TWI596666B - Cutting device - Google Patents

Description

Cutting device Field of invention

The present invention relates to a cutting device for cutting a workpiece such as a wafer.

Background of the invention

A semiconductor wafer in which a plurality of elements such as ICs and LSIs are formed on the surface, or a workpiece such as a resin substrate, various ceramic substrates, or a glass substrate is divided into individual wafers by a cutting device called a cutting device, and is divided. Wafers are widely used in various electrical machines.

The cutting device supplies a cutting fluid such as pure water from a plurality of nozzles to the cutting insert and the workpiece to be rotated at a high speed, and discharges the cutting chips from the surface of the workpiece while cooling the processing heat, thereby performing cutting processing. The surface of the workpiece is washed (for example, see JP-A-2011-114220 and JP-A-2001-007058).

In general, in the cutting device, in order to prevent the cutting fluid from flying inside the device a processing chamber that surrounds the working chuck and the processing means is formed, but in order to prevent the environmental gas containing the chips from adhering to the workpiece in the processing chamber, the exhaust pipe is connected to the processing chamber through the exhaust port, and is frequently performed. Exhaust of ambient gases in the processing chamber.

Therefore, depending on the suction action of the exhaust pipe that discharges the ambient gas in the processing chamber, the ambient gas outside the device and the device outside the processing chamber are frequently flown into the processing chamber that is not completely sealed.

The flow of the ambient gas in the processing chamber is mainly caused by the flow of the cutting fluid which is scattered at a high speed according to the high-speed rotation of the cutting insert, but the exhaust gas of the processing chamber is exhausted from the exhaust pipe. From the gap in the processing chamber, the ambient gas outside the processing chamber flows, and thus various other flows occur. It is conventional to provide an exhaust port on the side wall of the processing chamber orthogonal to the axial direction of the mandrel, and to exhaust the ambient gas in the processing chamber through the exhaust pipe.

Prior technical literature Patent literature

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2011-114220

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2001-007058

Summary of invention

In the conventional cutting device in which the exhaust port is disposed in the side wall of the processing chamber, since the ambient gas in the processing chamber cannot be smoothly discharged, the surface of the workpiece to be processed is attached to the surface of the workpiece to be contained in the environmental gas. . Therefore, the smooth discharge of the ambient gas in the processing chamber is a major problem for the workpiece to be adhered to by contamination such as chips.

The present invention has been developed in view of such problems, and an object of the invention is to provide a cutting device having a structure in which an ambient gas in a processing chamber is smoothly exhausted.

According to the present invention, there is provided a working chuck provided with a workpiece to be processed, and a cutting blade for machining a workpiece held by the working chuck, and processed by a cutting insert attached to a tip end of the spindle The cutting apparatus further includes: a processing region surrounding the work chuck and the workpiece, and accommodating a workpiece to be processed by the machining means by the machining means; a processing chamber having: an exhaust port for exhausting an ambient gas exhausting suction source in the processing chamber; and an intake port for supplying ambient gas outside the processing chamber to the processing chamber, the exhaust The opening is formed on the downstream side of the cutting fluid containing the cutting chips at a high-speed rotation of the cutting insert and thus in the direction of high-speed scattering, and the suction port is formed on the opposite side of the cutting insert from the exhaust port. The end wall of the chamber is open.

Preferably, the exhaust port has a width equal to or larger than the diameter of the workpiece in a direction orthogonal to the direction in which the cutting fluid scatters, and is open at the top of the processing chamber.

Preferably, the processing chamber has a baffle covering the suction port at a position separated from the suction port by a certain distance from the processing chamber, and the baffle is prevented from colliding with the side of the working clamping table opposite to the suction port, or The cutting fluid that is bounced back on the side of the workpiece to be held on the work chuck is scattered to the intake port and leaks toward the outside of the processing chamber.

According to the cutting apparatus of the present invention, since the main ambient gas flows in the processing chamber, the exhaust port is provided on the downstream side of the gas flow generated by the high-speed rotation of the cutting insert, and the intake port is provided on the upstream side, and the main rectification can be performed at the same time. The smooth flow of the ambient gas enhances the flow by providing the suction port, and the ambient gas in the processing chamber is smoothly exhausted.

2‧‧‧Cutting device

6‧‧‧Processing room

8‧‧‧Baffle

10‧‧‧ Loading and unloading area

12‧‧‧Processing area

14‧‧‧Working table

18‧‧‧Flexing Department

20‧‧‧door type column

24‧‧‧Y-axis moving block

25,26‧‧‧Rolling screw

32‧‧‧Z-axis moving block

40‧‧‧Cutting unit

42‧‧‧ calibration unit

46‧‧‧Cutting inserts

48‧‧‧ wheel cover

50‧‧‧Y-axis protection expansion joint

58‧‧‧Intake port

60‧‧ ‧ baffle

62‧‧‧Exhaust box

64‧‧‧Exhaust port

66‧‧‧Exhaust pipe

Fig. 1 is a perspective view of a cutting device according to an embodiment of the present invention.

