JP2002131762A - Lamination device and method for laminating substrate for liquid crystal panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To align substrates by externally moving substrates in XYθ directions outside of pressurizing plates while keeping only the space between the pressurizing plates in a sealed state. SOLUTION: The pressurizing plates 1, 2 holding two substrates A, B are moved nearer to each other so as to seal the space between the peripheral edges 1a, 2a of the plates by a movable sealing means 4 to form a section of a closed space S while the substrates A, B are moved nearer to each other to form a specified gap. Then while the air in the closed space S is evacuated, the pressurizing plates 1, 2 are relatively moved and adjusted in along XYθ directions to roughly align the substrates A, B. After a specified vacuum degree is obtained, the movable sealing means 4 is deformed to move the substrates A, B further nearer to each other the position where the gap between the substrates A, B is sealed with an annular adhesive C. In this state, the pressurizing plates 1, 2 are relatively moved and adjusted in the XYθ directions to finely align the substrates. Then the substrates are released from only one of the plates 1, 2 to return the closed space S to the atmospheric pressure so that the gap is uniformly pressed by the pressure difference between the inside and outside of the substrates A, B to form a specified gap.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a process for manufacturing a liquid crystal panel used for a liquid crystal display (LCD).
The present invention relates to a bonding apparatus and a bonding method for a liquid crystal panel substrate for aligning (roughly and finely) two liquid crystal panel substrates in a vacuum. Specifically, two substrates, each detachably held on a pair of upper and lower pressing plates, are superimposed in a vacuum, and are relatively adjusted and moved in the X, Y, and θ directions by positioning means to roughly and finely adjust the two substrates. The present invention also relates to a bonding apparatus and a bonding method for a liquid crystal panel substrate, in which both substrates are pressed and crushed to a predetermined gap.

[0002]

2. Description of the Related Art Conventionally, as shown in FIG. 5, for example, a bonding apparatus and a bonding method for a liquid crystal panel substrate of this type include a pair of upper and lower pressing plates 1 'and 2' and positioning means such as an XY table. A vacuum chamber 11 is formed so as to be openable and closable in the vertical direction so as to surround the whole of 8 ', and a drive shaft 8 for connecting the positioning means 8' and its drive source 8b '.
c 'is provided through the vacuum chamber 11 by a vacuum penetrating component 12 such as a bellows. After the vacuum chamber 11 is closed and the inside thereof is evacuated, the positioning means 8 'is actuated by the drive shaft 8c' from the outside to adjust the two pressing plates 1 'and 2' relatively in the XYθ direction. By being moved, the two substrates A and B are roughly and finely aligned.

[0003]

However, in such a conventional apparatus and method for bonding substrates for liquid crystal panels, alignment is performed by moving the positioning means in the vacuum chamber by XYθ by external drive transmission. Therefore, the vacuum penetrating parts of the drive shaft become complicated, which not only increases the cost of shutting off the vacuum inside and outside the vacuum chamber, but also requires considerable force for rough adjustment and fine adjustment depending on the viscosity of the sealing material. There is a problem that there are many restrictions. In addition, since the vacuum chamber surrounds the entire pair of upper and lower pressure plates and the positioning means, the space for vacuum becomes large, and it is necessary to increase the capacity of the vacuum pump and limit the size of the substrate that can be used. Therefore, there is a problem that a large-sized substrate cannot be manufactured.

[0004] The invention according to claims 1 and 2 of the present invention,
While keeping only the space between the two pressure plates in a sealed state, XY
It is intended to perform the alignment by moving θ. According to the third and fourth aspects of the present invention, in addition to the object of the first or second aspect of the present invention, it is another object of the present invention to prevent local pressurization between substrates irrespective of flatness and parallel accuracy of a rigid pressure plate. It is what it was. The invention according to claim 5 is the invention according to claim 2.
Or, in addition to the object of the invention described in 4, the object is to produce a liquid crystal panel without injecting liquid crystal in a later step.

