JP2002131762A - Lamination device and method for laminating substrate for liquid crystal panel - Google Patents

Lamination device and method for laminating substrate for liquid crystal panel

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Publication number
JP2002131762A
JP2002131762A JP2000331179A JP2000331179A JP2002131762A JP 2002131762 A JP2002131762 A JP 2002131762A JP 2000331179 A JP2000331179 A JP 2000331179A JP 2000331179 A JP2000331179 A JP 2000331179A JP 2002131762 A JP2002131762 A JP 2002131762A
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substrates
substrate
closed space
means
liquid crystal
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JP2000331179A
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JP3542956B2 (en )
Inventor
Ichiro Ishizaka
Kunihiro Miyashita
国弘 宮下
一朗 石坂
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Shinetsu Engineering Kk
信越エンジニアリング株式会社
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Abstract

PROBLEM TO BE SOLVED: To align substrates by externally moving substrates in XYθ directions outside of pressurizing plates while keeping only the space between the pressurizing plates in a sealed state.
SOLUTION: The pressurizing plates 1, 2 holding two substrates A, B are moved nearer to each other so as to seal the space between the peripheral edges 1a, 2a of the plates by a movable sealing means 4 to form a section of a closed space S while the substrates A, B are moved nearer to each other to form a specified gap. Then while the air in the closed space S is evacuated, the pressurizing plates 1, 2 are relatively moved and adjusted in along XYθ directions to roughly align the substrates A, B. After a specified vacuum degree is obtained, the movable sealing means 4 is deformed to move the substrates A, B further nearer to each other the position where the gap between the substrates A, B is sealed with an annular adhesive C. In this state, the pressurizing plates 1, 2 are relatively moved and adjusted in the XYθ directions to finely align the substrates. Then the substrates are released from only one of the plates 1, 2 to return the closed space S to the atmospheric pressure so that the gap is uniformly pressed by the pressure difference between the inside and outside of the substrates A, B to form a specified gap.
COPYRIGHT: (C)2002,JPO

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【発明の属する技術分野】本発明は、液晶ディスプレイ(LCD)に使用する液晶パネルの製造過程において、 BACKGROUND OF THE INVENTION The present invention is a manufacturing process of a liquid crystal panel used in a liquid crystal display (LCD),
二枚の液晶パネル用基板を真空中でアライメント(粗合わせ及び微合わせ)するための液晶パネル用基板の貼り合わせ装置及び貼り合わせ方法に関する。 The two sheets of liquid crystal panel substrate of about bonding apparatus and the bonding method of the liquid crystal panel substrate for alignment in vacuo (crude alignment and mating fine). 詳しくは、上下一対の加圧板に対して夫々着脱自在に保持された二枚の基板を真空中で重ね合わせ、位置決め手段により相対的にXYθ方向へ調整移動して両基板の粗合わせ及び微合わせを行い、更に両基板を加圧して所定のギャップまで潰す液晶パネル用基板の貼り合わせ装置及び貼り合わせ方法に関する。 Specifically, the two substrates which are respectively detachably held with respect to the pair of upper and lower pressing plates superimposed in vacuo, combined relatively coarse alignment XYθ direction to adjust the movement to both substrates and fine by the positioning means It was carried out, to further bonding apparatus and the bonding method of the liquid crystal panel substrate collapsing both substrates pressurized to a predetermined gap.

【0002】 [0002]

【従来の技術】従来、この種の液晶パネル用基板の貼り合わせ装置及び貼り合わせ方法は、例えば図5に示すように、上下一対の加圧板1′,2′と例えばXYテーブルなどの位置決め手段8′の全体を囲むように真空チャンバー11が上下方向へ開閉自在に形成され、この位置決め手段8′とその駆動源8b′とを連絡する駆動軸8 Conventionally, bonding apparatus and the bonding method of the liquid crystal panel substrate of this kind, for example as shown in FIG. 5, a pair of upper and lower pressing plates 1 ', 2' positioning means such as for example an XY table 8 'the vacuum chamber 11 so as to surround the whole is openably formed in the vertical direction, the positioning means 8' drive shaft 8 to contact and its drive source 8b '
c′が、例えばベローズなどの真空貫通部品12により真空チャンバー11を貫通して設けられている。 c 'is, for example, provided through the vacuum chamber 11 by the vacuum through components 12, such as a bellows. そして、上記真空チャンバー11が閉じられてその内部を真空にした後、その外部から駆動軸8c′で位置決め手段8′を作動して両加圧板1′,2′が相対的にXYθ方向へ調整移動されることにより、両基板A,Bの粗合わせ及び微合わせを行っていた。 Then, after the inside of vacuum the vacuum chamber 11 is closed, the outside after activating the 'positioning means 8' drive shaft 8c both the pressure plate 1 ', 2' adjustments to the relatively XYθ direction by being moved, it has been performed both substrates a, crude alignment B and finely combined.

【0003】 [0003]

【発明が解決しようとする課題】しかし乍ら、このような従来の液晶パネル用基板の貼り合わせ装置及び貼り合わせ方法では、外部から駆動伝達により真空チャンバー内の位置決め手段をXYθ移動してアライメントするため、駆動軸の真空貫通部品が複雑化して、真空チャンバー内外の真空遮断にコストがかさむだけでなく、シール材の粘度によっては、粗合わせや微合わせに相当な力が必要で、駆動形態の制約が多いという問題がある。 [SUMMARY OF THE INVENTION] However 乍Ra, in such a conventional bonding apparatus and the bonding method of the liquid crystal panel substrate, the positioning means in the vacuum chamber by XYθ moving alignment by the drive transmitted from the outside Therefore, the drive shaft vacuum through parts is complicated, not only costly to the vacuum interrupter of the vacuum chamber and out, depending on the viscosity of the sealing material, considerable force to the coarse adjustment and fine fit is required, the driving form of there is a problem that there are many restrictions. また、真空チャンバーが上下一対の加圧板及び位置決め手段の全体を囲むため、真空となる空間が大きくなってしまい、真空ポンプの容量を大きくする必要があると共に、使用できる基板の大きさにも限界があって、大型の基板は製造できないという問題がある。 Further, the limit for the vacuum chamber surrounding the entire pair of upper and lower pressing plates and positioning means, the space serving as a vacuum becomes large, the need to increase the capacity of the vacuum pump, on the size of the substrate that can be used if there is, the substrate of large there is a problem that can not be manufactured.

【0004】本発明のうち請求項1、2記載の発明は、 [0004] The invention of claim 1, wherein one of the present invention,
両加圧板の間のみを密閉状態にしたままその外部でXY While only between the two pressure plate in a closed state XY at its outer
θ移動してアライメントすることを目的としたものである。 It is intended to be aligned with θ move. 請求項3、4記載の発明は、請求項1または2に記載の発明の目的に加えて、剛体製加圧板の平坦度や平行精度に関係なく基板同士の局所加圧を防止することを目的としたものである。 Invention of claim 3 and 4 wherein, aims to prevent local pressure in addition to the purpose boards regardless flatness and parallelism precision rigid steel pressure plate of the invention according to claim 1 or 2 it is obtained by the. 請求項5記載の発明は、請求項2 According to a fifth aspect of the invention, claim 2
または4に記載の発明の目的に加えて、ので、後工程で液晶を注入せずに液晶パネルを制作することを目的としたものである。 Or 4 in addition to the object of the invention described, because, without injecting liquid crystal in a later step is intended to produce a liquid crystal panel.

