JP2017180602A - Movable body feeding mechanism and processing device - Google Patents

Movable body feeding mechanism and processing device Download PDF

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Publication number
JP2017180602A
JP2017180602A JP2016066337A JP2016066337A JP2017180602A JP 2017180602 A JP2017180602 A JP 2017180602A JP 2016066337 A JP2016066337 A JP 2016066337A JP 2016066337 A JP2016066337 A JP 2016066337A JP 2017180602 A JP2017180602 A JP 2017180602A
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Prior art keywords
ball screw
moving body
workpiece
moving
extending
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優樹 野村
Yuki Nomura
優樹 野村
冠宇 陳
Kuan-Yu Chen
冠宇 陳
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Disco Corp
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Disco Abrasive Systems Ltd
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Priority to JP2016066337A priority Critical patent/JP2017180602A/en
Priority to TW106105329A priority patent/TWI715728B/en
Priority to KR1020170035896A priority patent/KR20170113169A/en
Priority to CN201710181242.9A priority patent/CN107234477A/en
Publication of JP2017180602A publication Critical patent/JP2017180602A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/38—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
    • B23Q5/40—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D33/00—Accessories for shearing machines or shearing devices
    • B23D33/02—Arrangements for holding, guiding, and/or feeding work during the operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Abstract

PROBLEM TO BE SOLVED: To provide a movable body feeding mechanism using a ball screw in which it is possible to assure a movable region of the movable body and a dispersion of lubricant oil from the ball screw to its surrounding area is restricted while its member is being restricted over its damage.SOLUTION: A movable body feeding mechanism 60 comprises a pair of guide rails 61 installed at a base block; a ball screw 63 arranged between the pair of guide rails 61 and rotated by a pulse motor 62; a slider 65 having a female thread engaged in thread with the ball screw 63 and moved along the guide rails 61; and a cover means 64 extended along the guide rails 61 and the ball screw 63, covering the guide rails 61 and the ball screw 63 to prevent dispersion of lubricant oil coated on the ball screw 63. The cover means 64 has a trough-like member 641 having a lid body 641a extending in a ball screw extending direction A and side plates 641b arranged at both sides of the lid body 641a and extending in the ball screw extending direction A. A slider 65 is moved without contacting to the trough-like member 641.SELECTED DRAWING: Figure 3

Description

本発明は、ボールネジを用いた直動機構である移動体送り機構および加工装置に関する。   The present invention relates to a moving body feeding mechanism and a processing apparatus that are linear motion mechanisms using a ball screw.

従来、各種工作機械などの装置において、被加工物を加工する加工ユニットを移動させる手段や被加工物を搬送する搬送手段などに、ボールネジを用いた直動機構としての移動体送り機構が多く用いられている。例えば、特許文献１には、静止基台上に設けられ、被加工物を保持するチャックテーブルの支持基台が移動可能に嵌合される案内レールと、支持基台と螺合するボールネジとを有する切削送り機構を備えた切削装置が開示されている。   Conventionally, in various machine tools and the like, a moving body feeding mechanism as a linear motion mechanism using a ball screw is often used as a means for moving a processing unit for processing a workpiece or a conveying means for conveying a workpiece. It has been. For example, Patent Literature 1 includes a guide rail that is provided on a stationary base and is movably fitted to a support base of a chuck table that holds a workpiece, and a ball screw that is screwed to the support base. A cutting apparatus having a cutting feed mechanism is disclosed.

特許第５８０１０７７号公報Japanese Patent No. 5801707

ボールネジを用いた移動体送り機構は、複数のボールを介してネジと螺合するナットが移動体としてのスライダに一体化されており、複数のボールとナットとの間を潤滑するため、ネジにグリス等の潤滑油が塗布される。しかしながら、この潤滑油の塗布量が多すぎると、スライダの移動に伴いネジとナットとが噛み合う際に潤滑油が周辺に飛散することがある。この結果、被加工物の表面に潤滑油が付着してしまい、被加工物の品質向上を妨げるおそれがある。この対策として、ボールネジを覆う蛇腹状のカバーをスライダの両側に取り付ける手法が考えられるが、この手法では、蛇腹状のカバーの最小厚さ（折りたたまれた状態での幅）分だけスライダの可動域が減少してしまう。また、長期の使用により蛇腹状のカバーに損傷が生じやすいといった問題があった。   In a moving body feed mechanism using a ball screw, a nut that is screwed to a screw via a plurality of balls is integrated with a slider as a moving body. Lubricating oil such as grease is applied. However, if the amount of the lubricating oil applied is too large, the lubricating oil may scatter to the periphery when the screw and nut are engaged with the movement of the slider. As a result, the lubricant oil adheres to the surface of the workpiece, which may hinder the quality improvement of the workpiece. As a countermeasure, a bellows-like cover that covers the ball screw can be attached to both sides of the slider. In this method, the slider's range of motion is the minimum thickness of the bellows-like cover (the width in the folded state). Will decrease. Further, there has been a problem that the bellows-shaped cover is easily damaged by long-term use.

本発明は、上記に鑑みてなされたものであって、ボールネジを用いた移動体送り機構において、部材の損傷を抑制しつつ、移動体の可動域を確保可能であり、かつ、ボールネジから潤滑油が周辺へと飛散することを抑制することを目的とする。   The present invention has been made in view of the above, and in a moving body feeding mechanism using a ball screw, it is possible to ensure a movable range of the moving body while suppressing damage to the member, and from the ball screw to the lubricating oil. The purpose is to suppress the splashing of the water around the surrounding area.

上述した課題を解決し、目的を達成するために、本発明にかかる移動体送り機構は、基台に設置された一対のガイドレールと、該一対のガイドレールの間に設けられモータで回転するボールネジと、該ボールネジに螺合する雌ネジを有し該ガイドレールに沿って移動するスライダと、該ガイドレール及びボールネジに沿って延在し該ガイドレール及びボールネジを覆って該ボールネジに塗布された潤滑油の飛散を防ぐカバー手段と、を備える移動体送り機構であって、該カバー手段は、ボールネジ伸展方向に延在する蓋体と該蓋体の両側に配設されボールネジ伸展方向に延在する側板とを有し、断面が略コの字型の樋状部材と、該樋状部材をボールネジ伸展方向の両端部で該基台に固定しつつ、該コの字型の内側で該ガイドレール及びボールネジを覆い、該コの字型の先端が該基台と隙間が空くよう該樋状部材を位置付ける固定部と、を備え、該スライダは、該ボールネジに螺合し該ガイドレールと摺動する本体部と、該本体部から該ガイドレールの両外側に延在し、該基台と該樋状部材との該隙間をくぐって該側板に沿って立ち上がるブラケット部と、立ち上がった該ブラケット部の両端部に渡って、該樋状部材を跨ぎ固定される移動体と、から構成され、飛散する該潤滑油を受けるコの字型の該樋状部材に、該スライダが接触せずに移動する。   In order to solve the above-described problems and achieve the object, a moving body feeding mechanism according to the present invention is provided with a pair of guide rails installed on a base and a motor provided between the pair of guide rails. A ball screw, a slider having a female screw threadedly engaged with the ball screw, and moving along the guide rail; and extending along the guide rail and the ball screw, covering the guide rail and the ball screw, and applied to the ball screw And a cover means for preventing splashing of lubricating oil, wherein the cover means is disposed on both sides of the lid body extending in the ball screw extending direction and extending in the ball screw extending direction. A hook-shaped member having a substantially U-shaped cross section, and fixing the hook-shaped member to the base at both ends of the ball screw extending direction, and the guide on the inner side of the U-shaped Rails and balls And a fixing portion for positioning the flange-shaped member so that a gap is formed between the base and the base, and the slider is screwed into the ball screw and slides on the guide rail. A main body portion, a bracket portion extending from the main body portion to both outer sides of the guide rail, passing through the gap between the base and the flange-shaped member, and rising along the side plate; and the bracket portion rising The slider moves without contact with the U-shaped hook-shaped member that receives the lubricating oil that is scattered, and is configured to include a moving body that is fixed across the hook-shaped member over both ends. .

