JP6610083B2 - Table device, positioning device, flat panel display manufacturing device, and precision machine - Google Patents

Description

  The present invention relates to a table device, a positioning device, a flat panel display manufacturing device, and a precision machine.

  In the flat panel display manufacturing process, a process of bonding two substrates is performed. When two substrates are bonded together, a positioning device that determines the relative positions of the two substrates is used (see Patent Document 1). One substrate is held on the first table and the other substrate is held on the second table above the one substrate. The relative position between the first table and the second table is determined, and the two substrates are relatively positioned, and the substrate held by the second table is positioned above the substrate held by the first table. Is pressed from. Thereby, two board | substrates are bonded together.

JP 2007-102198 A

  In the positioning device disclosed in Patent Document 1, the leaf spring is arranged so that the table contacts the pedestal when receiving an external load. There is a demand for a technique that can allow the deformation of the table, which is unacceptable with a leaf spring. For example, when the table is supported by the base member via a gap, it is desired to devise a structure in which an excessive load does not act on the horizontal guide device that guides the table in the horizontal direction even if the gap is large.

  An aspect of the present invention aims to provide a table device, a positioning device, a flat panel display manufacturing device, and a precision machine that do not cause an excessive load to act on the horizontal guide device even if the gap between the table and the base member is large. To do.

  According to the first aspect of the present invention, a table having a lower surface for holding a workpiece, a base member having a lower surface facing the upper surface of the table, and the table being moved in a horizontal direction with respect to the base member A plane having a moving system having an actuator for generating a motive power, and a horizontal slide mechanism that is at least partially connected to the table and is supported on the base member so as to be movable in the horizontal direction. A guide device, and when the vertical upward external load acting on the table is less than a predetermined value, the table is placed on the plane so that the upper surface of the table and the lower surface of the base member face each other with a gap. The table is supported when a vertically upward external load supported by the guide device and acting on the table is a predetermined value or more. The vertical upward load received from the guide surface by the upper surface and the lower surface of the base member is received by the horizontal slide mechanism from the guide surface when the external load is less than the predetermined value. A table device is provided that is smaller than the load upward in the vertical direction.

  According to the first aspect of the present invention, in a table that receives an external load in the vertical direction, when a vertical upward (antigravity direction) external load of a predetermined value or more acts on the table, the plane guide device is The load received from the guide surface is reduced, and the plain guide device is in a free state in which the load is not supported. When a vertical upward upward load greater than a predetermined value acts on the table, the table and the base member come into contact with each other, and the table is held by the base member. Thereby, even if the gap between the table and the base member is large, it is possible to suppress an excessive load from acting on the plane guide device that functions as a horizontal guide device.

  In the first aspect of the present invention, the plane guide device has a first rod member that protrudes downward from the horizontal slide mechanism, and is provided on the table and arranged around the first rod member. It is preferable to provide a bearing.

  Thereby, a plane guide apparatus will be connected with a table via a 1st rotation bearing. By connecting the plane guide device and the table via the first rotary bearing, the tilt and misalignment of the shaft are absorbed by the first rotary bearing. Therefore, the load acting on each rolling element of the plain guide device can be made uniform.

  In the first aspect of the present invention, it is preferable that a plurality of the plane guide devices are provided in a horizontal plane.

  Accordingly, the table is stably supported by the plurality of plane guide devices and guided in the horizontal direction.

  In the first aspect of the present invention, the table includes a second rod member, and includes a second rotary bearing disposed around the second rod member, wherein at least a part of the moving system includes the first rod It is preferable to be connected to a support member that supports the two-turn bearing.

  Thereby, a movement system will be connected with a table via a 2nd rotation bearing. By connecting the moving system and the table via the second rotary bearing, shaft inclination and misalignment are absorbed by the second rotary bearing.

  In the first aspect of the present invention, the moving system is supported by the base member, and the base member is interposed between the first base member supporting the moving system, and the first base member and the table. And a second base member disposed and having the guide surface.

  Accordingly, the guide surface can be formed with high surface accuracy on the second base member different from the first base member that supports the moving system.

  In the first aspect of the present invention, the horizontal slide mechanism includes a support plate facing the guide surface via a gap, a plurality of balls that are rotatable in contact with the guide surface, the support plate, A cage that is disposed between the ball and rotatably holds the ball; and a preload mechanism that is supported by the support plate and generates a force that presses the ball against the guide surface via the cage. It is preferable to have.

  As a result, even if the contact pressure between the ball of the horizontal slide mechanism and the guide surface of the base member decreases as the table rises, the preload mechanism can keep the ball in contact with the guide surface. Movement can be suppressed.

  In the first aspect of the present invention, the ball receives a first load from the guide surface in a state where the upper surface of the table and the lower surface of the base member face each other with a gap therebetween, and the preload mechanism is Generating the force so that a load received by the ball from the guide surface is a second load smaller than the first load in a state where the upper surface and the lower surface of the base member are in contact with each other; It is preferable to suppress the movement of.

  As a result, when a vertical upward external load is not applied to the table, the ball of the horizontal slide mechanism contacts the guide surface with a high contact pressure. When a vertical upward upward load is applied to the table and the upper surface of the table contacts the lower surface of the base member, the preload mechanism guides the ball without obstructing the contact between the upper surface of the table and the lower surface of the base member. The surface can be kept in contact.

  In the first aspect of the present invention, the horizontal slide mechanism includes a support plate facing the guide surface via a gap, a plurality of balls that are rotatable in contact with the guide surface, the support plate, A retainer that is disposed between the ball and that rotatably holds the ball, and includes a driving element that generates a force so that a dimension of a gap between the support plate and the ball is reduced. preferable.

  As a result, even if the contact pressure between the ball of the horizontal slide mechanism and the guide surface of the base member decreases as the table rises, the support element and the ball can be kept in contact with each other by the driving element. The movement of the ball can be suppressed.

  According to a second aspect of the present invention, there is provided a positioning apparatus that includes the table device of the first aspect and determines the position of a work supported by the table of the table device.

  According to the 2nd aspect of this invention, the shortage of the positioning accuracy of the workpiece | work supported by the table is suppressed.

  According to the 3rd aspect of this invention, a flat panel display manufacturing apparatus provided with the table apparatus of a 1st aspect and the process part which processes the workpiece | work supported by the said table is provided.

  According to the 3rd aspect of this invention, since the flat panel display manufacturing apparatus can process the workpiece | work positioned by the table, it is suppressed that a defective product is manufactured from the workpiece | work. The flat panel display manufacturing apparatus includes, for example, a bonding apparatus that bonds two substrates, and is used in at least a part of the flat panel display manufacturing process. The flat panel display includes at least one of a liquid crystal display, a plasma display, and an organic EL display.

  According to a fourth aspect of the present invention, there is provided a precision machine comprising the table device of the first aspect and a processing unit for processing a work supported by the table.

  According to the fourth aspect of the present invention, since the precision machine can process the workpiece positioned by the table, it is possible to suppress a defective product from being manufactured from the workpiece. The precision machine includes, for example, one or both of a precision measuring machine and a precision processing machine. Since the precision measuring machine can measure the workpiece positioned by the table, the workpiece can be measured accurately. Since the precision processing machine can process the workpiece positioned by the table, the workpiece can be processed precisely.

  According to the aspects of the present invention, there are provided a table device, a positioning device, a flat panel display manufacturing device, and a precision machine that can suppress a shortage of positioning accuracy.

