JP6746208B2 - Cutting equipment - Google Patents

Description

The present invention relates to a cutting device for cutting a plate-shaped workpiece.

When cutting a plate-shaped workpiece represented by a semiconductor wafer, for example, a cutting device including an annular cutting blade is used. By moving the cutting blade and the workpiece relatively while cutting the cutting blade rotated at a high speed with respect to the workpiece, the workpiece can be cut along the path of this movement.

By the way, in the above-described cutting of the workpiece, a cutting fluid such as water is usually supplied to a processing point where the cutting blade and the workpiece come into contact with each other. Thereby, the workpiece and the cutting blade can be cooled, washed and lubricated to maintain the cutting environment. On the other hand, when the workpiece is cut while supplying the cutting liquid, the cutting liquid containing cutting chips generated by the cutting tends to be scattered around as the cutting blade rotates.

When the scattered cutting fluid adheres to the work piece, the cutting waste contained in the cutting fluid adheres and cannot be easily removed. Therefore, a cutting device has been proposed that includes a splash water guide unit and an exhaust unit for discharging the cutting fluid that scatters as the cutting blade rotates (see, for example, Patent Document 1).

JP, 2007-88157, A

However, in the above-described cutting device, although the atomized cutting fluid can be easily discharged by the exhaust means, the cutting fluid kept in the liquid state cannot always be discharged appropriately. Further, most of the cutting fluid guided by the spattering water guiding means is discharged onto the bellows-shaped cover for protecting the movable part, and thus the adhered cutting waste loses the flexibility of the cover, and this cover There was also a problem that it was easily damaged.

The present invention has been made in view of such problems, and an object of the present invention is to provide a new cutting device capable of effectively discharging cutting fluid.

According to one aspect of the present invention, a holding table having a holding surface for holding a workpiece, a cutting means having a cutting blade for cutting the workpiece held by the holding table, the cutting blade and the workpiece. Cutting fluid supply means for supplying cutting fluid to a machining point where an object contacts, machining feed means for relatively moving the holding table and the cutting means in the machining feed direction, and the machining feed in the machining feed direction Adjacent to the bellows-shaped cover for covering the means, a recovery port adjacent to the cutting blade, and a recovery port for recovering the cutting fluid scattered with the rotation of the cutting blade on the side where the cutting fluid scatters at the processing point. Cutting fluid discharge means including a guide plate for guiding the scattered cutting fluid and a discharge path for discharging the cutting fluid guided by the guide plate to the outside of the cover, and the holding surface of the holding table. A cutting device provided below the cover and above the cover, for collecting cutting fluid not discharged in the discharge passage of the cutting fluid discharge means on the side where the cutting fluid at the machining point is scattered, Provided.

A cutting device according to an aspect of the present invention is provided with a cutting liquid discharging unit that collects and discharges cutting liquid that scatters with the rotation of a cutting blade, and is provided below a holding surface of a holding table and above a cover. Since the cutting fluid collecting unit that collects the cutting fluid that is not discharged by the fluid discharging unit is provided, it is possible to effectively drain the cutting fluid and reduce the possibility that cutting waste adheres to the workpiece or the cover.

It is a perspective view which shows typically the external appearance of a cutting device. It is a side view which shows the structure of the periphery of a cutting unit typically. FIG. 3(A) is a perspective view schematically showing a part of the cutting fluid discharge unit, and FIG. 3(B) is a front view of a part of the cutting fluid discharge unit seen from the cutting blade side. It is a top view which shows typically the structure of the periphery of a holding table. It is a partial cross-sectional side view which shows the mode that a workpiece is cut.

An embodiment according to an aspect of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view schematically showing the outer appearance of a cutting device and the like according to this embodiment. As shown in FIG. 1, the cutting device 2 includes a base 4 that supports each structure.

A rectangular opening 4a that is long in the X-axis direction (front-back direction, processing feed direction) is formed on the upper surface of the base 4. Inside the opening 4a, an X-axis moving table 6, an X-axis moving mechanism (processing feed means) 8 for moving the X-axis moving table 6 in the X-axis direction (see FIG. 2 and the like), and an X-axis moving mechanism 8 are provided. A bellows-shaped cover 10 is provided to cover the.