【0005】 [0005]

【課題を解決するための手段】前述した目的を達成するために、本発明のうち請求項1記載の発明は、両加圧板の対向面に設けられた基板を移動不能に保持する保持手段と、両加圧板の対向する周縁部間の密閉状態を維持したまま相対的にXYθ方向へ移動自在に支持する上下方向へ弾性変形可能な移動シール手段と、両加圧板を相対的に接近移動して、これら両加圧板の間に両基板が囲まれるように閉空間を区画形成すると共に、両基板を所定間隔まで接近させる第一加圧手段と、上記閉空間内の気体を出し入れして所定の真空度にする吸気手段と、上記第一加圧手段により接近させた両基板を、それらの間が環状接着剤で密閉される位置まで更に接近させる第二加圧手段と、上記第一加圧手段及び第二加圧手段の作動状態で、両加圧板を To SUMMARY OF THE INVENTION To achieve the above object, According to one aspect of the present invention, a holding unit for holding a substrate provided on the opposing surfaces of the pressure plate immovably , and both the pressure plate opposing relatively elastically deformable moving sealing means in the vertical direction for movably supporting the XYθ direction while maintaining the sealed state between the peripheral portion, and relatively moved closer to both pressurizing plate Te, together defining a closed space so that the substrates are enclosed between the two pressure plate, a first pressing means for approximating two substrates to a predetermined distance, the predetermined and out the gas in between the closed space an intake means for vacuum, the two substrates which is closer to the first pressurizing unit, a second pressurizing means to further approach to the position between them is sealed by annular adhesive, said first pressure in the operating state of the device and a second pressurizing means, both pressing plate 対的にXYθ方向へ調整移動させるための閉空間外に配設した位置決め手段と、を備えたことを特徴とするものである。 It is characterized in that it comprises a positioning means which is disposed outside the closed space for moving the adjustment pairs to the XYθ direction. 請求項2記載の発明は、両加圧板の対向面に夫々二枚の基板を移動不能に保持するステップと、これら両加圧板の接近移動により、相互の対向する周縁部の間を上下方向へ弾性変形可能な移動シール手段で密閉して、両基板が囲まれるように閉空間を区画形成すると共に、該閉空間内の両基板を所定間隔まで接近させるステップと、この閉空間内の空気を抜きながら、両加圧板を相対的にXYθ方向へ調整移動させて、両基板の粗合わせを行うステップと、この閉空間内が所定の真空度に到達してから、上記移動シール手段を変形させて、両基板の間が環状接着剤で密閉される位置まで更に接近させるステップと、上記両加圧板を相対的にXYθ方向へ調整移動させて、更に接近した両基板の微合わせを行うステップと、上記加圧板のどちらか According to a second aspect of the invention, the step of holding each two of the board immovably to the facing surfaces of the pressure plate, by the approach movement of both the pressing plate, between the peripheral portions of opposing each other in the vertical direction and sealed with an elastically deformable moving sealing means and defining a closed space so that the substrates are surrounded, and the step of approaching the both substrates in enclosed region to a predetermined distance, the air inside the closed space Expel, by moving and adjusting the two pressure plate to relatively XYθ direction and performing coarse alignment of the two substrates, in this closed space is after reaching a predetermined degree of vacuum, to deform the said moving sealing means Te, a step to further close to a position where between the two substrates is sealed with an annular adhesive, by adjusting moving the two pressure plate to relatively XYθ direction and performing further combined fine of the substrates in close proximity , either of the above-mentioned pressure plate 一方から一枚の基板を解放させ、上記閉空間内を大気圧に戻して、両基板の内外に生じる気圧差により所定のギャップまで均等に押し潰すステップとからなり、これらのステップを順次行うことを特徴とするものである。 One from to release the single substrate, to return the inside between the closed space to atmospheric pressure, consists of a step of crushing uniformly to a predetermined gap by a pressure difference generated inside and outside of the substrates, sequentially performing these steps the one in which the features. 請求項3記載の発明は、請求項1記載の発明の構成に、前記第二加圧手段が、一方加圧板の対向面中央に形成された凹部を閉塞すると共に一方基板を移動不能に保持する上下方向のみ弾性変形可能な可撓性薄板材と、この可撓性薄板材で閉鎖された凹部内の気体を出し入れして微合わせ時に可撓性薄板材が他方基板へ向け膨出するように変形させる加圧部とからなる構成を加えたことを特徴とする。 According to a third aspect of the invention, the configuration of the invention recited in claim 1, wherein the second pressurizing unit, whereas holding a substrate so as not to move with the closing whereas the opposing face center recess formed in the pressure plate a vertical direction only elastically deformable flexible thin plate material, thus the gas closed in the recess in the flexible sheet material and out finely combined flexible sheet material at the bulges toward the second substrate the structure comprising a pressing portion for deforming, characterized in that added. 請求項4記載の発明は、請求項2記載の発明の構成に、前記一方加圧板の対向面中央に形成された凹部を閉塞する上下方向のみ弾性変形可能な可撓性薄板材に一方基板を移動不能に保持するステップと、上記閉鎖凹部の内圧と閉空間の内圧を同じにして粗合わせするステップと、この粗合わせ後に閉空間内が所定の真空度に到達してから上記閉鎖凹部の内圧上昇により可撓性薄板材を膨出変形させてそれに保持された一方基板を他方基板へ向け更に接近移動させるステップとを有する構成を加えたことを特徴とする。 Fourth aspect of the present invention, the configuration of the invention described in claim 2, the first substrate in the vertical direction only elastically deformable flexible sheet material for closing the one pressure plate facing surface center recess formed in a step of immovably holding the steps of combined crude in the same internal pressure between the internal pressure and the closed space of the closure recess, the internal pressure of the closed recess in the closed space after the crude alignment is after reaching a predetermined degree of vacuum the one substrate held on it a flexible sheet material is bulged deformation added structure and a step of further moved closer toward the second substrate and wherein the rise. 請求項5記載の発明は、請求項2または4記載の発明の構成に、前記粗合わせを行う前の時点で、両基板の間に適正量の液晶を注入した構成を加えたことを特徴とする。 According to a fifth aspect, a feature that in the configuration of the invention of claim 2 or 4 wherein, at a time prior to performing the coarse adjustment, plus a configuration in which liquid crystal is injected in proper amount between both substrates to.

【0006】 [0006]

