露出することにより形成されている。本実施形態では、図３、図５に示すように、スリットノズル５１の長手方向延長上に円径の開口部７１の中心が配置されるように形成されており、この開口部７１内に半口金５０の間に介在されたシム部材６が、開口部７１を横切るように固定されている。すなわち、開口部７１を形成する半口金５０の壁面７２によりシム部材６が挟まれることによって固定されることにより、シム部材６の一部は開口部７１中心を横切る姿勢で壁面７２に触れることなく固定されている。すなわち、開口部７１内に半口金５０の壁面７２から離れた部位が形成されるようにシム部材６が固定され、この壁面７２から離れる部位が、後述するように、シム部材６の寸法を計測するために用いられる。 Further, the applicator 5 is provided with a shim detection unit 7 for detecting the dimensions of the intervening shim member 6 (see FIGS. 3 and 5). In the present embodiment, the shim detection unit 7 is provided on the substrate facing surface 52 on the extension of the slit nozzle 51 in the longitudinal direction, and has an opening 71 formed wider than the dimension of the slit width S and the opening. It is formed by exposing the shim member 6 to 71. In the present embodiment, as shown in FIGS. 3 and 5, the center of the circular opening 71 is arranged on the extension of the slit nozzle 51 in the longitudinal direction, and the slit nozzle 51 is half formed in the opening 71. A shim member 6 interposed between the bases 50 is fixed so as to cross the opening 71. That is, by fixing the shim member 6 by being sandwiched by the wall surface 72 of the half mouthpiece 50 forming the opening 71, a part of the shim member 6 does not touch the wall surface 72 in a posture of crossing the center of the opening 71. It is fixed. That is, the shim member 6 is fixed so that a portion away from the wall surface 72 of the half mouthpiece 50 is formed in the opening 71, and the portion away from the wall surface 72 measures the size of the shim member 6 as described later. Used to do.
　また、シム部材６が半口金５０間に固定された状態では、端部切欠部６２の形成位置が開口部７１の形成位置に対応するように形成されているため、塗布幅が調節されていないシム部材６（図７（ａ））は、開口部７１内のシム部材６は開口部７１の壁面７２（基板対向面５２）と面一になるように固定される。一方、塗布幅が調節されるシム部材６（図７（ｂ））では、開口部７１内のシム部材６は基板対向面５２から深さ方向に離れた所に位置するように固定される。すなわち、本実施形態では、切欠部６１の幅寸法（塗布幅）が小さくなるほど、端部切欠部６２の深さ寸法が大きくなるため、塗布幅が小さくなるほど、基板対向面５２から深さ方向に離れた位置に固定される。 Further, in the state where the shim member 6 is fixed between the half caps 50, the coating width is not adjusted because the forming position of the end notch 62 is formed so as to correspond to the forming position of the opening 71. The shim member 6 (FIG. 7A) is fixed so that the shim member 6 in the opening 71 is flush with the wall surface 72 (board facing surface 52) of the opening 71. On the other hand, in the shim member 6 (FIG. 7 (b)) in which the coating width is adjusted, the shim member 6 in the opening 71 is fixed so as to be located at a position away from the substrate facing surface 52 in the depth direction. That is, in the present embodiment, the smaller the width dimension (coating width) of the notch portion 61, the larger the depth dimension of the end notch portion 62. Therefore, as the coating width becomes smaller, the depth direction from the substrate facing surface 52 Fixed in a distant position.
　また、ステージ２１には、シム検出部７内のシム部材６の寸法を検出するシム計測部８が設けられている（図１、図２参照）。このシム計測部８は、本実施形態では、レーザ光Ｂ（図６参照）を照射し、その反射光を受光するレーザセンサ８１が使用されており、本実施形態では、ステージ２１の側面にＹ軸方向に離れた位置に２カ所設けられている。これらレーザセンサ８１は、制御装置と接続されており、レーザ光Ｂが照射されて反射光が受光される時間を計測することにより、レーザ光Ｂが照射される対象物の高さ位置を計測することができる。そして、これらレーザセンサ８１は、Ｙ軸方向において、塗布器５のシム検出部７それぞれの形成位置に配置されており、レーザ光Ｂが上方に向かって照射されるように配置されている。したがって、塗布ユニット３０がＸ軸方向に移動し塗布器５がシム計測部８を通過すると、シム検出部７がレーザセンサ８１上を通過することにより、シム検出部７内に露出するシム部材６の寸法を計測できるようになっている。なお、本実施形態では、開口部７１がスリット幅Ｓよりも幅広（大径）に形成されているため、レーザセンサ８１のレーザ光径を安価な大径のものを使用することができる。 Further, the stage 21 is provided with a shim measuring unit 8 for detecting the dimensions of the shim member 6 in the shim detecting unit 7 (see FIGS. 1 and 2). In the present embodiment, the shim measurement unit 8 uses a laser sensor 81 that irradiates the laser beam B (see FIG. 6) and receives the reflected light. In the present embodiment, the shim measurement unit 8 has a Y on the side surface of the stage 21. Two locations are provided at positions separated in the axial direction. These laser sensors 81 are connected to a control device, and measure the height position of an object to be irradiated with the laser beam B by measuring the time during which the laser beam B is irradiated and the reflected light is received. be able to. The laser sensors 81 are arranged at the formation positions of the shim detection portions 7 of the coater 5 in the Y-axis direction, and are arranged so that the laser beam B is emitted upward. Therefore, when the coating unit 30 moves in the X-axis direction and the coating device 5 passes through the shim measuring unit 8, the shim detecting unit 7 passes over the laser sensor 81, and the shim member 6 exposed in the shim detecting unit 7. It is possible to measure the dimensions of. In the present embodiment, since the opening 71 is formed to be wider (larger diameter) than the slit width S, it is possible to use an inexpensive large-diameter laser light diameter of the laser sensor 81.
