WO2015152246A1

WO2015152246A1 - Table device, conveyance device, semiconductor-manufacturing device, and inspection device

Info

Publication number: WO2015152246A1
Application number: PCT/JP2015/060137
Authority: WO
Inventors: 佐藤　俊徳
Original assignee: 日本精工株式会社
Priority date: 2014-04-01
Filing date: 2015-03-31
Publication date: 2015-10-08
Also published as: JP2015196222A; CN106457493A; TW201607666A; JP5776812B1; KR101848396B1; KR20160127812A; CN106457493B

Abstract

　A table device (TS) is provided with: a base member (1); a table (2) arranged on the base member; a drive system (3) capable of moving the table in directions parallel to a first axis, a second axis, and a third axis; a piston member (4) connected to the table; a cylinder member (5) arranged around the piston member, the cylinder member supporting the piston member so that the piston member can move in a direction parallel to the first axis, and being supported by the base member so as to be capable of moving in directions parallel to the second axis and the third axis; a first bearing member (6) arranged in the cylinder member, the first bearing member forming a gas bearing between a side surface of the piston member and the first bearing member; a second bearing member (7) arranged in the cylinder member, the second bearing member forming a gas bearing between a guide surface of the base member and the second bearing member; and a gravity compensation device (8) having a supply port for supplying gas to a lower portion space in an inside space of the cylinder member with which a lower surface of the piston member is in contact.

Description

Table device, transfer device, semiconductor manufacturing device, and inspection device

The present invention relates to a table device, a transfer device, a semiconductor manufacturing device, and an inspection device.

In the technical field related to semiconductor manufacturing equipment, inspection equipment, measuring equipment, etc., table equipment (stage equipment) having a movable table is used. Patent Document 1 discloses a technique related to a stage apparatus including a moving unit that moves a Z-axis table to which a measurement probe is attached in a three-dimensional direction. Japanese Patent Application Laid-Open No. H10-228688 discloses a technique related to a stage device that raises and lowers a table using a wedge-shaped member.

Japanese Patent Laid-Open No. 10-318728 JP 2004-195620 A

In the table device, if the table moves out of the target trajectory even though the table is moved along the target trajectory, the positioning accuracy of the table may be lowered. For example, if the table is moved straight in the vertical direction but the table is not moved straight, the positioning accuracy of the table is lowered.

Also, in the table device, there is a possibility that a load is applied to the actuator for moving the table due to the weight of the table, for example. When a load is applied to the actuator and the actuator generates heat, the surrounding members may be thermally deformed and the positioning accuracy of the table may be reduced.

If the positioning accuracy of the table is lowered, there is a possibility that the performance of the transfer device including the table device is lowered.

An object of an aspect of the present invention is to provide a table device that can suppress a decrease in positioning accuracy. Moreover, the aspect of this invention aims at providing the conveying apparatus which can suppress the fall of performance.

According to a first aspect of the present invention, there is provided a base member having a guide surface parallel to a predetermined surface, a table disposed on the base member, and the base in a direction parallel to a first axis perpendicular to the predetermined surface. An actuator disposed between the member and the table and generating power, the second direction in the direction parallel to the first axis, the direction parallel to the second axis in the predetermined plane, and the predetermined plane; A drive system capable of moving the table in a direction parallel to a third axis orthogonal to the axis, an upper surface, a lower surface, and a side surface connecting the upper surface and the lower surface, and at least a part of the upper surface side is the table A piston member connected to the piston member, the piston member being arranged around the piston member, movably supported in a direction parallel to the first axis, and a direction parallel to the second axis and the third axis; Parallel direction A cylinder member that is movably supported by the base member, a first bearing member that is disposed on the cylinder member and forms a gas bearing between the side surfaces of the piston member, and the cylinder member A second bearing member that forms a gas bearing with the guide surface of the base member, and a lower surface of the internal space of the cylinder member that the lower surface of the piston member faces, and the lower portion A gravity compensation apparatus having a supply port for supplying gas to a space is provided.

According to the first aspect of the present invention, the drive system moves the table in three directions: a direction parallel to the first axis, a direction parallel to the second axis, and a direction parallel to the third axis. Can do. The piston member connected to the table is supported on the cylinder member in a non-contact manner by a gas bearing formed by the first bearing member. Thereby, the table can move with high positioning accuracy in a direction parallel to the first axis. The cylinder member is supported on the base member in a non-contact manner by a gas bearing formed by the second bearing member. As a result, the cylinder member and the table supported by the cylinder member via the piston member can move with high positioning accuracy in each of the direction parallel to the second axis and the direction parallel to the third axis. Further, the gas is supplied from the supply port to the lower space facing the lower surface of the piston member, thereby reducing the effect of the weight of the table on the actuator. Thereby, the load concerning an actuator is reduced. Therefore, heat generation of the actuator is suppressed, and thermal deformation of members around the actuator is suppressed. Moreover, since the thermal deformation of the member of a table apparatus is suppressed, the fall of the positioning accuracy of a table is suppressed.

In the first aspect of the present invention, the piston member may be connected to each of a plurality of positions on the peripheral edge of the table, and a plurality of the cylinder members may be arranged so as to surround the drive system. As a result, the table can move with high accuracy in the target trajectory.

In the first aspect of the present invention, the drive system includes a second axis stage that is movably supported by the base member in a direction parallel to the second axis, and a second axis that moves the second axis stage. A second axis driving device including an actuator; a third axis stage supported movably on the second axis stage in a direction parallel to the third axis; and a third axis actuator that moves the third axis stage. A third shaft driving device including the first shaft driving device disposed on the third shaft stage and moving the table in a direction parallel to the first shaft. The cylinder member includes the third shaft driving device. It may be connected to an axis stage. Accordingly, the table, the piston member, and the cylinder member can stably move together in the direction parallel to the second axis and the direction parallel to the third axis. The cylinder member moves stably together with the table and the piston member in the direction parallel to the second axis and the direction parallel to the third axis. Therefore, the piston member can be supported movably in a non-contact manner in a direction parallel to the first axis.

In the first aspect of the present invention, the first shaft driving device includes a first wedge member supported movably on the third shaft stage in a direction parallel to the second shaft or the third shaft, A second wedge member disposed on the first wedge member and movable relative to the first wedge member; a first shaft actuator that moves the first wedge member; and at least a portion of the first wedge member. A guide device disposed on the member for guiding the second wedge member so that the second wedge member moves in a direction parallel to the first axis by the movement of the first wedge member, and the table May be supported by the second wedge member. Accordingly, the second wedge member and the table can be moved in a direction parallel to the first axis by moving the first wedge member in a direction parallel to the second axis or the third axis. Further, by adjusting the inclination angle of the slope of the first wedge member that supports the second wedge member, the amount of movement of the first wedge member in the direction parallel to the second axis or the third axis is parallel to the first axis. The ratio (reduction ratio, resolution) with the amount of movement of the second wedge member with respect to the direction can be adjusted.

In the first aspect of the present invention, the guide device is disposed on one wedge member of the first wedge member and the second wedge member and on the other wedge member and is relatively movable with respect to the rail. And a linear motion type rolling bearing having a simple slider. Thereby, the guide device can accurately guide the second wedge member and the table.

The second aspect of the present invention provides a transport device including the table device of the first aspect.

According to the second aspect of the present invention, the deterioration of the performance of the transport device is suppressed, and the object supported by the table is transported to the target position.

According to the aspect of the present invention, a table device capable of suppressing a decrease in positioning accuracy is provided. Moreover, according to the aspect of this invention, the conveying apparatus which can suppress the fall of performance is provided.

FIG. 1 is a side view showing an example of a table device according to the first embodiment. FIG. 2 is a side view showing an example of the table device according to the first embodiment. FIG. 3 is a plan view showing an example of the table device according to the first embodiment. FIG. 4 is an enlarged side cross-sectional view of a part of the table device according to the first embodiment. FIG. 5 is a view taken along line AA in FIG. FIG. 6 is an enlarged view of a part of the table device according to the first embodiment. FIG. 7 is a diagram illustrating an example of a guide device according to the first embodiment. FIG. 8 is a diagram illustrating an example of a transfer apparatus and a semiconductor manufacturing apparatus according to the second embodiment. FIG. 9 is a diagram illustrating an example of a transport device and an inspection device according to the second embodiment.

Hereinafter, embodiments according to the present invention will be described with reference to the drawings, but the present invention is not limited thereto. The components of each embodiment described below can be combined as appropriate. Some components may not be used.

In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each part will be described with reference to this XYZ orthogonal coordinate system. A direction parallel to the first axis perpendicular to the predetermined plane is taken as a Z-axis direction. A direction parallel to the second axis in the predetermined plane is taken as an X-axis direction. A direction parallel to the third axis orthogonal to the second axis in the predetermined plane is defined as the Y-axis direction. Further, the rotation (inclination) directions around the Z axis, the X axis, and the Y axis are the θZ, θX, and θY directions, respectively. The Z axis (first axis) is orthogonal to the X axis (second axis) and the Y axis (third axis). The X axis is orthogonal to the YZ plane. The Y axis is orthogonal to the XZ plane. The Z axis is orthogonal to the XY plane. The XY plane is parallel to the predetermined plane. In the present embodiment, the XY plane is parallel to the horizontal plane. The Z-axis direction is the vertical direction. The XY plane (predetermined surface) may be inclined with respect to the horizontal plane.

<First Embodiment>
A first embodiment will be described. FIG. 1 is a side view of the table device TS according to the present embodiment as viewed from the −Y side. FIG. 2 is a side view of the table device TS according to the present embodiment as viewed from the + X side. FIG. 3 is a plan view of the table device TS according to the present embodiment as viewed from the + Z side. 1 and 2, a part of the table device TS is shown in cross section.

As shown in FIGS. 1, 2, and 3, the table device TS includes a base member 1, a table 2 disposed on the base member 1, a drive system 3 that can move the table 2, and a table 2. A piston member 4 connected to the cylinder member 5, a cylinder member 5 arranged around the piston member 4, a bearing member 6 forming a gas bearing 6G between the piston member 4 and the cylinder member 5, a base member 1 and a cylinder The bearing member 7 which forms the gas bearing 7G between the members 5 and the gravity compensation apparatus 8 are provided.

The base member 1 has an upper surface (guide surface) 1A parallel to the XY plane. The guide surface 1A is flat. The base member 1 may be a stone surface plate such as Indian black or a cast iron surface plate. The base member 1 is disposed on the floor surface of a facility (for example, a factory) where the table device TS is installed, for example.

