JP2003133259A - Dicing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a dicing device requiring no daily cleaning of an oil pan and causing no lowering an operating rate by preventing fragments, processing chips or the like of a work from being deposited on the oil pan receiving waste water of grinding water. SOLUTION: In order to prevent processing chips D produced by grinding processing on the oil pan 30 provided on the processing part 20 of the dicing device 10 performing trenching of the work W and grinding processing such as cutting by a rotary blade 21 from being deposited on the bottom face of the oil pan 30, a wiper 70 moved by coming into contact with the bottom face of the oil pan 30 or a processing chip discharge means comprising a belt conveyor 80 is provided. Since the processing ships D are discharged without being deposited on the bottom face of the oil pan 30 by the processing chip discharge means, the daily cleaning of the oil pan 30 is not needed, and the operating rate of the dicing device 10 is improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dicing device, and more particularly to a dicing device for performing groove processing and cutting processing on a work such as a semiconductor or an electronic component material.

[0002]

2. Description of the Related Art In a dicing machine for grooving or cutting a workpiece such as a semiconductor or electronic component material, the workpiece is ground while being sprayed with a thin grinding stone called a blade that rotates at high speed. The grinding water that has contributed to the machining at the machining point of the workpiece then flows into the oil pan arranged so as to surround the workpiece table. The wastewater of the grinding water that has flowed into the oil pan is discharged from the drain port formed in one of the four corners of the oil pan to the drain groove of the factory line through the drain duct. Incidentally, the oil pan is provided so as to be slightly inclined downward toward the drain port so that the waste water can easily flow.

[0003]

However, the waste water of the grinding water mixes with the scraps of the work and processing wastes and flows into the oil pan. In the conventional dicing device, the oil pan is attached so as to be slightly inclined downward toward the drain port, so that the waste water easily flows,
This wastewater does not have a flow rate enough to flush away all the work pieces and processing waste. Therefore, fragments of the work and processing wastes gradually accumulate on the bottom of the oil pan. In addition, the amount of deposition increases near the drainage port. For this reason, the oil pan needs to be cleaned from time to time, but the dicing device must be stopped for a long time for cleaning, which causes a problem that the operating rate of the dicing device is reduced.

The present invention has been made in view of the above circumstances, and prevents the fragments of the work, the processing wastes, and the like from accumulating in the oil pan, thereby eliminating the need for daily cleaning of the oil pan. It is an object of the present invention to provide a dicing device that does not reduce the operating rate.

[0005]

In order to achieve the above object, the present invention according to claim 1 is a dicing apparatus for performing a grinding process such as grooving or cutting of a work by a rotary blade in a working part. In the processing section, an oil pan for receiving waste water of grinding water is provided, and the oil pan is provided with a processing waste discharging unit for discharging processing waste generated by the grinding processing from the oil pan. It has a feature. Furthermore, the processing waste discharging means is a wiper that moves in contact with the bottom surface of the oil pan in conjunction with the grinding feed of the workpiece, and moves the wiper in the downstream direction of the flow of the wastewater. It is characterized in that a contacting / disconnecting means is provided for contacting the bottom surface of the oil pan when moving, and separating it from the bottom surface of the oil pan when moving in the upstream direction. According to the present invention, the wiper, which is the processing waste discharging means, interlocks with the grinding feed and pushes the processing waste in the downstream direction of the wastewater, so that the processing waste does not accumulate on the bottom surface of the oil pan.

Further, the invention according to claim 4 is characterized in that the processing waste discharging means is a belt conveyor provided on the bottom surface of the oil pan. According to the invention as set forth in claim 4, since the processing waste is always discharged toward the drain port by the belt conveyor, it does not accumulate in the oil pan.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of a dicing apparatus according to the present invention will be described below in detail with reference to the accompanying drawings. In each drawing, the same members are given the same numbers or reference numerals.

