KR20220144664A - Droplet information measuring apparatus and substrate treating system including the same - Google Patents

Abstract

Provided are a droplet information measuring device for installing a nozzle view camera to check a point corresponding to a fringe position in a PDPA inspection apparatus, and a substrate processing system having the same. The droplet information measuring device comprises: a first light emitting module generating and outputting a first light; a second light emitting module generating and outputting a second light which intersects the first light; a detection module detecting a droplet passing through an intersection of the first light and the second light; an image acquiring module measuring a nozzle discharging the droplet; and a control module which generates information about the droplet based on information obtained by detecting the droplet and/or information obtained by measuring the nozzle.

Description

Droplet information measuring apparatus and substrate processing system including same

The present invention relates to an apparatus for measuring droplet information and a substrate processing system having the same. More particularly, it relates to an apparatus for measuring droplet information applicable to a substrate printing facility and a substrate processing system having the same.

When performing a printing process (eg, RGB patterning) on a transparent substrate to manufacture a display device such as an LCD panel, PDP panel, LED panel, etc., having an inkjet head unit (Inkjet Head Unit) Printing equipment may be used.

Korean Patent Publication No. 10-2020-0143836 (2020.12.28.)

When measuring the speed and volume of droplets discharged from the nozzle of the inkjet head, using a PDPA (Phase Doppler Particle Analyzer) type measuring instrument is better than using Drop Water. The measurement time can be shortened.

However, when the droplet ejected from the inkjet head passes through the fringe area, the PDPA-type measuring instrument checks the window (or lens) included in the detector itself, so that the droplet falls into the fringe area. It is only possible to check whether or not it has passed through or not, but it is not possible to check the location where the droplet is discharged.

SUMMARY OF THE INVENTION An object of the present invention is to provide a droplet information measuring device for installing a nozzle view camera to check a point corresponding to a fringe position in a PDPA inspection device, and a substrate processing system having the same.

The problems of the present invention are not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the following description.

One side (Aspect) of the drop information measuring apparatus of the present invention for achieving the above object, a first light emitting module for generating and outputting a first light; a second light emitting module generating and outputting a second light intersecting the first light; a detection module for detecting a droplet passing through an intersection region of the first light and the second light; an image acquisition module for measuring a nozzle for discharging the droplet; and a control module that generates information about the droplet based on information obtained by detecting the droplet and/or information obtained by measuring the nozzle.

The image acquisition module and the detection module may operate at different times.

The image acquisition module may operate before or after the droplet is ejected through the nozzle.

The image acquisition module may move to a lower portion of the nozzle when measuring the nozzle, and may move to a region other than the lower portion of the nozzle after measuring the nozzle.

The image acquisition module may be covered by a cap when not in operation.

The cap may include at least one of Teflon, quartz, and glass.

The droplet information measuring device includes: a vacuum suction device for sucking the mist associated with the droplet; and a cleaning system for cleaning the image acquisition module.

The vacuum suction device and/or the cleaning system may operate when the image acquisition module is not operating.

The control module may generate a velocity of the droplet, a volume of the droplet, and a position at which the droplet is discharged as information about the droplet.

In addition, one aspect of the substrate processing system of the present invention for achieving the above object, the droplet information measuring device for generating information on the droplets discharged on the substrate; and a substrate printing apparatus for printing the substrate using the droplet, wherein the droplet information measuring apparatus includes: a first light emitting module for generating and outputting first light; a second light emitting module generating and outputting a second light intersecting the first light; a detection module configured to detect the droplet passing through an intersection region of the first light and the second light; an image acquisition module for measuring a nozzle for discharging the droplet; and a control module that generates information about the droplet based on information obtained by detecting the droplet and/or information obtained by measuring the nozzle.

The details of other embodiments are included in the detailed description and drawings.

