JP2010025224A - Guide device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a guide device that effectively executes posture control when a slider is seated on a guide rail. <P>SOLUTION: A recessed part 13d of a first support face 13a and a recessed part 13f of a second support face 13b are connected to compressed-air sources A, B via piping systems which can independently stop the supply of fluid, that is, a first passage 13h and a second passage 13i. Therefore, for example, when air supply is interrupted by closing a valve V2, the first support face 13a can be seated on a first guide face 12a while maintaining a gap between the second support face 13b and a second guide face 12b. Alternatively, when air supply is interrupted by closing a valve V3, the second support face 13b can be seated on the second guide face 12b while maintaining a gap between the first support face 13a and the first guide face 12a. When a slider 13 is made stationary by this, it is possible to highly accurately position a workpiece placed on a table or the like connected to the slider, thereby improving processing accuracy or inspection accuracy. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a guide device such as a hydrostatic air bearing used for precision linear guide, for example.

For example, in an exposure apparatus for a semiconductor manufacturing apparatus, a precision processing apparatus such as a bonder, or an apparatus that performs precise assembly, inspection, etc., a function for accurately and rapidly positioning a table that supports a workpiece is required. In order to support this type of table, a guide device such as a hydrostatic bearing that guides the table in a non-contact manner by discharging fluid such as air pressurized from an external air supply source to the guide surface of the guide rail is often used. It is done. Since the hydrostatic bearing floats between gaps of several μm by a film of fluid such as air, it has low sliding resistance and is affected by minute undulations and surface roughness on the guide surface and hydrostatic bearing surface. Therefore, an averaging effect that maintains the flying height averaged within the table surface can be obtained, so that positioning with very high accuracy is possible. Such a guide device is described in Patent Document 1, for example.
JP 09-222124 A JP 2000-337375 A Japanese Patent Laid-Open No. 08-303464

  According to the prior art of Patent Document 1, a table having a bearing case facing each of the two guide surfaces of the fixed body is provided, and the air blown out from the same compressed air source through the compressed gas ejection portion. By forming a static pressure between the bearing case and the guide surface and simultaneously collecting the air blown out through the vacuum suction part, the moving body is moved in two directions perpendicular to the relative moving direction with respect to the fixed body. It is possible to support with high rigidity in a state where it floats with a predetermined gap.

  Here, in the prior art of Patent Document 1, when the air supplied from the compressed air source to the compressed gas ejection unit is interrupted, the moving body is adsorbed and seated on the fixed body by the function of the vacuum adsorption unit. However, for example, when a relatively heavy workpiece is placed on the table, a non-uniform moment acts on the table due to the mass, shape, placement position, etc. of the workpiece, and the posture of the moving body changes with respect to the guide surface. If the workpiece is processed or inspected in such a state, a processing error or an inspection error may be caused.

  Patent Document 2 is provided with means for individually controlling the supply pressure of the pressure gas supplied to each part of the static pressure bearing gap according to the relative position of the movable body with respect to the fixed body based on the posture correction information of the movable body. A configuration is disclosed. However, Patent Document 2 performs posture control of a moving movable body, and does not disclose posture control at the time of sitting.

  Further, in Patent Document 3, the hydrostatic fluid bearing supporting the rotating body is operated so that the supply of fluid to the thrust bearing portion is cut off, and the rotating body and the bearing surface of the fixed body are brought into contact with each other. After the indexing operation, the rotating body is fixed. However, Patent Document 3 is for making the rotating body seat on the fixed body, and does not disclose that the moving body is seated on the two guide surfaces.

  SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a guide device that can effectively perform posture control when a slider is seated on a guide rail.

The guide device of the present invention comprises:
A guide rail comprising a first guide surface and a second guide surface extending in a direction intersecting the first guide surface;
In a guide device having a slider provided with a first support surface facing the first guide surface and a second support surface facing the second guide surface,
The first support surface is provided with a first fluid supply unit and a first fluid recovery unit facing the first guide surface,
The second support surface is provided with a second fluid supply unit and a second fluid recovery unit facing the second guide surface,
The first fluid supply unit and the second fluid supply unit are connected to a pressurized fluid source via a piping system capable of stopping the supply of fluid independently.

