JP6188411B2 - Cutting equipment - Google Patents

Description

  The present invention relates to a cutting apparatus for cutting a workpiece such as a wafer.

  Workpieces such as semiconductor wafers on which a plurality of devices such as IC and LSI are formed on the surface, resin substrates, various ceramic substrates, and glass substrates are divided into individual chips by a cutting device called a dicing machine, and the divided chips Is widely used in various electrical devices.

  This type of cutting apparatus generally cuts a workpiece by cutting a disk-shaped cutting blade rotated at a high speed into the workpiece. Cutting is performed while supplying cutting water such as water.

  The cutting water is supplied to the vicinity of the machining point mainly for the purpose of cooling because frictional heat generated by cutting causes wear or breakage of the cutting blade or chipping (chip) of the workpiece.

  In addition to cooling, the purpose of supplying the cutting water is to wash away the cutting waste from the processing point and to lubricate the processing point. The cutting water is supplied from various nozzles installed on the wheel cover that covers the upper half of the cutting blade, and is scattered backward in the rotation direction by the rotation of the cutting blade.

  A large amount of cutting waste is mixed in the scattered cutting water, and a cutting water guide mechanism for preventing the scattered cutting water from adhering to the workpiece has been proposed (for example, JP-A-4-74607). Gazette and JP 2007-88157 A).

JP-A-4-74607 JP 2007-88157 A Japanese Patent No. 510699

  However, since the cutting water guided to the rear away from the workpiece by the splash water guide mechanism maintains a liquid state, it must be completely discharged out of the apparatus by the exhaust means provided at the guide destination. I could n’t.

  Further, the guided cutting water may collide with the wall surface of the machining chamber of the cutting device and bounce off, and eventually adhere to the workpiece on the chuck table. When the scattered water is completely removed from the processing chamber by providing a suction means in the scattered water guide mechanism as disclosed in Patent Document 3, it is necessary to increase the number of suction means, which is very expensive. There was also a problem.

  The present invention has been made in view of these points, and an object of the present invention is to provide a cutting device capable of collecting cutting water supplied at the time of cutting a workpiece with a simple mechanism and discharging it through a drain. It is to be.

According to the present invention, a chuck table that holds a workpiece, a spindle that is rotationally driven, and a cutting blade that is attached to the tip of the spindle, and the workpiece held on the chuck table by the cutting blade, Cutting means for cutting, cutting water supply means for supplying cutting water to the cutting blade and workpiece near the processing point, and cutting for moving the chuck table in a cutting feed direction orthogonal to the axial direction of the spindle A cutting device comprising: a feeding means; and an indexing feeding means for indexing and feeding the cutting means in the axial direction of the spindle, and is disposed in the cutting means and is scattered due to rotation of the cutting blade. A cutting water guide pipe for guiding cutting water from the vicinity of the cutting blade to the downstream side in the direction in which the cutting water scatters; and a downstream side in the direction in which the cutting water scatters Covering the upper Kkuteburu, emissions and receiving port for receiving the cutting water discharged from the flight sprinkle guide pipe, cutting water to a pair of drainage arranged on the side of the cutting feed means receiving the cutting water accepted A cutting water reservoir having a pair of discharge ports, and a machining chamber for accommodating the chuck table, the cutting blade, the splashed water guide pipe, and the cutting water reservoir, and the cutting water reservoir. Is located at a position higher than the upper end of the workpiece held on the chuck table and lower than the outlet of the splash water guide pipe, the cutting water reservoir has a side wall and a bottom, and the bottom is The bottom portion is inclined so as to become lower toward the pair of discharge ports, and the end portion of the bottom portion on the opposite side to the cutting feed direction is in contact with the wall portion of the processing chamber. Cutting equipment is provided .

  Preferably, the discharge port of the scattered water guide pipe is positioned downstream of the receiving port of the cutting water reservoir in the direction in which the cutting water is scattered.

