KR20020034881A - Apparatus and method for attaching substrate for Liquid Crystal Panel - Google Patents

Abstract

PURPOSE: To align substrates by externally moving substrates in XYθ directions outside of pressurizing plates while keeping only the space between the pressurizing plates in a sealed state. CONSTITUTION: The pressurizing plates 1, 2 holding two substrates A, B are moved nearer to each other so as to seal the space between the peripheral edges 1a, 2a of the plates by a movable sealing means 4 to form a section of a closed space S while the substrates A, B are moved nearer to each other to form a specified gap. Then while the air in the closed space S is evacuated, the pressurizing plates 1, 2 are relatively moved and adjusted in along XYθ directions to roughly align the substrates A, B. After a specified vacuum degree is obtained, the movable sealing means 4 is deformed to move the substrates A, B further nearer to each other the position where the gap between the substrates A, B is sealed with an annular adhesive C. In this state, the pressurizing plates 1, 2 are relatively moved and adjusted in the XYθ directions to finely align the substrates. Then the substrates are released from only one of the plates 1, 2 to return the closed space S to the atmospheric pressure so that the gap is uniformly pressed by the pressure difference between the inside and outside of the substrates A, B to form a specified gap.

Description

Bonding apparatus and bonding method of a substrate for a liquid crystal panel {Apparatus and method for attaching substrate for Liquid Crystal Panel}

The present invention relates to a bonding apparatus and a bonding method for a liquid crystal panel substrate for aligning (coarse and fine-aligning) two liquid crystal panel substrates in a vacuum in the manufacturing process of a liquid crystal panel used in a liquid crystal display (LCD). It is about. More specifically, two substrates each detachably held with respect to a pair of upper and lower pressure plates are superposed on one another in a vacuum, and are adjusted and moved in the XYθ direction relatively by a positioning means, so that both substrates are coarse and fine. The present invention relates to a bonding apparatus and a method for a liquid crystal panel substrate that are aligned and press both substrates to press down to a predetermined gap.

Conventionally, the bonding apparatus and the method of this kind of board | substrate for liquid crystal panels are a positioning means, such as a pair of top and bottom press plates 1 'and 2' and an XY table, for example, as shown in FIG. The vacuum chamber 11 is formed to be opened and closed in the vertical direction so as to surround the whole of 8 ', and the drive shaft 8c' which connects this positioning means 8 'and its drive source 8b' is an example. For example, it is provided through the vacuum chamber 11 by the vacuum through parts 12, such as a bellows.

Then, the vacuum chamber 11 is closed and the inside thereof is vacuumed, and then the positioning means 8 'is operated from the outside to the drive shaft 8c' so that both of the pressure plates 1 ', 2' are relatively. By coordinating and moving to XY (theta) direction, coarse and fine alignment of both board | substrates A and B was performed.

However, in such a conventional bonding apparatus and bonding method for a liquid crystal panel substrate, since the positioning means in the vacuum chamber is XYθ moved and aligned by driving transmission from the outside, the vacuum penetrating component of the drive shaft is complicated, and the inside and outside of the vacuum chamber are complicated. Not only does the vacuum cut-off cost increase, but there is a problem that a considerable force is required for rough or fine fitting due to the viscosity of the sealing material, and there are many limitations in the driving form.

In addition, since the vacuum chamber surrounds the entire upper and lower pair of pressure plates and the positioning means, the space to be vacuum tends to be large, and the capacity of the vacuum pump needs to be increased, and the size of the substrate that can be used is also limited. There is a problem that a large substrate cannot be manufactured.

The invention of Claims 1 and 2 of the present invention aims to align and move XYθ from the outside while keeping only between the press plates in a sealed state.

The invention of claims 3 and 4, in addition to the object of the invention of claims 1 or 2, aims at preventing local pressurization of the substrates irrespective of the flatness or parallelism of the rigid pressing plate. .

In addition to the object of the invention according to claim 2 or 4, the invention of claim 5 is intended to produce a liquid crystal panel without injecting liquid crystal in a later step.

1 is a cross-sectional view of a bonding apparatus of a substrate for a liquid crystal panel, showing an embodiment of the present invention.

2A to 2D are explanatory diagrams showing a method of manufacturing a liquid crystal panel in the order of steps.

3 is a cross-sectional view of a bonding apparatus for a substrate for a liquid crystal panel, showing another embodiment of the present invention.