At a position adjacent to the X-axis moving table 6 and the cover 10, a water case 12 for temporarily storing a cutting liquid (waste liquid) such as water used for cutting is arranged. The used cutting fluid stored in the water case 12 is discharged to the outside of the cutting device 2 through, for example, a discharge port 12a (see FIG. 4) and a drain (not shown).

The X-axis moving mechanism 8 includes a pair of X-axis guide rails (not shown) parallel to the X-axis direction, and the X-axis moving table 6 is slidably attached to the X-axis guide rails. A nut portion 6a (see FIG. 2 and the like) is provided on the lower surface side of the X-axis moving table 6, and an X-axis ball screw 14 parallel to the X-axis guide rail is screwed into the nut portion 6a. ..

An X-axis pulse motor (not shown) is connected to one end of the X-axis ball screw 14. By rotating the X-axis ball screw 14 with the X-axis pulse motor, the X-axis moving table 6 moves in the X-axis direction along the X-axis guide rail. A holding table (chuck table) 16 for holding the workpiece 11 is provided on the X-axis moving table 6.

The workpiece 11 is, for example, a disk-shaped wafer made of a material such as silicon, silicon carbide, or sapphire, and the surface side thereof is divided into a central device region and an outer peripheral surplus region surrounding the device region. The device region is further divided into a plurality of regions by processing lines (planned division lines, streets) arranged in a grid pattern, and devices such as ICs and LEDs are formed in each region.

For example, a tape serving as a protection member is attached to the back surface side of the workpiece 11. When using a tape having a diameter larger than that of the workpiece 11, an annular frame can be fixed to the outer peripheral portion of the tape. There are no restrictions on the material, shape, structure, etc. of the workpiece 11. For example, the substrate 11 made of another material such as semiconductor, ceramics, metal, resin may be used as the workpiece 11.

The holding table 16 is connected to a rotary drive source (not shown) such as a motor, and rotates about a rotation axis substantially parallel to the Z-axis direction (vertical direction, height direction). If the X-axis moving table 6 is moved in the X-axis direction by the X-axis moving mechanism 8 described above, the holding table 16 is also moved in the X-axis direction.

The upper surface of the holding table 16 serves as a holding surface 16a that sucks and holds the workpiece 11. The holding surface 16a is connected to a suction source (not shown) through a flow path (not shown) formed inside the holding table 16.

A gate-shaped support structure 20 that supports a cutting unit (cutting means) 18 for cutting the workpiece 11 is disposed near the opening 4a. A cutting unit moving mechanism 22 for moving the cutting unit 18 in the Y-axis direction (horizontal direction, index feed direction) and the Z-axis direction is provided on the upper front surface of the support structure 20.

The cutting unit moving mechanism 22 includes a pair of Y-axis guide rails 24 arranged on the front surface of the support structure 20 and parallel to the Y-axis direction. A Y-axis moving plate 26 that constitutes the cutting unit moving mechanism 22 is slidably attached to the Y-axis guide rail 24.

A nut portion (not shown) is provided on the rear surface side (rear surface side) of the Y-axis moving plate 26, and a Y-axis ball screw 28 parallel to the Y-axis guide rail 24 is screwed into the nut portion. There is. A Y-axis pulse motor (not shown) is connected to one end of the Y-axis ball screw 28. When the Y-axis ball screw 28 is rotated by the Y-axis pulse motor, the Y-axis moving plate 26 moves in the Y-axis direction along the Y-axis guide rail 24.

A pair of Z-axis guide rails 30 parallel to the Z-axis direction are provided on the surface (front surface) of the Y-axis moving plate 26. A Z-axis moving plate 32 is slidably attached to the Z-axis guide rail 30.

A nut portion (not shown) is provided on the back surface side (rear surface side) of the Z-axis moving plate 32, and a Z-axis ball screw 34 parallel to the Z-axis guide rail 30 is screwed into the nut portion. There is. A Z-axis pulse motor 36 is connected to one end of the Z-axis ball screw 34. When the Z-axis ball screw 34 is rotated by the Z-axis pulse motor 36, the Z-axis moving plate 32 moves in the Z-axis direction along the Z-axis guide rail 30.