　ここで、図６は、シム検出部７の断面を示す図であり、半口金５０に挟まれたシム部材６に対しレーザ光Ｂが照射された状態で塗布器５とレーザ光Ｂ（レーザセンサ８１位置）とが相対的に移動した状態を示している（説明の都合上、シム検出部７とレーザ光Ｂが上下逆さまに記載されている。）。図６に示すように、最初に、レーザセンサ８１からのレーザ光Ｂ（図６において一番左側のレーザ光Ｂ）が開口部７１の底面に照射され、その反射光が受光される。なお、この開口部７１は、スリット幅Ｓよりも大きく形成されており、レーザ光Ｂが開口部７１を形成する壁面７２、及び、シム部材６に照射されずに開口部７１の底面を照射できる程度に形成されている。そして、開口部７１の底面及び側壁面７２は黒色に着色されており、レーザセンサ８１からのレーザ光Ｂが乱反射することによる誤検知を低減するようになっている。 Here, FIG. 6 is a view showing a cross section of the shim detection unit 7, in which the shim member 6 sandwiched between the half caps 50 is irradiated with the laser beam B, and the applicator 5 and the laser beam B (laser sensor) are irradiated. (81 position) indicates a relatively moved state (for convenience of explanation, the shim detection unit 7 and the laser beam B are described upside down). As shown in FIG. 6, first, the laser beam B from the laser sensor 81 (the leftmost laser beam B in FIG. 6) is irradiated to the bottom surface of the opening 71, and the reflected light is received. The opening 71 is formed to be larger than the slit width S, and the laser beam B can irradiate the wall surface 72 forming the opening 71 and the bottom surface of the opening 71 without irradiating the shim member 6. It is formed to the extent. The bottom surface and the side wall surface 72 of the opening 71 are colored black to reduce erroneous detection due to diffused reflection of the laser beam B from the laser sensor 81.
　そして、そのまま塗布器５とレーザセンサ８１が相対的に移動し、レーザ光Ｂがシム部材６に照射され、その反射光が受光されると、反射光が受光される時間が短くなることにより、シム部材６が検出される。そして、そのまま塗布器５とレーザセンサ８１が相対的に移動し、レーザ光Ｂが開口部７１の底面に照射されると、反射光が受光される時間が長くなることにより、シム部材６の検出が終了する。このように、シム部材６にレーザ光Ｂが照射される時間、すなわち、シム部材６が検出される時間を計測することにより、塗布器５内に設けられたシム部材６の厚み寸法を計測することができる。これにより、スリット幅Ｓを演算することができる。 Then, the applicator 5 and the laser sensor 81 move relatively as they are, the laser light B is irradiated to the shim member 6, and when the reflected light is received, the time for receiving the reflected light is shortened. The shim member 6 is detected. Then, when the coating device 5 and the laser sensor 81 move relatively as they are and the laser beam B irradiates the bottom surface of the opening 71, the time for receiving the reflected light becomes longer, so that the shim member 6 is detected. Is finished. In this way, by measuring the time during which the shim member 6 is irradiated with the laser beam B, that is, the time during which the shim member 6 is detected, the thickness dimension of the shim member 6 provided in the applicator 5 is measured. be able to. Thereby, the slit width S can be calculated.
