JP2008147344A - Machining equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide machining equipment wherein its liquid-proof structure for its cutting liquid is simplified without interfering its cutting operations, and its liquid-proof effect can be improved. <P>SOLUTION: In the machining equipment, a chucking table 20 for holding a machined object 10 is so provided as to fix its position in the XY plane. On the other hand, cutting means 30a, 30b are subjected to machining feed in the X-axis direction by a machining feed means 50, and they are subjected to depth-setting feed in the Z-axis direction by depth-setting feed means 70a, 70b. Thereby, the machining equipment is so constituted as to perform the cutting machining of the machined object 10 held on the chucking table 20. Hereupon, as the liquid proof for the cutting liquid of the machining equipment, it is not necessary to provide any liquid-proof means of bellows structure horizontally around the chucking table 20. For example, on the upper side of the chucking table 20, the liquid-proof means having movable simple structure are so provided satisfactorily that they follow the feed operations of the machining means 50, dividing feed means 60a, 60b, and the depth-setting feed means 70a, 70b. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a processing apparatus for cutting a workpiece such as a wafer held on a chuck table.

  A wafer on which a plurality of devices such as IC and LSI are formed is ground to the desired thickness and is divided into individual devices by a processing device such as a dicing device and used for electronic devices such as mobile phones and personal computers. Is done.

  The dicing machine is configured such that a spindle with a cutting blade rotating at a high speed is positioned at a predetermined height, and the chuck table is processed and fed in the X-axis direction perpendicular to the spindle with the axial direction as the Y-axis direction. The wafer is cut. At the time of cutting, cutting water is always supplied from the spray nozzle in order to cool a processing point where the cutting blade and the workpiece come into contact with each other from a blade cover around the cutting blade or to discharge cutting waste. In cutting performed in this way, it is necessary to prevent cutting water from entering the inside of the apparatus.

  Therefore, in this type of conventional processing apparatus, a telescopic bellows member is attached between both ends of the chuck table in the X-axis direction and the fixed wall of the apparatus, and the chuck table is attached with the expansion and contraction of the bellows member. By being configured to move in the X-axis direction, the moving path of the chuck table is covered with a bellows member so that cutting water does not enter the apparatus (see, for example, Patent Document 1). Further, when a hard material such as a semiconductor wafer or a CSP (Chip Size Package) substrate is cut, a sharp small piece is formed by the cutting, and this small piece may be scattered on the top of the bellows member by the rotation of the cutting blade. Therefore, for example, in Patent Document 2, a resin film is attached to the surface of the bellows member, and even when a sharp small piece falls, the bellows member is hardly perforated.

JP-A-7-156039 JP 2002-66866 A

  However, in the processing apparatuses disclosed in Patent Documents 1 and 2, etc., the bellows member is horizontally disposed below the cutting blade and the injection nozzle, and sewage and cutting waste after cutting are easily collected on the bellows member. In such a state, the expansion and contraction accompanying the processing feed of the chuck table at a maximum of 600 mm / s is repeated, so that consumption is severe and the frequency of replacement of the bellows member is high. In addition, there is a case where a hole is formed in the bellows member, or the θ-axis (rotation axis of the chuck table) mechanism or the X-axis (work feed of the chuck table) mechanism is damaged. In addition, the horizontally-arranged bellows member has a complicated mechanism such as being folded in a U-shape and arranging the bellows on the inside in order to ensure sealing performance, and is expensive.

  The present invention has been made in view of the above, and it is an object of the present invention to provide a processing apparatus that can simplify the waterproof structure against cutting water without impeding the cutting operation and improve the waterproof effect. To do.

  In order to solve the above-described problems and achieve the object, a machining apparatus according to the present invention includes a chuck table having a holding surface for holding a workpiece and having a fixed position in an XY plane, and the chuck table. A cutting means having a spindle rotatably mounted with a cutting blade for cutting a held workpiece; and the cutting means in a Y-axis direction that is parallel to the holding surface of the chuck table and that is the axial direction of the spindle. Index feeding means for indexing, machining feed means for feeding the cutting means in the X-axis direction orthogonal to the Y-axis direction, and cutting feed for the cutting means in the Z-axis direction perpendicular to the X-axis direction and the Y-axis direction And a cutting and feeding means.