The table 2 is arranged above the base member 1 (+ Z direction). The table 2 is movable while supporting the object S. The table 2 has an upper surface 2A facing the + Z direction and a lower surface 2B facing the opposite direction (−Z direction) of the upper surface 2A. The upper surface 2A can support the object S. The table 2 is movable in three directions, ie, the X-axis direction, the Y-axis direction, and the Z-axis direction, with the object S placed on the upper surface 2A. In the present embodiment, the table 2 is a three-degree-of-freedom table (three-axis table, three-dimensional table) that can move in three directions.

The drive system 3 includes an actuator that generates power, and can move the table 2. The drive system 3 includes an actuator that generates power for moving the table 2 at least in the Z-axis direction. In the present embodiment, the drive system 3 is disposed between the base member 1 and the table 2 in the Z-axis direction.

In the present embodiment, the drive system 3 has an X-axis actuator (second axis actuator) 22 that generates power for moving the table 2 in the X-axis direction and power for moving the table 2 in the Y-axis direction. A Y-axis actuator (third axis actuator) 32 that generates and a Z-axis actuator (first axis actuator) 13 that generates power for moving the table 2 in the Z-axis direction are included. The drive system 3 can move the table 2 in three directions, ie, an X-axis direction, a Y-axis direction, and a Z-axis direction.

The drive system 3 includes a Z-axis drive device (first axis drive device) 10 that moves the table 2 in the Z-axis direction, and an X-axis drive device (second axis drive device) 20 that moves the table 2 in the X-axis direction. And a Y-axis drive device (third axis drive device) 30 that moves the table 2 in the Y-axis direction.

The X-axis drive device 20 moves the table 2 in the X-axis direction. The X-axis drive device 20 is disposed on the base member 1. The X-axis drive device 20 generates an X-axis stage (second axis stage) 21 supported by the base member 1 so as to be movable in the X-axis direction and power for moving the X-axis stage 21 in the X-axis direction. An X-axis actuator (second axis actuator) 22 and an X-axis guide device 23 for guiding the X-axis stage 21 in the X-axis direction are included.

In the present embodiment, the X-axis actuator 22 includes a linear motor. The X-axis actuator 22 includes a stator 22 B fixed to the guide surface 1 A of the base member 1 and a mover 22 A disposed on the lower surface of the X-axis stage 21. The stator 22B is long in the X-axis direction. The mover 22A is movable in the X-axis direction with respect to the stator 22B. The X-axis actuator 22 may be a moving coil type in which the stator 22B includes a magnet and the mover 22A includes a coil. The X-axis actuator 22 may be a moving magnet type in which the stator 22B includes a coil and the mover 22A includes a magnet.

The X-axis guide device 23 includes a rail 23B fixed to the guide surface 1A of the base member 1 and a slider 23A that is disposed on the lower surface of the X-axis stage 21 and can move the rail 23B. The rail 23B is long in the X-axis direction. In the present embodiment, the X-axis guide device 23 includes a linear motion type rolling bearing.

The operation of the X-axis actuator 22 including a linear motor allows the X-axis stage 21 to move in the X-axis direction with respect to the base member 1 while being guided by the X-axis guide device 23.

The Y-axis drive device 30 moves the table 2 in the Y-axis direction. The Y-axis drive device 30 is disposed on the X-axis stage 21. The Y-axis drive device 30 generates a power for moving the Y-axis stage 31 in the Y-axis direction, and a Y-axis stage (third axis stage) 31 supported by the X-axis stage 21 so as to be movable in the Y-axis direction. And a Y-axis guide device 33 that guides the Y-axis stage 31 in the Y-axis direction.

In the present embodiment, the Y-axis actuator 32 includes a linear motor. The Y-axis actuator 32 has a stator 32B fixed to the upper surface of the X-axis stage 21 and a mover 32A disposed on the lower surface of the Y-axis stage 31. The stator 32B is long in the Y-axis direction. The mover 32A is movable in the Y-axis direction with respect to the stator 32B. The Y-axis actuator 32 may be a moving coil type in which the stator 32B includes a magnet and the mover 32A includes a coil. The Y-axis actuator 32 may be a moving magnet type in which the stator 32B includes a coil and the mover 32A includes a magnet.

The Y-axis guide device 33 includes a rail 33B fixed to the upper surface of the X-axis stage 21 and a slider 33A that is disposed on the lower surface of the Y-axis stage 31 and can move the rail 33B. The rail 33B is long in the Y-axis direction. In the present embodiment, the Y-axis guide device 33 includes a linear motion type rolling bearing.

The operation of the Y-axis actuator 32 including the linear motor allows the Y-axis stage 31 to move in the Y-axis direction with respect to the X-axis stage 21 while being guided by the Y-axis guide device 33.

When the X-axis stage 21 moves in the X-axis direction, the Y-axis stage 31 moves in the X-axis direction together with the X-axis stage 21. In the present embodiment, the operation of the X-axis actuator 22 and the operation of the Y-axis actuator 32 allow the Y-axis stage 31 to move in the X-axis direction and the Y-axis direction, respectively.

The Z-axis drive device 10 moves the table 2 in the Z-axis direction. The Z-axis drive device 10 is disposed on the Y-axis stage 31. The Z-axis drive device 10 is disposed on the first wedge member 11 supported on the Y-axis stage 31 so as to be movable in the Y-axis direction, and is relatively moved with respect to the first wedge member 11. A second wedge member 12 that is possible, a Z-axis actuator 13 that generates power to move the first wedge member 11 in the Y-axis direction and move the second wedge member 12 in the Z-axis direction, and at least a portion thereof A Z-axis guide device 14 disposed on the first wedge member 11 and guiding the second wedge member 12 so that the second wedge member 12 moves in the Z-axis direction by the movement of the first wedge member 11 in the Y-axis direction. Have.

The Z-axis actuator 13 can move the first wedge member 11 in the Y-axis direction. In the present embodiment, when the first wedge member 11 moves in the Y-axis direction by the operation of the Z-axis actuator 13, the second wedge member 12 moves in the Z-axis direction in synchronization with the first wedge member 11. .

In the present embodiment, the Z-axis actuator 13 includes a rotary motor. The Z-axis actuator 13 and the first wedge member 11 are connected via a power transmission mechanism 15. The power of the Z-axis actuator 13 is transmitted to the first wedge member 11 via the power transmission mechanism 15.

The power transmission mechanism 15 converts the rotational motion of the Z-axis actuator 13 into linear motion. In the present embodiment, the shaft (output shaft) of the Z-axis actuator 13 rotates in the θY direction. The power transmission mechanism 15 converts the rotational motion in the θY direction into a linear motion in the Y-axis direction and transmits the linear motion to the first wedge member 11. The first wedge member 11 moves in the Y-axis direction by the power of the Z-axis actuator 13 transmitted through the power transmission mechanism 15.

In this embodiment, the power transmission mechanism 15 includes a ball screw. The ball screw includes a screw shaft that is rotated by the operation of the Z-axis actuator 13, a nut that is connected to the first wedge member 11 and that is disposed around the screw shaft, and a ball that is disposed between the screw shaft and the nut. including. The screw shaft of the ball screw is rotatably supported by a support bearing. In the present embodiment, the ball screw rotates in the θY direction. As the ball screw rotates in the θY direction, the nut and the first wedge member 11 to which the nut is connected move (linearly move) in the Y-axis direction.

When the Z-axis actuator 13 rotates the screw shaft of the ball screw in one direction, the first wedge member 11 moves in the + Y direction by the rotation of the screw shaft. When the Z-axis actuator 13 rotates the screw shaft of the ball screw in the reverse direction, the first wedge member 11 moves in the −Y direction by the rotation of the screw shaft. That is, based on the rotation direction of the Z-axis actuator 13 (the rotation direction of the screw shaft of the ball screw), the moving direction of the first wedge member 11 with respect to the Y-axis direction (either the + Y direction or the −Y direction) is It is determined. Based on the moving direction of the first wedge member 11, the moving direction of the second wedge member 12 (table 2) in the Z-axis direction (one of the −Z direction and the + Z direction) is determined.

The Z-axis guide device 14 includes a rail 14B fixed to the slope of the first wedge member 11, and a slider 14A that is disposed on the slope of the second wedge member 12 and that can move the rail 14B. In the present embodiment, the Z-axis guide device 14 includes a linear motion type rolling bearing.

In this embodiment, the Z-axis drive device 10 includes a Y-axis guide device 16 that guides the first wedge member 11 in the Y-axis direction. The Y-axis guide device 16 includes a rail 16B fixed to the upper surface of the Y-axis stage 31, and a slider 16A that is disposed on the lower surface of the first wedge member 11 and can move the rail 16B. In the present embodiment, the Y-axis guide device 16 includes a linear motion type rolling bearing.

The first wedge member 11 is movable in the Y-axis direction with respect to the Y-axis stage 31 while being guided by the Y-axis guide device 16 by the operation of the Z-axis actuator 13 including the rotary motor. By the movement of the first wedge member 11 in the Y-axis direction, the second wedge member 12 is movable in the Z-axis direction with respect to the first wedge member 11 while being guided by the Z-axis guide device 14.

When the Y-axis stage 31 moves in the X-axis direction and the Y-axis direction, the first wedge member 11 and the second wedge member 12 move together with the Y-axis stage 31 in the X-axis direction and the Y-axis direction. In the present embodiment, the first wedge member 11 and the second wedge member 12 are movable in the X-axis direction and the Y-axis direction by the operation of the X-axis actuator 22 and the operation of the Y-axis actuator 32, respectively.

The table 2 is supported by the second wedge member 12. In the present embodiment, the table device TS includes a support device 9 that is arranged between the second wedge member 12 and the table 2 and supports the table 2 flexibly. The second wedge member 12 supports the table 2 via the support device 9. In the present embodiment, the support device 9 includes a spherical bearing that receives a load in the Z-axis direction. Support device 9 includes an inner ring member 9A whose outer surface is a spherical surface, and an outer ring member 9B having a support surface that makes spherical contact with the outer surface of inner ring member 9A. In the present embodiment, the outer ring member 9 B is disposed on the upper surface of the second wedge member 12. The inner ring member 9A is connected to the center of the lower surface 2B of the table 2. By supporting the table 2 on the second wedge member 12 via the support device 9, the table 2 and the second wedge member 12 can be moved relative to each other. In the present embodiment, relative movement between the table 2 and the second wedge member 12 in the Z-axis direction is suppressed (restricted) by the support device 9, and directions other than the Z-axis direction (X-axis, Y-axis, θX, θY) , And θZ direction) relative movement between the table 2 and the second wedge member 12 is allowed.