　また、図７（ｂ）に示すように、シム部材６に端部切欠部６２が形成されている場合には、上述したレーザセンサ８１の計測により、シム部材６の厚み寸法だけでなく、端部切欠部６２の深さ寸法（γ）が同時に計測される。そして、計測された深さ寸法からシム部材６の種類が特定され、塗布幅（β）が把握される。このように、塗布器５を分解することなく、シム検出部７から塗布器５に設けられたシム部材６の種類を検出し、塗布幅、スリット幅Ｓを把握することができる。 Further, as shown in FIG. 7B, when the end notch 62 is formed in the shim member 6, the measurement of the laser sensor 81 described above shows not only the thickness dimension of the shim member 6 but also the end. The depth dimension (γ) of the portion notch 62 is measured at the same time. Then, the type of the shim member 6 is specified from the measured depth dimension, and the coating width (β) is grasped. In this way, the type of shim member 6 provided on the applicator 5 can be detected from the shim detection unit 7 without disassembling the applicator 5, and the coating width and the slit width S can be grasped.
　また、塗布装置には、リニアモータやサーボモータなどの駆動装置を統括的に制御する制御装置を有しており、これらの駆動装置が制御装置を通じて駆動制御されるようになっている。 In addition, the coating device has a control device that comprehensively controls drive devices such as a linear motor and a servo motor, and these drive devices are driven and controlled through the control device.
　また、制御装置は、上述したようにシム計測部８で計測されたレーザ光Ｂの時間変化から、シム部材６の厚み寸法ｄ、端部切欠部６２の深さ寸法を算出することができる。そして、本実施形態では、シム部材６の厚み寸法ｄについて、真のシム部材６の厚み寸法ｄを求めることができるようになっている。ここで、図８は、シム部材６の厚みを計測する状態を示す図であり、（ａ）はシム部材６とレーザ光Ｂとの位置関係を示す図、（ｂ）は受光されたレーザ光Ｂにより計測されたシム部材６の厚み寸法ｄを示す図である。すなわち、図８に示すように、レーザセンサ８１の計測では、介在されるシム部材６の寸法（図８では寸法ｄ）が、実際の寸法ｄよりも大きい寸法（寸法ｄ’）として計測される。これは、レーザ光Ｂが開口部７１の底面からシム部材６にさしかかる際に、レーザ光Ｂの中心は開口部７１の底面を照射しているにもかかわらず、シム部材６を照射した光の反射光にシム計測部８が反応することにより、実際のシム部材６の厚み寸法ｄよりも大きい厚み寸法ｄ’として認識されるためである。この厚み寸法ｄ’の誤差は、レーザ光Ｂが計測時に移動する速度、レーザ光径に依存して一定であり、さらに開口部７１の底面及び側壁面７２が黒色に着色されているため、誤差のバラツキが極力抑えられる。したがって、制御装置では、計測された寸法ｄ’に対応する寸法ｄが予め記憶されており、実際に計測された寸法ｄ’が寸法ｄとして補正されるようになっている。これにより、塗布器５に介在しているシム部材６の厚み寸法ｄを正確に把握できるようになっている。 Further, the control device can calculate the thickness dimension d of the shim member 6 and the depth dimension of the end notch 62 from the time change of the laser beam B measured by the shim measuring unit 8 as described above. Then, in the present embodiment, the true thickness dimension d of the shim member 6 can be obtained with respect to the thickness dimension d of the shim member 6. Here, FIG. 8 is a diagram showing a state in which the thickness of the shim member 6 is measured, FIG. 8A is a diagram showing a positional relationship between the shim member 6 and the laser beam B, and FIG. 8B is a diagram showing the received laser beam. It is a figure which shows the thickness dimension d of the shim member 6 measured by B. That is, as shown in FIG. 8, in the measurement of the laser sensor 81, the dimension of the intervening shim member 6 (dimension d in FIG. 8) is measured as a dimension larger than the actual dimension d (dimension d'). .. This is because when the laser beam B approaches the shim member 6 from the bottom surface of the opening 71, the center of the laser beam B irradiates the bottom surface of the opening 71, but the light that irradiates the shim member 6. This is because the shim measuring unit 8 reacts to the reflected light, so that it is recognized as a thickness dimension d'larger than the actual thickness dimension d of the shim member 6. The error of the thickness dimension d'is constant depending on the speed at which the laser beam B moves at the time of measurement and the diameter of the laser beam, and the bottom surface and the side wall surface 72 of the opening 71 are colored black. The variation of is suppressed as much as possible. Therefore, in the control device, the dimension d corresponding to the measured dimension d'is stored in advance, and the actually measured dimension d'is corrected as the dimension d. As a result, the thickness dimension d of the shim member 6 interposed in the applicator 5 can be accurately grasped.