  According to the present invention, the first fluid supply unit and the second fluid supply unit are connected to a pressurized fluid source via a piping system capable of stopping the supply of fluid independently. For example, when the supply of fluid from the first fluid supply unit is interrupted, the first support is maintained while maintaining a gap between the second support surface and the second guide surface. A support surface can be seated on the first guide surface, or when the supply of fluid from the second fluid supply unit is interrupted, a gap between the first support surface and the first guide surface In other words, the second support surface can be seated on the second guide surface while maintaining parallelism, so that when the slider is stationary, a table connected to the slider or While maintaining the posture against the moment based on the weight and unbalance of the workpiece, The chromatography click can be accurately positioned, it is possible to improve the machining accuracy and inspection accuracy. Further, if the fluid pressure from the first fluid supply unit and the fluid pressure from the second fluid supply unit are finely adjusted, the first support surface and the first guide surface Since the gap and the gap between the second support surface and the second guide surface can be set with high accuracy, the slider can be accurately positioned in the direction orthogonal to the moving direction. In addition, although air can be used suitably as a fluid, it is not restricted to it.

  It is preferable to have an actuator that moves the slider relative to the guide rail. A linear motor may be used as such an actuator.

  The actuator includes a motor fixed to the guide rail, a screw shaft to which a rotational force is transmitted from the motor, and a nut that converts the rotational force of the screw shaft into an axial force. And the slider are connected via a connecting means which is rigidly connected in the axial direction of the screw shaft and flexibly connected in the direction orthogonal to the axial line. Posture change can be suppressed.

  Preferably, the actuator is a linear motor including a stator fixed to the guide rail and a mover connected to the slider.

  Preferably, the actuator includes a motor fixed to the guide rail, a pulley attached to a rotation shaft of the motor, and a wire member that is connected to the slider and receives the driving force by engaging with the pulley. .

  It is preferable to have a braking device that brakes relative movement between the guide rail and the slider because the slider can be quickly stopped. In the case of an actuator using a ball screw, etc., since it is decelerated by the sliding resistance of the threaded portion, it is only necessary to wait for deceleration until the effect of adsorption becomes minor, so a separate braking device is always required. There is no.

  In an abnormal state, after the brake device is braked, when the piping system connecting the pressurized fluid source and the first fluid supply unit and the second fluid supply unit is simultaneously closed, the slider is immediately stopped. This is preferable because damage to each part can be minimized.

  In the first support surface, the first fluid recovery part is formed between a pair of the first fluid supply parts, and in the second support surface, the second fluid recovery part is If it is formed between the pair of second fluid supply parts, it is preferable because the restoring moment with respect to the inclination of the slider becomes strong and the slider can be supported in a well-balanced manner.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of a guide device according to the present embodiment. In FIG. 1, a regular cylindrical guide rail 12 is disposed on a surface plate G with a rectangular plate-like spacer 11 interposed in parallel with the surface plate G. An upper surface of the guide rail 12 is a first guide surface 12a, and a side surface orthogonal to the first guide surface 12a is a second guide surface 12b.

  A slider 13 is provided so as to be movable along the guide rail 12. The slider 13 has a shape in which two rectangular plates are integrally connected orthogonally, has a first support surface 13a opposite to the first guide surface 12a, and has a second guide surface 12b. Oppositely, a second support surface 13b is provided. A table (not shown) on which a work is placed is attached to the upper surface of the slider 13.

  The side surface of the slider 13 is connected to the nut 14 via a connecting device described later. As is well known, the nut 14 has a female spiral groove (not shown), and a screw shaft 15 is disposed so that the male spiral groove is screwed into the female spiral groove. The screw shaft 15 extends in parallel with the axis of the guide rail 12 and is connected to a rotation shaft of a servo motor 17 attached to a column 16 fixed to the surface plate G. The servo motor 17, the screw shaft 15, and the nut 14 constitute an actuator that converts the rotational motion transmitted from the servo motor 17 into the axial motion of the nut 14. The rotation speed of the screw shaft 15 can be detected by a sensor 18 attached to the end of the servo motor 17. As will be described later, a braking device BR is provided at the lower end of the slider 13.