  Further, the processing apparatus according to the present invention is characterized in that, in the above invention, a plurality of the cutting means are provided, and the cutting means is provided independently for each cutting means.

  According to the processing apparatus of the present invention, the chuck table for holding the workpiece is provided with a fixed position in the XY plane, while the cutting means is processed and fed in the X-axis direction by the processing feeding means, and the cutting feed means is provided. In order to cut the workpiece held on the chuck table by cutting and feeding in the Z-axis direction, the waterproof means by the horizontal bellows structure around the chuck table as a waterproof against the cutting water For example, it is sufficient to provide a movable waterproof means that follows the feed operation with respect to the machining feed means, the index feed means, and the cutting feed means above the chuck table, as compared with the case around the chuck table. The amount of cutting water directly applied to the waterproof means is small and difficult to collect, and waterproof measures against sprayed cutting water are sufficient, so cutting Together it may simplify the waterproof structure without disturbing the factory operation is an effect that it is possible to improve the waterproofing effect.

  DESCRIPTION OF THE PREFERRED EMBODIMENTS A processing apparatus that is the best mode for carrying out the present invention will be described below with reference to the drawings. FIG. 1 is a schematic front view showing a configuration example of a processing apparatus according to the present embodiment, FIG. 2 is a schematic overhead view in which waterproof means is omitted, and FIG. 3 is shown with waterproof means added. FIG. 4 is a schematic overhead view, and FIG. 4 is a front view showing a configuration example near the cutting blade.

  The processing apparatus 1 of this Embodiment shows the example of application to the cutting apparatus which cuts the to-be-processed object 10. FIG. Here, in the XYZ coordinate axes, the X-axis direction is the machining feed direction, the Y-axis direction is the index feed direction, and the Z-axis direction is the cut feed direction. First, the processing apparatus 1 according to the present embodiment includes a chuck table 20 that holds a workpiece 10. The chuck table 20 has a horizontal holding surface 21 by a suction chuck formed of a porous material that holds a workpiece 10 made of a wafer integrated with a frame through a holding tape, for example, although not shown in detail. The holding surface 21 communicates with suction means (not shown). Therefore, the chuck table 20 places the workpiece 10 on the holding surface 21 and sucks and holds the workpiece 10 on the holding surface 21 by applying a negative pressure by suction means (not shown). The chuck table 20 is mounted at the upper end of a rotating shaft (not shown) that is provided in a fixed position in the XY plane, is arranged in a watertight state in the cylindrical member 22, and has a suction path formed therein. It can be driven to rotate in a horizontal plane by a motor (not shown) connected to the lower end side of the rotation shaft.

  In addition, the processing apparatus 1 of the present embodiment includes first and second cutting means 30 a and 30 b for cutting the workpiece 10 held on the chuck table 20. These first and second cutting means 30a and 30b are first and second cutting blades 31a and 31b, which cut the wafer in the workpiece 10 along the division line, and are rotatably mounted. It consists of second spindles 32a and 32b, a servo motor for rotational driving, and the like. Here, the axial directions of the first and second spindles 32a and 32b are arranged so as to coincide with the index feed direction indicated by the Y-axis direction, and the first and second cutting blades 31a and 31b are arranged in the Y-axis direction. Is set to confront each other. Further, the first and second cutting blades 31a and 31b may have the same structure for dual cutting in which cutting on the same workpiece 10 is performed in parallel at the same time, and different types for step cutting. It may be of a structure.

  Here, although the processing apparatus 1 of this Embodiment is abbreviate | omitting illustration in FIGS. 1-3, when cutting the workpiece 10, with respect to the processing point by the 1st, 2nd cutting blade 31a, 31b. A cutting water supply means 40 for supplying cutting water is attached to the first and second cutting means 30a, 30b. As shown in FIG. 4, the cutting water supply means 40 is disposed on a blade cover 33a (blade cover 33b) covering the periphery of the first cutting blade 31a (second cutting blade 31b), and the first cutting blade 31a. A pair of front and back injection nozzles 41a (injection nozzles 41b) for supplying cutting water from both sides to the vicinity of the outer periphery of the cutting edge, which is a processing point by the (second cutting blade 31b), and a cutting water supply source and an injection nozzle 41a (injection nozzle) 41b) is provided with a piping path (not shown) that connects between them.