FIG. 1 is a plan view showing an example of a table device according to the first embodiment. FIG. 2 is a side sectional view showing an example of the table device according to the first embodiment. FIG. 3 is an enlarged side cross-sectional view of a part of the table device according to the first embodiment. FIG. 4 is an enlarged view showing the vicinity of the vertical slide member and the guide bearing according to the first embodiment. FIG. 5 is an enlarged view showing the vicinity of the support device according to the first embodiment. FIG. 6 is a side sectional view showing an example of a table device according to the second embodiment. FIG. 7 is a side sectional view showing an example of the horizontal slide mechanism of the plane guide device according to the second embodiment. FIG. 8 is a side sectional view showing an example of a table device according to the third embodiment. FIG. 9 is a diagram illustrating an example of a flat panel display manufacturing apparatus according to the fourth embodiment. FIG. 10 is a diagram illustrating an example of a precision machine according to the fifth embodiment. FIG. 11 is a diagram illustrating an example of a precision machine according to the sixth embodiment.

  Hereinafter, embodiments according to the present invention will be described with reference to the drawings, but the present invention is not limited thereto. The components of each embodiment described below can be combined as appropriate. Some components may not be used.

  In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each part will be described with reference to this XYZ orthogonal coordinate system. A direction parallel to the first axis in the predetermined plane is defined as an X-axis direction. A direction parallel to the second axis in a predetermined plane orthogonal to the first axis is defined as a Y-axis direction. A direction parallel to the third axis perpendicular to the predetermined plane is taken as a Z-axis direction. A rotation (tilt) direction around the X axis (first axis) is defined as a θX direction. A rotation (tilt) direction around the Y axis (second axis) is defined as a θY direction. A rotation (tilt) direction around the Z axis (third axis) is defined as a θZ direction. The predetermined plane includes an XY plane. In the present embodiment, the predetermined plane (XY plane) and the horizontal plane are parallel. The Z-axis direction is the vertical direction. The X axis is orthogonal to the YZ plane. The Y axis is orthogonal to the XZ plane. The Z axis is orthogonal to the XY plane. The XY plane includes an X axis and a Y axis. The XZ plane includes an X axis and a Z axis. The YZ plane includes a Y axis and a Z axis.

<First Embodiment>
A first embodiment will be described. FIG. 1 is a plan view showing an example of a table apparatus 100A according to the present embodiment. FIG. 2 is a side sectional view showing an example of the table apparatus 100A according to the present embodiment. FIG. 3 is an enlarged side sectional view of a part of the table apparatus 100A according to the present embodiment. FIG. 1 is a view of the table device 100A as viewed from below (−Z side). FIG. 2 corresponds to an AA arrow view of FIG. FIG. 3 is an enlarged view of a part of FIG.

  As shown in FIGS. 1, 2, and 3, the table apparatus 100 </ b> A includes a table 1 having an upper surface 1 </ b> A and a lower surface 1 </ b> B, a base member 2 having a lower surface 2 </ b> B facing the upper surface 1 </ b> A of the table 1, and a base member 2. In contrast, a moving system 8 having an actuator 7 that generates power for moving the table 1 in the horizontal direction, and a horizontal guide surface 2G provided on the base member 2 and supported so as to be movable in the horizontal direction. A plane guide device 30 having a slide mechanism 40.

  Table 1 holds the workpiece S. The workpiece S is held on the lower surface 1B of the table 1. The table 1 holds the workpiece S so as to be releasable. The table 1 includes a suction mechanism that sucks and holds the workpiece S. The table 1 holds the work S by suction on the lower surface 1B. The table 1 has a plurality of suction ports provided on the lower surface 1B and an internal flow path connected to the suction ports. The gas in the internal flow path of the table 1 is sucked by a suction device including a vacuum pump. When the lower surface 1B of the table 1 and the work S are in contact with each other, the work S is sucked and held on the lower surface 1B of the table 1 by performing a suction operation by the suction device. The work S is released from the table 1 by releasing the suction operation by the suction device.

  The lower surface 1B of the table 1 is substantially parallel to the XY plane (horizontal plane). An upper surface 1A of the table 1 is a plane and is substantially parallel to the XY plane.

  The base member 2 is disposed above the table 1. The base member 2 supports the table 1 so as to be movable. The base member 2 is supported by a support mechanism (not shown). The base member 2 includes a first base member 21 supported by a support mechanism, and a second base member 22 disposed between the first base member 21 and the table 1. In the XY plane, the outer shape of the first base member 21 is larger than the outer shape of the second base member 22. The second base member 22 is joined to the first base member 21. The lower surface 2 </ b> B and the guide surface 2 </ b> G of the base member 2 are disposed on the second base member 22. An upper surface 2 </ b> A of the base member 2 is disposed on the first base member 21.

  The lower surface 2B of the base member 2 is a plane, and is substantially parallel to the XY plane. The guide surface 2G of the base member 2 is a plane and is substantially parallel to the XY plane. The second base member 22 is a parallel plate. The lower surface of the second base member 22 is the lower surface 2B of the base member 2. A part of the upper surface of the second base member 22 is a guide surface 2G of the base member 2.

  The moving system 8 moves the table 1 in a horizontal plane. The moving system 8 is supported by the base member 2. The movement system 8 is supported by a partial region of the first base member 21 disposed around the second base member 22 in the XY plane.

  The moving system 8 is connected to the table 1 via the support device 3. The support device 3 includes a rod member 5 provided on the table 1, a rotary bearing 4 arranged around the rod member 5, and a support member 6 arranged around the rotary bearing 4 and supporting the rotary bearing 4. Have. At least a part of the moving system 8 is connected to a support member 6 that supports the rotary bearing 4.

  The actuator 7 of the moving system 8 generates power for moving the table 1 in the XY plane. In this embodiment, the movement system 8 moves the table 1 connected to the support member 6 in the horizontal plane together with the support member 6 by moving the support member 6.

  The actuator 7 includes a first actuator 7X that generates power for moving the table 1 in the X-axis direction and a second actuator 7Y that generates power for moving the table 1 in the Y-axis direction. The actuator 7 includes a servo motor. The actuator 7 is supported by the first base member 21.

  As shown in FIG. 1, a plurality of support devices 3 are provided so as to surround the center of the lower surface 1B of the table 1 in the XY plane. The support device 3 is disposed around the work S held on the lower surface 1B. In the present embodiment, six support devices 3 are provided. That is, six each of the rod member 5, the rotary bearing 4, and the support member 6 are provided.

  The support member 6 includes a first support member 6X that moves by the power generated by the first actuator 7X, and a second support member 6Y that moves by the power generated by the second actuator 7Y.

  The movement system 8 includes a first linear bearing 9X that moves in the X-axis direction by the power generated by the first actuator 7X, a first guide member 10X that guides the first linear bearing 9X in the X-axis direction, and a second actuator 7Y. The second linear bearing 9Y that moves in the Y-axis direction by the power generated by the first and second guide members 10Y that guide the second linear bearing 9Y in the Y-axis direction are provided.

  The moving system 8 includes a first ball screw mechanism 11X connected to the first actuator 7X and a second ball screw mechanism 11Y connected to the second actuator 7Y. The first ball screw mechanism 11X includes a ball screw that is rotated by the power generated by the first actuator 7X, and a nut that is disposed around the ball screw and connected to the first linear bearing 9X. The second ball screw mechanism 11Y includes a ball screw that is rotated by the power generated by the second actuator 7Y, and a nut that is disposed around the ball screw and connected to the second linear bearing 9Y. The first actuator 7X and the first ball screw mechanism 11X are connected via a coupling. The second actuator 7Y and the second ball screw mechanism 11Y are connected via a coupling.