  FIG. 2 is a view of the configuration of FIG. 1 cut along a plane including the II-II line and viewed in the direction of the arrow. FIG. 3 is a cross-section of the configuration of FIG. FIG. 4 is a view of the configuration of FIG. 1 taken along line IV-IV and viewed in the direction of the arrow. 2 to 4, nuts and the like are not shown, and the gaps and the like are different from actual dimensions.

  Referring to FIG. 4, a rectangular shallow dish-shaped recess 13c is formed at the center of the first support surface 13a of the slider 13 as a first fluid recovery section, and is symmetrical with the recess 13c interposed therebetween. In addition, four circular shallow dish-shaped recesses 13d as first fluid supply parts are formed. Similarly, a rectangular shallow dish-shaped recess 13e is formed in the center of the second support surface 13b of the slider 13 as a second fluid recovery section, and symmetrically with the recess 13e sandwiched around the second recess 13e. Four circular shallow dish-shaped recesses 13f are formed as the fluid supply section.

  As shown in FIG. 3, the center of the recess 13c and the recess 13e is connected to an external connector CN1 through a common passage 13g formed in the slider 13. The connector CN1 is connected to the negative pressure pump P− via a simplified pipe H1.

  As shown in FIG. 2, a disk-shaped porous pad PD made of carbon, graphite, or the like is disposed in close contact with each recess 13d of the first support surface 13a. The surface of the porous pad PD and the surface of the surrounding first support surface 13a (referred to as a land portion) are flush with each other, and when the slider 13 is made of lightweight and inexpensive aluminum, the first support surface The surface of 13a is preferably anodized. The center of each recess 13d is connected to an external connector CN2 via a first passage 13h formed in the slider 13. The connector CN2 is connected to a compressed air source A, which is a pressurized fluid source, through a simplified pipe H2 and a valve V2 that can be opened and closed.

  On the other hand, a disc-shaped porous pad PD made of carbon, graphite, or the like is also disposed in close contact with each recess 13f in the second support surface 13b. The surface of the porous pad PD and the surface of the surrounding second support surface 13b (referred to as a land portion) are flush with each other. When the slider 13 is made of lightweight and inexpensive aluminum, the second support surface It is preferable that the surface of 13b is also anodized. The center of each recess 13f is connected to an external connector CN3 via a second passage 13i formed in the slider 13. The connector CN3 is connected to a compressed air source B, which is a pressurized fluid source, through a simplified pipe H3 and a valve V3 that can be opened and closed. Here, the first passage 13h and the second passage 13i are completely independent, but after branching from a single compressed air source, the pressure is applied to the recesses 13d and 13f via the valves 2 and V3, respectively. It is also possible to use a partially common piping system that distributes air.

  The control device will be described. FIG. 5 is a view of the configuration of FIG. 1 and 5, a pair of support portions 21 attached to the lower end surface of the slider 13 extend downward, and the elastic plate 23 made of a steel plate is attached so as to extend horizontally between the support portions 21. It has been. A brake member 24 is attached to the lower surface of the elastic plate 23 so as to face the surface of the surface plate G. On the surface of the brake member 24 that faces the surface plate G, a recess 24a is formed, in which a porous pad PD made of carbon, graphite, or the like is disposed in close contact, and the recess 24a is compressed via a pipe H4 and a valve V4. It is connected to an air source C.

  The coupling device will be described. FIG. 6 is a view of a part of the configuration of FIG. 1 as viewed in the direction of arrow IV. In FIG. 6, the slider 13 is connected to a nut 14 via a connecting device CP which is a connecting means that is rigidly connected in the axial direction of the screw shaft 15 (FIG. 1) and flexibly connected in the direction orthogonal to the axis. Yes. The coupling device CP includes a plate-shaped coupling member 31 fixed at right angles to the side surface of the slider 13 and balls 32 and 33 for clamping the coupling member 31 in the axial direction. The ball 32 abuts on one surface 14b of the abutment surfaces spaced parallel to the axial direction in the recess 14a of the nut 14, and the ball 33 is screwed onto the other surface 14c with the cylindrical roller 34 interposed therebetween. The end of the screw member 35 is abutted. The cylindrical roller 34 is fitted in a guide hole 36 formed in the other surface 14c while maintaining parallelism with the screw shaft 15 (FIG. 1).

