JP2023088515A - Cutting device - Google Patents

Abstract

To appropriately perform gas-liquid separation even when an amount of mist of cutting waste liquid is increased.SOLUTION: A cutting device 1 is such that a cutting mechanism 6 comprises a nozzle 66 for supplying cutting water to a region for cutting a workpiece, and a unit 7 arranged adjacently to a blade 63 so as to receive cutting waste liquid mist discharged due to the rotation of the blade 63, and performing gas-liquid separation; the gas-liquid separation unit 7 of a box shape includes a mist entrance port 76 of a front plate 72 to be at a mist discharge side from the cutting region, an exhaust port 700 of an upper plate 70, a drain port 710 of a lower plate 71, and a plurality of strip-shaped guide plates 77 having one ends connected to a first side plate 74 and the other ends connected to a second side plate 75, and also having gaps 770 in a circular arc shape from the entrance port 76 to the exhaust port 700; mist L2 entering from the entrance port 76 abuts on the guide plates 77 and is guided to the exhaust port 700; water droplets L4 are generated from the mist L2 by the guide plates 77 and subjected to gas-liquid separation; and the water droplets L4 are passed through the gaps 770, and drained from the drain port 710, and gas L3 is exhausted from the exhaust port 700.SELECTED DRAWING: Figure 2

Description

The present invention relates to a cutting apparatus for cutting workpieces such as semiconductor wafers.

The cutting apparatus disclosed in Patent Document 1 includes a gas-liquid separation unit that separates the mist of the cutting waste liquid into gas and liquid.

JP-A-2006-237206

However, when the amount of cutting water supplied to the cutting apparatus is increased, the amount of mist increases and the mist cannot be separated into gas and liquid.
Therefore, in the cutting apparatus, even if the amount of mist increases, there is a problem of properly separating the mist into gas and liquid.

The present invention for solving the above-mentioned problems comprises a chuck table for holding a workpiece, a cutting mechanism for rotating a cutting blade to cut the workpiece held on the chuck table, the chuck table and the cutting mechanism. and a cutting feed mechanism for relatively moving in the cutting feed direction, the cutting mechanism comprising a spindle for mounting the cutting blade on the tip, and a spindle housing for rotatably supporting the spindle. a blade cover disposed on the spindle housing and covering the cutting edge of the cutting blade; a cutting water nozzle for supplying cutting water to a cutting area where the cutting blade cuts the workpiece; a gas-liquid separation unit arranged next to the cutting blade so as to receive the mist of the cutting waste liquid, and separates the mist into gas and liquid, the gas-liquid separation unit comprising an upper plate and a lower plate; a front plate connecting the upper plate and the lower plate; a rear plate connecting the upper plate and the lower plate and facing the front plate; and the upper plate, the lower plate and the front plate. The front plate is formed into a box shape by a first side plate and a second side plate connected to and facing the rear plate, and serves as a side on which the mist of the cutting waste fluid is discharged from the cutting area by the rotation of the cutting blade. An entry port opened in the plate to allow the mist to enter, an exhaust port formed in the upper plate, a drain port formed in the lower plate, and a strip-shaped member having one end connected to the first side plate and the other end connected to the first side plate. a plurality of guide plates connected to the second side plate and arranged with a gap from each other so as to form an arc shape from the inlet toward the exhaust port, wherein the mist entering from the inlet hits the plurality of guide plates and is guided to the exhaust port, generates water droplets from the mist by hitting the guide plates, separates the mist into gas and liquid, and allows the water droplets to pass through the gap to the drain port and the gas is exhausted from the exhaust port.

The cutting apparatus according to the present invention includes a gas-liquid separation unit that raises the mist and drops the separated liquid and discharges it from the drain port, so that only the gas separated from the mist is discharged from the exhaust port. It is possible to reduce the suction force required for sucking air from inside the separation unit compared to the conventional one. In addition, it is possible to prevent a situation in which the exhaust source that generates this suction force absorbs the mist and is damaged. Further, it is possible to separate gas and liquid from a larger amount of cutting waste liquid mist than conventionally. Further, by changing the angle and the number of guide plates according to the amount of mist discharged, it is possible to perform gas-liquid separation in an optimum state.

