JP2014157969A - Cutting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cutting device with a structure capable of smoothly exhausting an atmosphere in a processing chamber.SOLUTION: A cutting device comprises: a chuck table which holds a workpiece; and cutting means for cutting the workpiece with a cutting blade mounted on a tip of a spindle while supplying a cutting liquid to the workpiece held on the chuck table. The cutting device further comprises a processing chamber surrounding the chuck table and the processing means, and housing a processing region in which the workpiece held on the chuck table is cut by the cutting means. The processing chamber includes an exhaust port for exhausting an atmosphere in the processing chamber to an exhaust suction source and an intake port for supplying an atmosphere outside the processing chamber into the processing chamber. The exhaust port opens on a downstream side in a direction in which a cutting liquid containing a cutting chip spatters at a high speed due to high-speed rotation of the cutting blade. The intake port opens on an end wall in which a processing chamber on the side opposite to the exhaust port with respect to the cutting blade is formed.

Description

  The present invention relates to a cutting apparatus for cutting a workpiece such as a wafer.

  Workpieces such as semiconductor wafers on which a plurality of devices such as IC and LSI are formed on the surface, resin substrates, various ceramic substrates, and glass substrates are divided into individual chips by a cutting device called a dicing machine, and the divided chips Is widely used in various electrical devices.

  The cutting device supplies cutting fluid such as pure water from a plurality of nozzles to the cutting blade and workpiece rotating at high speed, and discharges cutting waste from the workpiece surface while cooling the processing heat. Cutting is performed, and the surface of the workpiece is cleaned after the cutting (see, for example, Japanese Patent Application Laid-Open Nos. 2011-114220 and 2001-007058).

  In general, in a cutting machine, a machining chamber is formed that surrounds the chuck table and the machining means in order to prevent cutting fluid from splashing into the machine. In order to prevent adhesion to an object, an exhaust duct is connected to the processing chamber via an exhaust port, and the atmosphere in the processing chamber is always exhausted.

  Therefore, due to the suction action of the exhaust duct that discharges the atmosphere in the processing chamber, the atmosphere inside the apparatus outside the processing chamber and the atmosphere outside the apparatus always flows into the processing chamber that is not completely sealed.

  The flow of the atmosphere in the machining chamber is mainly due to the flow of the cutting fluid scattered at a high speed by the high-speed rotation of the cutting blade, but as the atmosphere in the machining chamber is exhausted from the exhaust duct, As the atmosphere outside the processing chamber flows in, various other flows are generated. Conventionally, an exhaust port is provided on the side wall of the processing chamber orthogonal to the axial direction of the spindle, and the atmosphere in the processing chamber is exhausted through an exhaust duct.

JP 2011-114220 A JP 2001-007058 A

  In a conventional cutting apparatus in which an exhaust port is provided on the side wall of the processing chamber, the atmosphere inside the processing chamber is not smoothly discharged, so that cutting waste contained in the atmosphere may adhere to the surface of the workpiece after processing. There is. Therefore, the smooth discharge of the atmosphere in the processing chamber has been a serious problem for workpieces that do not like the attachment of contamination such as cutting waste.

  The present invention has been made in view of the above points, and an object of the present invention is to provide a cutting device having a structure capable of smoothly exhausting the atmosphere in a processing chamber.

  According to the present invention, a chuck table for holding a workpiece, and a process for cutting the workpiece with a cutting blade attached to the tip of a spindle while supplying a cutting fluid to the workpiece held on the chuck table. And a processing chamber that surrounds the chuck table and the processing means and accommodates a processing region in which a workpiece held by the chuck table is cut by the processing means. The processing chamber further includes an exhaust port for exhausting the atmosphere in the processing chamber to an exhaust suction source, and an intake port for supplying the atmosphere outside the processing chamber into the processing chamber, The exhaust port opens to a downstream side in a direction in which cutting fluid containing cutting waste scatters at a high speed due to high-speed rotation of the cutting blade, and the intake port is connected to the exhaust port with respect to the cutting blade. Form the opposite processing chamber Cutting apparatus characterized by being open to the end wall is provided.

  Preferably, the exhaust port opens in the ceiling portion of the processing chamber with a width equal to or greater than the diameter of the workpiece in a direction orthogonal to the direction in which the cutting fluid scatters.

  Preferably, the processing chamber has a baffle plate that covers the air intake port at a position spaced a predetermined distance from the air intake port to the processing chamber, and the baffle plate allows the side surface of the chuck table facing the air intake port or the chuck table. The cutting fluid that bounces off the side surface of the workpiece to be held is prevented from splashing to the intake port and leaking out of the processing chamber.