　また、制御装置では、計測されたシム部材６の厚み寸法からスリット幅Ｓの中心位置を算出し、スリット幅Ｓの中心位置のずれが補正されるようになっている。すなわち、シム部材６が介在していない場合のスリット幅Ｓが寸法ｓとした場合、シム部材６が介在した場合のスリット幅Ｓはｓ＋ｄであり、スリット幅Ｓの中心位置は（ｓ＋ｄ）／２となる。これにより、シム部材６が介在している場合の塗布開始位置が補正され、いずれのシム部材６が介在している場合であっても、精度よく塗布開始位置から塗布動作を開始することができるようになっている。 Further, in the control device, the center position of the slit width S is calculated from the measured thickness dimension of the shim member 6, and the deviation of the center position of the slit width S is corrected. That is, when the slit width S when the shim member 6 is not interposed is the dimension s, the slit width S when the shim member 6 is interposed is s + d, and the center position of the slit width S is (s + d) / 2. It becomes. As a result, the coating start position when the shim member 6 is interposed is corrected, and the coating operation can be started accurately from the coating start position regardless of which shim member 6 is interposed. It has become like.
　このように、上記塗布器５、塗布装置、及び、塗布方法によれば、シム部材６の寸法を検出するシム検出部７を設けているため、シム検出部７を通じて、塗布器５内に設けられたシム部材６の寸法を計測することができる。したがって、塗布器５にシム部材６が介在した状態であっても、塗布器５を分解することなく、シム検出部７を通じてスリットノズル５１の吐出口に介在するシム部材６の種類を正確に把握することができる。そして、シム計測部８によりシム検出部７を通じて塗布器５に設けられたシム部材６の寸法を精度よく計測することができ、その計測された寸法に基づいて、塗布開始位置等の基板との相対的な位置情報が補正されるため、シム部材６の種類に応じて位置情報が補正され高度な塗布精度を維持することができる。 As described above, according to the coating device 5, the coating device, and the coating method, since the shim detection unit 7 for detecting the dimensions of the shim member 6 is provided, it is provided in the coating device 5 through the shim detection unit 7. The dimensions of the shim member 6 can be measured. Therefore, even when the shim member 6 is interposed in the applicator 5, the type of the shim member 6 intervening in the discharge port of the slit nozzle 51 is accurately grasped through the shim detection unit 7 without disassembling the applicator 5. can do. Then, the shim measuring unit 8 can accurately measure the dimensions of the shim member 6 provided on the applicator 5 through the shim detecting unit 7, and based on the measured dimensions, the shim member 6 and the substrate such as the coating start position can be measured. Since the relative position information is corrected, the position information is corrected according to the type of the shim member 6, and a high degree of coating accuracy can be maintained.
　また、上記実施形態では、シム検出部７がスリットノズル５１の延長上に配置される例について説明したが、塗布器５の側面や、上面に形成されるものであってもよい。なお、上記実施形態のように、スリットノズル５１の延長上に配置されていることにより、レーザセンサ８１をステージに配置することができるため、シム検出部７を塗布器５の側面や上面に形成される場合に比べてスペース的に有利に構成することができる。また、シム検出部７がスリットノズル５１の延長上に配置されているため、塗布器５内に塗布液が充填されているか否かを問わずに、シム検出部７にレーザ光を照射してシム部材６の寸法を計測することができる。すなわち、塗布器５に充填された塗布液が感光する材質であった場合、仮に塗布器５に塗布液が充填された状態で、光径が小径の高価なレーザ光を用いてスリットノズル５１を通じてシム部材６の寸法を計測することはできないが、上記実施形態のようにシム検出部７がスリットノズル５１の延長上に配置されていることにより、レーザ光が塗布器５内の塗布液に照射されることがない。したがって、塗布器５内の塗布液の充填状態にかかわらず、シム部材６の寸法を計測することができる。 Further, in the above embodiment, the example in which the shim detection unit 7 is arranged on the extension of the slit nozzle 51 has been described, but it may be formed on the side surface or the upper surface of the applicator 5. Since the laser sensor 81 can be arranged on the stage by being arranged on the extension of the slit nozzle 51 as in the above embodiment, the shim detection unit 7 is formed on the side surface or the upper surface of the coating device 5. It can be configured to be advantageous in terms of space as compared with the case where it is used. Further, since the shim detection unit 7 is arranged on the extension of the slit nozzle 51, the shim detection unit 7 is irradiated with laser light regardless of whether or not the coating liquid is filled in the coating device 5. The dimensions of the shim member 6 can be measured. That is, when the coating liquid filled in the coating device 5 is a sensitive material, if the coating liquid is filled in the coating device 5, an expensive laser beam having a small light diameter is used through the slit nozzle 51. Although the size of the shim member 6 cannot be measured, since the shim detection unit 7 is arranged on the extension of the slit nozzle 51 as in the above embodiment, the laser beam irradiates the coating liquid in the coating device 5. Will not be done. Therefore, the size of the shim member 6 can be measured regardless of the filling state of the coating liquid in the coating device 5.
