JP3542956B2 - LCD panel substrate bonding equipment - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention provides a liquid crystal panel substrate bonding apparatus for aligning (roughly and finely) two liquid crystal panel substrates in a vacuum in a manufacturing process of a liquid crystal panel used for a liquid crystal display (LCD). Related to the bonding method. Specifically, two substrates, each detachably held on a pair of upper and lower pressing plates, are superposed in a vacuum, and are relatively adjusted and moved in the X, Y, and θ directions by positioning means to roughly and finely adjust the two substrates. The present invention also relates to a bonding apparatus and a bonding method for a liquid crystal panel substrate in which both substrates are pressed and crushed to a predetermined gap.
[0002]
[Prior art]
Conventionally, as shown in FIG. 5, for example, this type of liquid crystal panel substrate bonding apparatus and bonding method includes a pair of upper and lower pressing plates 1 'and 2' and an entire positioning means 8 'such as an XY table. A vacuum chamber 11 is formed so as to be openable and closable in the vertical direction so as to surround it. A drive shaft 8c 'connecting the positioning means 8' and a drive source 8b 'thereof is connected to the vacuum chamber 11 by a vacuum penetrating part 12 such as a bellows. It is provided through.
After the vacuum chamber 11 is closed and the inside thereof is evacuated, the positioning means 8 'is actuated by the drive shaft 8c' from the outside to adjust the two pressing plates 1 'and 2' relatively in the XYθ direction. By being moved, the substrates A and B are roughly and finely aligned.
[0003]
[Problems to be solved by the invention]
However, in such a conventional liquid crystal panel substrate bonding apparatus and bonding method, since the positioning means in the vacuum chamber is moved XYθ by external drive transmission to perform alignment, the vacuum penetrating component of the drive shaft is required. In addition to the increase in complexity, the cost of shutting off the vacuum inside and outside the vacuum chamber increases, and depending on the viscosity of the sealing material, a considerable force is required for rough alignment and fine alignment, and there is a problem that there are many restrictions on the driving form.
In addition, since the vacuum chamber surrounds the entire pair of upper and lower pressure plates and the positioning means, the space for vacuum becomes large, and the capacity of the vacuum pump needs to be increased, and the size of the usable substrate is limited. Therefore, there is a problem that a large-sized substrate cannot be manufactured.
[0004]
According to one aspect of the present invention is intended to be aligned with XYθ moves only between the upper platen and the lower platen remains that external was sealed.
[0005]
[Means for Solving the Problems]
In order to achieve the above-described object, the invention according to claim 1 of the present invention includes a holding unit that immovably holds a substrate provided on a facing surface of an upper surface plate and a lower surface plate ,
The upper platen and lower platen opposing relatively movably supported to that move the sealing means to the XYθ direction while maintaining the sealed state between the peripheral portion,
And relatively moved closer to the upper platen and lower platen, pressure of approaching with both substrates between these upper platen and the lower platen to define a closed space to be surrounded by the two substrates to a predetermined distance Means,
Suction means for taking in and out gas in the closed space to a predetermined degree of vacuum,
In the operating state of the upper Symbol pressurizing means, and a positioning means is disposed outside the closed space in order to adjust the movement of the upper platen and lower platen relatively in XYθ direction,
The moving block of the moving sealing means provided annularly so as to surround both substrates and the upper platen are integrally connected in the XYθ directions, and the upper surface of the moving block is in close contact with the peripheral portion of the upper platen and is compressed and deformed. A movable annular seal material is mounted, and a drive vacuum seal that is always in contact with the peripheral portion of the lower platen is mounted on the lower surface of the moving block .
The invention according to claim 2 has a structure in which a load receiving ball for supporting the drive vacuum seal so that a force such as the weight of an upper platen or a moving block does not act is added to the structure of the invention according to claim 1. It is characterized by having.