  According to the present invention, since the cutting water reservoir is provided above the chuck table on the downstream side in the direction in which the cutting water scatters, the scattered cutting water in which cutting waste is easily mixed with the simple structure adheres to the workpiece. Can be prevented. Moreover, since the inclination which goes to a drain outlet is provided in the bottom part of the cutting water reservoir part, a large amount of cutting water received by the cutting water reservoir part can be discharged | emitted rapidly.

It is a perspective view of the cutting device concerning the embodiment of the present invention. It is the partial cross section side view seen from the arrow A direction of FIG. It is the partial cross section side view seen from the arrow B direction of FIG. It is a partial cross section side view of the cutting device of 2nd Embodiment similar to FIG.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, a perspective view of a cutting device 2 according to an embodiment of the present invention is shown. Reference numeral 4 denotes a base of the cutting apparatus 2, and a processing chamber 6 is mounted on the base 4.

  A part of the processing chamber 6 is formed of a transparent resin such as polycarbonate. A chuck table 8 is disposed on the base 4 in the processing chamber 6 so as to be rotatable and reciprocally movable in the X-axis direction by a cutting feed mechanism (cutting feed means) (not shown). Reference numeral 10 denotes a bellows for protecting the cutting feed mechanism.

  A gate-shaped column 12 is erected on the base 4. A pair of guide rails 14 extending in the Y-axis direction are fixed to the column 12. On the column 12, a Y-axis moving block 16 is mounted so as to be movable in the Y-axis direction along the guide rail 14 by an index feed mechanism (index feed means) 20 comprising a ball screw 18 and a pulse motor (not shown). .

  A pair of guide rails 22 extending in the Z-axis direction are fixed to the Y-axis moving block 16. On the Y-axis moving block 16, a Z-axis moving block 24 is mounted on a guide rail 22 by a Z-axis moving mechanism 30 including a ball screw 26 and a pulse motor 28 so as to be movable in the Z-axis direction.

  A cutting unit (cutting means) 32 is attached to the Z-axis moving block 24. A spindle housing (not shown) is rotatably accommodated in a spindle housing 33 (see FIG. 3) of the cutting unit 32, and a cutting blade 34 is attached to the tip of the spindle. A substantially upper half of the cutting blade 34 is covered with a wheel cover 36. At the time of cutting, the cutting blade 34 rotates clockwise in FIG.

  As best shown in FIG. 2, connecting pipes 50 and 52 are attached to the wheel cover 36, and these connecting pipes 50 and 52 are connected to a cutting water supply source via hoses not shown. Yes.

  The cutting water supplied through the connection pipe 50 is supplied from the cutting water nozzle toward the cutting edge of the cutting blade 34, and the cutting water supplied through the connection pipe 52 is disposed on both sides of the cutting blade 34. It is supplied from the blade cooler nozzle 54 toward the processing point. The connecting pipes 50 and 52, the cutting water nozzle, the blade cooler nozzle 54, and a cutting water supply source (not shown) constitute cutting water supply means.

  The wheel cover 36 extends to the downstream side in the direction in which the cutting water supplied by the cutting water supply means scatters (the front side in the cutting feed direction indicated by the arrow X1), and the cutting water supplied to the processing point. 2 is attached to the splashed water guide pipe 38.

  A cutting water reservoir 40 is disposed below the discharge port 38 a of the splash water guide pipe 38. The cutting water reservoir 40 has a bottom 40a, a side wall (cutting water receiving port) 40b, and a discharge port 41 (see FIG. 3) for discharging the cutting water accumulated in the cutting water reservoir 40 to the drainage channel. .

  The cutting water reservoir 40 is positioned higher than the upper end of the workpiece 11 held on the holding surface 8 a of the chuck table 8 and lower than the discharge port 38 a of the cutting water guide pipe 38. As apparent from FIG. 2, the discharge port 38 a of the scattered water guide pipe 38 is positioned downstream of the cutting water receiving port 40 b of the cutting water reservoir 40 in the direction in which the cutting water is scattered.

  As shown in FIG. 3, the bottom 40a of the cutting water reservoir 40 is inclined so as to gradually become lower toward the drain ports 41 formed on both sides in the Y-axis direction. As described above, since the bottom 40a of the cutting water reservoir 40 is inclined so as to become lower toward both sides, the cutting water received in the cutting water reservoir 40 from the scattered water guide pipe 38 is quickly discharged downward. Can do.