  The movement system 8 is connected to the third guide member 12Y connected to the first support member 6X, the third linear bearing 13Y guided by the third guide member 12Y in the Y-axis direction, and the second support member 6Y. And a fourth linear bearing 13X guided in the X-axis direction by the fourth guide member 12X.

  The third linear bearing 13Y is connected to the first linear bearing 9X via the connection member 14. The fourth linear bearing 13X is connected to the second linear bearing 9Y via the connection member 15.

  The first actuator 7X generates power for moving the first linear bearing 9X in the X-axis direction. When the first actuator 7X is actuated, the ball screw of the first ball screw mechanism 11X rotates. Accordingly, the first linear bearing 9X moves in the X-axis direction while being guided by the first guide member 10X. As the first linear bearing 9X moves in the X-axis direction, the third linear bearing 13Y connected to the first linear bearing 9X moves in the X-axis direction together with the first linear bearing 9X. The third linear bearing 13Y and the table 1 are connected via a support device 3 including a third guide member 12Y and a first support member 6X. Accordingly, when the third linear bearing 13Y moves in the X-axis direction, the support device 3 including the table 1, the third guide member 12Y, and the first support member 6X can be moved together with the third linear bearing 13Y along the X-axis. Move in the direction.

  The second actuator 7Y generates power for moving the second linear bearing 9Y in the Y-axis direction. When the second actuator 7Y operates, the ball screw of the second ball screw mechanism 11Y rotates. Accordingly, the second linear bearing 9Y moves in the Y-axis direction while being guided by the second guide member 10Y. As the second linear bearing 9Y moves in the Y-axis direction, the fourth linear bearing 13X connected to the second linear bearing 9Y moves in the Y-axis direction together with the second linear bearing 9Y. The fourth linear bearing 13X and the table 1 are connected via a support device 3 including a fourth guide member 12X and a second support member 6Y. Accordingly, when the fourth linear bearing 13X moves in the Y-axis direction, the support device 3 including the table 1, the fourth guide member 12X, and the second support member 6Y can move along the Y-axis along with the fourth linear bearing 13X. Move in the direction.

  As shown in FIG. 1, the support device 3 including the first support member 6 </ b> X is disposed on both sides (+ X side and −X side) in the X-axis direction with respect to the center of the lower surface 1 </ b> B of the table 1. In addition, two support devices 3 including the first support member 6X are arranged in the Y-axis direction.

  As shown in FIG. 1, the support device 3 including the second support member 6 </ b> Y is disposed on both sides (+ Y side and −Y side) in the Y-axis direction with respect to the center of the lower surface 1 </ b> B of the table 1.

  The position in the Y-axis direction of the support device 3 including the first support member 6X disposed on the + X side with respect to the center of the lower surface 1B of the table 1 and the −X side with respect to the center of the lower surface 1B of the table 1 The position of the support device 3 including the first support member 6X in the Y-axis direction is equal. That is, the Y coordinate of the support device 3 including the first support members 6X disposed on both sides in the X-axis direction with respect to the center of the lower surface 1B of the table 1 is equal.

  The position in the X-axis direction of the support device 3 including the second support member 6Y disposed on the + Y side with respect to the center of the lower surface 1B of the table 1 and the −Y side with respect to the center of the lower surface 1B of the table 1 The position in the X axis direction of the support device 3 including the second support member 6Y is equal. That is, the X coordinate of the support device 3 including the second support members 6Y disposed on both sides in the Y-axis direction with respect to the center of the lower surface 1B of the table 1 is equal.

  The support devices 3 arranged on both sides in the X-axis direction are opposed to the center of the lower surface 1B of the table 1. The first actuator 7X has one first support member 6X (in the present embodiment, -X in the pair) of the first support members 6X disposed on both sides in the X-axis direction with respect to the center of the lower surface 1B of the table 1. Side first support member 6X) is arranged to move. The first actuator 7X is not connected to the other first support member 6X (in this embodiment, the first support member 6X on the + X side).

  The support devices 3 disposed on both sides in the Y-axis direction are opposed to the center of the lower surface 1B of the table 1. Of the pair of second support members 6Y disposed on both sides in the Y-axis direction with respect to the center of the lower surface 1B of the table 1, the second actuator 7Y is one second support member 6Y (in this embodiment, on the + Y side). The second support member 6Y) is arranged to move. The second actuator 7Y is not connected to the other second support member 6Y (second support member 6Y on the -Y side in the present embodiment).

  A plurality of first actuators 7X are arranged. The first actuator 7X moves in the X-axis direction each of the two first support members 6X arranged in the Y-axis direction in a space on the −X side with respect to the center of the lower surface 1B of the table 1. Two are arranged.

  The moving system 8 can move the table 1 in the θZ direction (rotational direction) by changing the operation amount of the plurality of (two) first actuators 7X.

  A plurality of second support members 6Y may be arranged in the X-axis direction. A plurality of second actuators 7Y may be arranged so that each of the second support members 6Y arranged in the X-axis direction moves in the Y-axis direction. The movement system 8 may move the table 1 in the θZ direction by changing the operation amounts of the plurality of second actuators 7Y.

  As described above, in the present embodiment, the table 1 can be moved in the three directions of the X-axis direction, the Y-axis direction, and the θZ direction by the moving system 8 including the first actuator 7X and the second actuator 7Y. .

  The plane guide device 30 guides the table 1 in a horizontal direction parallel to the guide surface 2G of the base member 2. As shown in FIG. 1, a plurality of plane guide devices 30 are provided in the XY plane. In the present embodiment, three plane guide devices 30 are arranged in the XY plane.

  As shown in FIGS. 2 and 3, the plane guide device 30 absorbs the inclination and misalignment of the shaft, and the horizontal slide mechanism 40 supported by the guide surface 2G provided on the base member 2 so as to be movable in the horizontal direction. And an absorption mechanism 50.

  The table 1 has a hole 1K that passes through the upper surface 1A and the lower surface 1B of the table 1. An upper surface 1A is arranged around the upper end of the hole 1K. A lower surface 1B is disposed around the lower end of the hole 1K.

  The base member 2 has an internal space 2H and a hole 2K connected to the internal space 2H. The internal space 2H of the base member 2 is defined by a guide surface 2G facing upward and an inner peripheral surface 2S connected to the outer edge of the guide surface 2G. The guide surface 2G is a plane parallel to the XY plane and is disposed on the second base member 22. The inner peripheral surface 2S is parallel to the Z axis and is disposed on the first base member 21. The hole 2K of the base member 2 passes through the upper surface (guide surface 2G) and the lower surface of the second base member 22. A guide surface 2G is disposed around the upper end of the hole 2K. The hole 2K is formed at the center of the guide surface 2G. The hole 2K and the internal space 2H are connected.

  At least a part of the plane guide device 30 is disposed in a hole 1 </ b> K provided in the table 1. At least a part of the plane guide device 30 is disposed in an internal space 2H provided in the base member 2. At least a part of the plane guide device 30 is disposed in a hole 2 </ b> K provided in the base member 2. The table 1 and the base member 2 are connected via a plane guide device 30.

