JP6157306B2 - Cutting equipment - Google Patents

Description

  The present invention relates to a cutting apparatus for cutting a workpiece such as a semiconductor wafer.

  In the semiconductor device manufacturing process, division lines are formed in a lattice pattern on the surface of a substantially disc-shaped semiconductor wafer, and circuits such as ICs and LSIs are formed in regions partitioned by the division lines. Then, the semiconductor wafer is cut along a planned division line by a cutting device and divided into individual semiconductor chips. The semiconductor chip thus divided is packaged and widely used in electric devices such as mobile phones and personal computers.

  In general, in such a cutting apparatus that divides a semiconductor wafer, cutting is performed while spraying cutting water toward a processed portion of the semiconductor wafer (see, for example, Patent Document 1). This cutting apparatus is configured by screwing a plurality of nozzles for injecting cutting water with fixing screws on a blade cover that covers the outer periphery of a cutting blade. The cutting device rotates the cutting blade at a high speed and simultaneously sprays cutting water from a plurality of nozzles onto a processed portion of the semiconductor wafer and the cutting blade to clean the cutting waste and cool and lubricate the processed portion. Then, the cutting device cuts the semiconductor wafer by cutting and feeding along the planned dividing line with the cutting blade cut into the semiconductor wafer by a certain amount.

JP 2011-114220 A JP 2001-267272 A Japanese Patent Laid-Open No. 03-230546

  The so-called cooling nozzle that jets cutting water from both sides of the cutting blade is jetted toward the machining point as in Patent Document 2, or jetted toward the cutting blade as in Patent Document 3, and the direction thereof is appropriately adjusted. May be. However, since the cooling nozzle is formed in a substantially L-shaped pipe shape and is formed integrally with the blade cover, one cooling nozzle is formed in the spraying direction, and the blade cover is appropriately replaced. The direction of jetting was selected.

  The present invention has been considered in view of the above problems, and an object of the present invention is to provide a cutting apparatus capable of changing the injection direction of cutting water without replacing the blade cover.

  In order to solve the above-described problems and achieve the object, a cutting apparatus according to the present invention includes a chuck table for holding a workpiece and a cutting blade for cutting the workpiece held on the chuck table. A cutting device comprising: a spindle housing that rotatably supports a spindle having the cutting blade mounted on a front end thereof; and the cutting blade disposed at a front end portion of the spindle housing. A blade cover provided with a cutting water supply nozzle that is disposed on both sides of the cutting blade to supply cutting water to the cutting blade from both sides, and the cutting water supply nozzle has a rigidity that extends vertically up to a machining height. A bracket, and a cylindrical pipe nozzle that is attached to the lower end of the rigid bracket and extends in the horizontal direction and has an injection slit on its side surface, A cutting water supply passage is formed inside the rigid bracket and the pipe nozzle, the cutting water supply passage communicates with a cutting water source, and the pipe nozzle is formed in a cylindrical shape with respect to the mounted rigid bracket. It has an adjustment part which rotates to a direction and adjusts the injection direction of this injection slit, and a fixed part which controls rotation.

  In the cutting apparatus, it is preferable that the cutting water supply nozzle includes a position display unit including a scale indicating a direction in the rotation direction of the pipe nozzle and a display mark.

  In the cutting device of the present invention, the cutting water supply nozzle is composed of a rigid bracket and a pipe nozzle, and the direction of the pipe nozzle is rotated in the circumferential direction and then fixed, thereby easily adjusting the injection direction of the cutting water. There is an effect that can be done. In addition, since the cutting device has a position display means for displaying the direction of the pipe nozzle in the rotation direction, the direction of the pair of pipe nozzles can be easily aligned, the cutting blade is tilted, the unevenness of the attachment of cutting waste, etc. There is also an effect that can be prevented.

FIG. 1 is a perspective view illustrating a configuration example of a cutting apparatus according to an embodiment. FIG. 2 is a perspective view illustrating a configuration example of cutting means of the cutting apparatus according to the embodiment. FIG. 3 is an exploded perspective view showing an exploded configuration example of the cutting means of the cutting apparatus according to the embodiment. 4 is a cross-sectional view taken along line IV-IV in FIG. Fig.5 (a) is sectional drawing of the cutting means of the cutting device which concerns on the modification of embodiment, FIG.5 (b) is sectional drawing which expands and shows the b section of Fig.5 (a).