1 is a diagram schematically illustrating an internal configuration of a substrate processing system according to an embodiment of the present invention.
2 is a perspective view schematically illustrating an internal structure of a substrate printing apparatus constituting a substrate processing system according to an embodiment of the present invention.
3 is a plan view schematically illustrating an internal structure of a substrate printing apparatus constituting a substrate processing system according to an embodiment of the present invention.
4 is a diagram schematically illustrating an internal configuration of an apparatus for measuring droplet information constituting a substrate processing system according to an embodiment of the present invention.
FIG. 5 is an exemplary view for explaining an arrangement structure of a first light emitting module and a second light emitting module constituting the droplet information measuring apparatus shown in FIG. 4 .
FIG. 6 is an exemplary diagram for explaining the role of a detection module constituting the drop information measuring apparatus shown in FIG. 4 .
FIG. 7 is an exemplary view for explaining the role of a camera module constituting the drop information measuring apparatus shown in FIG. 4 .

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Advantages and features of the present invention, and a method of achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments published below, but may be implemented in various different forms, and only these embodiments allow the publication of the present invention to be complete, and common knowledge in the technical field to which the present invention pertains. It is provided to fully inform the possessor of the scope of the invention, and the present invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout.

Reference to an element or layer “on” or “on” another element or layer includes not only directly on the other element or layer, but also with intervening other layers or other elements. include all On the other hand, reference to an element "directly on" or "directly on" indicates that no intervening element or layer is interposed.

Spatially relative terms "below", "beneath", "lower", "above", "upper", etc. It can be used to easily describe a correlation between an element or components and other elements or components. The spatially relative terms should be understood as terms including different orientations of the device during use or operation in addition to the orientation shown in the drawings. For example, when an element shown in the figures is turned over, an element described as "beneath" or "beneath" another element may be placed "above" the other element. Accordingly, the exemplary term “below” may include both directions below and above. The device may also be oriented in other orientations, and thus spatially relative terms may be interpreted according to orientation.

Although first, second, etc. are used to describe various elements, components, and/or sections, it should be understood that these elements, components, and/or sections are not limited by these terms. These terms are only used to distinguish one element, component, or sections from another. Accordingly, it goes without saying that the first element, the first element, or the first section mentioned below may be the second element, the second element, or the second section within the spirit of the present invention.

The terminology used herein is for the purpose of describing the embodiments and is not intended to limit the present invention. In this specification, the singular also includes the plural, unless specifically stated otherwise in the phrase. As used herein, “comprises” and/or “comprising” refers to the presence of one or more other components, steps, operations and/or elements mentioned. or addition is not excluded.

Unless otherwise defined, all terms (including technical and scientific terms) used herein may be used with the meaning commonly understood by those of ordinary skill in the art to which the present invention belongs. In addition, terms defined in a commonly used dictionary are not to be interpreted ideally or excessively unless clearly defined in particular.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. A description will be omitted.

The present invention relates to an apparatus for measuring droplet information in which a nozzle view camera is installed in order to check a position at which a droplet is discharged in a PDPA (Phase Doppler Particle Analyzer) type inspection apparatus, and a substrate processing system having the same. it's about Hereinafter, the present invention will be described in detail with reference to drawings and the like.

1 is a diagram schematically illustrating an internal configuration of a substrate processing system according to an embodiment of the present invention.

Referring to FIG. 1 , the substrate processing system 100 may include a substrate printing apparatus 110 and a droplet information measuring apparatus 120 .

The substrate printing apparatus 110 prints a substrate used in a display apparatus. The substrate printing apparatus 110 may be implemented as, for example, printing equipment that discharges ink or the like onto a substrate using a circulating inkjet system.

2 is a perspective view schematically illustrating an internal structure of a substrate printing apparatus constituting a substrate processing system according to an embodiment of the present invention, and FIG. 3 is a printed circuit board constituting the substrate processing system according to an embodiment of the present invention. It is a plan view schematically showing the internal structure of the device.

