JP2016148595A - Shape measurement device and method for measuring structure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a three-dimensional shape measurement device with which it is possible to perform measurement effectively and efficiently.SOLUTION: A shape measurement device 100 comprises: a light projection unit 10 for emitting a slit-like light 50 toward a specimen 90 or scanning a beam in slit form; and a first and a second image-capturing unit 20a, 20b, each disposed on mutually opposite sides on a reference surface along with a plane which the slit-like beam or the beam when scanned in slit form passes through. When the optical axis of the image-capturing optical system of the first image-capturing unit and the optical axis of the image-capturing optical system of the second image-capturing unit are projected onto some plane, an angle formed by the projections of the respective optical axes is less than 180 degrees.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a shape measuring apparatus that measures a three-dimensional shape of a test object using a light cutting method.

  A light cutting method is known as a method for detecting the contour of an object such as an industrial product in a non-contact manner and measuring a three-dimensional shape.

  In order to effectively measure various shapes of the test object, a shape measuring apparatus including an image sensor for detecting an image of the test object on which slit light is projected, such as Patent Document 1, is proposed. Has been.

JP 2008-256484 A

  There is a problem that a part of the surface of the groove cannot be detected for the test object in which the groove is formed in various directions.

The shape measuring apparatus of the present invention emits slit-shaped light toward a test object, or projects a light-projecting unit that scans a light beam in a slit shape, and the light beam passes when scanned in a slit-shaped light beam or slit shape. An optical axis of the imaging optical system of the first imaging unit and imaging of the second imaging unit, the first and second imaging units disposed on opposite sides with respect to a reference plane along the plane The angle formed by the projection of each optical axis when the optical axis of the optical system is projected onto a certain plane is less than 180 degrees.
In the structure manufacturing method according to the present invention, design information relating to the shape of the structure is created, the structure is created based on the design information, and the shape of the created structure is measured using the shape measuring device of the present invention. To obtain shape information and compare the obtained shape information with design information.

It is a perspective view of the shape measuring apparatus of the 1st Embodiment of this invention. It is a top view of the shape measuring apparatus of the 1st Embodiment of this invention. It is a block diagram explaining the structure of the shape measuring apparatus of the 1st Embodiment of this invention. It is explanatory drawing of the measurement using the shape measuring apparatus of the 1st Embodiment of this invention. It is explanatory drawing of the measurement using the shape measuring apparatus of the 1st Embodiment of this invention. It is explanatory drawing of the measurement using the shape measuring apparatus of the 1st Embodiment of this invention. It is a perspective view of the shape measuring apparatus of the 2nd Embodiment of this invention. It is the upper side figure and side view of the shape measuring apparatus of the 2nd Embodiment of this invention. It is sectional drawing of the light projection part outer side for demonstrating the rotation mechanism in the 2nd Embodiment of this invention. It is a block diagram explaining the structure of the structure manufacturing system in the 3rd Embodiment of this invention. It is a flowchart of the manufacturing method of the structure of the 3rd Embodiment of this invention.

<First Embodiment>
A shape measuring apparatus according to a first embodiment of the present invention will be described with reference to the drawings. The shape measuring apparatus according to the first embodiment of the present invention measures the three-dimensional shape of a test object by a light cutting method. The light cutting method is a method of projecting a specific pattern of light onto a test object, imaging the pattern projected on the test object surface from a direction different from the projection direction, and capturing the image from the captured image. In this method, the position of the pattern is obtained, and the position where the pattern of the test object is irradiated is measured from the pattern projection direction and the imaging direction based on the obtained pattern position. In general, the pattern of light applied to the test object is slit-shaped or spot-shaped. The shape measuring apparatus according to the first embodiment of the present invention includes a light projecting unit and an imaging unit, and projects a pattern on the object to be measured by irradiating slit light from the light projecting part toward the object to be measured. The imaging unit has a configuration for capturing an image of the projected pattern.
Note that the embodiments described below in this document are specifically for understanding the purpose of the invention, and do not limit the present invention unless otherwise specified.

  FIG. 1 is a perspective view showing a state in which the surface shape of the test object 90 placed on the upper surface of the placing table 9 is measured using the shape measuring apparatus 100 according to the first embodiment. The light cutting sensor 1 includes a light projecting unit 10, a first imaging unit 20a, a second imaging unit 20b, a first support member 80a, and a second support member 80b. In the following description, when the first imaging unit 20a and the second imaging unit 20b are generically referred to, they are simply referred to as the imaging unit 20, and the first support member 80a and the second support member 80b are generically referred to. Is simply referred to as a support member 80. The light projecting unit 10 includes a projection optical system (not shown) and a light source, and the projection optical system forms a light beam that forms a slit-like illumination field when the light beam emitted from the light source is projected onto a plane. Like to do. Thereby, a slit-shaped light (hereinafter referred to as slit light) 50 is irradiated toward the test object 90 placed on the placing table 9. Scattered light is generated at the portion irradiated with the slit light 50 on the surface of the test object 90. The longitudinal direction of the slit light is a plane on which the slit light is projected with respect to the direction connecting the optical axis of the projection direction by the projection optical system and the intersection of the optical axis of the imaging optical system of the imaging unit 20 and the main plane. Above, it is set in the orthogonal direction. In FIG. 1, for convenience of explanation, a three-dimensional coordinate system including the X axis, the Y axis, and the Z axis is set so that the ZX plane is parallel to the slit light 50. This scattered light is observed as a bright line 51 extending in the X-axis direction on the surface of the test object 90.

