JP5319154B2 - Stage equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a stage device in which tilt of a table section can be highly accurately adjusted. <P>SOLUTION: The stage device 34 includes the table section having a wafer table 36 holding a lower substrate Wd on a mounting surface 36a and a tilt table 38, and a first linear actuator 46 for turning the table section around a Y axis extending along the mounting surface 36a of the table section, and the operating direction of driving force applied by the first linear actuator 46 to the table section is almost along a tangential direction of an arc that the point of application of the driving force draws when the table section is turned by the driving force. Consequently, the turning direction of the table section and the operating direction of the driving force of the actuator moving the table section are nearly the same to reduce deviation in point of application of the driving force moving the table section. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a stage apparatus capable of adjusting the inclination of a workpiece mounted by adjusting the inclination of a table portion, and in particular, processing the mounted workpiece together with other workpieces (particularly, a substrate). The present invention relates to a stage apparatus.

  A stage apparatus is used for bonding substrates such as semiconductor substrates. This stage apparatus is generally mounted on an XY stage that performs positioning in the XY directions within a horizontal plane. With this XY stage, the table portion for holding the substrate is positioned in the XY direction, and then the table portion is positioned in the rotation (θ) direction and the vertical (Z) direction. Further, the inclination of the table portion around the X axis and the Y axis is also adjusted.

In order to perform this tilt adjustment, a stage device is conventionally known in which a spherical bearing portion is provided on the lower surface of the table portion, and the table portion can be tilted (rotated) via the bearing portion (Patent Literature). 1). In this stage apparatus, a minute hemispherical ball is provided at two points on the lower surface of the table portion (points corresponding to the X and Y axes), and a cam mechanism is brought into contact with the ball, and at the side of the table portion. In a state where the spring is stretched and the table portion is urged vertically downward, the cam mechanism is driven by a motor or the like in the vertical direction to adjust the inclination of the table portion.
JP-A-9-64094

  However, in the above-described conventional stage device, the rotation direction of the table portion at the time of tilt adjustment differs from the direction in which the driving force by the cam mechanism or the like is applied. For this reason, a deviation occurs between the hemispherical ball provided on the lower surface of the table portion and the cam mechanism in contact with the ball, and a desired driving force is not transmitted to the table portion, and the table There is a possibility that the inclination of the portion cannot be adjusted with high accuracy.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a stage apparatus capable of performing tilt adjustment with higher accuracy.

A stage apparatus according to the present invention includes a table unit that holds a workpiece on one surface, and a first actuator that rotates the table unit around one axis that extends along one surface of the table unit. A second actuator for rotating the table portion around another axis extending along one surface of the table portion and intersecting one axis, and the table portion is linked to the first actuator. At least a first actuating part, and the first actuating part is on the other surface side opposite to the one face of the table part and on a line segment orthogonal to one axis when viewed in plan. are arranged, the first actuator and second respective actuation direction driving force applied to the table unit from the actuator is tangential arc drawn by the acting point of drive force when the table section is pivoted by drive force Specially conforming to It is set to.

In the stage apparatus configured as described above, the direction of the driving force applied from the first and second actuators to the table unit is the tangential direction of the arc drawn by the point of application of the driving force when the table unit is rotated by the driving force. Is almost along. For this reason, the first and substantially the same direction as the operation direction each of the driving force of the second actuator for moving the table portion and the rotating direction of the table portion for holding a workpiece, the driving force for moving the table portion It is possible to reduce the deviation of the respective action points, and to perform highly accurate tilt adjustment around one axis and another axis intersecting with one axis . In this stage apparatus, in at least one of the initial position state and the driving state in which the first and second actuators start driving, the direction of action of the driving force is substantially along the tangential direction. “Substantially along the tangential direction” means along the tangential direction within a range of ± 1 degree. Further, in the stage device configured as described above, the table unit includes a first operating unit linked to the first actuator, and the first operating unit is located on the other surface side opposite to the one surface of the table unit. However, they are arranged on a line segment orthogonal to one axis when viewed in plan. In this case, the driving force of the first actuator can be directly applied to the first operating portion to perform the tilt adjustment around one axis of the table portion, and the tilt adjustment can be performed with a simpler configuration than the conventional cam mechanism. .

  In the stage apparatus according to the present invention, it is preferable that the table portion has a spherical bearing portion on the other surface located on the side opposite to the one surface. Thereby, rotation of a table part can be performed easily. Further, it is more preferable that the bearing portion is composed of a non-contact fluid bearing, and the non-contact fluid bearing can reduce generation of friction in the rotation of the table portion, and the rotation of the table portion by the driving force of the first actuator. Therefore, it is possible to prevent unnecessary force from being applied and to perform precise rotation.