It is a perspective view which shows an example of a cutting device. FIG. 4 is an explanatory diagram illustrating a case where the gas-liquid separation unit attached to the blade cover is viewed from the side; It is the perspective view which looked at the gas-liquid separation unit from diagonally upper part by the side of a front plate. It is the perspective view which looked at the gas-liquid separation unit from diagonally upper part by the side of a rear plate.

A cutting device 1 according to the present invention shown in FIG. 1 is a device capable of cutting a workpiece 90 held on a chuck table 30 by a cutting mechanism 6 having a rotating cutting blade 63 . Note that the cutting device 1 is not limited to the example of FIG. 1, and may be of a type capable of dual cutting (biaxial simultaneous cutting) of the workpiece 90 .

A circular workpiece 90 shown in FIG. 1 is, for example, a silicon wafer, and a plurality of planned division lines 901 are set on a surface 900 of the workpiece 90 so as to be orthogonal to each other. A device 902 is formed in each of the lattice-shaped regions partitioned by the planned division lines 901 . In addition, the workpiece 90 is not limited to a silicon wafer, and may be made of gallium arsenide, sapphire, gallium nitride, resin, ceramics, silicon carbide, etc. other than silicon, or may be a rectangular package substrate. may be

A dicing tape 91 having a diameter larger than that of the workpiece 90 is attached to the back surface 903 of the workpiece 90 , and the outer peripheral portion of the adhesive surface of the dicing tape 91 is attached to the annular frame 92 . It's becoming The work piece 90 is supported by the annular frame 92 via the dicing tape 91 to form a work set 9 that can be handled by the annular frame 92 .

A cutting feed mechanism 13 for relatively moving the chuck table 30 and the cutting mechanism 6 in the cutting feed direction (X-axis direction) is arranged on the base 10 of the cutting apparatus 1 shown in FIG. The cutting feed mechanism 13 includes a ball screw 130 having an axis in the X-axis direction, a pair of guide rails 131 arranged parallel to the ball screw 130, a motor 132 for rotating the ball screw 130, and a nut inside the ball screw 130. and a movable plate 133 which is screwed into the guide rail 131 and whose bottom portion is in sliding contact with the guide rail 131 . When the motor 132 rotates the ball screw 130, the movable plate 133 is guided by the guide rail 131 and moves in the X-axis direction, and is disposed on the movable plate 133 to attract and hold the workpiece 90. The chuck table 30 is cut and fed in the X-axis direction as the movable plate 133 moves.

The chuck table 30 has, for example, a circular outer shape in plan view, and sucks and holds the workpiece 90 on a flat holding surface 302 which is made of a porous member or the like and communicates with a suction source (not shown). Further, around the chuck table 30, four fixing clamps 303 for clamping and fixing the annular frame 92 are equally spaced in the circumferential direction. The chuck table 30 is rotatable about a rotation axis in the Z-axis direction (vertical direction) by a rotation unit 32 disposed below.

A portal column 11 is erected on the rear side (−X direction side) of the base 10 so as to straddle the movement path of the chuck table 30 . An indexing feed mechanism 15 for reciprocating the cutting mechanism 6 in the Y-axis direction (indexing feed direction) perpendicular to the X-axis direction in the horizontal plane is provided on the front surface of the portal column 11 .

The indexing feed mechanism 15 includes, for example, a ball screw 150 having an axial center in the Y-axis direction, a pair of guide rails 151 arranged parallel to the ball screw 150, a motor 152 connected to one end of the ball screw 150, and an internal A movable plate 153 having a nut screwed onto the ball screw 150 and having a side portion in sliding contact with the guide rail 151 is provided. When the motor 152 rotates the ball screw 150, the movable plate 153 is guided by the guide rail 151 and moved in the Y-axis direction, and is arranged on the movable plate 153 via the feed mechanism 17. The cutting mechanism 6 is indexed and fed in the Y-axis direction.