【作用】請求項1、2の発明は、二枚の基板を保持した加圧板が接近移動することにより、相互の周縁部の間を移動シール手段で密閉して閉空間が区画形成されると共に、両基板が所定間隔まで接近し、その後、この閉空間内の空気を抜きながら、両加圧板を相対的にXYθ方向へ調整移動させて、両基板の粗合わせが行われ、所定の真空度に到達してから、上記移動シール手段を変形させて両基板の間が環状接着剤で密閉される位置まで更に接近し、この状態で、上記両加圧板を相対的にXYθ方向へ調整移動させて、両基板の微合わせが行われ、その後、上記加圧板の一方からのみ基板を解放して、上記閉空間内を大気圧に戻すことにより、両基板の内外に生じる気圧差で均等に押し潰されて所定のギャップが形成されるものである。 [Action] The invention of claim 1 and 2, by pressing plate holding the two substrates are moved closer, with the closed space to seal between the periphery of each other in the moving sealing means is partitioned and formed , the two substrates approaches to a predetermined distance, then, while evacuated in the closed space, by moving and adjusting the two pressure plate to relatively XYθ direction, coarse alignment of the two substrates is performed, a predetermined degree of vacuum after reaching the, between the substrates by deforming the moving sealing means further closer to the position to be sealed by the annular adhesive, in this state, it is adjusted moving the two pressure plate to relatively XYθ direction Te, fine the two substrates combined is performed, then, to release only the substrate from one of the pressure plate, by returning the inside between the closed space at atmospheric pressure, uniformly pressed by pressure difference generated inside and outside of the two substrates crushed and in which a predetermined gap is formed. 請求項3、4の発明は、請求項1記載の構成に対して、前記第二加圧手段が、一方加圧板の対向面中央に形成された凹部を閉塞すると共に一方基板を移動不能に保持する上下方向のみ弾性変形可能な可撓性薄板材と、この可撓性薄板材で閉鎖された凹部内の気体を出し入れして微合わせ時に可撓性薄板材が他方基板へ向け膨出するように変形させる加圧部とからなる構成を追加するか、または或いは請求項2記載の構成に対して、前記一方加圧板の対向面中央に形成された凹部を閉塞する上下方向のみ弾性変形可能な可撓性薄板材に一方基板を移動不能に保持するステップと、上記閉鎖凹部の内圧と閉空間の内圧を同じにして粗合わせするステップと、この粗合わせ後に閉空間内が所定の真空度に到達してから上記閉鎖凹部の内圧上昇により The invention of claim 3 and 4, with respect to the configuration of claim 1, wherein said second pressurizing means, whereas the opposing face center recess formed in the pressure plate immovably the first substrate with closing held a vertical direction only elastically deformable flexible sheet material to ensure that the gas in the closed the recess in the flexible sheet material and out fine fit when the flexible sheet material is bulged toward the second substrate Add structure comprising a pressing portion for deforming to or alternatively to the configuration of claim 2, which can be the one only vertical elastic for closing the opposed surface center recess formed in the pressure plate deformation a step other hand for holding a substrate so as not to move the flexible sheet material, comprising the steps of: aligning crude in the same internal pressure between the internal pressure and the closed space of the closure recess, to a predetermined degree of vacuum in the closed space after the crude alignment the increase in the internal pressure of the closed recess after reaching 撓性薄板材を膨出変形させてそれに保持された一方基板を他方基板へ向け更に接近移動させるステップとを有する構成を追加したので、粗合わせ後、閉鎖凹部の内圧上昇により可撓性薄板材が膨出変形して、それに保持された一方基板を他方基板へ更に接近して両者間が環状接着剤Cで密閉させることにより、これら両基板が微合わせ時に最終ギャップ近くまで均等に潰される。 Since the FLEXIBLE thin material while the substrate held thereto by bulging deformation was added a structure and a further step of approaching moving toward the second substrate, after rough fit, flexible thin plate by the internal pressure rise of the closed recess There bulges deformed, it still therebetween close one substrate held to the other substrate by a closed annular adhesive C, the both substrates are collapsed evenly to the final gap close when combined fine. 請求項5の発明は、請求項2記載または請求項4記載の構成に対して、前記粗合わせを行う前の時点で、両基板の間に適正量の液晶を注入した構成を追加したので、閉空間内の雰囲気を大気圧に戻すことにより、両基板の内外に生じる気圧差で均等に押し潰されて、液晶が封入された状態で所定のギャップ形成が可能となる。 The invention of claim 5, with respect to the configuration of claim 2, wherein or claim 4, wherein, at a time prior to performing the coarse adjustment, since added a configuration in which liquid crystal is injected in proper amount between both substrates, by returning the atmosphere within the closed space to atmospheric pressure, is uniformly crushed by pressure difference generated inside and outside of the substrates, a predetermined gap formation is possible in a state in which liquid crystal is sealed.

【0007】 [0007]

【発明の実施の形態】以下、本発明の実施例を図面に基づいて説明する。 BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, will be explained based on the embodiment of the present invention with reference to the drawings. この実施例は、図1〜図2に示す如く上方の加圧板1が、上下方向へは往復動自在だがXYθ This embodiment is above the pressure plate 1 as shown in FIGS. 1-2, but is vertically but reciprocally movable XYθ
方向へは移動不能に支持された上定盤であると共に、下方の加圧板2が固定台板9上に例えばXYテーブルなどの位置決め手段8を介してXYθ方向へ調整移動自在に支持された下定盤であり、これら上定盤1及び下定盤2 With the the direction that is the upper platen which is immovably supported, the pressure plate 2 of the lower are adjusted movably supported to the XYθ direction through the positioning means 8, such as on the fixed base plate 9 e.g. XY table Shitajo is a board, these on a surface plate 1 and the lower surface plate 2
の対向面に吸着保持した二枚のガラス製基板A,Bを、 Two sheets of glass substrate A was suction held on the opposed surfaces, the B,
真空雰囲気中でアライメントするものである。 It is intended to align in a vacuum atmosphere.

【0008】上定盤1及び下定盤2は、例えば金属やカーボンなどの剛体で構成され、これら対向面の中央部には、両基板A,Bを移動不能に保持する保持手段3として複数の吸引孔が開穿され、これら吸引孔3…と例えば真空ポンプなどの吸引源(図示せず)とを配管連絡させる。 [0008] upper surface plate 1 and lower surface plate 2 is, for example, a rigid body such as metal or carbon, in the central portion of the opposing surfaces, the plurality as a holding means 3 for holding the substrates A, B immovably suction hole is perforated in these suction holes 3 ... and, for example, a suction source such as a vacuum pump (not shown) and is allowed to pipe contact. この吸引源は、コントローラー(図示せず)で動作制御され、両基板A,Bをセットする初期状態に吸引が開始され、両基板A,Bの微合わせ後にどちらか一方、 The suction source is operated controlled by a controller (not shown), the substrates A, the suction in the initial state is started to set the B, whereas both substrates A, after mating fine and B either,
本実施例では上方基板Aの吸引を解除し、後述する閉空間Sが大気圧に戻った後は下方基板Bの吸引を解除して初期状態に戻す。 In the present embodiment releases the suction of the upper substrate A, and returns to the initial state by releasing the suction of the lower substrate B after the closed space S to be described later is returned to atmospheric pressure.

【0009】これら基板A,Bには、例えば所望のパターンが形成されたカラーフィルターとTFT基板からなり、これら対向面のどちらか一方、図示例の場合には下方の基板Bの周縁部に沿って環状接着剤Cが枠状に塗布され、必要に応じて他方には多数のスペーサ(図示せず)が散布される。 [0009] These substrates A, the B, for example, a desired color filter and the TFT substrate on which a pattern is formed, whereas one of these facing surfaces, along a peripheral portion of the substrate B downward in the case of the illustrated example annular adhesive C is applied in a frame shape, a number of spacers to the other as necessary (not shown) is sprayed Te.

【0010】更に、上定盤1の周縁部1aと下定盤2の周縁部2aとの間には、これら両者間の密閉状態を維持したまま相対的にXYθ方向へ移動自在に支持する移動シール手段4が、両基板A,Bを囲むように環状に設けられる。 Furthermore, between the peripheral edge 2a of the peripheral portion 1a and the lower surface plate 2 of the upper stool 1, moving seal for movably supporting the left relatively XYθ direction maintaining a sealed state between these two It means 4 is provided annularly to surround the both substrates a, B. この移動シール手段4は、本実施例の場合、上定盤1及び下定盤2の平面形状に合わせて断面円形又は矩形に形成された移動ブロック4aと、この移動ブロック4aの上面に装着した上定盤1の周縁部1aと接離する例えばOリングなどの上下方向へ弾性変形可能な環状シール材4bと、移動ブロック4aの下面に装着した下定盤2の周縁部2aと常時接触する必要に応じて例えば真空グリースが使用された駆動真空シール4cと、この駆動真空シール4cに上定盤1や移動ブロック4aの重量などの力が作用しないように支持する荷重受ボール4 The mobile sealing means 4, in this embodiment, the upper platen 1 and the moving block 4a which is circular in cross section or rectangular in accordance with the planar shape of the lower surface plate 2, on which is mounted on the upper surface of the movable block 4a a vertical direction to be elastically deformable annular sealing member 4b, such as the peripheral edge portion 1a and toward or away from eg O-ring of the platen 1, needs to be in constant contact with the peripheral edge portion 2a of the lower platen 2 mounted on the lower surface of the moving block 4a depending on the drive vacuum seal 4c vacuum grease is used, for example, a load receiving balls 4 a force such as the weight of upper platen 1 and the movable block 4a to the driving vacuum seal 4c is supported so as not to act
dとから構成される。 Composed of a d.

