JP2014143294A - Cutting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cutting device capable of protecting a shaft part of an index feeding mechanism from splash of cutting liquid with an inexpensive and simple constitution.SOLUTION: A cutting device comprises: a chuck table for holding a workpiece; first and second cutting means for cutting the workpiece held by the chuck table; and illumination means. A first cutting blade and a second cutting blade are suspended from an index feeding shaft for moving the first and second cutting means in an index feeding direction respectively via a first mounting part and a second mounting part in a direction in which they are faced to each other. A bellows unit for preventing adhesion of cutting liquid is arranged between the index feeding shaft and the first and second cutting blades. The bellows unit is constituted so that a transparent and translucent resin sheet can be freely extended and shrunk by bellows-folding, and has a bellows member whose one end of a stereoscopic direction set parallel to the index feeding direction of the first and second cutting means is mounted to the first mounting part of the first cutting means, and whose other end is mounted to the second mounting part of the second cutting means.

Description

  The present invention relates to a cutting device for cutting a workpiece such as a wafer, and more particularly to a facing dual spindle type cutting device in which two cutting blades are arranged to face each other.

  Semiconductor wafers in which multiple devices such as IC and LSI are formed on a silicon substrate, and various ceramic substrates, resin substrates, glass substrates, etc. used for electronic components are individually chipped by a dicing machine (cutting machine). The divided chips are widely used in various electric devices.

  In the cutting device, cutting is performed by cutting a cutting blade including superabrasive grains mounted on the tip of a spindle into a workpiece such as a wafer while rotating at high speed. 2. Description of the Related Art In recent years, a cutting apparatus having two spindles has been proposed in order to increase the productivity of cutting work or to perform step cut for performing high-precision cutting.

  In step cutting, a cutting groove having a predetermined depth is formed with a first cutting blade, and then the wafer is divided into individual chips by cutting the center of the bottom of the cutting groove with a second cutting blade. In step cutting, a wafer with a predetermined thickness is cut twice, so that the amount of cutting when cutting with each cutting blade is compared to the method of cutting with one cutting blade at a time (single cut) It is possible to reduce the processing load at the time of cutting and to perform cutting with good processing quality.

  In the facing spindle type cutting device, the chuck table is processed and fed in the machining feed direction (X-axis direction), and the cutting blade is indexed and fed in the index feed direction (Y-axis direction) perpendicular to the chuck table, The workpiece is cut.

  Since the cutting of the workpiece is performed while supplying the cutting fluid, in order to protect the shaft of the machining feed mechanism that moves the chuck table in the machining feed direction from the splashing and dust of the cutting fluid, The shaft portion is covered with a bellows as disclosed in, for example, Japanese Patent Application Laid-Open No. 2000-271834.

  Further, in order to protect the shaft portion of the indexing feed mechanism of the facing spindle type cutting device, conventionally, a sheet material with a curl as disclosed in JP-A-2002-28073 is used as a cutting blade. It was arrange | positioned between the axial parts of the index feeding mechanism, and it prevented that the splash of the cutting fluid applied to the axial part of the index feeding mechanism.

JP 2000-271834 A JP 2002-28073 A

  However, in the conventional protection mechanism in which the sheet material with curl as disclosed in Patent Document 2 is disposed between the shaft portion of the indexing feed mechanism of the cutting blade, the sheet material with curl is There has been a problem that warpage gradually occurs in the width direction due to use for many years, and the role of protecting the shaft portion of the index feeding mechanism from the mist of the cutting fluid is no longer fulfilled. Furthermore, since winding and releasing are repeated at high speed, there is a concern about the generation of static electricity.

  The present invention has been made in view of the above points, and an object of the present invention is to provide a cutting apparatus capable of protecting the shaft portion of the index feeding mechanism from the splash of cutting fluid with an inexpensive and simple configuration. Is to provide.