  When the screw member 35 is rotated, the end portion protrudes from the other surface 14c, whereby the ball 33 is pressed in parallel with the screw shaft 15 via the cylindrical roller 34, and the connecting member 31 is further moved. The ball 32 is pressed against the one surface 14b of the recess 14a, thereby eliminating backlash between the members.

  The reason why the cylindrical roller 34 is interposed is that when the end surface of the screw member 35 is directly applied to the ball 33, it is generally difficult to press the screw end surface uniformly because the screw end surface is not flat. This is because 33 may be damaged. Therefore, it is desirable that both end surfaces of the cylindrical roller 34 are surfaces that are perpendicular to the screw shaft 15 and sufficiently smooth.

  Next, the operation of the present embodiment will be described. First, as shown in FIG. 5 (a), the pressurized air supplied from the compressed air source C passes through the valve V4 in a communicating state and passes through the pipe H4, so that the porous pad PD in the recess 24a of the brake member 24 is obtained. Since the air is blown toward the surface plate G, the brake member 24 moves away from the surface plate G against the elastic force of the elastic plate 23. Therefore, the frictional force between the brake member 24 and the surface plate G disappears.

  Next, in FIG. 2, the pressurized air supplied from the compressed air source A passes through the open valve V2, enters the first passage 13h of the slider 13 from the pipe H2 via the connector CN2, and enters the first passage 13h. It discharges toward the 1st guide surface 12a of the guide rail 12 via the porous pad PD of each recessed part 13d in the support surface 13a, and raises the slider 13 with respect to the guide rail 12. FIG. The discharged pressurized air is captured by the concave portion 13c of the first support surface 13a, escapes to the outside of the slider 13 through the passage 13g, and is sucked by the negative pressure pump P- through the connector CN1. It has become. That is, the first guide surface 12a and the first support are adjusted by adjusting the amount of pressurized air supplied from the compressed air source A and the amount of air sucked into the negative pressure pump P- from the recess 13c. A minute gap (for example, 5 μm) can be formed between the surface 13a.

  On the other hand, in FIG. 2, the pressurized air supplied from the compressed air source B passes through the open valve V3, enters the second passage 13i of the slider 13 from the pipe H3 via the connector CN3, and the second air It discharges toward the 2nd guide surface 12b of the guide rail 12 via the porous pad PD of each recessed part 13f in the support surface 13b, and the slider 13 is moved to the left with respect to the guide rail 12. FIG. The discharged pressurized air is captured by the recess 13e of the second support surface 13b, escapes to the outside of the slider 13 through the passage 13g, and is sucked by the negative pressure pump P- through the connector CN1. It has become. That is, the second guide surface 12a and the second support are adjusted by adjusting the amount of pressurized air supplied from the compressed air source B and the amount of air sucked into the negative pressure pump P- from the recess 13e. A minute gap (for example, 5 μm) can be formed between the surface 13b.

  As described above, the slider 13 is supported with high rigidity while being in a non-contact state with respect to the guide rail 12. In this state, when electric power is supplied to the servo motor 17 from a drive circuit (not shown), the screw shaft 15 rotates and the nut 14 moves along the guide rail 12 accordingly, so that the slider 13 is connected via the coupling device CP. Can be moved in the same direction, and a workpiece placed on a table (not shown) can be moved to a desired position.

