JP2017126601A - Table device, positioning apparatus, flat panel display manufacturing apparatus and precision machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a table device which can prevent the lack of positioning accuracy.SOLUTION: A table device comprises: a table; only one first driver which has a first movable member moving along a first driving axis by the operation of a first actuator coupled to the table, and which is arranged so that a position of a table center axis in a second axial direction may coincide with a position of the first driving axis; at least two second drivers each of which has a second movable member moving along a second driving axis by the operation of a second actuator coupled to the table, and which is arranged so that a position of the table center axis in a first axial direction may differ from a position of the second driving axis; and a preloading device which applies, in advance, force in a rotation direction around the table center axis to the table.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a table device, a positioning device, a flat panel display manufacturing device, and a precision machine.

  In a device manufacturing process or device measuring process, a table apparatus having a table for supporting a workpiece is used. The table device moves the table and determines the position of the work supported by the table. A table device that can move a table in three directions of an X-axis direction, a Y-axis direction, and a θZ direction as disclosed in Patent Document 1 is known.

JP2015-117958A

  In a table movable in three directions, if the positioning accuracy of the table is insufficient, the performance of the manufactured device may be deteriorated. Therefore, there is a demand for a technique that can suppress a lack of positioning accuracy of a table that can move in three directions.

  An object of an aspect of the present invention is to provide a table device, a positioning device, a flat panel display manufacturing device, and a precision machine that can suppress a shortage of positioning accuracy.

  According to a first aspect of the present invention, a base member having a guide surface, a first axial direction parallel to a first axis in a predetermined plane supported by the base member and parallel to the guide surface, the first A table rotatable about a second axis direction parallel to the second axis in the predetermined plane orthogonal to the axis and a table central axis parallel to the third axis orthogonal to the predetermined plane, and supported by the base member A first movable member connected to the table and moving along a first drive shaft parallel to the first axis by the operation of the first actuator, and the second axial direction The first drive device provided only one so that the position of the table central axis and the position of the first drive shaft coincide with each other, a second actuator supported by the base member, and the table. The second actuator A second movable member that moves along a second drive shaft that is parallel to the second shaft by operation, and a position of the table center axis and a position of the second drive shaft in the first axis direction, There is provided a table device provided with at least two second drive devices provided so as to be different from each other, and a preload device that preliminarily applies a force in the rotational direction about the table central axis to the table.

  According to the first aspect of the present invention, the table is rotated about the first axis direction, the second axis direction, and the table central axis by one first driving device and at least two second driving devices. It can move in three directions. Insufficient positioning accuracy because the table is provided with a preload device that applies a force in the rotation direction about the table center axis in advance, so that a moment always acts on the table in the rotation direction and there is no play in the mechanism of the table device. Is suppressed.

  In the first aspect of the present invention, the preload device includes a preload generator that generates a force in the rotational direction, and a preload drive that is connected to the table and parallel to the second shaft by the force generated by the preload generator. A preload movable member that moves along the axis, and the position of the table central axis and the position of the preload drive shaft in the first axis direction may be different from each other.

  Thereby, a moment can be smoothly given to a table with the force which a preload generating part generates.

  In the first aspect of the present invention, at least two preload devices are provided so that a position of the table central axis and a position of the preload drive shaft in the first axis direction are different, and at least two of the preload devices. The force applied to the table may be different.

  Thereby, since different forces can be applied to different positions of the table by the two preloading devices, it is possible to suppress an insufficient positioning accuracy of the table in the rotation direction by applying a moment to the table.

  In the first aspect of the present invention, of the at least two preload devices, one of the preload devices is connected to one end of the table in the second axial direction, and one of the preload devices is You may connect with the other edge part of the said table of a 2nd axial direction.

  As a result, the force can be applied to different positions of the table that are point-symmetric with respect to the table center axis by the two preloading devices, so that a moment is applied to the table to suppress insufficient positioning accuracy of the table in the rotational direction. can do.

  In the first aspect of the present invention, the preload generator may include a preload actuator supported by the base member.

  Thereby, a moment can be given to the table by the power generated by the preload actuator.

  In the first aspect of the present invention, the apparatus includes a chamber device having an internal space in which at least a part of the table and the preload movable member is disposed, and a bellows connecting the chamber device and the preload movable member. The preload generator may include the bellows.

  Thereby, the work supported by the table can be processed in the internal space of the chamber apparatus in which the environment is managed. Further, a moment can be applied to the table by using the elastic force of the bellows provided in the chamber device.

  In the first aspect of the present invention, the first movable member, the second movable member, and the preload movable member are arranged such that the lower surface of the table and the guide surface of the base member face each other with a gap therebetween. A support device for supporting the table, wherein the support device is disposed on the rod member around a rod member fixed to the table and a rod central axis disposed around the rod member and parallel to the third axis. The lower surface of the table and the guide surface of the base member come into contact with each other when a load of a predetermined value or more is applied to the table in a third axis direction parallel to the third axis. And a rotary bearing that guides the rod member in a third axial direction.

  Thereby, the displacement of the table in the third axial direction is allowed by the rotary bearing. When a load in the third axial direction equal to or greater than a predetermined value acts on the table, the table is guided by the rotary bearing and moves, and is supported by the guide surface of the base member. The table can be moved straight in the third axial direction by the rotary bearing. Further, even if the table rotates about the table center axis, the moment acting on the first drive device, the second drive device, and the preload device is suppressed by the relative rotation of the rod member and the rotary bearing. Therefore, insufficient positioning accuracy of the table device is suppressed.

  In the first aspect of the present invention, the first movable member includes a first linear bearing guided in a first axial direction by a first guide member provided on the base member, and the support device via the support device. A second linear bearing guided in the second axial direction by a second guide member coupled to the table may be included.

  As a result, the first linear bearing that moves along the first drive shaft in the base member and the second linear bearing that is connected to the table and moves in the second axial direction pass through the support device including the rod member and the rotary bearing. Connected. Therefore, even when the table rotates about the table center axis, the moment acting on the first linear bearing and the first guide member is suppressed by the relative rotation of the rod member and the rotary bearing. Therefore, insufficient positioning accuracy of the table device is suppressed.

  In the first aspect of the present invention, the second movable member includes a third linear bearing guided in the second axial direction by a third guide member provided on the base member, and the support device via the support device. And a fourth linear bearing guided in the first axial direction by a fourth guide member coupled to the table.

  As a result, the third linear bearing that moves along the second drive shaft in the base member and the fourth linear bearing that is connected to the table and moves in the first axial direction pass through the support device including the rod member and the rotary bearing. Connected. Therefore, even when the table rotates about the table center axis, the moment acting on the third linear bearing and the third guide member is suppressed by the relative rotation of the rod member and the rotary bearing. Therefore, insufficient positioning accuracy of the table device is suppressed.

  In the first aspect of the present invention, the preload movable member includes a fifth linear bearing guided in a second axial direction by a fifth guide member provided on the base member, and the table via the support device. And a sixth linear bearing guided in the first axial direction by a sixth guide member coupled to the first guide member.

  As a result, the fifth linear bearing that moves along the second drive shaft in the base member and the sixth linear bearing that is connected to the table and moves in the first axial direction pass through the support device including the rod member and the rotary bearing. Connected. Therefore, even when the table rotates about the table center axis, the moment acting on the fifth linear bearing and the fifth guide member is suppressed by the relative rotation of the rod member and the rotary bearing. Therefore, insufficient positioning accuracy of the table device is suppressed.

  In the first aspect of the present invention, of the at least two second drive devices, one of the second drive devices is connected to one end of the table in the second axial direction, and is connected to one of the first drive devices. The two-drive device may be coupled to the other end of the table in the second axial direction.

  Thereby, one second driving device is connected to one end of the second axial table, and one second driving device is connected to the other end of the second axial table, Insufficient positioning accuracy of the table device is suppressed, and an increase in size and complexity of the table device are suppressed.