  Further, the processing apparatus 1 of the present embodiment includes a column-shaped support column 3 having a top plate portion 2 above the chuck table 20 whose position in the XY plane is fixed. The first and second cutting means 30a and 30b are processed and fed in the X-axis direction, and the first and second cutting means 30a and 30b are indexed and fed independently in the Y-axis direction. , Second index feed means 60a, 60b, and first and second cut feed means 70a, 70b for cutting and feeding the first and second cutting means 30a, 30b independently in the Z-axis direction. . Here, the first and second cutting means 30a and 30b are formed of the processing feed means 50, the first and second index feed means 60a and 60b, and the first and second cuts with respect to the lower surface of the top plate portion 2. It is suspended and supported via the feeding means 70a, 70b and is located above the chuck table 20.

  First, the machining feed means 50 moves the X-axis table 51 in the X-axis direction to simultaneously feed the first and second cutting means 30a and 30b to the chuck table 20 in the X-axis direction. Is. The machining feed means 50 has a length over the entire movable range in the Y-axis direction and is disposed on the lower surface of the top plate portion 2, and is movable in the X-axis direction on the lower surface of the top plate portion 2. A pair of guide rails 52 formed in parallel to the X-axis direction with a length over the entire range, and an X-axis direction while being fitted on the upper surface side of the X-axis table 51 and supported by the guide rails 52. A guided groove 53 to be guided, a ball screw 54 disposed in the X-axis direction on the lower surface portion of the top plate portion 2 and screwed into a female screw hole (not shown) formed in the X-axis table 51, and the ball screw 54 And a bearing 56 for supporting the other end of the ball screw 54. As a result, when the ball screw 54 is rotated by driving the motor 55, the X-axis table 51 moves in the X-axis direction, and first and second index feed means 60a and 60b and first and second cut feeds described later. The first and second cutting means 30a and 30b suspended and supported via the means 70a and 70b are processed and fed in the X-axis direction.

  The first and second indexing and feeding means 60a and 60b move the Y-axis tables 61a and 61b in the Y-axis direction so that the first and second cutting means 30a and 30b are moved with respect to the chuck table 20. These are for independently indexing and feeding in the Y-axis direction. The first and second indexing and feeding means 60 a and 60 b have a symmetrical structure, and are provided on the lower surface of the X-axis table 51 and the inverted L-shaped Y-axis tables 61 a and 61 b disposed on the lower surface of the X-axis table 51. A pair of common guide rails 62 formed in parallel to the Y-axis direction with a length almost over the entire area in the Y-axis direction and the upper surfaces of the Y-axis tables 61a and 61b so as to be supported by the guide rails 62. Guided grooves 63a and 63b guided in the Y-axis direction while being fitted, and female screw holes (not shown) formed in the Y-axis table 61a and 61b arranged in the Y-axis direction on the lower surface portion of the X-axis table 51. Ball screws 64a and 64b that are screwed together, motors 65a and 65b that are connected to one end of these ball screws 64a and 64b and rotationally drive the ball screws 64a and 64b, and ball screws 64a and 64b Comprising a bearing 66a for supporting the other end, and 66b, a. As a result, when the ball screws 64a and 64b are rotated by driving the motors 65a and 65b, the Y-axis tables 61a and 61b move in the Y-axis direction, via first and second incision feeding means 70a and 70b described later. The first and second cutting means 30a and 30b supported by suspension are indexed and fed independently in the Y-axis direction.

  Further, the first and second cutting feed means 70a and 70b move the Z-axis tables 71a and 71b in the Z-axis direction to move the first and second cutting means 30a and 30b with respect to the chuck table 20. Each is for cutting and feeding in the Z-axis direction independently. The first and second notch feeding means 70a and 70b have the same structure, and are disposed on the vertical surface of the inverted L-shaped Y-axis table 61 so that the first and second spindles 32a and 32b are integrated with each other. The Z-axis tables 71a and 71b to be supported, a pair of common guide rails 72a and 72b formed in parallel to the Z-axis direction on the vertical surface of the inverted L-shaped Y-axis table 61, and the Z-axis tables 71a and 71b Guided grooves 73a and 73b that are formed on the back side vertical surface and are guided so as to be supported by the guide rails 72a and 72b while being guided in the Z axis direction, and arranged on the vertical surface of the Y axis table 61 in the Z axis direction. Ball screws 74a and 74b that are provided and screwed into female screw holes (not shown) formed in the Z-axis tables 71a and 71b, and are connected to one ends of these ball screws 74a and 74b. Comprises a motor 75a for rotating the 74b, and 75b, a ball screw 74a, a bearing (not shown) for supporting the other end of the 74b, the. Accordingly, when the ball screws 74a and 74b are rotated by driving the motors 75a and 75b, the Z-axis tables 71a and 71b are moved up and down in the Z-axis direction, and are supported by being suspended by the Z-axis tables 71a and 71b. Two cutting means 30a and 30b are cut and fed independently in the Z-axis direction.