  When processing or inspecting a workpiece that has reached a desired position, the slider 13 needs to be stationary. Here, the slider 13 is stopped using the braking device BR. More specifically, as shown in FIG. 5B, when the valve V4 is opened to the atmosphere, the pressure in the pipe H4 becomes equal to the atmospheric pressure, and air is discharged from the porous pad PD in the recess 24a of the brake member 24. Instead, the brake member 24 is pressed toward the surface plate G by the urging force of the elastic plate 23, and the slider 13 is quickly stopped by the frictional force acting between the surface plate G and the brake member 24.

  When the valve V2 is closed in FIG. 2 after the slider 13 is stopped, the pressurized air is not discharged from the porous pad PD of each recess 13d on the first support surface 13a. In such a case, since the air between the first support surface 13a and the first guide surface 12a is sucked to the outside from the recess 13c, the inter-surface pressure (static pressure) is rapidly reduced to a negative pressure. Thus, the first support surface 13a is seated on the first guide surface 12a. At this time, since there is no relative movement between the slider 13 and the guide rail 12, the first support surface 13a and the first guide surface 12a are not damaged. Further, since the space between the second support surface 13b and the second guide surface 12b is maintained with high rigidity in a constant static pressure state, the displacement of the slider 13 is maintained while maintaining the horizontal positioning accuracy. Can be suppressed only in the vertical direction.

  Here, since the nut 14 is rigidly supported with respect to the surface plate G by the screw shaft 15, if the slider 13 is displaced, there is a fear that an unreasonable stress is applied to the screw shaft 15. In contrast, in the present embodiment, such a problem is solved by the coupling device CP. More specifically, in FIG. 6, even when the slider 13 is relatively displaced in the direction in which the slider 13 is seated on the guide rail 12 (the vertical direction in FIG. 6), the balls 32 and 33 roll along the connecting member 31. The relative displacement is allowed.

  If the valve V3 is closed instead of the valve V2, the second support surface 13b is seated on the second guide surface 12b. At this time, the space between the first support surface 13a and the first guide surface 12a is maintained with high rigidity in a constant static pressure state as usual, so that the positioning accuracy of the slider 13 is maintained while maintaining the vertical positioning accuracy. The displacement can be suppressed only in the horizontal direction. In this case, in the coupling device CP of FIG. 6, when the coupling member 31 moves so as to be close to the nut 14, the balls 32 and 33 roll on the coupling member 31 and allow relative displacement between the slider 13 and the nut 14. It is supposed to be.

  When an abnormality occurs, the first support surface 13a is seated on the first guide surface 12a if the slider 13 is stopped using the braking device BR or is brought into a state immediately before the stop, and the valve V2 and the valve V3 are simultaneously closed. At the same time, since the second support surface 13b is seated on the second guide surface 12b, the slider 13 can be immediately stopped.

  According to the present embodiment, the piping system, that is, the first passage 13h and the second passage, in which the recess 13d of the first support surface 13a and the recess 13f of the second support surface 13b can independently stop supplying fluid. Since it is connected to the compressed air sources A and B through the passage 13i, for example, when the supply of air is interrupted by closing the valve V2, the gap between the second support surface 13b and the second guide surface 12b. The first support surface 13a can be seated on the first guide surface 12a, or when the valve V3 is closed and the supply of air is interrupted, the first support surface 13a and the first support surface 13a The second support surface 13b can be seated on the second guide surface 12b while maintaining a gap with the guide surface 12a. Thus, when the slider 13 is stationary, a table or work connected to the slider 13 is supported. Momentum based on weight and unbalance While maintaining the posture against the workpiece can be accurately positioned, it is possible to improve the machining accuracy and inspection accuracy.

  FIG. 7 is a view seen from the same direction as FIG. 6 showing a modification of the coupling device. The coupling device CP includes a first coupling portion 37 that is fixed to the slider 13 and extends toward the nut 14, and a second coupling portion 14 e and a third coupling portion that are part of the nut 14 that extends toward the slider 13. 14d. The second connecting portion 14e and the third connecting portion 14d are arranged apart from each other in the axial direction of the guide rail 12 (FIG. 1) with the first connecting portion 37 interposed therebetween. Moreover, the 1st connection part 37 and the 2nd connection part 14e, and the 1st connection part 37 and the 3rd connection part 14d are connected by metal wires (striate bodies) 38a and 38b, respectively. Both the wires 38 a and 38 b are arranged in parallel to the axis of the guide rail 12. Both ends of the wire 38a are fixed to the first connecting portion 37 and the second connecting portion 14e, respectively, with screws 39, while both ends of the wire 38b are connected to the first connecting portion 37 and the third connecting portion 14d, respectively. It is fixed with a screw 39. In this modification, a metal wire is used as the striated body, but the present invention is not necessarily limited to this, and a striated body of a synthetic resin or other material may be used. The wires 38a and 38b may be fixed using conventional fixing means other than the screw 39.