  According to a second aspect of the present invention, there is provided a positioning apparatus that includes the table device of the first aspect and determines the position of a work supported by the table of the table device.

  According to the 2nd aspect of this invention, the shortage of the positioning accuracy of the workpiece | work supported by the table is suppressed.

  According to the 3rd aspect of this invention, a flat panel display manufacturing apparatus provided with the table apparatus of a 1st aspect and the process part which processes the workpiece | work supported by the said table is provided.

  According to the 3rd aspect of this invention, since the flat panel display manufacturing apparatus can process the workpiece | work positioned by the table, it is suppressed that a defective product is manufactured from the workpiece | work. The flat panel display manufacturing apparatus includes, for example, a bonding apparatus that bonds two substrates, and is used in at least a part of the flat panel display manufacturing process. The flat panel display includes at least one of a liquid crystal display, a plasma display, and an organic EL display.

  According to a fourth aspect of the present invention, there is provided a precision machine comprising the table device of the first aspect and a processing unit for processing a work supported by the table.

  According to the fourth aspect of the present invention, since the precision machine can process the workpiece positioned by the table, it is possible to suppress a defective product from being manufactured from the workpiece. The precision machine includes, for example, one or both of a precision measuring machine and a precision processing machine. Since the precision measuring machine can measure the workpiece positioned by the table, the workpiece can be measured accurately. Since the precision processing machine can process the workpiece positioned by the table, the workpiece can be processed precisely.

  According to the aspects of the present invention, there are provided a table device, a positioning device, a flat panel display manufacturing device, and a precision machine that can suppress a lack of positioning accuracy.

FIG. 1 is a plan view showing an example of a table device according to the first embodiment. FIG. 2 is a side sectional view showing an example of the table device according to the first embodiment. FIG. 3 is a plan view showing an example of the first drive device according to the first embodiment. FIG. 4 is a side sectional view showing an example of the preload device according to the first embodiment. FIG. 5 is a diagram illustrating an example of a support device according to the first embodiment. FIG. 6 is a plan view showing an example of a table device according to the second embodiment. FIG. 7 is a plan view showing an example of a table device according to the third embodiment. FIG. 8 is a plan view showing an example of a table device according to the fourth embodiment. FIG. 9 is a plan view showing an example of a table device according to the fifth embodiment. FIG. 10 is a side sectional view showing an example of a table device according to the fifth embodiment. FIG. 11 is a plan view showing an example of a table device according to the sixth embodiment. FIG. 12 is a diagram illustrating an example of a flat panel display manufacturing apparatus according to the seventh embodiment. FIG. 13 is a diagram illustrating an example of a precision machine according to the eighth embodiment. FIG. 14 is a diagram illustrating an example of a precision machine according to the ninth embodiment.

  Hereinafter, embodiments according to the present invention will be described with reference to the drawings, but the present invention is not limited thereto. The components of each embodiment described below can be combined as appropriate. Some components may not be used.

  In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each part will be described with reference to this XYZ orthogonal coordinate system. A direction parallel to the first axis in the predetermined plane is defined as an X-axis direction (first axis direction). A direction parallel to the second axis in a predetermined plane orthogonal to the first axis is defined as a Y-axis direction (second axis direction). A direction parallel to the third axis perpendicular to the predetermined plane is defined as a Z-axis direction (third axis direction). A rotation (tilt) direction around the X axis (first axis) is defined as a θX direction. A rotation (tilt) direction around the Y axis (second axis) is defined as a θY direction. A rotation (tilt) direction around the Z axis (third axis) is defined as a θZ direction. The predetermined plane includes an XY plane. In the present embodiment, the predetermined plane and the horizontal plane are parallel. The Z-axis direction is the vertical direction. The X axis is orthogonal to the YZ plane. The Y axis is orthogonal to the XZ plane. The Z axis is orthogonal to the XY plane. The XY plane includes an X axis and a Y axis. The XZ plane includes an X axis and a Z axis. The YZ plane includes a Y axis and a Z axis.

<First Embodiment>
A first embodiment will be described. FIG. 1 is a plan view showing an example of a table apparatus 100A according to the present embodiment. FIG. 2 is a side sectional view showing an example of the table apparatus 100A according to the present embodiment. FIG. 2 corresponds to an AA arrow view of FIG.

  As shown in FIGS. 1 and 2, the table apparatus 100A includes a table 1 having an upper surface 1A and a lower surface 1B, a base member 2 having an upper surface 2A facing the lower surface 1B of the table 1, and a moving system that moves the table 1. 9.

  The table 1 supports the workpiece S. The workpiece S is supported on the upper surface 1A of the table 1. The table 1 is movably supported by the base member 2. The upper surface 2A of the base member 2 is parallel to the XY plane. The upper surface 2A of the base member 2 is a guide surface that guides the table 1 in the XY plane. While being supported by the base member 2, the table 1 is movable in three directions, ie, an X-axis direction, a Y-axis direction, and a rotation direction (θZ direction) about the table center axis AX parallel to the Z-axis. is there. The table center axis AX passes through the center of gravity of the table 1.

  The table device 100A functions as a positioning device that determines the position of the workpiece S. A positioning device including the table device 100 </ b> A determines the position of the workpiece S supported by the table 1. The table device may be referred to as a positioning device.

  The moving system 9 includes a first drive device 9X that applies a force in the X-axis direction to the table 1, and a second drive device 9Y that applies a force in the Y-axis direction to the table 1. The first drive device 9X and the second drive device 9Y are supported by the base member 2.

  FIG. 3 is a plan view showing an example of the first drive device 9X according to the present embodiment. As shown in FIGS. 1, 2, and 3, the first driving device 9 </ b> X is supported by the base member 2 and generates a power for moving the table 1 in the X-axis direction, and the table 1 and a first movable member 8X that moves along a first drive axis DX parallel to the X-axis by the operation of the first actuator 7X.

  The first actuator 7X is connected to the ball screw mechanism 10B through the coupling 10C. The power generated by the first actuator 7X is transmitted to the first movable member 8X via the ball screw mechanism 10B. The ball screw mechanism 10B of the first drive device 9X includes a ball screw that is rotated by the power generated by the first actuator 7X, and a nut that is disposed around the ball screw.

  The first movable member 8X includes a first linear bearing 21 guided in the X-axis direction by a first guide member 11 provided on the base member 2, and a second guide member connected to the table 1 via the support device 3. 12 and a second linear bearing 22 guided in the Y-axis direction. The first guide member 11 is fixed to the base member 2 so as to extend in the X-axis direction. The first linear bearing 21 is connected to the nut of the ball screw mechanism 10 </ b> B, and is movable along the first drive shaft DX while being guided by the first guide member 11. The second guide member 12 is connected to the + X side end of the table 1 via the support device 3 so as to extend in the Y-axis direction. The second linear bearing 22 is fixed to the first linear bearing 21 via the first connecting member 31. The second guide member 12 is connected to the support device 3 via the second connection member 32.

  When the first actuator 7X operates, the ball screw of the ball screw mechanism 10B rotates. Thereby, the first linear bearing 21 moves in the X-axis direction. The first linear bearing 21 is guided in the X-axis direction by the first guide member 11 provided on the base member 2 and moves along the first drive axis DX. When the first linear bearing 21 moves in the X-axis direction, the second linear bearing 22 and the second guide member 12 fixed to the first linear bearing 21 via the first support member 31 are connected to the first linear bearing 21. Move together in the X-axis direction. When the second linear bearing 22 and the second guide member 12 move in the X-axis direction, the table 1 connected to the second guide member 12 via the second connection member 32 and the support device 3 is moved to the second guide member 12. Move along the X axis.

  The second driving device 9Y is supported by the base member 2 and connected to the table 1 and a second actuator 7Y that generates power for moving the table 1 in the Y-axis direction. And a second movable member 8Y that moves along a second drive axis DY parallel to the first drive axis DY.

