JP2007102198A - Positioning device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a positioning device capable of bearing an external force applied to a work although the device is simple and compact. <P>SOLUTION: Since the reverse surface of a table 10 elastically supported by a leaf spring 9 abuts against an abutting part 1a when an external force larger than a specified value is applied, so only the elastic force of the leaf spring 9 which is relatively small is applied to guides of stages 3, 6, and 8 and the abutting part 1a bears the majority of the external force applied from a holder H. Consequently, the guides of the stages 3, 6, and 8 may have small capacities and the constitution of the positioning device can be made simple and compact since the strength of a member in a force transmission path may be small. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a positioning device capable of positioning a workpiece or the like.

For example, in a liquid crystal panel manufacturing apparatus or the like, two liquid crystal panel substrates coated with an adhesive are relatively positioned, and an external force is applied in a close contact direction to bond them together (Patent Document 1). ).
JP 2002-131762 A

  However, in the technique of Patent Document 1, the adhesion force transmitted to the two liquid crystal panel substrates is transmitted via a guide bearing that supports a positioning table. Here, depending on the sealing member between the two liquid crystal panel substrates, the external force required for bonding must be increased. However, in order to support such a large external force, it is necessary to increase the capacity of the guide bearing, and it is also necessary to increase the strength of the members in the force transmission path, thereby increasing the size of the entire device. There is a problem of inviting. This is a problem in that, particularly when two liquid crystal panel substrates are bonded in a vacuum, the vacuum chamber for accommodating the positioning device is enlarged, and the time required to obtain a vacuum environment necessary for the processing becomes long. Give rise to

  The present invention has been made in view of the problems of the prior art, and an object thereof is to provide a positioning device that can support an external force applied to a workpiece while being simple and compact.

The positioning device of the present invention comprises:
A base having a contact portion;
A support that is movable relative to the base;
A table supported by the support part;
A spring member connecting the support and the table;
A guide that movably supports the support portion with respect to the base,
When an external force equal to or greater than a predetermined value is applied, the spring member is elastically deformed, so that the table contacts the contact portion of the base, and when the external force falls below the predetermined value, the table is It is characterized by being separated from the abutment portion.

  According to the positioning device of the present invention, when an external force of a predetermined value or more is applied to the table, the spring member is elastically deformed, so that the table contacts the contact portion of the base, and the external force is When the value falls below a predetermined value, the table is separated from the abutting portion of the base. Therefore, by applying no external force, the table can be arbitrarily moved to position the table separated from the abutting portion. . On the other hand, by applying such an external force, the table comes into contact with the contact portion, so that most of the external force can be supported by the contact portion instead of the guide, thereby making the guide compact. You can do it.

  The support unit is configured to have a first direction (for example, an X-axis direction), a second direction (for example, a Y-axis direction) orthogonal to the first direction, and a rotation direction (for example, about the θ axis) with respect to the base ) Is preferably movably guided.

  The spring member is preferably a leaf spring.

  Further, the positioning device according to claim 4 is disposed in a chamber maintained in a vacuum atmosphere, and the driving source for driving the support portion is disposed outside the chamber. Therefore, the cost can be reduced and the size of the chamber can be reduced.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a top view of the positioning device according to the first embodiment, and FIG. 2 is a view of the configuration of FIG. 1 taken along line II-II and viewed in the direction of the arrow. The positioning device can be used in a vacuum chamber.

  In FIG. 2, a pair of guide rails 2, 2 extending in the direction perpendicular to the paper surface is disposed on the base 1. Further, sliders 4 and 4 are disposed on the lower surface of the X-axis stage 3 disposed above the base 1 and are movable along the guide rails 2 and 2, respectively. The X-axis stage 3 has an opening 3 a in the center, and is driven along the guide rails 2 and 2 by an X-axis actuator 3 b disposed on the base 1. The guide rails 2 and 2 and the sliders 4 and 4 constitute a guide in the X-axis direction.