When the substrate printing apparatus 110 prints a substrate using a circulating inkjet system, for example, as shown in FIGS. 2 and 3 , the base member 210 , the substrate support unit 220 , and the gantry unit 230 , a gantry moving unit 240 , an inkjet head unit 250 , an inkjet head moving unit 260 and an ink supply unit 270 .

The base member 210 constitutes the body of the substrate printing apparatus 110 . The substrate support unit 220 may be installed on the base member 210 .

The substrate support unit 220 supports the substrate S while the substrate S is being printed. The substrate support unit 220 may include a support plate 221 , a rotation driving member 222 , and a linear driving member 223 .

The support plate 221 is provided so that the substrate S can be seated thereon. The rotation driving member 222 may be installed under the support plate 221 .

The rotation driving member 222 rotates the support plate 221 . This rotational driving member 222 is perpendicular to the longitudinal direction (first direction 10) of the support plate 221 (first direction 10) or the width direction (second direction 20) of the support plate 221 (third direction 30). ) may be used to rotate the support plate 221 using a rotational central axis formed of.

When the support plate 221 is rotated by the rotation driving member 222 , the substrate S may also rotate along the support plate 221 . For example, when the long side direction of the cell formed on the substrate S on which the ink droplet is to be applied faces the first direction 10 , the rotation driving member 222 is configured such that the long side direction of the cell is the second direction. It is possible to rotate the substrate (S) to face (20).

The linear driving member 223 linearly moves the support plate 221 . The linear driving member 223 may linearly move the support plate 221 in the second direction 20 . The linear driving member 223 may include a guide member 224 and a slider 225 .

The guide member 224 guides the movement path of the support plate 221 . The guide member 224 may be formed to extend from the upper center of the base member 210 in the second direction 20 in the longitudinal direction.

The slider 225 moves linearly along the guide member 224 . The slider 225 may have a built-in linear motor (not shown) for this purpose. Meanwhile, the rotation driving member 222 may be installed on the slider 225 .

The gantry unit 230 supports the inkjet head unit 250 . The gantry unit 230 may be installed on the substrate support unit 220 . The gantry unit 230 may be installed in a direction perpendicular to the longitudinal direction of the guide member 224 (the first direction 10 ) as the longitudinal direction.

The gantry moving unit 240 linearly moves the gantry unit 230 in the second direction 20 . The gantry moving unit 240 may be installed inside the gantry unit 230 and may include a first moving module 241 and a second moving module 242 .

The first moving module 241 may be provided at one end within the gantry unit 230 . The first moving module 241 may slide along the first guide rail 281 installed on one upper side of the base member 210 .

The second moving module 242 may be provided at the other end of the gantry unit 230 . The second moving module 242 may slide along the second guide rail 282 installed on the other upper side of the base member 210 .

The inkjet head unit 250 discharges ink in the form of droplets on the substrate S. The inkjet head unit 250 is installed on the side of the gantry unit 230 and may be supported by the gantry unit 230 .

The inkjet head unit 250 may move linearly in the longitudinal direction (the first direction 10 ) of the gantry unit 230 by the inkjet head moving unit 260 . However, the present embodiment is not limited thereto. The inkjet head unit 250 may also move linearly in the height direction (the third direction 30 ) of the gantry unit 230 . In this case, the inkjet head unit 250 may move on the inkjet head moving unit 260 . Meanwhile, the inkjet head unit 250 may also rotate about an axis parallel to the third direction 30 with respect to the inkjet head moving unit 260 .

At least one inkjet head unit 250 may be installed in the gantry unit 230 . For example, three inkjet head units 250 including a first head module 251 , a second head module 252 , and a third head module 253 may be installed in the gantry unit 230 . When a plurality of inkjet head units 250 are installed in this way, they may be sequentially disposed along the longitudinal direction (first direction 10 ) of the gantry unit 230 .

The first head module 251 , the second head module 252 , and the third head module 253 may each include a nozzle (not shown) and a nozzle plate (not shown). The nozzle is to discharge ink droplets, and may be installed on the nozzle plate. A plurality of nozzles (eg, 128, 256, etc.) may be provided in each of the head modules 251 , 252 , and 253 .