  According to the present invention, there is provided a cutting apparatus comprising a chuck table for holding a workpiece, first and second cutting means for cutting the workpiece held on the chuck table, and illumination means. The first cutting means includes a first spindle having a first cutting blade attached to a tip thereof, and first cutting fluid supply means for supplying a cutting fluid, and the second cutting means includes a second cutting tool. An index feed shaft including a second spindle having a blade attached to a tip thereof and a second cutting fluid supply means for supplying a cutting fluid, and moving the first and second cutting means in an index feed direction; The first cutting means is suspended through the first mounting portion and the second cutting means is suspended through the second mounting portion in the direction in which the first cutting blade and the second cutting blade face each other. Between the indexing feed shaft and the first and second cutting blades. A bellows unit for preventing wearing is provided, and the bellows unit is configured such that a transparent or translucent resin sheet can be expanded and contracted by a fold of a bellows fold, and the first and second cutting means are indexed. A bellows member in which one end in the expansion / contraction direction set in parallel with the feed direction is attached to the first mounting portion of the first cutting means and the other end is attached to the second mounting portion of the second cutting means. And a pair of guide rails for supporting the bellows member in the expansion / contraction direction from both sides and guiding in the expansion / contraction direction, and the illumination means positioned above the first and second cutting means, A cutting apparatus is provided that illuminates the periphery of the first and second cutting blades or the chuck table via a bellows member.

  In the cutting apparatus of the present invention, the bellows unit for protecting the shaft portion of the indexing feed mechanism from the splash of the cutting fluid, the bellows member obtained by folding the transparent or translucent resin sheet in the bellows, and the first and second cutting means. The bellows member is fixed to each mounting portion, and the bellows member is guided in the expansion / contraction direction by the guide rail, so that there is an effect that it is simple and inexpensive and can withstand long-term use.

  In addition, it is less likely to generate static electricity than a stretchable curtain that has been used in the past, and it is transparent or translucent. Therefore, illumination can be applied to the periphery of the cutting blade or the chuck table via the bellows member. , Dirt on the lighting can also be avoided. In addition, since the sheet is thin, it becomes very small when contracted, which also contributes to space saving of the apparatus.

It is a perspective view of the cutting device concerning the embodiment of the present invention. It is a perspective view around a blade cover. It is a partially broken perspective view of a bellows unit. It is a cross-sectional side view of a bellows unit. It is a section side view of a bellows unit in the state where the 2nd mounting part moved to the left.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, a perspective view of a cutting device 2 according to an embodiment of the present invention is shown. The cutting device 2 is a facing dual spindle type cutting device in which two cutting blades are arranged to face each other.

  Reference numeral 4 denotes a base of the cutting apparatus 2, and a cassette elevator 6 that can be moved up and down in the Z-axis direction is disposed on the front side of the base 4 in the Y-axis direction. A wafer cassette containing a plurality of wafer units is placed on the cassette elevator 6.

  The wafer unit in the wafer cassette is carried out on a pair of positioning members 10 which are arranged in the temporary storage area 8 and can be moved toward and away from each other by a loading / unloading mechanism (not shown), and the positioning members 10 are moved in a direction approaching each other. By doing so, alignment in the X-axis direction is performed.

  A chuck table 12 is disposed on the base 4 of the cutting apparatus 2 so as to be rotatable and reciprocally movable in the X-axis direction by a machining feed mechanism (not shown). The chuck table 12 is configured by arranging a suction holding portion 16 made of porous ceramics or the like in a frame body 14 made of metal such as SUS.

  A water cover 17 is disposed around the chuck table 6, and a bellows 18 is connected to the water cover 17 and the base 4 for protecting the shaft portion of the machining feed mechanism.

  A gate-shaped column 20 is erected on the rear side of the base 4. A pair of guide rails 22 extending in the Y-axis direction are fixed to the column 20. In the column 20, a first Y-axis moving block (first mounting portion) 24 is movable along the guide rail 22 in the Y-axis direction by a first Y-axis moving mechanism 30 including a ball screw 26 and a pulse motor (not shown). It is installed.

  A pair of guide rails 32 extending in the Z-axis direction are fixed to the first Y-axis moving block 24. On the first Y-axis movement block 24, a first Z-axis movement block 34 is mounted on the guide rail 32 by a first Z-axis movement mechanism 40 including a ball screw 36 and a pulse motor 38 so as to be movable in the Z-axis direction. ing.

  A first cutting unit 42 and a first alignment unit 44 are attached to the first Z-axis moving block 34. A spindle housing 46 accommodates the spindle of the first cutting unit 42.

  The portal column 20 further includes a second Y-axis moving block (second mounting portion) 24a guided by the guide rail 22 by a second Y-axis moving mechanism 30a including a ball screw 26a and a pulse motor 28a. It is mounted so that it can move.