4A to 4D are explanatory diagrams showing a method of manufacturing a liquid crystal panel in order of process.

5 is a cross-sectional view showing an example of a conventional bonding apparatus for liquid crystal panel substrates.

* Description of the symbols for the main parts of the drawings *

A, B: Substrate C: Annular Adhesive

S: Closed space 1: Pressure plate (upper plate)

1a: peripheral edge portion 1b: recessed portion

2: pressure plate (lower surface plate) 2a: peripheral edge

3: holding means 4: moving sealing means

5: first press means 6: intake means

7: second pressing means 7b: flexible thin plate material

7c: pressing section 8: positioning means

In order to achieve the above object, the invention of claim 1 of the present invention provides a holding means for holding a substrate provided on opposite surfaces of both pressing plates in a non-movable manner;

Moving sealing means which can be elastically deformed in an up and down direction supporting to move relatively in the XYθ direction while maintaining a closed state between opposing peripheral edge portions of both pressing plates;

First pressing means for relatively moving the two pressing plates so as to partition the closed space so that the two substrates are surrounded between the two pressing plates, and accessing the two substrates to a predetermined interval;

Intake means for allowing gas in the closed space to enter and exit a predetermined vacuum degree;

Second pressing means for further accessing the two substrates accessed by the first pressing means to a position where the substrate is sealed with an annular adhesive;

In the operating state of the said 1st pressing means and the 2nd pressing means, it is characterized by including the positioning means arrange | positioned outside the closed space for adjusting and moving both pressure plates in the XY (theta) direction relatively.

The invention of claim 2 further comprises the steps of: keeping two substrates immovably on opposite surfaces of both pressure plates,

By closing movement between the peripheral edge portions facing each other by the movement of the two pressure plates, the sealing space is elastically deformed in the vertical direction, thereby partitioning the closed space so as to surround both substrates, and at the same time, both the substrates in the closed space. Approaching a predetermined interval,

Roughly fitting the two substrates by adjusting and moving both pressure plates in the XYθ direction while removing the air in the closed space;

As the inside of the closed space reaches a predetermined degree of vacuum, the moving sealing means is deformed to bring it closer to a position where both substrates are sealed with an annular adhesive,

Fine-adjusting both substrates closer to each other by adjusting and moving the pressure plate relative to the XYθ direction;

Releasing one of the substrates from any one of the pressure plates, returning the inside of the closed space to atmospheric pressure, and pressing the substrate evenly to a predetermined gap by a pressure difference generated in and out of both substrates, and sequentially It is characterized by performing.

According to the invention of claim 3, in the configuration of the invention of claim 1, the second pressing means elastically deforms only the up and down direction of closing the recess formed in the center of the opposing surface of one pressing plate and simultaneously holding the one substrate in a non-movable manner. And a pressurized portion deformed so that the flexible thin plate expands toward the other substrate at the time of fine fitting by entering and exiting the gas in the recess closed with the flexible thin plate.

According to the invention of claim 4, in the configuration of the invention according to claim 2, one substrate is immovably held in a flexible sheet material which can be elastically deformed only in the up and down direction of closing the recess formed in the center of the opposite surface of the one pressing plate. And rough fitting by making the internal pressure of the closed recess equal to the internal pressure of the closed space; and after the rough fitting, the internal pressure of the closed recess reaches a predetermined degree of vacuum, thereby increasing the internal pressure of the closed recess. It is characterized in that it further comprises a configuration having the step of expanding and deforming the thin sheet material while retaining therein, and further moving the substrate toward the other substrate.

The invention of claim 5 is characterized by adding a configuration in which an appropriate amount of liquid crystal is injected between both substrates to the configuration of the invention according to claim 2 or 4 before the rough fitting.

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the accompanying drawings.

In this embodiment, as shown in Figs. 1 and 2, the upper platen is supported by the upper platen reciprocating in the vertical direction and immovably in the XYθ direction, while the lower platen plate 2 is fixed. It is a lower surface plate supported on (9) so that adjustment movement in the XY (theta) direction via positioning means 8, such as an XY table, for example, is attracted to the opposing surface of such an upper surface plate 1 and the lower surface plate 2. The two glass substrates A and B held are aligned in a vacuum atmosphere.

The upper surface plate 1 and the lower surface plate 2 are made of a rigid body such as metal or carbon, for example, and as a holding means 3 for holding both substrates A and B in a non-movable manner at the center of the opposite surface. A plurality of suction holes are drilled, and the suction holes 3 ... are connected to a suction source (not shown), for example, a vacuum pump.