According to a third aspect of the present invention, in the configuration of the first or second aspect, a plurality of connecting pins are reciprocally movable up and down in the XYθ direction from the upper surface plate to the moving block. Is characterized by adding a configuration in which it is immovably inserted.
[0006]
[Action]
According to the first aspect of the present invention, the upper surface plate and the lower surface plate holding the two substrates move close to each other, so that the space between the peripheral portions is sealed by moving sealing means to form a closed space. The two substrates approach each other up to a predetermined interval. Thereafter, while bleeding air in the closed space, the upper platen and the lower platen are relatively adjusted and moved in the XYθ directions, and the two substrates are roughly adjusted to each other. After the degree of vacuum has been reached, the moving seal means is deformed to further approach the position where the two substrates are sealed with the annular adhesive. In this state, the upper platen and the lower platen are relatively moved in the XYθ direction. The substrate is released from only one of the upper surface plate and the lower surface plate, and the inside of the closed space is returned to the atmospheric pressure. A predetermined gap is formed by being evenly crushed by the resulting pressure difference Things.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In this embodiment, as shown in FIGS. 1 and 2, an upper pressing plate 1 is an upper platen supported so as to be able to reciprocate up and down but not move in XYθ directions. Is a lower platen supported on a fixed base plate 9 via a positioning means 8 such as an XY table so as to be adjustable in the XYθ direction. The lower platen is held by suction on the opposing surfaces of the upper platen 1 and the lower platen 2. The glass substrates A and B are aligned in a vacuum atmosphere.
[0008]
The upper stool 1 and the lower stool 2 are made of a rigid body such as metal or carbon. A plurality of suction holes are provided in the center of these opposing surfaces as holding means 3 for holding the substrates A and B immovably. The suction holes 3 are connected to a suction source (not shown) such as a vacuum pump by piping.
The operation of this suction source is controlled by a controller (not shown), and suction is started in an initial state in which both substrates A and B are set. After the suction of the substrate A is released and the closed space S described later returns to the atmospheric pressure, the suction of the lower substrate B is released to return to the initial state.
[0009]
These substrates A and B are composed of, for example, a color filter and a TFT substrate on which a desired pattern is formed, and are annularly bonded along one of these opposing surfaces, in the illustrated example, along the peripheral edge of the substrate B below. The agent C is applied in a frame shape, and a number of spacers (not shown) are sprayed on the other side as necessary.
[0010]
Further, between the peripheral portion 1a of the upper stool 1 and the peripheral portion 2a of the lower stool 2, a movable sealing means 4 for supporting the movable portions relatively in the XYθ directions while maintaining the hermetically sealed state therebetween is provided. Are provided in an annular shape so as to surround both substrates A and B.
In the case of the present embodiment, the moving seal means 4 includes a moving block 4a formed in a circular or rectangular cross section in accordance with the planar shape of the upper stool 1 and the lower stool 2, and an upper surface mounted on the upper surface of the moving block 4a. An annular sealing material 4b, such as an O-ring, which is elastically deformable in the vertical direction, such as an O-ring, which comes into contact with and separates from the peripheral portion 1a of the surface plate 1, and a peripheral portion 2a of the lower surface plate 2 mounted on the lower surface of the moving block 4a. Accordingly, the drive vacuum seal 4c is made of, for example, vacuum grease, and a load receiving ball 4d that supports the drive vacuum seal 4c so that a force such as the weight of the upper platen 1 or the moving block 4a does not act on the drive vacuum seal 4c. .
[0011]
In particular, if necessary, in order to connect the upper surface plate 1 and the moving block 4a integrally in the XYθ directions, a plurality of connecting pins 4e are vertically extended from the upper surface plate 1 to the moving block 4a. Although it is reciprocally movable, it is preferable that the movable block 4a and the lower platen 2 are inserted so as to be immovable in the X, Y, and θ directions. Is preferably crossed over.
[0012]
The upper platen 1 is provided with a first pressurizing means, such as a vertical drive cylinder, as indicated by reference numeral 5 in FIG.