The cutting feed mechanism 17 can move the cutting mechanism 6 up and down in the Z-axis direction. and a support member 173 which supports the cutting mechanism 6, has an internal nut screwed onto the ball screw 170, and has a side portion in sliding contact with the guide rail 171. As shown in FIG. When the motor 172 rotates the ball screw 170, the support member 173 is guided by the pair of guide rails 171 to move in the Z-axis direction, and accordingly the cutting mechanism 6 is cut and fed in the Z-axis direction.

The cutting mechanism 6 includes a spindle 60 whose axial direction is the Y-axis direction, a spindle housing 61 whose upper surface is fixed to the lower end side of the support member 173 and rotatably supports the spindle 60, and a motor (not shown) that rotates the spindle 60. , a circular cutting blade 63 attached to the tip of the spindle 60, a blade cover 65 arranged in the spindle housing 61 and covering the cutting edge of the cutting blade 63, and a cutting area where the cutting blade 63 cuts the workpiece 90 (workpiece 90). A cutting water nozzle 66 that supplies cutting water to the contact portion between the workpiece 90 and the cutting blade 63, and in this embodiment, it is arranged in the blade cover 65 and receives the mist of cutting waste discharged by the rotation of the cutting blade 63. A gas-liquid separation unit 7 is provided for separating the mist into a gas L3 and a liquid L4.

An alignment unit 64 is arranged on the side surface of the spindle housing 61 for detecting a planned dividing line 901 to be cut on the workpiece 90 held on the chuck table 30 . The alignment unit 64 can detect the coordinate position of the planned division line 901 by performing image processing such as pattern matching based on the captured image acquired by the camera. The alignment unit 64 and the cutting mechanism 6 are integrated, and move together in the Y-axis direction and the Z-axis direction.

The blade cover 65 shown in FIGS. 1 and 2 has a substantially circular opening in its central region, and the cutting blade 63 attached to the tip side of the spindle 60 is accommodated in the substantially circular opening. In this embodiment, the blade cover 65 is detachably attached to the front surface of the substantially rectangular parallelepiped spindle housing 61 whose longitudinal direction is the Y-axis direction.
As shown in FIG. 2, an optical detection sensor 659 for detecting the state of the cutting blade 63 is arranged in the center of the blade cover 65, for example.

As shown in FIG. 2, a cooling water nozzle support block 650 is attached to the side surface of the blade cover 65 on the -X direction side, and the cooling water nozzle support block 650 is substantially L-shaped when viewed from the Y direction side. support a pair of cooling water nozzles 68 (only one shown). A pair of cooling water nozzles 68 extend parallel to each other in the X-axis direction so as to sandwich the lower portion of the cutting blade 63 from both sides in the blade thickness direction (Y-axis direction). The upper end side of each of the pair of cooling water nozzles 68 communicates with a water supply source 69 such as a pump capable of delivering pure water or the like via a pipe or the like (not shown). A pair of cooling water nozzles 68 has a plurality of slits on the inner surface facing the side surface of the cutting blade 63, and the cooling water jetted from the slits can cool the cutting blade 63 during cutting. The cooling water nozzle support block 650 is attached to the blade cover 65 by means of bolts 652 whose position can be changed vertically in long holes 651 of the blade cover 65, so that the height position in the Z-axis direction can be changed.

A cutting water nozzle support block 665 is attached to the side surface of the blade cover 65 on the +X direction side. The cutting water nozzle support block 665 is attached to the blade cover 65 by a bolt 664 whose position can be changed up and down in the elongated hole 661 so that the height position in the Z-axis direction can be changed. A jet port 660 on the lower end side of the cutting water nozzle 66 supported by the cutting water nozzle support block 665 faces obliquely downward toward the cutting blade 63 , and a water supply source 69 is provided on the upper end side of the cutting water nozzle 66 . is communicated with via a pipe or the like (not shown). The cutting water jetted from the jet port 660 is supplied to the cutting area where the cutting blade 63 and the workpiece 90 are in contact from the upper outer circumference of the cutting blade 63 .