  Here, when the nut 14 is reciprocated along the screw shaft 15 by driving the servo motor 17, the distance between the first connecting portion 37 and the second connecting portion 14 e is set in each of the wires 38 a and 38 b screwed. A tension capable of maintaining L1 and the distance L2 between the first connecting portion 37 and the third connecting portion 14d is applied. As a result, the rigidity of the coupling of the nut 14 and the slider 3 in the axial direction of the guide rail 12 can be ensured, and the slider 13 can be moved linearly in conjunction with the nut 14. On the other hand, when the slider 13 is relatively displaced in the direction in which the slider 13 is seated on the guide rail 12 (the vertical direction or the vertical direction in FIG. 7), the wires 38a and 38b are extended or twisted to allow the relative displacement. ing. Further, the coupling device CP of the present modified example weakens the coupling rigidity in the pitching and yawing directions between the slider 13 and the nut 14, and absorbs the vibration of the nut 14 caused by the rotation of the screw shaft 15 by the deformation of the wires 38a and 38b. Thus, it is possible to suppress the vibration from being transmitted to the slider 13.

  FIG. 8 is a cross-sectional view similar to FIG. 2 of a guide device according to another embodiment, but omits piping and the like. In FIG. 8, the description will focus on differences from the embodiment described above. In the present embodiment, a linear motor LM composed of a stator 52 and a mover 53 is used as an actuator.

  More specifically, a pair of side walls 51, 51 are formed on the surface plate G along the guide rail 12 so as to be spaced apart in parallel, and the inner side surfaces of the side walls 51, 51 are opposed to each other. A pair of stators 52, 52 are attached. The stators 52 and 52 are each composed of a plurality of magnets arranged with alternating polarities in the direction along the guide rail 12. A plate-like movable element 53 is disposed between the pair of stators 52 and 52 in a non-contact manner. The mover 53 is connected to the slider 13 via a support plate 54. Since other configurations are the same as those of the above-described embodiment, the description thereof is omitted.

  According to the linear motor LM of the present embodiment, a magnetic force is generated between the stators 52 and 52 by supplying power to the mover 53 from a power source (not shown), and the slider 13 is moved using the magnetic force. The guide rail 12 can be moved.

  FIG. 9A is a top view of a guide device according to another embodiment, and FIG. 9B is a side view, but piping and the like are omitted. In FIG. 9, the description will focus on differences from the embodiment described above. In the present embodiment, the motor 61 and the wire member W are used as the actuator.

  More specifically, the servo motor 61 is disposed on one end (right end in FIG. 9) of the guide rail 12 on the surface plate G so that the rotating shaft 61a protrudes upward in the vertical direction. A driving pulley 62 is fixed to the rotating shaft 61a so as to rotate integrally. On the other hand, on a boss 63 formed on the other end (left end in FIG. 9) side of the guide rail 12 on the surface plate G, a driven pulley 64 supported by a shaft (not shown) is rotatably provided. A wire member W is stretched so as to engage both the drive pulley 62 and the driven pulley 64 and to connect both ends to the slider 13.

  According to the linear motor LM of the present embodiment, by supplying electric power to the servo motor 61 from a power source (not shown), the driving pulley 62 rotates together with the rotating shaft 61a, and the wire member W engaged therewith generates driving force. It can be received and moved, and the slider 13 can be pulled and moved with respect to the guide rail 12.

