JP2006218551A - Cutting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cutting device capable of reducing the number of spray nozzles to be installed, and also, capable of suitably removing cut chips accumulated on the bottom part of a water case without separately providing a high-pressure pump or the like exclusive for the spray nozzle. <P>SOLUTION: The cutting device is provided with a support mount 32 for supporting a chuck table 30, a cutting-feed means 40 for reciprocating the support mount 32 in the cutting direction, a cutting means for cutting a workpiece 12 by a cutting blade 22 while supplying a cutting fluid, the water case 90, which is arranged to both sides of a moving path of the support mount 32 and catches the cut chips and the cutting fluid, and a discharge part 100 for discharging the cutting fluid and the cut chips to the outside from the water case 90. A two-fluid spray nozzle 70 for spraying fluid generated by mixing liquid with gas to the support mount 32 is installed on the support mount 32 to be made mobile. By this, the cut chips and the cutting fluid in the water case 90 can be washed away to the discharge part 100 by spraying the fluid mixture into the water case 90. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a cutting device, and more particularly to a cutting device having a mechanism for discharging cutting waste generated when cutting a workpiece together with a cutting fluid to the outside of the device.

  A cutting apparatus for cutting a workpiece such as a semiconductor wafer uses a cutting means having a cutting blade rotating at high speed and a cutting water supply nozzle to supply the cutting water and hold the workpiece held on the chuck table. Is a device (for example, a dicing device). In this cutting apparatus, the chuck table is rotatably supported on a horizontal plane by a support base, and the support base can reciprocate in the X-axis direction (cutting direction). The cutting means is movable in the Y-axis and Z-axis directions.

  Further, water cases for receiving cutting waste and cutting water generated by the cutting process are extended along the movement path of the support base on both sides in the Y-axis direction of the support base. Further, a pair of telescopic bellows members are connected to both ends of the support base in the X-axis direction, and the bellows members cover the opening of the water case that becomes the movement path of the support base. .

  The cutting device having such a configuration moves the cutting means in the Y-axis and Z-axis directions while reciprocating the chuck table holding the workpiece in the X-axis direction, and cuts a cutting blade that rotates at high speed into the workpiece. By cutting, the cutting line (street) of the workpiece is cut in the X-axis direction.

  During such cutting, the bellows member on one side expands and the bellows member on the other side contracts with the reciprocation of the support base in the X-axis direction, so that the opening of the water case, that is, the support base The movement path is always covered from above by the bellows member. With this configuration, at the time of cutting, the cutting water supplied from the cutting water supply nozzle and the cutting waste generated by the cutting can be received by the pair of bellows members and dropped into the water case. Then, the cutting water and the cutting waste flow through the drainage passage between the inner peripheral wall and the outer peripheral wall of the water case, and are discharged from the water case outlet to the outside of the apparatus. In this way, cutting water is prevented from entering the apparatus.

  However, for example, when a workpiece having a relatively high specific gravity, such as ceramics, is cut, ceramic cutting waste accumulates on the bottom of the water case, and the drainage channel may be blocked. As a result, there is a problem that the used cutting water does not flow to the drain port but overflows from the water case and enters the inside of the apparatus. Such a problem is not limited to the case where the workpiece is a ceramic substrate, and even when the workpiece is a CSP substrate or the like, a large end material is generated by the cutting process. The problem of depositing at the bottom arises.

  In order to solve such a problem, Patent Document 1 describes a technique in which an injection nozzle is provided at the bottom of a drainage passage of a water case, and a liquid or air is injected to generate a water flow and push away cutting waste. Yes.

  As another solution, Patent Document 2 discloses that a side surface of a moving support member that supports a chuck table so as to be movable in the X-axis direction is in contact with an injection nozzle that injects cleaning water from a slit or a bottom portion of a water case. A method for removing cutting waste from the bottom of the water case by providing a moving wiper is described. In this method, since the injection nozzle is movable, the same effect can be obtained with a smaller number of injection nozzles than when the injection nozzles are fixed, and the water flow generated by the injection nozzles is small because the wiper is used. There is an advantage of being good.