【0011】特に必要に応じて、これら上定盤1と移動ブロック4aがXYθ方向へ一体的に連結させるために、上定盤1から移動ブロック4aに亘って複数本の連結ピン4eを、上下方向へは往復動自在であるがXYθ [0011] If specifically required, in order to integrally connected to these upper platen 1 and the movable block 4a is XYθ direction, a plurality of connecting pins 4e over from the upper platen 1 to the moving block 4a, upper and lower Although the direction which is reciprocable XYθ
方向へは移動不能に挿通させることが好ましく、更に移動ブロック4aと下定盤2が上下方向へ離れるのを防止するために両者に亘って例えば引っ張りバネなどの弾性材料4fを掛け渡すことが好ましい。 Preferably for inserting immovably in the direction, it is preferable to pass over the resilient material 4f such over both example a tension spring in order to further move the block 4a and the lower surface plate 2 is prevented from leaving the vertical direction.

【0012】そして、上定盤1には、図1の符号5に示すような例えば上下駆動用シリンダーなどからなる第一加圧手段が連設される。 [0012] Then, the upper platen 1, the first pressure means comprising, for example, vertical drive cylinder as shown by reference numeral 5 in FIG. 1 is continuously provided. この第一加圧手段5は、コントローラー(図示せず)で動作制御され、基板A,Bをセットする初期状態で、図1の一点鎖線及び図2(a)に示す如く上定盤1を上限位置で待機しており、基板A, The first pressurizing means 5 is operated controlled by a controller (not shown), the substrate A, in the initial state of setting the B, and upper platen 1 as shown in dashed line and FIGS. 2 (a) of FIG. 1 It stands by at the upper limit position, the substrate A,
Bのセット完了後に、図1の実線及び図2(b)に示す如く上定盤1を下降させて、下定盤2との間に閉空間S After completion of setting of B, and lowers the upper platen 1 as shown in solid lines and figures FIG 1 2 (b), the closed space between the lower surface plate 2 S
が両基板A,Bを囲むように区画形成し、両基板A,B There partition formed to surround the both substrates A, B, both substrates A, B
の微合わせ終了後か、或いは後述する閉空間Sが大気圧に戻った後は上昇させて初期状態に戻す。 Fine combined after the end of, or after the later-described closed space S is returned to the atmospheric pressure is raised back to the initial state.

【0013】この閉空間Sには、図1の符号6に示すような外部に配設した例えば真空ポンプと連絡して、該閉空間S内の気体、本実施例では空気を出し入れして所定の真空度にする吸気手段が設けられる。 [0013] predetermined This closed space S, in communication with the outside disposed the example a vacuum pump, as shown by reference numeral 6 in FIG. 1, the gas in the closed space S, in the present embodiment and out the air intake means for the vacuum is provided. この吸気手段6 The inlet means 6
は、コントローラー(図示せず)で動作制御され、上定盤1及び下定盤2の接近移動により閉空間Sが形成された後に閉空間Sから吸気を開始し、両基板A,Bの微合わせの終了後は閉空間Sに空気を供給して大気圧に戻す。 Is operated controlled by a controller (not shown) to start the air from the closed space S after the closed space S is formed by the approach movement of the upper platen 1 and lower surface plate 2, the substrates A, combined fine of B after the completion of return to atmospheric pressure by supplying air into the closed space S.

【0014】また、前記第一加圧手段5により接近させた両基板A,Bを、それらの間が環状接着剤Cで密閉される位置まで更に接近させる第二加圧手段7が設けられる。 Furthermore, the first pressurizing means 5 both substrates A obtained by closer and B, the second pressurizing unit 7 to further closer to a position where therebetween is sealed by an annular adhesive C is provided. この第二加圧手段7は、本実施例の場合、前記移動ブロック4aの上面から上定盤1の周縁部1aへ向けて配設した上下方向へ伸縮自在なシリンダー7aからなり、このシリンダー7aを上下方向へ短縮化して前記環状シール4bを上下方向へ圧縮変形させることにより、 The second pressure means 7, in this embodiment, it consists of telescoping cylinder 7a in the vertical direction which is disposed toward the upper surface of the moving block 4a to the periphery 1a of the upper platen 1, the cylinder 7a by the compression deforming the annular seal 4b by shortening the vertical direction in the vertical direction,
両基板A,Bが更に加圧されるようにしている。 Both substrates A, and B are to be further pressurized. 更に、 In addition,
この第二加圧手段7は、コントローラー(図示せず)で動作制御され、初期状態で図2(a)に示す如く上下方向へ伸長しており、両基板A,Bの粗合わせ終了後に図2(c)に示す如く短縮させ、両基板A,Bの微合わせ終了後か、或いは後述する閉空間Sが大気圧に戻った後は上昇させて初期状態に戻す。 The second pressurizing unit 7 is operated controlled by a controller (not shown), in the initial state as shown in FIG. 2 (a) and extending in the vertical direction, the substrates A, FIG After completion rough alignment of B 2 (c) to cause as shortening shown, the substrates a, microcrystalline combined after completion of B, or after the later-described closed space S is returned to atmospheric pressure returned to the initial state by increasing.

【0015】そして、前記閉空間Sの外側となる下定盤2の底面には、例えばXYテーブル8aと、下定盤2をXYθ方向へ移動させるための駆動源8bなどからなる位置決め手段8が連設され、両基板A,Bに表示されたマークを顕微鏡とカメラで構成した検出手段8cから出力されるデータに基づいて駆動源8bを作動させることにより、下定盤2及びこれに保持された下方基板BがX [0015] Then, the bottom surface of the lower platen 2 to be outside of the closed space S, for example XY table 8a and the positioning means 8 is continuously provided consisting of a driving source 8b for moving the lower surface plate 2 to the XYθ direction is, both substrates a, by operating the drive source 8b based marks displayed on data output from the detecting unit 8c constituted by a microscope and camera B, the lower substrate held lower surface plate 2 and to B is X
Yθ方向へ調整移動して、粗合わせと微合わせを行う。 Adjust moved Yθ direction to perform coarse adjustment and fine combined.

【0016】更にまた、必要に応じて、前記上定盤1及び下定盤2の対向面の両基板A,Bと当接する中央部分には、クッション性に優れた材質でありながら上記位置決め手段8によるXYθ方向への調整移動の際に位置ズレが発生しない程度の厚さ寸法に形成された緩衝材10 [0016] Furthermore, if desired, the substrates A of the upper surface plate 1 and the opposing surface of the lower stool 2, the B abutting the central portion, the positioning means 8, yet a material having excellent cushioning cushioning material 10 misalignment during the adjustment movement of the XYθ direction is formed in the thickness dimension so as not to occur due to
を配設しても良い。 It may be disposed. 図示例の場合には、下定盤2の対向面2bのみに、数mm厚さ寸法の緩衝材10を設けたが、 In the illustrated embodiment, only the facing surface 2b of the lower stool 2 is provided with the cushioning material 10 of a few mm thickness,
これに限定されず、上定盤1及び下定盤2の対向面の両方か又は上定盤1の対向面のみに緩衝材10に設けても良い。 Not limited thereto, it may be provided in the upper plate 1 and lower platen buffer material 10 only on the opposing surfaces of both or upper platen 1 of 2 opposing surface.

