JP5096100B2 - Cutting equipment - Google Patents

Description

  The present invention relates to a cutting apparatus that cuts a workpiece with a cutting blade while supplying cutting water.

  In the semiconductor device manufacturing process, circuits such as ICs and LSIs are formed in a large number of regions arranged in a lattice pattern on the surface of a substantially disk-shaped semiconductor wafer, and each region in which these circuits are formed is defined on a predetermined street. Each semiconductor chip is manufactured by dicing along a cutting line called “a”. The semiconductor chip thus divided is packaged and widely used in electronic devices such as mobile phones and personal computers.

  Electronic devices such as mobile phones and personal computers are required to be smaller and lighter, and semiconductor chip packages can also be downsized, called CSP (Chip Size Package) and QFN (Quad Flat Non-leaded Package). Has been developed. Such cutting of the CSP substrate or the QFN substrate is performed by a dicing apparatus.

  This dicing apparatus includes a cutting means for cutting a workpiece such as a CSP substrate held on a chuck table with a cutting blade while supplying cutting water. Here, the chuck table is configured to be processed and fed in the processing direction by a processing feed means including a ball screw or the like. Then, a bellows mechanism that can be expanded and contracted in the machining feed direction is provided on both sides of the machining feed direction of the chuck table so that the cutting water or cutting waste does not enter the machine elements constituting the machining feed means. I try to cover it.

JP 2004-186361 A

  When a CSP substrate or the like is cut by a dicing apparatus, there is an end material such as an ear portion on which the CSP is not formed at the edge of the CSP substrate or the like, and the end material is reciprocated as a relatively large cutting waste. It is arranged on one side as viewed in the moving direction, for example, on the downstream side when viewed in the forward direction of the chuck table when the cutting blade rotates in a direction in which the part acting on the substrate moves in the forward direction of the chuck table. Splashes on the bellows mechanism. Cutting scraps such as relatively large scraps scattered on the bellows mechanism tend to inhibit smooth contraction and extension of the bellows mechanism. The bellows mechanism is usually made of cloth or similar sheet material because it needs to contract and stretch smoothly. Therefore, damages such as holes are often generated in the constituent members of the bellows mechanism due to relatively large cutting waste scattered on the bellows mechanism.

  Accordingly, the bellows mechanism that protects the chuck table feeding mechanism when dicing a workpiece such as a substrate is easily damaged and deteriorated, and is insufficient as a means for protecting the chuck table feeding mechanism. .

  The present invention has been made in view of the above, and is provided with a cutting apparatus having a structure that is less likely to be damaged even when relatively large cutting waste, such as an end material of a workpiece, scatters and can protect a chuck table feed mechanism. The purpose is to provide.

In order to solve the above-described problems and achieve the object, a cutting apparatus according to the present invention includes a chuck table for holding a workpiece and a workpiece held on the chuck table while supplying cutting water. A cutting means having a spindle on which a cutting blade for cutting is rotatably mounted, a processing feed means for processing and feeding the chuck table in a direction perpendicular to the axial direction of the spindle, and a processing feed direction of the chuck table A drainage channel disposed on both sides, wherein the upper part of the processing feed means on the downstream side is positioned relative to the chuck table in the direction in which cutting water is scattered by the rotation of the cutting blade. a plate-shaped cover member for covering the bellows cover member for covering the upper portion of the feed means on the upstream side, can be driven in the processing-feed direction by said feeding means A chuck table support base disposed to support the chuck table and an opening in a range in which the chuck table moves by driving the processing feed means so as to cover the processing feed means; A water case having the drainage channel on both sides along the feed direction, and surrounding the opening in the water case, the plate-like cover member and the bellows mechanism for sliding in the machining feed direction A fixed plate having a rail on the outer wall, and an end member formed on the chuck table support base, which is formed in a dust removing shape having an opening at one end, and the opening side overlaps the plate-like cover member. receiving a plate comprising, on both sides of the plate-like cover member and the bellows mechanism is suspended along the outside wall of the fixed plate is disposed so as to cover the opening The plate-like cover member has one end connected to the chuck table support base, the other end is a free end, and having a sliding portion that slides on the rail of the fixed plate to the inner surface .