When the second wedge member 12 is moved in the X-axis direction and the Y-axis direction by the operation of the X-axis actuator 22 and the operation of the Y-axis actuator 32, the table 2 is moved together with the second wedge member 12 in the X-axis direction and the Y-axis. Move in the direction. When the second wedge member 12 moves in the Z-axis direction due to the relative movement between the first wedge member 11 and the second wedge member 12, the table 2 moves in the Z-axis direction together with the second wedge member 12. . Thereby, the table 2 is movable in three directions, the X-axis direction, the Y-axis direction, and the Z-axis direction.

The piston member 4 is connected to the lower surface 2B of the table 2. The piston member 4 is a rod-like member that is long in the Z-axis direction. The piston member 4 has an upper surface 4A facing the + Z direction, a lower surface 4B facing the −Z direction, and a side surface (outer surface) 4C connecting the upper surface 4A and the lower surface 4B. At least a part of the upper surface 4 A side of the piston member 4 is connected to the table 2. In the present embodiment, the upper surface 4 A of the piston member 4 and the lower surface 2 B of the table 2 are fixed via the connection member 40.

As shown in FIG. 3, in the present embodiment, the outer shape of the table 2 in the XY plane is a quadrangle. In the present embodiment, the outer shape of the cross section of the piston member 4 parallel to the XY plane is a circle. That is, the piston member 4 is a columnar member that is long in the Z-axis direction. The axis of the piston member 4 is parallel to the Z axis. The piston member 4 may be hollow. For example, the piston member 4 may be a cylindrical member that is long in the Z-axis direction.

The support device 9 is connected to the central portion of the lower surface 2B of the table 2. The plurality of piston members 4 are arranged so as to surround the support device 9. The piston member 4 is connected to each of a plurality of positions on the peripheral edge of the lower surface 2B of the table 2. In the present embodiment, the piston member 4 is connected to each of the four corners of the table 2. The plurality of piston members 4 are arranged so as to surround the drive system 3.

The cylinder member 5 is a cylindrical member and is disposed around the piston member 4. The cylinder member 5 has an upper surface 5A facing the + Z direction, a lower surface 5B facing the −Z direction, and an inner surface 5S facing the internal space 5H of the cylinder member 5. The upper surface 5 A of the cylinder member 5 faces the lower surface of the connection member 40. The lower surface 5 B of the cylinder member 5 faces the guide surface 1 A of the base member 1. The inner surface 5S of the cylinder member 5 faces the outer surface 4C of the piston member 4. A plurality (four) of the cylinder members 5 are arranged so as to surround the drive system 3. The cylinder member 5 supports the piston member 4 so as to be movable in the Z-axis direction. The cylinder member 5 is supported by the base member 1 so as to be movable in each of the X-axis direction and the Y-axis direction.

The plurality of cylinder members 5 are arranged so as to surround the Y-axis stage 31. In the present embodiment, the cylinder member 5 is connected to the Y-axis stage 31. The plurality of cylinder members 5 move in the X-axis direction and the Y-axis direction together with the Y-axis stage 31.

The bearing member 6 forms a gas bearing (hydrostatic bearing) 6G between the piston member 4 and the cylinder member 5. In the present embodiment, the bearing member 6 is disposed on the cylinder member 5. The bearing member 6 is disposed on the cylinder member 5 so as to face the internal space 5H of the cylinder member 5. The bearing member 6 is disposed on the inner surface 5S of the cylinder member 5. The bearing member 6 has an inner surface 6S that faces the inner space 5H. The inner surface 5S of the cylinder member 5 includes the inner surface 6S of the bearing member 6. That is, in the present embodiment, the inner surface 6S may be regarded as the inner surface 5S. The bearing member 6 has a supply port 61 capable of supplying gas between the side surface 4 C of the piston member 4. The supply port 61 is disposed on the inner surface 6 S of the bearing member 6. The bearing member 6 forms a gas bearing 6 G with the side surface 4 C of the piston member 4 by the gas supplied from the supply port 61. By forming the gas bearing 6G, the piston member 4 is supported on the inner surface 5S of the cylinder member 5 in a non-contact manner. The cylinder member 5 supports the piston member 4 so as to be movable in a non-contact manner in the Z-axis direction by a gas bearing 6G formed by the bearing member 6.

The bearing member 7 forms a gas bearing (hydrostatic bearing) 7G between the base member 1 and the cylinder member 5. In the present embodiment, the bearing member 7 is disposed on the cylinder member 5. The bearing member 7 is disposed on the cylinder member 5 so as to face the guide surface 1A of the base member 1. The bearing member 7 is disposed on the lower surface 5 B of the cylinder member 5. The bearing member 7 has a lower surface 7B facing the guide surface 1A of the base member 1. The lower surface 5B of the cylinder member 5 includes the lower surface 7B of the bearing member 7. That is, in the present embodiment, the lower surface 7B may be regarded as the lower surface 5B. The bearing member 7 has a supply port 71 capable of supplying gas between the guide member 1 A of the base member 1. The supply port 71 is disposed on the lower surface 7 B of the bearing member 7. The bearing member 7 forms a gas bearing 7 G with the guide surface 1 A of the base member 1 by the gas supplied from the supply port 71. By forming the gas bearing 7G, the cylinder member 5 is supported on the guide surface 1A of the base member 1 in a non-contact manner. The base member 1 supports the cylinder member 5 movably in a non-contact manner in the X-axis direction and the Y-axis direction by a gas bearing 7G formed by the bearing member 7.

The gas bearing 6G formed by the bearing member 6 causes the inner surface 5S of the cylinder member 5 and the outer surface 4C of the piston member 4 to face each other with a gap. Due to the gas bearing 7G formed by the bearing member 7, the lower surface 5B of the cylinder member 5 and the guide surface 1A of the base member 1 face each other with a gap therebetween. In the present embodiment, the upper surface 5A of the cylinder member 5 and the lower surface of the connection member 40 are opposed to each other with a gap. In other words, in the present embodiment, the cylinder member 5 is connected to the Y-axis stage 31, but is disposed so as not to contact any member other than the Y-axis stage 31.

The gravity compensation device 8 reduces the effect of the weight of the table 2 on the Z-axis actuator 13. The gravity compensation device 8 has a supply port 81 through which gas can be supplied to the lower space 5Hu of the internal space 5H of the cylinder member 5 that the lower surface 4B of the piston member 4 faces. The lower space 5Hu is a space (−Z side) below the lower surface 4B of the piston member 4 in the internal space 5H. The gravity compensation device 8 supplies gas from the supply port 81 to reduce the effect of the weight of the table 2 on the Z-axis actuator 13.

The supply port 81 of the gravity compensation device 8 is arranged so as to face the lower space 5Hu of the internal space 5H of the cylinder member 5. In the present embodiment, the supply port 81 is disposed in the cylinder member 5. The pressure of the lower space 5Hu is increased by the gas supplied from the supply port 81 to the lower space 5Hu, whereby the effect of the weight of the table 2 on the Z-axis actuator 13 is reduced. In the present embodiment, the gravity compensation device 8 supplies gas from the supply port 81 so that the pressure in the lower space 5Hu facing the lower surface 4B of the piston member 4 is higher than the pressure in the space outside the cylinder member 5. To do.

As described above, in the present embodiment, a plurality of piston members 4 and cylinder members 5 are arranged. A plurality of supply ports 81 of the gravity compensation device 8 are arranged to face each of the plurality of lower spaces 5Hu.

FIG. 4 is an enlarged side sectional view of a part of the table device TS according to this embodiment. FIG. 5 is a view taken along the line AA in FIG. The piston member 4 is a rod-like member that is long in the Z-axis direction. The piston member 4 has an upper surface 4A facing the + Z direction, a lower surface 4B facing the −Z direction, and a side surface (outer surface) 4C connecting the upper surface 4A and the lower surface 4B. As shown in FIG. 5, the outer shape of the cross section of the piston member 4 parallel to the XY plane is circular. The piston member 4 is a columnar member that is long in the Z-axis direction. The axis of the piston member 4 is parallel to the Z axis. At least a part of the inside of the piston member 4 may be a cavity. The piston member 4 may be a cylindrical member that is long in the Z-axis direction.

The bearing member 6 is disposed around the side surface 4C of the piston member 4. The bearing member 6 is a cylindrical (cylindrical) member. The axis of the bearing member 6 is parallel to the Z axis. In the present embodiment, the axis of the piston member 4 coincides with the axis of the bearing member 6. In other words, the axis of the piston member 4 and the axis of the bearing member 6 are the same axis. The bearing member 6 has an inner surface 6S that can face the side surface 4C of the piston member 4. The inner surface 6S may be referred to as a bearing surface 6S. In the present embodiment, two bearing members 6 are arranged in the Z-axis direction parallel to the axis of the bearing member 6.

The cylinder member 5 supports the bearing member 6. The bearing member 6 is fixed to the cylinder member 5. The cylinder member 5 supports the piston member 4 movably through the bearing member 6. In the present embodiment, the cylinder member 5 is a cylindrical member that is at least partially disposed around the piston member 4 and the bearing member 6. The axis of the cylinder member 5 is parallel to the Z axis. In the present embodiment, the axis of the piston member 4, the axis of the bearing member 6, and the axis of the cylinder member 5 coincide. In other words, the axis of the piston member 4, the axis of the bearing member 6, and the axis of the cylinder member 5 are the same axis.

4 and 5, the inner surface 6S of the bearing member 6 is disposed on the inner surface 5S of the cylinder member 5. The inner surface 6S of the bearing member 6 and the side surface (outer surface) 4C of the piston member 4 face each other. The inner surface 6S of the bearing member 6 faces the side surface 4C of the piston member 4 through a gap.

The bearing member 6 supports the piston member 4 in a non-contact manner. The bearing member 6 has a supply port 61 capable of supplying gas between the side surface 4 C of the piston member 4. In the present embodiment, the supply port 61 is disposed so as to face the side surface 4 C of the piston member 4. The supply port 61 is disposed on the inner surface 6 S of the bearing member 6. A gas bearing 6 G is formed between the side surface 4 C of the piston member 4 and the inner surface 6 S of the bearing member 6 by the gas supplied from the supply port 61. A gap is formed between the side surface 4C of the piston member 4 and the inner surface 6S of the bearing member 6 by the gas bearing 6G. In the present embodiment, the supply port 61 supplies air (compressed air).

The gas bearing 6G formed around the side surface 4C of the piston member 4 restricts the movement of the piston member 4 in the X-axis direction and the Y-axis direction. The gas bearing 6G suppresses movement of the piston member 4 in the X-axis direction and the Y-axis direction, and allows movement of the piston member 4 in the Z-axis direction.