  Furthermore, as shown in FIG. 3, the processing apparatus 1 according to the present embodiment includes X-axis waterproof means 80, Y-axis waterproof means 85, and Z-axis waterproof means 90a and 90b as waterproof means against cutting water. The X-axis waterproof means 80 is for waterproofing the processing feed means 50, and has a bellows member 81 a locked between one end in the X-axis direction of the X-axis table 51 and a fixed end by the top plate 2, and the X-axis It consists of a pair of the bellows member 81b latched between the other end of the X-axis direction of the table 51 and the fixed end by the top plate part 2. These pair of bellows members 81a, 81b follow the machining feed of the X-axis table 51 in the X-axis direction and expand and contract in the X-axis direction, so that the lower surface side of the machining feed means 50 is always completely blocked.

  The Y-axis waterproofing means 85 is for waterproofing the first and second indexing and feeding means 60, and one end is locked to the opposite end of the Y-axis tables 61a and 61b, and the other end is the central part. It consists of a pair of sheet | seat materials 87a and 87b which can be drawn in and pulled out in the winding mechanism 86 supported by the lower surface of the axis | shaft table 51. FIG. These sheet materials 87a and 87b are formed by applying heat, for example, and are Y-axis so that they are drawn into or pulled out of the winding mechanism 86 following the index feed in the Y-axis direction of the Y-axis tables 61a and 61b. By extending and contracting in the direction, the lower surface side of the first and second indexing feeding means 60a, 60b such as the ball screws 64a, 64b is always completely closed.

  Further, the Z-axis waterproofing means 90a and 90b are for waterproofing the first and second cut-in feeding means 70a and 70b, and a ball screw is provided between the lower surface of the Y-axis tables 61a and 61b and the Z-axis tables 71a and 71b. It consists of bellows members 91a and 91b locked so as to surround the periphery of 74a and 74b. These bellows members 91a and 91b follow the cutting feed in the Z-axis direction of the Z-axis tables 71a and 71b and expand and contract in the Z-axis direction, so that the ball screws 74a and 70b of the first and second cutting-feed means 70a and 70b. The entire periphery of 74b etc. is always closed.

  A water case (not shown) for receiving cutting water is disposed in a watertight manner around the chuck table 20 including the processing feed ranges of the first and second cutting means 30a and 30b. The water case is formed in a simple box shape, and a drainage port is formed at a part of the bottom, for example, a corner, to which a drain hose for drainage is connected. The upper part of the water case is formed as a processing chamber (not shown) that closes the entire processing portion including the support column 3 having the top plate portion 2 described above, and an exhaust duct is connected to the rear wall of the processing chamber. .

  In such a configuration, generally, the workpiece 10 sucked and held by the chuck table 20 has a cutting area detected by an alignment process such as imaging of a division planned line by an alignment unit (not shown) and pattern matching. Used for processing operations. Then, the corresponding first and second cutting means 30a and 30b are independently indexed and fed in the Y-axis direction by the index feeding means 60a and 60b, thereby cutting the wafer as the workpiece 10 on the chuck table 20. The positions of the first and second cutting blades 31a and 31b are determined with respect to the region. After the position is determined, the first and second cutting blades 31a and 31b rotating at high speed are processed and fed in the X-axis direction by the processing feed means 50, and the Z-axis is fed by the first and second cutting feed means 70a and 70b. By cutting and feeding a predetermined amount in the direction, the wafer is simultaneously cut along two desired dividing lines to form a cutting groove. In the case of dual cut, a full cut is performed simultaneously in parallel by two scheduled division lines for two lines by the first and second cutting blades 31a and 31b having the same structure. The first cutting blade 31a for cutting sequentially cuts the planned dividing lines, and the second cutting blade 31b for full cutting sequentially operates the half-cut divided scheduled lines in parallel.

