JP3815551B2 - Dicing machine - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a dicing apparatus, and more particularly to a dicing apparatus that performs grooving or cutting on a workpiece such as a semiconductor or electronic component material.
[0002]
[Prior art]
2. Description of the Related Art In a dicing apparatus that performs grooving or cutting on a workpiece such as a semiconductor or electronic component material, the workpiece is processed while applying grinding water with a thin grindstone called a blade that rotates at high speed. FIG. 6 shows a conventional dicing apparatus 110. As shown in FIG. 6, the grinding water is supplied from the grinding water nozzle 123 toward the rotary blade (blade) 121, and the grinding water that has contributed to the machining at the machining point of the workpiece W is then arranged so as to surround the work table 125. Into the oil pan 150. The waste water of the grinding water that has flowed into the oil pan 150 is drained from a drain port 150 </ b> D formed at one of the four corners of the oil pan 150 through a drain duct 135 to a drain groove on the factory line.
[0003]
FIG. 7 shows a cross-sectional view around the cutting table 125 of the conventional dicing apparatus 110. As shown in FIGS. 6 and 7, in the conventional dicing apparatus 110, ball holders 128A and 128A that engage with X-axis guide rails 128 and 128 provided on a machine base 129, a lead screw 143, and a ball nut 143A. There is an X table 127 that is ground and fed in the X direction. A θ table 126 is placed on the X table 127, and a work table 125 that holds the workpiece W by suction is attached to the θ table 126. Further, the oil pan 150 is screwed to the holders 152 and 152 of the machine base 129 with the leg plates 150C and 150C so as to surround the work table 125. The oil pan 150 is provided with bellows support plates 150B and 150B. The bellows support plates 150B and 150B are provided on the bellows support plates 150B and 150B so as to cover driving mechanisms such as the X-axis guide rails 128 and 128 and the lead screw 143. The bellows 131 and 131 are placed.
[0004]
FIG. 8 shows the shapes of the oil pan 150 and bellows 131 and 131 used in the conventional dicing apparatus 110. This conventional oil pan 150 includes a bottom plate 150H and an inner fence 150F and an outer fence 150G that surround an opening 150A at the center of the bottom plate 150H. Further, a drain port 150D is formed at one corner of the bottom plate 150H, and a drain tube 150E is welded in accordance with the drain port 150D. Bellows 131 and 131 are provided above the opening 150A of the oil pan 150 with a table cover 134 interposed therebetween. Grinding water and pre-purified water supplied to the workpiece W during processing flow down to the oil pan 150 through the bellows 131 and 131, and flow from the drain port 150D to the drain duct 135.
[0005]
[Problems to be solved by the invention]
However, in this conventional dicing apparatus 110, the guide mechanism and drive mechanism of the X table 127 are disposed below the oil pan 150, and the θ table 126 is directly placed on the X table 127. The bottom plate 150H requires an opening 150A. Further, it is necessary to cover the opening 150A with the table cover 134 and the bellows 131 and 131 so that the grinding water and the pre-purified water do not enter from the opening 150A.
[0006]
However, the bellows 131 and 131 are not waterproof, and there is a problem that water enters the guide mechanism and the drive mechanism of the X table 127. Moreover, in the oil pan 150, since the drain outlet 150D is formed in the left back of the bottom plate 150H, waste water flows to the left back side, and is drained from the drain outlet 150D. Since pieces of the workpiece W and grinding dust are likely to accumulate near the drain port 150D, the left side of the oil pan 150 needs to be frequently cleaned. However, since the left part of the oil pan 150 is under the bellows 131 and is a difficult place to clean, the dicing apparatus must be stopped for a long time for cleaning, and the operating rate of the dicing apparatus is reduced. There was a problem of letting.
[0007]
The present invention has been made in view of such circumstances, and can waterproof the guide mechanism and drive mechanism of the X table without using a sealing member such as a bellows, and the oil pan can be easily cleaned. It aims at providing the dicing apparatus which does not reduce an operation rate.
[0008]
[Means for Solving the Problems]
In order to achieve the above object, the present invention provides an X table for grinding and feeding a work table on which a workpiece is placed in the X direction, and a rotary blade attached to the tip, and index feeding in the Y direction perpendicular to the X direction. In a dicing apparatus that has a spindle and performs grooving and cutting of a workpiece with the rotary blade, an oil pan that is disposed below the work table and receives waste water of grinding water and cleaning water, and an outer side of the oil pan The guide means for guiding the X table in the X direction, the driving means for grinding and feeding the X table in the X direction, connected to the guide means and the driving means. In addition, a holding member for holding the work table in the oil pan is provided.
[0009]
According to the present invention, the guide means and the drive means for grinding and feeding the work table in the X direction in the oil pan are arranged outside the oil pan, and the work table is held in the oil pan by the holding member. Therefore, it is not necessary to form an opening at the bottom of the oil pan, and a bellows for sealing the opening is unnecessary. Further, since the bellows is not used, the oil pan can be easily cleaned, and the downtime of the dicing apparatus for cleaning is reduced.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
A preferred embodiment of a dicing apparatus according to the present invention will be described in detail below with reference to the accompanying drawings. In addition, in each figure, the same number or code | symbol is attached | subjected about the same member.