【0017】次に、斯かる液晶パネル用基板の貼り合わせ方法を工程順に従って説明する。 [0017] Next, a bonding method of the substrate for such a liquid crystal panel in accordance with the order of processes. 先ず、図2(a)に示す如く上定盤1及び下定盤2の対向面に基板A,Bを夫々プリアライメントしてセットする。 First, set the substrate A, B and respectively the pre-alignment on the facing surface of the upper platen 1 and lower surface plate 2 as shown in FIG. 2 (a). それにより、保持手段3で両基板A,Bが夫々移動不能に吸着保持される。 Thus, both substrates A with the holding means 3, B are respectively immovably suction holding.

【0018】その後、第一加圧手段5の作動で図2 [0018] Then, FIG. 2 by operation of the first pressing means 5
(b)に示す如く上定盤1と下定盤2を互いに近づけ、 (B) to close together the upper platen 1 and lower surface plate 2, as shown,
上定盤1の周縁部1aが環状シール4bに密接して、上定盤1と下定盤2との間には、これら捧持された両基板A,Bを囲むように閉空間Sが区画形成される。 Periphery 1a of the upper platen 1 is in close contact with the annular seal 4b, between the upper plate 1 and lower surface plate 2, forming these holding up has been both substrates A, the closed space S so as to surround the B compartment It is.

【0019】これと同時に両基板A,Bは、上定盤1と下定盤2の接近移動により、所定間隔まで接近し、この状態で1mm以下の隙間をもって対峙している。 [0019] At the same time the substrates A, B are, by the approach movement of the upper platen 1 and lower surface plate 2, close to the predetermined intervals, are facing with the following gap 1mm in this state. しかし、 But,
一方の基板Bに塗布した環状接着剤Cには、他方の基板Aが接触せず、これら両基板A,Bの間と閉空間Sは連通している。 The coated annular adhesive C on one substrate B, does not contact the other substrate A, the both substrates A, the closed space S and between B are in communication.

【0020】その後、吸気手段6の作動で閉空間Sから空気が抜かれて所定の真空度になると共に、両基板A, [0020] Thereafter, with the closed space S is evacuated of air to a predetermined degree of vacuum by operation of the inlet means 6, the substrates A,
Bの間からも空気が抜かれて真空となる。 A vacuum be pulled air from between the B. この状態で、 In this state,
位置決め手段8の作動により上定盤1と下定盤2を相対的にXYθ方向へ調整移動させて、両基板A,Bの粗合わせが行われる。 And the upper surface plate 1 and lower surface plate 2 is adjusted moved relatively XYθ direction by the operation of the positioning means 8, the substrates A, crude alignment B is performed.

【0021】そして、所定の真空度に到達したら、第二加圧手段7の作動で図2(c)に示す如く上定盤1と下定盤2が更に接近して環状シール4bを圧縮変形させ、 [0021] Then, when it reaches a predetermined degree of vacuum, and FIG. 2 (c) to be the upper surface plate 1 and lower surface plate 2 is further approached as shown by compressive deformation of the annular seal 4b by operation of the second pressing means 7 ,
それにより両基板A,Bが更に接近して、一方の基板B Whereby the substrates A, B are further approach, one of the substrates B
に塗布した環状接着剤Cに、他方の基板Aが密接して両者間が密閉される。 The annular adhesive C which is applied to, between them is sealed closely the other substrate A. この状態で、位置決め手段8の作動により上定盤1と下定盤2を相対的にXYθ方向へ調整移動させて、両基板A,Bの微合わせが行われる。 In this state, operating the upper platen 1 and the lower surface plate 2 is adjusted moved relatively XYθ direction by the positioning means 8, the substrates A, fine fit is performed for B.

【0022】その後、図2(d)に示す如く保持手段3 [0022] Thereafter, the holding means 3 as shown in FIG. 2 (d)
の作動により上定盤1からのみ上方基板Aの吸着を解除して、吸気手段6の作動により閉空間S内に空気を入れてその雰囲気を大気圧に戻す。 By releasing the adsorption of the observed upper substrate A from the upper platen 1 by the operation of returning the atmosphere to atmospheric pressure put air into the closed space S by the operation of the inlet means 6. それにより、両基板A, As a result, both substrates A,
Bの内外に生じる気圧差で均等に押し潰され、所定のギャップが形成される。 Is uniformly crushed by pressure difference generated inside and outside of B, predetermined gap are formed.

【0023】この際、粗合わせを行う前の時点、具体的には両基板A,Bのセット時に適正量の液晶を適正状態で封入すれば、閉空間S内の雰囲気を大気圧に戻すことにより、両基板A,Bの内外に生じる気圧差で均等に押し潰されて、液晶が封入された状態で所定のギャップ形成が可能となり、後工程で液晶を注入せずに液晶パネルが制作できる。 [0023] At this time, the time prior to the coarse adjustment, in particular the substrates A, if sealing the liquid crystal of the appropriate amount at the time of the set of B in a proper state, returning the atmosphere within the closed space S to atmospheric pressure Accordingly, the substrates a, are equally squashed by pressure difference generated inside and outside of B, the liquid crystal becomes possible predetermined gap formed in a state of being enclosed, can produce liquid crystal panel without injecting liquid crystal in a later step .

【0024】それ以降は、閉空間S内が大気圧に戻ったら、第一加圧手段5の作動により上定盤1と下定盤2を離して閉空間Sが開放され、アライメントされた両基板A,Bを取り出して、上述した動作が繰り返される。 [0024] From then, once inside the closed space S is returned to atmospheric pressure, the closed space S away upper platen 1 and the lower surface plate 2 by the operation of the first pressing means 5 is opened, aligned both substrates a, removed the B, the aforementioned operation is repeated.

【0025】従って、上定盤1及び下定盤2の間のみを密閉状態にしたままその外部でXYθ移動してアライメントできる。 [0025] Therefore, the alignment and XYθ moving while its outside and only the sealed state between the upper platen 1 and lower surface plate 2. その結果、位置決め手段8やその駆動源8 As a result, the positioning means 8 and the drive source 8
bなどが大気中に設置可能となり、通常部品が使用できると共に、真空貫通部品もなくなり、それにより、構造の簡略化が図れ、しかも真空遮断にコストもかかず、粗合わせや微合わせに相当な力を必要としないから、駆動形態の制約が無い。 b like is mountable to the atmosphere, with the usual components can be used, it eliminates the vacuum through component, thereby Hakare simplification of the structure, moreover neither written cost vacuum interrupters, which corresponds to the coarse adjustment and fine fit It does not require the power, not the driving form of constraints. また、真空となる空間を最小にして、その分だけ真空ポンプの容量が小さくてすみ、大型の基板でも生産性が高く製造できる。 Further, by the space of the vacuum to minimize corner a small capacity vacuum pump that extent, it can be produced high productivity even on large substrates.

【0026】更に必要に応じて、前記上定盤1及び下定盤2の対向面のどちらか一方又は両方に、クッション性に優れてXYθ方向への調整移動の際に位置ズレが発生しない緩衝材10を配設した場合には、上定盤1及び下定盤2の片当たりを防止して均一なギャップ形成が容易となる。 [0026] Further, if necessary, to either or both of the opposing surfaces of the upper plate 1 and lower surface plate 2, cushioning material misalignment during the adjustment movement of the XYθ direction does not occur and excellent cushioning when disposed 10 uniform gap formed to prevent partial contact of the upper stool 1 and lower surface plate 2 is facilitated.