  The second actuator 7Y is connected to the ball screw mechanism 10B through the coupling 10C. The power generated by the second actuator 7Y is transmitted to the second movable member 8Y via the ball screw mechanism 10B. The ball screw mechanism 10B of the second drive device 9Y includes a ball screw that is rotated by the power generated by the second actuator 7Y, and a nut that is disposed around the ball screw.

  The second movable member 8Y includes a third linear bearing 23 guided in the Y-axis direction by a third guide member 13 provided on the base member 2, and a fourth guide member connected to the table 1 via the support device 3. 14 and a fourth linear bearing 24 guided in the X-axis direction. The third guide member 13 is fixed to the base member 2 so as to extend in the Y-axis direction. The third linear bearing 23 is connected to the nut of the ball screw mechanism 10 </ b> B and is movable along the second drive shaft DY while being guided by the third guide member 13. The fourth guide member 14 is coupled to the −Y side end of the table 1 via the support device 3 so as to extend in the X-axis direction. The fourth linear bearing 24 is fixed to the third linear bearing 23 via the third connection member 33. The fourth guide member 14 is connected to the support device 3 via the fourth connection member 34.

  When the second actuator 7Y operates, the ball screw of the ball screw mechanism 10B rotates. Thereby, the 3rd linear bearing 23 moves to a Y-axis direction. The third linear bearing 23 is guided in the Y-axis direction by the third guide member 13 provided on the base member 2 and moves along the second drive shaft DY. When the third linear bearing 23 moves in the Y-axis direction, the fourth linear bearing 24 and the fourth guide member 14 fixed to the third linear bearing 23 via the third support member 33 are connected to the third linear bearing 23. Move together in the Y-axis direction. When the fourth linear bearing 24 and the fourth guide member 14 move in the Y-axis direction, the table 1 connected to the fourth guide member 14 via the fourth connection member 34 and the support device 3 is connected to the fourth guide member 14. And move in the Y-axis direction.

  When the table 1 moves in the X-axis direction by the operation of the first drive device 9X, the fourth guide member 14 and the fourth linear bearing 24 move relative to each other in the X-axis direction. The table 1 moves in the X-axis direction while being guided by the fourth guide member 14 and the fourth linear bearing 24. When the table 1 moves in the Y-axis direction by the operation of the second drive device 9Y, the second guide member 12 and the second linear bearing 22 move relative to each other in the Y-axis direction. The table 1 moves in the X-axis direction while being guided by the second guide member 12 and the second linear bearing 22.

  Thus, the movement system 9 can move the table 1 in the X-axis direction by operating the first actuator 7X of the first driving device 9X. Further, the moving system 9 can move the table 1 in the Y-axis direction by operating the second actuator 7Y of the second drive device 9Y.

  As shown in FIG. 1, only one first driving device 9X is provided so that the position of the table center axis AX and the position of the first driving axis DX in the Y-axis direction coincide. At least two second drive devices 9Y are provided such that the position of the table center axis AX and the position of the second drive axis DY in the X-axis direction are different.

  In the present embodiment, one first driving device 9 </ b> X is coupled to the + X side end of the table 1. Two second driving devices 9 </ b> Y are coupled to the −Y side end of the table 1. The movement system 9 can move the table 1 in the θZ direction (rotation direction) by changing the operation amount of the second actuators 7Y of the plurality (two) of the second drive devices 9Y.

  In the present embodiment, the table device 100A includes a preload device 40 that preliminarily applies a force in the rotation direction (θZ direction) about the table center axis AX to the table 1. The preload device 40 always applies a force in the θZ direction to the table 1. The preload device 40 is constant in a certain direction around the table center axis AX when one or both of the first drive device 9X and the second drive device 9Y generate a force for moving the table 1. Will continue to be applied to Table 1. The force (preload) generated by the preload device 40 is smaller than the force (drive force) generated by the first drive device 9X and the force (drive force) generated by the second drive device 9Y.

  FIG. 4 is a side sectional view showing an example of the preload device 40 according to the present embodiment, and corresponds to a view taken along the line B-B in FIG. 1.

  As shown in FIGS. 1 and 4, the preload device 40 is supported by the base member 2 and is connected to the table 1 and a preload actuator 7 </ b> P that generates power for applying a force in the θZ direction to the table 1. And a preload movable member 8P that moves along a preload drive shaft DP parallel to the Y axis by the power generated by 7P. In the present embodiment, one preload device 40 is connected to the + Y side end of the table 1. The preload device 40 is provided such that the position of the table center axis AX and the position of the preload drive shaft DP in the X-axis direction are different. The preloading device 40 applies a force to the table 1 in the −Y direction to apply a constant force to the table 1 in a certain direction around the table center axis AX.

  In the present embodiment, the preload actuator 7P is an air cylinder. The cylinder portion of the preload actuator 7 </ b> P is fixed to the base member 2.

  The preload movable member 8P includes a fifth linear bearing 25 guided in the Y-axis direction by a fifth guide member 15 provided in the base member 2, and a sixth guide member 16 connected to the table 1 via the support device 3. And a sixth linear bearing 26 guided in the X-axis direction.

  The fifth guide member 15 is fixed to the base member 2 so as to extend in the Y-axis direction. The fifth linear bearing 25 is connected to the rod portion of the air cylinder via the fifth connection member 35 and is movable along the preload drive shaft DP while being guided by the fifth guide member 15. The sixth guide member 16 is connected to the + Y side end of the table 1 via the support device 3 so as to extend in the X-axis direction. The sixth linear bearing 26 is fixed to the fifth linear bearing 25 via the fifth connecting member 35. The sixth guide member 16 is connected to the support device 3 via the sixth connection member 36.

  When the preload actuator 7P operates, the fifth linear bearing 25 moves in the Y-axis direction. The fifth linear bearing 25 is guided in the Y-axis direction by the fifth guide member 15 provided on the base member 2 and moves along the preload drive shaft DP. When the fifth linear bearing 25 moves in the Y-axis direction, the sixth linear bearing 26 and the sixth guide member 16 fixed to the fifth linear bearing 25 via the fifth support member 35 are connected to the fifth linear bearing 25. Move together in the Y-axis direction. When the sixth linear bearing 26 and the sixth guide member 16 move in the Y-axis direction, the table 1 connected to the sixth guide member 16 via the sixth connection member 36 and the support device 3 moves in the θZ direction. .

  As shown in FIGS. 1 and 2, the table apparatus 100 </ b> A is connected to the −X side end of the table 1, and guides the table 1 in the X-axis direction, and + Y of the table 1. And a second guide device 50Y that is coupled to the side end and guides the table 1 in the Y-axis direction. The first guide device 50X and the second guide device 50Y do not include a power source such as an actuator.

  The first guide device 50X includes a seventh linear bearing 27 guided in the X-axis direction by a seventh guide member 17 provided on the base member 2, and an eighth guide member connected to the table 1 via the support device 3. 18 and an eighth linear bearing 28 guided in the Y-axis direction. The seventh guide member 17 is fixed to the base member 2 so as to extend in the X-axis direction. The seventh linear bearing 27 is movable in the X-axis direction while being guided by the seventh guide member 17. The eighth guide member 18 is connected to the −X side end of the table 1 via the support device 3 so as to extend in the Y-axis direction. The eighth linear bearing 28 is fixed to the seventh linear bearing 27 via the seventh connection member 37. The eighth guide member 18 is connected to the support device 3 via the eighth connection member 38.

  The second guide device 50Y includes a ninth linear bearing 29 guided in the Y-axis direction by a ninth guide member 19 provided in the base member 2, and a tenth guide member connected to the table 1 via the support device 3. 20 and a tenth linear bearing 30 guided in the X-axis direction. The ninth guide member 19 is fixed to the base member 2 so as to extend in the Y-axis direction. The ninth linear bearing 29 is movable in the Y-axis direction while being guided by the ninth guide member 19. The tenth guide member 20 is connected to the + Y side end of the table 1 via the support device 3 so as to extend in the X-axis direction. The tenth linear bearing 30 is fixed to the ninth linear bearing 29 via the seventh connection member 37. The tenth guide member 20 is connected to the support device 3 via the eighth connection member 38.