[0011]
FIG. 1 is an external view of a dicing apparatus according to the present invention. The dicing apparatus 10 includes a processing unit 20, an operation / display unit 11, an imaging unit 12, a monitor television 13, an indicator lamp 14, a controller 15, and the like. The processing unit 20 is a part that performs grooving or cutting on the workpiece. The imaging unit 12 is a part that images the workpiece surface in order to evaluate the workpiece alignment and machining state, and the operation / display unit 11 is provided with switches and display units for operating each part of the dicing apparatus 10. The controller 15 is a part that controls each operation of the dicing apparatus 10, and is constituted by a microprocessor, a memory, an input / output circuit, and the like, and is stored inside the frame of the dicing apparatus 10.
[0012]
FIG. 2 is a side sectional view showing the mechanism of the processing unit 20 of the dicing apparatus 10. FIG. 3 is a perspective view showing the main part of the processing part 20. As shown in FIGS. 2 and 3, the processing unit 20 includes a rotary blade 21 for performing grooving and cutting of the workpiece W attached to an air bearing spindle 22 with a built-in high-frequency motor, and a high speed of 30,000 rpm to 60,000 rpm. It is rotated by. Further, the spindle 22 is cut and fed in the direction of the arrow Z in the figure by the Z-direction feeding mechanism 45 and is index-fed in the direction of the arrow Y in the figure by the Y-direction feeding mechanism 41. The rotary blade 21 has a thin disk shape, and an electrodeposition blade in which diamond abrasive grains or CBN abrasive grains are electrodeposited with nickel, or a resin blade bonded with resin is used. The rotary blade 21 is surrounded by a flange cover (not shown) opened on the front side and the lower side, and grinding water is supplied to the processing point from a grinding nozzle provided on the flange cover. Moreover, there is a cleaning nozzle on the right side of the rotary blade 21, and cleaning water is supplied.
[0013]
Blocks 29B and 29C are provided on the machine base 29, and linear guide units 28 and 28, which are guide means for the X table 27, are arranged in parallel to the X direction in the drawing in each of the blocks 29B and 29C. The linear guide unit 28 includes a guide rail 28A and two ball holders 28B and 28B. The holding member 27A of the work table 25 attached to the X table 27 is fixed to the ball holders 28B and 28B on the block 29B side, and the ball holders 28B and 28B on the block 29C side are attached to the opposite side of the X table 27. The holding member 27B is fixed and is slidable in the X direction while the X table 27 is suspended and held.
[0014]
The block 29B is also provided with a linear motor 31 as driving means for the X table 27. The linear motor 31 includes a stator 31A attached to the block 29B and a slide core 31B attached to the holding member 27A, and the X table 27 is ground and fed in the X direction by the linear motor 31. The X table 27 is mounted with a θ table 26 that rotates θ about an axis in the Z direction, and a work table 25 is attached to the θ table 26. The workpiece W to be processed is attracted and fixed to the upper surface of the workpiece table 25, rotated by θ by the θ table 26, and ground and fed by the X table 27 in the direction of the arrow X in the figure.
[0015]
An oil pan 50 that receives waste water of grinding water and cleaning water is fixed to the machine base 29 via holders 29A and 29A with leg plates 50A and 50A so as to surround the X table 27. As shown in FIGS. 2 and 3, the guide rails 28 </ b> A and 28 </ b> A of the linear guide units 28 and 28, which are guide means of the X table 27, are arranged outside the both side surfaces in the X direction of the oil pan 50. Is suspended in the oil pan 50 by the holding members 27 </ b> A and 27 </ b> B, it is not necessary to provide an opening at the bottom of the oil pan 50.
[0016]
Next, the operation of the dicing apparatus 10 configured as described above will be described. First, the operator sets the rotary blade 21 on the spindle of the processing unit. At this time, the work table 25 is positioned below the imaging means 12 so as not to hinder the attachment of the rotary blade 21. Next, the work W is placed on the work table 25 and vacuum-sucked. Next, a pattern formed on the surface of the workpiece W under the imaging unit 12 is observed, and the operator operates the switch of the operation / display unit 11 while viewing the observation image to align the workpiece W. The workpiece W after the alignment is carried into the processing unit 20 by the movement of the X table 27, and grooving or cutting is performed by the rotary blade 21 rotating at high speed and the grinding movement by the X table 27. The X table 27 is suspended in the oil pan 50 by the holding members 27A and 27B, guided by the linear guide units 28 and 28, driven by the linear motor 31, and moved in the X direction in the oil pan 50.
[0017]
During the processing, the grinding water is supplied from the grinding nozzle to the processing point, and the pre-clean water is supplied from the cleaning nozzle. The supplied waste water of grinding water and cleaning water is received by the oil pan 50 and drained from a drain port 50B provided at the bottom corner of the oil pan 50. Since the oil pan 50 does not have an opening for moving the X table 25, waste water does not leak into the linear guides 28, 28 and the linear motor 31.