上述した課題を解決し、目的を達成するために、本発明にかかる加工装置は、被加工物を保持するチャックテーブルと、該チャックテーブルに保持された被加工物を加工する加工手段と、該チャックテーブルと該加工手段とを相対移動させる移動手段と、を備える加工装置であって、該移動手段は、上記本発明の移動体送り機構を有する。   In order to solve the above-described problems and achieve the object, a processing apparatus according to the present invention includes a chuck table that holds a workpiece, a processing unit that processes the workpiece held on the chuck table, A processing apparatus comprising a chuck table and a moving means for moving the processing means relative to each other, the moving means having the moving body feeding mechanism of the present invention.

また、本発明にかかる加工装置は、該複数の被加工物を収容するカセットを載置するカセット載置部と、該加工手段で加工した被加工物を洗浄する洗浄手段と、該カセット載置部に載置された該カセットと、該チャックテーブルと、該洗浄手段との間で該被加工物を搬送する搬送手段とを備え、該搬送手段は上記本発明の移動体送り機構で移動することが好ましい。   Further, the processing apparatus according to the present invention includes a cassette mounting portion for mounting a cassette that accommodates the plurality of workpieces, a cleaning unit that cleans the workpiece processed by the processing unit, and the cassette mounting. The cassette mounted on the unit, the chuck table, and a transport means for transporting the workpiece between the cleaning means, and the transport means moves by the moving body feed mechanism of the present invention. It is preferable.

本発明にかかる移動体送り機構および加工装置は、ボールネジを用いた移動体送り機構において、部材の損傷を抑制しつつ、移動体の可動域を確保可能であり、かつ、ボールネジから潤滑油が周辺へと飛散することを抑制することができるという効果を奏する。   The moving body feeding mechanism and the processing apparatus according to the present invention can secure a movable range of the moving body while suppressing damage to the member in the moving body feeding mechanism using a ball screw, and the lubricating oil is surrounded by the ball screw. There is an effect that it is possible to suppress scattering.

図１は、実施形態にかかる加工装置の概略を示す斜視図である。FIG. 1 is a perspective view illustrating an outline of a processing apparatus according to an embodiment. 図２は、図１の加工装置に含まれる切削手段の概略を示す斜視図である。FIG. 2 is a perspective view showing an outline of cutting means included in the processing apparatus of FIG. 図３は、実施形態にかかる移動体送り機構を示す斜視図である。FIG. 3 is a perspective view illustrating the moving body feeding mechanism according to the embodiment. 図４は、実施形態にかかる移動体送り機構を示す分解斜視図である。FIG. 4 is an exploded perspective view illustrating the moving body feeding mechanism according to the embodiment. 図５は、実施形態にかかる移動体送り機構を示す断面図である。FIG. 5 is a cross-sectional view illustrating the moving body feeding mechanism according to the embodiment. 図６は、比較例としての移動体送り機構を示す斜視図である。FIG. 6 is a perspective view showing a moving body feeding mechanism as a comparative example. 図７は、比較例としての移動体送り機構を示す断面図である。FIG. 7 is a cross-sectional view showing a moving body feeding mechanism as a comparative example. 図８は、変形例にかかる移動体送り機構を示す断面図である。FIG. 8 is a cross-sectional view showing a moving body feeding mechanism according to a modification.

以下に、本発明にかかる移動体送り機構および加工装置の実施形態を図面に基づいて詳細に説明する。なお、この実施形態によりこの発明が限定されるものではない。   Hereinafter, embodiments of a moving body feeding mechanism and a processing apparatus according to the present invention will be described in detail with reference to the drawings. In addition, this invention is not limited by this embodiment.

図１は、実施形態にかかる加工装置１の概略を示す斜視図であり、図２は、加工装置１に含まれる切削手段４０を示す斜視図である。加工装置１は、被加工物に対して切削加工を施す装置である。加工装置１は、筐体２と、被加工物を収容する図示しないカセットが載置されるカセット載置部１０と、被加工物を保持する保持手段２０と、被加工物を洗浄する洗浄手段３０と、筐体２の内部に配置されると共に被加工物を切削する切削手段４０（図２参照）と、カセット載置部１０、保持手段２０および洗浄手段３０の間で被加工物を搬送する搬送手段５０とを備える。なお、図１においては、カセット載置部１０、保持手段２０、洗浄手段３０および搬送手段５０を示すために、筐体２の一部の記載を省略している。   FIG. 1 is a perspective view showing an outline of a processing apparatus 1 according to the embodiment, and FIG. 2 is a perspective view showing a cutting means 40 included in the processing apparatus 1. The processing apparatus 1 is an apparatus that performs cutting on a workpiece. The processing apparatus 1 includes a housing 2, a cassette placement unit 10 on which a cassette (not shown) that accommodates the workpiece is placed, a holding unit 20 that holds the workpiece, and a cleaning unit that cleans the workpiece. 30 and a cutting means 40 (see FIG. 2) which is disposed inside the housing 2 and cuts the workpiece, and conveys the workpiece between the cassette mounting portion 10, the holding means 20 and the cleaning means 30. And conveying means 50. In FIG. 1, a part of the housing 2 is not shown to show the cassette placing unit 10, the holding unit 20, the cleaning unit 30, and the transport unit 50.

ここで、被加工物は、特に限定されないが、例えば、シリコン、サファイア、ガリウム等を母材とする板状の半導体ウェーハや光デバイスウェーハ、セラミックス、ガラス、サファイア系の板状の無機材料基板、金属や樹脂等の板状の延性材料等、各種の板状の加工材料である。   Here, the workpiece is not particularly limited, for example, a plate-like semiconductor wafer or optical device wafer based on silicon, sapphire, gallium or the like, ceramics, glass, a sapphire-based plate-like inorganic material substrate, Various plate-like processed materials such as plate-like ductile materials such as metal and resin.

カセット載置部１０は、複数の被加工物を一枚ずつＺ軸方向に区分けして収納する収納部を有する図示しないカセットを載置可能とされている。カセット載置部１０は、Ｚ軸方向において昇降自在な、いわゆるカセットエレベータであり、図示しないカセットをＺ軸方向における所定位置に位置付けさせる。   The cassette mounting unit 10 can mount a cassette (not shown) having a storage unit that stores a plurality of workpieces one by one in the Z-axis direction. The cassette mounting portion 10 is a so-called cassette elevator that can move up and down in the Z-axis direction, and positions a cassette (not shown) at a predetermined position in the Z-axis direction.

保持手段２０は、被加工物を搬出入する図１に示す搬出入位置と、被加工物を切削加工する図２に示す加工位置との間をＸ軸方向に移動可能に構成されている。保持手段２０は、図２に示すように、被加工物を保持可能なチャックテーブル２１と、チャックテーブル２１を回転させる回転手段２２と、回転手段２２を介してチャックテーブル２１を支持するチャックテーブル支持基台２３と、チャックテーブル２１をＸ軸方向（加工送り方向）に移動させる加工送り手段２４とを有する。更に、保持手段２０は、図１に示すように、チャックテーブル２１を囲む矩形状のカバープレート２５と、カバープレート２５のＸ軸方向の両側に取り付けられた蛇腹状カバー２６とを有する。なお、図２においては、カバープレート２５および蛇腹状カバー２６の記載を省略する。   The holding means 20 is configured to be movable in the X-axis direction between a loading / unloading position shown in FIG. 1 where the workpiece is carried in / out and a machining position shown in FIG. 2 where the workpiece is cut. As shown in FIG. 2, the holding unit 20 includes a chuck table 21 that can hold a workpiece, a rotating unit 22 that rotates the chuck table 21, and a chuck table support that supports the chuck table 21 via the rotating unit 22. A base 23 and a machining feed means 24 for moving the chuck table 21 in the X-axis direction (machining feed direction) are provided. Further, as shown in FIG. 1, the holding unit 20 includes a rectangular cover plate 25 that surrounds the chuck table 21, and bellows-like covers 26 that are attached to both sides of the cover plate 25 in the X-axis direction. In FIG. 2, the description of the cover plate 25 and the bellows-like cover 26 is omitted.