FIG. 1 is a front sectional view of a dicing apparatus according to the present invention. The dicing device 10 includes a processing unit 20,
It is composed of a microscope 60, an operation / display unit (not shown), a controller and the like. The processing portion 20 is a portion that performs groove processing and cutting processing on the work W. The microscope 60 is a member for observing the surface of the work W in order to evaluate the alignment and processing state of the work W, and the operation / display unit is provided with switches and display means for operating each part of the dicing device 10. . The controller is a part that controls each operation of the dicing device 10, and is composed of a microprocessor, a memory, an input / output circuit, and the like.
It is stored inside the pedestal. In addition, FIG.
FIG. As shown in FIGS. 1 and 2,
In the processing unit 20, a rotary blade 21 for grooving or cutting the work W is attached to an air bearing spindle with a built-in high-frequency motor (not shown), and 30,000 rpm to
While being rotated at a high speed of 60,000 rpm, it is index-fed by a feeding mechanism (not shown) in the Y direction (the direction perpendicular to the paper surface of FIG. 1) orthogonal to the X direction in the drawing.
This rotary blade 21 is a thin disk-shaped, and is an electrodeposition blade in which diamond abrasive grains or CBN abrasive grains are electrodeposited with nickel,
Resin-bonded resin blades are used. The rotary blade 21 has a flange cover 22 that is open on the front side and the lower side.
The grinding water is supplied to the processing point from the grinding nozzle 23 surrounded by. Also,
A cleaning nozzle 24 is provided on the right side of the rotary blade 21 and is supplied with cleaning water. An X guide rail 28 is provided on the machine base 29, the X table 27 is guided by the X guide rail 28 and the linear guide 28A, and an AC servomotor (not shown), a ball screw 43 and a nut 43A.
It is moved in the X direction by a drive mechanism consisting of. The θ table 26 is placed on the X table 27.
A work table 25 is connected to. The work W to be processed is adsorbed and fixed to the upper surface of the work table 25, rotated by θ by the θ table 26, and X
The table 27 is designed to feed by grinding in the direction of arrow X in the figure. An oil pan 30 for receiving waste water of grinding water or cleaning water is fixed to the machine base 29 by a holder 52, and a right side plate provided in close contact with the table cover 34 covering the θ table 26 and the oil pan 30. A bellows 31 is provided between the oil pan 30 and the left side plate 33, which is closely attached to the oil pan 30 as well as the table cover 34.
It covers the opening at the center of the. Left side plate 3
As shown in FIG. 1, 3 has a shape in which the upper portion is inclined to the right side (inside the device).

FIG. 3 is a perspective view showing the shape of the oil pan 30. As shown in FIG. 3, the oil pan 30 has a U-shaped bottom plate 30H having an opening 30A formed in the center thereof.
And an inner fence 30F provided so as to surround the opening 30A, and an outer fence 30 surrounding the outer periphery of the bottom plate 30H.
It is composed of G and. Bellows support plates 30B are welded to the front and rear sides of the inner fence 30F, and leg plates 30C are welded to the front and rear sides of the bottom plate 30H. Further, the U-shaped bottom plate 30H has a lower left end portion in the figure formed one step lower, a drain port 30D is formed in each of the front left corner and the rear left corner, and a drain port is provided below the drain port 30D. The cylinder 30E is welded. This oil pan 3
0 is arranged as shown in FIG. 1 and FIG.
The portions C and 30C are screwed to holders 52 and 52 provided on the machine base 29. At this time, the oil pan 30 is attached so as to be inclined so that the side where the drainage ports 30D and 30D are formed is slightly lower than the other side. Further, the drain tubes 30E, 30E are inserted into the holes formed in the drain duct 35 as shown in FIG.

Further, as shown in FIGS. 1 and 2, a wiper 70, which is a processing waste discharging means, is attached to each of the front side surface and the back side surface of the table cover 34. The wiper 70 includes a wiper blade 72, a holder 71, an air cylinder 73 and the like.
The holder 71 holding the wiper blade 72 has a shaft 74
Is rotatably mounted on the fulcrum. The upper portion of the holder 71 is rotatably connected to the cylinder shaft 73A of the air cylinder 73 via a pin 75. The air cylinder 73 is rotatably attached to the side surface of the table cover 34 through a hole 73B at the base end thereof. The air cylinder 73 is a connecting / disconnecting unit that brings the wiper blade 72 into contact with or separates from the bottom surface of the oil pan 30. The holder 71 is vertically positioned at the retracted end of the cylinder shaft 73A, at which time the wiper blade 72 contacts the bottom of the oil pan 30. Also, the cylinder shaft 73
At the forward end of A, the holder 71 is tilted, and the wiper blade 72 is separated from the bottom of the oil pan 30. Processing waste D
The wiper blade 72 that pushes away the nylon brush,
Alternatively, sponge or rubber is suitable. Further, on the side surface side of the table cover 34 on the left side in FIG. 1, pipes 77, which are connected to cleaning water supply tubes (not shown) on the front side and the back side, respectively, and which have a slit in the lower portion are block 76.
Is installed through. The cleaning water is sprayed from the slit of the pipe 77 toward the bottom of the oil pan 30.