The gas-liquid separation unit 7 shown in FIGS. 1 and 2 in this embodiment is attached to the side surface of the blade cover 65 on the −X direction side, and includes a cutting blade 63, a cooling water nozzle support block 650, and a pair of cooling water Although it is positioned behind the nozzle 68 in the X-axis direction, it is attached to the spindle housing 61 via a bar or the like (not shown) and may be positioned in the same position as above. That is, the gas-liquid separation unit 7 may be arranged at a position adjacent to the cutting blade 63 so as to be able to receive the mist of cutting waste liquid discharged by the rotation of the cutting blade 63 .

The gas-liquid separation unit 7 shown in detail in FIGS. 2, 3, and 4 includes, for example, a rectangular upper plate 70, a rectangular lower plate 71, and a rectangular front plate 72 connecting the upper plate 70 and the lower plate 71. a rear plate 73 connecting the upper plate 70 and the lower plate 71 to face the front plate 72; and the second side plate 75 form a box shape. The connection of each plate is, for example, a bolt connection.

The front plate 72 located on the side where the mist of the cutting waste liquid is discharged from the cutting area due to the rotation of the cutting blade 63 shown in FIG. The length in the vertical direction is formed short, and a rectangular entry port 76 is opened between the front plate 72 and the lower plate 71 . An entrance port 76 positioned downstream with respect to the rotation direction of the cutting blade 63 serves as an entrance for allowing the mist to enter the box of the gas-liquid separation unit 7 .

An exhaust port 700 for exhausting the gas L3 from the inside of the box of the gas-liquid separation unit 7 is formed through the upper plate 70, for example, in the central region thereof. and so on.

A rectangular drainage port 710 , for example, is formed through the central region of the lower plate 71 , and a drain hose (not shown) or the like communicates with the drainage port 710 . A plurality of guide plates 77 are arranged directly above the drain port 710 . A drain hose does not have to communicate with the drain port 710 . For example, the chuck table 30 shown in FIG. 1 is surrounded by a cover (not shown), which is connected to a bellows cover that can be expanded and contracted in the X-axis direction. Since a drain port leading to the water case is formed, the liquid that has flowed down from the drain port 710 of the gas-liquid separation unit 7 may flow directly into the water case.

The gas-liquid separation unit 7 is arranged in a rectangular shape in the box, with one end connected to the first side plate 74 and the other end connected to the second side plate 75 . A plurality of guide plates 77 are arranged with gaps 770 between them so as to form a gap.

For example, in the present embodiment, the strip-shaped guide plate 77 extending in the Y-axis direction is composed of two support plates 781 each having a substantially half-moon shape in a side view and a support plate 781 disposed in the box of the gas-liquid separation unit 7 . One end and the other end of the plate 782 are screwed or fitted. One end and the other end of the strip-shaped guide plate 77 may be directly connected to the first side plate 74 and the second side plate 75 . The two support plates 781 and 782 are bolted to the first side plate 74 and the second side plate 75 . For example, when cleaning the inside of the gas-liquid separation unit 7, the bolts fixed to the first side plate 74 and the second side plate 75 of the support plate 781 and the support plate 782 are released, and the support plate 781 and the support plate 782 together with the support plate 781 and the support plate 782 are removed. All the guide plates 77 can be easily removed from the inside of the gas-liquid separation unit 7 at once. Further, if it is desired to change the number of guide plates 77 or the curvature of the arc formed by a plurality of guide plates 77 depending on the amount of mist of the grinding waste liquid entering the gas-liquid separation unit 7, Changes/settings can be easily made using the support plate 781 and the support plate 782 outside the gas-liquid separation unit 7 .