チャックテーブル２１は、例えばポーラスセラミックで構成され、被加工物を吸着して保持する円盤状の保持面２１ａを有している。保持面２１ａは、水平方向に平行で、かつ平坦に形成されている。回転手段２２は、モータ等の図示しない駆動源を有し、チャックテーブル２１をＺ軸周りに水平面内で回転させる。チャックテーブル支持基台２３は、筐体２にＸ軸方向に沿って形成された一対のガイドレール２４ａに摺動自在に支持されている。加工送り手段２４は、上記一対のガイドレール２４ａと、一対のガイドレール２４ａの間をＸ軸方向に延びるボールネジ２４ｂと、駆動源としてのパルスモータ２４ｃとを有しており、チャックテーブル支持基台２３を筐体２に対してＸ軸方向（加工送り方向）に相対移動させる。カバープレート２５は、チャックテーブル２１に固定されており、チャックテーブル２１と共にＸ軸方向に移動する。蛇腹状カバー２６は、布などの折り畳み自在な適宜の材料で構成され、チャックテーブル２１およびカバープレート２５の移動領域を覆い、チャックテーブル支持基台２３の移動に伴ってＸ軸方向に沿って伸縮する。切削加工時に生じる切削屑や切削水は、カバープレート２５および蛇腹状カバー２６によって加工送り手段２４側に落下することが防がれる。   The chuck table 21 is made of, for example, porous ceramic, and has a disk-shaped holding surface 21a that sucks and holds a workpiece. The holding surface 21a is formed parallel to the horizontal direction and flat. The rotating means 22 has a drive source (not shown) such as a motor, and rotates the chuck table 21 around the Z axis in a horizontal plane. The chuck table support base 23 is slidably supported by a pair of guide rails 24a formed in the housing 2 along the X-axis direction. The processing feeding means 24 has a pair of guide rails 24a, a ball screw 24b extending between the pair of guide rails 24a in the X-axis direction, and a pulse motor 24c as a drive source. 23 is moved relative to the housing 2 in the X-axis direction (machining feed direction). The cover plate 25 is fixed to the chuck table 21 and moves with the chuck table 21 in the X-axis direction. The bellows-shaped cover 26 is made of an appropriate foldable material such as cloth, covers the moving area of the chuck table 21 and the cover plate 25, and expands and contracts along the X-axis direction as the chuck table support base 23 moves. To do. Cutting chips and cutting water generated during the cutting process are prevented from falling to the processing feeding means 24 side by the cover plate 25 and the bellows-shaped cover 26.

洗浄手段３０は、加工後の被加工物を保持するスピンナテーブル３１と、図示しない洗浄液噴射装置と、図示しない気体噴射装置とを有する。洗浄手段３０は、スピンナテーブル３１を図示しない回転駆動源により回転させつつ洗浄液噴射装置から加工後の被加工物に洗浄液を噴射することで該被加工物を洗浄する。また、洗浄手段３０は、洗浄後の被加工物に気体噴射装置から気体を噴射することで該被加工物を乾燥させる。   The cleaning means 30 includes a spinner table 31 that holds a processed workpiece, a cleaning liquid ejecting device (not shown), and a gas ejecting device (not shown). The cleaning means 30 cleans the workpiece by spraying the cleaning liquid onto the processed workpiece from the cleaning liquid ejecting apparatus while rotating the spinner table 31 by a rotation drive source (not shown). Further, the cleaning means 30 dries the workpiece by injecting gas from the gas injection device onto the workpiece after cleaning.

切削手段４０は、筐体２に設けられた門型の柱部３上にＹ軸方向およびＺ軸方向に移動可能に取り付けられている。切削手段４０は、図２に示すように、チャックテーブル２１に保持された被加工物を加工する加工手段としての２つの切削ブレード４１と、各切削ブレード４１が装着される２つのスピンドル４２と、各スピンドル４２を支持する２つのハウジング４３と、チャックテーブル２１と各切削ブレード４１とを相対移動させる移動手段としての割り出し送り手段４４および切り込み送り手段４５とを有する。   The cutting means 40 is attached to the portal column 3 provided in the housing 2 so as to be movable in the Y-axis direction and the Z-axis direction. As shown in FIG. 2, the cutting means 40 includes two cutting blades 41 as processing means for processing a workpiece held on the chuck table 21, two spindles 42 to which the cutting blades 41 are attached, It has two housings 43 that support each spindle 42, index feed means 44 and cut feed means 45 as moving means for relatively moving the chuck table 21 and each cutting blade 41.

切削ブレード４１は、極薄の円板状で、かつ環状に形成された切削砥石である。スピンドル４２は、切削ブレード４１を着脱可能に装着する。ハウジング４３は、モータ等の駆動源を有しており、Ｙ軸周りに回転自在にスピンドル４２を支持する。   The cutting blade 41 is a cutting grindstone formed in an extremely thin disk shape and in an annular shape. The spindle 42 is detachably mounted with the cutting blade 41. The housing 43 has a drive source such as a motor, and supports the spindle 42 so as to be rotatable around the Y axis.

割り出し送り手段４４および切り込み送り手段４５は、実施形態にかかる移動体送り機構６０を有する。割り出し送り手段４４は、移動体送り機構６０としてのＹ軸移動手段４４ａと、Ｙ軸移動手段４４ａに取り付けられた移動体４４ｂとを有する。Ｙ軸移動手段４４ａは、柱部３に固定された固定子と、当該固定子に取り付けられると共にＹ軸方向に沿って移動可能な移動子とを有する。移動体４４ｂは、Ｙ軸移動手段４４ａの移動子に取り付けられており、移動子と共にＹ軸方向に移動可能とされている。移動体４４ｂには、切り込み送り手段４５が固定されている。   The index feed unit 44 and the cut feed unit 45 have the moving body feed mechanism 60 according to the embodiment. The index feeding means 44 includes a Y axis moving means 44a as the moving body feeding mechanism 60, and a moving body 44b attached to the Y axis moving means 44a. The Y-axis moving means 44a includes a stator fixed to the column portion 3, and a mover attached to the stator and movable along the Y-axis direction. The moving body 44b is attached to a moving element of the Y-axis moving unit 44a, and is movable in the Y-axis direction together with the moving element. A cutting feed means 45 is fixed to the moving body 44b.

切り込み送り手段４５は、移動体送り機構６０としてのＺ軸移動手段４５ａと、Ｚ軸移動手段４５ａに取り付けられた移動体４５ｂとを有する。Ｚ軸移動手段４５ａは、割り出し送り手段４４の移動体４４ｂに固定された固定子と、当該固定子に取り付けられると共にＺ軸方向に沿って移動可能な移動子とを有する。移動体４５ｂは、Ｚ軸移動手段４５ａの移動子に取り付けられており、当該移動子と共にＺ軸方向に移動可能とされている。移動体４５ｂには、ハウジング４３が固定されている。   The cutting feed means 45 includes a Z-axis moving means 45a as the moving body feed mechanism 60 and a moving body 45b attached to the Z-axis moving means 45a. The Z-axis moving means 45a has a stator fixed to the moving body 44b of the indexing feeding means 44, and a mover attached to the stator and movable along the Z-axis direction. The moving body 45b is attached to the moving element of the Z-axis moving unit 45a, and is movable in the Z-axis direction together with the moving element. A housing 43 is fixed to the moving body 45b.

上述した構成により、割り出し送り手段４４は、切り込み送り手段４５、ハウジング４３およびスピンドル４２を介して各切削ブレード４１を柱部３（筐体２）に対してＹ軸方向（割り出し送り方向）に相対移動させることができる。また、切り込み送り手段４５は、ハウジング４３およびスピンドル４２を介して各切削ブレード４１を柱部３（筐体２）に対してＺ軸方向（切り込み送り方向）に相対移動させることができる。すなわち、割り出し送り手段４４および切り込み送り手段４５は、加工送り手段２４により筐体２に対して位置決めされるチャックテーブル２１に対して切削ブレード４１を相対移動させることができる。これにより、チャックテーブル２１の保持面２１ａ上に保持された被加工物を切削ブレード４１により切削加工することが可能となる。   With the above-described configuration, the index feeding means 44 makes each cutting blade 41 relative to the column portion 3 (housing 2) in the Y-axis direction (index feeding direction) via the cutting feed means 45, the housing 43, and the spindle 42. Can be moved. Further, the cutting feed means 45 can move each cutting blade 41 relative to the column portion 3 (housing 2) in the Z-axis direction (cutting feed direction) via the housing 43 and the spindle 42. That is, the indexing feeding means 44 and the cutting feeding means 45 can move the cutting blade 41 relative to the chuck table 21 that is positioned with respect to the housing 2 by the machining feeding means 24. Thus, the workpiece held on the holding surface 21 a of the chuck table 21 can be cut by the cutting blade 41.