The inkjet head unit 250 may include as many piezoelectric elements as the number corresponding to the number of nozzles. In this case, the ink droplet discharge amount of each nozzle may be independently adjusted by controlling the voltage applied to the piezoelectric element.

The inkjet head moving unit 260 linearly moves the inkjet head unit 250 . The inkjet head moving units 260 may be provided in the substrate printing apparatus 110 corresponding to the number of the inkjet head units 250 . In this case, the plurality of inkjet head units 250 may be moved individually.

Meanwhile, a single inkjet head moving unit 260 may be provided in the substrate printing apparatus 110 . In this case, the plurality of inkjet head units 250 may not be moved individually, but may be moved simultaneously.

The ink supply unit 270 supplies ink to the inkjet head unit 250 . The ink supply unit 270 may include an ink storage tank 271 and a pressure control module 272 .

The ink storage tank 271 is to store ink. The ink storage tank 271 may be installed by being coupled to a side surface of the gantry unit 230 .

The pressure control module 272 adjusts the internal pressure of the ink storage tank 271 . The ink storage tank 271 may supply an appropriate amount of ink to the inkjet head unit 250 based on the pressure provided by the pressure control module 272 .

It will be described again with reference to FIG. 1 .

The droplet information measuring apparatus 120 measures information on droplets discharged on the substrate S by the inkjet head unit 250 . In the present embodiment, the droplet information measuring apparatus 120 may measure the velocity, volume, etc. of the droplet, and in addition, measure the location at which the droplet is ejected (ie, coordinate information about the nozzle). The droplet information measuring device 120 may be implemented, for example, as a PDPA (Phase Doppler Particle Analyzer) type inspection device (meter) equipped with a nozzle view camera.

Inkjet Printing Technology (Inkjet Printing Technology) is one of the major technologies emerging in the industry. In particular, it is positioned as an important core technology in the high value-added display industry that can be produced at room temperature/atmospheric temperature beyond the vacuum deposition method production concept.

However, unlike the vacuum deposition process method, in a technology for controlling a very small amount of droplets discharged from a nozzle of an inkjet head, a measuring instrument for measuring the speed and discharge amount of the droplets is being actively developed.

In the case of the Drop Watcher, a major instrument, the image of the drop is imaged through a high-speed camera, and the velocity, angle, and volume of the drop are calculated based on this. However, in the case of this measuring instrument, it induces nozzle clogging of unmeasured nozzles and heads due to excessive time required between measurements. There are many limitations.

In order to overcome the measurement time of the measuring instrument, a PDPA type measuring instrument that uses a laser to measure in real time is used. In a PDPA device, two lasers intersect to form constructive interference, forming a region called a fringe. When the droplet discharged from the nozzle of the head passes through the fringe area, the detector detects it and converts it into an electrical signal to quickly measure the speed and volume of the droplet.

Although the PDPA device has a measurement speed that is more than 10 times faster than the drop watcher device, there is a limit to applying it to mass production equipment simply with the high measurement speed. As the biggest problem, there is an issue in obtaining measurement coordinates.

The nozzle size of the inkjet head has a diameter of about 30 μm, and the diameter of the ejected droplets is also similar. In the process where a droplet with a diameter of several tens of μm passes through the fringe area of the PDPA and is measured, the nozzle surface from which the droplet is ejected and the vertical alignment of the fringe do not match, and the fringe area (for example, 100 μm or less) If it is out of range, it will not be counted. In addition, a method of directly aligning a laser with strong energy (eg, 500 mW or less) with the naked eye is also undesirable.

Accordingly, there is always an alignment issue on current hardware, and in particular, it takes a lot of time to precisely align the positions of a plurality of nozzles of about 30 μm in the air with the positions of the fringes. In addition, when a laser beam is irradiated to the nozzle surface of the head for a long period of time to obtain the coordinates of the nozzle, it adversely affects the discharge characteristics of the head, such as clogging of the nozzle and thermal damage. For this reason, if the position of each nozzle is not identified within a short time, the utilization of PDPA will inevitably decrease.