In the present embodiment, the bearing member 6 includes a porous body (porous member). The porous body may be made of graphite (carbon graphite) as disclosed in, for example, Japanese Patent No. 5093056 and Japanese Patent Application Laid-Open No. 2007-120527. The porous body may be made of ceramics. The supply port 61 includes a porous hole. In this embodiment, gas is supplied from the hole (supply port) 61 of the porous body. As shown in FIG. 4, in this embodiment, a cavity 62 is formed between the bearing member 6 and the cylinder member 5. Gas is supplied from the gas supply device 63 to the cavity 62. The gas supplied to the cavity 62 passes through the inside of the bearing member 6 (hole of the porous body), reaches the inner surface 6S of the bearing member 6, and from the supply port 61 disposed on the inner surface 6S, the inner surface 6S and It is supplied to the space between the outer surface 4C. Thereby, the gas bearing 6G is formed between the inner surface 6S and the outer surface 4C. The inner surface 6S and the outer surface 4C are in a non-contact state.

In the present embodiment, an exhaust port 64 through which at least a part of the gas supplied between the bearing member 6 and the piston member 4 is discharged is provided. The exhaust port 64 is disposed in the cylinder member 5 so as to surround the piston member 4. The exhaust port 64 is formed between the two bearing members 6 arranged in the Z-axis direction and below the lower (−Z side) bearing member 6 of the two bearing members 6 arranged in the Z-axis direction. Placed in each.

The piston member 4 is connected to the table 2. In the present embodiment, the upper surface 4 A of the piston member 4 is connected to the lower surface 2 B of the table 2 via the connection member 40. The piston member 4 is fixed to the table 2. The piston member 4 may be fixed to the table 2 by a fixing member such as a bolt.

The table 2 moves in the Z-axis direction by the operation of the Z-axis drive device 10. In the present embodiment, the movement of the table 2 in the Z-axis direction causes the piston member 4 connected to the table 2 to move in the Z-axis direction together with the table 2. The piston member 4 is guided by the bearing member 6 (gas bearing 6G) and moves in the Z-axis direction. In the present embodiment, the bearing member 6 functions as a guide device that guides the piston member 4 so that the piston member 4 moves in the Z-axis direction. The inner surface 6S of the bearing member 6 that faces the side surface 4C of the piston member 4 may be referred to as a guide surface 6S. In the present embodiment, each of the side surface 4C and the inner surface 6S is parallel to the Z axis.

The dimension of the piston member 4 is larger (longer) than the dimension of the bearing member 6 with respect to the Z-axis direction. In the present embodiment, with respect to the Z-axis direction, the distance between the upper surface 4A and the lower surface 4B of the piston member 4 is the + Z of the bearing member 6 on the upper side (+ Z side) of the two bearing members 6 arranged in the Z-axis direction. This is larger than the distance between the end (upper end) on the side and the end (lower end) on the −Z side of the lower (−Z side) bearing member 6.

The bearing member 7 is a cylindrical (annular) member disposed on the lower surface 5B of the cylinder member 5. The axis of the bearing member 7 is parallel to the Z axis. In the present embodiment, the axis of the piston member 4 and the axis of the cylinder member 5 coincide. In other words, the shaft of the bearing member 7 and the shaft of the cylinder member 5 are the same shaft.

The lower surface 7B of the bearing member 7 is disposed on the lower surface 5B of the cylinder member 5. The lower surface 7B of the bearing member 7 and the guide surface 1A of the base member 1 face each other. The lower surface 7B of the bearing member 7 faces the guide surface 1A of the base member 1 through a gap.

The bearing member 7 has a supply port 71 capable of supplying gas between the guide member 1 A of the base member 1. In the present embodiment, the supply port 71 is disposed so as to face the guide surface 1 A of the base member 1. The supply port 71 is disposed on the lower surface 7 B of the bearing member 7. A gas bearing 7 G is formed between the guide surface 1 A of the base member 1 and the lower surface 7 B of the bearing member 7 by the gas supplied from the supply port 71. A gap is formed between the guide surface 1A of the base member 1 and the lower surface 7B of the bearing member 7 by the gas bearing 7G. In the present embodiment, the supply port 71 supplies air (compressed air).

The position of the cylinder member 5 in the Z-axis direction is maintained (fixed) by the gas bearing 7G formed on the lower surface 5B side of the cylinder member 5. In other words, the movement of the cylinder member 5 in the Z-axis direction is limited by the gas bearing 7G. The relative position between the base member 1 and the cylinder member 5 in the Z-axis direction is fixed by the gas bearing 7G in a state where the cylinder member 5 is supported by the base member 1 in a non-contact manner. The position of the cylinder member 5 in the Z-axis direction is fixed by the gas bearing 7G, and movement of the cylinder member 5 in the X-axis direction and the Y-axis direction is allowed.

In the present embodiment, the bearing member 7 includes a porous body (porous member). The porous body may be made of graphite (carbon graphite) as disclosed in, for example, Japanese Patent No. 5093056 and Japanese Patent Application Laid-Open No. 2007-120527. The porous body may be made of ceramics. The supply port 71 includes a porous hole. In this embodiment, gas is supplied from the hole (supply port) 71 of the porous body. As shown in FIG. 4, in this embodiment, a cavity 72 is formed between the bearing member 7 and the cylinder member 5. Gas is supplied from the gas supply device 73 to the cavity 72. The gas supplied to the cavity 72 passes through the inside of the bearing member 7 (hole of the porous body), reaches the lower surface 7B of the bearing member 7, and from the supply port 71 disposed on the lower surface 7B, It is supplied to the space between the guide surface 1A. Thereby, the gas bearing 7G is formed between the lower surface 7B and the guide surface 1A. The lower surface 7B and the guide surface 1A are not in contact with each other.

In the present embodiment, an exhaust port 74 through which at least a part of the gas supplied between the bearing member 7 and the base member 1 is discharged is provided. In the XY plane, the exhaust port 74 is annular. The exhaust port 74 is disposed in the cylinder member 5.

The operation of the X-axis drive device 20 and the Y-axis drive device 30 causes the table 2 to move in the X-axis direction and the Y-axis direction. In the present embodiment, the movement of the table 2 in the X-axis direction and the Y-axis direction causes the piston member 4 connected to the table 2 to move together with the table 2 in the X-axis direction and the Y-axis direction. Further, when the piston member 4 moves in the X-axis direction and the Y-axis direction, the cylinder member 5 moves together with the piston member 4 in the X-axis direction and the Y-axis direction. The cylinder member 5 is guided by the bearing member 7 (gas bearing 7G) and moves in the X-axis direction and the Y-axis direction. In the present embodiment, each of the guide surface 1A and the lower surface 7B is parallel to the XY plane. In this embodiment, the base member 1 functions as a guide device that guides the cylinder member 5 that supports the table 2 via the piston member 4 so that the table 2 moves in the X-axis direction and the Y-axis direction.

The cylinder member 5 is arranged so as not to contact the base member 1. The cylinder member 5 is disposed so as not to contact the piston member 4. The cylinder member 5 is disposed so as not to contact the table 2 (connection member 40). The gas bearing 6G formed by the bearing member 6 causes the inner surface 5S of the cylinder member 5 (the inner surface 6S of the bearing member 6) and the outer surface 4C of the piston member 4 to face each other with a gap therebetween. The gas bearing 7G formed by the bearing member 7 causes the lower surface 5B of the cylinder member 5 (the lower surface 7B of the bearing member 7) and the guide surface 1A of the base member 1 to face each other with a gap therebetween.

1, 2, 4, etc., the lower surface 4 B of the piston member 4 is separated from the base member 1. The piston member 4 is connected to the table 2 and is not connected to members other than the table 2. In the present embodiment, the table 2 is connected to the upper surface 4A of the piston member 4, the bearing member 6 and the cylinder member 5 are arranged in a non-contact state around the side surface 4C, and the member is not connected to the lower surface 4B of the piston member 4. .

The lower space 5Hu is defined by the lower surface 4B of the piston member 4 and the inner surface 5S of the cylinder member 5. The lower surface 4B of the piston member 4 faces the lower space 5Hu. In the present embodiment, the lower space 5Hu includes a space surrounded by the lower surface 4B of the piston member 4, the inner surface 5S of the cylinder member 5, and the guide surface 1A of the base member 1.

The gravity compensation device 8 has a supply port 81 that can supply gas to the lower space 5Hu that the lower surface 4B of the piston member 4 faces. The gravity compensation device 8 supplies gas from the supply port 81 so that the effect of the weight of the table 2 on the Z-axis actuator 13 is reduced. The gravity compensation device 8 may be referred to as a self-weight compensation device 8 or a self-weight cancellation device 8. The gravity compensation device 8 includes an air cylinder device that cancels the weight of the table 2 by supplying gas (air) to the lower space 5Hu defined by the lower surface 4B of the piston member 4 and the inner surface 5S of the cylinder member 5.

The gravity compensation device 8 includes a gas supply device 82 that can supply gas, and a pressure adjustment device 83 that adjusts the pressure of the gas from the gas supply device 82. The gas supply device 82 supplies compressed air, for example. The pressure adjusting device 83 includes, for example, a regulator, and adjusts the pressure of the gas supplied to the lower space 5Hu through the supply port 81.

In this embodiment, at least a part of the flow path connecting the gas supply device 82 and the supply port 81 is formed inside the cylinder member 5. A supply port 81 is disposed at one end of the flow path. In the present embodiment, the supply port 81 includes an opening at one end of the flow path. The other end of the flow path is connected to the gas supply device 82. The gas supplied from the gas supply device 82 is sent to the supply port 81 through the flow path. The supply port 81 supplies the gas, which is supplied from the gas supply device 82 and whose pressure is adjusted by the pressure adjustment device 83, to the lower space 5Hu.

The supply port 81 is arranged so as to face the lower space 5Hu. In the present embodiment, the supply port 81 is disposed on the inner surface 5 S of the cylinder member 5.

The pressure adjusting device 83 functions as a flow rate adjusting device capable of adjusting the gas supply amount per unit time. The pressure adjusting device 83 can adjust the gas supply amount per unit time supplied from the supply port 81 to the lower space 5Hu. The pressure in the lower space 5Hu is adjusted by adjusting the gas supply amount from the supply port 81. When the amount of gas supplied from the supply port 81 is large, the pressure in the lower space 5Hu increases. When the gas supply amount from the supply port 81 is small, the pressure in the lower space 5Hu becomes low. The pressure adjusting device 83 can adjust the pressure of the lower space 5Hu by adjusting the amount of gas supplied from the supply port 81 to the lower space 5Hu. In the present embodiment, air (compressed air) is supplied from the supply port 81.