搬送手段５０は、第１搬送手段５１、第２搬送手段５２、および第３搬送手段５３を有する。第１搬送手段５１、第２搬送手段５２、および第３搬送手段５３は、実施形態にかかる移動体送り機構６０を有する。   The transport unit 50 includes a first transport unit 51, a second transport unit 52, and a third transport unit 53. The 1st conveyance means 51, the 2nd conveyance means 52, and the 3rd conveyance means 53 have the moving body feed mechanism 60 concerning embodiment.

第１搬送手段５１は、移動体送り機構６０としてのＹ軸移動手段５１ａと、Ｙ軸移動手段５１ａに取り付けられたアーム５１ｂとを有する。Ｙ軸移動手段５１ａは、筐体２に固定された固定子と、当該固定子に取り付けられると共にＹ軸方向に沿って移動可能な移動子とを有する。アーム５１ｂは、Ｙ軸移動手段５１ａの移動子に取り付けられており、当該移動子と共にＹ軸方向に沿って移動可能とされている。アーム５１ｂは、先端部に形成されたクランプ５１ｃを有する。クランプ５１ｃは、カセット載置部１０に載置された図示しないカセット内の被加工物の一つを把持可能に形成されている。第１搬送手段５１は、アーム５１ｂのクランプ５１ｃにより把持した被加工物をチャックテーブル２１の両側部に形成された一対の位置決めバー４上に搬送する。ここで、一対の位置決めバー４は、Ｘ軸方向において移動可能に筐体２に取り付けられており、被加工物が載置された状態で互いに接近することにより、被加工物をチャックテーブル２１の上方において保持面２１ａと同心円状に配置することができる。   The 1st conveyance means 51 has the Y-axis movement means 51a as the mobile body feeding mechanism 60, and the arm 51b attached to the Y-axis movement means 51a. The Y-axis moving means 51a has a stator fixed to the housing 2 and a mover attached to the stator and movable along the Y-axis direction. The arm 51b is attached to the mover of the Y-axis moving unit 51a, and is movable along the Y-axis direction together with the mover. The arm 51b has a clamp 51c formed at the tip. The clamp 51c is formed so as to be able to grip one of the workpieces in a cassette (not shown) placed on the cassette placing portion 10. The first conveying means 51 conveys the workpiece gripped by the clamp 51c of the arm 51b onto a pair of positioning bars 4 formed on both sides of the chuck table 21. Here, the pair of positioning bars 4 are attached to the housing 2 so as to be movable in the X-axis direction, and approach each other in a state where the workpiece is placed, so that the workpiece is placed on the chuck table 21. It can be arranged concentrically with the holding surface 21a in the upper part.

第２搬送手段５２は、移動体送り機構６０としてのＹ軸移動手段５２ａと、Ｙ軸移動手段５２ａに取り付けられたＺ軸方向に伸縮可能なアーム５２ｂとを有する。Ｙ軸移動手段５２ａは、筐体２に固定された固定子と、当該固定子に取り付けられると共にＹ軸方向に沿って移動可能な移動子とを有する。アーム５２ｂは、Ｙ軸移動手段５２ａの移動子に取り付けられており、当該移動子と共にＹ軸方向に沿って移動可能とされている。アーム５２ｂは、先端部に形成されたＨ型のブラケットの先端に真空吸着式のパッド５２ｃを有する。パッド５２ｃは、被加工物を吸着して保持することができる。第２搬送手段５２は、第１搬送手段５１によって位置決めバー４上に載置された被加工物をパッド５２ｃによって吸着し、チャックテーブル２１の保持面２１ａ上に移動させる。また、第２搬送手段５２は、洗浄手段３０によって洗浄されたスピンナテーブル３１上の被加工物をパッド５２ｃによって吸着し、一対の位置決めバー４上へと搬送する。なお、第２搬送手段５２によって一対の位置決めバー４上へと搬送された洗浄後の被加工物は、第１搬送手段５１によって再び図示しないカセット内へと搬送される。   The second transport unit 52 includes a Y-axis moving unit 52a as the moving body feeding mechanism 60, and an arm 52b that is attached to the Y-axis moving unit 52a and can extend and contract in the Z-axis direction. The Y-axis moving unit 52a includes a stator fixed to the housing 2, and a mover attached to the stator and movable along the Y-axis direction. The arm 52b is attached to the mover of the Y-axis moving unit 52a, and is movable along the Y-axis direction together with the mover. The arm 52b has a vacuum suction pad 52c at the tip of an H-shaped bracket formed at the tip. The pad 52c can adsorb and hold the workpiece. The second transport unit 52 sucks the workpiece placed on the positioning bar 4 by the first transport unit 51 with the pad 52 c and moves it onto the holding surface 21 a of the chuck table 21. Further, the second transport unit 52 sucks the workpiece on the spinner table 31 cleaned by the cleaning unit 30 by the pad 52 c and transports the workpiece onto the pair of positioning bars 4. The workpiece after cleaning, which has been transferred onto the pair of positioning bars 4 by the second transfer means 52, is transferred again into a cassette (not shown) by the first transfer means 51.

第３搬送手段５３は、移動体送り機構６０としてのＹ軸移動手段５３ａと、Ｙ軸移動手段５３ａに取り付けられたＺ軸方向に伸縮可能なアーム５３ｂとを有する。Ｙ軸移動手段５３ａは、筐体２に固定された固定子と、当該固定子に取り付けられると共にＹ軸方向に沿って移動可能な移動子とを有する。アーム５３ｂは、Ｙ軸移動手段５３ａの移動子に取り付けられており、当該移動子と共にＹ軸方向に沿って移動可能とされている。アーム５３ｂは、先端部に形成されたＨ型のブラケットの先端に真空吸着式のパッド５３ｃを有する。パッド５３ｃは、被加工物を吸着して保持することができる。第３搬送手段５３は、チャックテーブル２１の保持面２１ａ上の被加工物をパッド５３ｃによって吸着し、洗浄手段３０のスピンナテーブル３１上へと搬送する。   The third transport unit 53 includes a Y-axis moving unit 53a as the moving body feeding mechanism 60, and an arm 53b that is attached to the Y-axis moving unit 53a and can extend and contract in the Z-axis direction. The Y-axis moving means 53a has a stator fixed to the housing 2, and a mover attached to the stator and movable along the Y-axis direction. The arm 53b is attached to a mover of the Y-axis moving unit 53a, and is movable along the Y-axis direction together with the mover. The arm 53b has a vacuum suction pad 53c at the tip of an H-shaped bracket formed at the tip. The pad 53c can adsorb and hold the workpiece. The third transport unit 53 sucks the workpiece on the holding surface 21 a of the chuck table 21 by the pad 53 c and transports it onto the spinner table 31 of the cleaning unit 30.

次に、実施形態にかかる移動体送り機構６０について詳細に説明する。上述したように、本実施形態の加工装置１において、移動体送り機構６０は、割り出し送り手段４４のＹ軸移動手段４４ａ、切り込み送り手段４５のＺ軸移動手段４５ａ、第１搬送手段５１のＹ軸移動手段５１ａ、第２搬送手段５２のＹ軸移動手段５２ａ、および第３搬送手段５３のＹ軸移動手段５３ａである。図３は、移動体送り機構６０を示す斜視図であり、図４は、移動体送り機構６０を示す分解斜視図であり、図５は、移動体送り機構６０を示す断面図である。なお、図３および図４においては、移動体送り機構６０の両端部の記載を省略する。   Next, the moving body feeding mechanism 60 according to the embodiment will be described in detail. As described above, in the processing apparatus 1 of the present embodiment, the moving body feeding mechanism 60 includes the Y-axis moving means 44a of the index feeding means 44, the Z-axis moving means 45a of the cutting feed means 45, and the Y of the first conveying means 51. An axis moving means 51 a, a Y axis moving means 52 a of the second conveying means 52, and a Y axis moving means 53 a of the third conveying means 53. 3 is a perspective view showing the moving body feeding mechanism 60, FIG. 4 is an exploded perspective view showing the moving body feeding mechanism 60, and FIG. 5 is a cross-sectional view showing the moving body feeding mechanism 60. In FIGS. 3 and 4, description of both end portions of the moving body feeding mechanism 60 is omitted.