JP 2002-103177 A JP 2003-133259 A

  However, in the method described in Patent Document 1, there is a problem that the end material cannot be sufficiently washed away unless the injection nozzles are installed at a plurality of locations, or the cutting waste is dammed by the injection nozzle installed at the bottom of the drainage channel. There was a problem of being stopped.

  In the method described in Patent Document 2, the installation of the wiper complicates the device configuration and increases the cost. For this reason, the inventors of the present application have studied a configuration in which only a spray nozzle is used without using a wiper. However, as a result of verification by the inventors of the present application, it has been found that the use of a normal injection nozzle cannot generate a sufficient water flow to remove such heavy and large cutting waste. did. This fact is described in Patent Document 2 that the injection nozzle is an auxiliary means and may or may not be installed, and it is not suggested that the cutting waste can be removed only by the injection nozzle. It is clear from that.

  For this reason, the inventors of the present application examined increasing the water pressure of water sprayed from the spray nozzle in order to generate a sufficient water flow to remove the cutting waste in the water case. However, in order to generate such a high water pressure, there is no need for cleaning water separately from liquid supply means such as a water supply pump commonly used for other purposes such as supply of cutting fluid to the processing point. There was a problem that special liquid supply means such as a high-pressure pump and a water storage tank had to be provided exclusively.

  Therefore, the present invention has been made in view of the above-described problems, and the object of the present invention is to reduce the number of water nozzle injection nozzles and to provide a high-pressure pump dedicated to the injection nozzle. It is an object of the present invention to provide a new and improved cutting apparatus capable of suitably removing cutting chips accumulated on the bottom of a water case without providing them separately.

  In order to solve the above-described problems, according to one aspect of the present invention, a chuck table that holds a workpiece, a support base that supports the chuck table, and a support base that reciprocates in the cutting direction are provided. A cutting feed means for cutting and feeding the table, a cutting means for cutting the work piece with a cutting blade while supplying a cutting fluid (for example, cutting water), and a work piece disposed on both sides of the movement path of the support base. A cutting device is provided that includes a water case that receives cutting waste and cutting fluid generated by cutting, and a discharge unit that discharges the cutting fluid and cutting waste from the water case to the outside. This cutting apparatus is installed on a support base and ejects fluid mixed with liquid (for example, water) and gas (for example, air) into the water case, so that cutting waste and cutting fluid received by the water case are removed. A two-fluid injection nozzle that is forced to flow into the discharge portion is provided.

  With such a configuration, even when the specific gravity of the cutting waste is heavy (ceramics, etc.) or when the cutting waste is a large end material (CSP substrate, etc.) by injecting the mixed fluid with the two-fluid injection nozzle, A large pressure can be applied to the cutting waste accumulated in the water case, so that it can be suitably swept away. At this time, as the liquid supply means for supplying the liquid to the two-fluid injection nozzle, liquid supply means such as a high-pressure pump and a tank used for other cutting liquid supply nozzles can be shared. There is no need to add additional means.

  Further, since the two-fluid injection nozzle is attached to the support base that supports the chuck table, during the cutting process, the two-fluid injection nozzle is moved to the water case along with the operation of the support base that cuts and feeds the chuck table. Reciprocate in the cutting direction (X-axis direction) along the drainage path. By making the two-fluid injection nozzle movable in this way, even when cutting waste accumulates near the discharge part, high-pressure mixed fluid is directly injected from the vicinity to reliably remove the cutting waste. can do. Therefore, the cutting waste removal effect equal to or higher than that can be obtained with a smaller number of installation nozzles than when a fixed injection nozzle is installed.

  Further, the two-fluid injection nozzle may be installed on the support base at a position on the front side in the rotation direction of the cutting blade at the processing point of the workpiece, and the injection direction of the two-fluid injection nozzle is You may make it be the substantially same direction as the rotation direction of the cutting blade in the processing point of a thing. Thereby, since the two-fluid injection nozzle is arranged on the side where a large amount of cutting waste is scattered by cutting and the mixed fluid can be jetted in the direction, the accumulated cutting waste can be effectively removed. This is particularly useful when a large end material is scattered in the above direction due to, for example, cutting of a CSP substrate or the like.