  The cutting device according to the present invention is characterized in that, in the above invention, the plate-like cover member is inclined so as to become lower from the center in the processing feed direction toward the drainage channels on both sides.

  Moreover, the cutting device according to the present invention is the above-described invention, wherein the end material box is disposed at the most downstream position in the processing feed direction so as to communicate with the drainage channel and collects the end material generated by processing the workpiece. The plate-like cover member is characterized in that when the cutting means reciprocates in the process feed direction by the process feed means, the free end reciprocates in the process feed direction on the upper surface of the end material box. To do.

  In the cutting apparatus according to the present invention, the upper part of the downstream processing feed means located in the direction in which the cutting water is scattered by the rotation of the cutting blade with respect to the chuck table is covered with the plate-like cover member. The cover member can be made of metal or the like, so that the plate-like cover member is not easily damaged even when relatively large cutting waste such as the end material of the workpiece is scattered, and the chuck table feed mechanism is reliably protected. There is an effect that can be.

  DESCRIPTION OF THE PREFERRED EMBODIMENTS A cutting apparatus that is the best mode for carrying out the present invention will be described below with reference to the drawings.

  FIG. 1 is an external perspective view showing an example of the cutting apparatus according to the present embodiment, FIG. 2 is a schematic perspective view showing a state when the chuck table or the like moves forward, and FIG. FIG. 4 is an exploded perspective view showing a circled position in FIG. 3 in an enlarged manner, and FIG. 5 is a schematic side view showing the configuration of the processing feed means and the like. is there. As shown in FIG. 1, the cutting apparatus 1 used in the present embodiment has, as a schematic configuration, a chuck table 2 that holds a workpiece 10 such as a package substrate, and a workpiece 10 that is held on the chuck table 2. On the other hand, a cutting means 3 for performing a cutting process for division and an imaging means 4 are provided.

  Here, the cutting means 3 arranges two spindles 32 (see FIG. 5 in which only one is shown) with a pair of cutting blades 31 (see FIG. 5 in which only one is shown) facing each other in the Y-axis direction. The facing dual-cut type is capable of simultaneously cutting two lines on the workpiece 10 using a pair of cutting blades 31. Further, as shown in FIG. 5, the cutting means 3 includes a cutting water supply means 34 having a pair of front and back injection nozzles 33 for supplying cutting water from both sides in the vicinity of the outer peripheral portion of the cutting edge that is a processing point of the cutting blade 31. . That is, the cutting means 3 has a spindle 32 on which a cutting blade 31 for cutting the workpiece 10 held on the chuck table 2 while cutting water is supplied is rotatably mounted.

  Further, the cutting apparatus 1 includes a processing feed means 5 for processing and feeding the chuck table 2 holding the workpiece 10 relative to the cutting means 3 in the X-axis direction, and a pair of cutting blades 31 of the cutting means 3. Indexing feed means (not shown) for indexing feed (index feed) relative to the chuck table 2 independently of each other, and the cutting blade 31 of the cutting means 3 are held on the chuck table 2 independently. A cutting feed means (not shown) for cutting and feeding in the Z-axis direction relative to the workpiece 10 is provided. As shown in FIG. 5, the processing feed means 5 includes a ball screw 53 rotatably supported by a support piece 52 disposed at a predetermined position spaced apart in the X-axis direction on the base 51, and the ball screw 53. The motor 54 is connected to one end of the motor to rotate the ball screw 52, the slider 55 has a female screw portion meshing with the ball screw 53 and supports the chuck table 2, and guides the movement of the slider 55 in the X-axis direction. And a guide rail 56 for reciprocating the chuck table 2 in the X-axis direction.

  The chuck table 2 that holds the workpiece 10 is provided on a chuck table support base 21 that is disposed so as to be driven in the X-axis direction by the processing feed means 5. Here, between the chuck table support base 21 and the slider 54, θ rotation means 22 for rotating the chuck table 2 in a horizontal plane is provided. Thus, the orientation of the held workpiece 10 with respect to the X-axis direction can be adjusted to rotate within the XY plane.

  The image pickup means 4 is a microscope equipped with a CCD camera or the like for picking up an image of the surface of the workpiece 10 held on the chuck table 2 and is used for alignment for positioning the cutting blade 31 with respect to the division line to be cut. is there.