  On the X-axis stage 3, a pair of guide rails 5 and 5 extending in the left-right direction in FIG. Further, sliders 7 and 7 are disposed on the lower surface of the Y-axis stage 6 disposed above the X-axis stage 3, and can be moved along the guide rails 5 and 5, respectively. The Y-axis stage 6 has an opening 6a at the center, and is driven along the guide rails 5 and 5 by a Y-axis actuator 6b disposed on the X-axis stage 3. The guide rails 5 and 5 and the sliders 7 and 7 constitute a guide in the Y-axis direction.

  An annular θ-axis stage 8 is arranged on the Y-axis stage 6 by a guide (not shown) so as to be relatively rotatable. The donut-plate-shaped θ-axis stage 8 is rotationally driven around the central axis (referred to as the θ-axis) of the θ-axis stage 8 by a θ-axis actuator 8 a disposed on the Y-axis stage 6. Outer ends of three leaf springs 9 as spring members are attached to the upper surface of the θ-axis stage 8 at equal intervals in the circumferential direction, and each leaf spring 9 extends radially inward. Yes. The inner end of each leaf spring 9 is joined to the upper surface of a circular table 10 disposed in a non-contact state inside the θ-axis stage 8. Stages 3, 6 and 8 constitute a support part.

  A cylindrical portion 1 a that is a contact portion is formed on the upper surface of the base 1, passes through the opening 3 a of the X-axis stage 3 and the opening 6 a of the Y-axis stage 6, and the upper surface is positioned below the table 10. It is supposed to be. When an external force exceeding a predetermined value exceeding the weight of the workpiece W is not applied to the table 10, the table 10 is supported only by the leaf spring 9, and at that time, a touchdown is performed between the table 10 and the cylindrical portion 1a. A gap Δ (several tens to several hundreds μm) is generated. In addition, in order to prevent welding at the time of touchdown, the table 10 and the cylindrical portion 1a are formed using hardened steel (SUS440C or the like), or a vacuum is formed on the facing surface where the table 10 and the cylindrical portion 1a are in close contact with each other. It is preferable to apply grease or the like.

  The operation of this embodiment will be described. A panel substrate W1 is placed on the table 10, an adhesive is applied to the upper surface of the panel substrate W1, and the holder H is fixed to a housing (not shown) so as to overlap the panel substrate W1 (FIG. 2). And the actuators 3b, 6b, and 8a are driven around the X axis direction, the Y axis direction, and the θ axis to appropriately position the panel substrates W1 and W2.

  Thereafter, the holder H is driven to press the panel substrate W2 toward the panel substrate W1 with an external force equal to or greater than a predetermined value. In this case, the leaf spring 9 is elastically deformed, so that the lower surface of the table 10 comes into contact with the cylindrical portion 1a and can support the applied external force. After maintaining the external force for about 1 minute, the holder H stops holding the panel substrate W2 and retreats upward, so that the panel substrates W1 and W2 bonded by the solidified adhesive can be obtained.

  According to the present embodiment, when an external force of a predetermined value or more is applied, the lower surface of the table 10 that is elastically supported by the leaf spring 9 comes into contact with the cylindrical portion 1a. Since only the elastic force of the relatively small leaf spring 9 is applied, and most of the external force applied from the holder H is supported by the contact portion 1a, the guides of the stages 3, 6, and 8 are used. Therefore, the structure of the positioning device can be simplified and made compact. On the other hand, when the table 10 is driven around the X-axis direction, the Y-axis direction, and the θ-axis, the table 10 is in a non-contact state with the cylindrical portion 1a, so that smooth and accurate positioning is possible.

  FIG. 3 is a top view of the positioning device according to the second embodiment, and FIG. 4 is a view of the configuration of FIG. 3 taken along line IV-IV and viewed in the direction of the arrow. In FIG. 3, the horizontal direction is the X-axis direction, and the vertical direction is the Y-axis direction.