  A pair of guide rails 32a extending in the Z-axis direction are fixed to the second Y-axis moving block 24a. On the second Y-axis moving block 24a, a second Z-axis moving block 34a is mounted on the guide rail 32a by a second Z-axis moving mechanism 40a including a ball screw 36a and a pulse motor 38a so as to be movable in the Z-axis direction. Yes.

  A second cutting unit 42a and a second alignment unit 44a are attached to the second Z-axis moving block 34a. A spindle housing 46a accommodates the spindle of the second cutting unit 42a.

  A spinner cleaning unit 48 cleans and dries the wafer after cutting, and includes a spinner table 50 that rotates by sucking and holding the wafer after cutting.

  Referring to FIG. 2, a perspective view around a blade cover (wheel cover) 56 attached to the spindle housing 46 of the first cutting unit 42 is shown. A first cutting blade 52 is fixed to a tip of a spindle (not shown) of the first cutting unit 42 by a fixing nut 54.

  The blade cover 56 includes a blade cover body 58 fixed to a spindle housing 46 that rotatably accommodates a spindle. A blade cooler assembly 60 and a nozzle assembly 70 are attached to the blade cover main body 58.

  The blade cooler assembly 60 is moved between an operating position shown in FIG. 2 and a working position spaced from the wheel cover main body 58 in the X-axis direction by an air cylinder (not shown). On the other hand, the nozzle assembly 70 is screwed to the wheel cover main body 58 so that the position of the nozzle assembly 70 can be adjusted in the Z-axis direction.

  The blade cooler assembly 60 includes a pair of connection pipes 62a and 62b, a blade cooler nozzle (cutting fluid supply pipe) 64a connected to the connection pipe 62a, and a blade cooler nozzle (cutting fluid supply pipe) connected to the connection pipe 62b. 64b is included.

  The blade cooler nozzle 64a extends horizontally on the front side (front side) of the cutting blade 52, and the blade cooler nozzle 64b extends horizontally on the back side (back side) of the cutting blade 52. The pair of blade cooler nozzles 64 a and 64 b have a plurality of slits (cutting fluid supply ports) for ejecting cutting fluid on the side facing the cutting blade 52.

  The connection pipes 62a and 62b are connected to the tube 67 via branch tubes 67a and 67b, and the tube 67 is connected to a cutting fluid supply source 68 via an electromagnetic switching valve 66. The cutting fluid supply source 68 supplies a cutting fluid made of pure water, for example.

  The nozzle assembly 70 includes a pair of connection pipes 72, 78, a shower nozzle 74 connected to the connection pipe 72, and a pair of spray nozzles 80 connected to the connection pipe 78.

  The shower nozzle 74 supplies cutting fluid toward the cutting blade of the cutting blade 52. On the other hand, the spray nozzle 80 supplies a cutting fluid to the surface of a workpiece such as a wafer to clean the surface of the workpiece. The connection pipe 72 is connected to the cutting fluid supply source 68 via an electromagnetic switching valve 76, and the connection pipe 78 is connected to the cutting fluid supply source 68 via an electromagnetic switching valve 82.

  The second cutting blade mounted on the spindle of the second cutting unit 42a is also covered with a blade cover 56 similar to that shown in FIG. 2, and when cutting the workpiece, the blade cooler nozzle faces the cutting blade. The cutting fluid is ejected, the cutting fluid is supplied from the shower nozzle toward the cutting edge of the cutting blade, and the cutting fluid is further supplied from the spray nozzle to the surface of the workpiece such as a wafer to clean the surface of the workpiece. .

  Referring to FIG. 1 again, the ball screw 26 that moves the first cutting unit 42 in the index feed direction (Y-axis direction) and the ball screw 26a that moves the second cutting unit 42a in the index feed direction (Y-axis direction). And the 1st bellows unit 84 is arrange | positioned horizontally between the 1st cutting unit 42 and the 2nd cutting unit 42a. Further, a second bellows unit 86 is horizontally disposed on the back side of the first cutting unit 42, and a third bellows unit 88 is also horizontally disposed on the front side of the second cutting unit 42a.