  Reference numeral 42 denotes a water case for storing the cutting water supplied to the processing point, which extends inside the processing chamber 6 so as to store the cutting water reservoir 40 along the X-axis direction. As shown in FIG. 3, drainage channels 44 and 44 a extending in the X-axis direction and inclined drainage channels 44 b extending in the Y-axis direction are formed in the water case 42.

  The drainage channel 44 a is inclined so as to be lowered toward the front side, and the cutting water discharged from the discharge port 41 of the cutting water reservoir 40 flows through the drainage channel 44 and the inclined drainage channels 44 a and 44 b and is discharged from the drain 56. Is done.

  Exhaust ports 45 and 45a are formed on both sides of the processing chamber 6 in the Y-axis direction, and exhaust pipes 46 and 46a are connected to the exhaust ports 44 and 45a, respectively. Reference numeral 48 shown in FIG. 2 denotes a bellows extending in the Y-axis direction, and this bellows prevents cutting water from splashing on the ball screw 18 of the index feeding mechanism 20. In FIG. 1, the bellows 48 is omitted.

  Referring to FIG. 4, a partial cross-sectional side view of a cutting device having a splash water guide pipe according to a second embodiment of the present invention is shown. The scattered water guide pipe 58 of this embodiment is attached to the wheel cover 36 so that the discharge port 58a is inclined upward.

  Thus, by providing an angle to the scattered water guide pipe 58, the scattered water guide pipe 58 can be made shorter than the scattered water guide pipe 38 of the first embodiment shown in FIG. The arrow A is the direction in which the cutting water is scattered. Other configurations of the present embodiment are the same as those of the first embodiment shown in FIG.

2 Cutting device 6 Processing chamber 8 Chuck table 16 Y-axis moving block 20 Index feed mechanism 24 Z-axis moving block 30 Z-axis moving mechanism 32 Cutting unit 34 Cutting blade 36 Wheel cover 38 Scattered water guide pipe 40 Cutting water reservoir 40a Bottom 40b Side wall (splash water receiving port)
42 Water case 44, 44a, 44b Drain channel 50, 52 Connection pipe 54 Blade cooler nozzle

Claims (2)

A cutting means that includes a chuck table that holds a workpiece, a spindle that is driven to rotate, and a cutting blade that is attached to the tip of the spindle, and that cuts the workpiece held on the chuck table by the cutting blade. Cutting water supply means for supplying cutting water to the cutting blade and workpiece near the processing point; cutting feed means for moving the chuck table in a cutting feed direction perpendicular to the axial direction of the spindle; An indexing feeding means for indexing and feeding the cutting means in the axial direction of the spindle,
A splashing water guide pipe that is disposed in the cutting means and guides the cutting water that scatters due to the rotation of the cutting blade from the vicinity of the cutting blade to the downstream side in the direction in which the cutting water scatters;
The upper side of the chuck table is covered on the downstream side in the direction in which the cutting water scatters, and a receiving port for receiving the cutting water discharged from the scattering water guide pipe and a side of the cutting feed means for receiving the received cutting water. A cutting water reservoir having a pair of outlets for discharging cutting water to the pair of disposed drainage channels;
A processing chamber for accommodating the chuck table, the cutting blade, the scattered water guide pipe, and the cutting water reservoir , and
The cutting water reservoir is positioned higher than the upper end of the workpiece held on the chuck table and lower than the outlet of the splash water guide pipe,
The cutting water reservoir portion has a side wall and a bottom portion, the bottom portion is inclined so as to become lower from the center toward the pair of discharge ports, and the end portion of the bottom portion on the opposite side to the receiving port is in the cutting feed direction. A cutting apparatus which is in contact with a wall of the processing chamber .   2. The cutting apparatus according to claim 1, wherein a discharge port of the scattered water guide pipe is positioned downstream of the receiving port of the cutting water reservoir in the direction in which the cutting water is scattered.

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