The cutting unit 18 is provided below the Z-axis moving plate 32. A camera 38 for picking up an image of the workpiece 11 or the like held by the holding table 16 is installed at a position adjacent to the cutting unit 18. The cutting unit 18 and the camera 38 are housed in the processing chamber 40 together with the holding table 16 and the like.

When the Y-axis moving plate 26 is moved in the Y-axis direction by the cutting unit moving mechanism 22 described above, the cutting unit 18 and the camera 38 also move in the Y-axis direction. If the Z-axis moving plate 32 is moved in the Z-axis direction by the cutting unit moving mechanism 22, the cutting unit 18 and the camera 38 also move in the Z-axis direction.

FIG. 2 is a side view schematically showing the structure around the cutting unit 18. As shown in FIG. 2, the cutting unit 18 includes an annular cutting blade 42 attached to one end of a spindle (not shown) extending in the Y-axis direction. A rotary drive source (not shown) such as a motor is connected to the other end of the spindle, and the cutting blade 42 is rotated by the force of the rotary drive source transmitted through the spindle.

The outer peripheral portion of the cutting blade 42 is generally covered by the blade cover 44 except for the lower end side. A nozzle for supplying cutting fluid such as water (cutting fluid supply means) to a position sandwiching the lower end side of the cutting blade 42 exposed from the blade cover 44 near a processing point where the workpiece 11 and the cutting blade 42 contact each other. ) 46 is provided.

On the rear side of the blade cover 44, a cutting fluid discharge unit (cutting fluid discharge means) 48 for discharging the cutting fluid scattered from the machining point to the outside as the cutting blade 42 rotates is arranged. 3A is a perspective view schematically showing a part of the cutting fluid discharge unit 48, and FIG. 3B is a front view of a part of the cutting fluid discharge unit 48 seen from the cutting blade 42 side. Is.

As shown in FIGS. 3A and 3B, the cutting fluid discharge unit 48 includes a cover member 50 for suppressing the scattering of the cutting fluid to the surroundings. The cover member 50 includes a pair of side plates 50a and 50b and an upper plate 50c that connects the upper ends of the side plates 50a and 50b. The inner space of the cover member 50 is connected to the outer space at the front end (recovery port) 50d, the lower end 50e, and the rear end 50f. In other words, the front end 50d side, the lower end 50e side, and the rear end 50f side of the cover member 50 are all open (not closed).

The front end 50d of the cover member 50 functions as a recovery port for recovering the cutting fluid scattered from the processing point. The front end 50d side of the cover member 50 is fixed to the rear side of the blade cover 44 (the side on which the cutting fluid scatters based on the processing point). On the side of the front end 50d of the cover member 50, the side plates 50a and 50b are cut out in an arc shape.

Inside the cover member 50, a guide plate 52 for guiding the cutting fluid scattered from the processing point is provided. The guide plate 52 is, for example, formed in a gutter shape by a first flat portion 52a and a second flat portion 52b that form a predetermined angle with each other, and is disposed adjacent to a front end 50d that serves as a cutting fluid recovery port. The angle formed by the first flat portion 52a and the second flat portion 52b is, for example, 100° to 130°, typically 120°.

The guide plate 52 is arranged at an angle of 20° to 40°, typically 30°, with respect to the horizontal direction (X-axis direction), and the cutting liquid scattered from the processing point is placed behind the cover member 50. Guide toward the end 50f. In addition, the first flat portion 52a and the second flat portion 52b are formed, for example, in a parallelogram shape, and project rearward in a central region connecting the first flat portion 52a and the second flat portion 52b. ..

In such a guide plate 52 that projects rearward, the cutting liquid is likely to collect in the projecting portion (hereinafter, projecting portion) due to the action of surface tension or the like. Therefore, by using the guide plate 52 projecting rearward, the cutting fluid scattered from the machining point is guided to the projecting portion (in the present embodiment, the central region) and comes into contact with the side plates 50a, 50b of the cover member 50 and the like. It can be difficult. That is, the cutting fluid scattered from the processing point can be appropriately guided toward the rear end 50f of the cover member 50.