  DESCRIPTION OF EMBODIMENTS Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. The constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the structures described below can be combined as appropriate. Various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

Embodiment
A cutting apparatus according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view illustrating a configuration example of a cutting apparatus according to an embodiment. FIG. 2 is a perspective view illustrating a configuration example of cutting means of the cutting apparatus according to the embodiment. FIG. 3 is an exploded perspective view showing an exploded configuration example of the cutting means of the cutting apparatus according to the embodiment. 4 is a cross-sectional view taken along line IV-IV in FIG.

  As shown in FIG. 1, the cutting apparatus 1 includes a chuck table 10 that holds a workpiece W, and a cutting means 20 that includes a cutting blade 21 for cutting the workpiece W held on the chuck table 10. , An X-axis moving means (not shown) for moving the chuck table 10 in the X-axis direction, a rotational drive source (not shown) for rotating the chuck table 10 about an axis parallel to the Z-axis, and a Y-axis movement Means 40, Z-axis moving means 50, control means (not shown) and the like are provided. The cutting apparatus 1 uses an X-axis moving unit, a Y-axis moving unit 40, a Z-axis moving unit 50, and a rotational drive source to move the chuck table 10 and the cutting unit 20 in the X-axis direction, the Y-axis direction, the Z-axis direction, and The workpiece W is moved relative to the Z axis, and the workpiece W is cut and divided into chips.

  In the present embodiment, the workpiece W is a disk-shaped semiconductor wafer or optical device wafer whose base material is silicon, sapphire, gallium, or the like. In the present invention, the workpiece W may be various ceramic substrates, resin substrates, glass substrates and the like used for electronic components. As shown in FIG. 1, the workpiece W is attached to the adhesive sheet S, the annular frame F is attached to the adhesive sheet S, and the workpiece W is attached to the annular frame F via the adhesive sheet S.

  The chuck table 10 has a workpiece W placed on the holding surface 10a via an adhesive sheet S, and sucks and holds the workpiece W placed on the holding surface 10a. The chuck table 10 has a disk shape in which a portion constituting the holding surface 10a is formed of porous ceramic or the like, and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown) and placed on the holding surface 10a. The workpiece W is held by being sucked through the adhesive sheet S. The chuck table 10 is rotated around the Z axis by a rotational drive source. Further, around the chuck table 10, a plurality of clamp portions 11 that are driven by an air actuator and sandwich the annular frame F around the workpiece W are provided.

  The cutting means 20 performs cutting (processing) while supplying cutting grooves to the workpiece W held on the chuck table 10. The cutting means 20 is provided so as to be movable in the Y-axis direction by the Y-axis moving means 40 with respect to the workpiece W held on the chuck table 10, and is movable in the Z-axis direction by the Z-axis moving means 50. Is provided.

  The cutting means 20 is moved in the Y-axis direction and the Z-axis direction by the Y-axis moving means 40 and the Z-axis moving means 50 so that the cutting blade 21 can be positioned at an arbitrary position on the surface of the chuck table 10. . Further, the cutting means 20 is fixed so that the image pickup means 80 for picking up the upper surface of the workpiece W moves integrally with the spindle 22. The image pickup unit 80 includes a CCD camera that picks up an image of an area to be cut of the workpiece W before cutting held on the chuck table 10. The CCD camera images the workpiece W held on the chuck table 10 to obtain an image for performing alignment for aligning the workpiece W and the cutting blade 21, and controls the obtained image as a control means. Output to.

  As shown in FIGS. 2 and 3, the cutting means 20 includes a cutting blade 21 that is an extremely thin cutting grindstone having a substantially ring shape, a spindle 22 having the cutting blade 21 attached to the front end, and the spindle 22 is rotatable. A spindle housing 23 to be supported and a blade cover 24 are provided. The spindle 22 cuts the workpiece W by rotating the cutting blade 21. The spindle 22 is accommodated in the spindle housing 23, and the spindle housing 23 is supported by the Z-axis moving means 50. The axes of the spindle 22 and the cutting blade 21 of the cutting means 20 are set parallel to the Y-axis direction.