  The first support member 80a and the second support member 80b are members for supporting the first imaging unit 20a and the second imaging unit 20b, respectively. One end of the first support member 80 a is fixed to the light projecting unit 10, and extends in a predetermined direction from the optical axis of the projection optical system of the light projecting unit 10 as a starting point. Near the other end of the first support member 80a, the first imaging unit 20a is fixed. One end of the second support member 80b is fixed to the light projecting unit 10 and extends in a predetermined direction different from that of the first support member 80a, starting from the optical axis of the projection optical system of the light projecting unit 10. To do. It is formed on a plane parallel to the XY plane when the end portion of the first support member 80a and the light projecting portion 10 are connected, or when the end portion of the second support member 80b and the light projecting portion are connected. Details of the angle, that is, the angle formed by the direction 80a-ax in which the first support member 80a extends and the direction 80b-ax in which the second support member 80b extends will be described later. The second imaging unit 20b is fixed near the other end of the second support member 80b.

  In FIG. 1, the first support member 80a and the second support member 80b are drawn so as to have a rectangular parallelepiped shape, but the present invention is not limited to this example. It is sufficient that the relative positional relationship with the imaging unit 20 does not change, and it may be a trapezoidal column or a columnar shape. Further, the position of the first imaging unit 20a fixed in the vicinity of the end portion 80a-z of the first support member 80a and the position of the second support member 80b fixed in the vicinity of the end portion 80b-z. The positions of the two imaging units 20b in the Z-axis direction may be the same or different. It is not limited to what the imaging part 20 is fixed to the edge part vicinity of the light projection part 10 of each support member 80 and the opposite side. For example, the imaging unit 20 may be fixed near the middle between the end on the light projecting unit 10 side of the support member 80 and the end on the opposite side.

  The first imaging unit 20a and the second imaging unit 20b have an imaging device (not shown) and an imaging optical system that forms an image of slit light projected on the surface of the object to be measured on the imaging surface of the imaging device. . The direction of the optical axis of each imaging optical system is adjusted so as to intersect or approach the optical axis of the projection optical system of the slit light emitted from the light projecting unit 10. Further, the surface including the imaging surface of the imaging element is disposed so as to include a line where the surface including the optical axis of the projection optical system and the longitudinal direction of the slit light intersects with the main plane of the imaging optical system. Furthermore, the optical axis of the imaging optical system is arranged so that it extends at the center of the imaging surface of the imaging device. Thereby, the 1st imaging part 20a and the 2nd imaging part 20b can each pick up the bright line 51 which appears on an imaging surface satisfactorily, when the image of slit light is formed by an imaging optical system.

The test object 90 is placed on the upper surface of the placing table 9 arranged in parallel to the XY plane. For example, as shown in FIG. 3, the mounting table 9 includes a rotation mechanism having a rotation center axis in a direction orthogonal to the upper surface of the mounting table 9. The test object 90 can be rotatably held by this rotation mechanism. The light cutting sensor 1 is held movably by a manipulator (not shown). The manipulator has a movable shaft that can move in any of the X, Y, and Z directions. In addition, the optical cutting sensor 1 has a tilt mechanism that changes the direction of the light cutting sensor 1 so that the projection direction of the line light can be set to an arbitrary direction. By operating the mounting table 9 and the manipulator in a coordinated manner, the test object 90 and the light cutting sensor 1 can move relative to each other. Therefore, while the slit light 50 is scanned all over the measurement target area of the test object 90, Measurements can be made sequentially. In particular, since the mounting table 9 includes a rotation mechanism, the optical cutting sensor 1 can efficiently scan the rotationally symmetric object 90.
In addition, when it calls a shape measuring apparatus in this specification, it is set as the structure which includes the mechanism which can move the test object 90, such as this manipulator and the mounting base 9, and the optical cutting sensor 1 relatively.

  FIG. 2 is a top view of the light cutting sensor 1 according to the first embodiment. The light projecting unit 10 emits slit light (not shown in FIG. 2) in the Z-axis direction (in FIG. 2, the direction perpendicular to the paper surface). That is, the slit center 11 of the slit light 50 is parallel to the Z axis. Accordingly, the plane 5 including the surface through which the light flux of the slit light 50 passes is perpendicular to the paper surface and perpendicular to the XY plane. The first imaging unit 20a and the second imaging unit 20b are arranged to face each other across the plane 5. In FIG. 2, 20a-O is a lens element that constitutes the first imaging unit 20a, and 20b-O is a lens element of the imaging optical system that constitutes the second imaging unit 20b.