  As described above, according to the present invention, since the two-fluid injection nozzle is arranged on the support base that reciprocates in the cutting direction and is movable, the number of injections is smaller than when the injection nozzle is fixed. With the nozzle, the same or better cutting scrap removal effect can be obtained.

  Further, by using the two-fluid jet nozzle, if the amount of liquid to be jetted is the same, a jet pressure larger than that of the jet nozzle jetting only the liquid can be obtained. For this reason, even if a dedicated high-pressure pump or tank is not separately provided, the cutting waste accumulated on the bottom of the water case can be suitably removed.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the present specification and drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and redundant description is omitted.

(First embodiment)
First, based on FIG. 1, the whole structure of the dicing apparatus 10 comprised as an example of the cutting device concerning the 1st Embodiment of this invention is demonstrated. FIG. 1 is an overall perspective view showing a dicing apparatus 10 according to the present embodiment.

  As shown in FIG. 1, the dicing apparatus 10 is a cutting unit 20 that cuts a workpiece 12 such as a ceramic substrate or a CSP (Chip Size Package) substrate, and a holding unit that holds the workpiece 12. A chuck table 30, a cutting means moving mechanism (not shown), and a chuck table moving mechanism (not shown) are provided.

  The cutting means 20 includes a cutting blade 22 attached to a spindle. The cutting means 20 cuts the workpiece 12 by cutting the workpiece 12 while rotating the cutting blade 22 at a high speed to form an extremely thin kerf (cut groove) along the cutting line. be able to.

  The chuck table 30 is, for example, a disk-like table having a substantially flat upper surface, and includes a vacuum chuck (not shown) on the upper surface. For example, the workpiece 12 supported by the frame 14 via the wafer tape 13 is placed on the chuck table 30, and the workpiece 12 can be vacuum-sucked and stably held. The chuck table 30 is supported by a support base 32 so as to be rotatable on a horizontal plane, and the support base 32 can be reciprocated in the X-axis direction by a cutting feed means described later.

  The cutting unit moving mechanism is composed of a cut feed means and an index feed means, which will be described later, and moves the cutting means 20 in the Y-axis and Z-axis directions. The Y-axis direction is a horizontal direction (indexing direction) orthogonal to the cutting direction (X-axis direction), for example, the axial direction of a spindle disposed in the cutting means 20. By sending the cutting means 20 in such a Y-axis direction at intervals of the cutting line, the cutting edge of the cutting blade 22 can be aligned with the cutting position (cutting line) of the workpiece 12. The Z-axis direction (vertical direction) is a cutting direction when the cutting blade 22 is cut into the workpiece 12. By moving the cutting means 20 in such a Z-axis direction, the cutting depth of the cutting blade 22 with respect to the workpiece 12 can be adjusted.

  The chuck table moving mechanism reciprocates the chuck table 30 holding the workpiece 12 in the X-axis direction, which is the cutting direction, during cutting, and moves the cutting edge of the cutting blade 22 relative to the workpiece 12 in a linear locus. Let it work with.

  The dicing apparatus 10 having the above-described configuration moves the chuck table 30 relative to the cutting means 20 in the X-axis direction while cutting the cutting blade 22 that rotates at a high speed into the workpiece 12. The object 12 can be divided into a plurality of chips by dicing.

  Next, based on FIG.2 and FIG.3, the structure of the dicing apparatus 10 concerning this embodiment is demonstrated in detail. 2 is a perspective view showing an internal configuration of the dicing apparatus 10 according to the present embodiment, and FIG. 3 is a front view showing a configuration of the cutting fluid discharge mechanism 80 in the dicing apparatus 10 according to the present embodiment. .

  As shown in FIG. 2, the cutting means 20 includes, for example, a cutting blade 22, a spindle 25, a spindle housing 26, a pair of cutting water supply nozzles 27 as an example of a cutting fluid supply nozzle, a foil cover 28, Is mainly provided.

  The cutting blade 22 is, for example, an extremely thin cutting grindstone having a substantially ring shape. The cutting blade 22 is attached to the tip of the spindle 25 using a mounting member such as a flange or a nut. The cutting blade 22 may be, for example, a hub blade in which a face part and a base part are integrally formed, or may be constituted by a washer blade including only the face part.