移動体送り機構６０は、基台５（図５参照）に設置された一対のガイドレール６１と、駆動源としてのパルスモータ６２と、一対のガイドレール６１の間に設けられ、パルスモータ６２で回転するボールネジ６３と、ガイドレール６１及びボールネジ６３に沿って延在し、ガイドレール６１及びボールネジ６３を覆ってボールネジ６３に塗布された潤滑油の飛散を防ぐカバー手段６４と、ボールネジ６３に螺合する雌ネジを有し、ガイドレール６１に沿って移動するスライダ６５と、を備える。移動体送り機構６０の構成要素のうち、一対のガイドレール６１、パルスモータ６２、ボールネジ６３およびカバー手段６４は、上記固定子であり、スライダ６５は、上記移動子である。また、基台５は、割り出し送り手段４４であれば柱部３であり、切り込み送り手段４５であれば割り出し送り手段４４の移動体４４ｂであり、第１搬送手段５１、第２搬送手段５２、第３搬送手段５３であれば筐体２である。   The moving body feeding mechanism 60 is provided between a pair of guide rails 61 installed on the base 5 (see FIG. 5), a pulse motor 62 as a drive source, and a pair of guide rails 61. A rotating ball screw 63, a guide means 61 extending along the guide rail 61 and the ball screw 63, covering the guide rail 61 and the ball screw 63, and preventing the lubricant applied to the ball screw 63 from splashing, and the ball screw 63 screwed together And a slider 65 that moves along the guide rail 61. Of the components of the moving body feeding mechanism 60, the pair of guide rails 61, the pulse motor 62, the ball screw 63, and the cover means 64 are the above-described stators, and the slider 65 is the above-described moving element. In addition, the base 5 is the column portion 3 if it is the index feed means 44, and is the moving body 44b of the index feed means 44 if it is the cut feed means 45, the first transport means 51, the second transport means 52, If it is the third transport means 53, it is the housing 2.

一対のガイドレール６１は、基台５上にスライダ６５の移動方向Ａ（図３に示す実線矢印参照）に沿って延在する。ボールネジ６３は、スライダ６５の移動方向に沿って一対のガイドレール６１の間を延び、一端が図示しない固定部で基台５に固定される。   The pair of guide rails 61 extends on the base 5 along the moving direction A of the slider 65 (see the solid arrow shown in FIG. 3). The ball screw 63 extends between the pair of guide rails 61 along the moving direction of the slider 65, and one end is fixed to the base 5 by a fixing portion (not shown).

カバー手段６４は、図３および図５に示すように、スライダ６５の移動方向Ａ、すなわちボールネジ伸展方向Ａに沿って延在する蓋体６４１ａと、蓋体６４１ａの両側に配設され、ボールネジ伸展方向Ａに沿って延在する側板６４１ｂとを有し、断面が略コの字型（矩形の枠の１辺がない形状）の樋状部材６４１と、樋状部材６４１をボールネジ伸展方向Ａの両端部で基台５に固定しつつ、コの字型の内側でガイドレール６１及びボールネジ６３を覆い、コの字型の先端である側板６４１ｂの先端６４１ｔが基台５と隙間７０が空くよう樋状部材６４１を位置付ける固定部６４２（図１参照）と、を備える。   As shown in FIGS. 3 and 5, the cover means 64 is disposed on both sides of the lid 641a and the lid 641a extending along the moving direction A of the slider 65, that is, the ball screw extending direction A, and the ball screw extending. A side plate 641b extending along the direction A and having a substantially U-shaped cross section (a shape without a side of a rectangular frame), and a hook-like member 641 extending in the ball screw extending direction A. The guide rail 61 and the ball screw 63 are covered inside the U-shape while being fixed to the base 5 at both ends, so that the tip 641t of the side plate 641b, which is the U-shaped tip, is spaced from the base 5 and the gap 70. And a fixing portion 642 (see FIG. 1) for positioning the hook-shaped member 641.

樋状部材６４１の蓋体６４１ａは、図３に示すように、一対のガイドレール６１に沿って形成されている。蓋体６４１ａは、図５に示すように、ガイドレール６１およびボールネジ６３を基台５とは反対側から覆う。樋状部材６４１の側板６４１ｂは、蓋体６４１ａのボールネジ伸展方向Ａに沿って延びる両縁部から基台５側に向かってボールネジ伸展方向Ａと直行する方向に延出されている。なお、側板６４１ｂは、蓋体６４１ａの両端部から基台５側に向かってボールネジ伸展方向Ａと交差する方向に延出されれば、ボールネジ伸展方向Ａと直行する方向に延出されるものでなくてもよい。すなわち、側板６４１ｂは、蓋体６４１ａの両端部から基台５側に向かってボールネジ伸展方向Ａに対して鋭角または鈍角を成して延出されてもよい。   The lid 641a of the bowl-shaped member 641 is formed along a pair of guide rails 61 as shown in FIG. As shown in FIG. 5, the lid body 641 a covers the guide rail 61 and the ball screw 63 from the side opposite to the base 5. The side plate 641b of the bowl-shaped member 641 extends in a direction perpendicular to the ball screw extending direction A from both edges extending along the ball screw extending direction A of the lid 641a toward the base 5 side. Note that the side plate 641b does not extend in a direction perpendicular to the ball screw extension direction A if it extends in a direction intersecting the ball screw extension direction A from both ends of the lid 641a toward the base 5 side. May be. That is, the side plate 641b may extend at an acute angle or an obtuse angle with respect to the ball screw extending direction A from both ends of the lid 641a toward the base 5 side.

カバー手段６４は、図１に示すように、固定部６４２において基台５に固定されている。固定部６４２は、樋状部材６４１の側板６４１ｂと基台５との間に上記隙間７０が形成されるものでさえあれば、如何なる構造を有するものであってもよい。例えば、樋状部材６４１の両端部に基台５に向かって延びる図示しない突出部を設けておき、当該突出部を締結具等により基台５に固定する方法や、基台５に樋状部材６４１の側板６４１ｂに向かって延びる図示しない突出部を設けておき、当該突出部を締結具等により樋状部材６４１の側板６４１ｂに固定する方法等が考えられる。   As shown in FIG. 1, the cover means 64 is fixed to the base 5 at a fixing portion 642. The fixing portion 642 may have any structure as long as the gap 70 is formed between the side plate 641b of the bowl-shaped member 641 and the base 5. For example, a protrusion (not shown) extending toward the base 5 is provided at both ends of the hook-shaped member 641, and the protrusion is fixed to the base 5 with a fastener or the like. A method of providing a protrusion (not shown) extending toward the side plate 641b of 641 and fixing the protrusion to the side plate 641b of the hook-shaped member 641 with a fastener or the like can be considered.

スライダ６５は、ボールネジ６３に螺合し、ガイドレール６１と摺動する本体部６５ａと、本体部６５ａからガイドレール６１の両外側に延在し、基台５と上記樋状部材６４１との該隙間７０をくぐって側板６４１ｂに沿って立ち上がるブラケット部６５ｂと、立ち上がったブラケット部６５ｂの両端部に渡って、上記樋状部材６４１を跨ぎ固定される移動体６５ｃとから構成される。   The slider 65 is screwed into the ball screw 63, extends to the outer side of the guide rail 61 from the main body 65a sliding with the guide rail 61, and the base 5 and the flange-shaped member 641 A bracket portion 65b that rises along the side plate 641b through the gap 70, and a moving body 65c that is fixed across the flange-like member 641 across both ends of the raised bracket portion 65b.