A plane that includes the optical axis of the imaging optical system of the first imaging unit 20a and the optical axis of the projection optical system of the light projecting unit and is perpendicular to the XY plane is referred to as plane 6. Further, a plane that includes the optical axis of the imaging optical system of the second imaging unit 20b and the optical axis of the projection optical system of the light projecting unit and is perpendicular to the XY plane is referred to as plane 7. The intersection angle between the plane 6 and the plane 5 is defined as a first angle θ1, and the intersection angle between the plane 7 and the plane 5 is defined as a second angle θ2. θ1 and θ2 are angles formed in opposite directions with respect to the plane 5. That is, when the optical axis of the imaging optical system of the first imaging unit 20a is projected on the XY plane, the angle formed by the projected optical axis and the line light projected on the XY plane is θ1, and the second The angle formed by the projected optical axis and the line light when the imaging optical system of the imaging unit 20b projects is θ2. Note that the angles formed by the planes 6 and 7 are opposite to the plane 5, respectively, so that the line light image can be captured from different imaging directions. However, one of the first intersection line 56 and the second intersection line 57 may coincide with the slit center 11, or both may not coincide with the slit center 11.
In the above-described example, the optical axis of the imaging unit 20 is projected on the XY plane, but a plane perpendicular to the optical axis of the light projecting unit 10 (or the central axis of the slit light 50) or an assumed mounting table The first angle θ1 and the second angle θ2 may be defined by projecting onto a plane including the upper surface of 9. In addition, regarding the surface for evaluating the angle between the optical axes, the reference surface and the surface to be evaluated intersect when the light beam projected from the light projecting unit is projected onto the surface to be evaluated. Any surface may be used as long as a slit-like pattern is formed in the longitudinal direction in a direction parallel to the line segment formed at the position.
Further, when the optical axis of the first imaging unit 20a and the optical axis of the second imaging unit 20b are projected onto a common plane, the intersection line between the reference plane and the common plane is the light of the two imaging units. Sometimes the axis does not pass through the intersection of the projected lines. In this case, the first angle θ1 and the second angle θ2 may be defined as angles on both sides of a straight line parallel to the intersection line and passing through the intersection. For example, θ1 and θ2 can be defined in the range of 0 to 180 degrees on both sides, with the straight line between them being 0 degrees.

  In addition, if the above-described arrangement relationship is expressed by another expression, the sum of the first angle θ1 and the second angle θ2 is less than 180 degrees. In other words, the angle formed by the direction in which the first support member 80a extends and the direction in which the second support member 80b extends is less than 180 degrees. Thereby, since the imaging direction of the first imaging unit 20a and the imaging direction of the second imaging unit 20b are not facing each other, it is possible to efficiently measure the test object 90 having various shapes. In particular, since the first imaging unit 20a and the second imaging unit 20b capture images from different angles with respect to the symmetry plane with respect to the test object 90 having a line-symmetric surface structure, more information can be obtained in a short scanning time. Can be obtained.

  FIG. 3 is a diagram for explaining a tooth surface inspection of a helical gear (helical gear) as the test object 90 in the shape measuring apparatus using the light cutting sensor 1 according to the first embodiment. FIG. 3A is a diagram of a helical gear when the helical gear is viewed from a direction orthogonal to the upper surface of the mounting table 9, and a diagram illustrating the main components of the optical cutting sensor 1 that measures the helical gear. FIG. 3B is a diagram when the helical gear is viewed from the Y direction. The shape measuring apparatus provided with the optical section sensor 1 includes imaging data captured by the first imaging section 20a and the second imaging section 20b, position information and posture information of the optical section sensor 1 obtained from the manipulator, and a mounting table 9. A processing unit 30 that calculates the shape of the test object 90 based on the rotation angle, and a selection unit 35 that selects the imaging unit 20 suitable for imaging based on information from the interface unit 40 and the processing unit 30; It has an interface unit 40 that displays calculation results and imaging data and receives input of information from the user. The first imaging unit 20a and the second imaging unit 20b include imaging optical systems 21a and 21b and imaging elements 22a and 22b, respectively. The helical gear 90 rotates around the rotation shaft 91 by a rotation mechanism provided on the mounting table 9 (not shown).

  The light projecting unit 10 irradiates the test object 90 with the slit light 50. Looking at the portion irradiated with the slit light 50 from the projection direction, the bright line 51 that is just parallel to the rotation axis 91 is projected onto the surface of the test object 90. The imaging optical systems 21a and / or 21b of the first imaging unit 20a and / or the second imaging unit 20b have a layout that captures an image of the bright line 51 from a direction along the direction of the tooth trace of the helical gear. Yes. That is, the first imaging unit 20 a and / or the second imaging unit 20 b captures the bright line 51. The captured image data is transferred to the processing unit 30, and the shape of the portion corresponding to the bright line 51 on the surface of the test object 90 is calculated by a known image processing method. By repeating the above procedure while rotating the test object 90 at a predetermined rotation speed, a three-dimensional shape of the entire surface of the test object 90 is obtained. That is, in the case of FIG. 3, the shape of the tooth surface of the helical gear as the test object 90 is obtained. Thereby, surface conditions, such as an unevenness | corrugation of a tooth surface and a crack, can be test | inspected.