  In the present embodiment, the horizontal slide mechanism 40 is disposed in the internal space 2H. A part of the absorption mechanism 50 is disposed in the hole 2K, and a part of the absorption mechanism 50 is disposed in the hole 1K.

  As shown in FIG. 3, the horizontal slide mechanism 40 is disposed above the guide surface 2G and faces the guide surface 2G with a gap between the lower surface of the support plate 41 and the guide surface 2G. And a plurality of balls 42 that can rotate while being in contact with the guide surface 2G, and a retainer 43 that is disposed between the support plate 41 and the balls 42 and holds the balls 41 rotatably. The support plate 41 and the retainer 43 are separated from the guide surface 2G and the inner peripheral surface 2S of the base member 2, and do not contact the base member 2.

  The absorption mechanism 50 projects downward from the horizontal slide mechanism 40. The absorption mechanism 50 is connected to the support plate 41 of the horizontal slide mechanism 40. The absorption mechanism 50 includes a rod member 51 that protrudes downward from the horizontal slide mechanism 40. The rod member 51 is fixed to the lower surface of the support plate 41. The rod member 51 protrudes downward from the lower surface of the support plate 41. The rod member 51 is connected to the center of the lower surface of the support plate 41 in the XY plane.

  The rod member 51 is supported by a rotary bearing 60 provided in the hole 1 </ b> K of the table 1. The rotary bearing 60 is disposed around the rod member 51.

  FIG. 4 is an enlarged view showing the vicinity of the rod member 51 and the rotary bearing 60 according to the present embodiment. As shown in FIGS. 3 and 4, the rod member 51 is disposed at the upper end portion of the first rod portion 52 and the first rod portion 52 that are disposed inside the rotary bearing 60, and more than the first rod portion 52. It has the 2nd rod part 53 with a large outer diameter, and the lock nut 54 arrange | positioned at the lower end part of the 1st rod part 52. FIG.

  The rotary bearing 60 is substantially cylindrical. The rotary bearing 60 is disposed around the first rod portion 52. The second rod portion 53 is disposed above the rotary bearing 60. The second rod portion 53 is connected to the support plate 41. The lock nut 54 is disposed below the rotary bearing 60. A spacer 55 is disposed between the lock nut 54 and the rotary bearing 60.

  The rotary bearing 60 is supported on the inner surface of the hole 1 </ b> K of the table 1. The rotary bearing 60 includes a ball bearing. The rotary bearing 60 includes an inner ring 61 arranged to contact the first rod portion 52, an outer ring 62 arranged around the inner ring 61, a ball 63 arranged between the inner ring 61 and the outer ring 62, including. In the present embodiment, two ball bearings including the inner ring 61, the outer ring 62, and the ball 63 are arranged in the Z-axis direction (direction parallel to the central axis of the first rod portion 52). The inner ring 61 includes an inner ring 61A and an inner ring 61B arranged in the Z-axis direction. The outer ring 62 includes an outer ring 62A and an outer ring 62B arranged in the Z-axis direction.

  The rotary bearing 60 absorbs the inclination or misalignment of the rod member 51 (plane guide device 30). The plane guide device 30 having the rod member 51 and the table 1 to which the rotary bearing 60 is fixed are slightly movable relative to each other. The table 1 is slightly movable relative to the plane guide device 30. In other words, a slight displacement of the table 1 relative to the plane guide device 30 is allowed.

  FIG. 5 is an enlarged view showing the vicinity of the support device 3 according to the present embodiment. As shown in FIG. 5, the support device 3 includes a rod member 5 fixed to the lower surface 1B of the table 1B. The rod member 5 is provided so as to protrude downward from the lower surface 1B. The rod member 5 includes a rod portion 5L and lock nuts 5F disposed on the upper end portion and the lower end portion of the rod portion 5L.

  The rotary bearing 4 is substantially cylindrical. The rotary bearing 4 is disposed around the rod portion 5L. The rotary bearing 4 is supported by the casing 16. The support member 6 supports the rotary bearing 4 via the casing 16. A spacer 5S is disposed between the lock nut 5F and the rotary bearing 4.

  The rotary bearing 4 includes a ball bearing. The rotary bearing 4 includes an inner ring 4A disposed so as to contact the rod portion 5L, an outer ring 4B disposed around the inner ring 4A, and a ball 4C disposed between the inner ring 4A and the outer ring 4B. . In the present embodiment, two ball bearings including the inner ring 4A, the outer ring 4B, and the ball 4C are arranged in the Z-axis direction (direction parallel to the central axis of the rod portion 5L).

  The rotary bearing 4 absorbs the inclination or misalignment of the rod member 5. The rod member 5 is supported by the rotary bearing 4 so as to be movable. The table 1 is slightly movable relative to the support member 6. In other words, a slight displacement of the table 1 with respect to the support member 6 is allowed.

  When the workpiece S held on the lower surface 1B of the table 1 is processed using the table device 1, an external load in the vertical direction upward (+ Z direction) may act on the table 1.

  When the vertical upward (+ Z direction) external load acting on the table 1 is less than a predetermined value, the plane guide device 30 moves the table 1 so that the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 do not contact each other. To support. When the external load in the + Z direction acting on the table 1 is zero (no load), the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 face each other with a gap G therebetween.

  When the external load in the + Z direction acting on the table 1 is less than a predetermined value including zero, the table 1 is supported so as to be suspended from the plane guide device 30. When the external load in the + Z direction acting on the table 1 is less than a predetermined value, the table 1 is supported by the plane guide device 30 so that the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 face each other with a gap. . When the external load acting on the table 1 is zero, a gap G is formed between the upper surface 1A of the table 1 and the lower surface 2B of the base member 2.

  The plane guide device 30 allows the table 1 to move in the Z-axis direction by the size of the gap G. In the present embodiment, when an external load is applied to the table 1, the pitching of the first linear bearing 9X (rotation in the θY direction), the pitching of the second linear bearing 9Y (rotation in the θX direction), the third linear bearing The rotary bearing 4 allows 13Y rolling (rotation in the θY direction) and rolling of the fourth linear bearing 13X (rotation in the θX direction), and pitching (rotation in the θX direction) of the horizontal slide mechanism 40, and horizontal sliding. When the rotary bearing 60 allows the mechanism 40 to roll (rotation in the θY direction), the table 1 is allowed to move, and the dimension of the gap between the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 changes.

  The dimension of the gap G is the distance between the upper surface 1A and the lower surface 2B when the external load in the Z-axis direction with respect to the table 1 is zero (no load). When an external load vertically upward (+ Z direction) is applied to the table 1, the table 1 moves upward (+ Z direction). As the table 1 moves upward, the upper surface 1 </ b> A of the table 1 contacts the lower surface 2 </ b> B of the base member 2. When the vertical upward (+ Z direction) external load acting on the table 1 is a predetermined value, the upper surface 1A of the table 1 is in contact with the lower surface 2B of the base member 2. When the external load in the vertical direction (+ Z direction) acting on the table 1 is greater than or equal to a predetermined value, the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 are in contact with each other. The horizontal slide mechanism 40 of the plane guide device 30 is in a free state in which no load is supported. That is, when the external load in the + Z direction acting on the table 1 is greater than or equal to a predetermined value, the load in the + Z direction that the horizontal slide mechanism 40 receives from the guide surface 2G is less than the predetermined value. This is sometimes smaller than the load in the + Z direction that the horizontal slide mechanism 40 receives from the guide surface 2G. When the external load in the + Z direction acting on the table 1 is a predetermined value or more, the upper surface 1A of the table 1 is in contact with the lower surface 2B of the base member 2, and the table 1 is supported by the lower surface 2B of the base member 2.