This suction source is controlled by a controller (not shown), suction is started in an initial state for setting both substrates A and B, and after the fine fitting of both substrates A and B, the present embodiment In this case, the suction of the upper substrate A is released, and after the closed space S, which will be described later, returns to atmospheric pressure, the suction of the lower substrate B is released to return to the initial state.

Such substrates A and B comprise, for example, a color filter and a TFT substrate on which a desired pattern is formed, and on either of the opposing surfaces, in the case of the illustrated example, along the peripheral edge of the lower substrate B. The annular adhesive C is applied in a rim shape, and a plurality of spacers (not shown) are scattered on the other side as necessary.

In addition, between the outer circumferential edge portion 1a of the upper surface plate 1 and the outer circumferential edge portion 2a of the lower surface plate 2, it is possible to move relatively in the XYθ direction while maintaining a sealed state therebetween. The moving sealing means 4 is provided annularly so that it may surround both board | substrates A and B. As shown in FIG.

In the present embodiment, the moving sealing means 4 is a moving block 4a formed in a circular cross section or a quadrangle in accordance with the planar shape of the upper surface plate 1 and the lower surface plate 2, and the upper surface of the movement block 4a. The annular sealing member 4b which is elastically deformable in an up-down direction, for example, an O-link or the like, which is separated from the peripheral edge 1a of the upper surface plate 1 attached to the upper surface 1, and is mounted on the lower surface of the movable block 4a. The upper vacuum plate 4c is moved in contact with the outer circumferential edge 2a of the lower surface plate 2 and the vacuum seal 4c is used as necessary, for example, and the vacuum seal 4c is used. It is comprised by the load receiving ball 4d which supports so that a force, such as the weight of block 4a, may not act.

In particular, if necessary, since the upper surface plate 1 and the moving block 4a are integrally connected in the XYθ direction, the plurality of connecting pins 4e are moved up and down from the upper surface plate 1 to the moving block 4a. It is preferable to insert in a reciprocating direction but not in the XYθ direction, and in order to prevent the moving block 4a and the lower surface plate 2 from falling in the vertical direction, for example, a tension spring or the like. It is preferable to provide the elastic material 4f.

The upper surface plate 1 is provided with a first pressing means made of, for example, a cylinder for driving up and down as shown by reference numeral 5 in FIG.

This first pressing means 5 is controlled by a controller (not shown), and in the initial state of setting the substrates A and B, the dashed line in FIG. 1 and the upper surface plate 1 as shown in FIG. 2A. ) To the upper limit position, and after completion of setting of the substrates A and B, the upper surface plate 1 as shown in FIG. 1 and FIG. 2B is lowered, and the lower surface plate 2 is interposed therebetween. The closed space S is partitioned so as to surround both substrates A and B. After completion of the fine fitting of the two substrates A and B, or after the closed space S to be described later returns to atmospheric pressure, the space is raised. Return to the initial state.

The closed space S is connected to, for example, a vacuum pump, which is arranged externally as shown by reference numeral 6 in FIG. 1, and the gas inside the closed space S, in this embodiment, is allowed to enter and exit a predetermined air. Intake means for making a vacuum degree are provided.

This intake means 6 is controlled by a controller (not shown), and after the closed space S is formed by the approach movement of the upper surface plate 1 and the lower surface plate 2, the intake air is exhausted from the closed space S. After the completion of fine fitting of both substrates A and B, air is supplied to the closed space S to return to atmospheric pressure.

In addition, a second pressing means 7 is further provided which further accesses both substrates A and B accessed by the first pressing means 5 to a position where they are sealed with an annular adhesive C therebetween.

In the present embodiment, the second pressing means 7 consists of a cylinder 7a which is disposed from the upper surface of the moving block 4A toward the peripheral edge portion 1a of the upper surface plate 1 and is stretchable in the vertical direction. By shortening this cylinder 7a in the up-down direction and compressively deforming the said annular sealing part 4b in the up-down direction, both board | substrates A and B are pressurized further.

In addition, this second pressing means 7 is controlled by a controller (not shown), and in the initial state, is elongated in the vertical direction as shown in FIG. 2A, and rough coarse termination of both substrates A and B is completed. 2C is shortened as shown in FIG. 2C, and after completion of fine fitting of both substrates A and B, or after the closed space S mentioned later returns to atmospheric pressure, it raises and returns to an initial state.