  The blade cover 24 includes a blade cover main body 25 attached to the front end portion of the spindle housing 23 and a cutting water supply nozzle 27 attached to the blade cover main body 25 with a bolt 26 or the like. The cutting water supply nozzle 27 includes a rigid bracket 28 that is attached to the blade cover main body 25 and extends in the vertical direction parallel to the Z-axis direction from the blade cover main body 25 to the processing height, and a pair of pipe nozzles 29. The rigid bracket 28 is attached to the blade cover main body 25 by screwing a bolt 26 passed through a through hole 25a provided in the blade cover main body 25 into the screw hole 28a.

  The pipe nozzles 29 are disposed on both sides in the Y-axis direction with the cutting blade 21 sandwiched between the front end portion of the spindle housing 23 and supply cutting water to the cutting blade 21 from both sides in the Y-axis direction. That is, the cutting water supply nozzle 27 includes a pipe nozzle 29 and is disposed on both sides of the front end portion of the spindle housing 23 with the cutting blade 21 interposed therebetween, and supplies cutting water to the cutting blade 21 from both sides. is there. The pipe nozzle 29 is attached to the lower end of the rigid bracket 28, extends in the horizontal direction parallel to the X-axis direction, and is formed in a cylindrical shape having an injection slit 29a for injecting cutting water on the side surface thereof. The pipe nozzle 29 is arranged at a position several mm higher than the processing location of the workpiece W. A plurality (three in the present embodiment) of the injection slits 29a are provided in each pipe nozzle 29 with an interval in the X-axis direction. The ejection slit 29 a passes through a part of the outer wall of the pipe nozzle 29 and extends in a direction perpendicular to the longitudinal direction of the pipe nozzle 29. Further, the plurality of ejection slits 29 a provided in each pipe nozzle 29 are arranged at positions aligned in the longitudinal direction of the pipe nozzle 29.

  Further, as shown in FIG. 4, a cutting water supply path 30 is formed inside the rigid bracket 28 and the pipe nozzle 29 attached to the lower end of the rigid bracket 28. The cutting water supply path 30 communicates with a cutting water source 100 that supplies cutting water via a connecting portion 28 b attached to the upper end of the rigid bracket 28. The cutting water supply path 30 guides the cutting water supplied from the cutting water source 100 to the injection slit 29a via the connecting portion 28b, and passes from the injection slit 29a to the machining location of the cutting blade 21 and the cutting blade 21 of the workpiece W. The cutting water is sprayed toward.

  As shown in FIG. 4, the pipe nozzle 29 has a cylindrical nozzle body 31 that has an injection slit 29 a and is attached to the lower end of the rigid bracket 28, and is provided at one end of the nozzle body 31. It has the adjustment part 32 inserted in the insertion hole 28c provided in the lower end part, and the worm screw 33 as a fixing | fixed part. The adjustment unit 32 is inserted into the insertion hole 28c, and rotates the nozzle body 31, that is, the pipe nozzle 29 in the cylindrical circumferential direction with respect to the rigid bracket 28 to which the nozzle body 31, that is, the pipe nozzle 29 is mounted. This adjusts the spraying direction of the cutting water in the spray slit 29a. The adjustment portion 32 is inserted into the insertion hole 28c, and maintains the nozzle body 31, that is, the pipe nozzle 29, in a posture parallel to the X-axis direction, and rotates around the axis center of the nozzle body 31, that is, the pipe nozzle 29, parallel to the X-axis direction. The direction of can be changed.

  The rice thread 33 regulates the rotation of the nozzle body 31, that is, the pipe nozzle 29. The potato screw 33 is screwed into a screw hole 28d that opens to the upper surface of the lower end of the rigid bracket 28 and extends from the upper surface of the lower end of the rigid bracket 28 toward the insertion hole 28c, and the tip contacts the adjustment portion 32. Thus, the nozzle body 31, that is, the pipe nozzle 29 is fixed to the rigid bracket 28, and the rotation of the nozzle body 31, that is, the pipe nozzle 29 around the axis is restricted.