The gravity compensation device 8 supplies gas from the supply port 81 so that the effect of the weight of the table 2 on the Z-axis actuator 13 is reduced. Due to the action of gravity, the table 2 generates a force in the −Z direction. The force of the table 2 is transmitted to the Z-axis actuator 13 via the second wedge member 12, the first wedge member 11, and the power transmission device 15. The gravity compensation device 8 supplies gas from the supply port 81 so that the force transmitted from the table 2 to the Z-axis actuator 13 is reduced. The gravity compensation device 8 supplies gas from the supply port 81 so as to suppress the force generated by the table 2 and the piston member 4 due to the action of gravity from being transmitted to the Z-axis actuator 13.

In the present embodiment, the gravity compensation device 8 supplies gas from the supply port 81 so that the effect of the weight of the table 2 and the piston member 4 on the Z-axis actuator 13 is reduced. The gravity compensation device 8 supplies gas from the supply port 81 so that the force transmitted from the table 2 and the piston member 4 to the Z-axis actuator 13 by the action of gravity is reduced. The gravity compensation device 8 applies a force in the + Z direction to the piston member 4 and the table 2 so as to cancel the force in the −Z direction due to the weight of the table 2 and the piston member 4. In other words, the gravity compensation device 8 applies a force in the + Z direction to the piston member 4 and the table 2 so that the force in the −Z direction due to the action of gravity is canceled. That is, the gravity compensation device 8 supplies gas to the lower space 5Hu below the table 2 and the piston member 4 so as to push up the table 2 and the piston member 4. In the present embodiment, the gravity compensation device 8 supplies gas from the supply port 81 so that the pressure in the lower space 5Hu is higher than the pressure in the space outside the cylinder member 5. The space outside the cylinder member 5 includes the space around the table 2. The space outside the cylinder member 5 includes a space around the upper surface 4 A of the piston member 4. The space outside the cylinder member 5 is an external space with respect to the lower space 5Hu. In the present embodiment, the pressure in the space outside the cylinder member 5 is atmospheric pressure. The gravity compensation device 8 supplies gas from the supply port 81 to the lower space 5Hu so that the pressure in the lower space 5Hu becomes higher than the atmospheric pressure.

The gravity compensation device 8 may supply gas to the lower space 5Hu in consideration of the weight of the object S placed on the table 2. That is, the gravity compensation device 8 may supply gas from the supply port 81 so that the effects of the weight of the table 2, the piston member 4, and the object S on the Z-axis actuator 13 are reduced. In other words, the gravity compensation device 8 supplies gas from the supply port 81 so that the force transmitted from the table 2, the piston member 4, and the object S to the Z-axis actuator 13 by the action of gravity is reduced. Also good.

FIG. 6 is a diagram illustrating an example of the Z-axis drive device 10 according to the present embodiment. In the present embodiment, the Z-axis drive device 10 includes a so-called wedge-type lifting device. The first wedge member 11, the second wedge member 12, the Z-axis guide device 14, and the Y-axis guide device 16 are disposed on the lower surface 2B side (−Z side) of the table 2. The second wedge member 12 supports the table 2 on the lower surface 2B side of the table 2.

The first wedge member 11 and the second wedge member 12 are movable members. Each of the first wedge member 11 and the second wedge member 12 moves in a space below the table 2 (a space on the −Z side). Each of the first wedge member 11 and the second wedge member 12 moves in the space above the Y-axis stage 31 (the space on the + Z side).

The first wedge member 11 is movable in the XY plane. In the present embodiment, the first wedge member 11 is movable in the Y-axis direction. The outer shape of the first wedge member 11 in the YZ plane is substantially triangular (wedge shape). As shown in FIGS. 2 and 6, the first wedge member 11 has a lower surface 11B parallel to the XY plane, a slope 11G inclined with respect to the XY plane, and a side surface 11S parallel to the Z axis. The slope 11G and the side surface 11S are arranged on the upper side (+ Z side) of the lower surface 11B. The inclined surface 11G is inclined upward (+ Z direction) toward the + Y direction. The lower end of the slope 11G is connected to the −Y side end of the lower surface 11B. The upper end of the slope 11G and the upper end of the side surface 11S are connected. The lower end portion of the side surface 11S and the end portion on the + Y side of the lower surface 11B are connected.

The second wedge member 12 is movably supported by the first wedge member 11. The first wedge member 11 and the second wedge member 12 are relatively movable. The second wedge member 12 moves relative to the first wedge member 11 above the first wedge member 11 (on the + Z side).

The second wedge member 12 is movable at least in the Z-axis direction. In the present embodiment, the second wedge member 12 moves in the Z-axis direction by the movement of the first wedge member 11 in the Y-axis direction. The outer shape of the second wedge member 12 in the YZ plane is substantially triangular (wedge shape). As shown in FIGS. 2 and 6, the second wedge member 12 has an upper surface 12A parallel to the XY plane, a slope 12G inclined with respect to the XY plane, and a side surface 12S parallel to the Z axis. The upper surface 12A is disposed on the upper side (+ Z side) than the side surface 12S and the inclined surface 12G. The inclined surface 12G is inclined upward (+ Z direction) toward the + Y direction. In the present embodiment, the slope 11G and the slope 12G are parallel. The upper end portion of the slope 12G and the end portion on the + Y side of the upper surface 12A are connected. The lower end of the slope 12G and the lower end of the side surface 12S are connected. The upper end portion of the side surface 12S and the end portion on the −Y side of the upper surface 12A are connected.

The Z-axis guide device 14 guides the second wedge member 12 so that the second wedge member 12 moves in the Z-axis direction by the movement of the first wedge member 11 in the Y-axis direction. At least a part of the Z-axis guide device 14 is disposed on the first wedge member 11. In the present embodiment, the Z-axis guide device 14 includes a linear motion guide mechanism. The Z-axis guide device 14 includes a rail 14B disposed on the first wedge member 11 and a slider (block) 14A disposed on the second wedge member 12 and capable of moving the rail 14B. The rail 14 B is disposed on the slope 11 G of the first wedge member 11. The slider 14 A is disposed on the inclined surface 12 G of the second wedge member 12.

The Z-axis guide device 14 includes a direct acting bearing. In the present embodiment, the Z-axis guide device 14 includes a linear motion type rolling bearing. The rolling bearing has rolling elements. The rolling element includes one or both of balls and rollers. That is, the rolling bearing includes one or both of a ball bearing and a roller bearing. In the present embodiment, the Z-axis guide device 14 includes a linear ball bearing.

FIG. 7 is a diagram illustrating an example of the Z-axis guide device 14 according to the present embodiment. The Z-axis guide device 14 includes a rail 14B and a slider (block, direct acting bearing) 14A that can move relative to the rail 14B. The rail 14B has a surface 41A facing upward, side surfaces 41B disposed on both sides of the surface 41A, and grooves 41C formed on each of the side surfaces 41B. The slider 14A includes a first opposing surface 42A that can be opposed to the surface 41A of the rail 14B, a second opposing surface 42B that can be opposed to the side surface 41B of the rail 14B, and at least a part of which is disposed in the groove 41C of the rail 14B. Moving body (ball) 42T. The ball 42T rolls in contact with the inner surface of the groove 41C. When the ball 42T rolls along the groove 41C, the slider 14A can smoothly move on the rail 14B.

In the present embodiment, the rail 14B is disposed on the first wedge member 11 (slope 11G) so as to be inclined with respect to the XY plane. The rail 14B is disposed such that the surface 41A of the rail 14B is inclined with respect to the XY plane. As shown in FIG. 6, in this embodiment, the inclination angle of the rail 14B (surface 41A) with respect to the XY plane is θ. The angle θ is larger than 0 degree and smaller than 90 degrees. The slider 14A is disposed on the second wedge member 12 (slope 12G) so that the first facing surface 42A and the surface 41A of the rail 14B are parallel to each other. In the present embodiment, two sliders 14 A are arranged on the inclined surface 12 G of the second wedge member 12. One slider 14 A may be disposed on the second wedge member 12. Three or more sliders 14 A may be disposed on the second wedge member 12.

The second wedge member 12 is guided by the Z-axis guide device 14 so as to move in the Z-axis direction by the movement of the first wedge member 11 in the Y-axis direction. When the first wedge member 11 moves in the −Y direction, the second wedge member 12 moves (rises) in the + Z direction. When the first wedge member 11 moves in the + Y direction, the second wedge member 12 moves (lowers) in the −Z direction. The table 2 is supported by the second wedge member 12. Therefore, the table 2 also moves together with the second wedge member 12 by the movement (lifting) of the second wedge member 12 in the Z-axis direction. That is, when the second wedge member 12 moves (rises) in the + Z direction, the table 2 moves in the + Z direction together with the second wedge member 12. When the second wedge member 12 moves (lowers) in the −Z direction, the table 2 moves in the −Z direction together with the second wedge member 12.

In the Z-axis guide device 14, the slider 14 A may be disposed on the slope 11 G of the first wedge member 11, and the rail 14 B may be disposed on the slope 12 G of the second wedge member 12.

As shown in FIG. 6, a Y-axis guide device 16 for guiding the first wedge member 11 in the Y-axis direction is provided. As described above, the Z-axis drive device 10 includes the Z-axis actuator 13 that moves the first wedge member 11 in the Y-axis direction and moves the second wedge member 12 and the table 2 in the Z-axis direction.

The Y-axis guide device 16 guides the first wedge member 11 by the operation of the Z-axis actuator 13 so that the first wedge member 11 moves in the Y-axis direction. At least a part of the Y-axis guide device 16 is disposed on the Y-axis stage 31. In the present embodiment, the Y-axis guide device 16 includes a linear motion guide mechanism. The Y-axis guide device 16 includes a rail 16B disposed on the Y-axis stage 31, and a slider (block) 16A disposed on the first wedge member 11 and movable relative to the rail 16B. The rail 16B is fixed to the upper surface of the Y-axis stage 31. The slider 16 A is fixed to the lower surface 11 B of the first wedge member 11. The slider 16 A moves together with the first wedge member 11. The rail 16B does not move with respect to the Y-axis stage 31. The relative position of the rail 16B with respect to the Y-axis stage 31 is fixed.

The Y-axis guide device 16 includes a linear motion type rolling bearing. In the present embodiment, the Y-axis guide device 16 includes a linear ball bearing. The first wedge member 11 is guided by the Y-axis guide device 16 so as to move in the Y-axis direction by the operation of the Z-axis actuator 13. The Y-axis guide device 16 has a structure equivalent to that of the Z-axis guide device 14 described with reference to FIG. A detailed description of the structure of the Y-axis guide device 16 is omitted.