In the stage apparatus according to the present invention, the table portion, the second actuating unit further includes a which is linked to the second actuator, the second actuation portion, the other axes in a plan view a other side It is preferable that they are arranged on orthogonal line segments. Thus, in addition to Rukoto perform tilt adjustment of one around the axis of the driving force by applying directly to the first operating part table section of the first actuator, the second actuating unit driving force of the second actuator Since the inclination of the table portion around the other axis can be adjusted by directly acting on the head, the inclination can be adjusted with a simpler configuration than the conventional cam mechanism.

  In the stage apparatus according to the present invention, it is preferable that one axis and the other axis are orthogonal to each other. Thereby, rotation around one axis of the table portion and the other axis can be performed more accurately.

  In the stage apparatus according to the present invention, it is preferable to include θ driving means for rotating the table portion around an axis extending through the intersection of one axis and the other axis and extending perpendicularly to the one surface. In this way, since the θ drive means directly rotates the table portion, the driven body becomes light and the responsiveness of the rotation motion is enhanced.

  In the stage apparatus according to the present invention, the first actuator, the second actuator, and the θ driving means are preferably bellows actuators that are driven by supplying and discharging gas. In this way, the semiconductor substrate, which is an example of a workpiece that is easily affected by heat and magnetism, is tilted without being affected by heat or magnetism compared to the case where a motor made of an electric actuator is used. Adjustments can be made. Furthermore, since the tilt adjustment is performed based on the change in the fluid pressure, a fine tilt adjustment can be performed.

  The stage apparatus according to the present invention preferably includes Z driving means for moving the table portion in a direction perpendicular to one surface, and the Z driving means is preferably linked to the table portion by kinematic coupling. According to such a linkage method, it is possible to prevent a force or moment other than the vertical direction generated by the Z drive means from reaching the table portion, and only the vertical force can be transmitted to the table portion, so that the tilt adjustment can be performed with high accuracy. It can be performed.

  In the stage apparatus according to the present invention, the Z drive means is preferably an air bearing cylinder. Since the Z drive means is composed of a cylinder having an air bearing that serves as a guide in the drive direction, it is possible to reduce the influence when a force other than the vertical direction is applied, and to move without movement in the vertical direction, High-precision tilt adjustment can be performed. In addition, since an air bearing is used as the bearing portion, friction generated when moving in the vertical direction can be reduced, and highly accurate movement control can be performed.

  ADVANTAGE OF THE INVENTION According to this invention, the stage apparatus which can perform more highly accurate inclination adjustment can be provided.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant description is omitted.

  FIG. 1 is a schematic view schematically showing a configuration of a substrate assembly apparatus including a stage apparatus according to the present embodiment. As shown in FIG. 1, the board assembly apparatus 1 includes a vibration isolator 12, a surface plate 14, a body 16, an upper stage 20, a lower stage 30, and a control device 90.

  The vibration isolator 12 removes vibration transmitted to the board assembly apparatus 1. A surface plate 14 is provided on the vibration isolator 12. The body 16 has a side wall portion and an upper wall portion, and forms a sealed space on the surface plate 14.

  The upper stage 20 is mounted on the inner surface of the upper wall portion of the body 16. The upper stage 20 has an XY stage 22 and a wafer table 24. The wafer table 24 holds the upper substrate Wu to be bonded by electrostatic chucking or vacuum chucking. The XY stage 22 performs positioning in the XY direction of the upper substrate Wu held on the wafer table 24 in a horizontal plane.

  The lower stage 30 is mounted on the surface plate 14. The lower stage 30 includes an XY stage 32 and a stage device 34 according to the present embodiment. The stage device 34 includes a wafer table 36 (table unit), a tilt table 38 (table unit), a support table 45, a first linear actuator 46 (first actuator), a second linear actuator 48 (second actuator), and a θ drive mechanism. 50 (θ drive means) and a Z drive mechanism 52 (Z drive means).

  The stage device 34 is mounted on the mounting surface 36a (that is, on the mounting surface 38a) by moving the tilt table 38 by driving the first linear actuator 46, the second linear actuator 48, and the θ drive mechanism 50. The tilt angle adjustment (tilt adjustment) and the rotation angle adjustment of the lower substrate Wd) held on the wafer table 36 are performed. Further, the height position (vertical direction) is adjusted by the Z drive mechanism 52 linked to the lower surface of the support table 45 by kinematic coupling. As shown in FIGS. 3 and 4, the X axis (other axis) and the Y axis (one axis) are set so as to form 90 degrees with each other in the horizontal plane, and the Z axis is defined in the vertical direction. A dimensional orthogonal coordinate system is set, and the following description will be made using the XYZ coordinate system when necessary.