In the present embodiment, the droplet information measuring apparatus 120 may measure the velocity, volume, etc. of the droplet using a laser sensor, and measure the location at which the droplet is ejected (ie, coordinate information of the nozzle) using the camera sensor. can do.

If the laser is not directly irradiated onto the nozzle surface, but the position of the nozzle is checked in real time through a camera and coordinated to control the system, the alignment time can be reduced within a few minutes. In addition, since the purpose is not to simply observe the fringe, but to find a nozzle corresponding to the vertical direction of the position of the fringe, there is an advantage that coordinates can be managed more efficiently and quickly than the existing method.

In addition, when the camera is not in use, it has the advantage of preventing contamination of droplets falling from the top by moving the camera to prevent contamination. considered to play a role.

Hereinafter, the drop information measuring apparatus 120 will be described in detail with reference to the drawings.

4 is a diagram schematically illustrating an internal configuration of an apparatus for measuring droplet information constituting a substrate processing system according to an embodiment of the present invention.

According to FIG. 4 , the droplet information measuring device 120 includes a first light emitting module 310a, a second light emitting module 310b, a detecting module 320, an image acquisition module 330, and a control module 340. It may be composed of

The first light emitting module 310a and the second light emitting module 310b generate and output light. In this embodiment, the first light emitting module 310a and the second light emitting module 310b may generate and output laser light. The first light emitting module 310a and the second light emitting module 310b may be implemented as, for example, laser sensors.

The first light emitting module 310a and the second light emitting module 310b may output light such that the output lights 410a and 410b cross each other. In this case, the first light emitting module 310a and the second light emitting module 310b may be tilted at predetermined angles (θ ₁ , θ ₂ ) in mutually facing directions as shown in FIG. 5 , for example. However, in the present embodiment, the postures of the first light emitting module 310a and the second light emitting module 310b are not limited thereto, and the first light emitting module 310a and the second light emitting module 310b are arranged side by side. It is also possible

Meanwhile, it is also possible that the first light emitting module 310a and the second light emitting module 310b are arranged side by side and are tilted at a predetermined angle in a direction facing each other when the light 410a and 410b are respectively output. FIG. 5 is an exemplary view for explaining an arrangement structure of a first light emitting module and a second light emitting module constituting the droplet information measuring apparatus shown in FIG. 4 .

The detection module 320 detects droplets discharged by the inkjet head unit 250 . When the lights 410a and 410b output by the first light emitting module 310a and the second light emitting module 310b intersect, constructive interference occurs and a fringe region 420 is formed as shown in FIG. 6 . The detection module 320 may detect a droplet when it passes through the fringe area 420 after being discharged from the inkjet head unit 250 . FIG. 6 is an exemplary diagram for explaining the role of a detection module constituting the drop information measuring apparatus shown in FIG. 4 .

The image acquisition module 330 measures the location where the droplet is ejected, that is, coordinate information of the nozzle. The image acquisition module 330 may be implemented as, for example, a camera sensor (Nozzle View Camera).

The drop information measuring device 120 may be implemented as a PDPA inspection device. If such a PDPA inspection apparatus is equipped with a nozzle view camera, coordinates of the nozzle, which is a target of measurement, can be quickly and easily obtained through the nozzle view camera for the initial fringe area.

The image acquisition module 330 is configured to measure the coordinate information of the nozzles 510a, 510b, ..., 510n provided in the inkjet head unit 250, before the droplet 520 is discharged as shown in FIG. 7 or Thereafter, the coordinate information of the nozzles 510a, 510b, ..., 510n may be measured by moving to the lower portion of the nozzles 510a, 510b, ..., 510n. FIG. 7 is an exemplary view for explaining the role of a camera module constituting the drop information measuring apparatus shown in FIG. 4 .