Further, in the guide plate 52 according to the present embodiment, the first flat portion 52a and the second flat portion 52b form a predetermined angle, so that the central portion connecting the first flat portion 52a and the second flat portion 52b is formed. A lot of cutting fluid collects in the area. As a result, the momentum of the cutting fluid is less likely to decrease, and the cutting fluid scattered from the processing point can be more appropriately guided toward the rear end 50f of the cover member 50.

In the present embodiment, the guide plate 52 that projects rearward in the central region and has the first flat portion 52a and the second flat portion 52b form a predetermined angle is used. There is no limit. For example, it is possible to use a flat guide plate that projects rearward in the central region. Further, the guide plate 52 may be formed by bending one flat plate, or the guide plate 52 may be formed by connecting two flat plates.

The cutting fluid guided to the rear end 50f of the cover member 50 by the guide plate 52 flows into the discharge passage 54. FIG. 4 is a plan view schematically showing the structure around the holding table 16. The discharge path 54 is arranged behind the holding table 16 and above the bellows-shaped cover 10.

A discharge port 54a is formed at the bottom of the discharge path 54 that overlaps the water case 12 in a plan view. The cutting fluid flowing into the discharge passage 54 is discharged to the water case 12 outside the cover 10 through the discharge port 54a. The bottom of the discharge passage 54 may be inclined to promote discharge of the cutting fluid from the discharge port 54a. Further, the discharge port 54a may be formed at a position lower than the bottom of the discharge path 54.

On the other hand, the cutting fluid that has not been discharged through the discharge passage 54 of the cutting fluid discharge unit 48 described above is collected by a cutting fluid recovery tray (cutting fluid recovery means) 56 arranged below the holding table 16 (holding surface 16a). To be done. The cutting fluid recovery tray 56 is fixed to the upper surface of the X-axis moving table 6 on the holding table 16 side of the discharge path 54. That is, the cutting fluid recovery tray 56 is provided above the cover 10.

A discharge port 56a is formed at the bottom of the cutting fluid recovery tray 56 that overlaps with the water case 12 in a plan view. The cutting fluid collected by the cutting fluid recovery tray 56 is discharged to the water case 12 outside the cover 10 through the discharge port 56a. The bottom of the cutting fluid recovery tray 56 may be inclined to promote the discharge of the cutting fluid from the discharge port 56a. Further, the discharge port 56 a may be formed at a position lower than the bottom of the cutting fluid recovery tray 56.

FIG. 5 is a partial cross-sectional side view schematically showing how the workpiece 11 is cut. When the workpiece 11 is cut by the above-described cutting device 2, for example, the back surface side (tape) of the workpiece 11 is brought into contact with the holding surface 16a of the holding table 16 and the negative pressure of the suction source is applied. .. As a result, the workpiece 11 is sucked and held by the holding table 16 in a state where the surface side is exposed upward.

Next, the holding table 16 and the cutting unit 18 are relatively moved and rotated to align the position of the cutting blade 42 on the extension line of the planned processing line. After that, the holding table 16 is moved in the X-axis direction while rotating the cutting blade 42, so that the cutting blade 42 can be cut along the planned machining line of the workpiece 11.

When the cutting blade 42 is cut into the workpiece 11, the cutting liquid is supplied from the nozzle 46 to the vicinity of the processing point. A part of the cutting fluid A scatters rearward as the cutting blade 42 rotates and is collected on the front end (collection port) 50d side of the cover member 50. After that, the cutting fluid A is guided by the guide plate 52 and flows into the rear discharge passage 54 as shown in FIG. The cutting fluid A that has flowed into the discharge path 54 is discharged to the water case 12 outside the cover 10 through the discharge port 54a.