  As shown in FIGS. 1 and 2, the wafer table 36 holds the lower substrate Wd (workpiece) to be bonded on its upper surface (one surface). The wafer table 36 includes an electrostatic chuck ESC that attracts the wafer by electrostatic force, and a vacuum chuck VAC that vacuum-sucks the electrostatic chuck ESC.

  The tilt table 38 is a substantially rectangular table as shown in FIGS. 3 to 5, and has a flat mounting surface 38 a on the upper surface side for mounting the wafer table 36. A spherical bearing portion 38c surrounded by the bearing surface 38b is formed on the lower surface (other surface) side. The vertical center axis L of the bearing portion 38c coincides with the center axis of the tilt table 38, passes through the rotation center O of the tilt table 38, and extends perpendicular to the horizontal plane of the tilt table 38.

  An operating portion 60 (first operating portion) is provided at the lower surface side end portion 38d of the tilt table 38 at a position in the X-axis direction when viewed from the central axis L. As shown in FIG. 3 or 5, the operating portion 60 includes a first operating piece 60 c that protrudes obliquely downward in the X-axis direction at a position lower than the support table 45, and an end portion and a lower surface of the first operating piece 60 c. A connecting portion 60d extending in the vertical direction is provided to connect the side end portion 38d.

  Further, the lower surface side end portion 38d of the tilt table 38 is provided with an operating portion 62 (second operating portion) at a position in the Y-axis direction when viewed from the central axis L. As shown in FIG. 3, like the operation unit 60, the operation unit 62 includes a second operation piece 62 c that protrudes obliquely downward in the Y-axis direction at a position lower than the support table 45, and an end of the second operation piece 62 c. 62d that extends in the vertical direction to connect the portion and the lower surface side end 38d.

  Further, a notch 38e is formed at one corner of the tilt table 38 as shown in FIG. An operating portion 64 is provided at a position on the lower surface of the tilt table 38 in the vicinity of the notch portion 38e, and a third operating piece 64c extending vertically downward is formed. The first working piece 60c, the second working piece 62c, and the third working piece 64c are rectangular plates.

  The rectangular support table 45 is formed at the upper ends of the three Z drive mechanisms 52 that are air bearing cylinders. As shown in FIG. 5, a concave bearing surface 45 b is formed at a substantially central portion of the upper surface of the support table 45 to support the bearing portion 38 c of the tilt table 38.

  The support table 45 is embedded with a porous portion 45c so as to form a bearing surface 45b, and a large number of minute holes are formed in the bearing surface 45b. A pipe P45 is led out from the porous portion 45c and connected to an external air pressure source (not shown). The air pressure source supplies compressed air to the porous portion 45c, and the compressed air is blown against the bearing surface 38b from a large number of holes in the bearing surface 45b. As a result, an air film is formed between the bearing surface 38b and the bearing surface 45b, and the bearing portion 38c is supported in a non-contact state without receiving resistance from the bearing surface 45b.

  The first linear actuator 46 includes a support member 66 composed of a plurality of rectangular plates, and two bellows actuators 68 and 70 disposed to face each other in the support member 66, as shown in FIG. In addition, it is fixed to the support table 45 in an inclined state. Details of the arrangement direction of the first linear actuator 46 will be described later.

  The support member 66 includes two rectangular plate-like support pieces 66a and 66b, a rectangular plate-like connection portion 66c for connecting the support pieces 66a and 66b, and a fixing portion 66d for fixing the connection portion 66c to the support table 45. And have. As shown in FIG. 5, the support piece 66 a is arranged to be substantially parallel to the first operating piece 60 c obliquely to the upper right of the first operating piece 60 c in the figure. Further, the support piece 66b is arranged to be substantially parallel to the first operation piece 60c on the lower left in the drawing so as to be symmetrical with the support piece 66a with the first operation piece 60c as a reference line.

  The bellows actuator 68 is disposed between the support piece 66a and the first operation piece 60c, and the bellows actuator 70 is disposed between the support piece 66b and the first operation piece 60c. Further, the bellows actuator 68 and the bellows actuator 70 are arranged so as to face each other with respect to the first operating piece 60c, and the first operating piece 60c is sandwiched between the tip of the bellows actuator 68 and the tip of the bellows actuator 70. It has become.