In the example of FIGS. 2 to 4, there are nine guide plates 77 having the same vertical width and a guide plate 77 arranged at the highest position and having a larger vertical width than the other guide plates 77, for a total of 10 guide plates. Although the guide plates 77 are arranged, the number of the guide plates 77 is not limited to this, and the vertical width of all the guide plates 77 may be equal.

A gap 770 formed between one guide plate 77 and one guide plate 77 positioned next to it and having a higher height position is a gap 770 formed between the guide plate 77 having a higher height position. is formed so that the front side (the side close to the entrance port 76) is lower than the rear side of the guide plate 77 on the lower side, and the inside of the gas-liquid separation unit 7 After the rising mist of the grinding waste liquid contacts the guide plate 77 and is separated into the gas L3 and the liquid L4, the liquid L4 flowing down along the inner surface of the higher guide plate 77 reaches the height It does not hang on the front side of the lower guide plate 77 and falls into the drain port 710 through the gap 770 .

The arc shape formed by a plurality of guide plates 77 arranged from the entrance port 76 toward the exhaust port 700 is an arc shape that is recessed toward the back when viewed from the entrance port 76 side. The curvature of the arc and the number of guide plates 77 are appropriately variable depending on the amount of mist entering the gas-liquid separation unit 7 .
That is, the plurality of guide plates 77 arranged in an arc shape has a gap 770 in the radial direction, and a part of the gap in the circumferential direction (the front side and the rear side of the two adjacent guide plates 77) is a gap. 770 are arranged so as to overlap each other.

The operation of each part of the cutting device 1 when the workpiece 90 shown in FIG. 1 is cut by the cutting device 1 will be described below.
First, the workpiece 90 which is the work set 9 is placed on the holding surface 302 of the chuck table 30 so that the surface 900 faces upward. A suction force generated by a suction source (not shown) is transmitted to the holding surface 302 , whereby the chuck table 30 holds the workpiece 90 by suction on the holding surface 302 . Also, the annular frame 92 is clamped and fixed by the fixing clamps 303 .

After the workpiece 90 is held by the chuck table 30, the cutting feed mechanism 13 shown in FIG. Then, the coordinate position of the intended division line 901 to be cut by the cutting blade 63 of the cutting mechanism 6 is detected.

As the coordinate position of the planned division line 901 is detected, the cutting mechanism 6 is moved in the Y-axis direction by the index feed mechanism 15, and the position of the planned division line 901 to be cut and the cutting blade 63 in the Y-axis direction is determined. Alignment is done.

As described above, after the planned division line 901 to be cut and the cutting blade 63 are aligned in the Y-axis direction, the chuck table 30 holding the workpiece 90 is further moved at a predetermined cutting feed rate to -X. sent in the direction 2, the cutting blade 63 cuts through the back surface 903 of the workpiece 90 and reaches the dicing tape 91 at a predetermined height. A cutting mechanism 6 is positioned. 2, a part of the configuration of the chuck table 30, an annular frame 92 for supporting the workpiece 90, and the like are omitted.

A motor (not shown) rotates the spindle 60 shown in FIG. 2, for example, in the clockwise direction when viewed from the +Y direction side (the front side of the paper surface) at high speed, and the cutting blade 63 attached to the spindle 60 rotates at high speed accordingly. The workpiece 90 moving in the -X direction is cut, and cut (down-cut) along the division line 901 (see FIG. 1). Also, the cutting water L1 is jetted from the injection port 660 of the cutting water nozzle 66 located obliquely above the contact area between the cutting blade 63 and the workpiece 90 to cool and wash the contact area. Cooling water is supplied to the cutting blade 63 from a pair of cooling water nozzles 68 to cool the cutting blade 63 .