In the light-cutting sensor 1, with respect to the imaging unit 20a, it is preferable that the main plane of the optical system 21a, the imaging surface of the imaging element 22a, and the direction in which the line light is projected satisfy the known Scheinproof condition. As a result, the entire bright line 51 is focused on the imaging surface of the imaging element 22a. Therefore, since the bright line image can be clearly picked up, the three-dimensional shape of the surface of the test object 90 can be obtained with higher accuracy.
As for the imaging unit 20b, similarly to the above description regarding the imaging unit 20a, the optical system 21b, the imaging element 22b, and the bright line 51 preferably satisfy the Scheinproof condition.

  The three-dimensional shape of the surface of the test object 90 is displayed on a display unit provided in the interface unit 40. The user can input the imaging conditions of the first imaging unit 20a and the second imaging unit 20b through the interface unit 40.

  FIG. 4 is a diagram for explaining in more detail the tooth surface inspection of the helical gear described with reference to FIG. A helical gear 90 </ b> A that is a test object is installed in a rotation mechanism provided in a mounting table (not shown), and rotates at a constant speed around a rotation shaft 91. The rotation shaft 91 is installed in a direction parallel to the X axis. In FIG. 4, reference numerals 92 and 93 denote the tip and bottom of the helical gear 90A, respectively. That is, the direction represented by 92 and 93 is the direction of the tooth trace of helical gear 90A. As shown in FIG. 4, the helical gear 90A is a left-handed helical gear. The slit light 50 irradiated from the light projecting unit 10 toward the helical gear 90A is irradiated by connecting several tooth tips of the helical gear 90A. The first imaging unit 20a and the second imaging unit 20b are configured to capture the bright line 51 from the left oblique front and the right oblique front, respectively, with respect to the paper surface. That is, both the first angle θ1 and the second angle θ2 are set to be smaller than 90 degrees.

  Here, imaging of the bright line 51 by the imaging unit will be described. In FIG. 4, the arrow A1 represents the optical axis of the first imaging unit 20a, and the arrow A2 represents the optical axis of the second imaging unit 20b. As shown in FIG. 4, the direction of the tooth trace of the helical gear 90A intersects the optical axis A1 of the first imaging unit 20a. Therefore, when the bright line 51 formed on the surface of the helical gear 90A is to be imaged by the first imaging unit 20a, a part or all of the tooth bottom 93 is blocked by the tooth tip 92 (referred to as occlusion). May not be captured. On the other hand, since the optical axis A2 of the second imaging unit 20b is set so as to substantially coincide with the direction of the tooth trace of the helical gear 90A, there is no problem that the root 93 is blocked by the tooth tip 92 and is not imaged. . Therefore, in such a case, the bright line 51 is imaged by the second imaging unit 20b, and the three-dimensional shape of the tooth surface of the helical gear 90A is acquired. The helical gear 90A moves at a predetermined speed in the X-axis direction (for example, the X-axis + direction) while rotating at a constant speed. Thereby, the bright line 51 can scan the entire tooth surface of the helical gear 90A.

  In order to measure the entire surface of the test object 90 by relatively moving the position where the bright line 51 is formed, the short direction of the bright line 51 and the relative movement of the test object 90 on the tooth surface. The smaller the angle between the directions, the shorter the measurement time, and the inspection time can be minimized when the two coincide. In the example of FIG. 4, when the direction perpendicular to the short direction of the bright line 51 and the rotation axis 91 are parallel on the tooth surface, the direction perpendicular to the slit light and the relative movement direction substantially coincide with each other. The area to be measured can be maximized during one rotation of the test object, and therefore the measurement time for the entire test object can be minimized.

  FIG. 5 is a diagram for explaining in detail the tooth surface inspection of the helical gear similar to FIG. FIG. 5 and FIG. 4 are the same except for the point that the object to be measured in FIG. 4 is the helical gear 90A, but the object to be measured in FIG. 5 is the helical gear 90B. In the helical gear 90B, the inclination of the tooth trace is the same as that of the helical gear 90A, but the inclination direction is opposite. That is, the helical gear 90B is a left-handed helical gear.

  The direction of the tooth trace of the helical gear 90B intersects with the optical axis of the second imaging unit 20b. Therefore, when the bright line 51 formed on the surface of the helical gear 90B is to be imaged by the second imaging unit 20a, the tooth bottom 93 is blocked by the tooth tip 92 and may not be imaged. That is, occlusion may occur. On the other hand, since the optical axis of the first imaging unit 20a is set so as to substantially coincide with the direction of the tooth trace of the helical gear 90B, the problem that the root 93 is blocked by the tooth tip 92 and is not imaged does not occur. Therefore, in such a case, the bright line 51 is imaged by the first imaging unit 20a, and the three-dimensional shape of the tooth surface of the helical gear 90B is acquired.