  Further, as shown in FIG. 6, the bellows actuator 68 includes a bellows 68a that can be expanded and contracted upward in the drawing, and a disk-shaped operation plate 68b that seals the opening on the lower end side of the bellows 68a. The opening on the upper end side of the bellows 68a is sealed by being fixed to the support piece 66a. Thereby, the internal space 68c of the bellows actuator 68 is sealed by the bellows 68a, the support piece 66a, and the operation plate 68b, and the airtightness is maintained.

  A shaft 68d extending upward is formed in the central portion of the operating plate 68b, and the shaft 68d is movable in the vertical direction by being inserted into a guide hole of a boss 66e provided in the support piece 66a. . In addition, a hemispherical pressing portion 68e protruding toward the first operating piece 60c is formed at the center of the operating plate 68b, and abuts on the upper surface 60a of the first operating piece 60c.

  A pipe P68 is led out from the internal space 68c of the bellows actuator 68, and is connected to a servo valve 68f provided outside. By controlling the servo valve 68f, the air in the internal space 68c can be supplied and discharged, and the amount of downward movement of the operating plate 68b, that is, the driving force can be arbitrarily set in accordance with the change in the atmospheric pressure in the internal space 68c. Can be controlled. The downward driving force of the bellows actuator 68 is transmitted to the first operating piece 60c and the tilt table 38 via a contact point (action point) between the pressing portion 68e and the upper surface 60a of the first operating piece 60c. It has become so.

  The bellows actuator 70 has the same configuration as the bellows actuator 68 described above, includes a bellows 70a and an operation plate 70b, and an opening on the lower end side of the bellows 70a is sealed by being fixed to the support piece 66b. . As a result, the internal space 70c of the bellows actuator 70 is also kept airtight.

  A shaft 70d extending downward is formed at the center of the operating plate 70b. The shaft 70d is movable in the vertical direction by being inserted into a guide hole of a boss 66f provided in the support piece 66b. . A hemispherical pressing portion 70e that protrudes toward the first operating piece 60c is formed at the center of the operating plate 70b, and comes into contact with the lower surface 60b of the first operating piece 60c.

  A pipe P70 is led out from the internal space 70c of the bellows actuator 70, and is connected to a servo valve 70f provided outside. By controlling the servo valve 70f, the air in the internal space 70c can be supplied and discharged, and the amount of upward movement of the operating plate 70b, that is, the driving force can be arbitrarily set according to the change in the atmospheric pressure in the internal space 70c. Can be controlled. The upward driving force of the bellows actuator 70 is transmitted to the first operating piece 60c and the tilt table 38 via a contact point (action point) between the pressing portion 70e and the lower surface 60b of the first operating piece 60c. It has become so. Therefore, as shown in FIG. 5, the first operating piece 60c moves up and down in an oblique direction depending on the change in atmospheric pressure in the internal space of the two bellows actuators 68 and 70.

  The second linear actuator 48 has a configuration similar to that of the first linear actuator 46, and includes a support portion 72 composed of a plurality of rectangular plates, and two bellows that are disposed to face each other in the support portion 72. Actuators 74 and 76 are provided, and fixed to the support table 45 in an inclined state as shown in FIG. Details of the arrangement direction of the second linear actuator 48 will be described later together with the arrangement direction of the first linear actuator 46.

  As shown in FIG. 4, the θ drive mechanism 50 has a U-shaped cross section having a support piece 56a and a support piece 56b that are spaced apart from each other in the XY plane so as to sandwich the third operating piece 64c therebetween and arranged in parallel with each other. A mold support member 56, a bellows actuator 78 disposed between the support piece 56a and the third actuating piece 64c, and a bellows actuator 80 disposed between the support piece 56b and the third actuating piece 64c. Have The third operating piece 64 c fixed directly to the tilt table 38 is sandwiched between the hemispherical tip of the bellows actuator 78 and the hemispherical tip of the bellows actuator 80. The bellows actuators 78 and 80 have the same configuration as the bellows actuators 68 and 70, and the description thereof is omitted here. The support member 56 has a rectangular plate-like connecting portion 56 c that connects the supporting piece 56 a and the supporting piece 56 b, and the connecting portion 56 c is fixed to the upper surface 82 a of the base plate 82.