  The size of the gap G is such that the first linear bearing 9X, the second linear bearing 9Y, the third linear bearing 13Y, the fourth linear bearing 13X, and the rotary bearing 4 are overloaded before an excessive load (overload) is applied. And the lower surface 2B are in contact with each other. In other words, even if the table 1 moves in the vertical direction within the range of the gap G, the first linear bearing 9X, the second linear bearing 9Y, the third linear bearing 13Y, the fourth linear bearing 13X, and the rotary bearing The dimension of the gap G is determined so that an overload does not act on 4. The state in which an overload acts on the first linear bearing 9X, the second linear bearing 9Y, the third linear bearing 13Y, the fourth linear bearing 13X, and the rotary bearing 4 means that a load exceeding the static load rating is the first. 1 linear bearing 9X, 2nd linear bearing 9Y, 3rd linear bearing 13Y, 4th linear bearing 13X, the state which acts on the rotation bearing 4, and the ball | bowl 4C will remove | deviate from the guide groove of the inner ring | wheel 4A and the outer ring | wheel 4B A state in which a load acts on the rotary bearing 4 is exemplified.

  The predetermined value means that an external load in the + Z direction acts on the table 1, the table 1 moves in the + Z direction, the upper surface 1A of the table 1 contacts the lower surface 2B of the base member 2, and the size of the gap G is zero. Is the value of the load in the + Z direction acting on the table 1. When the external load acting on the table 1 is zero (no load), the table 1 does not move in the + Z direction, the position of the table 1 in the Z-axis direction is maintained, and the gap G between the upper surface 1A and the lower surface 2B is Maintained. When the external load in the + Z direction is less than or equal to the mass of the table 1, the table 1 is supported by the plane guide device 30, and the position of the table 1 in the Z-axis direction is maintained. When an external load in the + Z direction that is larger than the mass of the table 1 acts on the table 1, the movement of the table 1 in the + Z direction is started. When the external load acting on the table 1 in the + Z direction is less than a predetermined value, the table 1 moves in the + Z direction and the size of the gap G gradually decreases, but the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 Is away. When the external load in the + Z direction is larger than the mass of the table 1 and less than a predetermined value, the table 1 is composed of the first linear bearing 9X, the second linear bearing 9Y, the third linear bearing 13Y, the fourth linear bearing 13X, And supported by the rotary bearing 4. When the external load acting on the table 1 reaches a predetermined value, the upper surface 1A of the table 1 moved in the + Z direction comes into contact with the lower surface 2B of the base member 2, and the dimension of the gap G becomes zero.

  The first linear bearing 9X, the second linear bearing 9Y, the third linear bearing 13Y, the fourth linear bearing 13X, and the gap that allows the upper surface 1A and the lower surface 2B to contact before overload is applied to the rotary bearing 4. The dimension of G and the predetermined value of the load can be obtained in advance based on experiments or simulations. Based on the obtained data, the dimension of the gap G and the predetermined value of the load appropriate for the rotary bearing 60 and the rotary bearing 4 to be used are determined.

  In the state where the load in the + Z direction acting on the table 1 is zero (no load) and the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 face each other with a gap G therebetween, the horizontal slide mechanism of the plane guide device 30 The load in the + Z direction that 40 receives from the guide surface 2G shows the maximum value. In other words, when the external load acting on the table 1 in the + Z direction is zero, the contact pressure between the ball 42 of the horizontal slide mechanism 40 and the guide surface 2G shows a maximum value.

  By the operation of the moving system 8, the table 1 suspended and supported by the base member 2 via the plane guide device 30 moves in a plane parallel to the XY plane while being guided by the guide surface 2G of the base member 2. . When the gap G is formed and the load from the guide surface 2G is applied to the horizontal slide mechanism 40, the ball 42 of the plane guide device 30 can roll while in contact with the guide surface 2G of the base member 2. is there. As a result, the table 1 is guided in at least one of the X-axis direction, the Y-axis direction, and the θZ direction parallel to the guide surface 2G.

  When an external load in the + Z direction acts on the table 1 and the table 1 is gradually lifted and the gap G gradually decreases, the load received by the horizontal slide mechanism 40 of the plane guide device 30 from the guide surface 2G gradually decreases. In other words, as the external load acting on the table 1 increases in the + Z direction, the contact pressure between the ball 42 of the horizontal slide mechanism 40 and the guide surface 2G gradually decreases.

  When the external load in the + Z direction acting on the table 1 reaches a predetermined value and the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 are in contact with each other, the horizontal slide mechanism 40 of the plane guide device 30 moves from the guide surface 2G. The load in the + Z direction received is the minimum value. In other words, when an external load in the + Z direction acts on the table 1 and the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 come into contact, the contact pressure between the balls 42 of the horizontal slide mechanism 40 and the guide surface 2G is Indicates the minimum value.

  Thus, in the present embodiment, the load in the + Z direction that the horizontal slide mechanism 40 receives from the guide surface 2G when the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 are in contact with the upper surface 1A of the table 1 In a state where the lower surface 2B of the base member 2 faces the gap G, the horizontal slide mechanism 40 is smaller than the load in the + Z direction received from the guide surface 2G.

  In a state where the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 are in contact, the support plate 41 is separated from the ball 42, and the contact pressure between the ball 42 of the horizontal slide mechanism 40 and the guide surface 2G is the ball 42. The plane guide device 30 does not exhibit a guide function for guiding the table 1 in the XY plane. The table 1 is supported by the base member 2.

  Next, an example of the operation of the table apparatus 100A according to the present embodiment will be described. In the present embodiment, an example in which the table device 100A is used in a manufacturing process of a liquid crystal panel display which is a kind of flat panel display will be described. An example in which two substrates of a liquid crystal panel display are bonded using the table apparatus 100A will be described.

  As the work S, one of the two substrates is supported on the lower surface 1B of the table 1. The other substrate is held by a lower table (not shown) disposed below the table 1.

  The table apparatus 100A operates the moving system 8 to adjust the position of the table 1 in the XY plane. The table apparatus 100A adjusts the position of the table 1 to determine the position of the substrate in the XY plane. Thus, the table apparatus 100A functions as a positioning apparatus that determines the position of the substrate (work S) held on the table 1.

  After the position of the substrate in the XY plane is determined, the other substrate held on the table 1 is pressed from above onto the substrate held on the lower table. Thereby, two board | substrates are bonded together.

  Before the substrate held by the table 1 is pressed against the substrate held by the lower table, an external load in the + Z direction does not act on the table 1, and the upper surface 1A of the table 1 and the lower surface of the base member 2 A gap G is formed between 2B and 2B. When the substrate held on the table 1 is pressed against the substrate held on the lower table and an external load in the + Z direction acts on the table 1, the table 1 moves upward. When the external load in the + Z direction acting on the table 1 reaches a predetermined value, the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 come into contact with each other, and the table 1 is supported by the lower surface 2B of the base member 2.

  After the substrate held on the table 1 is pressed against the substrate held on the lower table and the two substrates are bonded together, the table 1 is raised. Thereby, the external load acting on the table 1 is reduced. When the external load acting on the table 1 decreases and the external load in the + Z direction on the table 1 becomes less than a predetermined value, the table 1 moves downward by the action of gravity (the weight of the table 1). Thereby, a gap G is formed between the upper surface 1A of the table 1 and the lower surface 2B of the base member 2.