  According to the cutting device of the present invention, the exhaust port is provided on the downstream side of the flow of the atmosphere generated by the high-speed rotation of the cutting blade, which is the main atmosphere flow in the processing chamber, and the intake port is provided on the upstream side. Since the flow is reinforced by providing an air inlet, the atmosphere in the processing chamber can be smoothly exhausted.

It is a perspective view of the cutting device concerning the embodiment of the present invention. It is a cross-sectional side view of a cutting device. It is a section top view of a cutting device. It is explanatory drawing of an exhaust port periphery. It is a figure similar to FIG. 2 explaining the effect | action of a baffle plate.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, a perspective view of a cutting device 2 according to an embodiment of the present invention is shown. Reference numeral 4 denotes a base of the cutting apparatus 2, and a processing chamber 6 is mounted on the base 4.

  The processing chamber 6 is made of a transparent resin. As shown in FIG. 2, the end wall 6a on the opposite side to the processing feed direction indicated by the arrow X1, the end wall 6b on the processing feed direction side, and the ceiling It has a portion 6c. A chuck table 14 is disposed on the base 4 in the processing chamber 6 so as to be rotatable and reciprocally movable in the X-axis direction by a processing feed mechanism (not shown).

  A water cover 16 is disposed around the chuck table 14, and a bellows 18 is connected to the water cover 16 and the base 4 for protecting the shaft portion of the processing feed mechanism.

  The processing chamber 6 has a detachment area 10 for attaching and detaching a workpiece to and from the chuck table 14 and a machining area for cutting the workpiece held by the chuck table 14 by a partition plate 8 disposed in the middle in the X-axis direction. 12. An opening 8 a that allows passage of the chuck table 14 is formed in the lower part of the partition plate 8.

  A gate-shaped column 20 is erected on the base 4. A pair of guide rails 22 extending in the Y-axis direction are fixed to the column 20. A Y-axis moving block 24 is mounted on the column 20 so as to be movable in the Y-axis direction along the guide rail 22 by a Y-axis moving mechanism (index feed mechanism) 28 including a ball screw 26 and a pulse motor (not shown). Yes.

  A pair of guide rails 30 extending in the Z-axis direction are fixed to the Y-axis moving block 24. On the Y-axis moving block 24, a Z-axis moving block 32 is mounted on the Y-axis moving block 24 so as to be guided in the guide rail 30 by a Z-axis moving mechanism 38 including a ball screw 34 and a pulse motor 36 so as to be movable in the Z-axis direction.

  An alignment unit 42 having a cutting unit 40 and an imaging unit 43 is attached to the Z-axis moving block 32. A spindle (not shown) is rotatably accommodated in a spindle housing 44 of the cutting unit 40, and a cutting blade 46 is attached to the tip of the spindle. A substantially upper half of the cutting blade 46 is covered with a wheel cover 48.

  Reference numeral 50 denotes a Y-axis protective bellows that protects the ball screw 25 extending in the Y-axis direction from the splashing of the cutting fluid. One end 52 is fixed to the standing part of the gate column 20 and the intermediate part 54 is indicated by an arrow A. Thus, the other end portion 56 of the bellows 50 is fixed to the other end portion of the Y-axis moving block 24. For the sake of clarity, FIG. 1 shows a state in which the Y-axis protective bellows 50 is not attached at a predetermined position, but in practice it is attached at a position as shown in FIG.

  As shown in the sectional view of FIG. 2, a blade cooler nozzle 49 and a shower nozzle 51 are attached to the wheel cover 48, and when the workpiece 11 such as a wafer held on the chuck table 14 is cut. Cuts the workpiece 11 by cutting and feeding the chuck table 14 in the direction of arrow X1 while jetting cutting water from the blade cooler nozzle 49 and the shower nozzle 51. When cutting is performed while supplying the cutting fluid, the cutting fluid 13 containing cutting waste is scattered to the processing feed direction side due to the high-speed rotation of the cutting blade 46.

  In the cutting apparatus of the present embodiment, an air inlet 58 is formed at the upper end of the end wall 6a opposite to the machining feed direction X1 forming the machining chamber 6, and the exhaust box 62 is on the machining feed direction X1 side. Are attached to the end wall 6b and the ceiling 6c.