本体部６５ａは、一対のガイドレール６１に摺動自在に嵌め込まれる一対の凹部６５０を有する。本体部６５ａは、ボールネジ６３と螺合する雌ネジを有する図示しないナットが内部に形成されており、当該図示しないナットとボールネジ６３との間では、図示しない複数のボールが転動するように構成されている。このため、ボールネジ６３には、図示しないナットと複数のボールとの間を潤滑するために例えばグリスといった潤滑油が塗布されている。本体部６５ａと基台５に固定されたカバー手段６４の樋状部材６４１の蓋体６４１ａとの間には、隙間が形成される。   The main body portion 65 a has a pair of recesses 650 that are slidably fitted into the pair of guide rails 61. The main body 65 a is formed with a nut (not shown) having a female screw that is screwed with the ball screw 63, and a plurality of balls (not shown) roll between the nut (not shown) and the ball screw 63. Has been. Therefore, a lubricating oil such as grease is applied to the ball screw 63 in order to lubricate between a nut (not shown) and the plurality of balls. A gap is formed between the main body portion 65 a and the lid body 641 a of the flange member 641 of the cover means 64 fixed to the base 5.

各ブラケット部６５ｂは、本体部６５ａの基台５側の端部から、当該基台５とは反対側に向かって延出されている。各ブラケット部６５ｂは、図５に示すように、ボールネジ６３の伸展方向Ａからみて断面Ｌ字形状を呈する。各ブラケット部６５ｂは、基台５に固定されたカバー手段６４の樋状部材６４１の側板６４１ｂとの間に隙間を形成しながら、当該側板６４１ｂの一部を囲んで延びる。このように、各ブラケット部６５ｂと樋状部材６４１の側板６４１ｂとは、隙間を空けながら互いに絡み合って延在する。   Each bracket part 65b is extended toward the opposite side to the said base 5 from the edge part by the side of the base 5 of the main-body part 65a. As shown in FIG. 5, each bracket portion 65 b has an L-shaped cross section when viewed from the extending direction A of the ball screw 63. Each bracket portion 65b extends so as to surround a part of the side plate 641b while forming a gap with the side plate 641b of the flange-like member 641 of the cover means 64 fixed to the base 5. Thus, each bracket part 65b and the side plate 641b of the hook-shaped member 641 extend intertwined with each other while leaving a gap.

移動体６５ｃは、各ブラケット部６５ｂの本体部６５ａとは反対側の端部にネジにより締結されている。なお、ブラケット部６５ｂと移動体６５ｃとの固定方法は、例えば両部材に係合部を形成しておく等、如何なる方法であってもよい。移動体６５ｃには、割り出し送り手段４４であれば移動体４４ｂが取り付けられ、切り込み送り手段４５であれば移動体４５ｂが取り付けられ、第１搬送手段５１であればアーム５１ｂが取り付けられ、第２搬送手段５２であればアーム５２ｂが取り付けられ、第３搬送手段５３であればアーム５３ｂが取り付けられる。図５に示すように、移動体６５ｃと基台５に固定されたカバー手段６４の樋状部材６４１の蓋体６４１ａとの間には、隙間が形成される。   The moving body 65c is fastened to the end portion of each bracket portion 65b opposite to the main body portion 65a with a screw. In addition, the fixing method of the bracket part 65b and the moving body 65c may be any method, for example, an engaging part is formed on both members. In the moving body 65c, the moving body 44b is attached in the case of the index feeding means 44, the moving body 45b is attached in the case of the cutting feed means 45, the arm 51b is attached in the case of the first transport means 51, and the second. If it is the transport means 52, an arm 52b is attached, and if it is the third transport means 53, an arm 53b is attached. As shown in FIG. 5, a gap is formed between the moving body 65 c and the lid body 641 a of the hook-shaped member 641 of the cover means 64 fixed to the base 5.

上述した構成により、移動体送り機構６０では、カバー手段６４の樋状部材６４１が有する蓋体６４１ａおよび側板６４１ｂにより、一対のガイドレール６１およびボールネジ６３の基台５とは反対側の領域を覆うことができる。また、移動体送り機構６０では、スライダ６５と基台５に固定されたカバー手段６４の樋状部材６４１との間に隙間が形成されており、スライダ６５は、ボールネジ６３の回転に伴って樋状部材６４１に接触することなく一対のガイドレール６１に沿って移動することができる。   With the above-described configuration, in the moving body feeding mechanism 60, the lid 641a and the side plate 641b included in the collar member 641 of the cover unit 64 cover the area on the opposite side of the pair of guide rails 61 and the base 5 of the ball screw 63. be able to. In the moving body feeding mechanism 60, a gap is formed between the slider 65 and the flange member 641 of the cover means 64 fixed to the base 5, and the slider 65 moves along with the rotation of the ball screw 63. It is possible to move along the pair of guide rails 61 without contacting the member 641.

図６は、比較例としてカバー手段６４Ｂを備えた移動体送り機構６０Ｂを示す斜視図であり、図７は、移動体送り機構６０Ｂを示す断面図である。図示するように、移動体送り機構６０Ｂのカバー手段６４Ｂは、カバー手段６４の樋状部材６４１から側板６４１ｂを省略したものである。このように、樋状部材６４１から側板６４１ｂを省略したカバー手段６４Ｂでは、図６および図７に示すように、一対のガイドレール６１と樋状部材６４１との間に隙間８０が形成される。このため、スライダ６５を一対のガイドレール６１に沿って移動させる際に、本体部６５ａの図示しないナットとボールネジ６３との噛み合いによって、図７に実線矢印で示すように、ボールネジ６３に塗布された潤滑油が当該隙間８０を介して移動体送り機構６０Ｂの周辺に飛散してしまうおそれがある。その結果として、被加工物の表面に潤滑油が付着してしまうと、被加工物の品質向上を妨げるおそれがある。   FIG. 6 is a perspective view showing a moving body feeding mechanism 60B provided with a cover means 64B as a comparative example, and FIG. 7 is a cross-sectional view showing the moving body feeding mechanism 60B. As shown in the figure, the cover means 64B of the moving body feeding mechanism 60B is obtained by omitting the side plate 641b from the hook-like member 641 of the cover means 64. As described above, in the cover unit 64B in which the side plate 641b is omitted from the hook-shaped member 641, a gap 80 is formed between the pair of guide rails 61 and the hook-shaped member 641 as shown in FIGS. For this reason, when the slider 65 is moved along the pair of guide rails 61, it is applied to the ball screw 63 as shown by the solid line arrow in FIG. There is a possibility that the lubricating oil may scatter around the moving body feed mechanism 60B through the gap 80. As a result, if lubricating oil adheres to the surface of the workpiece, the quality of the workpiece may not be improved.

本実施形態の移動体送り機構６０では、カバー手段６４の樋状部材６４１の蓋体６４１ａおよび側板６４１ｂにより、一対のガイドレール６１およびボールネジ６３を基台５とは反対側の領域を覆い、図７に示す隙間８０が形成されないようにすることができる。これにより、樋状部材６４１、特に側板６４１ｂにより、スライダ６５の本体部６５ａの図示しないナットとボールネジ６３との噛み合いによって、ボールネジ６３に塗布された潤滑油が移動体送り機構６０の周辺に飛散することを良好に抑制することができる。また、スライダ６５のブラケット部６５ｂが樋状部材６４１の側板６４１ｂに沿って立ち上がることにより、ブラケット部６５ｂと側板６４１ｂとが隙間を空けながら互いに絡み合うように延在するため、ブラケット部６５ｂと側板６４１ｂとの間から潤滑油が漏れ出すのをより良好に抑制することができる。この結果、被加工物の表面に潤滑油が付着しないようにして、被加工物の品質向上を図ることが可能となる。   In the moving body feeding mechanism 60 of this embodiment, the lid 641a and the side plate 641b of the bowl-shaped member 641 of the cover means 64 cover the region on the opposite side of the base 5 with the pair of guide rails 61 and the ball screw 63. 7 can be prevented from being formed. Thereby, the lubricating oil applied to the ball screw 63 is scattered around the moving body feed mechanism 60 by the engagement between the nut (not shown) of the main body portion 65a of the slider 65 and the ball screw 63 by the flange member 641, particularly the side plate 641b. This can be suppressed satisfactorily. Further, since the bracket portion 65b of the slider 65 rises along the side plate 641b of the bowl-shaped member 641, the bracket portion 65b and the side plate 641b extend so as to be entangled with each other with a gap therebetween, and thus the bracket portion 65b and the side plate 641b. It is possible to better suppress the leakage of the lubricating oil from between the two. As a result, it is possible to improve the quality of the workpiece by preventing the lubricating oil from adhering to the surface of the workpiece.