[0005]

In order to achieve the above-mentioned object, according to the first aspect of the present invention, there is provided a holding means for immovably holding a substrate provided on opposing surfaces of both pressure plates. Moving seal means capable of elastically deforming in the vertical direction for supporting the movable portions relatively in the XYθ directions while maintaining the sealed state between the opposing peripheral portions of the two pressing plates; A first pressurizing means for forming a closed space between the two pressurizing plates so as to surround the two substrates, and for bringing the two substrates close to a predetermined interval, A suction means for reducing the degree of vacuum, a second pressure means for bringing the two substrates brought closer by the first pressure means closer to a position where the two substrates are sealed with an annular adhesive, and the first pressure means In the operating state of the means and the second pressing means, both pressing plates are It is characterized in that it comprises a positioning means which is disposed outside the closed space for moving the adjustment pairs to the XYθ direction. According to a second aspect of the present invention, the step of holding the two substrates immovably on the opposing surfaces of the two pressing plates, and the approaching movement of the two pressing plates causes a vertical space between the opposing peripheral portions. Sealing with elastically deformable moving sealing means to form a closed space so as to surround both substrates, and to bring both substrates in the closed space closer to a predetermined distance; and Adjusting and moving the two pressure plates relatively in the XYθ directions while pulling them out to roughly match the two substrates, and deforming the moving seal means after the inside of the closed space reaches a predetermined degree of vacuum. A step of further bringing the two substrates closer to a position where the two substrates are sealed with an annular adhesive; and a step of relatively moving the two pressure plates in the XYθ directions to finely align the two substrates closer together. , One of the above pressure plates Releasing one substrate from one side, returning the inside of the closed space to atmospheric pressure, and crushing evenly up to a predetermined gap by a pressure difference generated between the inside and outside of the two substrates, and sequentially performing these steps. It is characterized by the following. According to a third aspect of the present invention, in the configuration of the first aspect, the second pressing means closes a concave portion formed in the center of the opposing surface of the one pressing plate and holds the one substrate immovably. A flexible thin plate material that can be elastically deformed only in the vertical direction, and a gas in a recess closed by the flexible thin plate material is taken in and out so that the flexible thin plate material swells toward the other substrate during fine alignment. It is characterized in that a configuration comprising a pressurizing portion for deformation is added. According to a fourth aspect of the present invention, in the configuration of the second aspect of the present invention, the one substrate is provided with a flexible thin plate material that can be elastically deformed only in the vertical direction to close a concave portion formed at the center of the opposing surface of the one pressure plate. The step of maintaining the inner space of the closed recess and the inner pressure of the closed space to be roughly equalized, and the inner pressure of the closed recess after the roughening reaches a predetermined degree of vacuum after the rough adjustment. A step of causing the flexible thin plate material to bulge and deform by the ascending and further moving the one substrate held thereon toward the other substrate. A fifth aspect of the present invention is characterized in that a configuration in which an appropriate amount of liquid crystal is injected between both substrates before the rough alignment is added to the configuration of the second or fourth aspect of the present invention. I do.

[0006]

According to the first and second aspects of the present invention, the pressurizing plate holding the two substrates moves close to each other, whereby the space between the peripheral edges is sealed by moving seal means to form a closed space. The two substrates approach each other up to a predetermined distance, and then, while bleeding the air in the closed space, the two pressurizing plates are relatively moved in the X, Y, and θ directions to roughly adjust the two substrates. After that, the moving sealing means is deformed to further approach the position where both substrates are sealed with the annular adhesive, and in this state, the two pressing plates are relatively adjusted and moved in the XYθ directions. Then, the two substrates are finely aligned, and thereafter, the substrate is released from only one of the pressure plates, and the inside of the closed space is returned to the atmospheric pressure. It is crushed to form a predetermined gap. According to the third and fourth aspects of the present invention, the second pressing means closes a concave portion formed at the center of the facing surface of the one-side pressing plate and holds the one substrate immovably. A flexible thin plate material elastically deformable only in the vertical direction, and a gas in a concave portion closed by the flexible thin plate material is taken in and out so that the flexible thin plate material swells toward the other substrate at the time of fine alignment. Or a configuration in which a pressing portion for deforming the pressure plate is added, or the configuration described in claim 2 can be elastically deformed only in a vertical direction that closes a concave portion formed in the center of the facing surface of the one pressing plate. A step of holding the one substrate immovably on the flexible thin plate material, a step of roughly adjusting the internal pressure of the closed recess and the internal pressure of the closed space to be the same, and after the rough adjustment, the inside of the closed space is brought to a predetermined degree of vacuum. After reaching, the internal pressure of the closed recess increases A step of expanding and deforming the flexible thin plate material and moving the one substrate held by the flexible thin plate material further toward the other substrate, so that after the rough alignment, the internal pressure of the closed recess increases and the flexible thin plate material is increased. Is swelled and deformed, the one substrate held by the substrate is brought closer to the other substrate, and the two substrates are sealed with the annular adhesive C, whereby the two substrates are evenly crushed to near the final gap at the time of fine alignment. According to a fifth aspect of the present invention, a configuration in which an appropriate amount of liquid crystal is injected between both substrates before the rough alignment is added to the configuration of the second or fourth aspect, By returning the atmosphere in the closed space to the atmospheric pressure, the substrates are evenly crushed by the pressure difference between the inside and outside of the substrates, and a predetermined gap can be formed in a state where the liquid crystal is sealed.