The operation of the first pressurizing means 5 is controlled by a controller (not shown). In an initial state in which the substrates A and B are set, the upper platen 1 as shown by a dashed line in FIG. 1 and FIG. After the substrates A and B have been set, the upper platen 1 is lowered as shown in the solid line of FIG. 1 and FIG. A partition is formed so as to surround both substrates A and B, and after the fine alignment of both substrates A and B is completed, or after a closed space S described later returns to the atmospheric pressure, it is raised and returned to the initial state.
[0013]
The closed space S is communicated with, for example, a vacuum pump provided outside as shown by reference numeral 6 in FIG. Is provided.
The operation of the suction means 6 is controlled by a controller (not shown), and after the closed space S is formed by the approaching movement of the upper surface plate 1 and the lower surface plate 2, air suction is started from the closed space S. After the completion of the fine adjustment of B, air is supplied to the closed space S to return to the atmospheric pressure.
[0014]
Further, there is provided a second pressurizing means 7 for bringing the two substrates A and B brought closer by the first pressurizing means 5 closer to a position where the substrates A and B are closed by the annular adhesive C. In the case of the present embodiment, the second pressurizing means 7 comprises a vertically expandable and contractible cylinder 7a disposed from the upper surface of the moving block 4a toward the peripheral portion 1a of the upper platen 1. Is shortened in the vertical direction to compress and deform the annular seal 4b in the vertical direction, so that the substrates A and B are further pressed.
Further, the operation of the second pressurizing means 7 is controlled by a controller (not shown), and in the initial state, the second pressurizing means 7 extends in the vertical direction as shown in FIG. Thereafter, as shown in FIG. 2 (c), the length is shortened, and after fine alignment of the two substrates A and B is completed, or after a closed space S described later returns to the atmospheric pressure, it is raised and returned to the initial state.
[0015]
On the bottom surface of the lower stool 2 outside the closed space S, for example, an XY table 8a and a positioning means 8 including a drive source 8b for moving the lower stool 2 in the XYθ direction are continuously provided. By operating the drive source 8b based on the data output from the detection means 8c composed of a microscope and a camera, the lower platen 2 and the lower substrate B held by the lower platen XYθ are displayed on the marks displayed on the substrates A and B. Adjusting and moving in the direction, rough and fine adjustments are performed.
[0016]
Further, if necessary, the central portion of the opposing surface of the upper surface plate 1 and the lower surface plate 2 which comes into contact with both substrates A and B may be made of a material having excellent cushioning properties, but in the XYθ direction by the positioning means 8. The cushioning member 10 may be provided so as to have a thickness such that no positional deviation occurs during the adjustment movement.
In the case of the illustrated example, the cushioning material 10 having a thickness of several mm is provided only on the facing surface 2b of the lower surface plate 2, but the present invention is not limited thereto. Alternatively, the cushioning material 10 may be provided only on the facing surface of the upper stool 1.
[0017]
Next, a method of bonding the liquid crystal panel substrate will be described in the order of steps. First, as shown in FIG. 2A, substrates A and B are pre-aligned and set on opposing surfaces of an upper surface plate 1 and a lower surface plate 2, respectively.
As a result, both substrates A and B are suction-held by the holding means 3 so as to be immovable.
[0018]
Thereafter, the upper platen 1 and the lower platen 2 are brought close to each other by the operation of the first pressurizing means 5 as shown in FIG. 2 (b), and the peripheral portion 1a of the upper platen 1 comes into close contact with the annular seal 4b. A closed space S is defined between the board 1 and the lower stool 2 so as to surround the two substrates A and B thus held.
[0019]
At the same time, the substrates A and B approach each other up to a predetermined interval due to the approach movement of the upper surface plate 1 and the lower surface plate 2, and confront each other with a gap of 1 mm or less in this state.
However, the annular adhesive C applied to one of the substrates B does not contact the other substrate A, and the closed space S communicates between the two substrates A and B.