Next, the operation of the dicing apparatus 10 thus constructed will be described. First, the operator sets the rotary blade 21 on the spindle of the processing section. At this time, the work table 25 is positioned below the microscope 60 so as not to interfere with the attachment of the rotary blade 21. Next, the work W is placed on the work table 25 and is vacuum-sucked. Next, the pattern formed on the surface of the work W is observed under the microscope, and the operator operates the switch of the operation / display unit while viewing the observation image to align the work W. Workpiece W that has completed alignment is X
When the table 27 is moved, it is carried into the processing unit 20, and the rotary blade 21 rotating at high speed and the grinding feed by the X table 27 perform groove processing and cutting processing. During processing, grinding water is supplied from the grinding nozzle 23 to the processing point, and pre-cleaning water is supplied from the cleaning nozzle 24. After processing one line, the rotary blade 21 is index-fed in the Y direction, positioned on the line to be processed next, and this line is also processed by the grinding feed by the X table 27. When such an operation is repeated and the machining of all the lines in one direction of the work W is completed, the θ table 26 rotates the work W by 90 degrees, and the machining is performed in line with the line orthogonal to the previous line. When all processing is completed, the work W is conveyed to the position of the microscope 60, and a lamp (not shown) indicating the completion of processing blinks. Here, the operator removes the work W from the work table 25 after observing the working state of the working portion of the work W with the microscope 60 as needed. The above is the flow of processing the work W by the dicing device 11.

Next, the wiper 7 which is a processing waste discharging means for preventing the processing waste D from accumulating on the bottom surface of the oil pan 30.
The operation of 0 will be described. As shown in FIG. 1, in the processing unit 20, the grinding water is supplied to the processing point of the work W, and the work W and the rotary blade 21 are cooled and the processing powder is removed. The pre-purified water supplied from the cleaning nozzle 24 cleans the surface of the work W. The waste water of the grinding water and the pre-purified water supplied to the work W in this way travels through the table cover 34 and the bellows 31, 31, and the oil pan 30.
Flow into. In addition, the spray of cutting water accelerated by the rotary blade 21 is jetted to the left of the device as shown in FIG.
It hits the left side plate 33 and is washed by the bellows 31 and the oil pan 30. At this time, since the upper portion of the left side plate 33 is inclined inward, the injected wastewater is reflected downward and efficiently flows into the oil pan 30. Some of these wastewater contains work W
Processing dust D such as chips, chips, and chips are mixed.
Since the oil pan 30 is mounted so that the drain ports 30D and 30D are low, the waste water flowing into the front side of the oil pan 30 is directed to the front side drain port 30D, and the waste water flowing into the rear side is located in the rear side. The water flows toward the drainage port 30D and is drained from the drainage pipe 30E through the drainage duct 35.
The processing waste D easily accumulates near the drainage port 30D, but when the X table 27 moves in the direction of the drainage port 30D, the cylinder shaft 73A of the air cylinder 73 attached to the table cover 34 is located at the backward end, Holder 7
1, the wiper blade 72 held by the oil pan 30
Since it is in contact with the bottom surface of the processing waste D, the processing waste D is pushed to the drain port 30D by the cleaning water sprayed from the wiper blade 72 and the slit of the pipe 77. Also, X
When the table 27 moves in the direction away from the drain port 30D, the cylinder shaft 73A of the air cylinder 73 is located at the forward end and the holder 71 is tilted, and the wiper blade 72 is separated from the bottom surface of the oil pan 30. Since it moves, the processing waste D is not pushed back in the direction opposite to the drain port 30D. As described above, the wiper 70, which is a processing waste discharging means, pushes the processing waste D in synchronism with the grinding feed of the work W, so that the processing waste D does not accumulate on the bottom surface of the oil pan 30, and the oil pan 30 is used daily. The total operation rate of the dicing device 10 is improved by being freed from general cleaning work.

In this embodiment, the cleaning water is sprayed from the pipe 77 in addition to the wiper 70.
The processing waste D can be swept away with only the wiper 70 without providing the 7, and the accumulation on the bottom surface of the oil pan 30 can be prevented.