[0007]

Embodiments of the present invention will be described below with reference to the drawings. In this embodiment, as shown in FIGS. 1 and 2, the upper pressing plate 1 can reciprocate up and down,
The lower platen is supported so as not to be movable in the direction, and the lower pressing plate 2 is supported on a fixed base plate 9 via a positioning means 8 such as an XY table so as to be adjustable in the XYθ direction. The upper surface plate 1 and the lower surface plate 2
The two glass substrates A and B held by suction on the opposing surfaces of
The alignment is performed in a vacuum atmosphere.

The upper stool 1 and the lower stool 2 are made of a rigid material such as metal or carbon. A plurality of holding means 3 for holding the substrates A and B immovably are provided at the center of these opposing surfaces. Suction holes are formed, and the suction holes 3 are connected to a suction source (not shown) such as a vacuum pump by piping. The operation of this suction source is controlled by a controller (not shown), and suction is started in an initial state in which both substrates A and B are set.
In this embodiment, the suction of the upper substrate A is released, and after the closed space S described later returns to the atmospheric pressure, the suction of the lower substrate B is released to return to the initial state.

The substrates A and B are composed of, for example, a color filter on which a desired pattern is formed and a TFT substrate, and are arranged along one of these opposing surfaces, in the illustrated example, along the peripheral edge of the lower substrate B. The annular adhesive C is applied in a frame shape, and a large number of spacers (not shown) are dispersed on the other side as necessary.

Further, a movable seal is provided between the peripheral portion 1a of the upper surface plate 1 and the peripheral portion 2a of the lower surface plate 2 for relatively movably supporting in the XYθ directions while maintaining a sealed state therebetween. Means 4 is provided in an annular shape so as to surround both substrates A and B. In the case of the present embodiment, the moving sealing means 4 includes a moving block 4a formed in a circular or rectangular cross section in accordance with the planar shape of the upper stool 1 and the lower stool 2, and an upper surface mounted on the upper surface of the moving block 4a. An annular sealing member 4b, such as an O-ring, which is elastically deformable in the vertical direction, such as an O-ring, which comes in contact with and separates from the peripheral portion 1a of the surface plate 1, and a peripheral portion 2a of the lower surface plate 2 mounted on the lower surface of the moving block 4a. Accordingly, a driving vacuum seal 4c using, for example, vacuum grease, and a load receiving ball 4 supporting the driving vacuum seal 4c so that a force such as the weight of the upper platen 1 or the moving block 4a does not act on the driving vacuum seal 4c.
d.

In order to connect the upper platen 1 and the moving block 4a integrally in the X, Y, and θ directions as necessary, a plurality of connecting pins 4e are vertically moved from the upper platen 1 to the moving block 4a. Can reciprocate freely in the direction
In order to prevent the moving block 4a and the lower stool 2 from separating in the vertical direction, it is preferable to extend an elastic material 4f such as a tension spring over both of them in order to prevent the moving plate 4a and the lower platen 2 from separating in the vertical direction.

The upper platen 1 is provided with a first pressurizing means, such as a vertical drive cylinder, as indicated by reference numeral 5 in FIG. The operation of the first pressurizing means 5 is controlled by a controller (not shown). In an initial state in which the substrates A and B are set, the upper platen 1 as shown by the alternate long and short dash line in FIG. 1 and FIG. Waiting at the upper limit position, substrate A,
After the setting of B is completed, the upper surface plate 1 is lowered as shown by the solid line in FIG. 1 and FIG.
Are formed so as to surround both substrates A and B.
After the completion of the fine adjustment, or after a closed space S described later returns to the atmospheric pressure, it is raised to the initial state.