  The spindle 25 is a rotating shaft extending in the Y-axis direction, and transmits a rotational driving force of a motor (not shown) to rotate the cutting blade 22 at a high speed of, for example, 30,000 rpm. Most of the spindle 25 is covered with a spindle housing 26, but its tip is exposed from the spindle housing 26, and a blade 22 is attached to the tip. The spindle housing 26 supports the spindle 25 so as to be rotatable at high speed by an air bearing provided therein.

  In addition, a pair of cutting water supply nozzles 27 are disposed on both sides in the Y-axis direction of the cutting blade 22 so as to sandwich the cutting blade 22, for example, and cooling is performed by injecting cutting water toward both side surfaces of the cutting blade 22 and processing points. To do. As the cutting fluid supply nozzle, in addition to the cutting water supply nozzle 27, an outer peripheral nozzle positioned opposite to the outer periphery of the cutting blade 22 may be provided. Further, the foil cover 28 is provided so as to cover the outer periphery of the cutting blade 22 and protects the cutting blade 22 and prevents scattering of cutting water, cutting waste, and the like during the cutting process.

  Such a cutting means 20 is supported so as to be movable in the Z-axis direction, which is the cutting direction, by the cutting feed means 50 constituting the cutting means moving mechanism. Further, the cutting feed means 50 is supported by the index feed means 60 so as to be movable in the Y-axis direction that is the indexing direction.

  The cutting feed means 50, for example, supports the Z-axis guide rail 52 extending in the Z-axis direction on the side surface of the vertically standing wall portion 51 and the cutting means 20, and is slidable on the Z-axis guide rail 52. A supported elevating part 53, a Z-axis ball screw (not shown) screwed into a nut part (not shown) arranged in the Z-axis direction and formed in the elevating part 53, and the Z-axis ball screw And a Z-axis pulse motor 54 for rotationally driving the motor. The cutting feed means 50 rotates the Z-axis ball screw by driving the Z-axis pulse motor 54 to move the elevating part 53 up and down in the Z-axis direction, thereby moving the cutting means 20 in the Z-axis direction.

  The index feeding means 60 includes a Y-axis guide rail 62 extending in the Y-axis direction on the base 11, and a Y-axis guide rail 62 slidably supported by the Y-axis guide rail 62 and integrally formed with the wall portion 51. An axis moving base 61, a Y-axis ball screw 63 that is screwed into a nut portion (not shown) formed on the Y-axis moving base 61, and a Y-axis pulse motor 64 that rotationally drives the Y-axis ball screw 63. Composed. The index feeding means 60 rotates the Y-axis ball screw 63 by driving the Y-axis pulse motor 64, thereby moving the Y-axis moving base 61 horizontally in the Y-axis direction and moving the cutting means 20 in the Y-axis direction. .

  On the other hand, the chuck table 30 is rotatably supported by a support base 32 as shown in FIGS. 2 and 3, and the support base 32 can be reciprocated in the X-axis direction by a cutting feed means 40. ing.

  The cutting feed means 40 includes an X-axis guide rail 42 extending in the X-axis direction on the base 11, an X-axis moving base 41 slidably supported on the X-axis guide rail 42, an X-axis An X-axis ball screw 43 that is screwed into a nut portion (not shown) formed on the moving base 41 and an X-axis pulse motor 44 that rotationally drives the X-axis ball screw 43 are configured. The cutting feed means 40 horizontally moves the X-axis moving base 41 in the X-axis direction by rotating the X-axis ball screw 43 by driving the X-axis pulse motor 44. Accordingly, the support base 32 fixed to the X-axis movement base 41 can be reciprocated in the X-axis direction, and the chuck table 30 can be cut and fed in the X-axis direction.