  When the table 1 moves in the X axis direction by the operation of the first drive device 9X, the tenth guide member 20 and the tenth linear bearing 30 move relative to each other in the X axis direction. The table 1 moves in the X-axis direction while being guided by the tenth guide member 20 and the tenth linear bearing 30. When the table 1 moves in the Y-axis direction by the operation of the second drive device 9Y, the eighth guide member 18 and the eighth linear bearing 28 move relative to each other in the Y-axis direction. The table 1 moves in the Y-axis direction while being guided by the eighth guide member 18 and the eighth linear bearing 28.

  Next, the support device 3 will be described. FIG. 5 is a diagram illustrating an example of the support device 3 according to the present embodiment. In the following description, the support device 3 that connects the table 1 and the second guide member 12 (second connection member 32) of the first drive device 9X will be described. A support device 3 for connecting the table 1 and the second drive device 9Y, a support device 3 for connecting the table 1 and the preload device 40, a support device 3 for connecting the table 1 and the first guide device 50X, and the table 1 Since the support device 3 that connects the first guide device 50X has the same structure, the description thereof is omitted.

  2 and 5, the support device 3 supports the table 1 so that the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 face each other with a gap G therebetween. The support device 3 is disposed around the rod member 5 fixed to the table 1, the rod member 5, and is rotatable relative to the rod member 5 about a rod center axis J parallel to the Z axis. A rotary bearing 4 that guides the rod member 5 in the Z-axis direction so that the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 come into contact with each other when a load of a predetermined value or more is applied to the table 1 in the axial direction. .

  The rod member 5 is provided so as to protrude upward from the upper surface 1A of the table 1. The rod member 5 includes a rod portion 5L and flange portions 5F arranged at the upper end portion and the lower end portion of the rod portion 5L.

  The rotary bearing 4 is substantially cylindrical. The rotary bearing 4 is disposed around the rod portion 5L. The rotary bearing 4 is supported by the casing 3C. The second guide member 12 is connected to the rotary bearing 4 via the second connection member 32 and the casing 3C.

  The rotary bearing 4 includes a ball bearing. The rotary bearing 4 includes an inner ring 4A disposed so as to contact the rod portion 5L, an outer ring 4B disposed around the inner ring 4A, and a ball 4C disposed between the inner ring 4A and the outer ring 4B. . In the present embodiment, two ball bearings including the inner ring 4A, the outer ring 4B, and the ball 4C are arranged in the vertical direction (direction parallel to the rod central axis J).

  The rotary bearing 4 allows the movement of the rod member 5 in the Z-axis direction. By adjusting the amount of preload applied to the rotary bearing 4, the movement of the rod member 5 in the Z-axis direction is allowed. The rod member 5 is supported by the rotary bearing 4 so as to be movable in the Z-axis direction. In the present embodiment, the table 1 is movable in the Z-axis direction with respect to the first drive device 9X. In other words, displacement of the table 1 in the Z-axis direction with respect to the first driving device 9X is allowed. However, when the movement of the rod member 5 in the Z-axis direction is allowed by the rotary bearing 4 and a decrease in positioning accuracy of the table 1 in the X-axis direction becomes a problem, preload is applied and there is no gap in the radial direction. Movement of the rod member 5 in the Z-axis direction may be allowed using a needle bearing. Further, when the movement amount of the rod member 5 is small, the movement of the rod member 5 in the Z-axis direction may be allowed due to the axial rigidity of the rotary bearing 4. Further, the rotary bearing 4 is combined in front, and the movement of the rod member 5 in the vertical direction is allowed by the rotation in the θY direction of the bearing portion composed of the combined rotary bearings 4 in the front and the rotation in the θY direction of the linear bearing 11. May be.

  Next, an example of the operation of the table apparatus 100A according to the present embodiment will be described. The position of the work S supported by the table 1 in the XY plane is adjusted by the moving system 9. When adjusting the position of the workpiece S in the X-axis direction, the moving system 9 operates the first actuator 7X of the first drive device 9X. When adjusting the position of the workpiece S in the Y-axis direction, the moving system 9 operates the second actuator 7Y of the second drive device 9Y. When adjusting the position of the workpiece S in the θZ direction, the moving system 9 operates the two second actuators 7Y by changing the operation amounts of the second actuators 7Y of the two second drive devices 9Y.

  Before the table 1 is moved by the movement system 9, the preload device 40 starts to apply a force in the rotation direction about the table center axis AX to the table 1 in advance. That is, the preload device 40 has a constant force in a constant direction around the central axis AX even in a state where the first drive device 9X and the second drive device 9Y do not generate a force for moving the table 1. Is given to Table 1. In addition, after the movement system 9 is activated to move the table 1, the preload device 40 generates a force by which one or both of the first drive device 9X and the second drive device 9Y move the table 1. In this state, a constant force is continuously applied to the table 1 in a certain direction around the central axis AX.

  In the present embodiment, the first drive device 9X is provided so that the position of the table center axis AX and the position of the first drive axis DX coincide with each other in the Y-axis direction. The first drive shaft DX includes a power point when the first drive device 9X applies a force to the table 1. In the present embodiment, the first drive shaft DX includes the central axis of the ball screw of the ball screw mechanism 10B of the first drive device 9X and is parallel to the X axis. Further, with respect to the Y-axis direction, the position of the first drive shaft DX coincides with the central axis (rod central axis J) of the rotary bearing 4. By matching the position of the table center axis AX and the position of the first drive axis DX in the Y-axis direction, even if the table 1 rotates in the θZ direction around the table center axis AX, the first drive device 9X Interference between the second linear bearing 22 and the second guide member 12 is suppressed, and a smooth guide of the second linear bearing 22 by the second guide member 12 is maintained. Therefore, insufficient positioning accuracy of the table device 100A is suppressed.

  In the present embodiment, two second drive devices 9Y are provided so that the position of the table center axis AX and the position of the second drive axis DY differ in the X-axis direction. The second drive shaft DY includes a power point when the second drive device 9Y applies a force to the table 1. In the present embodiment, the second drive shaft DY includes the center axis of the ball screw of the ball screw mechanism 10B of the second drive device 9Y and is parallel to the Y axis. With respect to the X-axis direction, the position of the second drive shaft DY coincides with the central axis (rod central axis J) of the rotary bearing 4. Since the position of the table center axis AX and the position of the second drive axis DY in the X-axis direction are different, the table 1 can move in the Y-axis direction and the θZ direction.

  When the table 1 rotates in the θZ direction around the table center axis AX, the position of the table center axis AX and the position of the first drive axis DX in the Y axis direction are shifted (offset), and due to the offset, There is a possibility that a moment acts on the second linear bearing 22 and the second guide member 12. In the present embodiment, the table 1 and the first drive device 9 </ b> X are connected via a support device 3 including a rotary bearing 4. Therefore, even if the table 1 rotates in the θZ direction about the table center axis AX, the relative rotation between the rod member 5 and the rotary bearing 4 in the coupling device 3 acts on the second linear bearing 22 and the second guide member 12. The moment to do is suppressed. Therefore, the positioning error of the table apparatus 100A is reduced.

  Similarly, the table 1 and the second drive device 9Y are connected via the support device 3, the table 1 and the preload device 40 are connected via the support device 3, and the table 1 and the first guide device 50X are supported. Since the table 1 and the second guide device 50Y are connected via the support device 3, the moment acting on the fourth linear bearing 24 and the fourth guide member 14, the sixth linear bearing is connected. 26, the moment acting on the sixth guide member 16, the moment acting on the eighth linear bearing 28 and the eighth guide member 18, and the moment acting on the tenth linear bearing 30 and the second guide member 20 are suppressed. Therefore, the positioning error of the table apparatus 100A is reduced.