  FIG. 6 is a diagram for explaining the measurement of the three-dimensional shape of the separator of the fuel cell using the light cutting sensor 1. A separator 90 of a fuel cell as a test object includes a groove portion 94 having a certain depth on its surface 90s. The groove portion 94 includes a first groove portion 94a extending from the upper left to the lower right in FIG. 6 and a second groove portion 94b extending from the upper right to the lower left. The first imaging unit 20a and the second imaging unit 20b are set so that the optical axes A1 and A2 of the respective optical systems substantially coincide with the extending direction of the second groove 94b and the extending direction of the first groove 94a, respectively. Is done. That is, the first imaging unit 20a is set so as to capture the bright line 51 from the diagonally upper front of the second groove 94b in the extending direction, and the second imaging unit 20b is operated from the diagonally upper front of the first groove 94a in the extending direction. It is set to image the bright line 51. The direction of the bright line 51 is set so as to intersect at substantially the same angle as both the first groove portion 94a and the second groove portion 94b. While the separator 90 is moved in the direction indicated by the white arrow A3 in FIG. 6, the bright line 51 is imaged by the first imaging unit 20a and the second imaging unit 20b, and using the imaging data captured by both of them. The three-dimensional shape of the surface of the separator 90 is acquired.

  The imaging with the imaging unit will be described in detail. The wall surface constituting the groove portion 94 is substantially perpendicular to the bottom surface of the groove portion 94. For this reason, when the groove portion 94 is to be imaged by the first imaging portion 20a, the bright line 51 formed on the bottom surface of the second groove portion 94b can be favorably imaged, whereas it is formed on the bottom surface of the first groove portion 94a. A part of the bright line 51 is blocked by the front surface 90s and cannot be imaged. That is, occlusion occurs. On the other hand, when the groove portion 94 is to be imaged by the second imaging portion 20b, the bright line 51 formed on the bottom surface of the first groove portion 94a can be favorably imaged, whereas it is formed on the bottom surface of the second groove portion 94b. A part of the bright line 51 is blocked by the front surface 90s and cannot be imaged. That is, occlusion occurs.

  Therefore, the first groove portion 94a is imaged by the second imaging unit 20b, and the second groove portion 94b is imaged by the first imaging unit 20a, whereby good imaging data can be obtained for all portions of the groove portion 94. .

In the measurement of the three-dimensional shape with reference to FIG. 4, FIG. 5, and FIG. 6, bright lines formed on the surface of the measurement object 90 by either one of the first imaging unit 20a and the second imaging unit 20b. It explained as imaging. However, the three-dimensional shape of the surface of the test object 90 using the image data picked up by the image pickup unit that has been picked up by both the first image pickup unit 20a and the second image pickup unit 20b and has been picked up satisfactorily. May be obtained. In addition, when both the first imaging unit 20a and the second imaging unit 20b have successfully captured images, the three-dimensional surface of the test object 90 is synthesized by combining the imaging data captured by both imaging units. You may make it acquire a shape.
Further, the first imaging unit and the second imaging unit may be selectable in accordance with the extending direction of the groove portion of the test object 9. In addition, when there is model data (for example, CAD data or gear specifications data) of the test object 9, which is input via the user interface unit 40, which is selected by the selection unit 35 according to the extending direction of the groove portion. It may be determined whether to select the imaging unit, and shape measurement may be performed based on the imaging data of the selected imaging unit.

According to the first embodiment described above, the following operational effects are obtained.
(1) The shape measuring apparatus 1 according to the first embodiment arranges the first imaging unit 20a and the second imaging unit 20b on both sides of the plane along the slit light 50, and the first angle θ1 The sum with the second angle θ2 is less than 180 degrees. Since the imaging direction of the first imaging unit 20a and the imaging direction of the second imaging unit 20b are not facing each other, the shape of the surface of the object 90 to be measured is compared with a case where measurement is performed from a single imaging direction. Therefore, it is possible to easily select an imaging direction that avoids the occurrence of occlusion due to the occurrence of occlusion. In addition, this makes it easy to distinguish multiple reflected lights by imaging from an appropriate imaging direction, and more precise measurement can be performed. Furthermore, the direction of the bright line 51 that can be measured in a short measurement time can be selected. Therefore, more precise measurement can be performed, measurement time can be shortened, and work efficiency can be improved.
Further, when a measuring device in a single imaging direction is used, an occlusion occurs depending on the shape of the test object 90. In order to measure the entire measurement range of the test object 90, It was necessary to change the mounting posture and perform multiple measurements. On the other hand, according to the present embodiment, since measurement can be performed from a plurality of imaging directions, it is not necessary to change the mounting posture of the test object 90 or the test object 90 is temporarily mounted. Even if the posture needs to be changed, the number of times can be reduced, so that the work efficiency can be improved and the productivity can be improved.

<Second Embodiment>
Next, a light cutting sensor according to a second embodiment of the present invention will be described. In the light-cutting sensor 2 according to the second embodiment of the present invention, the first support member 80a and the second support member 80b in the light-cutting sensor 1 according to the first embodiment of the present invention are respectively connected to the light projecting unit 10. It is made to be rotatable around a rotation shaft 8 at the center. The light cutting sensor 2 according to the second embodiment of the present invention is the same as the light cutting sensor 1 according to the first embodiment in other basic configurations. The same parts are referred to by the same reference numerals as those in the first embodiment, and description thereof will be omitted depending on the case.