The closed space S is connected to, for example, a vacuum pump disposed outside as shown by reference numeral 6 in FIG. There is provided a suction means for making the degree of vacuum equal to. This intake means 6
Is controlled by a controller (not shown) to start suction from the closed space S after the closed space S is formed by the approaching movement of the upper surface plate 1 and the lower surface plate 2, and finely align the substrates A and B. Is completed, air is supplied to the closed space S to return to the atmospheric pressure.

Further, there is provided a second pressing means 7 for bringing the two substrates A and B brought closer by the first pressing means 5 closer to a position where the substrates A and B are closed by the annular adhesive C. In the case of the present embodiment, the second pressurizing means 7 comprises a vertically expandable and contractible cylinder 7a disposed from the upper surface of the moving block 4a toward the peripheral portion 1a of the upper surface plate 1. Is shortened in the vertical direction to compress and deform the annular seal 4b in the vertical direction.
Both substrates A and B are further pressed. Furthermore,
The operation of the second pressurizing means 7 is controlled by a controller (not shown), and in the initial state, the second pressurizing means 7 extends in the vertical direction as shown in FIG. After the fine adjustment of the two substrates A and B, or after the closed space S described later returns to the atmospheric pressure, it is raised and returned to the initial state as shown in FIG.

On the bottom surface of the lower stool 2 outside the closed space S, there are provided, for example, an XY table 8a and positioning means 8 including a drive source 8b for moving the lower stool 2 in the XYθ directions. By operating the drive source 8b based on data output from the detection means 8c composed of a microscope and a camera, the lower platen 2 and the lower substrate B is X
Adjustment and movement are performed in the Yθ direction to perform coarse and fine alignment.

Furthermore, if necessary, the center of the upper surface plate 1 and the lower surface plate 2 facing the two substrates A and B, which is in contact with both substrates A and B, is made of a material having excellent cushioning properties. Cushioning material 10 having such a thickness that no positional deviation occurs during the adjustment movement in the XYθ directions due to
May be provided. In the case of the illustrated example, the cushioning material 10 having a thickness of several mm is provided only on the facing surface 2b of the lower platen 2.
The present invention is not limited to this, and the cushioning material 10 may be provided on both the opposing surfaces of the upper stool 1 and the lower stool 2 or only on the opposing surface of the upper stool 1.

Next, such a method of bonding the substrates for a liquid crystal panel will be described in the order of steps. First, as shown in FIG. 2A, substrates A and B are pre-aligned and set on opposing surfaces of an upper surface plate 1 and a lower surface plate 2, respectively. As a result, both substrates A and B are suction-held by the holding means 3 so as to be immovable.

Thereafter, the operation of the first pressurizing means 5 causes
As shown in (b), the upper surface plate 1 and the lower surface plate 2 are brought close to each other,
A peripheral space 1a of the upper stool 1 is in close contact with the annular seal 4b, and a closed space S is formed between the upper stool 1 and the lower stool 2 so as to surround the two substrates A and B thus dedicated. Is done.

At the same time, the substrates A and B approach each other up to a predetermined distance due to the approach movement of the upper surface plate 1 and the lower surface plate 2, and face each other with a gap of 1 mm or less in this state. But,
The other substrate A does not come into contact with the annular adhesive C applied to one substrate B, and the closed space S communicates between the two substrates A and B.

Thereafter, the air is evacuated from the closed space S by the operation of the suction means 6 to a predetermined degree of vacuum.
Air is also evacuated from between B and a vacuum is created. In this state,
By the operation of the positioning means 8, the upper surface plate 1 and the lower surface plate 2 are relatively adjusted and moved in the XYθ directions, and the two substrates A and B are roughly aligned.

When a predetermined degree of vacuum is reached, the upper platen 1 and the lower platen 2 come closer to each other as shown in FIG. ,
As a result, both substrates A and B come closer to each other, and one substrate B
The other substrate A is in close contact with the annular adhesive C applied on the substrate, and the two are sealed. In this state, the upper surface plate 1 and the lower surface plate 2 are relatively adjusted and moved in the X, Y, and θ directions by the operation of the positioning means 8, so that the two substrates A and B are finely aligned.