The bottom surface of the lower surface plate 2, which is the outside of the closed space S, is formed of, for example, an XY table 8a and a drive source 8b for moving in the XYθ direction of the lower surface plate 2, and the like. The determination means 8 is connected, and the lower surface plate is operated by operating the drive source 8b based on the data output from the detection means 8c composed of the microscope and the camera on the marks displayed on both substrates A and B. (2) and the lower board | substrate B hold | maintained in this are adjusted and moved to XY (theta) direction, and coarse and fine alignment are performed.

Moreover, as needed, the center part which abuts both the board | substrates A and B of the opposing surface of the said upper surface plate 1 and the lower surface plate 2 is a material excellent in cushioning property, and is provided to the said positioning means 8 May be provided with a cushioning material 10 formed to a thickness dimension of the position shift does not occur during the adjustment movement in the XYθ direction.

In the case of the illustrated example, only the facing surface 2b of the lower surface plate 2 is provided with a cushioning material 10 having a thickness dimension of several mm, but the present invention is not limited thereto, and the upper surface plate 1 and the lower surface plate ( You may provide in the shock absorbing material 10 only by the opposing surface of the upper surface 1 or both of the opposing surfaces of 2).

Next, the joining method of such a liquid crystal panel board | substrate is demonstrated according to a process sequence.

First, the substrates A and B are set as pre-alignments on opposite surfaces of the upper surface plate 1 and the lower surface plate 2 as shown in FIG. 2A, respectively.

As a result, both substrates A and B are held by the holding means 3 so as not to be moved.

Thereafter, the operation of the first pressing means 5 causes the upper surface plate 1 and the lower surface plate 2 to be close to each other as shown in FIG. 2B so that the peripheral edge portion 1a of the upper surface plate 1 is annular. The closed space S is partitioned between the upper surface plate 1 and the lower surface plate 2 so as to surround the sealingly supported substrates A and B.

At the same time, the two substrates A and B approach to a predetermined interval by the approach movement of the upper surface plate 1 and the lower surface plate 2, and in this state, the substrates A and B are replaced with an interval of 1 mm or less.

However, the annular adhesive C applied to one substrate B is not in contact with the other substrate A, and the closed space S is in communication with these substrates A and B.

Thereafter, the air is taken out of the closed space S by the operation of the intake means 6 to become a predetermined vacuum, and at the same time, the air is also taken out from both substrates A and B to become a vacuum.

When the predetermined degree of vacuum is reached, the upper platen 1 and the lower platen 2 as shown in FIG. 2C are further approached by the operation of the second pressurizing means 7 to compressively deform the annular seal 4b. As a result, both of the substrates A and B come closer to each other, and the other substrate A is in close contact with the annular adhesive C applied to one of the substrates B, so that both members are sealed. do.

In this state, by the operation of the positioning means 8, the upper surface plate 1 and the lower surface plate 2 are adjusted and moved relatively in the XYθ direction so that fine alignment of both substrates A and B is performed.

Thereafter, the suction of the upper substrate A is released only from the upper surface plate 1 by the operation of the holding means 3 as shown in FIG. 2D, and the closed space S is operated by the operation of the intake means 6. Air into the chamber to return the atmosphere to atmospheric pressure.

As a result, the gaps are equally pressed by the pressure difference generated in and around the substrates A and B to form a predetermined gap.

At this time, when the appropriate amount of liquid crystal is enclosed in a proper state at the time before rough coarsening, specifically, when setting both substrates A and B, the atmosphere in the closed space S is returned to atmospheric pressure, It is equally pressed by the pressure difference generated in and around both the substrates A and B, so that a predetermined gap can be formed in the state where the liquid crystal is enclosed, and a liquid crystal panel can be produced without injecting the liquid crystal in a later step.

Thereafter, the inner space of the closed space S is returned to atmospheric pressure, and the closed space S is opened by separating the upper surface plate 1 and the lower surface plate 2 by the operation of the first pressurizing means 5. Both substrates A and B are taken out and the above-described operation is repeated.

Therefore, it can align and move XY (theta) from the outside, keeping only between the upper surface plate 1 and the lower surface plate 2 in a sealed state.

As a result, the positioning means 8, the drive source 8b, etc. can be installed in atmospheric pressure, and a normal part can be used and there are no vacuum through parts, thereby simplifying the structure. There is no constraint on the drive type, since vacuum isolation is not expensive and significant forces are not required for rough or fine fit.