[0020]
Thereafter, the air is evacuated from the closed space S by the operation of the suction means 6 to achieve a predetermined degree of vacuum, and the air is also evacuated from between the substrates A and B to create a vacuum.
In this state, the upper surface plate 1 and the lower surface plate 2 are relatively adjusted and moved in the XYθ directions by the operation of the positioning means 8, so that the two substrates A and B are roughly aligned.
[0021]
Then, when a predetermined degree of vacuum is reached, the upper platen 1 and the lower platen 2 are further approached as shown in FIG. 2C by the operation of the second pressurizing means 7 to compress and deform the annular seal 4b. The two substrates A and B come closer to each other, and the other substrate A comes into close contact with the annular adhesive C applied to the one substrate B, so that the two are sealed.
In this state, the upper surface plate 1 and the lower surface plate 2 are relatively adjusted and moved in the X, Y, and θ directions by the operation of the positioning means 8, so that the two substrates A and B are finely adjusted.
[0022]
Thereafter, as shown in FIG. 2D, the suction of the upper substrate A is released only from the upper surface plate 1 by the operation of the holding means 3, and air is introduced into the closed space S by the operation of the suction means 6 to reduce the atmosphere. Return to atmospheric pressure.
Thereby, the substrates A and B are evenly crushed by a pressure difference between the inside and outside of the substrates, and a predetermined gap is formed.
[0023]
At this time, if a proper amount of liquid crystal is sealed in a proper state at the time before the rough alignment is performed, specifically, when the substrates A and B are set, the atmosphere in the closed space S is returned to the atmospheric pressure, and The gaps are evenly crushed by the pressure difference between the inside and outside of the substrates A and B, and a predetermined gap can be formed in a state where the liquid crystal is sealed. Thus, a liquid crystal panel can be manufactured without injecting the liquid crystal in a later process.
[0024]
Thereafter, when the inside of the closed space S returns to the atmospheric pressure, the closed space S is opened by the operation of the first pressurizing means 5 to separate the upper surface plate 1 and the lower surface plate 2, and the aligned substrates A, B And the above-described operation is repeated.
[0025]
Therefore, alignment can be performed by moving XYθ outside the upper surface plate 1 and the lower surface plate 2 while keeping only the space between the upper surface plate 1 and the lower surface plate 2 in a sealed state.
As a result, the positioning means 8 and its driving source 8b can be installed in the atmosphere, normal components can be used, and there are no vacuum penetrating components, thereby simplifying the structure and increasing the cost of vacuum shut-off. Since there is no need for a considerable force for rough alignment or fine alignment, there is no restriction on the driving mode.
In addition, the vacuum space can be minimized, and the capacity of the vacuum pump can be reduced accordingly, so that a large substrate can be manufactured with high productivity.
[0026]
Further, if necessary, a cushioning material 10 which is excellent in cushioning property and does not generate a positional shift when performing adjustment movement in the XYθ direction is disposed on one or both of the opposing surfaces of the upper surface plate 1 and the lower surface plate 2. When it is provided, it is possible to prevent the upper surface plate 1 and the lower surface plate 2 from coming into contact with each other and to easily form a uniform gap.
[0027]
On the other hand, what is shown in FIGS. 3 and 4 is another embodiment of the present invention, in which the second pressing means 7 moves from the upper surface of the moving block 4a to the peripheral portion 1a of the upper platen 1. Instead of the vertically extending and retractable cylinder 7a disposed toward the upper surface plate 1, a concave portion 1b formed at the center of the facing surface of the upper surface plate 1 is closed, and the upper substrate A is elastically deformable only in the vertical direction to keep the upper substrate A immovable. The flexible thin plate member 7b and the gas in the concave portion 1b closed by the flexible thin plate member 7b are taken in and out so that the flexible thin plate member 7b swells downward toward the substrate B during fine alignment. The configuration including the pressurizing portion 7c to be deformed is different from the embodiment shown in FIGS. 1 and 2, and the other configuration is the same as the embodiment shown in FIGS. 1 and 2.