【0027】一方、図3及び図4に示すものは、本発明の他の実施例であり、このものは、前記第二加圧手段7 On the other hand, as shown in FIGS. 3 and 4 is another embodiment of the present invention, this thing, the second pressurizing unit 7
が、移動ブロック4aの上面から上定盤1の周縁部1a But the peripheral portion 1a of the upper platen 1 from the upper surface of the movable block 4a
へ向けて配設した上下方向へ伸縮自在なシリンダー7a Telescopic in the vertical direction is disposed toward a cylinder 7a
に代えて、上定盤1の対向面中央に形成された凹部1b Instead of the recess 1b formed on the opposite surface center of the upper platen 1
を閉塞すると共に上方基板Aを移動不能に保持する上下方向のみ弾性変形可能な可撓性薄板材7bと、この可撓性薄板材7bで閉鎖された凹部1b内の気体を出し入れして微合わせ時に可撓性薄板材7bが下方へ基板Bへ向け膨出するように変形させる加圧部7cとからなる構成が、前記図1及び図2に示した実施例とは異なり、それ以外の構成は図1及び図2に示した実施例と同じものである。 A vertical direction only elastically deformable flexible thin plate 7b to immovably hold the upper substrate A with closing the combined fine and out the gas in the closed recess 1b of this flexible sheet material 7b configuration during flexible thin plate 7b is made of a pressing portion 7c for deforming so as to bulge toward the substrate B downward, unlike the embodiment shown in FIGS. 1 and 2, constituting the other is the same as the embodiment shown in FIGS.

【0028】上記可撓性薄板材7bは、例えばステンレスなどの金属製フィルムなどの上下方向へは弾性変形可能であるがXYθ方向へは変形不能に形成され、その中央には、保持手段3として複数の吸引孔が開穿される。 [0028] The flexible sheet of material 7b, for example in the vertical direction, such as a metal film such as stainless steel is to but is elastically deformable XYθ direction is nondeformable formed, on its center, as the holding means 3 a plurality of suction holes are perforated in.
上記加圧部7cは、コントローラー(図示せず)で動作制御され、図4(a)に示す上記状態及び図4(b)に示す粗合わせまで、閉鎖凹部1bの内圧が吸気手段6による閉空間Sの内圧と同じになるように空気を出し入れし、粗合わせ後のみ図4(c)に示す如く閉鎖凹部1b The pressure portion 7c is operated controlled by a controller (not shown), Fig. 4 to the crude alignment shown in the state and 4 (b) to (a), the closing is due to the intake means 6 the internal pressure of the closed recess 1b and out of air so as to be the same as the inner pressure of the space S, only after rough fit as shown in FIG. 4 (c) closing the recess 1b
の内圧が閉空間Sの内圧より大きくなるように空気を入れる。 Add air to the internal pressure of greater than the internal pressure of the closed space S.

【0029】従って、図3及び図4に示すものは、粗合わせ後、図4(c)に示す如く閉鎖凹部1bの内圧上昇により可撓性薄板材7bが膨出変形して、それに保持された上方基板Aを下方基板Bへ更に接近して両者間が環状接着剤Cで密閉させることにより、これら両基板A, [0029] Therefore, as shown in FIGS. 3 and 4, after rough fit, flexible thin plate 7b by the internal pressure rise of the closed recesses 1b as shown in FIG. 4 (c) bulges deformed, held thereto therebetween an upper substrate a further closer to the lower substrate B is by sealed annular adhesive C has, two substrates a,
Bが微合わせ時に最終ギャップ近くまで均等に潰される。 B is crushed evenly until the final gap close to the time of the combined fine. その結果、前記図1及び図2に示した実施例よりも剛体製上定盤1及び下定盤2は対向面の平坦度や定盤間の平行精度により基板A,B同士の局所加圧を招き易いが、これら基板A,B同士の局所加圧を完全に防止できて製品が傷付かないという利点がある。 As a result, the substrate A, the local pressure between B by the parallel precision between the flatness and the surface plate of FIG. 1 and a rigid steel on surface plate 1 and lower surface plate 2 than the embodiment shown in Figure 2 facing surface liable, but there is an advantage that the substrates a, products can be completely prevent local pressure between B are not damaged.

【0030】尚、前示実施例では、上方の加圧板1が、 [0030] In the previous shows embodiments, the upper pressing plate 1,
上下方向へ往復動自在な上定盤であり、下方の加圧板2 A reciprocating freely UeJo Release the vertical direction, the lower pressing plate 2
がXYθ方向へ調整移動自在に支持された下定盤である場合を示したが、これに限定されず、これと逆に上定盤をXYθ方向へ調整移動自在に支持し、下定盤を上下方向へ往復動自在に支持しても良い。 Although but showing a case where a lower platen which is adjusted movably supported to the XYθ direction, not limited to this, this reverse in the upper platen adjusted movably supported to the XYθ direction, the lower platen vertically to may be supported to be able to reciprocate. 更に真空雰囲気中でアライメントする場合を示したが、これに限定されず、 Although further it shows a case where alignment in a vacuum atmosphere, without being limited thereto,
特殊ガス雰囲気中でアラメイントする場合も同様である The same applies to the case of Arameinto in special gas atmosphere

【0031】また、基板A,Bの保持手段3、移動シール手段4、第一加圧手段5、吸気手段6、第二加圧手段7及び位置決め手段8は、図示された構造に限定されず、同様に作用すれば他の構造でも良い。 Further, the substrate A, the holding means 3 B, moving the sealing means 4, the first pressure means 5, inlet means 6, the second pressing means 7 and the positioning means 8 is not limited to the illustrated structure , it may be other structures if act similarly. 特に基板A, In particular substrate A,
Bを移動不能に保持する保持手段3は、吸気手段6による閉空間S内の真空度が低真空であれば、真空差を利用した真空吸着を使用できるが、この真空差を利用できなくなる程度まで閉空間S内が高真空になる場合には、保持手段3として静電チャックや粘着フィルムを使用することにより基板A,Bを移動不能に保持する必要がある。 The degree holding unit 3 for holding the B immovably, if the degree of vacuum is low vacuum closed space S by the suction means 6, can be used to vacuum suction using a vacuum difference, which can not be utilized this vacuum difference when inside the closed space S becomes a high vacuum until it is necessary to hold the substrate a, a B immovably by using an electrostatic chuck or an adhesive film as the holding means 3. また更に移動シール手段4の駆動真空シール4cに代えて磁性流体式真空シールを使用しても良い。 Also may be used a magnetic fluid vacuum sealing further place of the drive vacuum seal 4c of the moving sealing means 4.