  As described above, according to the present embodiment, in the table 1 that receives an external load in the + Z direction, when an external load in the + Z direction that is greater than or equal to a predetermined value acts on the table 1, the plane guide device 30 The load in the + Z direction received from the guide surface 2G is reduced, and the plane guide device 30 enters a free state in which the load is not supported. When an external load in the + Z direction that is equal to or greater than a predetermined value acts on the table 1, the table 1 and the base member 2 come into contact with each other, and the table 1 is held by the base member 2. Thereby, even if the gap G between the table 1 and the base member 2 is large, it is possible to suppress an excessive load from acting on the plane guide device 30 that functions as a horizontal guide device.

  Further, according to the present embodiment, the plane guide device 30 is connected to the table 1 via the rod member 51 and the rotary bearing 60. By connecting the plane guide device 30 and the table 1 via the rotary bearing 60, the tilt and misalignment of the rod member 51 are absorbed by the rotary bearing 60. Therefore, the load acting on each ball 42 of the plane guide device 30 can be made uniform.

  Further, according to the present embodiment, a plurality of plane guide devices 30 are provided in the horizontal plane. Accordingly, the table 1 is stably supported by the plurality of plane guide devices 30 and guided in the horizontal direction.

  Further, according to the present embodiment, the moving system 8 is connected to the table 1 via the rod member 5 and the rotary bearing 4. By connecting the moving system 8 and the table 1 via the rotary bearing 4, the tilt and misalignment of the rod member 5 are absorbed by the rotary bearing 4.

  Moreover, according to this embodiment, the base member 2 is comprised from the 1st base member 21 which supports the movement system 8, and the 2nd base member 22 in which the guide surface 2G is provided. The internal space 2H of the base member 2 is defined by an inner peripheral surface 2S provided on the first base member 21 and a guide surface 2G provided on the second base member 22. High surface accuracy is required for the guide surface 2G. When the guide surface 2G is formed inside the internal space 2H using a single member, it is highly likely that it is difficult to form the guide surface 2G with high surface accuracy. According to the present embodiment, the second base member 22 is a parallel plate, and the guide surface 2G (the upper surface of the second base member 22) can be processed with high surface accuracy. After the guide surface 2G is formed on the second base member 22 with high surface accuracy, the second base member 22 and the first base member 21 are joined to form the guide surface 2G having high surface accuracy in the internal space. It can be placed inside 2H.

Second Embodiment
A second embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 6 is a side sectional view showing an example of the table device 100B according to the present embodiment. FIG. 7 is a side sectional view showing an example of the horizontal slide mechanism 40B of the plane guide device 30B according to the present embodiment. Most parts of the table apparatus 100B according to the present embodiment are the same as the table apparatus 100A described in the above-described embodiment.

  Similar to the horizontal slide mechanism 40 described in the above-described embodiment, the horizontal slide mechanism 40B includes a support plate 41 that faces the guide surface 2G through a gap, and a plurality of balls 42 that can rotate while in contact with the guide surface 2G. And a retainer 43 that is disposed between the support plate 41 and the ball 42 and rotatably holds the ball 42. On the periphery of the lower surface of the support plate 41, a protruding member 41T that protrudes downward is provided.

  In the present embodiment, the horizontal slide mechanism 40B includes a preload mechanism 44 that is supported by the support plate 41 and generates a force that presses the ball 42 against the guide surface 2G via the cage 43.

  The preload mechanism 44 includes a ball plunger. The preload mechanism 44 includes a housing 45 having an opening at the lower end, a coil spring 46 disposed inside the housing 45, and a ball 47 disposed in the opening of the housing 45 and connected to the coil spring 46.

  When a vertical upward external load acts on the table 1 and the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 come into contact with each other, the load acting on the horizontal slide mechanism 40 from the guide surface 2G is zero (no load). Become. In this case, the plane guide device 30 is in a free state, and there is a high possibility that a gap is formed between the support plate 41 and the ball 42. Then, the ball 42 may move in the horizontal direction regardless of the movement of the support plate 41 and the table 1. For example, if a gap is formed between the support plate 41 and the ball 42 and the ball 42 moves to the periphery of the support plate 41, the horizontal slide mechanism 40 may not exhibit a guide function for guiding the table 1. There is.

  In the present embodiment, the horizontal slide mechanism 40 includes a holder 43 that rotatably holds the ball 42 and a preload mechanism 44 that generates a force that presses the ball 42 against the guide surface 2G via the holder 43. Thereby, the plane guide device 30 becomes free as the table 1 is raised, and even if the contact pressure between the ball 42 of the horizontal slide mechanism 40 and the guide surface 2G of the base member 2 decreases, the preload mechanism 44 The ball 42 can be kept in contact with the guide surface 2G. Therefore, the ball 42 is restrained from moving in the horizontal direction with respect to the support plate 41, and the guide function of the horizontal slide mechanism 40 is maintained.

  When a vertical upward external load is not applied to the table 1 or when the external load is small, the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 face each other with a gap therebetween. In a state where the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 face each other through a gap, the ball 42 receives a first load in the + Z direction from the guide surface 2G. In a state where the first load is acting on the ball 42, the horizontal slide mechanism 40 sufficiently exhibits a guide function for guiding the table 1. When a large vertical upward load is applied to the table 1, the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 come into contact with each other. In a state where the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 are in contact with each other, the preload mechanism 44 causes the load in the + Z direction that the ball 42 receives from the guide surface 2G to be a second load that is smaller than the first load. A force is generated to suppress the horizontal movement of the ball 42 relative to the support plate 41. When the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 come into contact, the preload mechanism 44 presses the ball 42 against the guide surface 2G with a relatively weak force, so that the upper surface 1A of the table 1 and the lower surface 2B of the base member 2 The movement of the ball 42 can be suppressed without impeding contact with the ball.

<Third Embodiment>
A third embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 8 is a side sectional view showing an example of the table device 100C according to the present embodiment. Most parts of the table apparatus 100C according to the present embodiment are the same as the table apparatus 100A described in the above-described embodiment.

  In the present embodiment, the table device 100C includes a drive element 71 that moves the support plate 41 of the plane guide device 30 in the vertical direction.

  Similar to the above-described embodiment, the horizontal slide mechanism 40 is connected to the absorption mechanism 50, the support plate 41 facing the guide surface 2G via a gap, and the plurality of balls 42 that can rotate while in contact with the guide surface 2G. And a retainer 43 that is disposed between the support plate 41 and the ball 42 and rotatably holds the ball 41.

  The drive element 71 changes the relative position of the absorption mechanism 50 (support plate 41) with respect to the table 1 so that the dimension of the gap between the support plate 41 and the ball 42 is reduced. The drive element 71 moves the support plate 41 in the Z-axis direction so that the dimension of the gap between the support plate 41 and the ball 42 becomes zero regardless of the magnitude of the upward load acting on the table 1. .

  The drive element 71 includes a piezoelectric element such as a piezoelectric element. The drive element 71 is disposed between the lower surface of the rotary bearing 60 and a fixing member 72 fixed to the inner surface of the hole 1K of the table 1.

  The drive element 71 can adjust the relative position of the absorption mechanism 50 (support plate 41) with respect to the table 1 in the Z-axis direction. As the drive element 71 contracts, the support plate 41 moves downward. As the drive element 71 extends, the support plate 41 moves upward.