Next, another embodiment of the present invention will be described with reference to FIGS. FIG. 4 is a front sectional view of the dicing device 10, and FIG. 5 is a partial side sectional view of the processing portion 20. The description of the parts common to the above-described embodiment will be omitted. In this other embodiment, as shown in FIGS. 4 and 5, a belt conveyor 80 is provided in the oil pan 30 as a processing waste discharging means. The belt conveyor 80 includes rollers 81 rotatably provided on the upstream side and the downstream side of the oil pan 30 where wastewater flows,
81, an endless belt 82 stretched between the rollers 81, 81, and a motor 83 connected to the roller 81 provided on the upstream side of the two rollers 81, 81.
It consists of Further, a scraper 87 is provided in the vicinity of the roller 81 on the downstream side so that the tip end portion thereof contacts the belt 82. The belt conveyors 80 are provided on the front side and the back side of the oil pan 30, respectively.
Further, on the downstream side of the table cover 34, as shown in FIG.
4 are provided. A large number of small holes 84A, 84A, ... Are formed in the lower portion of the pipe 84 from the center toward the outside, and one end of the pipe 84 is connected to the wash water supply tube 86.

The operation of the processing waste discharging means of this another embodiment will be described. During the processing of the work W, the fragments of the work W and the processing waste D are poured off onto the oil pan 30 and the bellows 31. The processing dust D dropped on the bellows 31 is small holes 84A, 84 of a pipe 84 provided in the table cover 34.
The cleaning water is sprayed downward from A, ..., and is washed down into the oil pan 30. In the oil pan 30, when the motors 83, 83 are driven, the rollers 81, 81 connected to the motors 83, 83 rotate and drive the belts 82, 82. Processing scraps D dropped in the oil pan 30
Are transported to the downstream side as they are accumulated on the belt 82, and finally, are scraped off from the belt 82 by the scraper 87 and guided to the discharge ports 30D and 30D. Since the processing waste D is discharged by the belt conveyor 80 in this way, it is prevented from accumulating in the oil pan 30.

In this alternative embodiment, in addition to providing the belt conveyor 80, the cleaning water is jetted from the pipe 74 attached to the table cover 34 toward the bellows 31. The injection may be omitted.

[0017]

As described above, according to the present invention, since the oil pan installed in the processing section is provided with the processing waste discharging means including the wiper or the belt conveyor,
It is possible to prevent the fragments of the work and the processing wastes from accumulating in the oil pan, and the daily cleaning of the oil pan is not required. Therefore, the operating rate of the dicing device is not reduced.

[Brief description of drawings]

FIG. 1 is a front sectional view of a dicing device according to an embodiment of the present invention.

FIG. 2 is a side sectional view around a work table of a dicing device according to an embodiment of the present invention.

FIG. 3 is a perspective view showing an oil pan of the dicing device according to the embodiment of the present invention.

FIG. 4 is a front sectional view of a dicing device according to another embodiment of the present invention.

FIG. 5 is a side sectional view around a work table of a dicing device according to another embodiment of the present invention.

[Explanation of symbols]

D ... Processing waste, W ... Work, 10 ... Dicing device, 20
... Processing part, 21 ... Rotating blade, 30 ... Oil pan, 3
Reference numeral 0D ... Drainage port, 31 ... Bellows, 70 ... Wiper (processing waste discharging means), 71 ... Holder, 72 ... Wiper blade, 7
3 ... Air cylinder (separating / contacting means), 80 ... Belt conveyor (machining waste discharging means), 81 ... Roller, 82 ... Belt,
83 ... Motor

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Noriaki Ebisu             9-7 Shimorenjaku, Mitaka City, Tokyo Stocks             Company Tokyo Seimitsu (72) Inventor Takayuki Asano             9-7 Shimorenjaku, Mitaka City, Tokyo Stocks             Company Tokyo Seimitsu

Claims (4)

[Claims] 1. A dicing apparatus for performing a grinding process such as grooving or cutting a work by a rotating blade in a processing unit,
The processing section is provided with an oil pan for receiving waste water of grinding water, and the oil pan is provided with processing waste discharge means for discharging processing waste generated by grinding from the oil pan. Dicing equipment. 2. The dicing apparatus according to claim 1, wherein the processing waste discharging means is a wiper which moves in contact with the bottom surface of the oil pan in conjunction with the grinding feed of the work. 3. A contact / detachment means for contacting the wiper with the bottom surface of the oil pan when moving in the downstream direction of the wastewater flow, and separating it from the bottom surface of the oil pan when moving in the upstream direction. The dicing device according to claim 2, wherein the dicing device is provided. 4. The dicing apparatus according to claim 1, wherein the processing waste discharging means is a belt conveyor provided on the bottom surface of the oil pan.