Another part of the cutting fluid B, which has not been discharged through the discharge passage 54 of the cutting fluid discharge unit 48, is collected by a cutting fluid recovery tray 56 arranged below the holding surface 16a, as shown in FIG. That is, the cutting fluid recovery tray 56 collects the cutting fluid B on the rear side of the holding table 16 (the side on which the cutting fluid scatters based on the processing point). The cutting fluid B collected by the cutting fluid collection tray 56 is discharged to the water case 12 outside the cover 10 through the discharge port 56a.

In the present embodiment, since the lower end 50e side of the cover member 50 is open, even when the lower end 50e of the cover member 50 is brought close to the workpiece 11, for example, as in the case of using the cover member whose lower end side is closed, The cutting liquid does not stay on the workpiece 11 due to the surface tension caused by the structure on the lower end side (for example, the lower plate). Therefore, the cutting fluid can be reliably collected by the cutting fluid collection tray 56.

As described above, the cutting device 2 according to the present embodiment is provided with a cutting liquid discharge unit (cutting liquid discharge means) 48 for collecting and discharging a part of the cutting liquid A scattered with the rotation of the cutting blade 42, and a holding unit. A cutting fluid recovery tray (cutting fluid recovery means) 56 provided below the holding surface 16a of the table 16 and above the cover 10 for recovering another part of the cutting fluid B which is not discharged by the cutting fluid discharge unit 48, Therefore, it is possible to effectively discharge the cutting fluids A and B and reduce the possibility that cutting waste adheres to the workpiece 11 or the cover 10.

It should be noted that the present invention is not limited to the description of the above embodiment and can be implemented with various modifications. For example, the outlet 12a of the water case 12 and the outlet 54a of the outlet 54 may be connected by a tube or the like. Similarly, the outlet 12a of the water case 12 and the outlet 56a of the cutting fluid recovery tray 56 can be connected by a tube or the like.

In addition, the structures, methods, and the like according to the above-described embodiments can be appropriately modified and implemented without departing from the scope of the object of the present invention.

2 Cutting device 4 Base 4a Opening 6 X-axis moving table 8 X-axis moving mechanism (processing feed means)
10 Cover 12 Water Case 12a Discharge Port 14 X-Axis Ball Screw 16 Holding Table (Chuck Table)
16a Holding surface 18 Cutting unit (cutting means)
20 Support Structure 22 Cutting Unit Moving Mechanism 24 Y Axis Guide Rail 26 Y Axis Moving Plate 28 Y Axis Ball Screw 30 Z Axis Guide Rail 32 Z Axis Moving Plate 34 Z Axis Ball Screw 36 Z Axis Pulse Motor 38 Camera 40 Machining Chamber 42 Cutting Blade 44 Blade cover 46 Nozzle (Cutting fluid supply means)
48 Cutting fluid discharge unit (Cutting fluid discharge means)
50 cover member 50a, 50b side plate 50c upper plate 50d front end (recovery port)
50e Lower end 50f Rear end 52 Guide plate 52a First flat part 52b Second flat part 54 Discharge path 54a Discharge port 56 Cutting fluid recovery tray (cutting fluid recovery means)
56a Discharge port 11 Work piece A, B Cutting fluid

Claims (1)

A holding table having a holding surface for holding a workpiece,
Cutting means having a cutting blade for cutting the workpiece held by the holding table;
Cutting fluid supply means for supplying a cutting fluid to a processing point where the cutting blade and the workpiece come into contact with each other,
Machining feed means for relatively moving the holding table and the cutting means in the machining feed direction,
A bellows-like cover for covering the processing feeding means in the processing feeding direction,
Adjacent to the cutting blade, a collection port for collecting the cutting fluid scattered with the rotation of the cutting blade on the side where the cutting fluid scatters at the processing point, and adjacent to the collection port, guide the scattered cutting fluid. Cutting fluid discharge means including a guide plate and a discharge path for discharging the cutting fluid guided by the guide plate to the outside of the cover;
Cutting fluid collecting means provided below the holding surface of the holding table and above the cover and for collecting cutting fluid not discharged through the discharge passage of the cutting fluid discharge means on the side where the cutting fluid at the machining point is scattered. And a cutting device.