  In addition, a load in the −Z direction may act on the table 1 in a device manufacturing process or the like using the table apparatus 100A. When the load in the Z-axis direction on the table 1 is zero, the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 face each other with a gap G therebetween. When the load in the Z-axis direction on the table 1 is less than a predetermined value and the load in the Z-axis direction acts on the table 1, the table 1 is lowered so that the size of the gap G is reduced. When the load in the Z-axis direction on the table 1 is less than a predetermined value, the support device 3 supports the table 1 so that the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 do not contact each other.

  When the load in the Z-axis direction on the table 1 is less than a predetermined value and the gap G is formed, the table 1 can move smoothly in the horizontal direction by the operation of the moving system 9.

  The support device 3 allows the table 1 to move in the Z-axis direction by the size of the gap G. The dimension of the gap G is the distance between the lower surface 1B and the upper surface 2A when the load in the Z-axis direction on the table 1 is zero (no load). When a load in the −Z direction acts on the table 1, the table 1 moves downward (−Z direction) while being guided by the support device 3. As the table 1 moves downward, the lower surface 1B of the table 1 contacts the upper surface 2A of the base member 2. When the vertical downward force on the table 1 is a predetermined value, the lower surface 1B of the table 1 contacts the upper surface 2A of the base member 2. The support device 3 guides the table 1 in the Z-axis direction so that the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 come into contact with each other when a vertically downward load of a predetermined value or more acts on the table 1. . The table 1 is supported on the upper surface 2 </ b> A of the base member 2 by the lower surface 1 </ b> B of the table 1 contacting the upper surface 2 </ b> A of the base member 2.

  The dimension of the gap G is determined so that the lower surface 1B and the upper surface 2A come into contact before an excessive load (overload) is applied to the support device 3. In other words, the dimension of the gap G is determined so that no overload acts on the support device 3 even if the table 1 moves in the Z-axis direction within the range of the dimension of the gap G. The state where the overload is applied to the support device 3 is a state where a load exceeding the static load rating is applied to the support device 3, and the ball 4C is detached from the guide grooves of the inner ring 4A and the outer ring 4B. A state in which a load acts on the support device 3 is exemplified.

  The predetermined value means that a load in the −Z direction acts on the table 1, the support device 3 cannot maintain the position of the table 1 in the Z-axis direction, the table 1 moves in the −Z direction, and the lower surface 1B of the table 1 And the upper surface 2 </ b> A of the base member 2, and the value of the −Z direction load acting on the table 1 when the dimension of the gap G becomes zero. When the load acting on the table 1 is zero (no load), the table 1 does not move in the −Z direction, the position of the table 1 in the Z-axis direction is maintained, and the gap G between the lower surface 1B and the upper surface 2A is Maintained. When a load in the -Z direction acts on the table 1, the movement of the table 1 in the -Z direction is started. When the load acting on the table 1 is less than a predetermined value, the table 1 moves in the −Z direction and the size of the gap G gradually decreases, but the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 are separated from each other. Yes. When the load acting on the table 1 reaches a predetermined value, the lower surface 1B of the table 1 moved in the −Z direction comes into contact with the upper surface 2A of the base member 2, and the size of the gap G becomes zero.

  Note that the size of the gap G that allows the lower surface 1B and the upper surface 2A to contact each other before an overload is applied to the support device 3 and the predetermined value of the load can be obtained in advance based on experiments or simulations. Based on the obtained data, the dimension of the gap G and the predetermined value of the load suitable for the support device 3 to be used are determined.

  As described above, according to the present embodiment, the table 1 has the X-axis direction, the Y-axis direction, and the table central axis AX by one first driving device 9X and at least two second driving devices 9Y. It can move in three directions of rotation direction. By providing the table 1 with a preload device 40 that applies a force in the rotational direction about the table center axis AX in advance, a moment always acts on the table 1 in the rotational direction, and there is no play in the mechanism of the table device 1A. Insufficient positioning accuracy is suppressed.

  In the present embodiment, the preload device 40 includes a preload actuator 7P, which is a preload generator that generates a force in the rotational direction, and a preload drive that is connected to the table 1 and parallel to the Y axis by the force generated by the preload actuator 7P. A preload movable member 8P that moves along the axis DP, and is provided such that the position of the table center axis AX and the position of the preload drive axis DP in the X-axis direction are different. Thereby, the moment can be smoothly applied to the table 1 by the force generated by the preload actuator 7P along the preload drive shaft DP.

  In the present embodiment, the first drive device 9X, the second drive device 9Y, the preload device 40, the first guide device 50X, and the second guide device 50Y are each connected to the table 1 via the support device 3. The Thereby, the displacement of the table 1 in the Z-axis direction is allowed by the rotary bearing 4 of the support device 3. When a load in the Z-axis direction that is equal to or greater than a predetermined value acts on the table 1, the table 1 moves while being guided by the rotary bearing 4 and is supported on the upper surface 2 </ b> A of the base member 2. The table 1 can be moved straight in the Z-axis direction by the rotary bearing 4. Even if the table 1 rotates about the table center axis AX, the first drive device 9X, the second drive device 9Y, the preload device 40, and the first guide device are caused by the relative rotation between the rod member 5 and the rotary bearing 4. The moment acting on 50X and the second guide device 50Y is suppressed. Therefore, insufficient positioning accuracy of the table device 100A is suppressed.

  In the present embodiment, the preload actuator 7P is an air cylinder. The preload actuator 7P may be a servo motor that applies a preload to the table 1 via a ball screw mechanism. However, the servo motor is controlled not in the positioning mode but in the torque mode. The same applies to the following embodiments.

Second Embodiment
A second embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 6 is a plan view showing an example of the table device 100B according to the present embodiment. The table device 100B according to this embodiment includes two preload devices 40. In the present embodiment, the preload device 40 includes a first preload device 40A that applies a first force to the table 1, and a second preload device 40B that applies a second force to the table 1. The force that the first preload device 40A applies to the table 1 is different from the force that the second preload device 40B applies to the table 1. In the present embodiment, the first force applied to the table 1 by the first preload device 40A is larger than the second force applied to the table 1 by the second preload device 40B. For example, by making the cylinder of the first preload device 40A larger than the cylinder of the second preload device 40B, the first preload device 40A applies the first force applied to the table 1 by the second preload device 40B. It can be greater than the second force. Further, by making the air pressure of the first preloading device 40A larger than the air pressure of the second preloading device 40B, the second preloading device 40B gives the table 1 the first force that the first preloading device 40A gives to the table 1. It can be greater than the second force.

  The position of the table center axis AX in the X-axis direction is different from the position of the preload drive shaft DP of the first preload device 40A. The position of the table center axis AX in the X-axis direction is different from the position of the preload drive shaft DP of the second preload device 40B. In the present embodiment, the first preload device 40A and the second preload device 40B are coupled to the + Y side end of the table 1. The first preloading device 40A is connected to the end of the table 1 on the + X side from the table central axis AX, and the first preloading device 40A is connected to the end of the table 1 on the −X side from the table central axis AX.

  As described above, according to the present embodiment, at least two preload devices 40 are provided so that the position of the table center axis AX and the position of the preload drive shaft DP in the X-axis direction are different, and the two preload devices are provided. The force that the device 40 applies to the table 1 is different. As a result, different forces can be applied to different positions of the table 1 by the two preloading devices 40, so that applying a moment to the table 1 can suppress a lack of positioning accuracy of the table 1 in the θZ direction.

  Further, according to the present embodiment, the two preload devices 40 are connected to the + Y side end of the table 1, and the two second drive devices 9 </ b> Y are connected to the −Y side end of the table 1. Further, in the X-axis direction, the position of the preload drive shaft DP and the position of the second drive shaft DY coincide. Thereby, the positioning error of the table 1 in the θZ direction when the table 1 moves in at least one of the X-axis direction and the Y-axis direction is suppressed.

<Third Embodiment>
A third embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 7 is a plan view showing an example of the table device 100C according to the present embodiment. The table device 100C includes one first drive device 9X, two second drive devices 9Y, and one preload device 40.