　また、上記実施形態では、レーザセンサ８１を２カ所設ける例について説明したが、１つでもよく、３つ以上設けるものであってもよい。レーザセンサ８１を複数設けることにより、塗布器５を搭載した場合のずれを確認、把握することができ、塗布器５の搭載精度の貢献に寄与することができる。 Further, in the above embodiment, an example in which the laser sensors 81 are provided at two locations has been described, but one may be provided, or three or more laser sensors 81 may be provided. By providing a plurality of laser sensors 81, it is possible to confirm and grasp the deviation when the coating device 5 is mounted, and it is possible to contribute to the mounting accuracy of the coating device 5.
　また、上記実施形態では、シム計測部８として、レーザセンサ８１を用いる例について説明したが、接触式変位センサで直接シム部材６の寸法を計測するものでもよく、光学式カメラを用いて画像からシム部材６の寸法を計測するものであってもよい。 Further, in the above embodiment, an example in which the laser sensor 81 is used as the shim measuring unit 8 has been described, but the size of the shim member 6 may be directly measured by the contact type displacement sensor, and the size of the shim member 6 may be measured directly from the image using an optical camera. The size of the shim member 6 may be measured.
　また、上記実施形態では、シム検出部７が塗布器５に開口部７１を設け、その開口部７１から直接、シム部材６の厚みの寸法を計測する例について説明したが、シム部材６の代わりになるものを検出し、その寸法情報によりシム部材の寸法を検出するものであってもよい。具体的には、図１１、図１２に示すように、半口金５０にシム検出用部材９を設け、このシム検出用部材９の寸法を検出することにより、シム部材６の厚み寸法、塗布幅を検出するものであってもよい。 Further, in the above embodiment, an example in which the shim detection unit 7 provides the coating device 5 with an opening 71 and directly measures the thickness of the shim member 6 from the opening 71 has been described, but instead of the shim member 6. It may be the one that detects the thing that becomes, and detects the dimension of the shim member by the dimensional information. Specifically, as shown in FIGS. 11 and 12, a shim detection member 9 is provided on the half-base 50, and by detecting the dimensions of the shim detection member 9, the thickness dimension and coating width of the shim member 6 are detected. May be detected.
　シム検出用部材９は、半口金５０に接離可能に取り付けられている。このシム検出用部材９は、厚み関連部９１と外壁部９２とを有しており、厚み関連部９１が外壁部９２に挟まれた状態で一体的に形成されている。具体的には、シム検出用部材９は、図１１の例では、塗布方向（図１１において左右方向）に外壁部９２、厚み関連部９１、外壁部９２の順に配列された状態で固定されて設けられている。そして、シム検出用部材９は、厚み関連部９１によりシム部材６の厚み寸法が得られ、厚み関連部９１と外壁部９２との高さ寸法の差から塗布幅の寸法が得られるようになっている。 The shim detection member 9 is attached to the half-base 50 so as to be detachable. The shim detection member 9 has a thickness-related portion 91 and an outer wall portion 92, and the thickness-related portion 91 is integrally formed while being sandwiched between the outer wall portions 92. Specifically, in the example of FIG. 11, the shim detection member 9 is fixed in a state in which the outer wall portion 92, the thickness-related portion 91, and the outer wall portion 92 are arranged in this order in the coating direction (left-right direction in FIG. 11). It is provided. Then, in the shim detection member 9, the thickness dimension of the shim member 6 can be obtained by the thickness-related portion 91, and the coating width dimension can be obtained from the difference in height dimension between the thickness-related portion 91 and the outer wall portion 92. ing.
　すなわち、厚み関連部９１は、シム部材６の寸法に応じた板状部材に形成されており、本実施形態では、厚み関連部９１の厚み寸法ｍがシム部材６の厚み寸法と同じ寸法に形成されている。そして、この厚み方向が外壁部９２、厚み関連部９１の配列方向と一致する状態で固定されている。 That is, the thickness-related portion 91 is formed into a plate-shaped member corresponding to the dimensions of the shim member 6, and in the present embodiment, the thickness dimension m of the thickness-related portion 91 is formed to be the same as the thickness dimension of the shim member 6. Has been done. The thickness direction is fixed so as to coincide with the arrangement direction of the outer wall portion 92 and the thickness-related portion 91.