  In FIG. 4, the upper part of the base 101 is covered with a housing-like chamber 102, and the inside is maintained in a vacuum atmosphere. A rectangular plate-shaped guide portion 103 having a circular opening 103a is disposed on the upper surface of the base 101, and a disk portion 101a as a contact portion is formed on the upper surface of the base 101 in the circular opening 103a.

  Above the guide portion 103, a rectangular plate-like support portion 104 having a circular opening 104a is also arranged. Four planar ball bearings 105 are disposed between the guide portion 103 and the support portion 104.

  FIG. 5 is a view of the configuration of FIG. 4 taken along the line VV and viewed in the direction of the arrow. FIG. 6 is a view of the configuration of FIG. 5 taken along the line VI-VI and viewed in the direction of the arrow. 5 and 6, the flat ball bearing 105 includes nine balls 105a and a rectangular plate-shaped cage 105b having a circular pocket for accommodating the balls 105a. The ball 105 a rolls between the support portion 104 and the guide portion 103, so that the support portion 104 can be displaced relative to the guide portion 103 in the X-axis and Y-axis directions and the rotation direction (referred to as the θ-axis direction). It has become. On the upper surface of the guide portion 103, protrusions 103a that function as stoppers are disposed corresponding to the respective side surfaces of the cage 105b, and when the relative movement amount between the support portion 104 and the guide portion 103 exceeds a predetermined range, The flat ball bearing 105 is prevented from dropping from the guide portion 103 by contacting the side surface of the cage 105b.

  FIG. 7 is a sectional view similar to FIG. 6, showing a flat ball bearing 105 'according to a modification. In FIG. 7, a rectangular or circular recess 103b is formed on the upper surface of the guide portion 103, and a ball 105a is accommodated therein. According to such a modification, the cage is not necessary, and the balls 103 a are prevented from falling from the guide portion 103 regardless of the relative movement amount between the support portion 104 and the guide portion 103.

  FIG. 8 is a view of a flat ball bearing 105 ″ according to another modification as viewed from above in the axial direction. In FIG. 8, a donut plate-like cage around the circular opening 103a is formed on the upper surface of the guide portion 103. 105b ″ is arranged, and balls 105a are arranged in pockets arranged in the circumferential direction. Although not shown, if a short wall extending in the circumferential direction is provided at the edge of the circular opening 103a of the guide portion 103, this will function as a stopper for the cage 15b ″, so that the support portion 104 and the guide portion 103 Regardless of the relative movement amount, the flat ball bearing 105 ″ is prevented from dropping from the guide portion 103.

  3 and 4, the outer ends of three leaf springs 106 as spring members are attached to the upper surface of the support portion 104 at equal intervals in the circumferential direction, and each leaf spring 106 is in the radial direction of the circular opening 104a. It extends inward. The inner end of each leaf spring 106 is joined to the upper surface of a disk-like table 107 disposed in a non-contact state inside the circular opening 104a. A work (not shown) is placed on the table 107.

  Here, when an external force exceeding a predetermined value exceeding the weight of the workpiece is not applied to the table 107, the table 107 is supported only by the leaf spring 106. At that time, between the table 107 and the disk portion 101a, Touchdown clearance Δ (several tens to several hundreds μm) is generated. In order to prevent welding or the like at the time of touchdown, the table 107 and the disk portion 101a are formed using hardened steel (SUS440C or the like), or vacuum grease is applied to the facing surface where the table 107 and the disk portion 101a are in close contact with each other. Etc. are preferably applied.

  Note that a preload is always applied to the flat ball bearing 105 due to the weight of the support portion 104 and the table 107, but when the weight is insufficient, a preload mechanism PS as shown by a dotted line in FIG. 3 is provided. In addition, a preload can be applied to the flat ball bearing 105 in an auxiliary manner. As the preload mechanism PS, a configuration in which the support portion 104 is urged toward the guide portion 103 by using an urging force of a spring or a magnetic attraction force can be considered.