  Moreover, the cutting apparatus 1 of this Embodiment is provided with the water case 6 arrange | positioned so that the process feeding means 5 whole may be covered. The water case 6 has an opening 61 that is opened so as not to hinder the movement of the chuck table 2 (the chuck table support base 21 and the θ rotation means 22) over the range in which the machining feed means 5 is driven. Have Further, the water case 6 is configured by using a part of the casing of the cutting device 1, and drainage passages 62 for draining cutting water and the like are formed on both sides along the X-axis direction that is the machining feed direction. Has been. Here, the periphery of the opening 61 is surrounded by a rectangular frame-shaped fixing plate 63 that is formed so as to be higher than the drainage channel 62 so that cutting water or the like does not easily enter. In the water case 6, two rails 64 are provided on both outer walls of the fixed plate 63. These rails 64 have a length over almost the entire length of the water case 6.

  Further, when the direction in which the cutting water is scattered by the rotation of the cutting blade 31 is the downstream side with respect to the chuck table 2, an end generated when the workpiece 10 is processed is provided on the most downstream side of the water case 6. An end material box 7 for storing the material is disposed. The most downstream side of the drainage channel 62 is also arranged to communicate with the end material box 7.

  On the water case 6, a plate-like cover member 8 and a bellows cover member 9 are provided as cover members that cover the upper part of the processing feed means 5 exposed from the opening 61. The plate-like cover member 8 is made of a metal material and covers the upper part of the downstream processing feed means 5 located in the direction in which cutting water scatters by the rotation of the cutting blade 31 with respect to the chuck table 2. One end on the side is connected to the chuck table support base 21 via a waterproof cover 81 so as to move integrally with the chuck table support base 21, and the other end on the downstream side is a free end. As shown by a solid line in FIG. 5, the plate-like cover member 8 is a length that completely blocks the downstream side of the opening 61 when the chuck table support base 21 and the like are located at the most upstream side position in the opening 61. Have The plate-like cover member 8 having such a length is set so as to cover the upper surface of the end material box 7 when moved to the most downstream side, as indicated by a virtual line in FIG. Further, both sides of the plate-like cover member 8 are disposed so as to hang down on the drainage channel 62 and cover the opening 61 along the outer wall of the fixed plate 63. The plate-shaped cover member 8 is formed in a roof shape having inclined surfaces 82 inclined on both sides so as to be lowered from the center in the X-axis direction that is the processing feed direction toward the drainage channels 62 on both sides. Yes. Further, a rail portion 83 that faces the rail 64 is provided inside the plate-like cover member 8, and sliding portions 84 that slide on the rail 64 are provided at several places on the lower surface of the rail portion 83. . The sliding portion 84 is formed of a cushioning member such as a resin having good sliding property.

  Further, brush members 85 that slide on the drainage channel 62 and the bottom surface of the water case 6 are attached to both sides and free ends of the plate-like cover member 8. These brush members 85 take a sliding contact position that slides on the drainage channel 62 or the bottom surface of the water case 6 when the plate-like cover member 8 moves forward with the chuck table 2 and the like toward the downstream side. Through a displacement mechanism (not shown) using a solenoid or the like interlocking with the reciprocating operation so as to take a retracted position away from the drainage channel 62 or the bottom surface of the water case 6 when moving backward. Installed.

  On the other hand, the bellows cover member 9 covers the upper part of the processing feed means 5 on the upstream side with respect to the chuck table 2 and is configured to be stretchable as is well known by a material such as cloth, and one end on the side of the chuck table 2 is The chuck table support base 21 is connected to the chuck table support base 21 through a waterproof cover 81 so as to move integrally with the chuck table support base 21, and the other end on the upstream side is connected to a fixed portion such as an inner wall of the water case 6. The bellows cover member 9 is also disposed so as to hang down on the drainage channel 62 and cover the opening 61 along the outer wall of the fixed plate 63. Further, the bellows cover member 9 is also slidable on the rail 64 along the X-axis direction. As a result, the bellows cover member 9 expands when the chuck table 2 moves downstream, and the bellows cover member 9 expands and contracts when the chuck table 2 moves backward upstream. .