Figure 2 is a cross-sectional side view of the cutting device.

Figure 3 is a cross-sectional plan view of the cutting device.

Fig. 4 is an explanatory view of the periphery of the exhaust port.

Fig. 5 is a view similar to Fig. 2 for explaining the action of the baffle.

Form for implementing the invention

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to Fig. 1, a perspective view of a cutting device 2 according to an embodiment of the present invention is shown. 4 is the base of the cutting device 2, and the processing chamber 6 is mounted on the base 4.

The processing chamber 6 is formed of a transparent resin, and as shown in Fig. 2, has an end wall 6a opposite to the processing conveyance direction indicated by an arrow X1, an end wall 6b on the processing conveyance direction side, and a top portion 6c. The work chuck 14 is disposed on the base 4 of the processing chamber 6 so as to be rotatable and reciprocable in the X-axis direction by a processing conveyance mechanism (not shown).

A water cover 16 is disposed around the work clamp 14 and is connected to the expansion and contraction portion 18 that covers the base 4 and serves to protect the shaft portion of the processing conveyance mechanism.

The processing chamber 6 distinguishes the loading and unloading area 10 in which the workpiece is attached and detached from the working table 14 by the partition plate 8 disposed substantially in the middle of the X-axis direction, and the processing area of the workpiece to be processed by the work chuck 14 by cutting. 12. An opening portion 8a that allows the working chuck 14 to pass is formed in a lower portion of the partition plate 8.

A column-shaped column portion 20 is erected on the substrate 4. A pair of guide rails 22 extending in the Y-axis direction are fixed to the column portion 20. The Y-axis is mounted on the column portion 20 so as to be movable in the Y-axis direction along the guide rail 22 by the Y-axis moving mechanism (push-out conveying mechanism) 28 including the ball screw 26 and a pulse motor (not shown). Move the block 24.

A pair of guide rails 30 extending in the Z-axis direction are fixed to the Y-axis moving block body 24. The Z-axis moving block 32 is mounted on the Y-axis moving block 24 so as to be guided by the Z-axis moving mechanism 38 constituted by the ball screw 34 and the pulse motor 36 so that the guide rail 30 moves in the Z-axis direction.

A cutting unit 40 and a calibration unit 42 having a photographing unit 43 are mounted in the Z-axis moving block 32. A mandrel (not shown) is rotatably housed in the spindle housing 44 of the cutting unit 40, and a cutting insert 46 is attached to the tip end of the spindle. The upper half of the cutting insert 46 is covered by a wheel cover 48.

Reference numeral 50 denotes a Y-axis protection expansion-contraction portion of the ball screw 25 extending in the Y-axis direction from the droplets of the cutting fluid. The one end portion 52 is fixed to the upright portion of the door-type column portion 20, and the intermediate portion 54 is mounted as indicated by the arrow A. At the one end portion of the Y-axis moving block 24, the other end portion 56 of the expansion-contraction portion 50 is fixed to the other end portion of the Y-axis moving block 24. In order to make it clearer in Fig. 1, although the Y-axis protective telescopic portion 50 is not mounted at a specific position, it is actually mounted at a position as shown in Fig. 2 .

As shown in the cross-sectional view of Fig. 2, the blade cooling nozzle 49 and the spray nozzle 51 are attached to the wheel cover 48, and the workpiece is cooled from the blade while being held in the workpiece 11 such as a wafer of the work chuck 14. 49 and the spray nozzle 51 sprays the cutting water, and processes and transports the work clamp 14 in the direction of the arrow X1. The machining of the workpiece 11 is performed. When the cutting process is performed while supplying the cutting fluid, the cutting fluid 13 containing the chips is scattered toward the machining conveyance direction by the high-speed rotation of the cutting insert 46.

In the cutting apparatus of the present embodiment, the intake port 58 is formed at the upper end portion of the end wall 6a on the opposite side to the machining conveyance direction X1 of the processing chamber 6, and the end wall 6b and the top in the machining conveyance direction X1 are formed. 6c spans the installation of the exhaust box 62.

As shown in FIG. 4, the exhaust box 62 forms an exhaust port 64 having a width equal to or larger than the diameter of the workpiece such as a wafer in a direction orthogonal to the direction in which the cutting fluid 13 is scattered. The exhaust port 64 is connected to the exhaust pipe 66 through the exhaust pipe connection port 65.

In FIG. 4, the width of the exhaust port 64 can be adjusted to an optimum opening width by adjusting the width of the bottom surface 63 of the exhaust box 62. In the present embodiment, the area of the intake port 58 is formed to be approximately the same as the cross-sectional area of the exhaust pipe 66.