  The present invention has been described above with reference to the embodiments. However, the present invention should not be construed as being limited to the above-described embodiments, and can be modified or improved as appropriate.

It is a perspective view of the guide device concerning this Embodiment. It is the figure which cut | disconnected the structure of FIG. 1 by the surface containing an II-II line | wire, and looked at the arrow direction. It is the figure which cut | disconnected the structure of FIG. 1 by the surface containing a III-III line | wire, and looked at the arrow direction. It is the figure which cut | disconnected the structure of FIG. 1 by the IV-IV line, and looked at the arrow direction. It is the figure which looked at the structure of FIG. 1 in the arrow V direction. It is the figure which looked at a part of structure of FIG. 1 in the arrow IV direction. It is the figure seen from the same direction as FIG. 6 which shows the modification of a connection device. It is sectional drawing similar to FIG. 2 of the guide apparatus concerning another embodiment. Fig.9 (a) is a top view of the guide apparatus concerning another embodiment, FIG.9 (b) is a side view.

Explanation of symbols

11 spacer 12 guide rail 12a first guide surface 12b second guide surface 13 slider 13a first support surface 13b second support surface 13c recess 13d recess 13e recess 13f recess 13g passage 13h passage 13i passage 14 nut 14a recess 14b Surface 14c Surface 14d Third connecting portion 14e Second connecting portion 15 Screw shaft 16 Post 17 Servo motor 18 Sensor 21 Support portion 23 Elastic plate 24 Brake member 24a Recessed portion 31 Connecting member 32 Ball 33 Ball 34 Cylindrical roller 35 Connecting portion 35 Member 36 Guide hole 37 First connecting part 38a Wire 38b Wire 51 Side wall 52 Stator 53 Movable element 54 Support plate 61 Servo motor 61a Rotating shaft 62 Drive pulley 63 Boss 63 Driven pulley 64 Driven pulley LM Linear motor W Wire member A Compression Air source B Compressed air source BR Braking device C Compressed air source CN1 Connector CN2 Connector CN3 Connector CP Connecting device G Surface plate H1 Piping H2 Piping H3 Piping H4 Piping L1 Spacing L2 Spacing P- Negative pressure pump PD Porous pad V2 Valve V3 Valve V4 valve

Claims (8)

A guide rail comprising a first guide surface and a second guide surface extending in a direction intersecting the first guide surface;
In a guide device having a slider provided with a first support surface facing the first guide surface and a second support surface facing the second guide surface,
The first support surface is provided with a first fluid supply unit and a first fluid recovery unit facing the first guide surface,
The second support surface is provided with a second fluid supply unit and a second fluid recovery unit facing the second guide surface,
The guide device, wherein the first fluid supply unit and the second fluid supply unit are connected to a pressurized fluid source via a piping system capable of stopping the supply of fluid independently.   The guide device according to claim 1, further comprising an actuator that moves the slider relative to the guide rail.   The actuator includes a motor fixed to the guide rail, a screw shaft to which a rotational force is transmitted from the motor, and a nut that converts the rotational force of the screw shaft into an axial force. The guide device according to claim 2, wherein the slider and the slider are connected to each other through connecting means that is rigidly connected in the axial direction of the screw shaft and flexibly connected in the direction orthogonal to the axis.   The guide device according to claim 2, wherein the actuator is a linear motor including a stator fixed to the guide rail and a mover connected to the slider.   The actuator includes a motor fixed to the guide rail, a pulley attached to a rotation shaft of the motor, and a wire member connected to the slider and receiving a driving force by being engaged with the pulley. The guide device according to claim 2.   The guide device according to any one of claims 1 to 5, further comprising a braking device that brakes relative movement between the guide rail and the slider.   In an abnormal state, after braking the braking device, a piping system connecting the pressurized fluid source and the first fluid supply unit and the second fluid supply unit is simultaneously closed. Item 7. The guidance device according to Item 6. In the first support surface, the first fluid recovery part is formed between a pair of the first fluid supply parts,
6. The guide according to claim 1, wherein, on the second support surface, the second fluid recovery portion is formed between a pair of the second fluid supply portions. apparatus.

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