Thereafter, as shown in FIG.
The suction of the upper substrate A is released only from the upper surface plate 1 by the operation of, and air is introduced into the closed space S by the operation of the suction means 6 to return the atmosphere to the atmospheric pressure. Thereby, both substrates A,
B is evenly crushed by a pressure difference generated inside and outside B, and a predetermined gap is formed.

At this time, the atmosphere in the closed space S is returned to the atmospheric pressure if a proper amount of liquid crystal is sealed in a proper state at the time before the rough alignment is performed, specifically, when the substrates A and B are set. Accordingly, a predetermined gap can be formed in a state where the liquid crystal is sealed by being evenly crushed by a pressure difference generated between the inside and outside of the substrates A and B, and a liquid crystal panel can be manufactured without injecting the liquid crystal in a later process. .

After that, when the inside of the closed space S returns to the atmospheric pressure, the first pressurizing means 5 operates to separate the upper surface plate 1 and the lower surface plate 2 to open the closed space S, and to align the aligned substrates. A and B are taken out and the above operation is repeated.

Therefore, it is possible to perform XYθ movement outside and to align while keeping only the space between the upper surface plate 1 and the lower surface plate 2 in a sealed state. As a result, the positioning means 8 and its driving source 8
b can be installed in the atmosphere, normal parts can be used, and there is no vacuum penetrating part. Therefore, the structure can be simplified, and the cost of vacuum shut-off is not high. Since no force is required, there is no restriction on the driving form. In addition, the vacuum space can be minimized, the capacity of the vacuum pump can be reduced accordingly, and even a large substrate can be manufactured with high productivity.

Further, if necessary, one or both of the opposing surfaces of the upper surface plate 1 and the lower surface plate 2 have excellent cushioning properties and do not generate a positional shift when performing adjustment movement in the XYθ direction. When 10 is provided, the upper surface plate 1 and the lower surface plate 2 are prevented from coming into contact with one another, and uniform gap formation is facilitated.

On the other hand, FIG. 3 and FIG. 4 show another embodiment of the present invention.
From the upper surface of the moving block 4a to the peripheral portion 1a of the upper platen 1.
Up and down telescopic cylinder 7a
In place of the recess 1b formed in the center of the facing surface of the upper platen 1.
And a flexible thin plate member 7b elastically deformable only in the vertical direction for holding the upper substrate A immovably and a gas in the concave portion 1b closed by the flexible thin plate member 7b for fine fitting. A configuration comprising a pressing portion 7c which deforms the flexible thin plate member 7b so as to swell downward toward the substrate B at times is different from the embodiment shown in FIG. 1 and FIG. Is the same as the embodiment shown in FIGS.

The flexible thin plate member 7b is formed so as to be elastically deformable in the vertical direction but is not deformable in the XYθ direction, such as a metal film such as stainless steel. A plurality of suction holes are drilled.
The operation of the pressurizing section 7c is controlled by a controller (not shown), and the internal pressure of the closing recess 1b is closed by the intake means 6 until the state shown in FIG. 4A and the rough adjustment shown in FIG. Air is taken in and out so as to be the same as the internal pressure of the space S, and only after the rough adjustment, as shown in FIG.
Is supplied so that the internal pressure of the closed space S becomes larger than the internal pressure of the closed space S.

3 and 4, after the rough alignment, as shown in FIG. 4 (c), the internal pressure of the closed recess 1b causes the flexible thin plate 7b to swell and deform, and is held there. The upper substrate A is further approached to the lower substrate B and the space between them is sealed with the annular adhesive C.
B is evenly crushed to near the final gap at the time of fine alignment. As a result, compared to the embodiment shown in FIGS. 1 and 2, the rigid upper platen 1 and lower platen 2 apply local pressurization between the substrates A and B due to the flatness of the facing surface and the parallel accuracy between the platens. Although it is easy to invite, there is an advantage that the local pressurization between these substrates A and B can be completely prevented and the product is not damaged.

In the embodiment shown above, the upper pressing plate 1 is
An upper surface plate that can reciprocate up and down.
Is a lower platen supported movably in the XYθ direction. However, the present invention is not limited to this. On the contrary, the upper platen is supported movably in the XYθ direction, and the lower platen is vertically moved. It may be supported reciprocally. Furthermore, the case where alignment is performed in a vacuum atmosphere has been described, but is not limited thereto.
The same applies when alaminate is used in a special gas atmosphere.