  The support base 32 that supports the chuck table 30 is disposed, for example, between a rotation support portion 34 fixed on the X-axis movement base 41 and the rotation support portion 34 and the chuck table 30. The cover part 33 is comprised. The rotation support portion 34 has, for example, a substantially cylindrical shape extending in the Z-axis direction, and includes a rotation mechanism (not shown) that rotates the chuck table 30 therein. Further, the cover portion 33 is a plate-like member having a U-shaped cross section formed of, for example, a metal such as stainless steel or a synthetic resin such as plastic, and has both side surfaces and an upper surface. The cover portion 33 is disposed so as to cover the lower periphery of the chuck table 30 and prevents cutting water and cutting waste generated by the cutting process from entering the cutting feed means 40 and the like inside the apparatus. The cover portion 33 is formed with a through hole through which a rotation shaft (not shown) for connecting the rotation support portion 34 and the chuck table 30 is inserted. The cover part 33 does not rotate.

  Further, as shown in FIGS. 2 to 4, a cutting fluid discharge mechanism 80 is provided around the chuck table 30 and the support base 32 that can reciprocate in the X-axis direction as described above. Hereinafter, the cutting fluid discharge mechanism 80 will be described in detail.

  The cutting fluid discharge mechanism 80 includes a pair of bellows members 81 and 82 disposed on both sides in the X-axis direction of the support base 32 so as to be extendable in the X-axis direction, and X on both sides of the movement path of the support base 32. A water case 90 that is disposed along the axial direction and receives cutting waste and cutting water generated by cutting the workpiece 12, and a discharge unit 100 that discharges the cutting waste and cutting water received by the water case 90 to the outside. And a two-fluid injection nozzle 70 which is a feature according to the present embodiment.

  The bellows members 81 and 82 are made of, for example, a stretchable bellows cloth having a substantially U-shaped cross section, and are attached to the support base 32 and the water case 90.

  Specifically, a first fixed frame 81a is connected to one end of the bellows member 81 in the X-axis direction, and a second fixed frame 81b is connected to the other end. The first fixed frame 81 a is fixed to the end of the cover portion 33 of the support base 32 on the X axis positive direction side by screws, and the second fixed frame 81 b is fixed to the X axis of the inner peripheral wall 92 of the water case 90. It is fixed to the end on the positive direction side with screws. On the other hand, a first fixed frame 82a is connected to one end of the bellows member 82 in the X-axis direction, and a second fixed frame 82b is connected to the other end. The first fixed frame 82a is fixed to the end of the cover 33 of the support base 32 on the X-axis negative direction side with screws, and the second fixed frame 82b is fixed to the X of the inner peripheral wall 92 of the water case 90. It is fixed to the end of the negative shaft side by screws.

  Further, a guide plate 81c having a roller 81d at the lower part is attached to the middle part of the bellows member 81, and a guide plate 82c having a roller 82d to the lower part is attached to the middle part of the bellows member 82. The center portions of 81 and 82 are supported so as not to hang down.

  As described above, the bellows members 81 and 82 are disposed so as to cover the opening 95 of the water case 90 serving as a movement path of the chuck table 30 and the support base 32 from above. As a result, at the time of cutting, the bellows member 81 on one side expands and the bellows member 82 on the other side contracts as the support base 32 reciprocates, so the opening 95 of the water case 90 is always covered. It becomes the state.

  The water case 90 is, for example, a case that is disposed so as to surround the movement path of the chuck table 30 and the support base 32 and receives cutting waste, cutting water, and the like that have fallen from the bellows members 81 and 82. 2 to 4, for example, the water case 90 connects the outer peripheral wall 91 and the inner peripheral wall 92 erected in the vertical direction and extending in the X-axis direction, and the lower end of the outer peripheral wall 91 and the lower end of the inner peripheral wall 92. And a bottom portion 93. A groove having a U-shaped cross section formed by the outer peripheral wall 91, the inner peripheral wall 92, and the bottom 93 constitutes a drainage channel 94. The drainage channels 94 are formed on both sides of the support base 32 in the Y-axis direction so as to extend in the X-axis direction. The drainage channel 94 is preferably inclined so as to descend toward the discharge unit 100 from the viewpoint of drainage efficiency, but may be horizontal.