  The Z drive mechanism 52 is composed of three air bearing cylinders, and is arranged at three locations corresponding to the three corners of the triangle on the base plate 82 as shown in FIG. The three corners may be triangular corners that include the center of gravity of all the components arranged above the Z drive mechanism 52 inside. An air bearing cylinder constituting the Z drive mechanism 52 is accommodated in the cylinder tube 52a in a non-contact state via a cylinder tube 52a placed on the surface of the base plate 82 and an air bearing (not shown) and can be moved up and down. And a connecting sphere 52c made of a sphere rotatably held on the upper surface of the piston 52b. A part of the connection ball 52 c is fitted in a rotatable state in a V groove 45 e provided on the lower surface of the support table 45. Since they are connected by a rotatable connecting ball 52 c, forces and moments generated in the air bearing cylinder other than the vertical direction are not transmitted to the support table 45. Such a connection is generally called a kinematic coupling, and transmission of unnecessary force or moment is prevented. Further, a pipe P52 is led out from an air bearing cylinder constituting the Z drive mechanism 52 and connected to an external air pressure source (not shown), and air is supplied or discharged from the air pressure source, whereby the Z drive mechanism. 52 is movable in the vertical direction.

  In FIG. 3 or FIG. 4 and the like, the configuration above the tilt table 38 is not shown, but the stage device 34 having such a configuration is mounted on the XY stage 32 via the base plate 82.

  The control device 90 controls the substrate assembly apparatus 1 including the control of the stage device 34.

  Next, the arrangement direction of the first linear actuator 46 and the second linear actuator 48 will be described in detail. 7 and 8, the wafer table 36 and the like between the tilt table 38 and the lower substrate Wd are not shown for convenience of explanation.

  First, the arrangement relationship in the XY coordinate system between the first linear actuator 46 and the second linear actuator 48 will be described. As shown in FIG. 7, the first linear actuator 46 and the second linear actuator 48 are arranged at an angle of approximately 90 degrees around the central axis L extending in the vertical direction. The first linear actuator 46 is arranged on the X axis to adjust the inclination around the Y axis, and the second linear actuator 48 is arranged on the Y axis to adjust the inclination around the X axis. .

  Next, the arrangement relationship of the first linear actuator 46 in the XZ coordinate system will be described. As shown in FIGS. 7 and 8, etc., the first linear actuator 46 is concentric with the center O when the tilt table 38 is rotated by the spherical bearing portion 38c, and the driving force of the first linear actuator 46 is large. Provided on the circumference L1 of the circle provided on the XZ coordinate plane including the initial action point (the contact point between the pressing portions 68e, 70e and the first operating piece 60c) that acts first, the tilt table 38, etc. Are arranged in an oblique direction. With such an arrangement, the direction of action of the driving force of the bellows actuators 68 and 70 is the arc drawn by the initial action point of the driving force when the tilt table 38 is rotated, that is, the circumference L1 including the initial action point on the outer periphery. The tangential direction at the initial action point is in the range of ± 1 degree. In the illustrated example, when the driving force is applied from the unloaded state where the expansion / contraction deformation is not generated in the bellows 68a and 70a, that is, the initial position state, the bellows actuators 68 and 70 are driven. The acting direction of the force is along the tangential direction at the initial acting point of the circumference L1, and the bellows 68a and 70a are stretched and deformed by the pressure received from the air supplied into the internal spaces 68c and 70c of the bellows 68a and 70a, that is, the driving state. When the driving force is applied, the operating direction of the driving force of the bellows actuators 68 and 70 is in the range of ± 1 degree with respect to the tangential direction at the initial operating point of the circumference L1. When the acting direction of the driving force is inclined at an angle larger than 1 degree with respect to the tangential direction, a driving force having an appropriate magnitude cannot be applied to the first operating piece 60c as described later, but according to the present embodiment. Since it is within a range of ± 1 degree with respect to the tangential direction, an appropriate magnitude of driving force can be applied. As shown in FIG. 5, the rotation center O is the rotation of the lower substrate Wd when the parallelism of the lower substrate Wd is made to follow the upper substrate Wu when the upper substrate Wu and the lower substrate Wd are bonded together. It is also a dynamic center

  The arrangement relationship of the second linear actuator 48 in the YZ coordinate system will be described. As shown in FIGS. 7 and 8, etc., the second linear actuator 48 is concentric with the center O when the tilt table 38 is rotated by the spherical bearing portion 38c, and the driving force of the second linear actuator 48 is large. Provided on the circumference L2 of the circle provided on the YZ coordinate plane including the initial action point (the contact point between the pressing portions 74e, 76e and the second operating piece 62c) acting on the outer periphery, and the tilt table 38, etc. Are arranged in an oblique direction. With such an arrangement, the direction of action of the driving force of the bellows actuators 74 and 76 is the arc drawn by the initial action point of the driving force when the tilt table 38 is rotated, that is, the circumference L2 including the initial action point on the outer periphery. The tangential direction at the initial action point is in the range of ± 1 degree. The direction of action of the driving force of the bellows actuators 74 and 76 is along the tangential direction at the initial action point of the circumference L2 in the initial position state as in the first linear actuator 46, and the initial direction of the circumference L2 in the drive state. It is within a range of ± 1 degree with respect to the tangential direction at the action point.