[0028]
The flexible thin plate member 7b is formed so as to be elastically deformable in a vertical direction such as a metal film such as stainless steel but is not deformable in the XYθ directions. A hole is drilled.
The operation of the pressurizing section 7c is controlled by a controller (not shown), and the internal pressure of the closing recess 1b is closed by the intake means 6 until the state shown in FIG. 4A and the rough adjustment shown in FIG. Air is taken in and out so as to be the same as the internal pressure in the space S, and air is introduced only after the rough adjustment so that the internal pressure in the closed concave portion 1b becomes larger than the internal pressure in the closed space S as shown in FIG.
[0029]
Therefore, the one shown in FIG. 3 and FIG. 4 shows that after the rough alignment, the flexible thin plate member 7b swells and deforms due to an increase in the internal pressure of the closed recess 1b, as shown in FIG. By further bringing A closer to the lower substrate B and sealing between them with the annular adhesive C, the substrates A and B are evenly crushed to near the final gap at the time of fine alignment.
As a result, compared to the embodiment shown in FIGS. 1 and 2, the rigid upper platen 1 and lower platen 2 reduce the local pressure between the substrates A and B due to the flatness of the facing surface and the parallel accuracy between the platens. Although it is easy to invite, there is an advantage that the local pressurization between the substrates A and B can be completely prevented and the product is not damaged.
[0030]
In the embodiment described above, it is assumed that the upper pressing plate 1 is an upper platen capable of reciprocating vertically and the lower pressing plate 2 is a lower platen supported movably in the XYθ directions. However, the present invention is not limited to this, and conversely, the upper platen may be supported so as to be adjustable and movable in the XYθ directions, and the lower platen may be supported so as to be reciprocable vertically.
Furthermore, although the case where alignment is performed in a vacuum atmosphere has been described, the present invention is not limited to this, and the same applies to the case where alaminate is performed in a special gas atmosphere.
Further, the holding means 3, the moving sealing means 4, the first pressing means 5, the suction means 6, the second pressing means 7 and the positioning means 8 for the substrates A and B are not limited to the structures shown in the drawing, but similarly. Other structures may be used as long as they work.
In particular, the holding means 3 for holding the substrates A and B immovably can use vacuum suction utilizing a vacuum difference if the degree of vacuum in the closed space S by the suction means 6 is low vacuum. When the inside of the closed space S becomes high vacuum to the extent that it cannot be used, the substrates A and B need to be immovably held by using an electrostatic chuck or an adhesive film as the holding means 3.
Further, a magnetic fluid type vacuum seal may be used in place of the driving vacuum seal 4c of the moving sealing means 4.
[0032]
【The invention's effect】
As described above, the invention of claim 1 Symbol placement of the present invention is that two of the upper surface plate and lower surface plate which holds the substrate is moved closer, between the periphery of each other in the moving sealing means A closed space is defined by hermetic sealing, and both substrates approach each other up to a predetermined distance. Thereafter, while bleeding air from the closed space, the upper and lower stools are relatively adjusted and moved in the XYθ directions. After the two substrates are roughly aligned and reach a predetermined degree of vacuum, the moving sealing means is deformed to further approach the position where the two substrates are sealed with the annular adhesive. In this state, The upper surface plate and the lower surface plate are adjusted and moved relatively in the XYθ direction, and fine adjustment of both substrates is performed. Thereafter, the substrate is released from only one of the upper surface plate and the lower surface plate, and the inside of the closed space is moved. By returning to atmospheric pressure, the pressure is evenly distributed by the pressure difference between the inside and outside of both substrates. Since a predetermined gap is formed by crushing, it is possible to perform XYθ movement outside for alignment while keeping only the space between the upper surface plate and the lower surface plate in a sealed state.