The holding means 3, the moving sealing means 4, the first pressing means 5, the suction means 6, the second pressing means 7 and the positioning means 8 for the substrates A and B are not limited to the structures shown in the drawings. Other structures may be used as long as they work in the same manner. In particular, substrate A,
If the degree of vacuum in the closed space S by the suction means 6 is low, the holding means 3 for holding B immovably can use vacuum suction utilizing a vacuum difference, but this vacuum difference cannot be used. In the case where the inside of the closed space S is at a high vacuum, the substrates A and B need to be immovably held by using an electrostatic chuck or an adhesive film as the holding means 3. Further, a magnetic fluid type vacuum seal may be used in place of the drive vacuum seal 4c of the moving seal means 4.

[0032]

As described above, according to the first and second aspects of the present invention, when the pressing plate holding the two substrates moves close to each other, the movable plate is moved between the peripheral portions. A closed space is defined by means closed, and the two substrates approach each other up to a predetermined distance.After that, while bleeding air from the closed space, the two pressing plates are relatively adjusted and moved in the XYθ directions. After the two substrates are roughly aligned and a predetermined degree of vacuum is reached, the moving sealing means is deformed to further approach a position where the two substrates are hermetically sealed with an annular adhesive. The two pressure plates are relatively adjusted in the XYθ directions to finely align the two substrates. Thereafter, the substrate is released from only one of the pressure plates, and the inside of the closed space is returned to atmospheric pressure. , Evenly crushed by the pressure difference between the inside and outside of both substrates Since a predetermined gap is formed,
While keeping only the space between the two pressure plates in a sealed state, XY
It can be moved by θ for alignment. Therefore, the positioning means and its driving source can be installed in the atmosphere as compared with the conventional method in which the positioning means in the vacuum chamber is moved by XYθ by external drive transmission, so that normal components can be used and vacuum penetration can be performed. There are no parts, and as a result, the structure can be simplified, the cost is not required for vacuum shut-off, and a considerable force is not required for rough or fine alignment, so that there is no restriction on the driving form. In addition, the vacuum space can be minimized, the capacity of the vacuum pump can be reduced accordingly, and even a large substrate can be manufactured with high productivity.

The invention of claims 3 and 4 is the first or second invention.
In addition to the effect of the invention, after the rough alignment, the flexible thin plate material swells and deforms due to an increase in the internal pressure of the closed concave portion, and the one substrate held thereby is brought closer to the other substrate to form an annular adhesive therebetween. By sealing with C, these two substrates are evenly crushed to near the final gap at the time of fine alignment, thereby preventing local pressing of the substrates regardless of the flatness and parallel accuracy of the rigid pressing plate. Therefore, the rigid pressure plate easily causes local pressurization between the substrates due to the flatness of the opposing surface and the parallel accuracy between the surface plates, but the local pressurization between these substrates can be completely prevented and the product is not damaged. .

According to a fifth aspect of the present invention, in addition to the effect of the second or fourth aspect, by returning the atmosphere in the closed space to the atmospheric pressure, the substrate is evenly crushed by a pressure difference between the inside and outside of the two substrates. Thus, a predetermined gap can be formed in a state where the liquid crystal is sealed, so that a liquid crystal panel can be manufactured without injecting the liquid crystal in a later process.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional front view of an apparatus for bonding a substrate for a liquid crystal panel according to an embodiment of the present invention.

FIGS. 2A to 2D are explanatory views showing a method of manufacturing a liquid crystal panel in the order of steps.

FIG. 3 is a vertical sectional front view of a liquid crystal panel substrate bonding apparatus according to another embodiment of the present invention.

FIGS. 4A to 4D are explanatory views showing a method of manufacturing a liquid crystal panel in the order of steps.

FIG. 5 is a vertical sectional front view showing an example of a conventional liquid crystal panel substrate bonding apparatus.