In addition, by minimizing the space to be vacuum, the capacity of the vacuum pump is reduced by that, it is possible to manufacture high productivity even in a large substrate.

Further, if necessary, the cushioning material 10 which is excellent in cushioning property and does not produce position shift during adjustment movement in the XYθ direction is provided on either or both of the opposing surfaces of the upper surface plate 1 and the lower surface plate 2. When arrange | positioning, eccentric contact of the upper surface plate 1 and the lower surface plate 2 is prevented, and uniform gap formation becomes easy.

3 and 4, on the other hand, is another embodiment of the invention, in which the second pressing means 7 moves from the upper surface of the moving block 4a to the peripheral edge 1a of the upper surface plate 1. Instead of the up-and-down stretchable cylinder 7a disposed toward the top, only the up-down direction for closing the recess 1b formed in the center of the opposite surface of the upper surface plate 1 and holding the upper substrate A immovably is elastic deformation. The flexible member 7b and the gas in the recessed portion 1b closed by the flexible member 7b are allowed to enter and exit so that the flexible member 7b expands downward toward the substrate B upon fine fitting. The configuration of the pressing portion 7c to be different from the embodiment shown in Figs. 1 and 2, the other configuration is the same as the embodiment shown in Figs.

The flexible member 7b is elastically deformable in the vertical direction, for example, a metal film such as stainless steel, and is not deformable in the XYθ direction, and a plurality of suction holes are formed at the center thereof as the holding means 3. do.

The pressing portion 7c is operated and controlled by a controller (not shown), and the internal pressure of the closing recess 1b is controlled by the intake means 6 until the state shown in FIG. 4A and the rough fit shown in FIG. 4B. Air is drawn in and out so as to be equal to the internal pressure of the closed space S, and the air is introduced so that the internal pressure of the closed recess 1b as shown in FIG. 4C is greater than the internal pressure of the closed space S only after rough fitting.

3 and 4, therefore, after rough fitting, the flexible substrate 7b expands and deforms due to the internal pressure rise of the closing recess 1b as shown in FIG. By further approaching A) to the lower substrate B and closing both members with the annular adhesive C, both of the substrates A and B are pressed evenly to the vicinity of the final cap during fine fitting.

As a result, the rigid upper plate 1 and the lower plate 2 have a locality between the substrates A and B due to the flatness of the opposing surface or the degree of parallelism between the plates than those of the embodiments shown in FIGS. 1 and 2. Although it is easy to cause the pressurization, there is an advantage that the local pressurization between the substrates (A, B) can be completely prevented and the product is not damaged.

In addition, in this embodiment, although the upper press plate 1 is the upper surface plate which can reciprocate in an up-down direction, and the lower pressure plate 2 is the lower surface plate supported by adjustment movement in an XY (theta) direction, it is limited to such a case. On the contrary, the upper surface plate may be supported to be adjustable in the XYθ direction and the lower surface plate may be supported to be reciprocated in the vertical direction.

In addition, although the case of alignment in a vacuum atmosphere is shown, it is not limited to this, The case of alignment in a special gas atmosphere is also the same.

Moreover, the holding means 3 of the board | substrates A and B, the moving sealing means 4, the 1st pressing means 5, the intake means 6, the 2nd pressing means 7, and the positioning means 8 Is not limited to the illustrated structure, and other structures may be used as long as they act in the same manner.

In particular, the holding means 3 which supports the substrates A and B in a non-movable manner can use vacuum adsorption using a vacuum difference as long as the degree of vacuum in the closed space S by the intake means 6 is low vacuum. In the case where the inside of the closed space S becomes a high vacuum to such an extent that this vacuum difference becomes unavailable, the substrates A and B are immovably supported by using an electrostatic chuck or an adhesive tape as the holding means 3. Needs to be.

In addition, a magnetic fluid vacuum seal may be used in place of the drive vacuum seal 4c of the movable sealing means 4.

According to the invention of claim 1 and 2, the pressing plate holding the two substrates is moved close to each other, so that the space between the peripheral edges of each other is sealed with a moving sealing means to form a closed space, and both substrates are spaced at a predetermined interval. Approach to and then, while removing the air in this closed space, both press plates are adjusted and moved relatively in the XYθ direction to roughly align both substrates, and the moving sealing means is deformed while reaching a predetermined degree of vacuum. Further approaching to the position where both substrates are sealed with an annular adhesive, in this state, fine alignment of both substrates is performed by adjusting and moving the pressure plate relative to the XYθ direction, and then, the substrate is only from one side of the pressure plate. To release the inside of the closed space to atmospheric pressure, and press it evenly with the pressure difference generated inside and outside of both substrates. A predetermined gap is formed.