　また、外壁部９２は、厚み関連部９１を挟持しつつ、基準高さ位置を設定するものである。具体的には、図１２に示すように、外壁部９２は、平坦基準面９２１と傾斜面９２２とを有しており、平坦基準面９２１により基準高さ位置が設定される。すなわち、シム検出用部材９は、外壁部９２の傾斜面９２２が互いに対向する状態で厚み関連部９１を挟持することにより、両傾斜面９２２の間に厚み関連部９１を位置させることができ、厚み関連部９１を外壁部９２から離した状態で保持することができるようになっている。 Further, the outer wall portion 92 sets a reference height position while sandwiching the thickness-related portion 91. Specifically, as shown in FIG. 12, the outer wall portion 92 has a flat reference surface 921 and an inclined surface 922, and the reference height position is set by the flat reference surface 921. That is, the shim detection member 9 can position the thickness-related portion 91 between the two inclined surfaces 922 by sandwiching the thickness-related portion 91 in a state where the inclined surfaces 922 of the outer wall portion 92 face each other. The thickness-related portion 91 can be held away from the outer wall portion 92.
　これにより、上述したシム計測部８のレーザセンサ８１により厚み関連部９１の厚み寸法ｍと、厚み関連部９１と外壁部９２との高さ寸法の差を計測することができる。すなわち、塗布方向に塗布器５とシム計測部８とが相対的に移動すると、レーザ光が外壁部９２の平坦基準面９２１に照射され、平坦基準面９２１の高さ位置が検出される。その後、傾斜面９２２に照射されるが、上述の開口部７１の構成と同様に傾斜面９２２を黒色に着色することにより反射光が抑えられる。そして、厚み関連部９１に照射されることにより厚み関連部９１が検出され、その高さ位置が検出される。これにより、平坦基準面９２１（外壁部９２）と厚み関連部９１との高さ寸法の差が算出される。ここで、厚み関連部９１の高さ寸法（図１１、図１２において上下方向）は、塗布幅と関連して形成されており、例えば、シム検出用部材９を構成した際に、シム部材６に形成される塗布幅が塗布器５の塗布幅と同じ塗布幅αの場合は、図１２（ａ）に示すように、厚み関連部９１が平坦基準面９２１と面一に形成し、塗布幅αよりも小さい塗布幅βの場合は、図１２（ｂ）に示すように、厚み関連部９１が平坦基準面９２１よりもｔだけ高い位置に形成されている。これにより、平坦基準面９２１（外壁部９２）と厚み関連部９１との高さ寸法の差が算出されることにより、現在、半口金５０の間に使用されているシム部材６の塗布幅を得ることができる。 Thereby, the difference between the thickness dimension m of the thickness-related portion 91 and the height dimension between the thickness-related portion 91 and the outer wall portion 92 can be measured by the laser sensor 81 of the shim measuring unit 8 described above. That is, when the applicator 5 and the shim measuring unit 8 move relatively in the coating direction, the laser beam is applied to the flat reference surface 921 of the outer wall portion 92, and the height position of the flat reference surface 921 is detected. After that, the inclined surface 922 is irradiated, but the reflected light is suppressed by coloring the inclined surface 922 black in the same manner as the configuration of the opening 71 described above. Then, by irradiating the thickness-related portion 91, the thickness-related portion 91 is detected, and the height position thereof is detected. As a result, the difference in height dimension between the flat reference surface 921 (outer wall portion 92) and the thickness-related portion 91 is calculated. Here, the height dimension of the thickness-related portion 91 (vertical direction in FIGS. 11 and 12) is formed in relation to the coating width. For example, when the shim detection member 9 is configured, the shim member 6 is formed. When the coating width formed in is the same as the coating width α of the coating device 5, the thickness-related portion 91 is formed flush with the flat reference surface 921 as shown in FIG. 12A, and the coating width is formed. In the case of a coating width β smaller than α, as shown in FIG. 12B, the thickness-related portion 91 is formed at a position higher than the flat reference surface 921 by t. As a result, the difference in height between the flat reference surface 921 (outer wall portion 92) and the thickness-related portion 91 is calculated, so that the coating width of the shim member 6 currently used between the half caps 50 can be determined. Obtainable.
　また、厚み関連部９１の厚み寸法ｍは、上述した実施形態と同様に、厚み関連部９１の検知時間、又は、検知位置を演算することによって求められる。このようにして、厚み関連部９１の厚み寸法ｍがシム部材６の厚み寸法と対応して形成され、平坦基準面９２１（外壁部９２）と厚み関連部９１との高さ寸法の差が塗布幅と対応するように厚み関連部９１の高さ寸法が設定されていれば、シム検出用部材９の寸法を計測することにより、直接、シム部材６の寸法を計測することなく、塗布器５にシム部材６が介在した状態でスリットノズル５１の吐出口に介在するシム部材６の種類を正確に把握することができる。 Further, the thickness dimension m of the thickness-related portion 91 is obtained by calculating the detection time or the detection position of the thickness-related portion 91, as in the above-described embodiment. In this way, the thickness dimension m of the thickness-related portion 91 is formed corresponding to the thickness dimension of the shim member 6, and the difference in height dimension between the flat reference surface 921 (outer wall portion 92) and the thickness-related portion 91 is applied. If the height dimension of the thickness-related portion 91 is set so as to correspond to the width, the applicator 5 can be measured without directly measuring the dimension of the shim member 6 by measuring the dimension of the shim detection member 9. It is possible to accurately grasp the type of the shim member 6 interposed in the discharge port of the slit nozzle 51 with the shim member 6 interposed therebetween.