The image acquisition module 330 measures the coordinate information of the nozzles 510a, 510b, ..., 510n so as not to be contaminated by the droplets 520 discharged through the nozzles 510a, 510b, ..., 510n. direction can be moved.

When the image acquisition module 330 is not used (eg, when the detection module 320 is measuring a droplet passing through the fringe region 420), the image acquisition module 330 moves the position to Contamination due to discharge may be minimized, and a contamination prevention cap or vacuum suction device, and a cleaning system may be applied according to circumstances.

The image acquisition module 330 basically eliminates the jetting state and is a system that intuitively finds a nozzle and acquires coordinates. Therefore, when the image acquisition module 330 is not used (ie, during measurement), it is possible to prevent contamination of the camera by entering the contamination prevention cap or vacuum suction device.

The material of the anti-pollution cap may vary depending on the application field. The anti-pollution cap may be made of, for example, Teflon, which has strong chemical resistance, or quartz, glass, or the like, which ensures transparency.

Vacuum suction device is a device that sucks mist generated to prevent contamination in advance for ink jetting. In addition, the Cleaning System is a device (accessory) that cleans the contaminated lens, such as spraying a cleaning solution or wiping glasses, instead of the operator performing LAN cleaning inside the equipment.

It will be described again with reference to FIG. 4 .

The control module 340 calculates information on droplets discharged by the inkjet head unit 250 . The control module 340 may calculate the velocity of the droplet, the volume of the droplet, the location at which the droplet is discharged (coordinate information of the nozzles 510a, 510b, ..., 510n), etc. as information about the droplet.

The control module 340 may calculate information about the droplet based on the information sensed by the detection module 320 . Specifically, the control module 340 detects a droplet passing through the fringe region 420 by the detection module 320, and when this detection information is converted into an electrical signal and then input, the detection of the droplet is based on the input information. Velocity and volume can be calculated.

The control module 340 may calculate information about the droplet based on the information measured by the image acquisition module 330 . Specifically, the control module 340 captures the nozzles 510a, 510b, ..., 510n of the inkjet head unit 250 by the image acquisition module 330, and converts the photographing information into an electrical signal. , coordinate information of the nozzles 510a, 510b, ..., 510n may be calculated based on the input information.

In the present embodiment, after the image acquisition module 330 photographs the nozzles 510a, 510b, ..., 510n of the inkjet head unit 250 , the detection module 320 detects a droplet passing through the fringe region 420 . can do. Accordingly, the control module 340 may first calculate the coordinate information of the nozzles 510a, 510b, ..., 510n, and then calculate the velocity and volume of the droplets.

However, the present embodiment is not limited thereto. The control module 340 simultaneously calculates the coordinate information of the nozzles 510a, 510b, ..., 510n and calculates the velocity and volume of the droplet, or calculates the velocity and volume of the droplet of the nozzles 510a, 510b, ..., 510n. It is also possible to perform it before calculating the coordinate information.

The drop information measuring apparatus 120 has been described above with reference to FIGS. 4 to 7 . The droplet information measuring device 120 installs a nozzle view camera to check a point corresponding to the fringe position in the PDPA inspection device, and acquires the coordinates of the camera with respect to the point corresponding to the fringe coordinates. Instead of using the laser irradiated from the PDPA to secure the measurement position according to the senses, the coordinates of the nozzle, which is the measurement target, can be checked easily and quickly through the real-time image viewer of the camera installed without laser irradiation.

If the droplet information measuring device 120 does not include the image acquisition module 330, that is, the droplet information measuring device 120 includes a first light emitting module 310a, a second light emitting module 310b, a detection module 320 and If the control module 340 is included, the coordinates of the nozzle must be obtained by correcting the position of the PDPA while continuing jetting so that the fringe, which is the laser intersection point, can be located under the nozzle under jetting.