  The cutting water supply nozzle 27 is provided with a position display means 37 including a scale 35 indicating the direction of the nozzle body 31, that is, the pipe nozzle 29 in the rotational direction around the axis, and a display mark 36. A plurality of scales 35 are provided at equal intervals in the rotation direction of the nozzle body 31 of the pipe nozzle 29, that is, around the axis, in each nozzle body 31 of the pipe nozzle 29. The scale 35 extends linearly in the longitudinal direction of the nozzle body 31 of the pipe nozzle 29. The plurality of scales 35 provided on the nozzle main body 31 of the pair of pipe nozzles 29 are provided at positions where the relative positions with respect to the ejection slit 29 a are equal to each other in the positional relationship toward the cutting blade 21. That is, the relative positions of the plurality of scales 35 provided in the nozzle body 31 of one pipe nozzle 29 with respect to the injection slits 29a are the injections of the plurality of scales 35 provided in the nozzle body 31 of the other pipe nozzle 29. It is equal to the relative position with the slit 29a.

  The display mark 36 is provided around the insertion hole 28c at the lower end of the rigid bracket 28 and extends linearly in the X-axis direction. That is, a pair of display marks 36 is provided at the lower end of the rigid bracket 28. The pair of display marks 36 are disposed at positions where the relative positions with the cutting blade 21 are equal.

  The plurality of scales 35 provided on the nozzle body 31 of each pipe nozzle 29 are preferably formed in different forms such as different colors, lengths, patterns, and the like. In this case, the scale 35 provided on the nozzle body 31 of one pipe nozzle 29 and the scale 35 provided on the nozzle body 31 of the other pipe nozzle 29 have the same relative position with respect to the ejection slit 29a. It is desirable that they are formed in the same form such as the same color, length and pattern.

  When the nozzle body 31, that is, the pipe nozzle 29 is fixed to the rigid bracket 28 by the worm screw 33, the position display unit 37 displays any one of the scales 35 of the plurality of scales 35 provided on the pipe nozzle 29 as a display mark 36. The nozzle main body 31, that is, the pipe nozzle 29 can be fixed in a desired rotational direction. When the relative positions of the pair of pipe nozzles 29 relative to the injection slit 29a of the scale 35 provided in the nozzle body 31 are formed in the same color, length, and pattern, the same color, By positioning the scale 35 having the same length and the same pattern as the display mark 36 in the X-axis direction, the direction of the rotation direction of the nozzle body 31 of the pair of pipe nozzles 29 can be easily matched.

  The control means controls the above-described constituent elements constituting the cutting apparatus 1 to cause the cutting apparatus 1 to perform cutting on the workpiece W. Specifically, the control means moves the chuck table 10 and the cutting means 20 relatively in the X-axis direction, the Y-axis direction, and the Z-axis direction, and moves the chuck table 10 around an axis parallel to the Z-axis. The cutting device 1 is made to perform cutting on the workpiece W by rotating the workpiece. Note that the control means is configured mainly by a microprocessor (not shown) provided with an arithmetic processing unit constituted by a CPU or the like, a ROM, a RAM, or the like.

  Next, the machining operation of the cutting device 1 according to this embodiment will be described. First, when the operator registers the machining content information in the control means, places the workpiece W on the chuck table 10 separated from the cutting means 20, and receives an instruction to start the machining operation from the operator, the cutting apparatus 1 is used. Starts the machining operation. In the machining operation, the control unit sucks and holds the workpiece W placed on the chuck table 10 and moves the chuck table 10 holding the workpiece W to the lower side of the cutting unit 20.

  Then, after executing the alignment, the control unit cuts the workpiece W while supplying the cutting water from the cutting water supply nozzle 27 based on the processing content information. When the cutting is completed, the control unit separates the cutting unit 20 from the workpiece W and then separates the chuck table 10 from below the cutting unit 20. Then, when the chuck table 10 is separated from the lower side of the cutting means 20, the control means releases the suction holding of the chuck table 10, and the operator removes the workpiece W already cut on the chuck table 10, before cutting. The workpiece is placed on the chuck table 10. By repeating such a process, the cutting apparatus 1 cuts the workpiece W.

  As described above, according to the cutting device 1 according to the present embodiment, the cutting water supply nozzle 27 includes the rigid bracket 28 and the pipe nozzle 29, and the pipe nozzle 29 is adjusted to adjust the injection direction of the injection slit 29a. A part 32 and an anchor screw 33 for restricting the rotation of the pipe nozzle 29 are provided. For this reason, the cutting device 1 can fix the rigid nozzle 28 after rotating the direction of the pipe nozzle 29 in the circumferential direction, and can easily adjust the injection direction of the cutting water. Therefore, the cutting device 1 can change the jetting direction of the cutting water without replacing the blade cover 24.