  Further, the central portion of the water case 90 (inside the inner peripheral wall 92) is a rectangular opening 95 having a longitudinal direction in the X-axis direction in order to secure a moving path for the chuck table 30 and the support base 32. ing. The pair of bellows members 81 and 82 are disposed so as to cover the opening 95 from above. At this time, as shown in FIG. 4B, the inner peripheral wall 92 of the water case 90 is positioned inside the side surface portion of the bellows members 81 and 82 and the side surface portion 33 a of the cover portion 33 of the support base 32. Placed in.

  Further, a discharge portion 100 is provided at one end of the water case 90 in the X-axis direction. As shown in FIGS. 2 to 5, for example, the discharge unit 100 is connected to the drain port 101 formed through the bottom 93 of the water case 90 and the drain port 101, and discharges cutting water and cutting waste to the outside of the apparatus. And a drainage drain 102.

  By the cutting fluid discharge mechanism 80 having the above-described configuration, the cutting water supplied from the cutting water supply nozzle 27 at the time of cutting and the cutting waste generated by the cutting of the workpiece 12 are converted into the pair of bellows members 81. , 82, and falls into the water case 90. Then, the cutting water and the cutting waste received by the water case 90 flow through the drainage channel 94 of the watercase 90 to reach the discharge unit 100, flow out of the drainage port 101, pass through the drainage drain 102, and go to the outside of the dicing apparatus 10. Discharged. In this way, it is possible to prevent the cutting water and the chips from entering the dicing apparatus 10 by suitably discharging the cutting water and the chips at the time of cutting.

  By the way, as described above, when the workpiece 12 is a ceramic substrate, a CSP substrate, or the like, cutting waste accumulates in the drainage channel 94 of the water case 90 to block the cutting water and cannot be suitably discharged. There was a problem.

  In order to solve this problem, the inventors of the present application first provide an injection nozzle that injects water or air at the end of the water case 90 opposite to the discharge unit 100 to directly control water pressure and air pressure. Experiments were conducted in which the cutting waste was pushed by acting on the cutting waste or by generating a water flow in the drainage channel 94. However, there was no noticeable effect in both cases, and it was not possible to remove the cutting waste. The reason for this is that when only water is injected, the force is insufficient when the injection amount is small, while the water level in the drainage channel 94 rises when the flow rate is increased, and the cutting waste sinks deeply. The power given to the waste was reduced. In addition, in the case of jetting only air, it was basically impossible to apply a force to peel off the surface tension of water adhering to the surface of the cutting waste.

  Next, the inventors of the present application conducted an experiment by installing a two-fluid injection nozzle at the end opposite to the discharge unit 100. However, even in this case, the cutting waste in the vicinity of the two-fluid injection nozzle can be swept away, but sufficient pressure cannot be applied to the cutting waste accumulated in the portion near the discharge unit 100. As a result, the cutting waste could not be completely swept away.

  In the above experiment, the injection amount of water and air is 5 liters / minute when only water is injected, and 150 liters / minute when only air is injected. In addition to requiring a special device, it was necessary to improve related members such as the water case 90 and the spray nozzle. In the case of jetting two fluids in which water and air were mixed, water was 1.5 liters / minute and air was 120 liters / minute.

  In addition, it seems that the above problem can be solved by additionally installing another two-fluid injection nozzle in the front, but this method requires a plurality of sets of two-fluid injection nozzles, which increases the production cost. There is a problem.

  Accordingly, the inventors of the present application have made diligent efforts to install the two-fluid injection nozzle 70 on the support base 32 that supports the chuck table 30 so that the cutting waste in the water case 90 is suitably swept away. I came up with a composition. Below, based on FIGS. 2-5, the 2 fluid injection | spray nozzle 70 which is the characteristic concerning this embodiment is explained in full detail.

  The two-fluid ejection nozzle 70 is an ejection nozzle that ejects a fluid obtained by mixing a liquid (for example, water) and a gas (for example, air). As shown in FIGS. 2 to 5, the two-fluid injection nozzles 70 are respectively disposed on both side surfaces of the support base 32 corresponding to the two drainage channels 94 of the water case 90. Specifically, for example, the two-fluid injection nozzle 70 is attached to both side surface portions 33a in the Y-axis direction of the cover portion 33 constituting the support base 32 by attachment members 75 (see FIG. 4B). ing.

