JP2003117766A - Cutting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cutting device facilitating cleaning and having a small- sized oil pan for reducing downtime required for cleaning the oil pan. SOLUTION: In this cutting device 10, in the oil pan arranged in a machining part 20 for receiving waste water of cutting water, discharge holes 30D are formed on the front side and on the depth side respectively in a view from the front face of the cutting device. In this way, a flow passage for passing waste water from the front side to the depth side can be omitted, laborious cleaning below bellows 31 is not required, and the size of the oil pan 30 is lowered. Therefore, availability of the cutting device 10 is not lowered. The size of the machine is also reduced. When the oil pan 40 is divided on the front side and the depth side from the view from the front face of the cutting device 10, the oil pan can be freely attached/detached by pulling out or inserting them in the lateral direction. Therefore, the oil pan 40 can be pulled out from the cutting device 10 to be cleaned on the outside of the device, and consequently, cleaning can be carried out more easily in a shorter time.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cutting device, and more particularly to a cutting device for grooving or cutting a work such as a semiconductor or an electronic component material.

[0002]

2. Description of the Related Art In a cutting apparatus for grooving or cutting a work such as a semiconductor or an electronic component material, a work is processed by applying cutting water with a thin grindstone called a blade which rotates at a high speed. The cutting water that has contributed to the machining at the machining point of the workpiece then flows into an oil pan arranged so as to surround the workpiece table. The wastewater of the cutting water that has flowed into the oil pan is discharged from the drain port formed in one of the four corners of the oil pan to the drain groove of the factory line through the drain duct.

FIG. 5 shows a sectional view around a cutting table of a conventional cutting device. In the conventional cutting device, the X-axis guide rail 28 provided on the machine base 29,
There is an X table 27 that is cut and fed in the X direction by linear guides 28A, 28A that engage with 28, a lead screw 43, and a nut 43A. A θ table is placed on the X table 27, and a work table 25 for sucking and holding the work W is attached to the θ table. Further, the oil pan 50 is screwed to the holders 52, 52 of the machine base 29 by its leg plates 50C, 50C so as to surround the work table 25. The oil pan 50 is provided with bellows support plates 50B and 50B,
The X-axis guide rail 2 is provided on the bellows support plates 50B and 50B.
A bellows 31 provided so as to cover the drive mechanism such as 8, 28 and the lead screw 43 is mounted.

FIG. 6 shows the shape of an oil pan 50 used in this conventional cutting device. The conventional oil pan 50 includes a bottom plate 50H and an inner fence 50F and an outer fence 50G that surround an opening 50A at the center of the bottom plate 50H. Further, the drain port 5 is provided at one corner of the bottom plate 50H.
0D is formed, and the drain tube 50E is aligned with the drain port 50D.
Are welded. The cutting water and the pre-purified water supplied to the work W during processing are transmitted through the bellows 31 and the oil pan 5
It flows down to 0 and is drained from the drain port 50D to the drain duct.

[0005]

However, in the oil pan 50 of this conventional cutting device, since the drain port 50D is formed in the left back of the bottom plate 50H, the waste water on the front side flows to the left side and then on the back side. And is drained from the drain port 50D. Fragments of the work W and cutting powder are likely to accumulate near the drainage port 50D, so the left side of the oil pan 50 needs to be cleaned frequently. However, since the left side portion of the oil pan 50 is below the bellows 31 and is a place that is difficult to clean, the cutting device must be stopped for a long time for cleaning, which lowers the operating rate of the cutting device. There was a problem of letting it. In addition, the size of the oil pan 50 is increased in order to secure a flow path from the front side to the back side of the oil pan 50,
There is also a problem that the machine size of the cutting device becomes large.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a cutting device provided with a small oil pan 50 which is easy to clean.

[0007]

In order to achieve the above-mentioned object, the present invention provides a cutting device for performing groove machining and cutting of a work by a rotary blade in a machining section, wherein waste water of cutting water is fed to the machining section. A receiving oil pan is provided, and the oil pan is characterized in that drain ports are formed on the front side and the back side of the cutting device when viewed from the front.

According to the present invention, since the drain ports are formed on the front side and the rear side of the oil pan, a flow passage for the waste water to flow from the front side to the back side is unnecessary, and the bellows which is difficult to clean. There is no need to clean underneath, and the size of the oil pan is small. Therefore, the operating rate of the cutting device is not reduced, and the machine size can be reduced.