  Moreover, the cutting device 1 includes a position display unit 37 that displays the direction of the pipe nozzle 29 in the rotation direction. Therefore, the cutting apparatus 1 can easily align the direction of the pair of pipe nozzles 29, that is, the relative positions of the cutting blades 21 of the injection slits 29a of the pair of pipe nozzles 29 can be equalized. In addition, it is possible to prevent the cutting blade 21 from falling down or unevenly attaching cutting waste. The scale 35 provided on the nozzle body 31 of the one pipe nozzle 29 and the scale 35 provided on the nozzle body 31 of the other pipe nozzle 29 are the same in the relative positions with respect to the ejection slit 29a. When formed in the same form such as color, length, and the same pattern, the relative positions of the cutting blades 21 of the injection slits 29a of the pair of pipe nozzles 29 can be easily equalized.

  In addition, a plurality of injection slits 29 a of the cutting water supply nozzle 27 of the cutting apparatus 1 described in the above-described embodiment are provided orthogonal to the longitudinal direction of the pipe nozzle 29 and spaced apart in the longitudinal direction of the pipe nozzle 29. Yes. However, in the present invention, the injection slit 29 a may be linearly extended in the longitudinal direction of the pipe nozzle 29 as shown in FIG. Fig.5 (a) is sectional drawing of the cutting means of the cutting device which concerns on the modification of embodiment, FIG.5 (b) is sectional drawing which expands and shows the b section of Fig.5 (a). In FIG. 5, the same parts as those of the above-described embodiment are denoted by the same reference numerals and description thereof is omitted.

  Further, in the present invention, as shown in FIGS. 5A and 5B, the adjustment portion 32 of the pipe nozzle 29 is provided with a dent 29 b corresponding to the scale 35, and the dent 29 b enters the tip of the worm screw 33. Protruding portion 33a may be provided. In this case, it is desirable to arrange the recesses 29b at positions corresponding to the corresponding scales 35 and the pipe nozzles 29 in the longitudinal direction. In this case, the projection 33a of the anchor screw 33 that fixes the pipe nozzle 29 to the rigid bracket 28 enters the recess 29b. Therefore, when the cutting device 1 is screwed in the worm screw 33, the scale 35 and the display mark 36 are aligned in the longitudinal direction of the pipe nozzle 29 without rotating the pipe nozzle 29 in contact with the worm screw 33. The pipe nozzle 29 can be fixed to the rigid bracket 28.

  The present invention is not limited to the above embodiment. That is, various modifications can be made without departing from the scope of the present invention.

DESCRIPTION OF SYMBOLS 1 Cutting device 10 Chuck table 20 Cutting means 21 Cutting blade 22 Spindle 23 Spindle housing 24 Blade cover 27 Cutting water supply nozzle 28 Rigid bracket 29 Pipe nozzle 29a Injection slit 30 Cutting water supply path 32 Adjusting part 33 Pot screw (fixing part)
35 Scale 36 Display mark 37 Position display means 100 Cutting water source W Workpiece

Claims (2)

A cutting apparatus comprising: a chuck table that holds a workpiece; and a cutting means that includes a cutting blade for cutting the workpiece held on the chuck table.
The cutting means is
A spindle housing that rotatably supports a spindle with the cutting blade mounted on the front end;
A blade cover provided with a cutting water supply nozzle disposed on both sides of the front end portion of the spindle housing with the cutting blade sandwiched therebetween to supply cutting water to the cutting blade from both sides;
The cutting water supply nozzle is
A rigid bracket extending up and down to the processing height;
A cylindrical pipe nozzle that is attached to the lower end of the rigid bracket and extends in the horizontal direction and has a jet slit on its side surface;
A cutting water supply path is formed inside the rigid bracket and the pipe nozzle, and the cutting water supply path communicates with a cutting water source.
The pipe nozzle is a cutting device having an adjustment unit that adjusts the injection direction of the injection slit by rotating the pipe bracket in a circumferential direction of the cylindrical shape with respect to the mounted rigid bracket, and a fixing unit that restricts rotation.   The cutting apparatus according to claim 1, wherein the cutting water supply nozzle includes a position display means including a scale indicating a direction in the rotation direction of the pipe nozzle and a display mark.

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