[Explanation of symbols]

Reference Signs List A, B substrate C annular adhesive S closed space 1 pressure plate (upper platen) 1a peripheral portion 1b concave portion 2 pressure plate (lower platen) 2a peripheral portion 3 holding device 4 moving sealing device 5 first pressing device 6 suction device 7 Second pressing means 7b Flexible thin plate material 7c Pressing part 8 Positioning means

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2H088 EA02 FA04 FA10 FA16 FA17 FA20 FA30 MA20 2H089 NA38 NA49 NA60 QA12 QA14 5G435 AA17 BB12 KK05 KK10

Claims (5)

[Claims] 1. Two substrates (A, B) detachably held on a pair of upper and lower pressing plates (1, 2) are superposed in a vacuum, and relatively positioned by a positioning means (8). XY
In a device for bonding a substrate for a liquid crystal panel, the two substrates (A, B) are adjusted and moved in the θ direction to roughly and finely adjust both substrates (A, B), and then pressurize the two substrates (A, B) to crush them to a predetermined gap. Holding means (3) for immovably holding the substrates (A, B) provided on the opposing surfaces of the pressure plates (1, 2); and opposing peripheral portions (1a) of the pressure plates (1, 2) , 2a), the movable sealing means (4), which is movably supported in the XYθ direction while maintaining the hermetically sealed state, and which can be elastically deformed in the vertical direction, and the pressure plates (1, 2) are relatively close to each other. It moves to form a closed space (S) between the two pressure plates (1, 2) so as to surround the two substrates (A, B), and to form the closed space (S).
A first pressurizing means (5) for bringing B) close to a predetermined interval; a suction means (6) for taking in and out gas in the closed space (S) to make a predetermined degree of vacuum; Both substrates (A,
(B) a second pressurizing means (7) for further bringing the space between them to a position sealed with an annular adhesive (C), and the first pressurizing means (5) and the second pressurizing means (7). ), A positioning means (8) disposed outside the closed space (S) for adjusting and moving the two pressing plates (1, 2) relatively in the XYθ directions. For bonding liquid crystal panel substrates. 2. The two substrates (A, B) detachably held on a pair of upper and lower pressing plates (1, 2) are superposed in a vacuum, and relatively positioned by a positioning means (8). XY
In the method of bonding the substrates for liquid crystal panels, the substrates (A, B) are roughly adjusted and finely adjusted by adjusting and moving in the θ direction, and the substrates (A, B) are further pressed and crushed to a predetermined gap. Holding the two substrates (A, B) immovably on the opposing surfaces of the pressure plates (1, 2); and opposing each other by the approaching movement of the pressure plates (1, 2). The space between the peripheral portions (1a, 2a) is sealed by a movable sealing means (4) which can be elastically deformed in the vertical direction, and both substrates (A, 2a) are sealed.
Forming a closed space (S) so as to surround B), and bringing both substrates (A, B) in the closed space (S) closer to a predetermined distance; Adjusting the relative movement of the two pressing plates (1, 2) in the X, Y, and θ directions while bleeding air to roughly match the two substrates (A, B); After the degree of vacuum is reached, the moving sealing means (4) is deformed so that both substrates (A,
(B) further approaching a position to be sealed with the annular adhesive (C); and adjusting the two pressing plates (1, 2) relatively in the XYθ direction to move the two substrates ( (A) and (B), and one substrate (A, B) is released from one of the pressure plates (1, 2), and the inside of the closed space (S) is returned to atmospheric pressure. And a step of uniformly crushing a predetermined gap by a pressure difference between the inside and outside of the two substrates (A, B), and sequentially performing these steps. 3. A recess (1) formed in the center of the facing surface of the pressure plate (1).
b), and a flexible thin plate member (7) that can be elastically deformed only in the vertical direction to hold the substrate (A) immovably.
b), the gas in the recess (1b) closed by the flexible thin plate (7b) is taken in and out, and the flexible thin plate (7
2. The apparatus for bonding a substrate for a liquid crystal panel according to claim 1, wherein b) comprises a pressurizing portion (7c) for deforming so as to bulge toward the other substrate (B). 4. A substrate (A) is attached to a flexible thin plate (7b) elastically deformable only in the vertical direction to close a recess (1b) formed at the center of the facing surface of the one-side pressing plate (1). A step of keeping the inner space immovable; a step of roughly adjusting the inner pressure of the closed recess (1b) and the inner pressure of the closed space (S) to be the same; , The flexible thin plate member (7b) is swelled and deformed by an increase in the internal pressure of the closed recess (1b), and the one substrate (A) held by the flexible thin plate member (7b) further approaches the other substrate (B). 3. The method for bonding a substrate for a liquid crystal panel according to claim 2, comprising the step of moving. 5. The method according to claim 2, wherein a suitable amount of liquid crystal is injected between the substrates (A, B) before the rough alignment.