  As shown in FIG. 4, the exhaust box 62 has an exhaust port 64 that is opened with a width equal to or larger than the diameter of a workpiece such as a wafer in a direction orthogonal to the direction in which the cutting fluid 13 scatters. The exhaust port 64 is connected to the exhaust pipe 66 through the exhaust pipe connection port 65.

  In FIG. 4, the width of the exhaust port 64 is adjusted to the optimum opening width by adjusting the width of the bottom surface 63 of the exhaust box 62. In the present embodiment, the area of the intake port 58 is formed to be approximately the same as the cross-sectional area of the exhaust duct 66.

  When the exhaust suction source connected to the exhaust pipe 66 is driven to cut the workpiece 11, an atmosphere flow as indicated by an arrow A in FIG. Along with the air outside the processing chamber 6 taken in, the cutting fluid 13 containing cutting waste generated by the cutting processing is scattered at a high speed in the processing feed direction side indicated by the arrow X1 due to the high-speed rotation of the cutting blade 46, and processed. The atmosphere in the chamber 6 rides on the flow in the direction of arrow A, reaches the exhaust port 64, and is further exhausted to the exhaust pipe 66 as shown by arrow B in FIG.

  As shown in FIGS. 2 and 5, a baffle plate 60 is attached to the ceiling portion 6 c of the processing chamber 6 adjacent to the air inlet 58 and spaced apart from the air inlet 58 by a predetermined distance. By arranging the baffle plate 60 adjacent to the intake port 58 in this way, the side surface of the chuck table 14 facing the intake port 58 or the side surface of the workpiece 11 held on the chuck table 14 is indicated by an arrow C. Thus, it is possible to prevent the cutting fluid 13 that has rebounded from colliding with the baffle plate 60, scattering the cutting fluid 13 to the intake port 58, and leaking out of the processing chamber 6 through the intake port 58.

  In the embodiment described above, the exhaust port 64 is provided on the downstream side and the intake port 58 is provided on the upstream side of the flow A of the atmosphere generated by the high-speed rotation of the cutting blade 46 which is the main atmosphere flow in the processing chamber 6. While the smooth flow of the atmosphere is adjusted and the flow is enhanced by providing the intake port 58 in the processing chamber 6, the atmosphere in the processing chamber 6 can be smoothly exhausted.

2 Cutting device 6 Processing chamber 8 Partition plate 10 Attaching / detaching area 12 Processing area 14 Chuck table 18 Bellows 20 Portal column 24 Y-axis moving block 32 Z-axis moving block 40 Cutting unit 42 Alignment unit 46 Cutting blade 46 Wheel cover 50 Y-axis protection Bellows 58 Air intake 60 Baffle plate 62 Exhaust box 64 Exhaust

Claims (4)

A chuck table for holding the workpiece, and a processing means for cutting the workpiece with a cutting blade attached to the tip of the spindle while supplying a cutting fluid to the workpiece held on the chuck table. Cutting device,
A processing chamber that surrounds the chuck table and the processing means, and further includes a processing chamber that accommodates a processing region in which a workpiece held by the chuck table is cut by the processing means;
The processing chamber is
An exhaust port for exhausting the atmosphere in the processing chamber to an exhaust suction source;
An air inlet for supplying an atmosphere outside the processing chamber into the processing chamber;
The exhaust port opens to the downstream side in the direction in which the cutting fluid containing cutting waste is scattered at a high speed due to the high speed rotation of the cutting blade,
The cutting apparatus according to claim 1, wherein the intake port is open to an end wall that forms the processing chamber opposite to the exhaust port with respect to the cutting blade.   2. The cutting apparatus according to claim 1, wherein the exhaust port has a width equal to or larger than a diameter of the workpiece in a direction orthogonal to a direction in which the cutting fluid scatters, and opens in a ceiling portion of the processing chamber. . The processing chamber has a baffle plate that covers the air inlet at a position spaced a predetermined distance from the air inlet to the processing chamber;
By the baffle plate, the cutting fluid that bounces off against the side surface of the chuck table facing the air inlet or the side surface of the workpiece held by the chuck table is scattered to the air inlet and leaks out of the processing chamber. The cutting device according to claim 1, wherein the cutting device is prevented. The processing chamber is partitioned by the partition plate into the processing region and an attachment / detachment region for attaching / detaching a workpiece to / from the chuck table,
The cutting apparatus according to any one of claims 1 to 3, wherein the exhaust port is disposed in the processing region and the intake port is disposed in the attachment / detachment region.

Images