  The first drive device 9X is connected to one end (+ X side end) of the table 1 in the X-axis direction, and the preload device 40 is connected to the other end (−X side end) of the table 1 in the X-axis direction. End). The first drive device 9X is arranged so that the first drive axis DX of the first drive device 9X is parallel to the X axis. The preload device 40 is arranged so that the preload drive shaft DP of the preload device 40 is parallel to the X axis.

  Of the two second drive devices 9Y, one second drive device 9Y is connected to one end (+ Y side end) of the table 1 in the Y-axis direction, and the other second drive device 9Y is It is connected to the other end (−Y side end) of the table 1 in the Y-axis direction. One second drive device 9Y is arranged such that the second drive axis DY of the second drive device 9Y is parallel to the Y axis. The other second drive device 9Y is arranged so that the second drive shaft DY of the second drive device 9Y is parallel to the Y axis.

  The position of the table center axis AX in the Y-axis direction is different from the position of the first drive axis DX of the first drive device 9X. The position of the table center axis AX in the Y-axis direction is different from the position of the preload drive shaft DP of the preload device 40. In the present embodiment, the first driving device 9X is connected to the end of the table 1 on the −Y side from the table center axis AX, and the preload device 40 is the end of the table 1 on the + Y side from the table center axis AX. Connected to the part. In the Y-axis direction, the distance between the table center axis AX and the first drive axis DX of the first drive device 9X is equal to the distance between the table center axis AX and the preload drive axis DP of the preload device 40. The first drive device 9X and the preload device 40 are arranged so as to have a point-symmetric relationship with respect to the table center axis AX.

  The position of the table center axis AX in the X-axis direction is different from the position of the second drive axis DY of one second drive device 9Y. The position of the table center axis AX in the Y-axis direction is different from the position of the second drive axis DY of the other second drive device 9Y. In the present embodiment, one second driving device 9Y is connected to the end of the table 1 on the + X side with respect to the table center axis AX, and the other second driving device 9Y is −X with respect to the table center axis AX. It is connected to the end of the side table 1. In the X-axis direction, the distance between the table center axis AX and the second drive axis DY of one second drive device 9Y is the distance between the table center axis AX and the second drive axis DY of the other second drive device 9Y. equal. One second driving device 9Y and the other second driving device 9Y are arranged so as to have a point-symmetrical relationship with respect to the table center axis AX.

  Further, the distance between the table center axis AX and the first drive axis DX of the first drive device 9X in the Y-axis direction, the distance between the table center axis AX and the preload drive shaft DP of the preload device 40 in the Y-axis direction, and X The distance between the table center axis AX in the axial direction and the second drive axis DY of one second drive unit 9Y, and the table center axis AX in the X axis direction and the second drive axis DY of the other second drive unit 9Y The distance is equal.

  A connecting portion between the first driving device 9X and the table 1 is a connecting portion J1, a connecting portion between the preload device 40 and the table 1 is a connecting portion J2, and a connecting portion between one second driving device 9Y and the table 1 is a connecting portion J3. When the connecting portion between the other second driving device 9Y and the table 1 is the connecting portion J4, the distance between the table central axis AX and the connecting portion J1 in the XY plane, the table central axis AX and the connecting portion J2 , The distance between the table center axis AX and the connecting portion J3, and the distance between the table center axis AX and the connecting portion J4 are equal. The connecting portions J1, J2, J3, and J4 with the table 1 refer to connecting portions between the support device 3 and the table 1, as shown in FIG. More specifically, the connecting portions J1, J2, J3, and J4 with the table 1 refer to connecting portions between the lower flange portion 5F of the rod member 5 of the support device 3 and the table 1.

  As described above, according to the present embodiment, the first driving device 9X, the preload device 40, one second driving device 9Y, and the other second driving device 9Y are based on the table center axis AX. As shown in FIG. Therefore, the load in the Z-axis direction acts on the table 1 evenly. Therefore, insufficient positioning accuracy of the table 1 is suppressed.

<Fourth embodiment>
A fourth embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 8 is a plan view showing an example of the table device 100D according to the present embodiment. The table device 100D includes two preload devices 40. The preload device 40 includes a first preload device 40A that applies a first force to the table 1, and a second preload device 40B that applies a second force to the table 1. In the present embodiment, the preload device 40 is arranged so that the preload drive shaft DP of the preload device 40 is parallel to the X axis.

  Of the two preloading devices 40, the first preloading device 40A is connected to one end (+ X side end) of the table 1 in the X-axis direction, and the second preloading device 40B is connected to the table 1 in the X-axis direction. To the other end (the end on the -X side).

  The position of the table center axis AX in the Y-axis direction is different from the position of the preload drive shaft DP of the first preload device 40A. The position of the table center axis AX in the Y-axis direction is different from the position of the preload drive shaft DP of the second preload device 40B. In the present embodiment, the first preload device 40A and the second preload device 40B are arranged to face each other, and both the first preload device 40A and the second preload device 40B are located on the + Y side of the table center axis AX. Connected to the end of the table 1. In the Y-axis direction, the position of the preload drive shaft DP of the first preload device 40A matches the position of the preload drive shaft DP of the second preload device 40B.

  As described above, according to the present embodiment, the first preload device 40A is connected to the + X side end portion of the table 1, and the second preload device 40B is connected to the −X side end portion of the table 1. Is done. Thereby, since force can be applied to different positions of the table 1 that are symmetric with respect to the table center axis AX by the two preloading devices 40, the positioning accuracy of the table 1 in the θZ direction is insufficient by applying moment to the table 1. Can be suppressed.

<Fifth Embodiment>
A fifth embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 9 is a plan view showing an example of the table device 100E according to the present embodiment. FIG. 10 is a side sectional view showing an example of the table device 100E according to the present embodiment.

  In the present embodiment, at least a part of the table device 100E is disposed in the internal space of the chamber device 200. In the present embodiment, the table 1, at least a part of the first movable member 8X, at least a part of the second movable member 8Y, and at least a part of the preload movable member 8P are arranged in the internal space of the chamber device 200. .

  The first actuator 7X, the second actuator 7Y, the preload actuator 7P, the first guide device 50X, and the second guide device 50Y are disposed in the external space of the chamber device 200.

  The chamber apparatus 200 includes an environment control system that controls the environment of the internal space. The environment of the internal space includes at least one of the gas type, temperature, humidity, pressure (including the degree of vacuum), and cleanliness so that the pressure inside and outside the chamber apparatus 200 changes.

  By the environmental control system, the internal space of the chamber apparatus 200 is controlled to a vacuum state, for example. Moreover, the internal space of the chamber apparatus 200 is controlled to, for example, a constant temperature by the environment control system.

  The chamber apparatus 200 has a plurality of openings 200K that connect the internal space and the external space. The first drive device 9X, the second drive device 9Y, the preload device 40, the first guide device 50X, and the second guide device 50Y are disposed in the plurality of openings 200K.

  The chamber device 200 includes a bellows 250 disposed in the opening 200K and a support device 260 that supports the bellows 250. The bellows 250 is provided so as to connect the chamber device 200 and the first movable member 8X. The bellows 250 is provided so as to connect the chamber device 200 and the second movable member 8Y. The bellows 250 is provided so as to connect the chamber device 200 and the preload movable member 8P. As a result, the opening 200K is closed, and the gas flow between the internal space and the external space is suppressed.

  As described above, according to the present embodiment, the chamber apparatus 200 having at least the internal space in which the table 1 is arranged is provided, so that it is supported by the table 1 in the internal space of the chamber apparatus 200 in which the environment is controlled. The workpiece S is processed. Since the actuators 7X, 7Y, and 7P are arranged in the external space of the chamber device 200, for example, even if heat is generated from the actuators 7X, 7Y, and 7P, the influence of the heat on the table 1 and the workpiece S is suppressed. Is done. Further, even if foreign matter is generated from the actuators 7X, 7Y, and 7P, the influence of the foreign matter on the table 1 and the workpiece S is suppressed. Further, the entire table device 100I is not accommodated in the internal space of the chamber device 200, and the table 1, the guide members 18, 20, 70, the linear bearings 19, 21, 71, the connecting device 3, and the like are included in the internal space of the chamber device 200. And the actuators 7X, 7Y, and 7P are disposed in the external space of the chamber apparatus 200, so that an increase in the size of the chamber apparatus 200 is suppressed.