[0018]
When the processing of one line is completed, the rotary blade 21 is indexed in the Y direction, positioned at the line to be processed next, and this line is also processed by the grinding movement by the X table 27. When such operations are repeated and machining of all the lines in one direction of the workpiece W is completed, the θ table 26 rotates the workpiece W by 90 degrees, and machining is performed according to a line orthogonal to the previous line. When all machining is completed, the workpiece W is conveyed to the position of the image pickup means 12, and a lamp for informing completion of machining of the indicator lamp 14 blinks. Here, the operator removes the workpiece W from the workpiece table 25 after observing the machining state of the machining portion of the workpiece W with the imaging unit 12 as necessary. The above is the flow of processing the workpiece W by the dicing apparatus 10.
[0019]
When a plurality of workpieces W are machined, grinding waste and grinding powder accumulate near the drain 50B provided at the bottom of the oil pan 50, so the operator stops the operation of the dicing machine and cleans the oil pan 50. To do. At this time, since the oil pan 50 does not use a member that interferes with cleaning such as a bellows, the oil pan 50 can be easily cleaned, and the downtime for cleaning can be extremely small.
[0020]
4 and 5 are modifications of the embodiment of the present invention. In FIG. 4, a ball screw 32 and a servo motor 33 are used in place of the linear motor 31 as the driving means for the X table 27. The ball screw 32 includes a lead screw 32A and a ball nut 32B that is screwed into the lead screw 32A. The lead screw 32A is connected to the servo motor 33, and the ball nut 32B is connected to the holding member 27A. Other configurations are the same as those of the above-described embodiment.
[0021]
FIG. 5 shows an X table 27, linear guide units 28 and 28 serving as guide means for the X table 27, and a linear motor 31 serving as drive means arranged below the oil pan 50, and a holding member 27A for the work table 25. Is supported on the X table 27 by the connecting members 27C and 27C. A θ table 26 is attached to the holding member 27 </ b> A, and a work table 25 is attached to the θ table 26. By this mechanism, the work table 25 is fed in the X direction while being suspended in the oil pan 50. Also in this modified example, an opening is not necessary at the bottom of the oil pan 50.
[0022]
In this embodiment, the linear guide unit 28 is used as the guide means of the X table 27. However, the present invention is not limited to this, and various known guide means can be used. Further, although the linear motor 31 or the ball screw 32 and the servo motor 33 are used as the driving means, other known driving means may be used.
[0023]
【The invention's effect】
As described above, according to the present invention, the guide means and the driving means for grinding and feeding the work table in the X direction in the oil pan are arranged outside the oil pan, and the work table is suspended in the oil pan. Therefore, it is not necessary to form an opening at the bottom of the oil pan, and the waterproof effect is high. Moreover, the bellows which seals an opening part is unnecessary. Further, since the bellows is not used, the oil pan can be easily cleaned, and the downtime of the dicing apparatus for cleaning is reduced.
[Brief description of the drawings]
FIG. 1 is an external perspective view of a dicing apparatus according to an embodiment of the present invention. FIG. 2 is a side sectional view showing a structure of a processing portion. FIG. 3 is a perspective view showing a main portion of the processing portion. FIG. 5 is a side sectional view showing another modified example of the embodiment. FIG. 6 is a front sectional view showing a conventional dicing apparatus. FIG. 7 is a side showing a main part of the conventional dicing apparatus. Sectional view [Fig. 8] Perspective view showing oil pan and bellows of conventional dicing machine [Explanation of symbols]
W ... Work, 10 ... Dicing machine, 20 ... Processing part, 21 ... Rotary blade, 22 ... Spindle, 25 ... Work table, 27 ... X table, 27A / 27B ... Holding member, 28 ... Linear guide unit (guide means), DESCRIPTION OF SYMBOLS 31 ... Linear motor (drive means), 32 ... Ball screw (drive means), 32A ... Lead screw, 32B ... Ball nut (nut), 33 ... Servo motor (motor), 50 ... Oil pan

Claims (4)

An X table for grinding and feeding a work table on which a workpiece is placed in the X direction; and a spindle with a rotary blade attached to the tip and index feed in the Y direction perpendicular to the X direction. In dicing equipment that performs grooving and cutting,
An oil pan disposed below the work table and receiving waste water of grinding water and cleaning water;
A guide means disposed outside the oil pan for guiding the X table in the X direction;
A driving means disposed outside the oil pan and grinding and feeding the X table in the X direction;
A dicing apparatus connected to the guide means and the drive means and provided with a holding member for holding the work table in the oil pan. The dicing apparatus according to claim 1, wherein the guide means is a linear guide unit. The dicing apparatus according to claim 1, wherein the driving unit is a linear motor. 3. The dicing apparatus according to claim 1, wherein the driving unit includes a lead screw, a nut screwed into the lead screw, and a motor that rotationally drives the lead screw. .

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