  In particular, as shown in FIGS. 3 and 4A, the two-fluid injection nozzle 70 has a front side in the rotational direction of the cutting blade 22 at the processing point of the workpiece 12 in the side surface portion 33 a of the support base 32 ( In the drawing, it is preferably installed at a position on the discharge unit 100 side on the negative side in the X-axis direction. Here, “the direction of rotation of the cutting blade 22 at the processing point of the workpiece 12” is the moving direction of the chuck table 30 to be cut and fed in the case of downcut (in the case of illustration), and in the case of upcut. (Not shown) is the direction opposite to the moving direction of the chuck table 30 to be cut and fed.

  The two-fluid injection nozzle 70 has an injection direction (the direction of the injection port 73) substantially the same as the rotation direction of the cutting blade 22 at the processing point of the workpiece 12 (X-axis negative direction in the figure) ( (Slightly downward from the horizontal direction).

  A water supply hose 71 and an air supply hose 72 are connected to the two-fluid injection nozzle 70 arranged in this way. The water supply hose 71 communicates with water supply means (high-pressure pump for supply water, tank, etc.) not shown, and supplies water to the two-fluid injection nozzle 70 at a predetermined flow rate (for example, 1.5 liters / minute). The air supply hose 72 communicates with air supply means (a high-pressure pump for supply air, a tank, etc.), and supplies air to the two-fluid injection nozzle 70 at a predetermined flow rate (for example, 120 liters / minute).

  The two-fluid injection nozzle 70 supplied with air and water of a predetermined pressure in this way injects a fluid obtained by mixing the air and water into the drainage channel 94 of the water case 90. Accordingly, the mixed fluid is directly sprayed on the cutting waste accumulated in the drainage channel 94 of the water case 90, or the water flow toward the cutting waste discharging unit 100 is generated in the drainage channel 94. The cutting water and cutting waste in the path 94 can be forced to flow through the drainage part 100 and removed.

  At this time, the two-fluid injection nozzle 70 has a significantly higher fluid pressure acting on the cutting waste if the injection water amount per unit time is the same as that of the injection nozzle that injects only one fluid (for example, water). (For example, about 5 times). Therefore, by using the two-fluid injection nozzle 70, it is possible to use it for the other cutting fluid supply nozzle 27 and the like without providing a high-pressure water supply means (high-pressure pump, water storage tank, etc.) dedicated to the two-fluid injection nozzle 70. A relatively low pressure water supply means can be shared to generate sufficient pressure to remove the cutting waste accumulated on the water case 90. As described above, since the water supply means for other uses can be shared, even if the two-fluid injection nozzle 70 is additionally installed, it is possible to suppress an increase in apparatus cost and production cost, and further increase the installation space of the dicing apparatus 10. Absent.

  In addition, the two-fluid injection nozzle 70 is attached to the support base 32 that supports the chuck table 30 as described above. For this reason, as shown in FIG. 5, at the time of cutting, the pair of two-fluid jet nozzles 70 moves in the drainage channels 94 of the water case 90 in the X-axis direction along with the reciprocating movement of the chuck table 30 to be cut and fed. Will reciprocate. Therefore, if at least one two-fluid injection nozzle 70 is provided in each drainage channel 94, the cutting waste accumulated in the drainage channel 94 can be suitably removed over the entire range from upstream to downstream. In particular, a sufficient pressure can be applied to the cutting waste in the vicinity of the discharge unit 100 by directly injecting the mixed fluid from the vicinity thereof, and the waste can be reliably discharged to the discharge unit 100.

  Further, as described above, the two-fluid injection nozzle 70 is located on the side surface 33a of the support base 32 on the front side in the rotational direction of the cutting blade 22 at the processing point of the workpiece 12 (X-axis negative direction side). Are arranged. The arrangement of the two-fluid injection nozzle 70 is particularly effective when the workpiece 12 is a CSP substrate, for example. That is, in the cutting process of the CSP substrate, the discharge processing of the relatively large end material becomes a big problem, but the end material of the CSP substrate is mainly cut at the processing point by the rotational force of the cutting blade 22 during the cutting process. The blade 22 scatters forward in the rotational direction (X-axis direction negative direction side). Therefore, if the two-fluid injection nozzle 70 is arranged on the negative side in the X-axis direction of the support base 32 as described above, the fluid is directly applied from the vicinity of the scattered CSP substrate end material. Can be effectively removed by applying a high pressure.