【0032】 [0032]

【発明の効果】以上説明したように、本発明のうち請求項1、2記載の発明は、二枚の基板を保持した加圧板が接近移動することにより、相互の周縁部の間を移動シール手段で密閉して閉空間が区画形成されると共に、両基板が所定間隔まで接近し、その後、この閉空間内の空気を抜きながら、両加圧板を相対的にXYθ方向へ調整移動させて、両基板の粗合わせが行われ、所定の真空度に到達してから、上記移動シール手段を変形させて両基板の間が環状接着剤で密閉される位置まで更に接近し、この状態で、上記両加圧板を相対的にXYθ方向へ調整移動させて、両基板の微合わせが行われ、その後、上記加圧板の一方からのみ基板を解放して、上記閉空間内を大気圧に戻すことにより、両基板の内外に生じる気圧差で均等に押し潰されて As described in the foregoing, the invention of claim 1, wherein one of the invention, by a pressure plate which holds the two substrates are moved closer, moving seal between the periphery of each other with closed space sealed by means are partitioned and formed, both substrates approaches to a predetermined distance, and then, while evacuated in the closed space, is moved adjustments of both pressure plate to relatively XYθ direction, crude alignment between the substrates is carried out, after reaching a predetermined degree of vacuum, between the substrates by deforming the moving sealing means further approached to the position to be sealed by the annular adhesive, in this state, the both pressurizing and plate is adjusted moved relatively XYθ direction, fine the two substrates combined is performed, then, to release only the substrate from one of the pressure plate, by returning the inside between the closed space to the atmospheric pressure , it is uniformly crushed by pressure difference generated inside and outside of the two substrates 所定のギャップが形成されるので、 Since the predetermined gap is formed,
両加圧板の間のみを密閉状態にしたままその外部でXY While only between the two pressure plate in a closed state XY at its outer
θ移動してアライメントできる。 Possible alignment with θ move. 従って、外部から駆動伝達により真空チャンバー内の位置決め手段をXYθ移動してアライメントする従来のものに比べ、位置決め手段やその駆動源などが大気中に設置可能となり、通常部品が使用できると共に、真空貫通部品もなくなり、その結果、構造の簡略化が図れ、しかも真空遮断にコストもかかず、粗合わせや微合わせに相当な力を必要としないから、駆動形態の制約が無い。 Therefore, compared with the conventional aligning with XYθ moving the positioning means in the vacuum chamber by a drive transmission from the outside, such as the positioning means and the driving source is mountable in the atmosphere, with the usual components can be used, vacuum through also eliminates parts, as a result, Hakare simplifying the structure, moreover neither written cost vacuum interrupters, do not require substantial force to the rough adjustment and the fine fit, no driving form of constraint. また、真空となる空間を最小にして、その分だけ真空ポンプの容量が小さくてすみ、大型の基板でも生産性が高く製造できる。 Further, by the space of the vacuum to minimize corner a small capacity vacuum pump that extent, it can be produced high productivity even on large substrates.

【0033】請求項3、4の発明は、請求項1または2 The invention of claim 3 and 4, according to claim 1 or 2
の発明の効果に加えて、粗合わせ後、閉鎖凹部の内圧上昇により可撓性薄板材が膨出変形して、それに保持された一方基板を他方基板へ更に接近して両者間が環状接着剤Cで密閉させることにより、これら両基板が微合わせ時に最終ギャップ近くまで均等に潰されるので、剛体製加圧板の平坦度や平行精度に関係なく基板同士の局所加圧を防止する。 In addition to the effect of the invention, after rough fit, flexible sheet material bulges deformed by the internal pressure rise of the closed recesses, further closer to therebetween annular adhesive to the other substrate one substrate held on it by sealed in C, and since these two substrates are collapsed evenly to the final gap close when combined fine, to prevent local pressure between the substrates regardless of the flatness and parallelism precision rigid steel pressure plate. 従って、剛体製の加圧板は対向面の平坦度や定盤間の平行精度により基板同士の局所加圧を招き易いが、これら基板同士の局所加圧を完全に防止できて製品が傷付かない。 Thus, although a rigid steel pressure plate liable to local pressure between the substrates by parallel precision between the flatness and the surface plate of the opposing surfaces, the product is not damaged by possible completely prevent local pressurization of the substrates to each other .

【0034】請求項5の発明は、請求項2または4の発明の効果に加えて、閉空間内の雰囲気を大気圧に戻すことにより、両基板の内外に生じる気圧差で均等に押し潰されて、液晶が封入された状態で所定のギャップ形成が可能となるので、後工程で液晶を注入せずに液晶パネルを制作できる。 The invention of claim 5, in addition to the effect of the invention of claim 2 or 4, by returning the atmosphere within the closed space to the atmospheric pressure, is uniformly crushed by pressure difference generated inside and outside of the two substrates Te, the liquid crystal becomes possible predetermined gap formed in a state of being enclosed, can produce liquid crystal panel without injecting liquid crystal in a later step.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】 本発明の一実施例を示す液晶パネル用基板の貼り合わせ装置の縦断正面図である。 1 is a vertical sectional front view of the bonding apparatus of the liquid crystal panel substrate showing an embodiment of the present invention.

【図2】 (a)〜(d)は液晶パネルの製造方法を工程順に示す説明図である。 Figure 2 (a) ~ (d) are explanatory views showing a manufacturing method of a liquid crystal panel in order of steps.

【図3】 本発明の他の実施例を示す液晶パネル用基板の貼り合わせ装置の縦断正面図である。 3 is a vertical sectional front view of another embodiment of the bonding apparatus of the substrate for a liquid crystal panel shown in the present invention.

【図4】 (a)〜(d)は液晶パネルの製造方法を工程順に示す説明図である。 [4] (a) ~ (d) are explanatory views showing a manufacturing method of a liquid crystal panel in order of steps.

【図5】 従来の液晶パネル用基板の貼り合わせ装置の一例を示す縦断正面図である。 5 is a longitudinal sectional front view showing an example of a conventional bonding apparatus of the liquid crystal panel substrate.

【符号の説明】 DESCRIPTION OF SYMBOLS

A,B 基板 C 環状接着剤 S 閉空間 1 加圧板(上定盤) 1a 周縁部 1b 凹部 2 加圧板(下定盤) 2a 周縁部 3 保持手段 4 移動シール手段 5 第一加圧手段 6 吸気手段 7 第二加圧手段 7b 可撓性薄板材 7c 加圧部 8 位置決め手段 A, B substrate C cyclic adhesive S closed space 1 pressure plate (upper plate) 1a periphery 1b recess 2 pressure plate (lower platen) 2a periphery 3 holding means 4 moves the sealing means 5 first pressurizing unit 6 inlet means 7 second pressurizing unit 7b flexible thin plate 7c pressurizing 8 positioning means

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2H088 EA02 FA04 FA10 FA16 FA17 FA20 FA30 MA20 2H089 NA38 NA49 NA60 QA12 QA14 5G435 AA17 BB12 KK05 KK10 ────────────────────────────────────────────────── ─── front page of continued F-term (reference) 2H088 EA02 FA04 FA10 FA16 FA17 FA20 FA30 MA20 2H089 NA38 NA49 NA60 QA12 QA14 5G435 AA17 BB12 KK05 KK10