  A spacer member 73 is disposed between the two inner rings 61 disposed in the vertical direction of the rotary bearing 60. The inner ring 61 is in contact with the spacer member 37. The two outer rings 62 arranged in the vertical direction face each other with a gap.

  The drive element 71 is disposed between the lower outer ring 62 and the fixing member 72 of the two outer rings 62 disposed in the vertical direction of the rotary bearing 60. The distance between the two outer rings 62 is changed by the operation of the drive element 71. Thereby, the position of the support plate 41 of the plane guide apparatus 30 is adjusted.

  According to this embodiment, the position of the plane guide device 30 (support plate 41) in the vertical direction can be adjusted by the drive element 71. Therefore, the dimension of the gap between the support plate 41 and the ball 42 can be adjusted.

  Note that the support plate 41 is operated such that the dimension of the gap between the table 1 and the base member 2 becomes zero regardless of the magnitude of the vertical upward external load acting on the table 1 by operating the drive element 71. It may be moved in the Z-axis direction.

  In the present embodiment, the driving element 71 may not be a piezoelectric element. The drive element 71 may be a force control actuator such as an air cylinder.

<Fourth embodiment>
A fourth embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 9 is a diagram illustrating an example of a flat panel display manufacturing apparatus 500 including the table apparatus 100A (100B, 100C) according to the present embodiment. The flat panel display manufacturing apparatus 500 is used in at least a part of a flat panel display manufacturing process. The flat panel display includes at least one of a liquid crystal display, a plasma display, and an organic EL display.

  The flat panel display manufacturing apparatus 500 includes a transfer device 600 that can transfer a workpiece S for manufacturing a flat panel display. The transport apparatus 600 includes a table apparatus 100A according to the present embodiment.

  In FIG. 9, the table device 100A is illustrated in a simplified manner. The workpiece S is held in the table 1.

  In the present embodiment, the workpiece S is a substrate for manufacturing a flat panel display. A flat panel display is manufactured from the workpiece S. The workpiece S may include a glass plate. When a liquid crystal display is manufactured, the workpiece S may include a TFT substrate or a color filter substrate.

  When the flat panel display manufacturing apparatus 500 includes a bonding apparatus that bonds two substrates, the workpiece S held on the table 1 includes one of the two substrates.

  In the present embodiment, the flat panel display manufacturing apparatus 500 includes a lower table 501 that holds the other substrate. The lower table 501 functions as a processing unit that processes the workpiece S (one substrate) held on the table 1. The table device 100A is disposed above the lower table 501.

  The flat panel display manufacturing apparatus 500 performs processing for manufacturing a flat panel display at the processing position PJ1. The table apparatus 100A places the workpiece S held on the table 1 at the processing position PJ1. The transport device 600 includes a carry-in device 601 capable of transporting (loading) the workpiece S to the table 1 of the table device 100 </ b> A, and a carry-out device 602 capable of transporting (unloading) the work S from the table 1. The work S before processing is transported (carried in) to the table 1 by the carry-in device 601. The workpiece S held on the table 1 is conveyed to the processing position PJ1 by the table apparatus 100A. The unloading device 602 transports (unloads) the processed workpiece S from either the table 1 or the lower table 501.

  The table apparatus 100A makes the substrate held by the table 1 face the substrate disposed at the processing position PJ1 by the lower table 501. In the present embodiment, the processing position PJ1 includes a bonding position for bonding two substrates. The table device 100 </ b> A moves downward so as to press the substrate held on the table 1 against the substrate held on the lower table 501. Thereby, two board | substrates are bonded together.

  After the workpiece S is processed at the processing position PJ1, the processed workpiece S is conveyed from the table 1 or the lower table 501 by the carry-out device 602. The workpiece S transported (unloaded) by the unloading device 602 is transported to a processing device that performs a post-process.

  In the present embodiment, the table apparatus 100A can arrange the workpiece S at the processing position PJ1. In addition, lack of positioning accuracy of the table 1 is suppressed. Therefore, generation | occurrence | production of a defective product (flat panel display) is suppressed.

  In the present embodiment, the two substrates are bonded together by lowering the table device 100A. The lower table 501 may be raised, or the table apparatus 100A may be lowered and the lower table 501 may be raised.

  Note that the table device 100A (100B, 100C) may be used in a semiconductor manufacturing apparatus. The semiconductor manufacturing apparatus includes, for example, an exposure apparatus that forms a device pattern on the workpiece S via a projection optical system. In the exposure apparatus, the processing position PJ1 includes the image plane position (exposure position) of the projection optical system. The projection optical system functions as a processing unit that performs exposure processing on the workpiece S supported by the table 1. The projection optical system is arranged below the table 1 and irradiates the workpiece S held on the table 1 with exposure light from below. By disposing the workpiece S at the processing position PJ1, the semiconductor manufacturing apparatus can form a device pattern on the workpiece S via the projection optical system.

  The semiconductor manufacturing apparatus may include a film forming apparatus that forms a film on the workpiece S. When the semiconductor manufacturing apparatus includes a film forming apparatus, the processing position PJ1 includes a supply position (film forming position) to which a material for forming a film is supplied. The supply unit that supplies the material functions as a processing unit that performs the film forming process of the workpiece S held on the table 1. By disposing the workpiece S at the processing position PJ1, a film for forming a device pattern is formed on the workpiece S.

<Fifth Embodiment>
A fifth embodiment will be described. FIG. 10 is a diagram illustrating an example of a precision machine 700 including the table device 100A (100B, 100C) according to the present embodiment. In the present embodiment, an example in which the precision machine 700 is a precision measuring machine that accurately measures a workpiece such as a precision instrument will be described.

  The precision measuring instrument 700 measures the workpiece S2. The workpiece S2 may include, for example, at least one of a flat panel display manufactured by the flat panel display manufacturing apparatus 500 and a semiconductor device manufactured by the above-described semiconductor manufacturing apparatus. The precision measuring machine 700 includes a transfer device 600B that can transfer the workpiece S2. The transport apparatus 600B includes a table apparatus 100A according to the present embodiment.

  In FIG. 10, the table device 100A is illustrated in a simplified manner. The work S2 is held in the table 1.

  The precision measuring instrument 700 measures the workpiece S2 arranged at the measurement position (target position) PJ2. The table apparatus 100A places the workpiece S2 supported by the table 1 at the measurement position PJ2. The transfer device 600B includes a carry-in device 601B that can transfer (carry in) the workpiece S2 to the table 1 of the table device 100A, and a carry-out device 602B that can transfer (carry out) the workpiece S2 from the table 1. The workpiece S2 before measurement is transported (carried in) to the table 1 by the loading device 601B. The workpiece S2 supported by the table 1 is conveyed to the measurement position PJ2 by the table apparatus 100A. The workpiece S2 after measurement is conveyed (unloaded) from the table 1 by the unloading device 602B.

  The table apparatus 100A moves the table 1 and moves the workpiece S2 supported by the table 1 to the measurement position PJ2. The table device 100A can place the workpiece S2 supported by the table 1 at the measurement position PJ2 with high positioning accuracy.

  In the present embodiment, the precision measuring instrument 700 optically measures the workpiece S2 using detection light. The precision measuring instrument 700 includes an irradiation device 701 capable of emitting detection light and a light receiving device 702 capable of receiving at least part of the detection light emitted from the irradiation device 701 and reflected by the workpiece S2. In the present embodiment, the measurement position PJ2 includes a detection light irradiation position. The irradiation device 701 and the light receiving device 702 function as a processing unit that processes the workpiece S2 supported by the table 1. In the present embodiment, the irradiation device 701 and the light receiving device 702 function as a measurement unit that measures the workpiece S2 supported by the table 1. By disposing the workpiece S2 at the measurement position PJ2, the state of the workpiece S2 is optically measured.