<Sixth Embodiment>
A sixth embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 11 is a plan view showing an example of the table device 100F according to the present embodiment. In the present embodiment, the preload device 40F does not have a preload actuator. Due to the elastic force of the bellows 250, a force in the rotational direction about the table center axis AX is applied to the table 1.

  The bellows 250 includes a first bellows 250 </ b> A that applies a first elastic force to the table 1 and a second bellows 250 </ b> B that applies a second elastic force to the table 1. The position of the table center axis AX in the X-axis direction is different from the position of the first bellows 250A and the position of the second bellows 250B. The force that the first bellows 250A gives to the table 1 is different from the force that the second bellows 250B gives to the table 1. For example, by making the area of the first bellows 250A different from the area of the second bellows 250B, the force that the first bellows 250A gives to the table 1 and the force that the second bellows 250B gives to the table 1 Can be different. The bellows 250 is a cylindrical member disposed in the opening 200K, and the area of the bellows 250 refers to the opening area of the bellows 250 that is the cylindrical member.

  As described above, the force applied to the table 1 by the preload device 40F may not be the power generated by the preload actuator, but may be the elastic force generated by the bellows 250.

<Seventh embodiment>
A seventh embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 12 is a diagram illustrating an example of a flat panel display manufacturing apparatus 500 including the table apparatus 100A (100B to 100F) according to the present embodiment. The flat panel display manufacturing apparatus 500 is used in at least a part of a flat panel display manufacturing process. The flat panel display includes at least one of a liquid crystal display, a plasma display, and an organic EL display.

  The flat panel display manufacturing apparatus 500 includes a transfer device 600 that can transfer a workpiece S for manufacturing a flat panel display. The transport apparatus 600 includes a table apparatus 100A according to the present embodiment.

  In FIG. 12, the table device 100A is illustrated in a simplified manner. The workpiece S is supported by the table 1.

  In the present embodiment, the workpiece S is a substrate for manufacturing a flat panel display. A flat panel display is manufactured from the workpiece S. The workpiece S may include a glass plate. When a liquid crystal display is manufactured, the workpiece S may include a TFT substrate or a color filter substrate.

  The flat panel display manufacturing apparatus 500 performs processing for manufacturing a flat panel display using the workpiece S arranged at the processing position (target position) PJ1. The table apparatus 100A places the work S supported by the table 1 at the processing position PJ1. The transport device 600 includes a carry-in device 601 that can transport (load in) the workpiece S to the table 1 of the table device 100 </ b> A, and a carry-out device 602 that can transport (unload) the work S from the table 1. The work S before processing is transported (carried in) to the table 1 by the carry-in device 601. The work S supported by the table 1 is transported to the processing position PJ1 by the table apparatus 100A. The unloaded device 602 transports (unloads) the processed workpiece S from the table 1.

  The table apparatus 100A moves the table 1 and moves the workpiece S supported by the table 1 to the processing position PJ1. The table apparatus 100A can arrange the workpiece S supported by the table 1 at the processing position PJ1 with high positioning accuracy.

  For example, when the flat panel display manufacturing apparatus 500 includes a bonding apparatus that bonds two substrates, the workpiece S supported by the table 1 includes one of the two substrates. The processing position PJ1 includes a bonding position where one substrate is bonded to the other substrate. The other substrate is pressed against one substrate of the table 1 arranged at the bonding position.

  In the present embodiment, the flat panel display manufacturing apparatus 500 includes a substrate holder 501 that holds the other substrate. The substrate holder 501 functions as a processing unit that processes the workpiece S (one substrate) supported by the table 1. The substrate holder 501 makes one substrate disposed at the bonding position and the other substrate held by the substrate holder 501 face each other. The substrate holder 501 moves downward so as to press the other substrate against one substrate supported by the table 1. Thereby, two board | substrates are bonded together.

  After the workpiece S is processed at the processing position PJ1, the processed workpiece S is conveyed from the table 1 by the carry-out device 602. The workpiece S transported (unloaded) by the unloading device 602 is transported to a processing device that performs a post process.

  In the present embodiment, the table apparatus 100A can arrange the workpiece S at the processing position PJ1. In addition, lack of positioning accuracy of the table 1 is suppressed. Therefore, generation | occurrence | production of a defective product (flat panel display) is suppressed.

  Note that the table device 100A (100B to 100F) may be used in a semiconductor manufacturing apparatus. The semiconductor manufacturing apparatus includes, for example, an exposure apparatus that forms a device pattern on the workpiece S via a projection optical system. In the exposure apparatus, the processing position PJ1 includes the image plane position (exposure position) of the projection optical system. The projection optical system functions as a processing unit that performs exposure processing on the workpiece S supported by the table 1. By disposing the workpiece S at the processing position PJ1, the semiconductor manufacturing apparatus can form a device pattern on the workpiece S via the projection optical system.

  The semiconductor manufacturing apparatus may include a film forming apparatus that forms a film on the workpiece S. When the semiconductor manufacturing apparatus includes a film forming apparatus, the processing position PJ1 includes a supply position (film forming position) to which a material for forming a film is supplied. The supply unit that supplies the material functions as a processing unit that performs the film forming process of the workpiece S supported by the table 1. By disposing the workpiece S at the processing position PJ1, a film for forming a device pattern is formed on the workpiece S.

<Eighth Embodiment>
An eighth embodiment will be described. FIG. 13 is a diagram illustrating an example of a precision machine 700 including the table device 100A (100B to 100F) according to the present embodiment. In the present embodiment, an example in which the precision machine 700 is a precision measuring machine that accurately measures a workpiece such as a precision instrument will be described.

  The precision measuring instrument 700 measures the workpiece S2. The workpiece S2 may include, for example, at least one of a flat panel display manufactured by the flat panel display manufacturing apparatus 500 and a semiconductor device manufactured by the above-described semiconductor manufacturing apparatus. The precision measuring machine 700 includes a transfer device 600B that can transfer the workpiece S2. The transport apparatus 600B includes a table apparatus 100A according to the present embodiment.

  In FIG. 13, the table apparatus 100A is illustrated in a simplified manner. The workpiece S2 is supported by the table 1.

  The precision measuring instrument 700 measures the workpiece S2 arranged at the measurement position (target position) PJ2. The table apparatus 100A places the workpiece S2 supported by the table 1 at the measurement position PJ2. The transfer device 600B includes a carry-in device 601B that can transfer (carry in) the workpiece S2 to the table 1 of the table device 100A, and a carry-out device 602B that can transfer (carry out) the workpiece S2 from the table 1. The workpiece S2 before measurement is transported (carried in) to the table 1 by the loading device 601B. The workpiece S2 supported by the table 1 is conveyed to the measurement position PJ2 by the table apparatus 100A. The workpiece S2 after measurement is conveyed (unloaded) from the table 1 by the unloading device 602B.

  The table apparatus 100A moves the table 1 and moves the workpiece S2 supported by the table 1 to the measurement position PJ2. The table device 100A can place the workpiece S2 supported by the table 1 at the measurement position PJ2 with high positioning accuracy.

  In the present embodiment, the precision measuring instrument 700 optically measures the workpiece S2 using detection light. The precision measuring instrument 700 includes an irradiation device 701 capable of emitting detection light and a light receiving device 702 capable of receiving at least part of the detection light emitted from the irradiation device 701 and reflected by the workpiece S2. In the present embodiment, the measurement position PJ2 includes a detection light irradiation position. The irradiation device 701 and the light receiving device 702 function as a processing unit that processes the workpiece S2 supported by the table 1. In the present embodiment, the irradiation device 701 and the light receiving device 702 function as a measurement unit that measures the workpiece S2 supported by the table 1. By disposing the workpiece S2 at the measurement position PJ2, the state of the workpiece S2 is optically measured.