　なお、本実施形態のシム検出用部材９は、シム部材６からオフセットされた位置に設けられている。仮に、シム検出用部材９を検出した位置からシム部材６の中心位置（塗布の基準となる位置）を算出しようする場合、シム検出用部材９の厚み寸法ｍの違いによりズレが発生する（図１１におけるｐ）。この場合、シム検出用部材９の厚み寸法ｍに応じてシム部材６の中心位置を補正する必要がある。 The shim detection member 9 of the present embodiment is provided at a position offset from the shim member 6. If the center position of the shim member 6 (the position that serves as a reference for coating) is to be calculated from the position where the shim detection member 9 is detected, a deviation occurs due to the difference in the thickness dimension m of the shim detection member 9 (FIG. FIG. P) in 11. In this case, it is necessary to correct the center position of the shim member 6 according to the thickness dimension m of the shim detection member 9.
　以上、本実施形態のようにシム部材６とは別にシム検出用部材９を使用することにより、シム部材６に対応したシム検出用部材９を取り付ける煩わしさがあるものの、上述した実施形態と同様にシム部材６の種類を把握することができる。 As described above, by using the shim detection member 9 separately from the shim member 6 as in the present embodiment, it is troublesome to attach the shim detection member 9 corresponding to the shim member 6, but the same as the above-described embodiment. It is possible to grasp the type of the shim member 6.
　なお、上記実施形態では、シム検出用部材９が厚み関連部９１と外壁部９２とを有する例について説明したが、シム部材６の厚み寸法のみを検知すればよい場合には、シム検出用部材９が厚み関連部９１のみで形成されているものであってもよい。 In the above embodiment, an example in which the shim detecting member 9 has a thickness-related portion 91 and an outer wall portion 92 has been described. However, when it is sufficient to detect only the thickness dimension of the shim member 6, the shim detecting member 9 may be formed only by the thickness-related portion 91.
　また、上記実施形態では、シム検出用部材９の厚み関連部９１がシム部材６の厚み寸法と同じ寸法を有する例について説明したが、シム部材６の厚み寸法に関連する寸法であればよく、厚み関連部９１の厚み寸法ｍとシム部材６の厚み寸法とが相関関係のある寸法であればよい。 Further, in the above embodiment, an example in which the thickness-related portion 91 of the shim detection member 9 has the same dimensions as the thickness dimension of the shim member 6 has been described, but any dimension related to the thickness dimension of the shim member 6 may be used. Any dimension may be sufficient as long as the thickness dimension m of the thickness-related portion 91 and the thickness dimension of the shim member 6 have a correlation.
　また、上記実施形態では、シム検出用部材９が半口金５０のＸ軸方向側面に下向きに形成される例について説明したが、図１１の破線で示されるように、上向きに形成してもよく、基板対向面５２に下向きに形成されていてもよく、シム検出用部材９の寸法が計測できる位置であれば特に限定しない。 Further, in the above embodiment, an example in which the shim detection member 9 is formed downward on the side surface of the half-base 50 in the X-axis direction has been described, but as shown by the broken line in FIG. 11, it may be formed upward. , It may be formed downward on the substrate facing surface 52, and is not particularly limited as long as the dimensions of the shim detection member 9 can be measured.
　５　塗布器
　６　シム部材
　７　シム検出部
　８　シム計測部
　３０　塗布ユニット
　５０　半口金
　５１　スリットノズル
　６１　切欠部
　７１　開口部
　８１　レーザセンサ
　Ｗ　基板 5 Applyer 6 Shim member 7 Shim detector 8 Shim measurement unit 30 Applying unit 50 Half base 51 Slit nozzle 61 Notch 71 Opening 81 Laser sensor W board

Claims (8)

  1. 　塗布液が吐出される吐出口が一方向に延びるスリット形状に形成されたスリットノズルを有する塗布器であって、
    　前記塗布器は、前記スリットノズルで分割される半割形状の半口金を合体させて形成されており、
    　一定の厚みで形成され、前記半口金の間に介在させることにより前記吐出口の塗布方向におけるスリット幅を調節するシム部材と、
    　前記半口金の間に介在された前記シム部材の寸法を検出するシム検出部と、
    を備えることを特徴とする塗布器。     A coating device having a slit nozzle formed in a slit shape in which a discharge port for discharging a coating liquid extends in one direction.
    The applicator is formed by combining half-split-shaped half caps divided by the slit nozzle.