  FIG. 7 is a perspective view of the light cutting sensor 2 according to the second embodiment of the present invention. Similar to the light cutting sensor 1, the light cutting sensor 2 includes a light projecting unit 10, a first imaging unit 20a, a second imaging unit 20b, a first support member 80a, and a second support member 80b. In the present embodiment, the first support member 80 a and the second support member 80 b are configured to be rotatable about the optical axis 8 of the light projecting unit 10. In the following description, the first support member 80a and the second support member 80b are described as having a common rotation axis, but the present invention is not limited to this example, and the first support member 80a and the second support member 80b The second support member 80b may be rotatable on a different rotation shaft. In this case, one of the rotation axis of the first support member 80a and the rotation axis of the second support member 80b may coincide with the optical axis 8 of the light projecting unit 10, and any rotation axis may be used. It does not have to coincide with the optical axis 8.

  8A and 8B are external views of the light cutting sensor 2 according to the second embodiment of the present invention. FIG. 8A is a top view of the light cutting sensor 2 and FIG. 8B is a side view of the light cutting sensor 2. It is. The first angle θ1 and the second angle θ2 are defined as in the first embodiment. The first angle θ1 is also the rotation angle of the first support member 80a. Similarly, the second angle θ2 is also the rotation angle of the second support member 80b.

  The movable range of the first support member 80a and the second support member 80b can be arbitrarily determined within a range in which the first imaging unit 20a and the second imaging unit 20b fixed to each other do not interfere with each other's imaging. it can. For example, the first support member 80a can rotate on one side (the Y + side shown in FIG. 8A) across the plane 5, and the other side (Y shown in FIG. 8A). On the negative side, the second support member 80b can be turned.

  In this case, the first rotation angle θ1 and the second rotation angle θ2 can take values between 0 degrees and 180 degrees. Alternatively, play is provided so that the first support member 80a and the second support member 80b do not contact each other, and the first rotation angle θ1 and the second rotation angle θ2 take values between 5 degrees and 175 degrees. It can be. Thereby, the imaging positions of the first imaging unit 20a and the second imaging unit 20b according to the shape of the test object within a range in which the first support member 80a and the second support member 80b do not interfere with each other's imaging. Can be determined.

  FIG. 9 is a cross-sectional view taken along line AA for explaining the rotation mechanism of the shape measuring apparatus 100 according to the second embodiment of the present invention. A motor 104 a and a motor 104 b for rotating the first support member 80 a and the second support member are fixed to the outer peripheral portion of the light projecting unit 10. A gear 103a and a gear 103b are fixed to the respective rotation shafts of the motor 104a and the motor 104b, and the gear 103a and the gear 103b rotate individually as the motor 104a and the motor 104b rotate.

  A gear 102a is formed on a part of the first support member 80a and engages with the gear 103a. A gear 102b is formed on a part of the first support member 80b and engages with the gear 103b. Thus, when the motor 104a rotates, the first support member 80a rotates around the optical axis 8 via the gear 103a and the gear 102a. Similarly, when the motor 104b rotates, the second support member 80a rotates about the shaft 8 via the gear 103b and the gear 102b. Note that the gear 102a may not be integrated with the first support member 80a but may be constituted by another member. Similarly, the gear 102b may not be integrated with the second support member 80b but may be constituted by another member.

  The first motor 104a and the second motor 104b can rotate in either direction. In the top view of FIG. 8A, each of the first support member 20a and the second support member 20b is It can be rotated both clockwise and counterclockwise. That is, the angle θ1 of the first support member 80a and the angle θ2 of the second support member 80b can be controlled independently of each other.

  The user can control the operations of the first motor and the second motor by an input from the interface unit 40 (FIG. 3). Therefore, the imaging positions of the first imaging unit 20a and the second imaging unit 20b can be set according to the surface shape of the test object. In addition, by using a stepping motor or a motor with a rotary encoder as the first motor 104a and the second motor 104b, the first rotation angle θ1 and the second rotation angle of the first support member 80a and the second support member 80b are used. It is possible to know information about the rotation angle θ2.

According to the above-described embodiment, in addition to the function and effect obtained by the first embodiment, the following function and effect are obtained.
(1) The first support member 80 a and the second support member 80 b are supported to be rotatable about the optical axis 8 of the light projecting unit 10. That is, the position of the first imaging unit 20 a fixed to the first support member 80 a and the second imaging unit 20 b fixed to the second support member 80 b can be changed with respect to the bright line 51. it can. Therefore, the degree of freedom in selecting the imaging direction of the first imaging unit 20a and the imaging direction of the second imaging unit 20b with respect to the slit light 50 can be improved. For this reason, the user can avoid the occurrence of occlusion according to the surface shape of the test object 90, and hence it is easy to distinguish from the image of the multiple reflected light, and the measurement time can be shortened. Therefore, since the optimal position of the imaging unit 20 can be selected, it is possible to cope with the measurement of the test object 90 having various surface shapes.
(2) In the shape measuring apparatus 2 of the present embodiment, the position of the imaging unit 20 is changed by rotationally driving the first support member 80a and the second support member 80b. Accordingly, since the user can adjust the imaging direction without directly touching the light cutting sensor 2, the user can remotely control the measurement system and use the shape measuring apparatus 100 under a wider range of conditions. Can do.

-Third embodiment-
A structure manufacturing system according to an embodiment of the present invention will be described with reference to the drawings. The structure manufacturing system of the present embodiment creates a molded product such as an electronic component including, for example, an automobile door portion, an engine portion, a gear portion, and a circuit board.