During the cutting process, the cutting water L1 that contacts the cutting blade 63 rotating clockwise when viewed from the +Y direction side in the contact area becomes a mist L2 of cutting waste liquid containing fine cutting chips, and the -X direction side. fly obliquely upwards. Then, the mist L2 enters the box through the inlet 76 of the front plate 72 of the gas-liquid separation unit 7 .

The inside of the box of the gas-liquid separation unit 7 is sucked from the exhaust port 700 by the exhaust source 701, and an upward airflow is formed in the box. In the box of the gas-liquid separation unit 7, the mist L2 entering from the inlet 76 toward the guide plate 77 is guided to the exhaust port 700 along the plurality of guide plates 77 arranged in an arc. It will rise like this. At this time, the mist L2 collides with the inner surfaces of the arcuate guide plates 77 to form water droplets L4, thereby gradually separating into the gas L3 and the liquid L4. The liquid L4, which contains cutting chips adhering to the inner surface of the arc-shaped guide plate 77, flows down along the inner surface of the guide plate 77 due to gravity, falls from the gap 770 between the guide plates 77 toward the drain port 710, and is discharged. be. Further, the gas L3 of the mist L2 from which the liquid L4 is separated as it rises is sucked by the exhaust source 701 through the exhaust port 700 and is discharged from the inside of the box.
The suction force of the exhaust source 701 is large enough to suck only the gas L3 of the mist L2.

As described above, the cutting apparatus 1 according to the present invention includes the gas-liquid separation unit 7 that raises the mist L2 and drops the separated liquid L4 and discharges the gas L3 through the exhaust port 710. Since the air is exhausted from the exhaust source 701, the suction force of the exhaust source 701 can be made smaller than before. Further, since the exhaust source 701 sucks air with a small suction force, it is possible to separate the liquid L4 from the mist L2 by its own weight without sucking the mist L2. That is, in the conventional cutting apparatus, the gas-liquid separation unit performs gas-liquid separation by a so-called cyclone method, and the suction force of the exhaust source circulates the mist in the gas-liquid separation unit in a horizontal plane and forms an inverted cone. Since gas-liquid separation is performed by bringing the mist into contact with the wall surface, a large suction force is required for the exhaust source. In addition, since the mist containing a constant amount of liquid and gas continues to circulate around the wall surface of the inverted cone with a large suction force, the liquid derived from the mist that once adhered to the wall surface and separated comes into contact with the mist again and becomes a mist again. In some cases, gas-liquid separation could not be performed sufficiently. Therefore, the exhaust source sometimes sucks a small amount of mist, which is a factor of damaging the exhaust source.
On the other hand, in the cutting apparatus 1 according to the present invention, the liquid L4 is separated from the mist L2 and the gas L3 is separated from the mist L2 every time the mist L2 rises and comes into contact with the plurality of guide plates 77 in the gas-liquid separation unit 7 . Since the liquid L4 falls from the gaps 770 of the plurality of guide plates 77 and is discharged from the drain port 710, the mist newly entering the box of the gas-liquid separation unit 7 from the entrance port 76 L2 and the once separated liquid L4 do not come into contact and mix again. Therefore, even if the amount of the mist L2 discharged by the rotation of the cutting blade 63 increases, the mist L2 can be appropriately separated from the gas and the liquid, and the exhaust source 701 discharges the mist L2 containing fine cutting chips. Since there is no suction, there is no possibility that the exhaust source 701 will be damaged by chips or moisture. Further, by changing the angle and number of the guide plates 77 and the curvature of the entire arc according to the amount of the mist L2 discharged, it is possible to perform the gas-liquid separation in an optimum state. For example, when the amount of mist L2 to be discharged increases, the number of guide plates 77 may be increased or the width of the guide plate 77 may be increased to increase the contact area of the mist L2.
The surface of the guide plate 77 opposite to the surface facing the entrance 76 may not be flat. Further, the lower end of the guide plate 77 may be formed so that the portion connected to the first side plate 74 and the second side plate 75 is lower than the central portion so that the liquid L4 can easily drop.