Claims (5)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 上下一対の加圧板(1,2)に対して夫々着脱自在に保持された二枚の基板(A,B)を真空中で重ね合わせ、位置決め手段(8)により相対的にXY 1. A superposition two substrates (A, B) which are respectively detachably held with respect to the pair of upper and lower pressing plates (1,2) in vacuo, relatively by the positioning means (8) XY
    θ方向へ調整移動して両基板(A,B)の粗合わせ及び微合わせを行い、更に両基板(A,B)を加圧して所定のギャップまで潰す液晶パネル用基板の貼り合わせ装置において、 前記両加圧板(1,2)の対向面に設けられた基板(A,B)を移動不能に保持する保持手段(3)と、 両加圧板(1,2)の対向する周縁部(1a,2a)間の密閉状態を維持したまま相対的にXYθ方向へ移動自在に支持する上下方向へ弾性変形可能な移動シール手段(4)と、 両加圧板(1,2)を相対的に接近移動して、これら両加圧板(1,2)の間に両基板(A,B)が囲まれるように閉空間(S)を区画形成すると共に、両基板(A, Both substrates by adjusting moved θ direction (A, B) crude alignment and fit to fine the further two substrates (A, B) in the pressurizing a bonding apparatus for a liquid crystal panel substrate collapsing to a predetermined gap, the two pressure plate substrate provided on the facing surface of the (1, 2) (a, B) and holding means for immovably holding the (3), opposite peripheral portions of the pressure plate (1, 2) (1a relatively close to the 2a) between the vertical direction to the elastically deformable movable sealing means movably supporting the relatively XYθ direction while maintaining the sealed state of (4), both pressure plate (1, 2) Go and thereby define a closed space (S) so that both substrates (a, B) is enclosed between these two pressure plate (1, 2), the substrates (a,
    B)を所定間隔まで接近させる第一加圧手段(5)と、 上記閉空間(S)内の気体を出し入れして所定の真空度にする吸気手段(6)と、 上記第一加圧手段(5)により接近させた両基板(A, The as one pressurizing means (5) for approximating B) to a predetermined distance, between the closed space and (inlet means for a predetermined degree of vacuum and out the gas in S) (6), the first pressurizing unit both substrates were approached by (5) (A,
    B)を、それらの間が環状接着剤(C)で密閉される位置まで更に接近させる第二加圧手段(7)と、 上記第一加圧手段(5)及び第二加圧手段(7)の作動状態で、両加圧板(1,2)を相対的にXYθ方向へ調整移動させるための閉空間(S)外に配設した位置決め手段(8)と、を備えたことを特徴とする液晶パネル用基板の貼り合わせ装置。 The B), between which an annular adhesive agent (the second pressing means to further approach to the position to be sealed by C) (7), said first pressurizing means (5) and the second pressure means (7 in operating state of) a closed space for causing the adjusting movement to both the pressure plate (1, 2) relatively XYθ direction (S) positioning means which is disposed on the outer (8), and comprising the bonding apparatus of the substrate for a liquid crystal panel.
  2. 【請求項2】 上下一対の加圧板(1,2)に対して夫々着脱自在に保持された二枚の基板(A,B)を真空中で重ね合わせ、位置決め手段(8)により相対的にXY 2. A superimposing two substrates (A, B) which are respectively detachably held with respect to the pair of upper and lower pressing plates (1,2) in vacuo, relatively by the positioning means (8) XY
    θ方向へ調整移動して両基板(A,B)の粗合わせ及び微合わせを行い、更に両基板(A,B)を加圧して所定のギャップまで潰す液晶パネル用基板の貼り合わせ方法において、 前記両加圧板(1,2)の対向面に夫々二枚の基板(A,B)を移動不能に保持するステップと、 これら両加圧板(1,2)の接近移動により、相互の対向する周縁部(1a,2a)の間を上下方向へ弾性変形可能な移動シール手段(4)で密閉して、両基板(A, Both substrates by adjusting moved θ direction (A, B) crude alignment and fit to fine of, in yet both substrates (A, B) bonding method of the liquid crystal panel substrate collapsing pressurized to a predetermined gap, a step of immovably holding the respective two substrates (a, B) on the opposing surfaces of the pressure plate (1, 2), by the approach movement of these two pressure plate (1,2), facing one another periphery (1a, 2a) are sealed with a moving seal means between possible elastic deformation in the vertical direction (4), the substrates (a,
    B)が囲まれるように閉空間(S)を区画形成すると共に、該閉空間(S)内の両基板(A,B)を所定間隔まで接近させるステップと、 この閉空間(S)内の空気を抜きながら、両加圧板(1,2)を相対的にXYθ方向へ調整移動させて、両基板(A,B)の粗合わせを行うステップと、 この閉空間(S)内が所定の真空度に到達してから、上記移動シール手段(4)を変形させて、両基板(A, With partitions and forms the closed space (S) is as B) is surrounded, and the step of approaching the substrates (A in the closed space (S), B) and to a predetermined distance, in the closed space (S) while deflated, both the pressure plate (1, 2) relative to each tuned moved XYθ direction, the substrates (a, B) performing a coarse alignment, the closed space (S) within the predetermined after reaching the vacuum level, by deforming the said moving sealing means (4), the substrates (a,
    B)の間が環状接着剤(C)で密閉される位置まで更に接近させるステップと、 上記両加圧板(1,2)を相対的にXYθ方向へ調整移動させて、更に接近した両基板(A,B)の微合わせを行うステップと、 上記加圧板(1,2)のどちらか一方から一枚の基板(A,B)を解放させ、上記閉空間(S)内を大気圧に戻して、両基板(A,B)の内外に生じる気圧差により所定のギャップまで均等に押し潰すステップとからなり、 これらのステップを順次行うことを特徴とする液晶パネル用基板の貼り合わせ方法。 A step during B) causes the further closer to the position that is sealed by an annular adhesive (C), by adjusting moving said both pressure plate (1, 2) relatively in XYθ direction, the substrates were further approach ( a, performing a combined fine of B), is released the pressure plate (1, 2) one substrate either from one (a, B) and return between the closed space and the (S) to the atmospheric pressure Te, consists of a predetermined step crushing evenly to the gap by pressure difference generated inside and outside of the substrates (a, B), bonding method of the substrate for liquid crystal panel, characterized in that sequentially carried out these steps.
  3. 【請求項3】 前記第二加圧手段(7)が、 一方加圧板(1)の対向面中央に形成された凹部(1 Wherein said second pressurizing means (7), whereas formed on the counter surface center of the pressure plate (1) recess (1
    b)を閉塞すると共に、一方基板(A)を移動不能に保持する上下方向のみ弾性変形可能な可撓性薄板材(7 Together to close the b), whereas the vertical direction only elastically deformable flexible sheet material to immovably hold a substrate (A) (7
    b)と、 この可撓性薄板材(7b)で閉鎖された凹部(1b)内の気体を出し入れして、微合わせ時に可撓性薄板材(7 And b), the flexible thin plate and out the gas in the closed recess (1b) in (7b), a flexible thin plate material during the fine fit (7
    b)が他方基板(B)へ向け膨出するように変形させる加圧部(7c)と、からなる請求項1記載の液晶パネル用基板の貼り合わせ装置。 b) the other substrate (B) and modified to pressing (7c) so as to bulge toward the claim 1 bonding apparatus of the liquid crystal panel substrate according consisting.
  4. 【請求項4】 前記一方加圧板(1)の対向面中央に形成された凹部(1b)を閉塞する上下方向のみ弾性変形可能な可撓性薄板材(7b)に、一方基板(A)を移動不能に保持するステップと、 上記閉鎖凹部(1b)の内圧と閉空間(S)の内圧を同じにして粗合わせするステップと、 この粗合わせ後に、閉空間(S)内が所定の真空度に到達してから、上記閉鎖凹部(1b)の内圧上昇により可撓性薄板材(7b)を膨出変形させて、それに保持された一方基板(A)を他方基板(B)へ向け更に接近移動させるステップと、を有する請求項2記載の液晶パネル用基板の貼り合わせ方法。 4. A said one pressure plate (1) vertically only elastically deformable flexible sheet material for closing the opposed surface center recess formed (1b) of (7b), whereas the substrate (A) a step of immovably holding the steps of combined crude in between the internal pressure and the closed space of the closed recesses (1b) the inner pressure of the (S) to the same, after the coarse adjustment, the closed space (S) within a predetermined degree of vacuum after reaching the, by bulging deformation flexible thin plate material and (7b) by the internal pressure rise of the closure recess (1b), further approach toward been one substrate (a) held in it to the second substrate (B) bonding method of the liquid crystal panel substrate according to claim 2, further comprising a step of moving to, the.
  5. 【請求項5】 前記粗合わせを行う前の時点で、両基板(A,B)の間に適正量の液晶を注入した請求項2または4記載の液晶パネル用基板の貼り合わせ方法。 At a time prior to wherein performing the coarse adjustment, the two substrates (A, B) bonding method of the liquid crystal panel substrate according to claim 2 or 4, wherein the liquid crystal is injected in appropriate amounts between.
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