The present invention is also characterized in that, in the cutting device, the oil pan is divided into a front side and a rear side when viewed from the front of the cutting device, respectively.
The oil pans divided into the front side and the back side are detachably provided by pulling out and inserting laterally when viewed from the front of the cutting device. Therefore, since the oil pan can be pulled out from the cutting device and cleaned outside the device, the cleaning is simple and does not take time.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of a cutting apparatus according to the present invention will be described in detail below with reference to the accompanying drawings. In each drawing, the same members are given the same numbers or reference numerals.

FIG. 1 is a front sectional view of a cutting device according to the present invention. The cutting device 10 includes a processing unit 20, a microscope 60,
It is composed of an operation / display unit (not shown), a controller, and the like. The processing portion 20 is a portion that performs groove processing and cutting processing on the work. The microscope is a part for observing the work surface in order to evaluate the alignment and processing state of the work W.
The operation / display unit is provided with switches and display means for operating each unit of the cutting device 10. The controller is a part that controls each operation of the cutting device 10, and is configured by a microprocessor, a memory, an input / output circuit, and the like, and is stored inside the pedestal of the cutting device 10. As shown in FIG. 1, the processing unit 20 has a rotary blade 21 for grooving and cutting the work W attached to an air bearing spindle (not shown) with a built-in high frequency motor.
While being rotated at a high speed of 60,000 rpm, it is index-fed by a feeding mechanism (not shown) in the Y direction orthogonal to the X direction of the arrow in the figure. The rotary blade 21 has a thin disk shape, and an electrodeposition blade in which diamond abrasive grains or CBN abrasive grains are electrodeposited with nickel or a resin blade bonded with resin is used. The rotary blade 21 is surrounded by a flange cover 22 that is open on the front side and the lower side, and cutting water is supplied from a cutting nozzle 23 provided in the flange cover 22 to a processing point. Further, a cleaning nozzle 24 is provided on the right side of the rotary blade 21, and cleaning water is supplied. X on the machine base 29
The guide 28 is provided, and the X table 27 is the X guide 28.
And is moved in the X direction by a drive mechanism described later. A θ table 26 is placed on the X table 27, and a work table 25 is connected to the θ table 26. The work W to be processed is this work table 2
5 is sucked and fixed on the upper surface of 5, and is rotated by θ by the θ table 26, and is also indicated by the arrow X in the figure by the X table 27.
It is designed to be cut and fed in the direction. Further, an oil pan 30 for receiving waste water of cutting water or cleaning water is fixed to the machine base 29 by a holder (not shown), and a table cover 34 covering the θ table 26 and an oil pan 30.
The bellows 31 is provided between the right side plate 32 and the right side plate 32.
However, there is another bellows 3 between the table cover 34 and the left side plate 33 that is closely attached to the oil pan 30.
1 is provided to cover the central opening of the oil pan 30. The left side plate 33 is, as shown in FIG.
The upper part is inclined to the right (inside the device).

FIG. 2 is a perspective view showing the shape of the oil pan 30 of the cutting device 1 according to the first embodiment of the present invention. As shown in FIG. 2, the oil pan 30 includes a U-shaped bottom plate 30H having an opening 30A formed in the center thereof, an inner fence 30F provided so as to surround the opening 30A, and an outer periphery of the bottom plate 30H. It is composed of an outer fence 30G that surrounds it. Bellows support plates 30B are welded to the front and rear sides of the inner fence 30F, and leg plates 30C are welded to the front and rear sides of the bottom plate 30H. Further, drain holes 30D are formed at the front left corner and the rear left corner of the U-shaped bottom plate 30H, and drain tubes 30E are welded below the drain holes 30D. This oil pan 30
Is arranged as shown in FIG. 1, and is screwed to a holder (not shown) provided on the machine base 29 at the portions of the leg plates 30C and 30C. At this time, the oil pan 30 is attached so as to be inclined so that the side where the drainage ports 30D and 30D are formed is slightly lower than the other side. Further, the drain tubes 30E, 30E are inserted into the holes formed in the drain duct 35 as shown in FIG.

Next, the cutting device 10 thus constructed
The action of will be explained. First, the operator sets the rotary blade 21 on the spindle of the processing section. Work table 2 at this time
5 is located under the microscope 60 so as not to interfere with the attachment of the rotary blade 21. Next, the work W is placed on the work table 25 and is vacuum-sucked. Next, the pattern formed on the surface of the work W is observed under the microscope, and the operator operates the switch of the operation / display unit while viewing the observation image to align the work W. The work W that has completed the alignment is carried into the processing unit 20 by the movement of the X table 27, and the rotary blade 2 that rotates at high speed.
Groove processing and cutting processing are performed by 1 and the cutting movement by the X table 27. During processing, cutting water is supplied from the cutting nozzle 23 to the processing point, and pre-cleaning water is supplied from the cleaning nozzle 24. After processing one line, the rotary blade 21
Is index-fed in the Y direction, positioned on the line to be processed next, and this line is also processed by the cutting movement by the X table 27. This kind of operation is repeated,
When the machining of all the lines in one direction of the work W is completed, the θ table 26 rotates the work W by 90 degrees, and the machining is performed in accordance with the line orthogonal to the previous line. When all the processing is completed, the work W is conveyed to the position of the microscope, and a lamp (not shown) indicating the completion of processing blinks. Here, the operator removes the work W from the work table 25 after observing the working state of the working portion of the work W with the microscope 60 as needed. The above is the flow of processing the work W by the cutting device 11.