When the exhaust gas suction source connected to the exhaust pipe 66 is driven and the machining of the workpiece 11 is performed, an environmental gas flow as indicated by an arrow A in FIG. 2 is generated in the processing chamber 6, together with the suction port 58. The cutting fluid 13 including the cutting chips generated by the cutting process is caused to fly at a high speed in the processing conveyance direction indicated by an arrow X1 at a high speed rotation of the cutting insert 46, and the machining chamber 6 is moved. The ambient gas inside is in the direction of arrow A It flows to the exhaust port 64, and is further discharged to the exhaust pipe 66 as indicated by an arrow B in FIG.

As shown in FIGS. 2 and 5, the shutter 60 is attached to the top portion 6c of the processing chamber 6 in a state of being adjacent to the intake port 58 and separated from the intake port 58 by a specific distance. In this way, by arranging the baffle 60 adjacent to the air inlet 58 to collide with the side surface of the working table 14 opposed to the air inlet port 58 or the workpiece 11 held by the work table 14 The cutting fluid 13 which is bounced off as shown by the arrow C on the side faces the baffle 60, and prevents the cutting fluid 13 from scattering toward the suction port 58 and leaking out of the processing chamber 6 via the suction port 58.

In the above embodiment, since the main ambient gas flows in the processing chamber 6, the exhaust port 64 is provided on the downstream side of the ambient gas flow A generated by the high-speed rotation of the cutting insert 46, and the suction is set upstream. The port 58 can reinforce the smooth flow of the main ambient gas, and further enhances the flow by providing the intake port 58 in the processing chamber 6, thereby achieving smooth exhaust of the ambient gas in the processing chamber 6.

6‧‧‧Processing room

6a‧‧‧End wall

6b‧‧‧End wall

6c‧‧‧ top

8‧‧‧Baffle

8a‧‧‧ openings

10‧‧‧ Loading and unloading area

11‧‧‧Processed objects

12‧‧‧Processing area

13‧‧‧Cutting fluid

14‧‧‧Working table

16‧‧‧Water cover

18‧‧‧Flexing Department

46‧‧‧Cutting inserts

48‧‧‧ wheel cover

49‧‧‧blade cooling nozzle

50‧‧‧Y-axis protection expansion joint

51‧‧‧ spray nozzle

58‧‧‧Intake port

60‧‧ ‧ baffle

62‧‧‧Exhaust box

64‧‧‧Exhaust port

65‧‧‧Exhaust pipe connection

A‧‧‧Environmental gas flow

X1‧‧‧Processing conveying direction

Claims (5)

A cutting device comprising: a working chuck for holding a workpiece; and a processing means for cutting a workpiece by using a cutting insert attached to a tip end of the spindle while supplying the cutting fluid to the workpiece held by the working chuck Further, the cutting apparatus further includes a processing chamber surrounding the working chuck and the processing means, and accommodating a processing region in which the workpiece held by the working chuck is cut by the processing means, The processing chamber has: an exhaust port for discharging the ambient gas in the processing chamber toward the exhaust suction source; an air inlet for supplying the ambient gas outside the processing chamber to the processing chamber; and a baffle plate configured to Covering the suction port at a position separated from the suction port by a specific distance, the exhaust port opening on a downstream side in a direction in which the cutting fluid containing the chips is scattered due to the rotation of the cutting blade, the suction port being opposite to The cutting insert is open to the end wall of the processing chamber opposite to the exhaust port, and the baffle is extended downward from the top of the processing chamber by the block , Are formed in the flow of the ambient gas of the cutting insert from below the intake port, to a side collision and to prevent the intake port of the opposing faces clamp the work table, or held in the work station of the clamp is added The cutting fluid rebounded from the side of the workpiece scatters toward the suction port and leaks toward the outside of the processing chamber. The cutting device according to claim 1, wherein the exhaust port has a width equal to or larger than a diameter of the workpiece in a direction orthogonal to a direction in which the cutting fluid scatters, and is open at the top. The cutting device according to claim 1 or 2, wherein the intake port has a width equal to or larger than a diameter of the workpiece in a direction orthogonal to a direction in which the cutting fluid scatters, and the end wall is open. The cutting device according to claim 1 or 2, wherein the processing chamber distinguishes the processing region from the processing region and the loading and unloading region for loading and unloading the workpiece in the working chuck, the exhaust port and the suction port The processing area and the loading and unloading area are respectively disposed. The cutting device of claim 3, wherein the processing chamber distinguishes the processing region from the processing region and the loading and unloading region for loading and unloading the workpiece in the working chuck, and the exhaust port and the air inlet are respectively provided It is disposed in the processing area and the loading and unloading area.