  The outside of the chamber 102 is an atmospheric environment. Outside the chamber 102, two motors 109 </ b> A and 109 </ b> B as drive sources are fixed on a support base 108 x with their axes parallel to the horizontal direction (X-axis direction) in FIGS.

  The rotating shafts 110A and 110B of the motors 109A and 109B are connected to the outer couplings 111A and 111B. The outer couplings 111A and 111B are connected to the shafts 113A and 113B of the magnetic seal units 112A and 112B attached to the openings 102a and 102b of the chamber 102, respectively. Although not shown, the magnetic seal units 112A and 112B include a bearing that supports the shafts 113A and 113B, a permanent magnet, and a magnetic fluid that is captured by the permanent magnet and seals the space around the shafts 113A and 113B. It is provided inside and functions to prevent the movement of gas or the like through the openings 102a and 102b and maintain the vacuum environment in the chamber 102. In place of the magnetic fluid seal as described above, a seal unit using a magnetic coupling, a differential exhaust seal, an O-ring, or the like may be used (see Japanese Patent Application Laid-Open No. 2003-314572).

  The shafts 113A and 113B of the magnetic seal units 112A and 112B are connected to the inner couplings 114A and 114B. The inner couplings 114A and 114B are connected to the screw shafts 116A and 116B of the ball screw units BSA and BSB, which are rotatably supported by the support columns 115A and 115B provided upright on the base 101 via bearings BRA and BRB. ing.

  On the base 101, guide rails 117A and 117B are provided so as to extend in parallel in the left-right direction (X-axis direction) in FIGS. On the guide rails 117A and 117B, sliders 118A and 118B are arranged so as to be movable in the X-axis direction. The sliders 118A and 118B are attached to the lower surfaces of the brackets BKA and BKB to which the nuts 119A and 119B of the ball screw units BSA and BSB are fitted and fixed. Therefore, the rotational motion of the screw shafts 116A and 116B is converted into the axial direction (X-axis direction) motion of the nuts 119A and 119B.

  Guide rails 120A and 120B are attached to the first side surface 104b of the support unit 104 so as to extend in the horizontal direction (direction parallel to the XY plane). On the guide rails 120A and 120B, sliders 121A and 121B are disposed so as to be relatively movable along the extending direction of the guide rails 120A and 120B, although they cannot be separated. The sliders 121A and 121B are inserted through pins 122A and 122B that are implanted at the ends of the brackets BKA and BKB and extend in the direction perpendicular to the plane of the drawing in FIG. They are fitted so that they can rotate relative to each other.

  Outside the chamber 102, a motor 109C as a drive source is fixed on the support base 108y so that its axis is orthogonal to the axes of the motors 109A and 109B (that is, parallel to the Y-axis direction). .

  The rotation shaft 110C of the motor 109C is connected to the outer coupling 111C. The outer coupling 111C is connected to the shaft 113C of the magnetic seal unit 112C mounted in the opening 102c of the chamber 102. Similar to the magnetic seal units 112A and 112B, the magnetic seal unit 112C functions to prevent gas movement through the opening 102c and maintain a vacuum environment in the chamber 102.

  The shaft 113C of the magnetic seal unit 112C is connected to the inner coupling 114C. The inner coupling 114C is connected to a screw shaft 116C of a ball screw unit BSC that is rotatably supported by a support column 115C standing on the base 101 via a bearing (not shown).

  A guide rail (not shown) is provided on the base 101 so as to extend in the vertical direction (Y-axis direction) in FIG. On such a guide rail, a slider (not shown) is disposed so as to be movable along the Y-axis direction. Such a slider is attached to the lower surface of the bracket BKC to which the nut 119C of the ball screw unit BSC is fitted and fixed. Therefore, the rotational motion of the screw shaft 116C is converted into the axial direction (Y-axis direction) motion of the nut 119C.