  After the workpiece S2 is measured at the measurement position PJ2, the workpiece S2 after the measurement is conveyed from the table 1 by the carry-out device 602B.

  In the present embodiment, the table apparatus 100A can suppress the occurrence of measurement failure because the workpiece S2 can be arranged at the measurement position (target position) PJ2. That is, the precision measuring instrument 700 can satisfactorily determine whether or not the workpiece S2 is defective. Thereby, for example, it is suppressed that defective work S2 is conveyed to a back process, or shipped. Further, since the precision measuring instrument 700 can measure the workpiece S2 placed at the measurement position PJ2 by the table 1, the workpiece S2 can be precisely measured.

  Note that the three-dimensional measurement apparatus may include the table apparatus 100A according to the present embodiment, or may include a transport apparatus including the table apparatus 100A. Since the workpiece to be measured is supported by the table 1, the three-dimensional measuring apparatus can measure the workpiece placed at the target position, and therefore can accurately measure the workpiece.

<Ninth Embodiment>
A ninth embodiment will be described. FIG. 14 is a diagram illustrating an example of a precision machine 800 including the table device 100A (100B to 100F) according to the present embodiment. In the present embodiment, an example in which the precision machine 800 is a precision machine capable of performing precision machining will be described.

  The precision processing machine 800 processes the workpiece S3. The precision processing machine 800 includes a machining center, and includes a table device 100A and a processing head 801. The processing head 801 functions as a processing unit that processes the workpiece S3 supported by the table 1 of the table apparatus 100A. In the present embodiment, the processing head 801 functions as a processing unit that processes the workpiece S3 supported by the table 1 of the table apparatus 100A. The processing head 801 has a processing tool and processes the workpiece S3 supported by the table 1 of the table apparatus 100A with the processing tool. The machining head 801 is a mechanism for cutting the workpiece S3. The machining head 801 moves the machining tool in the Z-axis direction orthogonal to the movement direction of the table 1.

  The precision processing machine 800 can relatively move the processing tool and the workpiece S3 by moving the workpiece S3 in the XY plane by the table apparatus 100A and moving the processing head 801 in the Z-axis direction.

  Since the precision processing machine 800 can process the workpiece S3 on the table 1 arranged at the processing position (target position), the workpiece S3 can be precisely processed.

  In the present embodiment, the table 1 is moved in the XY plane (in the horizontal plane). In the present embodiment, the table 1 may be moved in a direction inclined with respect to the XY plane. That is, the XY plane may be parallel to the horizontal plane or may be inclined with respect to the horizontal plane.

1 Table 1A Upper surface 1B Lower surface 2 Base member 2A Upper surface (guide surface)
3 support device 3C casing 4 rotary bearing 4A inner ring 4B outer ring 4C ball 5 rod member 5F flange 5L rod 7X first actuator 7Y second actuator 7P preload actuator 8X first movable member 8Y second movable member 8P preload movable member 9 movement System 9X 1st drive device 9Y 2nd drive device 10B Ball screw mechanism 10C Coupling 11 1st guide member 12 2nd guide member 13 3rd guide member 14 4th guide member 15 5th guide member 16 6th guide member 17 1st 7 guide member 18 8th guide member 19 9th guide member 20 10th guide member 21 1st linear bearing 22 2nd linear bearing 23 3rd linear bearing 24 4th linear bearing 25 5th linear bearing 26 6th linear bearing 27 1st 7 linear bear 8th linear bearing 29 9th linear bearing 30 10th linear bearing 31 1st connecting member 32 2nd connecting member 33 3rd connecting member 34 4th connecting member 35 5th connecting member 36 6th connecting member 37 7th connection Member 38 eighth connecting member 40 preload device 40F preload device 50X first guide device 50Y second guide device 100A table device 100B table device 100C table device 100D table device 100E table device 200 chamber device 200K opening 250 bellows 260 support device 500 flat panel Display manufacturing equipment 700 Precision machine (precision measuring machine)
800 Precision machine (Precision processing machine)
AX Table center axis DP Preload drive axis DX First drive axis DY Second drive axis G Gap S Workpiece

Claims (14)

A base member having a guide surface;
A first axial direction parallel to a first axis in a predetermined plane parallel to the guide surface and supported by the base member, and a second axial direction parallel to a second axis in the predetermined plane orthogonal to the first axis And a table rotatable around a table central axis parallel to a third axis orthogonal to the predetermined plane;
A first actuator supported by the base member; and a first movable member connected to the table and moving along a first drive shaft parallel to the first shaft by the operation of the first actuator; A first drive device provided only one so that the position of the table center axis in the second axis direction and the position of the first drive axis coincide;
A second actuator supported by the base member; and a second movable member that is connected to the table and moves along a second drive shaft that is parallel to the second shaft by the operation of the second actuator. A second drive device provided with at least two so that the position of the table central axis and the position of the second drive shaft in the first axis direction are different from each other;
A preload device that preliminarily applies a force in a rotational direction about the table central axis to the table;
A table device comprising: The preload device includes a preload generator that generates a force in the rotational direction, and a preload movable member that is connected to the table and moves along a preload drive shaft that is parallel to the second shaft by the force generated by the preload generator. And provided so that the position of the table central axis and the position of the preload drive shaft in the first axis direction are different from each other.
The table apparatus according to claim 1. At least two preload devices are provided such that the position of the table central axis and the position of the preload drive shaft in the first axis direction are different,
The force applied to the table by at least two of the preload devices is different,
The table device according to claim 2. Of the at least two preload devices, one preload device is connected to one end of the table in the second axial direction, and one preload device is connected to the other end of the table in the second axial direction. Connected to the end of the
The table apparatus according to claim 3. The preload generator includes a preload actuator supported by the base member.
The table apparatus as described in any one of Claims 2-4. A chamber apparatus having an internal space in which at least a part of the table and the preload movable member is disposed;
A bellows connecting the chamber device and the preload movable member;
The preload generator includes the bellows,
The table apparatus as described in any one of Claims 2-4. Each of the first movable member, the second movable member, and the preload movable member includes a support device that supports the table such that the lower surface of the table and the guide surface of the base member face each other with a gap therebetween. ,
The support device is rotatable relative to the rod member about a rod member fixed to the table, a rod central axis arranged around the rod member and parallel to the third axis, The rod member is guided in the third axis direction so that the lower surface of the table comes into contact with the guide surface of the base member when a load of a predetermined value or more is applied to the table in a third axis direction parallel to the three axes. A rotating bearing
The table apparatus as described in any one of Claims 2-6. The first movable member includes a first linear bearing guided in a first axial direction by a first guide member provided on the base member, and a second guide member coupled to the table via the support device. And a second linear bearing guided in the second axial direction.
The table device according to claim 7. The second movable member includes a third linear bearing guided in a second axial direction by a third guide member provided on the base member, and a fourth guide member connected to the table via the support device. And a fourth linear bearing guided in the first axial direction.
The table device according to claim 7 or 8. The preload movable member includes a fifth linear bearing guided in the second axial direction by a fifth guide member provided on the base member, and a sixth guide member coupled to the table via the support device. A sixth linear bearing guided in the first axial direction,
The table apparatus as described in any one of Claims 7-9. Of the at least two second drive devices, one of the second drive devices is connected to one end of the table in the second axial direction, and one of the second drive devices is connected to the second shaft. Connected to the other end of the table in the direction,
The table apparatus as described in any one of Claims 1-10. A table apparatus according to any one of claims 1 to 11, comprising:
Determining a position of a work supported by the table of the table device;
Positioning device. The table device according to any one of claims 1 to 11,
A processing unit for processing the work supported by the table;
A flat panel display manufacturing apparatus. The table device according to any one of claims 1 to 11,
A processing unit for processing the work supported by the table;
Precision machine equipped with.

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