In the Y-axis guide device 16, the slider 16 A may be disposed on the upper surface of the Y-axis stage 31, and the rail 16 B may be disposed on the lower surface 11 B of the first wedge member 11.

The X axis guide device 23 includes a linear motion guide mechanism. The X-axis guide device 23 includes a rail 23B and a slider (block) 23A that can move relative to the rail 23B. The X-axis guide device 23 includes a linear motion type rolling bearing. In the present embodiment, the X-axis guide device 23 includes a linear ball bearing. The X-axis stage 21 is guided by the X-axis guide device 23 so as to move in the X-axis direction. The X-axis guide device 23 has a structure equivalent to that of the Z-axis guide device 14 described with reference to FIG. A detailed description of the structure of the X-axis guide device 23 is omitted.

The Y-axis guide device 33 includes a linear motion guide mechanism. The Y-axis guide device 33 includes a rail 33B and a slider (block) 33A that can move relative to the rail 33B. The Y-axis guide device 33 includes a linear motion type rolling bearing. In the present embodiment, the Y-axis guide device 33 includes a linear ball bearing. The Y-axis stage 31 is guided by the Y-axis guide device 33 so as to move in the Y-axis direction. The Y-axis guide device 33 has a structure equivalent to that of the Z-axis guide device 14 described with reference to FIG. A detailed description of the structure of the Y-axis guide device 33 is omitted.

Next, an example of the operation of the table device TS will be described.

When moving the table 2 in the X-axis direction, the X-axis actuator 22 is activated. By the operation of the X-axis actuator 22, the X-axis stage 21 moves in the X-axis direction. The X-axis stage 21 is guided by the X-axis guide device 23 and smoothly moves in the X-axis direction. As the X-axis stage 21 moves in the X-axis direction, it is supported on the Y-axis stage 31 via the Y-axis stage 31 supported by the X-axis stage 21 and the first and

second wedge members

11 and 12. The table 2 is moved in the X-axis direction together with the X-axis stage 21.

When moving the table 2 in the Y-axis direction, the Y-axis actuator 32 is operated. By the operation of the Y-axis actuator 32, the Y-axis stage 31 moves in the Y-axis direction. The Y-axis stage 31 is guided by the Y-axis guide device 33 and moves smoothly in the Y-axis direction. When the Y-axis stage 31 moves in the Y-axis direction, the table 2 supported by the Y-axis stage 31 via the first wedge member 11 and the second wedge member 12 moves together with the Y-axis stage 31 in the Y-axis direction. Move in the direction.

In the present embodiment, the Y-axis stage 31 is connected to the cylinder member 5. The cylinder member 5 is supported in a non-contact manner on the base member 1 by a gas bearing 7G. That is, in the present embodiment, the Y-axis stage 31 is supported by the base member 1 in a non-contact manner via the cylinder member 5. The gas bearing 7G is allowed to move in the X-axis direction and the Y-axis direction while suppressing fluctuations in the position of the cylinder member 5 (Y-axis stage 31) in the Z-axis direction. As a result, the table 2 is moved in the X axis direction and the Y axis direction along the target trajectory (desired trajectory). By the operation of the X axis actuator 22, the table 2 can be moved straight in the X axis direction by the X axis guide device 23. By the operation of the Y-axis actuator 32, the table 2 can be moved straight in the Y-axis direction by the Y-axis guide device 33.

When moving the table 2 in the Z-axis direction, the Z-axis actuator 13 is activated. By the operation of the Z-axis actuator 13, the power of the Z-axis actuator 13 is transmitted to the first wedge member 11 through the power transmission mechanism 15. By the operation of the Z-axis actuator 13, the first wedge member 11 moves in the Y-axis direction. The first wedge member 11 is guided by the Y-axis guide device 16 and moves smoothly in the Y-axis direction. The first wedge member 11 is moved by the Y-axis guide device 16 in the Y-axis direction along a target trajectory (desired trajectory). In the present embodiment, the first wedge member 11 can be moved straight in the Y-axis direction by the Y-axis guide device 16.

The movement of the first wedge member 11 in the Y-axis direction causes the second wedge member 12 to move in the Z-axis direction. The second wedge member 12 is guided by the Z-axis guide device 14 and moves smoothly in the Z-axis direction. When the second wedge member 12 moves in the Z-axis direction, the table 2 supported by the second wedge member 12 also moves in the Z-axis direction together with the second wedge member 12.

In the present embodiment, the piston member 4 supported by the cylinder member 5 so as to be movable in the Z-axis direction is connected to the table 2. The gas bearing 6G formed by the bearing member 6 of the cylinder member 5 restrains the piston member 4 (table 2) from moving in the X-axis direction and the Y-axis direction with respect to the cylinder member 5 while moving in the Z-axis direction. It is allowed to move. As a result, the table 2 is moved in the Z-axis direction along the target trajectory (desired trajectory). In the present embodiment, the table 2 can move straight in the Z-axis direction by the piston member 4 supported in a non-contact manner by the gas bearing 6G on the cylinder member 5.

In the present embodiment, the Z-axis drive device 10 includes a wedge-shaped lifting device, and the second wedge member 12 is connected to the table 2. The relative position between the second wedge member 12 and the Y-axis stage 31 in the XY plane is not substantially changed by the cylinder member 5 and the piston member 4. On the other hand, the table 2 is supported by the cylinder member 5 via the piston member 4 so as to be movable in the Z-axis direction. Accordingly, the first wedge member 11 is arranged such that the distance between the second wedge member 12 and the Y-axis stage 31 (distance in the Z-axis direction) changes between the second wedge member 12 and the Y-axis stage 31 in the Z-axis direction. Moves relative to the second wedge member 12 and the Y-axis stage 31 in the Y-axis direction, so that the second wedge member 12 moves in the Z-axis direction relative to the first wedge member 11 and the Y-axis stage 31. be able to.

Further, the gap (non-contact state) between the inner surface 5S of the cylinder member 5 and the outer surface 4C of the piston member 4 is maintained by the gas bearing 6G, and the lower surface 5B of the cylinder member 5 and the guide surface 1A of the base member 1 are maintained by the gas bearing 7G. The gap (non-contact state) is maintained. Therefore, when the table 2 and the piston member 4 move in the X axis direction and the Y axis direction, the cylinder member 5 moves in the X axis direction in synchronization with the movement of the table 2 and the piston member 4 in the X axis direction and the Y axis direction. It can move in the Y-axis direction. Therefore, even if the table 2 moves in the X-axis direction and the Y-axis direction, the cylinder member 5 can continue to guide the piston member 4 in the Z-axis direction in a non-contact state.

In the present embodiment, the Y-axis stage 31 is connected to the cylinder member 5 and moves together with the table 2 in the X-axis direction and the Y-axis direction. That is, when the table 2 moves in the X axis direction and the Y axis direction, the Y axis stage 31 and the cylinder member 5 move together with the table 2. Thereby, even if the table 2 moves in the X-axis direction and the Y-axis direction, the cylinder member 5 can continue to guide the piston member 4 in the Z-axis direction in a non-contact state.

The operation of the Z-axis actuator 13 causes the object S supported by the table 2 to be arranged at the target position in the Z-axis direction. For example, when the table 2 is moved in the + Z direction using the power of the Z-axis actuator 13, or when the position of the table 2 in the Z-axis direction is maintained using the power of the Z-axis actuator 13, There may be a load. That is, in order to raise the table 2 or maintain the position of the table 2 in the Z-axis direction, the Z-axis actuator 13 must continue to generate a predetermined power (torque). In this case, it is necessary to continue to supply predetermined power (current) to the Z-axis actuator 13, and as a result, the Z-axis actuator 13 may generate heat. When the Z-axis actuator 13 generates heat, the surrounding members may be thermally deformed. As a result, there is a possibility that the performance of the table device TS may be lowered, such as the positioning accuracy of the table 2 being lowered or the table 2 being moved out of the target trajectory. Further, the object S supported by the table 2 may be thermally deformed by the heat generated by the Z-axis actuator 13.

In the present embodiment, a gravity compensation device 8 is provided. Therefore, when the table 2 is moved in the + Z direction or when the position of the table 2 in the Z-axis direction is maintained, the power (torque) generated by the Z-axis actuator 13 can be small. That is, the power (current) supplied to the Z-axis actuator 13 can be small. Therefore, the heat generation of the Z-axis actuator 13 is suppressed. As a result, thermal deformation of surrounding members and thermal deformation of the object S are suppressed.

Also, since the gravity compensation device 8 is provided, even if the mass (weight) of the object S mounted on the table 2 is large, the load applied to the Z-axis actuator 13 is reduced. Further, since the gravity compensation device 8 is provided, the power generated by the Z-axis actuator 13 can be small. Therefore, the Z-axis actuator 13 can be reduced in size.

Further, since the pressure in the lower space 5H is increased by the gravity compensation device 8, even if an abnormality (emergency stop) such as a power failure occurs and the Z-axis actuator 13 does not generate power, the table 2 is rapidly lowered ( Falling) is suppressed. For example, since the electromagnetic brake for preventing the table 2 from falling can be omitted, heat generation (thermal deformation) due to the electromagnetic brake is eliminated.

As described above, according to the present embodiment, the table 2 can be moved in the three directions of the Z-axis direction, the X-axis direction, and the Y-axis direction by the drive system 3. According to this embodiment, the piston member 4 connected to the table 2 is supported on the cylinder member 5 in a non-contact manner by the gas bearing 6G formed by the bearing member 6. The bearing member 6 forms a gas bearing 6G between the piston member 4 and supports (guides) the piston member 4 so as to be movable in the Z-axis direction. Thereby, the table 2 to which the piston member 4 is connected can be accurately moved in the Z-axis direction along the target trajectory (desired trajectory).

In the present embodiment, the bearing member 6 movably supports (guides) the piston member 4 so that the piston member 4 moves straight in the Z-axis direction. Thereby, the table 2 to which the piston member 4 is connected can move straight in the Z-axis direction. That is, by the bearing member 6 capable of forming the gas bearing 6G, a decrease in straightness in the movement of the piston member 4 and the table 2 is suppressed. Thereby, the object S supported by the table 2 is arranged at the target position.