  A guide rail 120C is attached to the second side surface 104c orthogonal to the first side surface 104b of the support portion 104 so as to extend in the horizontal direction (direction parallel to the XY plane). On the guide rail 120C, the slider 121C is not separable, but is disposed so as to be relatively movable along the extending direction of the guide rail 120C. The slider 121C is inserted through an end of the bracket BKC and inserted through a pin 122C extending in the direction perpendicular to the paper surface in FIG.

  When electric power is supplied to the motor 109A, the rotating shaft 110A rotates, so that the screw shaft 116A of the ball screw unit BSA rotates, and the nut 119A moves in the axial direction along the guide rail 117A. As a result, the guide rail 120A is pushed (or pulled) via the bracket BKA, the pin 122A, and the slider 121A, so that the support portion 104 is displaced accordingly.

  When electric power is supplied to the motor 109B, the rotating shaft 110B rotates, so that the screw shaft 116B of the ball screw unit BSB rotates and the nut 119B moves in the axial direction along the guide rail 117B. Accordingly, the guide rail 120B is pushed (or pulled) via the bracket BKB, the pin 122B, and the slider 121B, and the support portion 104 is displaced accordingly.

  Further, when electric power is supplied to the motor 109C, the rotating shaft 110C rotates, so that the screw shaft 116C of the ball screw unit BSC rotates and the nut 119C moves in the axial direction along the guide rail 117C. Accordingly, the guide rail 120C is pushed (or pulled) via the bracket BKC, the pin 122C, and the slider 121C, and the support portion 104 is displaced accordingly.

  In FIG. 3, it is clear from the geometric relationship, for example, if the rotation shafts 110A and 110B of the motors 109A and 109B are rotated in the same direction by the same amount, the support portion 104 can be driven in any of the X-axis directions. . As a result, the table 107 connected to the spring plate 106 can be displaced by a predetermined amount in the X-axis direction for each workpiece placed thereon.

  Further, for example, if the rotation shaft 110C of the motor 109C is rotated, the support portion 104 can be driven in any one of the Y-axis directions. As a result, the table 107 connected to the spring plate 106 can be displaced by a predetermined amount in the Y-axis direction together with the workpiece placed thereon.

  In addition, for example, if the rotation shafts 110A and 110B of the motors 109A and 109B are rotated by the same amount in different directions, the force transmitted from the nut 119A to the guide rail 120A via the pin 122A and the slider 121A and the nut 119B Since the force transmitted to the guide rail 120B via the pins 122B and the slider 121B balances in the opposite direction, the support portion 104 rotates around the center of the axis orthogonal to the XY plane. As a result, the table 107 connected to the spring plate 106 can be displaced by a predetermined amount in the θ-axis direction for each work placed thereon. Then, by appropriately selecting the rotation direction and rotation amount of each motor 109A, 109B, 109C, the table 107 can be arbitrarily positioned within the adjustable range in the XY plane for each workpiece placed on it. Can do.

  For example, as in the above-described embodiment, a panel substrate (not shown) is placed on the table 107, an adhesive is applied to the upper surface of the panel substrate, and then overlapped with the panel substrate. Another panel substrate (not shown) held by a holder (not shown) fixed to the housing shown in the figure is arranged and driven in the X-axis direction, the Y-axis direction, and the θ-axis direction as described above. Properly position the substrates relative to each other.

  Thereafter, the holder is driven, and the upper panel substrate is pressed toward the lower panel substrate by an external force of a predetermined value or more. In such a case, the plate spring 106 is elastically deformed, so that the lower surface of the table 107 abuts on the disk portion 101a and can support the applied external force. After a predetermined time, the holder retreats upward, whereby a panel substrate bonded with the solidified adhesive can be obtained.

  According to the present embodiment, when an external force of a predetermined value or more is applied, the lower surface of the table 107 elastically supported by the leaf spring 106 abuts on the disk portion 101a. Only the relatively small elastic force of the leaf spring 106 is applied through 105, and most of the applied external force is supported by the disk portion 101a. Since the support rigidity of the member can be reduced and the strength of the members in the force transmission path can be reduced, the configuration of the positioning device can be simplified and made compact. On the other hand, when the table 107 is driven in the X-axis direction, the Y-axis direction, and the θ-axis direction, the table 107 is not in contact with the disk portion 101a, so that smooth and accurate positioning is possible.