  Further, an end material receiving plate 86 is provided between the waterproof cover 81 (chuck table support base 21) and the chuck table 2. The end material receiving plate 86 is formed in a dust removing shape having an opening 86a narrowed in a tapered shape at one end, and is arranged so that the opening 86a side overlaps the downstream plate-like cover member 8 by a predetermined dimension. It is installed.

  In such a configuration, when the workpiece 10 is cut, the cutting blade 31 that rotates at a high speed with respect to the workpiece 10 held on the chuck table 2 is indexed and cut by the index feed means and the cutting feed means. Positioning on a desired street, the chuck table 2 is moved forward in the X-axis direction by the processing feed means 5. In this cutting, the cutting blade 31 and the workpiece 10 are performed while supplying cutting water from the spray nozzle 33 of the cutting water supply means 34. At the time of this forward movement, the plate-like cover member 8 does not expand and contract, and the sliding portion 84 is guided by the rail 64 and moves together with the chuck table 2 toward the end material box 7 in the X-axis direction, and the bellows. The member 9 extends and is guided by the rail 64 while moving forward in the X-axis direction integrally with the chuck table 2, and maintains the opening 61 in a closed state with respect to the processing feed unit 5.

  When the cutting of the desired street is completed, the cutting blade 31 is retracted in the Z-axis direction, and the chuck table 2 is moved back in the X-axis direction by the processing feed means 5 while stopping the supply of the cutting water. At the time of the backward movement, the plate-like cover member 8 does not expand and contract, and the sliding portion 84 is guided by the rail 64 and moves backward in the X-axis direction integrally with the chuck table 2. , The chuck table 2 and the chuck table 2 move together in the X-axis direction to maintain the opening 61 in a closed state with respect to the processing feed means 5. Thereafter, the cutting blade 31 that rotates at a high speed with respect to the workpiece 10 is again positioned at the next desired street of the workpiece 10 by the index feed means and the cutting feed means, and the chuck table 2 is moved to the X by the work feed means 5. The cutting operation is performed by moving forward in the axial direction. Hereinafter, such an operation is repeated to cut all the streets of the workpiece 10.

  Here, at the time of the cutting process in which the chuck table 2 moves forward, the cutting water is scattered mainly to the plate-like cover member 8 side located on the downstream side by the rotation of the cutting blade 31. Therefore, a relatively large cutting waste such as end material generated during cutting of the end material portion such as the ear portion where the chip is not formed is also a plate-like shape positioned on the downstream side in the reciprocating direction of the chuck table 2. It scatters toward the cover member 8 side. The plate-like cover member 8 on which such relatively large cutting waste is scattered is formed of metal or the like and has sufficient strength, so that it is difficult to damage even if relatively large cutting waste is scattered. And since it reciprocates integrally with the chuck table 2 and always covers the opening 61 on the downstream side of the chuck table 2, the waterproof function for the processing feed means 5 can be surely exhibited. The opening 61 on the upstream side of the chuck table 2 is always covered with the bellows cover member 9, so that the waterproof function for the processing feeding means 5 can be surely exhibited. Since the bellows cover member 9 is located on the upstream side where the cutting water does not scatter (or hardly exists) due to the rotation of the cutting blade 31, it does not receive the scattering of relatively large cutting waste.

  Further, the cutting water and cutting waste scattered toward the downstream side on the chuck table 2 at the time of the cutting process are dust-collected as shown by arrows on the end material receiving plate 86 and the plate-like cover member 8 in FIG. The end material receiving plate 86 suppresses the scattering state and reliably guides it onto the overlapped plate-like cover member 8, thereby preventing the scattering of cutting water and cutting waste or improving the recovery efficiency. Useful. And since the plate-shaped cover member 8 itself also has the inclined surface 82 inclined toward the drainage channel 62 on both sides from the center, the cutting water and the cutting waste scattered on the plate-shaped cover member 8 are on the plate-shaped cover member 8. It can be made easy to flow down on the drainage channels 62 on both sides without staying at the center. The cutting water and cutting waste that have flowed down on the bottom surface of the drainage channel 62 and the water case 6 move downstream while the brush member 85 that follows the plate-like cover member 8 that moves integrally with the chuck table 2 slides. Therefore, it is swept out so that no residue is generated on the drainage channel 62. At this time, since the drainage channel 62 communicates with the upper surface side of the end material box 7, the cutting water and the cutting waste swept out by the sliding contact of the brush member 85 are reliably collected in the end material box 7. In the backward movement, the brush member 85 retreats to a retreat position where it does not slide on the bottom surface of the drainage channel 62 or the water case 6 as shown in FIG. Never pull back to the side.