According to the third and fourth aspect of the present invention, in the configuration of claim 1, the second pressing means closes the recess formed in the center of the opposing surface of one pressing plate, and at the same time, the vertical direction of holding one substrate in a non-movable manner. A flexible thin plate material which is elastically deformable, and a pressurizing part which deforms the flexible thin plate material to expand toward the other substrate during fine adjustment by entering and exiting the gas in the recessed portion closed by the flexible thin plate material, or claim Regarding the structure of the item 2, the step of holding one substrate in a movable thin plate material which is elastically deformable in only the up-down direction for closing the recess formed in the center of the opposite surface of the one press plate, the internal pressure of the closing recess and Coarse fitting is performed by equalizing the internal pressure of the lung space, and after the rough fitting, In addition to the configuration having a step of expanding and deforming the flexible sheet material by increasing the internal pressure of the closed recess while reaching the highway, and moving one substrate held therein closer toward the other substrate, after rough fitting, Increasing the internal pressure of the closing recess causes the flexible sheet material to be expanded and deformed, thereby allowing one substrate to be held there to be brought closer to the other substrate, so that both members are sealed with an annular adhesive to finely fit both substrates. It is evenly pressed down to near the final gap.

The invention according to claim 5 adds a configuration in which an appropriate amount of liquid crystal is injected between both substrates at the time point before performing the rough fitting with respect to the configuration of claim 2 or claim 4, so that the atmosphere in the closed space is atmospheric pressure. By returning to, it is possible to press evenly with the pressure difference generated inside and outside of both substrates, so that a predetermined gap can be formed in a state where the liquid crystal is sealed.

As described above, the invention of claims 1 and 2 of the present invention is to close the space between the peripheral edges of each other by moving sealing means by the moving of the pressure plate holding the two substrates, the closed space is partitioned At the same time, both substrates approach to a predetermined interval, and after that, the pressure plate is adjusted and moved in the XYθ direction while bleeding the air in the closed space, thereby roughly combining the two substrates, and reaching a predetermined degree of vacuum. The moving sealing means is deformed to approach a position where both substrates are sealed with an annular adhesive, and in this state, both pressing plates are adjusted and moved relatively in the XYθ direction, whereby fine alignment of both substrates is performed. Since a predetermined gap is formed evenly by the pressure difference generated inside and outside of the pressure plate, a predetermined gap is formed, while only the pressure plate is kept closed. Standing XYθ can move to alignment.

Therefore, as compared with the conventional art of XYθ shifting and aligning the positioning means in the vacuum chamber by power transmission from the outside, the positioning means, its driving source, and the like can be installed in the air, and a normal part can be used and the vacuum There are no penetrating components, and as a result, the structure is simplified, and furthermore, no cost is required for vacuum interruption, and no significant force is required for rough fitting or fine fitting, so there is no restriction in driving form.

In addition, by minimizing the space to be vacuum, the capacity of the vacuum pump is reduced by that much, it is possible to manufacture high productivity even in a large substrate.

According to the invention of Claims 3 and 4, after the rough fitting, the flexible thin plate is expanded and deformed due to the increase in the internal pressure of the closed recess, and the substrate is held there. By further approaching the other substrate and sealing the two members with an annular adhesive, the two substrates are pressed evenly close to the final gap at the time of fine fitting, so that the substrates are separated regardless of the flatness or parallelism of the rigid platen. Prevent local pressurization.

Therefore, although the pressurizing plate of a rigid body causes local pressurization of board | substrates by the flatness of an opposing surface, or parallelism between a surface plate, local pressurization of such board | substrates can be prevented completely, and a product is not damaged.

According to the invention of claim 5, the effect of the invention according to claim 2 or 4 is, by returning the atmosphere in the closed space to the atmospheric pressure, evenly pressed by the air pressure difference generated inside and outside the two substrates in a state in which the liquid crystal is enclosed. Since predetermined gap formation becomes possible, a liquid crystal panel can be manufactured without injecting a liquid crystal in a later process.