さらに、本実施形態の移動体送り機構６０では、スライダ６５と樋状部材６４１とを接触させることなく、スライダ６５を一対のガイドレール６１に沿って移動させることができる。これにより、例えばスライダ６５の両端部にボールネジ６３を覆う蛇腹状のカバーを設ける場合に比べて、スライダ６５の可動域を確保することができる。また、スライダ６５および樋状部材６４１を接触させないようにすることで、スライダ６５および樋状部材６４１が損傷してしまうのを良好に抑制することが可能となる。   Furthermore, in the moving body feed mechanism 60 of the present embodiment, the slider 65 can be moved along the pair of guide rails 61 without bringing the slider 65 and the hook-shaped member 641 into contact with each other. Thereby, for example, the movable range of the slider 65 can be ensured as compared with the case where a bellows-like cover that covers the ball screw 63 is provided at both ends of the slider 65. Further, by preventing the slider 65 and the hook-shaped member 641 from coming into contact with each other, it is possible to satisfactorily prevent the slider 65 and the hook-shaped member 641 from being damaged.

以上説明したように、実施形態にかかる移動体送り機構６０および加工装置１では、ガイドレール６１及びボールネジ６３を覆うカバー手段６４の蓋体６４１ａおよび側板６４１ｂを有する樋状部材６４１により、ボールネジ６３に塗布された潤滑油が周辺に飛散することを良好に抑制することができる。また、スライダ６５を樋状部材６４１と接触させずに移動させることができるため、スライダ６５や樋状部材６４１に損傷が発生するのを抑制しつつ、スライダ６５の可動域を確保することができる。   As described above, in the moving body feeding mechanism 60 and the processing apparatus 1 according to the embodiment, the ball screw 63 is attached to the ball screw 63 by the flange member 641 having the cover body 641a and the side plate 641b of the cover means 64 that covers the guide rail 61 and the ball screw 63. It is possible to satisfactorily prevent the applied lubricating oil from scattering around. Moreover, since the slider 65 can be moved without contacting the hook-shaped member 641, the slider 65 and the hook-shaped member 641 can be prevented from being damaged, and the movable range of the slider 65 can be secured. .

なお、本実施形態では、割り込み送り手段４４、切り込み送り手段４５、第１搬送手段５１、第２搬送手段５２、および第３搬送手段５３に移動体送り機構６０を適用するものとしたが、移動体送り機構６０をこれらの何れかのみに適用するものとしてもよい。   In this embodiment, the moving body feeding mechanism 60 is applied to the interrupt feeding means 44, the notch feeding means 45, the first conveying means 51, the second conveying means 52, and the third conveying means 53. The body feeding mechanism 60 may be applied only to any one of these.

図８は、変形例にかかる移動体送り機構６０Ｃを示す断面図である。図示するように、移動体送り機構６０Ｃは、上記移動体送り機構６０の構成に加えて、基台５から延出された２つの板体６６を有する。２つの板体６６は、スライダ６５のブラケット部６５ｂよりも外側（ブラケット部６５ｂに対して本体部６５ａの反対側）に位置すると共に、当該ブラケット部６５ｂに沿って延びる。これにより、スライダ６５の本体部６５ａの図示しないナットとボールネジ６３との噛み合いによって、ボールネジ６３に塗布された潤滑油が移動体送り機構６０の周辺に飛散することを板体６６により更に良好に抑制することができる。特に、図８における下側が鉛直方向の下側となる場合には、下側に配置された板体６６によって、カバー手段６４の樋状部材６４１の側板６４１ｂで受け止めた潤滑油が下方に垂れ落ちてしまうのを良好に抑制することができる。   FIG. 8 is a cross-sectional view showing a moving body feed mechanism 60C according to a modification. As shown in the drawing, the moving body feeding mechanism 60 </ b> C includes two plate bodies 66 extending from the base 5 in addition to the configuration of the moving body feeding mechanism 60. The two plate bodies 66 are located outside the bracket portion 65b of the slider 65 (on the opposite side of the main body portion 65a with respect to the bracket portion 65b) and extend along the bracket portion 65b. Thereby, the plate body 66 further suppresses the lubricating oil applied to the ball screw 63 from being scattered around the moving body feed mechanism 60 due to the engagement between the nut (not shown) of the main body 65a of the slider 65 and the ball screw 63. can do. In particular, when the lower side in FIG. 8 is the lower side in the vertical direction, the lubricating oil received by the side plate 641b of the flange member 641 of the cover means 64 drips down by the plate body 66 arranged on the lower side. Can be suppressed satisfactorily.

１ 加工装置
２ 筐体
３ 柱部
４ 位置決めバー
５ 基台
１０ カセット載置部
２０ 保持手段
２１ チャックテーブル
２１ａ 保持面
２２ 回転手段
２３ チャックテーブル支持基台
２４ 加工送り手段
２４ａ ガイドレール
２４ｂ ボールネジ
２４ｃ パルスモータ
２５ カバープレート
２６ 蛇腹状カバー
３０ 洗浄手段
３１ スピンナテーブル
４０ 切削手段
４１ 切削ブレード
４２ スピンドル
４３ ハウジング
４４ 割り出し送り手段
４４ａ Ｙ軸移動手段
４４ｂ，４５ｂ 移動体
４５ 切り込み送り手段
４５ａ Ｚ軸移動手段
５０ 搬送手段
５１ 第１搬送手段
５１ａ，５２ａ，５３ａ Ｙ軸移動手段
５１ｂ，５２ｂ，５３ｂ アーム
５１ｃ クランプ
５２ 第２搬送手段
５２ｃ，５３ｃ パッド
５３ 第３搬送手段
６０，６０Ｂ，６０Ｃ 移動体送り機構
６１ ガイドレール
６２ パルスモータ
６３ ボールネジ
６４，６４Ｂ カバー手段
６４１ 樋状部材
６４１ａ 蓋体
６４１ｂ 側板
６４１ｔ 先端
６４２ 固定部
６５ スライダ
６５ａ 本体部
６５ｂ ブラケット部
６５ｃ 移動体
６５０ 凹部
６６ 板体
７０，８０ 隙間 DESCRIPTION OF SYMBOLS 1 Processing apparatus 2 Housing | casing 3 Column part 4 Positioning bar 5 Base 10 Cassette mounting part 20 Holding means 21 Chuck table 21a Holding surface 22 Rotating means 23 Chuck table support base 24 Processing feed means 24a Guide rail 24b Ball screw 24c Pulse motor 25 Cover plate 26 Bellows-shaped cover 30 Cleaning means 31 Spinner table 40 Cutting means 41 Cutting blade 42 Spindle 43 Housing 44 Indexing feeding means 44a Y-axis moving means 44b, 45b Moving body 45 Cut-in feeding means 45a Z-axis moving means 50 Conveying means 51 First conveying means 51a, 52a, 53a Y-axis moving means 51b, 52b, 53b Arm 51c Clamp 52 Second conveying means 52c, 53c Pad 53 Third conveying means 60, 60B, 60C Moving body feeder Structure 61 Guide rail 62 Pulse motor 63 Ball screw 64, 64B Cover means 641 Gutter-shaped member 641a Lid 641b Side plate 641t Tip 642 Fixed portion 65 Slider 65a Main body 65b Bracket portion 65c Moving body 650 Recess 66 Plate body 70, 80 Gap

Claims (3)