Next, the operation of the oil pan 30 will be described. As shown in FIG. 1, in the processing unit 20, cutting water is supplied to a processing point of the work W, and the work W and the rotary blade 21 are cooled and chips are removed. Also the cleaning nozzle 2
The purified water supplied from No. 4 cleans the surface of the work W. The waste water of the cutting water and the pre-purified water thus supplied to the work W flows through the table cover 34 and the bellows 31, 31 and flows into the oil pan 30. Further, the spray of cutting water accelerated by the rotary blade 21 is jetted in the left direction of the device as shown in FIG. 1, but hits the left side plate 33 and is flowed to the bellows 31 and the oil pan 30. At this time, since the upper portion of the left side plate 33 is inclined inward, the injected wastewater is reflected downward and efficiently flows into the oil pan 30. Pieces of the work W, chips, chips, and the like are mixed in these wastewaters. Since the oil pan 30 is mounted so that the drain ports 30D and 30D are lowered, the oil pan 3
Wastewater flowing into the front side of 0 is drain port 30D on the front side.
The wastewater flowing into the inner side flows toward the drain port 30D on the inner side and is drained from the drain cylinder 30E through the drain duct 35. The cutting dust is likely to be accumulated in the vicinity of the drainage port 30D, but since the drainage port 30D is divided into the front side and the rear side, the amount of accumulation is small and the cleaning interval can be long. Also,
Since the front side and the rear side of the drain port 30D are not connected to each other, it is not necessary to clean the bellows 31 which is difficult to clean, and the cleaning time can be shortened. Therefore, the operating rate of the cutting device 10 is improved, and the entire size of the cutting device 10 can be reduced by the size of the oil pan 30.

FIG. 3 and FIG. 4 are views for explaining the second embodiment of the present invention. FIG. 3 is a side sectional view around the work table, and FIG. 4 is a perspective view illustrating an arrangement relationship between an oil pan and related members. As shown in FIGS. 3 and 4, the cutting device 10 is provided with two X-axis guide rails 28, 28 on the upper surface of the machine base 29, and guides in rolling contact with the linear guides 28A attached to the X-table 27, respectively. Are configured. A lead screw 43 is provided on the machine base 29 and is connected to a servo motor (not shown). This lead screw 43 has a nut 43
A is screwed, and the nut 43A is attached to the X table 27. A θ table 26 is placed on the X table 27, and a work table 25 is attached to the θ table 26. The work W to be processed is adsorbed and fixed on the upper surface of the work table 25. By these drive mechanisms, the work W placed on the work table 25 is cut and fed in the X direction by a servo motor (not shown), and is rotated by the θ table 26 by θ. Holders 42 each having a groove formed in the longitudinal direction are provided on the front side and the back side of the upper surface of the machine base 29, and an oil pan 40 is held on each of the holders 42 on the front side and the back side. As shown in FIG. 4, the oil pans 40, 40 are in the shape of an elongated box with an open top, and one of the elongated sides is
The sides are tall and project more than the openings. Also,
A drain port 40D is formed on one end side of the bottom surface, and a drain pipe 40E is welded below the drain port 40D. Both of the drain tubes 40E are connected to the holes formed in the drain duct 35. Further, a leg plate 40A shown in FIG. 3 is welded to the bottom surface of the oil pan 40 in the longitudinal direction. The oil pan 40 is inserted into the groove of the holder 42 so that the side with the drainage port 40D is slightly lowered. It is held in a state. Both the front and rear oil pans 40, 40 can be pulled out laterally to the left side of the cutting device 10 and can be pushed in laterally, so that they can be easily attached and detached. Above the lead screw 43, as shown in FIG. 4, a bellows 31 having one end fixed to the left side plate 33 and the other end fixed to the table cover 34, one end fixed to the right side plate 32 and the other end fixed to the table. The bellows 31 fixed to the cover 34 is attached so as to cover the drive units such as the lead screw 43 and the X-axis guide rails 28, 28. Further, a bellows supporter 41 is attached to the upper surface of the machine base 29, and two horizontal portions in the longitudinal direction of the bellows supporter 41 are bellows 31, 31.
Touches the underside of.