    A shim member that is formed with a constant thickness and that adjusts the slit width in the coating direction of the discharge port by interposing it between the half caps.
    A shim detection unit that detects the dimensions of the shim member interposed between the half caps,
    A coater characterized by being equipped with.
  2. 　前記シム部材は、前記吐出口から吐出される塗布液の塗布幅を調節可能に形成されており、前記シム検出部で検出されるシム部材の深さ寸法が前記塗布幅と対応させて形成されていることを特徴とする請求項１に記載の塗布器。 The shim member is formed so that the coating width of the coating liquid discharged from the discharge port can be adjusted, and the depth dimension of the shim member detected by the shim detecting unit is formed so as to correspond to the coating width. The coater according to claim 1, wherein the coater is characterized by the above.
  3. 　前記シム検出部は、前記スリットノズルの長手方向延長上に形成され、前記スリット幅よりも大きく形成される開口部と、この開口部内に延伸された前記シム部材が露出されることによって形成され、露出されたシム部材の一部が前記開口部を形成する壁面から離れた状態で前記シム部材が保持されていることを特徴とする請求項１又は２に記載の塗布器。 The shim detection portion is formed by exposing an opening formed on the extension of the slit nozzle in the longitudinal direction and larger than the slit width and the shim member extended in the opening. The coater according to claim 1 or 2, wherein the shim member is held in a state where a part of the exposed shim member is separated from the wall surface forming the opening.
  4. 　前記開口部内は、黒色に形成されていることを特徴とする請求項１～３のいずれかに記載の塗布器。 The coater according to any one of claims 1 to 3, wherein the inside of the opening is formed in black.
  5. 　前記シム部材の少なくとも厚み寸法と関連する寸法を有するシム検出用部材を前記シム部材とは別に有しており、前記シム部材に代えて前記シム検出用部材の寸法を検出することにより、前記シム部材の寸法を検出することを特徴とする請求項１に記載の塗布器。 A shim detection member having a dimension related to at least the thickness dimension of the shim member is provided separately from the shim member, and the shim is detected by detecting the size of the shim detection member in place of the shim member. The coater according to claim 1, wherein the dimensions of the members are detected.
  6. 　前記シム検出用部材は、前記シム部材の厚み寸法と関連する厚み関連部と、この厚み関連部と高さ位置が異なる外壁部とを有しており、前記厚み関連部と前記外壁部との高さ寸法の差が前記塗布幅と対応させて形成されていることを特徴とする請求項５に記載の塗布器。 The shim detection member has a thickness-related portion related to the thickness dimension of the shim member and an outer wall portion having a height position different from that of the thickness-related portion. The coater according to claim 5, wherein the difference in height dimension is formed so as to correspond to the coating width.
  7. 　前記請求項１～６のいずれか一項に記載の塗布器と、
    　基板が載置されるステージと、
    を備え、塗布器のスリットノズルから塗布液を吐出した状態で、前記塗布器と前記ステージとを相対的に移動させることにより基板上に塗布膜を形成する塗布装置であって、
    　前記シム検出部に露出したシム部材の寸法を検出するシム計測部を備えており、
    　前記シム計測部により計測されたシム部材の寸法に基づいて、塗布器とステージ上の基板との相対位置が補正されることを特徴とする塗布装置。     The applicator according to any one of claims 1 to 6 and
    The stage on which the board is placed and
    A coating device that forms a coating film on a substrate by relatively moving the coating device and the stage in a state where the coating liquid is discharged from the slit nozzle of the coating device.
    The shim detection unit is provided with a shim measurement unit that detects the dimensions of the exposed shim member.
    A coating device characterized in that the relative position between the coating device and the substrate on the stage is corrected based on the dimensions of the shim member measured by the shim measuring unit.
  8. 　前記請求項１～６のいずれか一項に記載の塗布器と、
    　基板が載置されるステージと、
    を備え、塗布器のスリットノズルから塗布液を吐出した状態で、前記塗布器と前記ステージとを相対的に移動させることにより基板上に塗布膜を形成する塗布方法であって、
    　前記シム検出部に露出したシム部材の寸法をシム計測部で検出し、
    　前記シム計測部により計測されたシム部材の寸法に基づいて、塗布器とステージ上の基板との相対位置が補正されることを特徴とする塗布方法。     The applicator according to any one of claims 1 to 6 and
    The stage on which the board is placed and
    A coating method for forming a coating film on a substrate by relatively moving the coating device and the stage in a state where the coating liquid is discharged from the slit nozzle of the coating device.
    The shim measuring unit detects the dimensions of the shim member exposed to the shim detecting unit, and then
    A coating method characterized in that the relative position between the coating device and the substrate on the stage is corrected based on the dimensions of the shim member measured by the shim measuring unit.
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