基台に設置された一対のガイドレールと、該一対のガイドレールの間に設けられモータで回転するボールネジと、該ボールネジに螺合する雌ネジを有し該ガイドレールに沿って移動するスライダと、該ガイドレール及びボールネジに沿って延在し該ガイドレール及びボールネジを覆って該ボールネジに塗布された潤滑油の飛散を防ぐカバー手段と、を備える移動体送り機構であって、
該カバー手段は、
ボールネジ伸展方向に延在する蓋体と該蓋体の両側に配設されボールネジ伸展方向に延在する側板とを有し、断面が略コの字型の樋状部材と、
該樋状部材をボールネジ伸展方向の両端部で該基台に固定しつつ、該コの字型の内側で該ガイドレール及びボールネジを覆い、該コの字型の先端が該基台と隙間が空くよう該樋状部材を位置付ける固定部と、を備え、
該スライダは、
該ボールネジに螺合し該ガイドレールと摺動する本体部と、
該本体部から該ガイドレールの両外側に延在し、該基台と該樋状部材との該隙間をくぐって該側板に沿って立ち上がるブラケット部と、
立ち上がった該ブラケット部の両端部に渡って、該樋状部材を跨ぎ固定される移動体と、から構成され、
飛散する該潤滑油を受けるコの字型の該樋状部材に、該スライダが接触せずに移動する移動体送り機構。 A pair of guide rails installed on a base; a ball screw provided between the pair of guide rails and rotated by a motor; a slider having a female screw threadedly engaged with the ball screw and moving along the guide rail; A moving body feed mechanism comprising: cover means extending along the guide rail and the ball screw and covering the guide rail and the ball screw to prevent scattering of the lubricating oil applied to the ball screw,
The covering means is
A lid body extending in the ball screw extending direction and side plates disposed on both sides of the lid body and extending in the ball screw extending direction;
While fixing the bowl-shaped member to the base at both ends in the direction of extending the ball screw, the guide rail and the ball screw are covered inside the U-shape, and the tip of the U-shape has a gap from the base. A fixing portion for positioning the bowl-shaped member so as to be vacant,
The slider
A main body that is screwed into the ball screw and slides on the guide rail;
A bracket portion extending from the main body portion to both outer sides of the guide rail and rising along the side plate through the gap between the base and the flange-shaped member;
A movable body that is fixed across the flange-like member over both ends of the bracket portion that has stood up,
A moving body feed mechanism in which the slider moves without contacting the U-shaped bowl-shaped member that receives the scattered lubricating oil. 被加工物を保持するチャックテーブルと、該チャックテーブルに保持された被加工物を加工する加工手段と、該チャックテーブルと該加工手段とを相対移動させる移動手段と、を備える加工装置であって、
該移動手段は、請求項１記載の移動体送り機構を有する加工装置。 A processing apparatus comprising: a chuck table that holds a workpiece; a processing unit that processes the workpiece held on the chuck table; and a moving unit that relatively moves the chuck table and the processing unit. ,
The processing device having the moving body feeding mechanism according to claim 1. 請求項２記載の加工装置であって、
該複数の被加工物を収容するカセットを載置するカセット載置部と、該加工手段で加工した被加工物を洗浄する洗浄手段と、該カセット載置部に載置された該カセットと、該チャックテーブルと、該洗浄手段との間で該被加工物を搬送する搬送手段と、を備え、該搬送手段は請求項１記載の移動体送り機構で移動する加工装置。 The processing apparatus according to claim 2,
A cassette mounting section for mounting a cassette that accommodates the plurality of workpieces, a cleaning means for cleaning the workpiece processed by the processing means, the cassette mounted on the cassette mounting section, 2. A processing apparatus comprising: a chuck table; and a conveying unit that conveys the workpiece between the chucking unit and the cleaning unit, and the conveying unit is moved by a moving body feeding mechanism according to claim 1.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109621776A (en) * 2018-12-27 2019-04-16 贵阳金汉诚广告器材有限公司 A kind of litho ink feeding device
DE102021201778A1 (en) 2020-02-26 2021-08-26 Disco Corporation PROCESSING DEVICE
CN113634814A (en) * 2021-08-06 2021-11-12 临沂利信铝业有限公司 Equipment for cutting aluminum and using method

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102188835B1 (en) * 2019-03-29 2020-12-09 공상식 4-axis drilling machine
CN113719538A (en) * 2021-09-27 2021-11-30 大连船用柴油机有限公司 Linear guide rail sliding block support

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5726991U (en) * 1980-07-22 1982-02-12
JPS6229240U (en) * 1985-08-07 1987-02-21
JPH0890385A (en) * 1994-09-26 1996-04-09 Toray Ind Inc Dust-proof stage
JPH08141876A (en) * 1994-11-15 1996-06-04 T S Ii:Kk Slide device
JP2000249209A (en) * 1999-02-26 2000-09-12 Thk Co Ltd Lubricating oil supplying apparatus, and rolling body screw apparatus using the same
JP2002235827A (en) * 2001-02-07 2002-08-23 Seiken Graphics Kk Linear traveling device
JP2013237230A (en) * 2012-05-16 2013-11-28 Meiki Co Ltd Vacuum laminating apparatus
JP2014003181A (en) * 2012-06-19 2014-01-09 Tokyo Electron Ltd Substrate transfer facility
JP2015207579A (en) * 2014-04-17 2015-11-19 株式会社ディスコ Cleavage device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004253741A (en) * 2003-02-21 2004-09-09 Sumitomo Eaton Noba Kk Transfer device and semiconductor manufacturing device
TWI372213B (en) * 2009-12-11 2012-09-11 Hiwin Tech Corp Linear module having supporting assemblies for supporting an upper cover
CN202780658U (en) * 2012-09-04 2013-03-13 浙江杰克机床有限公司 Special connecting device for ball screw on numerical control machine tool
CN203409583U (en) * 2013-07-01 2014-01-29 安徽力成机械装备有限公司 Protective device of numerical control sliding table
JP6420609B2 (en) * 2013-11-21 2018-11-07 株式会社Ｓｃｒｅｅｎホールディングス Substrate transport method and substrate processing apparatus
JP6218600B2 (en) * 2013-12-26 2017-10-25 株式会社ディスコ Processing equipment
JP5776812B1 (en) * 2014-04-01 2015-09-09 日本精工株式会社 Table device and transfer device
JP6305272B2 (en) * 2014-08-14 2018-04-04 株式会社ディスコ Transport device
CN104526453B (en) * 2015-01-02 2016-09-14 巨轮智能装备股份有限公司 Platen dust guard
CN204700664U (en) * 2015-06-12 2015-10-14 大族激光科技产业集团股份有限公司 Fine-limit work platform and sealing device thereof

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5726991U (en) * 1980-07-22 1982-02-12
JPS6229240U (en) * 1985-08-07 1987-02-21
JPH0890385A (en) * 1994-09-26 1996-04-09 Toray Ind Inc Dust-proof stage
JPH08141876A (en) * 1994-11-15 1996-06-04 T S Ii:Kk Slide device
JP2000249209A (en) * 1999-02-26 2000-09-12 Thk Co Ltd Lubricating oil supplying apparatus, and rolling body screw apparatus using the same
JP2002235827A (en) * 2001-02-07 2002-08-23 Seiken Graphics Kk Linear traveling device
JP2013237230A (en) * 2012-05-16 2013-11-28 Meiki Co Ltd Vacuum laminating apparatus
JP2014003181A (en) * 2012-06-19 2014-01-09 Tokyo Electron Ltd Substrate transfer facility
JP2015207579A (en) * 2014-04-17 2015-11-19 株式会社ディスコ Cleavage device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109621776A (en) * 2018-12-27 2019-04-16 贵阳金汉诚广告器材有限公司 A kind of litho ink feeding device
DE102021201778A1 (en) 2020-02-26 2021-08-26 Disco Corporation PROCESSING DEVICE
KR20210108879A (en) 2020-02-26 2021-09-03 가부시기가이샤 디스코 Processing apparatus
JP2021133451A (en) * 2020-02-26 2021-09-13 株式会社ディスコ Processing device
US11554455B2 (en) 2020-02-26 2023-01-17 Disco Corporation Processing apparatus
CN113634814A (en) * 2021-08-06 2021-11-12 临沂利信铝业有限公司 Equipment for cutting aluminum and using method

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