  In such a cutting process, the cutting point is cooled by supplying cutting water from the spray nozzles 41a and 41b of the cutting water supply means 40 to the processing point of the first and second cutting blades 31a and 31b. , Wash away the cutting waste on the wafer. After such a cutting process is executed for all the predetermined division lines in a predetermined direction, the chuck table 20 is rotated 90 degrees by a motor (not shown) to rotate the wafer direction 90 degrees, and is orthogonal to the already divided division lines. The remaining cutting lines in the direction to be cut are similarly cut.

  In such a cutting operation, the cleaning water after cooling and cleaning sprayed from the spray nozzles 41a and 41b and the washed cutting waste fall from the chuck table 20 into the surrounding water case. Here, since the water case is formed flat without unevenness, the dropped cleaning water and cutting waste are discharged from the machine through the drain hose through the drain hose. At this time, since the space between the water case and the cylindrical member 22 of the chuck table 20 is maintained in a watertight state, cutting water or the like does not enter the machine from this portion.

  Further, since the cleaning water is sprayed from the spray nozzles 41a and 41b to the first and second cutting blades 31a and 31b rotating at a high speed, the first around the first and second cutting blades 31a and 31b. The cutting water scatters to the second cutting feed means 70a, 70b, the first and second index feed means 60a, 60b, and the machining feed means 50 side, but the Z-axis waterproof means 90, the Y-axis waterproof means 85 and the X-axis waterproofing means 80, and the cutting water does not splash on the ball screws 74a, 74b, 64a, 64b, 54 and the like. In particular, according to the present embodiment, the first and second cutting feed means 70a and 70b, the first and second index feed means 60a and 60b, and the machining feed means 50 are all jetted with cutting water. It is located above the processing point, and the amount of the cutting water directly applied is less than the chuck table 20 side which is directly below, and most of the cutting water is sprayed, and the bellows members 91a and 91b. , 81a, 81b and the sheet materials 87a, 87b, since waterproofing measures against spray-like water are sufficient (especially in this embodiment, water vapor or spray-like water in the processing chamber passes through the exhaust duct). It is always evacuated), does not collect cutting waste, and has a simple structure. In addition, even if the bellows members 91a, 91b, 81a, 81b and the sheet materials 87a, 87b are expanded and contracted, foreign matter adheres. But The extent of not wasting low, a higher waterproofing effect than the bellows member in the horizontal arrangement around a conventional chuck table.

  The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention. For example, in the present embodiment, the chuck table 20 is configured to be rotatable by a motor, but the chuck table 20 may be configured not to rotate depending on the workpiece 10 to be processed. Further, the arrangement and configuration of the processing feed means 50, the first and second index feed means 60a and 60b, and the cutting feed means 70a and 70b are not limited to the examples shown in the embodiment, and can be changed as appropriate. Further, the cutting means is not limited to an example including a plurality of cutting means such as the first and second cutting means 30a and 30b, and may include, for example, a single cutting means.

It is a schematic front view which shows the structural example of the processing apparatus of embodiment of this invention. It is a schematic bird's-eye view which abbreviate | omits and shows a waterproof means. It is a schematic bird's-eye view added with waterproof means. It is a front view which shows the structural example of cutting blade vicinity.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Workpiece 20 Chuck table 21 Holding surface 30a, 30b Cutting means 31a, 31b Cutting blade 32a, 32b Spindle 50 Work feed means 60a, 60b Index feed means 70a, 70b Cut feed means

Claims (2)

A chuck table having a holding surface for holding a workpiece and having a fixed position in the XY plane;
Cutting means having a spindle rotatably mounted with a cutting blade for cutting a workpiece held on the chuck table;
Indexing feed means for indexing and feeding the cutting means in the Y-axis direction which is parallel to the holding surface of the chuck table and which is the axial center direction of the spindle;
Machining feed means for machining and feeding the cutting means in the X-axis direction orthogonal to the Y-axis direction;
A cutting feed means for cutting and feeding the cutting means in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction;
A processing apparatus comprising: A plurality of the cutting means,
The processing apparatus according to claim 1, wherein the cutting means is provided independently for each cutting means.

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