  FIG. 10 is a block diagram showing an example of the structure of the structure manufacturing system 600 according to this embodiment. The structure manufacturing system 600 includes a shape measuring device 100 including the optical cutting sensor 1 described in the first embodiment or the modification, a design device 610, a molding device 620, a control system 630, and a repair device. 640. The light cutting sensor may be the one described in the light cutting sensor 2 described in the second embodiment or the following modification.

  The design device 610 is a device used by a user when creating design information related to the shape of a structure, and performs design processing for creating and storing design information. The design information is information indicating the coordinates of each position of the structure. The design information is output to the molding apparatus 620 and a control system 630 described later. The molding apparatus 620 performs a molding process for creating and molding a structure using the design information created by the design apparatus 610. In this case, the molding apparatus 620 includes an apparatus that performs at least one of laminating, casting, forging, and cutting represented by 3D printer technology.

  The shape measuring device 100 performs a measurement process for measuring the shape of the structure formed by the forming device 620. The shape measuring apparatus 100 outputs information (hereinafter referred to as shape information) indicating the coordinates of the structure, which is a measurement result of measuring the structure, to the control system 630. The control system 630 includes a coordinate storage unit 631 and an inspection unit 632. The coordinate storage unit 631 stores design information created by the design apparatus 610 described above.

  The inspection unit 632 determines whether or not the structure molded by the molding device 620 is molded according to the design information created by the design device 610. In other words, the inspection unit 632 determines whether or not the molded structure is a non-defective product. In this case, the inspection unit 632 reads the design information stored in the coordinate storage unit 631 and performs an inspection process for comparing the design information with the shape information input from the shape measuring apparatus 100. For example, the inspection unit 632 compares the coordinates indicated by the design information with the coordinates indicated by the corresponding shape information as the inspection process, and if the coordinates of the design information and the coordinates of the shape information match as a result of the inspection process. It is determined that the product is a non-defective product molded according to the design information. If the coordinates of the design information and the coordinates of the corresponding shape information do not match, the inspection unit 632 determines whether or not the coordinate difference is within a predetermined range, and if it is within the predetermined range, it can be restored. Judged as a defective product.

  If it is determined that the defective product can be repaired, the inspection unit 632 outputs repair information indicating the defective portion and the repair amount to the repair device 640. The defective part is the coordinate of the shape information that does not match the coordinate of the design information, and the repair amount is the difference between the coordinate of the design information and the coordinate of the shape information in the defective part. The repair device 640 performs a repair process for reworking a defective portion of the structure based on the input repair information. The repair device 640 performs the same process as the molding process performed by the molding apparatus 620 in the repair process again.

Processing performed by the structure manufacturing system 600 will be described with reference to the flowchart shown in FIG.
In step S201, the design apparatus 610 is used when the structure is designed by the user. The design apparatus 610 creates and stores design information related to the shape of the structure by the design process, and the process proceeds to step S202. Note that the present invention is not limited to only the design information created by the design apparatus 610. If design information already exists, the design information is acquired by inputting the design information, and is included in one aspect of the present invention. It is. In step S202, the molding apparatus 620 creates and molds a structure based on the design information by a molding process, and proceeds to step S203. In step S203, the shape measuring apparatus 100 performs measurement processing, measures the shape of the structure, outputs shape information, and proceeds to step S204.

  In step S204, the inspection unit 632 performs an inspection process for comparing the design information created by the design apparatus 610 with the shape information measured and output by the shape measurement apparatus 100, and the process proceeds to step S205. In step S <b> 205, based on the result of the inspection process, the inspection unit 632 determines whether the structure formed by the forming apparatus 620 is a non-defective product. If the structure is a non-defective product, that is, if the coordinates of the design information and the coordinates of the shape information match, an affirmative determination is made in step S205 and the process ends. If the structure is not a non-defective product, that is, if the coordinates of the design information do not match the coordinates of the shape information or if coordinates that are not in the design information are detected, a negative determination is made in step S205 and the process proceeds to step S206.

  In step S206, the inspection unit 632 determines whether or not the defective portion of the structure can be repaired. If the defective part cannot be repaired, that is, if the difference between the coordinates of the design information and the coordinates of the shape information in the defective part exceeds the predetermined range, a negative determination is made in step 206 and the process ends. If the defective part can be repaired, that is, if the difference between the coordinates of the design information and the shape information in the defective part is within a predetermined range, an affirmative determination is made in step S206 and the process proceeds to step S207. In this case, the inspection unit 632 outputs repair information to the repair device 640. In step S207, the repair device 640 performs a repair process on the structure based on the input repair information, and returns to step S203. As described above, the repair device 640 performs the same process as the molding process performed by the molding apparatus 620 in the repair process.

According to the structure manufacturing system of the third embodiment described above, the following functions and effects can be obtained.
(1) The shape measuring apparatus 100 of the structure manufacturing system 600 performs a measurement process for acquiring shape information of the structure created by the molding apparatus 620 based on the design process of the design apparatus 610, and performs an inspection unit of the control system 630. Reference numeral 632 performs an inspection process for comparing the shape information acquired in the measurement process with the design information created in the design process. Therefore, it is possible to determine whether a structure is a non-defective product created according to the design information by acquiring defect inspection of the structure or information inside the structure by nondestructive inspection. Contribute to.