  Furthermore, according to the present embodiment, since the motors 109A, 109B, and 109C are arranged outside the chamber 102, it is not necessary to use a vacuum-compatible motor, and the cost can be reduced. Further, there is no need to provide dedicated movable stages for movement in the X-axis direction, the Y-axis direction, and the θ-axis direction, and the support unit 104 can be driven in the same plane by the X-axis direction, the Y-axis direction, and the θ-axis. Since it can be driven in the direction, a compact positioning device can be provided while suppressing the dimension in the height direction.

  The present invention has been described above with reference to the embodiments. However, the present invention should not be construed as being limited to the above-described embodiments, and can be modified or improved as appropriate. The shape and number of leaf springs can be set arbitrarily, but are not limited to leaf springs. For example, a coil spring appropriately selected depending on the application and load, table 10 and stage 6, or table 107 and support portion. It is also possible to interpose it with 104. The positioning device of the present invention can be used not only for bonding panels but also for various applications.

It is a top view of the positioning device concerning a 1st embodiment. It is the figure which cut | disconnected the structure of FIG. 1 by the II-II line | wire, and looked at the arrow direction. It is a top view of the positioning device concerning a 2nd embodiment. It is the figure which cut | disconnected the structure of FIG. 3 by the IV-IV line and looked at the arrow direction. It is the figure which cut | disconnected the structure of FIG. 4 along the VV line and looked at the arrow direction. It is the figure which cut | disconnected the structure of FIG. 5 along the VI-VI line and looked at the arrow direction. It is sectional drawing similar to FIG. 6 which shows the flat ball bearing 105 'concerning a modification. It is the figure which looked at the flat ball bearing 105 '' concerning another modification from the axial direction upper direction.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Base 1a Cylindrical part 2,2 Guide rail 3 X-axis stage 3a Opening 3b X-axis actuator 4,4 Slider 5,5 Guide rail 6 Y-axis stage 6a Opening 6b Y-axis actuator 7,7 Slider 8 θ-axis stage 8a θ-axis Actuator 10 Table 101 Base 101a Disk part 102 Chamber 102a-102c Opening 103 Guide part 103a Circular opening 104 Supporting part 104a Circular opening 104b First side face 104c Second side face 105, 105 ', 105 "Flat ball bearing 106 Leaf spring 107 Table 108x Support base 108y Support base 109A to 109C Motor 110A to 110C Rotating shaft 111A to 111C Outer coupling 112A to 112C Magnetic seal unit 113A to 113C Shaft 114A to 114C Inner coupling 11 5A to 115C Support pillar 116A to 116C Screw shaft 117A to 117C Guide rail 118A to 118C Slider 119A to 119C Nut 120A to 120C Guide rail 121A to 121C Slider 122A to 122C Pin BSA to BSC Ball screw unit W1, W2 Panel substrate

Claims (4)

A base having a contact portion;
A support that is movable relative to the base;
A table supported by the support part;
A spring member connecting the support and the table;
A guide that movably supports the support portion with respect to the base,
When an external force of a predetermined value or more is applied to the table, the spring member is elastically deformed, so that the table contacts the contact portion of the base, and when the external force falls below the predetermined value, the table Is positioned away from the abutting portion of the base.   The said support part is guided with respect to the said base so that a movement in the 1st direction, the 2nd direction orthogonal to the said 1st direction, and a rotation direction is possible. Positioning device.   The positioning device according to claim 1, wherein the spring member is a leaf spring. 4. The positioning apparatus according to claim 1, wherein the positioning device is disposed in a chamber maintained in a vacuum atmosphere, and a driving source for driving the support portion is disposed outside the chamber. The positioning device described in 1.

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