Therefore, the positioning means and its driving source can be installed in the atmosphere as compared with the conventional method in which the positioning means in the vacuum chamber is moved by XYθ by external drive transmission, so that normal components can be used and the vacuum penetration can be performed. There are no parts, and as a result, the structure can be simplified, and there is no cost for breaking off the vacuum, and no considerable force is required for rough or fine adjustment, so that there is no restriction on the driving form.
In addition, the vacuum space can be minimized, and the capacity of the vacuum pump can be reduced accordingly, so that a large substrate can be manufactured with high productivity.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional front view of a liquid crystal panel substrate bonding apparatus according to an embodiment of the present invention.
FIGS. 2A to 2D are explanatory views showing a method of manufacturing a liquid crystal panel in the order of steps.
FIG. 3 is a longitudinal sectional front view of a liquid crystal panel substrate bonding apparatus according to another embodiment of the present invention.
FIGS. 4A to 4D are explanatory views showing a method of manufacturing a liquid crystal panel in the order of steps.
FIG. 5 is a longitudinal sectional front view showing an example of a conventional liquid crystal panel substrate bonding apparatus.
[Explanation of symbols]
A, B substrate C annular adhesive S closed space 1 pressure plate (upper platen)
1a Peripheral edge 1b Recess 2 Pressing plate (lower platen) 2a Peripheral edge 3 Holding means 4 Moving sealing means 5 First pressing means 6 Inhaling means 7 Second pressing means 7b Flexible thin plate material 7c Pressing section 8 Positioning means

Claims (3)

The two substrates (A, B) detachably held on the upper surface plate (1) and the lower surface plate (2) are partitioned between the upper surface plate (1) and the lower surface plate (2). the formed vacuum closed space between superimposed within (S), performs alignment of two substrates to adjust moved relatively XYθ direction by the positioning means (8) (a, B), further two substrates (a, B In a device for bonding a substrate for a liquid crystal panel, which is crushed to a predetermined gap by a pressure difference generated inside and outside of the liquid crystal panel,
Holding means (3) for immovably holding substrates (A, B) provided on opposing surfaces of the upper surface plate (1) and the lower surface plate (2) ;
Upper platen (1) and the opposing periphery of the lower surface plate (2) and (1a, 2a) you relatively movably supported to the XYθ direction while maintaining the sealed state between moving sealing means (4) ,
The upper surface plate (1) and the lower surface plate (2) are moved relatively close to each other, and closed between the upper surface plate (1) and the lower surface plate (2) so that both substrates (A, B) are surrounded. Pressurizing means (5, 7) for partitioning the space (S) and bringing the two substrates (A, B) closer to a predetermined distance;
Suction means (6) for taking in and out gas in the closed space (S) to make a predetermined degree of vacuum;
In the operating state of the upper Symbol pressurizing means (5,7), positioning which is arranged in closed space (S) out of order to adjust moving the upper platen (1) and the lower surface plate (2) to relatively XYθ direction and means (8),
The moving block (4a) of the moving sealing means (4) and the upper platen (1), which are provided annularly so as to surround both substrates (A, B), are integrally connected in the XYθ direction. ) Is provided with an annular seal member (4b) which is in close contact with the peripheral portion (1a) of the upper platen (1) and which can be compressed and deformed, and the lower surface of the lower platen (2) is mounted on the lower surface of the moving block (4a). A device for bonding a substrate for a liquid crystal panel, comprising a driving vacuum seal (4c) which is always in contact with a peripheral portion (2a) . Upper platen on the driving vacuum seal (4c) ( 1 ) Receiving ball (4d) that supports so that a force such as the weight of the moving block (4a) or the like does not act. An apparatus for bonding a substrate for a liquid crystal panel according to claim 1. A plurality of connecting pins (4e) are inserted through the upper platen (1) from the upper platen (1) to the moving block (4a) so as to be able to reciprocate up and down but not move in the XYθ directions. 3. The apparatus for bonding a substrate for a liquid crystal panel according to 2.

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