(2) The repair device 640 performs the repair process for performing the molding process again on the structure based on the comparison result of the inspection process. Therefore, when the defective portion of the structure can be repaired, the same processing as the molding process can be performed again on the structure, which contributes to the manufacture of a high-quality structure close to design information.

The following modifications are also within the scope of the present invention, and one or a plurality of modifications can be combined with the above-described embodiment.
(Modification 1)
In the embodiment described above, the light projecting unit 10 is set to emit the linear slit light 50. Here, the pattern of the slit light 50 emitted from the light projecting unit 10 is not limited to a linear shape. For example, slit-shaped light may be formed by scanning the beam in a straight line.

(Modification 2)
In the above-described first embodiment, the sum of the first angle θ1 and the second angle θ2 is less than 180 degrees, but the first angle θ1 and the second angle θ2 are each 90 degrees. It may be less. Thereby, it becomes possible to deal with specimens having various surface shapes, and as described above, measurement time can be shortened and work efficiency can be improved. For the same reason, in the second embodiment, the movable range can be set such that the first rotation angle θ1 and the second rotation angle θ2 are in the range of 0 degrees to 90 degrees, respectively.
(Modification 3)
In the second embodiment described above, the user may input parameters that characterize the shape of the test object 90 through the interface unit 40. In this case, the processing unit 30 receives parameters that characterize the shape of the test object 90. The processing unit 30 is configured to automatically rotate the first support member 20a and the second support member 20b to a position suitable for measurement of the test object 90. For example, when the left-handed and right-handed helical gears are measured alternately, the user can input the angle formed by the bright line 51 and the tooth trace direction on the tooth surface through the interface unit 40. Based on the angle formed by the bright line 51 and the direction of the tooth trace, the processing unit 30 sets the first support member 80a so that the imaging directions of the first imaging unit 20a and the second imaging unit 20b are optimized. And the 2nd supporting member 80b can be set.

  An image analysis unit that analyzes the surface shape of the test object 90 may be further provided. Thereby, based on the characteristics of the surface shape of the test object, the processing unit 30 automatically rotates the first support member 80a and the second support member 80b to a position suitable for the measurement of the test object 90. It may be configured to move.

  Although various embodiments and modifications have been described above, the present invention is not limited to these contents. Other embodiments conceivable within the scope of the technical idea of the present invention are also included in the scope of the present invention.

DESCRIPTION OF SYMBOLS 1, 2 ... Light cutting sensor 5 ... Reference plane 6 ... 1st plane 7 ... 2nd plane 8 ... Optical axis 10 of a light projection part ... Light projection part 11 ... Center axis 20a of slit light ... 1st imaging part 20b ... second imaging unit 30 ... processing unit 35 ... selection unit 40 ... interface unit 50 ... slit light 51 ... bright line 80a ... first support member 80b ... second support member 100 ... shape measuring device

Claims (9)

A light projecting unit that emits slit-shaped light toward the test object, or scans a light beam in a slit shape,
A first imaging unit and a second imaging unit respectively disposed on opposite sides with respect to a reference plane along a plane through which the luminous flux passes when scanned in the slit-shaped luminous flux or slit;
When the optical axis of the imaging optical system of the first imaging unit and the optical axis of the imaging optical system of the second imaging unit are projected onto a certain plane, the angles formed by projections of the respective optical axes are 180. A shape measuring device that is less than degrees. In the shape measuring apparatus according to claim 1,
When the angle is divided into two at the intersection line of the reference plane and the certain plane, the angle on the side where the first imaging unit is located is the first angle, and the angle on the side where the second imaging unit is located The second angle,
The shape measuring apparatus in which the first angle and the second angle are each less than 90 degrees. In the shape measuring device according to claim 1 or 2,
The shape measuring device in which the first angle and / or the second angle is variable. In the shape measuring device according to claim 3,
The shape measuring device is
A first support member that supports the first imaging unit;
A second support member that supports the second imaging unit,
The shape measuring device, wherein the first and / or second support member is supported so as to be rotatable about an optical axis of the light projecting unit. In the shape measuring device according to any one of claims 1 to 4,
A shape measuring apparatus in which the first imaging unit and the second imaging unit can be selected according to the shape of the test object. In the shape measuring device according to any one of claims 1 to 4,
A shape measuring apparatus having a selection unit that is selected by the first imaging unit and the second imaging unit in accordance with an extending direction of a groove formed in the test object. Create design information about the shape of the structure,
Create the structure based on the design information,
The shape of the created structure is measured using the shape measuring device according to any one of claims 1 to 6 to obtain shape information,
A structure manufacturing method for comparing the acquired shape information and the design information. In the manufacturing method of the structure according to claim 7,
A method of manufacturing a structure, which is executed based on a comparison result between the shape information and the design information, and reworks the structure. In the manufacturing method of the structure according to claim 8,
The reworking of the structure is a structure manufacturing method in which the structure is created again based on the design information.

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