  As described above, in this embodiment, the cutting waste in the water case can be suitably removed using the pair of movable two-fluid injection nozzles 70. Accordingly, since the cutting waste is not clogged in the drainage path 94 of the water case 90, it is possible to prevent the cutting water from overflowing from the water case 90 and entering the inside of the dicing apparatus 10.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to the example which concerns. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are of course within the technical scope of the present invention. Understood.

  For example, in the above-described embodiment, the example of the ceramic substrate or the CSP substrate has been mainly described as the workpiece 12, but the present invention is not limited to such an example. The workpiece may be, for example, various semiconductor wafers such as silicon wafers, package substrates such as GPS substrates and BGA substrates, sapphire substrates, glass materials, metal materials, synthetic resin materials such as plastics, and the like. Further, the shape of the workpiece may be any shape such as a substantially rectangular plate shape or a substantially disk shape. Further, the shape of the chuck table 40 and the like can be changed in accordance with the shape of the workpiece.

  In the above embodiment, the two-fluid injection nozzle 70 injects a fluid in which water and air are mixed from the viewpoints of safety, environment, cost, etc., but is not limited to this example. These various liquids and various gases other than air may be mixed and ejected.

  In the above embodiment, one set of the two-fluid injection nozzles 70 is provided on each side of the support base 32, but the present invention is not limited to such an example. For example, a plurality of sets of two-fluid ejection nozzles 70 may be disposed on the support base 32.

  The present invention can be applied to a cutting device, and in particular, can be applied to a cutting device having a cutting fluid discharge mechanism.

1 is an overall perspective view showing a cutting apparatus according to a first embodiment of the present invention. It is a perspective view which shows the internal structure of the dicing apparatus concerning the embodiment. It is a front view which shows the structure of the cutting fluid discharge | release mechanism concerning the embodiment. Fig.4 (a) is the elements on larger scale which show the structure of the cutting fluid discharge mechanism concerning the embodiment, FIG.4 (b) is a longitudinal cross-sectional view in the AA line of Fig.4 (a). It is a top view which shows roughly the aspect which 2 fluid injection nozzles reciprocate to a X-axis direction in the cutting fluid discharge | release mechanism concerning the embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Cutting device 12 Workpiece 20 Cutting means 22 Cutting blade 25 Spindle 27 Cutting fluid supply nozzle 30 Chuck table 32 Support base 33 Cover part 33a Side surface part of cover part 34 Rotation support part 40 Cutting feed means 50 Cutting feed means 60 Indexing Feed means 70 Two-fluid injection nozzle 71 Water supply hose 72 Air supply hose 73 Injection port 80 Cutting fluid discharge mechanism 81, 82 bellows member 90 Water case 91 Outer peripheral wall 92 Inner peripheral wall 93 Bottom portion 94 Drainage channel 95 Opening portion 100 Discharge portion 101 Drainage port 102 Drainage drain

Claims (2)

A chuck table for holding a workpiece, a support base for supporting the chuck table, a cutting feed means for cutting and feeding the chuck table by reciprocating the support base in a cutting direction, and supplying a cutting fluid Cutting means for cutting the workpiece by a cutting blade, and a water case disposed on both sides of the movement path of the support base and receiving cutting waste and cutting fluid generated by cutting the workpiece. A cutting device comprising: a discharge portion for discharging the cutting fluid and the cutting waste from the water case to the outside:
A two-fluid jet that is installed on the support base and jets a fluid in which a liquid and a gas are mixed into the water case, thereby forcing the cutting waste and the cutting fluid received by the water case to the discharge portion A cutting device comprising a nozzle. The two-fluid injection nozzle is installed on the support base at a position on the front side in the rotation direction of the cutting blade at a processing point of the workpiece,
2. The cutting apparatus according to claim 1, wherein an injection direction of the two-fluid injection nozzle is substantially the same as a rotation direction of the cutting blade at a processing point of the workpiece.

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