When the workpiece 90 advances in the -X direction to a predetermined position in the X-axis direction where the cutting blade 63 shown in FIGS. The feed stops once, the cutting feed mechanism 17 raises and separates the cutting blade 63 from the workpiece 90, and then the cutting feed mechanism 13 feeds the chuck table 30 in the +X direction and returns it to the cutting start position. In parallel with this, the cutting mechanism 6 is indexed and fed in the Y-axis direction by the interval between the adjacent dividing lines 901, and the same cutting is sequentially performed, thereby cutting all the dividing lines 901 in the same direction. . Furthermore, when the chuck table 30 is rotated by 90 degrees and then similar cutting is performed, all the dividing lines 901 are fully cut vertically and horizontally, and the workpiece 90 is divided into individual chips each having a device 902 .

It goes without saying that the cutting apparatus 1 according to the present invention is not limited to the above embodiment, and may be implemented in various forms within the scope of the technical idea. Also, each step of cutting the workpiece 90 is not limited to this, and can be appropriately changed within the range where the effect of the cutting device 1 according to the present invention can be exhibited.

1: Cutting Device 10: Base 11: Portal Column 13: Cutting Feed Mechanism 130: Ball Screw 132: Motor 15: Indexing Feed Mechanism 17: Cutting Feed Mechanism 30: Chuck Table 302: Holding Surface 303: Fixed Clamp 32: Rotation Unit 6 : Cutting mechanism 60: Spindle 61: Spindle housing 63: Cutting blade 64: Alignment unit 65: Blade cover 650: Cooling water nozzle support block 66: Cutting water nozzle 660: Injection port 665: Cutting water nozzle support block 68: Pair of cooling Water nozzle 69: Water supply source 7: Gas-liquid separation unit 70: Upper plate 700: Exhaust port 701: Exhaust source 71: Lower plate 710: Drain port 72: Front plate 73: Rear plate 74: First side plate 75: Second Side plate 76: Entrance port 77: Guide plate 770: Gap 781, 782 between guide plates: Support plate 9: Work set 90: Workpiece 900: Front surface 901: Planned dividing line 902: Device 903: Back surface 91: Dicing tape 92: Annular frame

Claims (1)

A chuck table for holding a workpiece, a cutting mechanism for rotating a cutting blade to cut the workpiece held on the chuck table, and a relative movement of the chuck table and the cutting mechanism in a cutting feed direction. A cutting device comprising a cutting feed mechanism,
The cutting mechanism includes a spindle having the cutting blade attached to its tip, a spindle housing that rotatably supports the spindle, a blade cover that is arranged on the spindle housing and covers the cutting edge of the cutting blade, and a cover that covers the cutting blade. A cutting water nozzle for supplying cutting water to a cutting area for cutting a workpiece, and a cutting water nozzle disposed next to the cutting blade so as to be able to receive mist of cutting waste liquid discharged by the rotation of the cutting blade, and dispersing the mist into a gas and a liquid. and a gas-liquid separation unit that separates
The gas-liquid separation unit includes an upper plate, a lower plate, a front plate connecting the upper plate and the lower plate, and a rear plate connecting the upper plate and the lower plate and facing the front plate. , the upper plate, the lower plate, the front plate, and the rear plate are connected to each other and face a first side plate and a second side plate formed in a box shape,
an inlet opening in the front plate on the side where the mist of the cutting waste fluid is discharged from the cutting area by the rotation of the cutting blade and allowing the mist to enter; an exhaust port formed in the upper plate; A drainage port formed in the lower plate, and a rectangular strip having one end connected to the first side plate and the other end connected to the second side plate so as to form a circular arc from the inlet toward the exhaust port. and a plurality of guide plates arranged with a gap between each other,
The mist that has entered from the inlet collides with the plurality of guide plates and is guided to the exhaust port. A cutting device that passes through a gap to drain from the drain port and exhausts the gas from the exhaust port.

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