  Substrate bonding by the substrate assembly apparatus 1 including the stage device 34 that performs tilt adjustment with the first linear actuator and the second linear actuator arranged as described above will be described below.

  First, the upper substrate Wu to be bonded is held on the wafer table 24 of the upper stage 20, and the upper substrate Wu is positioned in the XY directions by the XY stage 22. Next, the lower substrate Wd to be bonded is held on the wafer table 36 of the lower stage 30, and the lower substrate Wd is positioned in the XY direction by the XY stage 32. Next, the tilt table 38 is moved by the θ drive mechanism 50 to position the lower substrate Wd around the central axis L (Z axis) in the rotational direction. These positionings are automatically controlled by the control device 90 based on detection signals from an optical system (not shown) such as a laser interferometer and a microscope.

  From this state, the process proceeds to bonding of the substrates. First, the support table 45 is raised by the Z drive mechanism 52. As the support table 45 is raised, the lower substrate Wd held on the wafer table 36 comes into contact with the upper substrate Wu. Load distributions to the two substrates generated during the contact are read by a plurality of pressure sensors (not shown), and the detected values are sent to the control device 90. The control device 90 performs tilt adjustment by the first linear actuator 46 and the second linear actuator 48 so that the detection values read by the plurality of pressure sensors are uniform. As a result of the adjustment, if it is determined that the detected pressure value is uniform, that is, the lower substrate Wd is parallel to the upper substrate Wu, the tilt adjustment is finished. After completion of the tilt adjustment, the Z drive mechanism 52 is further raised and held so that a predetermined pressure is applied to the lower substrate Wd for a certain period of time, thereby completing the bonding of the substrates. Thus, when bonding is performed in a state in which the parallelism of both the substrates is high, mechanical or electrical bonding between the substrates is surely performed.

  Next, since the first linear actuator 46 and the second linear actuator 48 adjust the tilt of the tilt table 38 when the substrates are bonded together, the operation for transmitting the driving force will be described in comparison with other arrangements. To do.

  First, the comparative example shown in FIGS. 10 and 11 will be described. The stage device 134 of this comparative example is the same as the stage device 34 according to the present embodiment except for the arrangement direction of the first and second linear actuators for adjusting the tilt and the shape of the operation piece associated therewith, and the tilt table 138, It comprises a support table 145, a first linear actuator 146, a second linear actuator (not shown), a Z drive mechanism 152, an operating portion 160 having a fourth operating piece 160c, and the like. The tilt table 138 is supported by the support table 145 via a bearing portion 138b provided on the lower surface so as to rotate about the point O. In the tilt adjustment, for example, in order to rotate the lower substrate Wd in the R direction, the tilt adjustment around the Y axis can be performed by rotating the tilt table 138 in the R direction by the first linear actuator 146. It can be done.

  Similar to the first linear actuator 46 and the second linear actuator 48 in the present embodiment, the first linear actuator 146 and the second linear actuator (not shown) each have two bellows actuators, and between the two bellows actuators. The fourth operating piece 160c and the like are sandwiched between the two. As the arrangement direction of the first linear actuator 146, as shown in FIGS. 10 and 11, one bellows actuator is placed above the fourth operating piece 160c, and the other bellows actuator is sandwiched between the fourth operating piece 160c. It arrange | positions below that and it arrange | positions so that the driving force of a bellows actuator may act to the perpendicular direction which is a Z-axis direction. In addition, the arrangement direction of the second linear actuator is the direction in which the driving force is applied in the vertical direction, similarly to the first linear actuator 146. The fourth operating piece 160c is configured to extend in a direction perpendicular to the direction in which the driving force of the first linear actuator 146 acts, that is, in a direction parallel to the X-axis direction.

  When tilt adjustment is performed with the stage device 134 of this comparative example, for example, when the tilt table 138 is rotated in the R direction in the figure, air is supplied into the bellows actuator above the first linear actuator 146, and the fourth operation A driving force acts to move the piece 160c in the direction of arrow A shown in FIG.