In this embodiment, a gas bearing 6G is formed between the piston member 4 and the bearing member 6, and the bearing member 6 supports the piston member 4 in a non-contact manner. Thereby, the piston member 4 can move smoothly in the Z-axis direction. When the bearing member 6 comes into contact with the piston member 4, a resistance force may be generated against the movement of the piston member 4. As a result, there is a possibility that the table 2 and the piston member 4 do not move straight despite the attempt to move the table 2 and the piston member 4 straight. Further, when the bearing member 6 comes into contact with the piston member 4, vibration may occur due to the movement of the piston member 4. When vibration is generated in the piston member 4, the table 2 also vibrates, and as a result, the positioning accuracy of the table 2 may be lowered. In this embodiment, since the bearing member 6 supports the piston member 4 so as to be movable without contact, the table 2 and the piston member 4 can move straight. Moreover, generation | occurrence | production of a vibration is suppressed. As a result, a decrease in positioning accuracy of the table 2 is suppressed, and the table 2 and the object S supported by the table 2 can be arranged at the target position.

Further, in the present embodiment, the cylinder member 5 is supported on the base member 1 in a non-contact manner by a gas bearing 7G formed by the bearing member 7. As a result, the table 2 supported by the cylinder member 5 via the piston member 4 can move smoothly in the XY plane, and can accurately move along the target trajectory in each of the X-axis direction and the Y-axis direction. it can.

According to the present embodiment, the gap (non-contact state) between the inner surface 5S of the cylinder member 5 and the outer surface 4C of the piston member 4 is maintained by the gas bearing 6G, and the lower surface 5B of the cylinder member 5 and the base are maintained by the gas bearing 7G. The gap (non-contact state) with the guide surface 1A of the member 1 is maintained. Therefore, when the table 2 and the piston member 4 are moved in the X-axis direction and the Y-axis direction, the gap between the cylinder member 5 and the piston member 4 and the gap between the cylinder member 5 and the base member 1 are maintained. In synchronization with the movement of the table 2 and the piston member 4 in the X-axis direction and the Y-axis direction, the cylinder member 5 can move in the X-axis direction and the Y-axis direction. Therefore, even if the table 2 and the piston member 4 move in the X-axis direction and the Y-axis direction, the cylinder member 5 can continue to support the piston member 4 so as to be movable in the Z-axis direction without contact.

Thus, according to the present embodiment, the table 2 is in the Z-axis direction, the X-axis direction, and the Y-axis direction by the gas bearing 6G formed by the bearing member 6 and the gas bearing 7G formed by the bearing member 7. It is possible to accurately move to each of the target trajectories. Therefore, a decrease in positioning accuracy of the table 2 is suppressed.

In the present embodiment, the drive system 3 includes an X-axis drive device 20 including an X-axis stage 21 that is movably supported by the base member 1, and an X-axis actuator 22 that moves the X-axis stage 21, A Y-axis stage 31 that is movably supported by the axis stage 21, a Y-axis drive device 30 that includes a Y-axis actuator 32 that moves the Y-axis stage 31, and a table arranged in the Z-axis direction on the Y-axis stage 31. 2 and a Z-axis drive device 10 that moves 2. The cylinder member 5 is connected to the Y axis stage 31. Thereby, the table 2, the Y-axis stage 31, and the cylinder member 5 can move together in the XY plane. Therefore, the gap between the outer surface 4C of the piston member 4 and the inner surface 5S of the cylinder member 5 is stably maintained, and the movement of the cylinder member 5, the table 2, and the piston member 4 in the XY plane is stabilized. When the movement is stabilized, the table 2 can move along the target trajectory.

In this embodiment, the table device TS includes a wedge-shaped lifting device that moves the table 2 by the relative movement of the first wedge member 11 and the second wedge member 12. Therefore, by adjusting the angle θ, it is possible to adjust the ratio (reduction ratio, resolution) between the movement amount of the first wedge member 11 in the Y-axis direction and the movement amount of the second wedge member 12 in the Z-axis direction. .

In the present embodiment, since the gravity compensation device 8 is provided, the load applied to the Z-axis actuator 13 is reduced. Therefore, heat generation of the Z-axis actuator 13 is suppressed, and thermal deformation of members around the Z-axis actuator 13 is suppressed in the table device TS. The members around the Z-axis actuator 13 are the members of the Z-axis guide device 14, the members of the Y-axis guide device 16, the Y-axis stage 31, the first wedge member 11, the second wedge member 12, the piston member 4, and the cylinder member 5. , And at least one of the tables 2. Therefore, it is possible to suppress the positioning accuracy of the table 2 from being lowered or the table 2 from moving out of the target trajectory. As a result, a decrease in performance of the table device TS is suppressed.

Further, in the present embodiment, the outer shape of the cross section of the piston member 4 is circular, and the bearing member 6 is a cylindrical member disposed around the side surface 4C of the piston member 4. In the processing of the piston member 4 having a circular cross-sectional outer shape, there is a high possibility that high processing accuracy can be easily obtained as compared with the processing of the piston member having a square shape, for example. In other words, it is more likely that the target shape can be easily obtained when the piston member 4 having a circular outer shape is manufactured than when the piston member having a rectangular outer shape is manufactured. In addition, it is possible to easily obtain higher processing accuracy (target shape) by manufacturing the bearing member 6 having the inner surface 6S having a circular cross section than manufacturing the bearing member having the inner surface having a square cross section. High nature. For example, when manufacturing a square piston member and a bearing member, the size of the gap formed between the corner portion of the piston member and the bearing member, and the flat portion of the piston member and the bearing member are formed. It may be difficult to manufacture the piston member and the bearing member so that the size of the gap is equal. According to this embodiment, by using the circular piston member 4 and the bearing member 6, the dimension of the gap formed between the side surface 4C of the piston member 4 and the inner surface 6S of the bearing member 6 becomes non-uniform. It is suppressed. Therefore, in the gap formed between the side surface 4 C of the piston member 4 and the inner surface 6 S of the bearing member 6, it is possible to suppress the pressure from becoming uneven. Therefore, a decrease in the performance of the gas bearing 6G is suppressed, and the piston member 4 is suppressed from being moved out of the target track.

In the present embodiment, at least two piston members 4 are arranged and connected to each of different parts of the table 2. Therefore, for example, rotation of the table 2 is suppressed by the plurality of piston members 4 connected to the table 2. Thereby, the positioning accuracy of the table 2 is improved. That is, in the present embodiment, the outer shape of the cross section of the piston member 4 is circular, and the bearing member 6 is a cylindrical member disposed around the side surface 4 C of the piston member 4. Therefore, the piston member 4 may move (rotate) in the θZ direction inside the bearing member 6. When the number of the piston members 4 connected to the table 2 is one, the table 2 may also be rotated by the rotation of the piston member 4 with respect to the bearing member 6. In the present embodiment, a plurality of piston members 4 are arranged. Therefore, when the plurality of piston members 4 are supported by the bearing member 6 and the cylinder member 5, the movement (rotation) of the table 2 in the θZ direction is suppressed.

In the present embodiment, each of the Z-axis guide device 14, the Y-axis guide device 16, the Y-axis guide device 33, and the X-axis guide device 23 is configured by a linear motion guide mechanism having a rolling bearing. Each of the Z-axis guide device 14, the Y-axis guide device 16, the Y-axis guide device 33, and the X-axis guide device 23 has rolling bearings having substantially the same structure. Therefore, the table 2 is guided by the Z-axis guide device 14, the Y-axis guide device 16, the Y-axis guide device 33, and the X-axis guide device 23, respectively, in the Z-axis direction, the X-axis direction, and the Y-axis direction. It is possible to move accurately with the target trajectory.

In the present embodiment, the table 2 is supported by the second wedge member 12 via the support device 9. Therefore, even if the second wedge member 12 moves undesirably (vibration), the support device 9 prevents the undesired movement (vibration) from being transmitted to the table 2.

In the present embodiment, the first wedge member 11 is moved in the Y-axis direction. The first wedge member 11 may be moved in the X-axis direction.

In this embodiment, the cylinder member 5 and the Y-axis stage 31 may not be connected.

In the present embodiment, the support device 9 may be omitted. The second wedge member 12 may be fixed to the table 2. The second wedge member 12 may be fixed to the table 2 via a connection member.

In the present embodiment, the bearing member 6 includes a porous body, and the so-called porous throttling method in which the gas bearing 6G is formed by the gas supplied from the hole of the porous body has been described as an example. The throttle system of the bearing member 6 for forming the gas bearing 6G is not limited to the porous throttle. For example, a self-contained drawing method that does not use a porous body, an orifice drawing method, or a surface drawing method that supplies gas through a groove provided on a bearing surface (guide surface) may be used. For example, in the case of the orifice-throttle-type bearing member 6, the supply port 61 for supplying gas includes an orifice opening. The same applies to the bearing member 7. The bearing member 7 may be a porous throttle system, a self-squeezing throttle system that does not use a porous body, or an orifice throttle system, or supply gas through a groove provided on the bearing surface (guide surface). The surface drawing method may be used.

In the present embodiment, the outer shape of the piston member 4 having a cross section parallel to the XY plane is circular. The outer shape of the piston member 4 having a cross section parallel to the XY plane may be a polygon. The outer shape of the cross section of the piston member 4 may be a quadrangle. The outer shape of the cross section of the piston member 4 is not limited to a quadrangle, and may be another polygonal shape.

In the present embodiment, four piston members 4 and four cylinder members 5 are arranged around the drive system 3. The piston member 4 and the cylinder member 5 may be arranged at least two around the drive system 3. Two or three piston members 4 may be connected to the table 2, and any plurality of five or more piston members 4 may be connected to the table 2. The cylinder member 5 may be disposed corresponding to each of the plurality of piston members 4.

The plurality of piston members 4 may be connected to each of a plurality of different parts of the table 2 in the XY plane. The plurality of piston members 4 are connected to the table 2, and the plurality of piston members 4 are supported by the cylinder member 5, whereby the movement of the table 2 with respect to the cylinder member 5 in the XY plane is suppressed. That is, a plurality of piston members 4 are connected to each of a plurality of different parts of the table 2 in the XY plane, and the plurality of piston members 4 are supported by the bearing member 6 and the cylinder member 5, whereby the cylinder in the θZ direction. The movement (rotation) of the table 2 relative to the member 5 is suppressed.

For example, when two (two) piston members 4 are connected to the table 2, the piston members 4 include a first portion of the table 2 and a second portion of the table 2 that is different from the first portion. What is necessary is just to be connected to each with a site | part. When three (three) piston members 4 are connected to the table 2, the piston members 4 include a first part of the table 2 and a second part of the table 2 different from the first part. The first part and the second part may be connected to the third part of the table 2 different from the first part and the second part.

When four (four) piston members 4 are connected to the table 2, the piston members 4 are provided on the first portion of the lower surface 2B of the table 2 and the lower surface 2B of the table 2 different from the first portion. The second part, the third part of the lower surface 2B of the table 2 different from the first part and the second part, and the table 2 different from the first part, the second part and the third part What is necessary is just to be connected to each with the 4th site | part of the lower surface 2B. The first part, the second part, the third part, and the fourth part may be arranged around the center of the lower surface 2B.