Claims (5)

Two substrates A and B, which are held to be detachable with respect to the upper and lower pairs of pressure plates 1 and 2, respectively, are superimposed in a vacuum, and are adjusted and moved in the XYθ direction relatively by the positioning means 8. In the substrate bonding apparatus for liquid crystal panels which performs coarse and fine alignment of both board | substrates A and B, and presses both board | substrates A and B to a predetermined gap further, Holding means (3) for holding the substrates (A, B) provided on opposite surfaces of the pressing plates (1, 2) in a non-movable manner, A moving sealing means 4 which can be elastically deformed in the up and down direction for supporting to move in the XYθ direction while maintaining the sealing state between the opposing peripheral edge portions 1a and 2a of the both pressure plates 1 and 2; , The two pressing plates 1 and 2 are moved relatively close to each other, so that the closed space S is partitioned so that the two substrates A and B are surrounded by the two pressing plates 1 and 2, and both the substrates A First pressing means (5) for approaching B to a predetermined interval, Intake means (6) for entering and exiting the gas in the closed space (S) to a predetermined vacuum degree; Second press means (7) for further accessing the two substrates (A, B) approached by the first press means (5) to a position where they are sealed with an annular adhesive (C); In the operating state of the first pressing means 5 and the second pressing means 7, positioning is disposed outside the closed space S in order to adjust and move the positive pressure plates 1, 2 relatively in the XYθ direction. Means (8) were provided, The substrate bonding apparatus for liquid crystal panels characterized by the above-mentioned. Two substrates A and B, which are held to be detachable with respect to the upper and lower pairs of pressure plates 1 and 2, respectively, are superimposed in a vacuum, and are adjusted and moved in the XYθ direction relatively by the positioning means 8. In the substrate bonding method for liquid crystal panels which performs coarse and fine alignment of both board | substrates A and B, and presses both board | substrates A and B to a predetermined gap further, Holding two substrates (A, B) on the opposite surfaces of both pressure plates (1, 2) in a non-movable manner, By the movement of the two pressing plates (1, 2) by close movement between the peripheral edge portions (1a, 2a) facing each other with a moving sealing means (4) that can be elastically deformed in the vertical direction, both the substrate (A, Partitioning the closed space S so as to enclose B), and simultaneously accessing both substrates A and B in the closed space S to a predetermined interval; Performing coarse alignment of both substrates A and B by adjusting and moving both pressing plates 1 and 2 relatively in the XYθ direction while extracting air in the closed space S; The moving sealing means 4 is deformed while the inside of the closed space S reaches a predetermined degree of vacuum so as to further approach the position where both the substrates A and B are sealed with the annular adhesive C; , Finely fitting the two substrates A and B closer to each other by adjusting and moving the pressing plates 1 and 2 in the XYθ direction relatively; The pressure difference generated inside and outside the two substrates A and B by releasing one of the substrates A and B from one of the pressure plates 1 and 2 to return the inside of the closed space S to atmospheric pressure. Pressing evenly to a predetermined gap by Such a step is performed sequentially, The substrate bonding method for liquid crystal panels characterized by the above-mentioned. 2. The second pressing means (7) according to claim 1, wherein the second pressing means (7) closes the recessed portions (1b) formed at the center of the opposing surface of the one pressing plate (1) and at the same time only the up and down direction which keeps the one substrate (A) immovable. Flexible thin plate material 7b which can elastically deform, The gas in the recessed portion 1b closed by the flexible thin plate 7b is made of a pressurized portion 7c deformed so that the flexible thin plate 7b expands toward the other substrate B at the time of fine fitting. The board | substrate bonding apparatus for liquid crystal panels characterized by the above-mentioned. The one substrate A is moved to the flexible thin plate material 7b which can be elastically deformed only in the up-down direction of closing the recessed part 1b formed in the center of the opposing surface 1 of the said one pressure plate 1, Keeping it impossible, Rough fitting by making the internal pressure of the closed recess 1b equal to the internal pressure of the closed space S; After this rough fitting, while the inside of the closed space S reaches a predetermined degree of vacuum, the flexible thin sheet material 7b is expanded and deformed by the increase in the internal pressure of the closed recess 1b, and is held there, while the one substrate A ) Has a step of moving closer toward the other substrate (B). The liquid crystal panel substrate bonding method according to claim 2 or 4, wherein an appropriate amount of liquid crystal is injected between both substrates (A, B) at a time point before performing the rough fitting.