  However, the fourth operating piece 160 c is fixed to the tilt table 138 and rotates around the point O along the rotation direction of the tilt table 138. Therefore, the fourth operating piece 160c does not move vertically downward (in the direction of arrow A) but moves along the outer periphery of a concentric circle centered on the point O. The locus of this movement is along a direction substantially parallel to the arrow A2 shown in FIG. Therefore, among the driving force transmitted to the fourth operating piece 160c, the driving component in the A2 direction is mainly transmitted to the tilt table 138 via the fourth operating piece 160c, and the tilt adjustment is performed. Note that the moving distance in the rotational movement of the fourth operating piece 160c is a very small locus, and is described here as a straight line.

  On the other hand, the driving component force in the direction of arrow A1, which is substantially perpendicular to the moving direction of the fourth operating piece 160c, is a driving force in a direction different from the moving direction of the fourth operating piece 160c. Although transmitted to the operating piece 160c, it is not used to rotate the tilt table 138. That is, the frictional force is consumed at the contact point between the fourth operating piece 160c and the upper bellows actuator. Due to this friction, the pressing portion at the contact point is worn over time, and the driving force of the bellows actuator is not accurately transmitted to the fourth operating piece 160c, which causes a deviation at the operating point where the driving force acts. Become.

  Next, the arrangement directions of the first linear actuator 46 and the second linear actuator 48 in the stage apparatus according to the present embodiment will be described with reference to FIGS. As the arrangement direction of the first linear actuator 46, as shown in FIG. 8, one bellows actuator is placed diagonally right above the first operating piece 60c and the other bellows actuator is sandwiched by the first operating piece 60c. It arrange | positions in the illustration lower left diagonal, and it arrange | positions so that the driving force of the bellows actuators 68 and 70 may act on the tangential direction in the outer periphery L1 of the concentric circle centering on the point O. FIG. Further, as shown in FIG. 7, the arrangement direction of the second linear actuator 48 is such that the driving force of the bellows actuator acts in the tangential direction on the circumference L2 of the concentric circle centering on the point O, as in the first linear actuator 46. It is arranged at an angle.

  When tilt adjustment is performed by the stage device 34 according to the present embodiment, for example, when the tilt table 38 is rotated in the R direction in the drawing, air is supplied into the bellows actuator 68 diagonally right above the first linear actuator 46, A driving force acts so as to move the first operating piece 60c in the direction of arrow B shown in FIG.

  The first operating piece 60 c is fixed to the tilt table 38 and rotates around the point O along the rotation direction of the tilt table 38. Therefore, the first working piece 60c rotates along the outer periphery of a concentric circle with the point O as the center. The locus of this movement is along a direction substantially parallel to the arrow B shown in FIG. Therefore, the driving force transmitted to the first working piece 60c is used as it is for tilt adjustment by the rotation of the tilt table 38.

  Further, as shown in FIG. 7, the arrangement direction of the second linear actuator 48 is the same as that of the first linear actuator 46, and the second linear actuator 48 is provided on a concentric circle L2 centering on the point O. The second linear actuator 48 is arranged so that the direction of action of the driving force of the second linear actuator 48 is substantially along the tangential direction of the concentric circumference L2. In addition, although description is abbreviate | omitted here about another structure, there exists an effect similar to the 1st linear actuator 46 by such structure.

  Therefore, in the stage device 34 according to the present embodiment, compared to the comparative example, the rotation R direction and the like are almost the same as the direction in which the driving force acts, and the force is less likely to diffuse in the extra direction. The driving force can be used efficiently. Further, since the rotation direction and the direction in which the driving force acts are substantially the same, the generation of friction at the contact portion between the bellows actuator and the operating piece is reduced, and it is possible to suppress wear of the pressing portion due to friction. . As a result, the displacement of the pressing portion at the point of action can be prevented over a long period of time, and highly accurate inclination adjustment can be continued over a long period of time. Furthermore, by suppressing the wear of the pressing portion, the occurrence of contamination due to wear can be suppressed, and the yield can be improved by preventing the contamination from adhering to the workpiece.

  The preferred embodiments of the present invention have been described above, but the present invention is not limited to the above-described embodiments, and various modifications can be made. For example, in this embodiment, the first linear actuator, the second linear actuator, the θ drive mechanism, and the Z drive mechanism are driven by air pressure, and the bellows actuator is driven by fluctuations in air pressure. You may make it comprise the drive mechanism using other fluids, such as oil_pressure | hydraulic.