On the other hand, if the droplet information measuring device 120 includes the image acquisition module 330 , that is, the droplet information measuring device 120 includes a first light emitting module 310a , a second light emitting module 310b , and a detection module 320 . , if it is configured to include the image acquisition module 330 and the control module 340, even without jetting, using the Nozzle View Camera to find the position of the nozzle, obtain the coordinates of the corresponding part, and emit light and laser in the PDPA Coordinates can be obtained without contamination or loss of material at the point of intersection and fringe formation.

The droplet information measuring apparatus 120 may be applied to a process or equipment for inspecting an inkjet facility. However, the present embodiment is not limited thereto, and the droplet information measuring device 120 may be used without limitation in all solution process-based equipment (eg, Spray, Inkjet, EHD, etc.). In addition, the measurement range of the drop information measuring apparatus 120 is not limited to the type of the print head.

The droplet information measuring apparatus 120 and the substrate processing system 100 having the same have been described above with reference to FIGS. 1 to 7 . The droplet information measuring device 120 is a nozzle coordinate acquisition system using the nozzle view camera of the PDPA inspection device. The droplet information measuring apparatus 120 may quickly and easily obtain coordinates of a nozzle capable of measuring PDPA in the inkjet head unit 250 using a nozzle view camera. The drop information measuring apparatus 120 and the substrate processing system 100 may be applied to a facility for manufacturing a display device, for example, a facility using an inkjet head such as a QD CF Inkjet.

Although the embodiments of the present invention have been described with reference to the above and the accompanying drawings, those of ordinary skill in the art to which the present invention pertains can practice the present invention in other specific forms without changing its technical spirit or essential features. You will understand that there is Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive.

100: substrate processing system 110: substrate printing apparatus
120: drop information measuring device 210: base member
220: substrate support unit 230: gantry unit
240: gantry moving unit 250: inkjet head unit
260: inkjet head moving unit 270: ink supply unit
310a: first light emitting module 310b: second light emitting module
320: detection module 330: image acquisition module
340: control module 410a, 410b: output light
420: fringe areas 510a, 510b, . , 510n: nozzle
520: droplet

Claims (10)

a first light emitting module for generating and outputting a first light;
a second light emitting module generating and outputting a second light intersecting the first light;
a detection module for detecting a droplet passing through an intersection region of the first light and the second light;
an image acquisition module for measuring a nozzle for discharging the droplet; and
and a control module configured to generate information about the droplet based on information obtained by detecting the droplet and/or information obtained by measuring the nozzle. The method of claim 1,
The image acquisition module and the detection module operate at different times. 3. The method of claim 2,
The image acquisition module operates before or after the droplet is discharged through the nozzle. The method of claim 1,
The image acquisition module moves to the lower part of the nozzle when measuring the nozzle, and moves to the remaining area except for the lower part of the nozzle after measuring the nozzle. The method of claim 1,
and the image acquisition module is covered by a cap when not in operation. 6. The method of claim 5,
The cap is a droplet information measuring device comprising at least one of Teflon, quartz, and glass. The method of claim 1,
a vacuum suction device for sucking the mist associated with the droplet; and
The drop information measuring apparatus further comprising at least one of a cleaning system for cleaning the image acquisition module. 8. The method of claim 7,
The vacuum suction device and/or the cleaning system operate when the image acquisition module is not operating. The method of claim 1,
The control module is a droplet information measuring device for generating the velocity of the droplet, the volume of the droplet, and a position at which the droplet is discharged as information about the droplet. a droplet information measuring device for generating information on droplets ejected onto the substrate; and
A substrate printing apparatus for printing the substrate using the droplet,
The drop information measuring device,
a first light emitting module for generating and outputting a first light;
a second light emitting module generating and outputting a second light intersecting the first light;
a detection module configured to detect the droplet passing through an intersection region of the first light and the second light;
an image acquisition module for measuring a nozzle for discharging the droplet; and
and a control module configured to generate information about the droplet based on information obtained by detecting the droplet and/or information obtained by measuring the nozzle.

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