  Further, since the plate-like cover member 8 that moves integrally with the chuck table 2 does not expand and contract like the bellows cover member 9, it can contribute to an increase in the length in the X-axis direction. Since the upper end of the existing end material box 7 is used as a cutting device, etc., and the free end of the plate-like cover member 8 reciprocates over the end material box 7, it is the same as the conventional double-sided bellows mechanism method. It can be realized with the device size.

  The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention. For example, although the present embodiment has been described as an application example to a facing dual-cut type cutting device, it can be applied to a single-cut type cutting device including one cutting blade as well.

  In this embodiment, the brush member 86 is used to sweep the cutting water and cutting waste on the drainage channel 61 to the end material box 7 side, but the drainage channel 61 itself is directed to the end material box 7 side. It may be provided with an inclination, or a conveying member such as a belt conveyor may be provided on the drainage channel 61 so that cutting water and cutting waste on the drainage channel 61 are collected on the end material box 7 side.

It is an appearance perspective view showing an example of a cutting device of an embodiment of the invention. It is a schematic perspective view which shows the mode at the time of forward movements, such as a chuck table. It is a schematic perspective view which shows the mode at the time of backward movements, such as a chuck table. It is a disassembled perspective view which expands and shows the (circle) location in FIG. It is a schematic side view which shows structures, such as a process feed means.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cutting device 2 Chuck table 3 Cutting means 5 Processing feed means 6 Water case 7 End material box 8 Plate-shaped cover member 9 Bellows cover member 10 Workpiece 21 Chuck table support base 31 Cutting blade 32 Spindle 61 Opening 62 Drainage channel 63 Fixed plate 64 Rail 84 Sliding part 86 End material receiving plate 86a Opening

Claims (3)

A chuck table for holding a workpiece, a cutting means having a spindle rotatably mounted with a cutting blade for cutting the workpiece held on the chuck table while supplying cutting water, and an axis of the spindle A cutting device comprising: a processing feed means for processing and feeding the chuck table in a direction orthogonal to the direction; and drainage channels disposed on both sides along the processing feed direction of the chuck table,
A plate-like cover member that covers an upper portion of the processing feed means on the downstream side, which is located in a direction in which cutting water is scattered by rotation of the cutting blade with respect to the chuck table;
A bellows cover member that covers an upper portion of the processing feed means on the upstream side;
A chuck table support base arranged to be drivable in the machining feed direction by the machining feed means and supporting the chuck table;
A water case having an opening in a range in which the chuck table is moved by driving the processing feed means so as to cover the processing feed means, and having the drainage channels on both sides along the processing feed direction;
A fixing plate that surrounds the periphery of the opening in the water case, and has a rail on the outer wall for sliding the plate-like cover member and the bellows mechanism in the machining feed direction;
An end material receiving plate that is formed in a dust removal shape having an opening at one end, and is provided on the chuck table support base by overlapping the opening side on the plate-like cover member;
Equipped with a,
Both sides of the plate-like cover member and the bellows mechanism are arranged so as to hang along the outer wall of the fixed plate and cover the opening,
The plate-shaped cover member has one end connected to the chuck table support base, the other end being a free end, and a sliding portion that slides on the rail of the fixed plate on the inner surface. Cutting equipment. The cutting apparatus according to claim 1 , wherein the plate-like cover member is inclined so as to become lower from the center in the processing feed direction toward the drainage channels on both sides. An end material box that is disposed in communication with the drainage channel at the most downstream position in the processing feed direction and includes an end material box that collects the end material generated by processing the workpiece;
The plate-like cover member is characterized in that when the cutting means reciprocates in the process feed direction by the process feed means, the free end reciprocates in the process feed direction on the upper surface of the end material box. Item 3. The cutting device according to Item 1 or 2 .

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