  In the above embodiment, the lower substrate Wd is raised and brought into contact with the upper substrate Wu. However, the upper stage 20 is provided with a Z drive mechanism so that the upper substrate Wu is lowered and brought into contact with the lower substrate Wd. It may be.

  In the above-described embodiment, the stage apparatus used for bonding the semiconductor substrates has been described. However, the present invention also applies to a stage apparatus used for bonding other substrates such as a glass substrate or a bonding apparatus for semiconductor chips. Applicable.

  In the above-described embodiment, the direction of action of the driving force is along the tangential direction in the initial position state where the first linear actuator 46 and the second linear actuator 48 start driving, and the direction of action of the driving force in the driving state is relative to the tangential direction. However, when at least one of the first linear actuator 46 and the second linear actuator 48 is in the initial position state or the driving state, the acting direction of the driving force is the tangential direction. If the angle is within the range of ± 1 degree, the above-described effects can be obtained.

It is the schematic which shows typically the structure of the board | substrate assembly apparatus provided with the stage apparatus which concerns on embodiment. It is the elements on larger scale which show the structure of a wafer table and a tilt table. It is a perspective view of a stage device (the configuration above the tilt table is not shown). It is the perspective view seen from another angle of the stage apparatus (The structure above a tilt table is abbreviate | omitting illustration). It is sectional drawing which follows the VV line of FIG. It is the elements on larger scale of the 1st linear actuator of FIG. FIG. 6 is an arrangement diagram of a first linear actuator and a second linear actuator with respect to the rotation center of the tilt table. It is a cross-sectional arrangement view of the first linear actuator with respect to the rotation center of the tilt table. It is a figure which shows the relationship between the direction of the driving force of a 1st linear actuator, and a tangent direction. It is a section arrangement figure of the 1st linear actuator to the rotation center of a tilt table in a comparative example. It is a figure which shows the relationship between the direction of the driving force of the 1st linear actuator in a comparative example, and a tangent direction.

Explanation of symbols

34 ... Stage device 36 ... Wafer table (table part) 38 ... Tilt table (table part) 38c ... Bearing part 45 ... Support table 46 ... First linear actuator (first actuator) 48 ... Second linear Actuator (second actuator), 50 ... θ drive mechanism (θ drive means), 52 ... Z drive mechanism (Z drive means), 52c ... Connection ball, 45e ... V groove, 60 ... First actuating part, 62 ... Second Actuator, 68, 70, 74, 76, 78, 80 ... bellows actuator, L ... axis, L1, L2 ... circumference, O ... rotation center, R ... rotation direction, Wu ... upper substrate, Wd ... lower substrate (Workpiece).

Claims (9)

A table portion for holding a workpiece on one surface;
A first actuator for rotating the table portion around one axis extending along the one surface of the table portion;
A second actuator for rotating the table portion around another axis extending along the one surface of the table portion and intersecting the one axis ;
The table portion has at least a first operating portion linked to the first actuator, and the first operating portion is on the other surface side located on the opposite side of the one surface of the table portion. It is arranged on a line segment perpendicular to the one axis when viewed in plan,
The direction of each of the driving force applied from the first actuator and the second actuator to the table portion is a tangential direction of an arc drawn by the point of application of the driving force when the table portion is rotated by the driving force. A stage device characterized by substantially following the above. It said table section, the stage apparatus according to claim 1, characterized in that it comprises a spherical bearing portion before Symbol another surface.   The stage device according to claim 2, wherein the bearing portion is a non-contact fluid bearing. The table portion further includes a second operating portion linked to the second actuator, and the second operating portion is a line perpendicular to the other axis when viewed from above on the other surface side. The stage apparatus according to any one of claims 1 to 3, wherein the stage apparatus is arranged on the minute side . The stage apparatus according to any one of claims 1 to 4, wherein the one axis and the other axis are orthogonal to each other. A θ driving means is provided for rotating the table portion around an axis passing through an intersection of the one axis and the other axis and extending perpendicularly to the one surface. The stage device according to any one of 1 to 5 . The stage apparatus according to claim 6 , wherein the first actuator, the second actuator, and the θ driving unit are bellows actuators that are driven by supplying and discharging a gas.   The Z driving means for moving the table portion in a direction perpendicular to the one surface, wherein the Z driving means is linked to the table portion by kinematic coupling. The stage device according to any one of claims 7 to 9. The stage apparatus according to claim 8 , wherein the Z driving means is an air bearing cylinder.

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