In the present embodiment, the table 2 is rectangular. The table 2 may be circular in the XY plane, or may be a polygon such as a hexagon or an octagon.

In the present embodiment, the Z-axis guide device 14 includes a rolling bearing having rolling elements. The Z-axis guide device 14 may include a direct-acting slide bearing that does not have rolling elements, or may include a direct-acting gas bearing. Note that the Z-axis guide device 14 may not have a slider. For example, the inclined surface 12G of the second wedge member 12 may be moved along a rail provided in the first wedge member 11 so that the second wedge member 12 moves in the Z-axis direction. In this case, the rail provided on the first wedge member 11 functions as a guide device that guides the second wedge member 12.

Similarly, the Y-axis guide device 16 may include a direct-acting slide bearing or a direct-acting gas bearing. The Y-axis guide device 16 may not have a slider.

Similarly, at least one of the Y-axis guide device 33 and the X-axis guide device 23 may include a direct-acting slide bearing or a direct-acting gas bearing. Note that at least one of the Y-axis guide device 33 and the X-axis guide device 23 may not have a slider.

Second Embodiment
A second embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

FIG. 8 is a diagram illustrating an example of a semiconductor manufacturing apparatus 200 including the table apparatus TS according to the present embodiment. The semiconductor manufacturing apparatus 200 includes a semiconductor device manufacturing apparatus capable of manufacturing a semiconductor device. The semiconductor manufacturing apparatus 200 includes a transfer apparatus 300 that can transfer an object S for manufacturing a semiconductor device. The transport apparatus 300 includes a table apparatus TS according to the present embodiment. In FIG. 8, the table device TS is illustrated in a simplified manner.

In this embodiment, the object S is a substrate for manufacturing a semiconductor device. A semiconductor device is manufactured from the object S. The object S may include a semiconductor wafer or a glass plate. By forming a device pattern (wiring pattern) on the object S, a semiconductor device is manufactured.

The semiconductor manufacturing apparatus 200 performs a process for forming a device pattern on the object S arranged at the processing position PJ1. The table device TS places the object S supported by the table 2 at the processing position PJ1. The transport device 300 includes a carry-in device 301 that can transport (carry in) the object S to the table 2 of the table device TS, and a carry-out device 302 that can transport (carry out) the object S from the table 2. The object S before processing is conveyed (carried in) to the table 2 by the loading device 301. The object S supported by the table 2 is conveyed to the processing position PJ1 by the table device TS. The processed object S is conveyed (unloaded) from the table 2 by the unloading device 302.

The table device TS moves the table 2 and moves the object S supported by the table 2 to the processing position PJ1. As described in the above-described embodiment, the table 2 can be moved along the target trajectory in three directions of the X-axis direction, the Y-axis direction, and the Z-axis direction, and can be moved with high positioning accuracy. is there. Therefore, the table device TS can arrange the object S supported by the table 2 at the processing position (target position) PJ1.

For example, when the semiconductor manufacturing apparatus 200 includes a measurement apparatus that measures the device pattern of the object S via the optical system 201, the processing position PJ1 includes the focus position (measurement position) of the optical system 201. By arranging the object S at the processing position PJ1, the semiconductor manufacturing apparatus 200 can acquire an image of the device pattern formed on the object S via the optical system 201. When the semiconductor manufacturing apparatus 200 includes a film forming apparatus that forms a film on the object S, the processing position PJ1 is a position where a material for forming the film can be supplied. By arranging the object S at the processing position PJ1, a film for forming a device pattern is formed on the object S.

After the object S is processed at the processing position PJ1, the processed object S is conveyed from the table 2 by the carry-out device 302. The object S transported (unloaded) by the unloading device 302 is transported to a processing device that performs a post-process.

In this embodiment, the table device TS can arrange the object S at the processing position (target position) PJ1. Therefore, it is suppressed that a defective product is manufactured. That is, since the table apparatus TS suppresses a decrease in the positioning accuracy of the object S in the semiconductor manufacturing apparatus 200, the generation of defective products is suppressed.

FIG. 9 is a diagram illustrating an example of the inspection apparatus 400 including the table apparatus TS according to the present embodiment. The inspection apparatus 400 inspects the object (semiconductor device) S2 manufactured by the semiconductor manufacturing apparatus 200. The inspection apparatus 400 includes a transport apparatus 300B that can transport the object S2. The transport apparatus 300B includes a table apparatus TS according to the present embodiment. In FIG. 9, the table device TS is illustrated in a simplified manner.

The inspection apparatus 400 inspects the object S2 arranged at the inspection position PJ2. The table device TS arranges the object S2 supported by the table 2 at the inspection position PJ2. The transport device 300B includes a carry-in device 301B that can transport (carry in) the object S2 to the table 2 of the table device TS, and a carry-out device 302B that can transport (carry out) the object S2 from the table 2. The object S2 before the inspection is transported (carried in) to the table 2 by the carry-in device 301B. The table device TS transports the object S2 supported by the table 2 to the inspection position PJ2. The inspected object S2 is transported (unloaded) from the table 2 by the unloading device 302B.

The table device TS moves the table 2 and moves the object S2 supported by the table 2 to the inspection position PJ2. As described in the above-described embodiment, the table 2 can be moved along the target trajectory in three directions of the X-axis direction, the Y-axis direction, and the Z-axis direction, and can be moved with high positioning accuracy. is there. Therefore, the table device TS can arrange the object S2 supported by the table 2 at the inspection position (target position) PJ2.

In this embodiment, the inspection apparatus 400 optically inspects the object S2 using detection light. The inspection apparatus 400 includes an irradiation device 401 that can emit detection light, and a light receiving device 402 that can receive at least part of the detection light emitted from the irradiation device 401 and reflected by the object S2. In the present embodiment, the inspection position PJ2 includes an irradiation position of detection light. By disposing the object S2 at the inspection position PJ2, the state of the object S2 is optically inspected.

After the inspection of the object S2 at the inspection position PJ2, the object S2 after the inspection is transported from the table 2 by the carry-out device 302B.

In the present embodiment, since the table device TS can arrange the object S2 at the inspection position (target position) PJ2, it is possible to suppress the occurrence of inspection defects. That is, the inspection apparatus 400 can determine well whether or not the object S2 is defective. Thereby, for example, it is suppressed that defective object S2 is conveyed to a post process, or shipped.

1 Base member 1A Upper surface (guide surface)
2 Table 2A Upper surface 2B Lower surface 3 Drive system 4 Piston member

4A Upper surface

4B Lower surface

4C Side surface 5 Cylinder member

5A Upper surface

5B Lower surface

5H Inner space

5S Inner surface 6 Bearing member

6G Gas bearing

6S Inner surface 7 Bearing member 8 Gravity compensator 9 Support device 10Z Axis drive (first axis drive)
11 First wedge member 11B Lower surface 11G Slope 11S Side surface 12 Second wedge member 13 Z-axis actuator (first-axis actuator)
14 Z-axis guide device 14A Slider 14B Rail 15 Power transmission mechanism 16 Y-axis guide device 16A Slider 16B Rail 20 X-axis drive device (second axis drive device)
21 X axis stage (second axis stage)
22 X axis actuator (second axis actuator)
22A mover (slider)
22B Stator (stator)
23 X-axis guide device 23A Slider 23B Rail 30 Y-axis drive device (third-axis drive device)
31 Y-axis stage (third-axis stage)
32 Y axis actuator (3rd axis actuator)
32A mover (slider)
32B Stator
33 Y-axis guide device 33A Slider 33B Rail 40 Connection member 61 Supply port 62 Cavity 63 Gas supply device 64 Exhaust port 71 Supply port 72 Cavity 73 Gas supply device 74 Exhaust port 81 Supply port 82 Gas supply device 83 Pressure adjustment device 200 Semiconductor manufacturing Device 300 Conveying device 400 Inspection device S Object TS Table device

Claims

A base member having a guide surface parallel to the predetermined surface;
A table disposed on the base member;
An actuator disposed between the base member and the table with respect to a direction parallel to the first axis perpendicular to the predetermined plane, and including an actuator for generating power; a direction parallel to the first axis; A drive system capable of moving the table in a direction parallel to two axes and a direction parallel to a third axis perpendicular to the second axis in the predetermined plane;
A piston member having an upper surface, a lower surface, and a side surface connecting the upper surface and the lower surface, wherein at least a part of the upper surface side is connected to the table;
The piston member is disposed around the piston member and supports the piston member so as to be movable in a direction parallel to the first axis, and the base in each of a direction parallel to the second axis and a direction parallel to the third axis. A cylinder member supported movably on the member;
A first bearing member disposed on the cylinder member and forming a gas bearing with a side surface of the piston member;
A second bearing member disposed on the cylinder member and forming a gas bearing with the guide surface of the base member;
A gravity compensation device that is arranged to face the lower space of the internal space of the cylinder member facing the lower surface of the piston member, and has a supply port for supplying gas to the lower space;
A table device comprising:
The piston member is connected to each of a plurality of positions on the peripheral edge of the table,
The table apparatus according to claim 1, wherein a plurality of the cylinder members are arranged so as to surround the drive system.
The drive system is
A second axis drive device including a second axis stage supported movably on the base member in a direction parallel to the second axis, and a second axis actuator that moves the second axis stage;
A third axis drive device including a third axis stage supported movably on the second axis stage in a direction parallel to the third axis, and a third axis actuator that moves the third axis stage;
A first axis driving device disposed on the third axis stage and moving the table in a direction parallel to the first axis;
Including
The table apparatus according to claim 1, wherein the cylinder member is connected to the third axis stage.
The first shaft driving device includes:
A first wedge member supported to be movable on the third axis stage in a direction parallel to the second axis or the third axis;
A second wedge member disposed on the first wedge member and movable relative to the first wedge member;
A first axis actuator for moving the first wedge member;
At least a part of the first wedge member is disposed on the first wedge member, and the second wedge member is guided by the movement of the first wedge member so that the second wedge member moves in a direction parallel to the first axis. When,
Have
The table apparatus according to claim 3, wherein the table is supported by the second wedge member.
The guide device includes a rail disposed on one wedge member of the first wedge member and the second wedge member, and a linear motion type having a slider disposed on the other wedge member and movable relative to the rail. The table apparatus of Claim 4 containing the rolling bearing of this.
A transport device comprising the table device according to any one of claims 1 to 5.
A semiconductor manufacturing apparatus comprising the table device according to any one of claims 1 to 5.
An inspection device comprising the table device according to any one of claims 1 to 5.