  As best shown in FIG. 3, the first bellows unit 84 includes a bellows member 85 in which a transparent or translucent resin sheet is configured to be stretchable by a fold of the bellows, and the bellows member 85 in the stretch direction (Y axis Direction) and a pair of guide rails 92 and 94 disposed between the first and second cutting units 42 and 42a.

  As shown in FIGS. 4 and 5, one end of the bellows member 85 is attached to the first Y-axis moving block (first mounting portion) 24 of the first cutting unit 42 via the bracket 100, and the other end of the bellows member 85. Is attached to the second Y-axis moving block (second mounting portion) 24a of the second cutting unit 42a via the bracket 102.

  One end of the bellows member 87 of the second bellows unit 86 is attached to the first Y-axis moving block (first mounting portion) 24 of the first cutting unit 42 via the bracket 104, and the other end is a pair of guide rails 92, 94. Are attached to a connecting member 96 for connecting the two via a bracket 106.

  One end of the bellows member 89 of the third bellows unit 88 is attached to the second Y-axis moving block (second mounting portion) 24a of the second cutting unit 42a via the bracket 108, and the other end is a pair of guide rails 92. , 94 are attached to a connecting member 98 via a bracket 110.

  Referring again to FIG. 1, the guide rail 92 is fixed to the gate-shaped column 20, and both ends of the guide rail 94 are supported by connecting members 96 and 98 fixed to the column 20. Thereby, the first bellows unit 84, the second bellows unit 86, and the third bellows unit 88 are guided in the extending / contracting direction by the pair of guide rails 92, 94.

  Each of the bellows members 85, 87, 89 is made of a resin sheet such as a transparent or translucent polypropylene film, and the thickness is preferably about 0.15 mm. The length of the bellows member 85 of the first bellows unit 84 is about 80 cm in the most extended state.

  An illumination device 90 is disposed above the first bellows unit 84 via a bracket. The illumination cutting device 90 is composed of, for example, an LED lamp.

  As shown in FIG. 4, when the second Y-axis moving block (second mounting portion) 24a of the second cutting unit 42a is indexed and fed in the direction of arrow Y1, the bellows of the first bellows unit 84 is shown in FIG. The member 85 expands and the bellows member 89 of the third bellows unit 88 contracts. Since the 1st cutting unit 42 does not move, the 2nd bellows unit 86 does not change at all.

  As shown in FIGS. 4 and 5, the lighting device 90 positioned above the first and second cutting units 42, 42 a is arranged around the first and second cutting blades or the chuck table via the first bellows unit 84. 12 can be illuminated, and the cutting state of the workpiece can be well observed by this illumination. In addition, since the first bellows unit 84 is disposed, the lighting device 90 can be prevented from being contaminated.

2 Cutting device 12 Chuck table 18 Bellows 20 Column 24 First Y-axis moving block (first mounting portion)
24a Second Y-axis moving block (second mounting portion)
26, 26a Ball screw 42 1st cutting unit 42a 2nd cutting unit 52 1st cutting blade 84 1st bellows unit 85 Bellows member 86 2nd bellows unit 87 Bellows member 88 3rd bellows unit 89 Bellows member 90 Illumination device 92,94 Guide rail 96, 98 connecting member

Claims (1)

A cutting apparatus comprising: a chuck table for holding a workpiece; first and second cutting means for cutting a workpiece held on the chuck table; and an illumination means.
The first cutting means includes a first spindle having a first cutting blade attached to the tip, and first cutting fluid supply means for supplying a cutting fluid,
The second cutting means includes a second spindle with a second cutting blade attached to the tip, and second cutting fluid supply means for supplying a cutting fluid,
The first cutting means and the second cutting blade face the index feed shaft that moves the first and second cutting means in the index feed direction. The second cutting means hangs down through the second mounting portion via the mounting portion,
Between the index feed shaft and the first and second cutting blades, a bellows unit for preventing the attachment of cutting fluid is disposed,
The bellows unit is
A transparent or translucent resin sheet is configured to be stretchable by a fold of the bellows fold, and one end in the stretching direction set in parallel with the index feeding direction of the first and second cutting means is the first cutting means. The bellows member having the other end attached to the second mounting portion of the second cutting means;
A pair of guide rails that support the bellows member from both sides in the stretching direction and guide it in the stretching direction,
The cutting device characterized in that the illumination means positioned above the first and second cutting means illuminate the periphery of the first and second cutting blades or the chuck table via the bellows member.

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