  After the workpiece S2 is measured at the measurement position PJ2, the workpiece S2 after the measurement is conveyed from the table 1 by the carry-out device 602B.

  In the present embodiment, the table apparatus 100A can suppress the occurrence of measurement failure because the workpiece S2 can be arranged at the measurement position (target position) PJ2. That is, the precision measuring instrument 700 can satisfactorily determine whether or not the workpiece S2 is defective. Thereby, for example, it is suppressed that defective work S2 is conveyed to a back process, or shipped. Further, since the precision measuring instrument 700 can measure the workpiece S2 placed at the measurement position PJ2 by the table 1, the workpiece S2 can be precisely measured.

  Note that the three-dimensional measurement apparatus may include the table apparatus 100A according to the present embodiment, or may include a transport apparatus including the table apparatus 100A. Since the workpiece to be measured is supported by the table 1, the three-dimensional measuring apparatus can measure the workpiece placed at the target position, and therefore can accurately measure the workpiece.

<Sixth Embodiment>
A sixth embodiment will be described. FIG. 11 is a diagram illustrating an example of a precision machine 800 including the table device 100A (100B, 100C) according to the present embodiment. In the present embodiment, an example in which the precision machine 800 is a precision machine capable of performing precision machining will be described.

  The precision processing machine 800 processes the workpiece S3. The precision processing machine 800 includes a machining center, and includes a table device 100A and a processing head 801. The machining head 801 functions as a processing unit that processes the workpiece S3 held on the table 1 of the table apparatus 100A. In the present embodiment, the processing head 801 functions as a processing unit that processes the workpiece S3 held on the table 1 of the table apparatus 100A. The processing head 801 has a processing tool, and processes the workpiece S3 held on the table 1 of the table apparatus 100A with the processing tool. The machining head 801 is a mechanism for cutting the workpiece S3. The machining head 801 moves the machining tool in the Z-axis direction orthogonal to the movement direction of the table 1.

  The precision processing machine 800 can move the processing tool and the workpiece S3 relatively by moving the workpiece S3 in the XY plane by the table apparatus 100A and moving the processing head 801 in the Z-axis direction.

  Since the precision processing machine 800 can process the workpiece S3 arranged at the processing position (target position) by the table 1, the workpiece S3 can be precisely processed.

  In the above-described embodiments, the table 1 is moved in the XY plane (in the horizontal plane). In the present embodiment, the table 1 may be moved in a direction inclined with respect to the XY plane. That is, the XY plane may be parallel to the horizontal plane or may be inclined with respect to the horizontal plane.

DESCRIPTION OF SYMBOLS 1 Table 1A Upper surface 1B Lower surface 1K Hole 2 Base member 2A Upper surface 2B Lower surface 2H Internal space 2K Hole 2G Guide surface 2S Inner peripheral surface 3 Support apparatus 4 Rotary bearing (2nd rotational bearing)
4A Inner ring 4B Outer ring 4C Ball 5 Rod member (second rod member)
5F Lock nut 5L Rod portion 5S Spacer 6 Support member 6X First support member 6Y Second support member 7 Actuator 7X First actuator 7Y Second actuator 8 Movement system 9X First linear bearing 9Y Second linear bearing 10X First guide member 10Y 2nd guide member 11X 1st ball screw mechanism 11Y 2nd ball screw mechanism 12Y 3rd guide member 12X 4th guide member 13Y 3rd linear bearing 13X 4th linear bearing 14 Connection member 15 Connection member 16 Casing 21 1st base member 22 Second base member 30 Plane guide device 40 Horizontal slide mechanism 40B Horizontal slide mechanism 41 Support plate 41T Projection member 42 Ball 43 Cage 44 Preload mechanism 45 Housing 46 Coil spring 47 Ball 50 Absorption mechanism 51 Rod member ( 1 rod member)
52 1st rod part 53 2nd rod part 54 Lock nut 55 Spacer 60 Rotary bearing (1st rotary bearing)
61 Inner ring 62 Outer ring 63 Ball 71 Drive element 72 Fixing member 73 Spacer member 100A Table apparatus 100B Table apparatus 100C Table apparatus 500 Flat panel display manufacturing apparatus 700 Precision machine (precision measuring machine)
800 Precision machine (Precision processing machine)
G gap

Claims (11)

A table having a lower surface for holding a workpiece;
A base member having a lower surface facing the upper surface of the table;
A moving system having an actuator for generating power for moving the table in the horizontal direction relative to the base member;
A plane guide device having a horizontal slide mechanism that is connected to the table at least partly and is supported so as to be movable in the horizontal direction on an upwardly directed guide surface provided on the base member;
With
When the vertical upward external load acting on the table is less than a predetermined value,
The table is supported by the plane guide device so that the upper surface of the table and the lower surface of the base member are opposed to each other with a gap between them.
When the vertical upward external load acting on the table is a predetermined value or more,
When the upper surface of the table and the lower surface of the base member are in contact with each other, the horizontal slide mechanism receives the vertical upward load from the guide surface when the external load is less than the predetermined value. Smaller than the vertical upward load from the surface,
Table device. The plane guide device has a first rod member protruding downward from the horizontal slide mechanism,
A first rotary bearing provided on the table and disposed around the first rod member;
The table apparatus according to claim 1. A plurality of the plane guide devices are provided in a horizontal plane,
The table device according to claim 1 or 2. The table has a second rod member,
A second rotary bearing disposed around the second rod member;
At least a part of the moving system is connected to a support member that supports the second rotary bearing.
The table apparatus as described in any one of Claims 1-3. The moving system is supported by the base member;
The base member includes a first base member that supports the moving system, and a second base member that is disposed between the first base member and the table and has the guide surface.
The table apparatus as described in any one of Claims 1-4. The horizontal slide mechanism is
A support plate facing the guide surface via a gap;
A plurality of balls that are rotatable in contact with the guide surface;
A cage that is disposed between the support plate and the ball and holds the ball rotatably;
A preload mechanism that is supported by the support plate and generates a force for pressing the ball against the guide surface via the cage;
The table apparatus according to claim 1, comprising: In a state where the upper surface of the table and the lower surface of the base member face each other with a gap, the ball receives a first load from the guide surface,
The preload mechanism generates the force so that a load received by the ball from the guide surface is a second load smaller than the first load in a state where the upper surface of the table and the lower surface of the base member are in contact with each other. Suppressing the movement of the ball with respect to the support plate,
The table device according to claim 6. The horizontal slide mechanism is
A support plate facing the guide surface via a gap;
A plurality of balls that are rotatable in contact with the guide surface;
A cage that is disposed between the support plate and the ball and holds the ball rotatably;
Have
A drive element that generates a force so that the size of the gap between the support plate and the ball is reduced;
The table apparatus as described in any one of Claims 1-5 . A table device according to any one of claims 1 to 8, comprising:
Determining a position of a work supported by the table of the table device;
Positioning device. The table device according to any one of claims 1 to 8,
A processing unit for processing the work supported by the table;
A flat panel display manufacturing apparatus. The table device according to any one of claims 1 to 8,
A processing unit for processing the work supported by the table;
Precision machine equipped with.

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