The operation of the second embodiment configured as described above will be described. When the servo motor (not shown) rotates, the lead screw 43 is rotated and the X table 27 is moved in the X direction, so that the work table 25 on which the work W is sucked and placed is cut and fed in the X direction. Cutting water and pre-purified water are used during processing of the work W, and the waste water is transmitted through the table cover 34 and the bellows 31, 31 and the oil pan 4 is used.
It flows into 0 and 40. Of the bellows 31, 31 whose weight is supported by the bellows supporters 41 provided on the left and right of the table cover 34 as the X table 27 moves in one direction,
One bellows 31 contracts and the other bellows 31 extends, and in the opposite movement, one bellows 31 extends and the other bellows 3 expands.
1 shrinks. In this way, the X-axis drive mechanism is protected from waste water. The wastewater that has flowed into the oil pans 40, 40 flows in the direction of the drain groove 40D according to the inclination, and the drain pipe 40
It is drained from E and 40E to the drainage duct 35. When the cutting waste mixed in the waste water is accumulated near the drain port 40D, the drain duct 35 is pushed down to drain the drain tubes 40E, 40E.
The oil pan 40,
40 is pulled out in the left lateral direction and cleaned outside the cutting device 10. After the cleaning, the oil pans 40, 40 are simply set by pushing the respective leg plates 40A along the grooves of the respective holders 42 and abutting them against the right side plate. Therefore, since the oil pan 40 can be cleaned outside the cutting device 10,
It is extremely simple and can be done in a short time. If the oil pans 40, 40 for replacement are prepared, first, the oil pans 40, 40 on which cutting chips are accumulated are replaced with the cleaned oil pans 40, 40 to operate the cutting device 10, and the cutting device It is only necessary to clean the oil pans 40, 40 accumulated during the operation of the machine 10, and the downtime of the cutting device 10 can be suppressed as much as possible. Further, since there is no need for an extra space for connecting the front oil pan and the rear oil pan like the conventional oil pan 50, the device can be downsized.

In the second embodiment, the oil pan 40
Although it is formed in the shape of a box with an upper opening, cleaning can be further facilitated by making the side surface on the opposite side of the side having the drainage port 40D open. In this case, the oil pan 40
By sticking an elastic body such as a rubber plate as a seal material at a suitable position of the right side plate against which is pressed, the waste water flowing into the oil pan 40 does not leak.

[0018]

As described above, according to the present invention, since the drainage ports of the oil pan provided in the processing portion are formed on the front side and the back side, respectively, it is difficult to clean under the bellows. Is unnecessary, cleaning is easy and downtime of the cutting device can be reduced. Moreover, since no extra space is required, the device can be downsized. Furthermore, the oil pan is divided into the front side and the back side, and the oil pan can be pulled out to the outside of the device, respectively, so that the oil pan can be more easily cleaned and the operating rate of the cutting device can be improved. .

[Brief description of drawings]

FIG. 1 is a front sectional view of a cutting device according to an embodiment of the present invention.

FIG. 2 is a perspective view showing an oil pan of the cutting device according to the first embodiment of the present invention.

FIG. 3 is a side sectional view around a work table showing a second embodiment of the present invention.

FIG. 4 is a perspective view showing an arrangement of members according to a second embodiment of the present invention.

FIG. 5 is a side sectional view around a work table showing a conventional cutting device.

FIG. 6 is a perspective view showing an oil pan of a conventional cutting device.

[Explanation of symbols]

W ... Work, 10 ... Cutting device, 20 ... Processing part, 21 ... Rotating blade, 30, 40 ... Oil pan, 30D, 40D ... Drainage port, 31 ... Bellows

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Noriaki Ebisu             9-7 Shimorenjaku, Mitaka City, Tokyo Stocks             Company Tokyo Seimitsu (72) Inventor Takayuki Asano             9-7 Shimorenjaku, Mitaka City, Tokyo Stocks             Company Tokyo Seimitsu F term (reference) 3C011 BB12

Claims (3)

[Claims] 1. A cutting device for grooving or cutting a work by a rotary blade in a processing part, wherein the processing part is provided with an oil pan for receiving waste water of cutting water, and the oil pan is provided with the cutting device. When viewed from the front of the cutting device, drainage ports are formed on the front side and the back side, respectively. 2. The cutting device according to claim 1, wherein the oil pan is provided separately on the front side and the back side when viewed from the front of the cutting device. 3. The oil pans provided separately on the front side and the back side are detachably provided by pulling out and inserting laterally when viewed from the front of the cutting device. The cutting device according to claim 2, which is characterized in that.