JP2007132093A - Expansible curtain - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an expansible curtain capable of suppressing curvature occurring in the direction at a right angle to the take-up direction in a first film strip and a second film strip formed by bending a synthetic resin film in the middle section. <P>SOLUTION: The synthetic resin film is bent in the middle section to form the first film strip and the second film strip, both film strips are piled up to bend the middle section to form a take-up section by forming a habit of winding by curling from the bent middle section and, at the same time, in the expansible curtain making both end sections as a mounting section, curvature suppressing means suppressing the curvature occurring in the direction at a right angle to the take-up direction of the first film strip and the second film strip are respectively provided to the first film strip and the second film strip. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a telescopic curtain.

  The telescopic curtain is mounted on various facilities, machines, and the like, and is also mounted on, for example, a grinding apparatus that grinds the surface of a semiconductor wafer. A grinding apparatus for grinding a surface of a semiconductor wafer includes a holding means for holding a semiconductor wafer as a workpiece, and a grinding means for grinding a semiconductor wafer held by the holding means. A spindle unit that rotatably supports the grinding wheel, a moving base that supports the spindle unit, a guide rail that is disposed on a stationary support plate and supports the moving base so as to be movable up and down, and along the guide rail It is composed of a ball screw type feed mechanism that raises and lowers a moving base that supports the spindle unit. The grinding means grinds the semiconductor wafer to a predetermined thickness by controlling the position of the grinding wheel supported by the spindle unit with high precision by moving the moving base up and down by a feed mechanism.

However, grinding of workpieces such as semiconductor wafers generates a large amount of grinding debris. The grinding debris splashes and adheres to the guide rail and ball screw type feed mechanism, and is supported by the spindle unit. There is a problem in that it has an adverse effect on the control of the precise movement of the wheel. Another problem is that splashes of machine oil used in a guide rail or a ball screw type feed mechanism adhere to the workpiece, thereby reducing the quality of the workpiece such as a semiconductor wafer.
Such a problem also occurs in the feed mechanism equipped in the cutting apparatus. That is, the cutting device includes a chuck table that holds a workpiece, a cutting feed mechanism that moves the chuck table in the cutting feed direction, and cutting while supplying cutting water to the workpiece held on the chuck table. A cutting means for applying, an indexing feed mechanism for moving the cutting means in the indexing feed direction, and a cutting feed means for moving the cutting means in the cutting direction. For example, the cutting feed mechanism is disposed below the chuck table, and there is a problem that splashes of cutting waste generated at the time of cutting enter the cutting feed mechanism and adversely affect control of high-precision cutting feed.
Therefore, an elastic bellows curtain guides the grinding device between the stationary support plate and the moving base supporting the spindle unit so that splashes of grinding debris do not adhere to the guide rail or the ball screw type feed mechanism. It is mounted to cover the rail and ball screw type feeding mechanism. The cutting apparatus is provided with a bellows curtain that can expand and contract on both sides in the cutting feed direction of the chuck table so that splashes of cutting waste do not adhere to the cutting feed mechanism.
However, the bellows curtain is problematic in that it is expensive and heavy.

In order to solve the above-described problem, as shown in FIG. 6, the synthetic resin film is bent at the intermediate portion to form the first film piece 21 and the second film piece 22, and the two film pieces are polymerized and bent. In addition, a retractable curtain 2 is provided in which a winding portion 200 is formed by curling from an intermediate portion and attaching a curl, and both end portions are attachment portions 211 and 221. (For example, refer to Patent Document 1.)
JP 2002-28073 A

  Thus, the telescopic curtain 2 disclosed in the above publication has a habit of bending in the direction perpendicular to the winding directions A1 and A2 in the first film piece 21 and the second film piece 22 as shown in FIG. It is difficult to sufficiently prevent the intrusion of grinding water or the like.

  The present invention has been made in view of the above-mentioned fact, and the main technical problem thereof is orthogonal to the winding direction of the first film piece and the second film piece formed by bending the synthetic resin film at the intermediate portion. An object of the present invention is to provide a telescopic curtain capable of suppressing the bending generated in the direction.

In order to solve the above main technical problem, according to the present invention, a synthetic resin film is folded at an intermediate portion to form a first film piece and a second film piece, and the film pieces are overlapped and folded. In the retractable curtain with both ends formed as a winding part by curling from the part and attaching a curl,
The first film piece and the second film piece are provided with a curving suppression means for suppressing curving that occurs in a direction perpendicular to the winding direction of the first film piece and the second film piece.
A telescopic curtain is provided.

The bending suppression means includes a plurality of bent portions that are formed at intervals in the winding direction in the first film piece and the second film piece and extend in a direction perpendicular to the winding direction.
Further, the bending suppression means is composed of a plurality of reinforcing members that are arranged at intervals in the winding direction in the first film piece and the second film piece and extend in a direction perpendicular to the winding direction. .

  The stretchable curtain according to the present invention is orthogonal to the winding direction of the first film piece and the second film piece on the first film piece and the second film piece formed by bending a synthetic resin film at an intermediate portion. Since the bending suppressing means for suppressing the bending generated in the direction is provided, the bending generated in the direction orthogonal to the winding direction can be suppressed.

  DESCRIPTION OF EMBODIMENTS Hereinafter, a preferred embodiment of a telescopic curtain configured according to the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 shows a production process in the previous stage in which a curving suppression means is provided in a telescopic curtain constructed according to the present invention.
In the illustrated embodiment, a shape memory resin film 20 that stores a shape by heat is used as the curtain material shown in FIG. In addition, as a shape memory resin film which memorize | stores a shape with a heat | fever, the polyester film about 0.05 mm in thickness is desirable. When this shape memory resin film 20 is prepared, the first film piece 21 and the second film piece 22 are formed by bending at the intermediate portion 201 as shown in FIG. 1B, and the two film pieces are polymerized. . Next, the polymerized first film piece 21 and second film piece 22 are wound around the mandrel 3 having a diameter of about 3 mm from the bent middle part 201 as shown in FIG. Then, with the first film piece 21 and the second film piece 22 wound around the mandrel 3, as shown in FIG. 1 (d), using a heating means such as a heating furnace 4 or a hot air heater, about 140 °. By heating at C for about 2 hours, and then slowly cooling at room temperature, the curl is attached and the winding part 200 is formed. Then, by pulling out the mandrel 3 around which the first film piece 21 and the second film piece 22 are wound, as shown in FIG. The telescopic curtain 2 provided with the attachment portions 211 and 221 is configured. Note that the attachment portions 211 and 221 at both ends of the first film piece 21 and the second film piece 22 that are not wound around the mandrel 3 are kept flat even after being heated.

  The retractable curtain 2 configured as described above is drawn out by pulling up both or one of the attachment portions 211 and 221 at both ends so that the winding portion 200 with the curl is sequentially rewound. On the other hand, when the pulling force acting on the attachment parts 211 and 221 is released, the part drawn out by the winding action of the winding part 200 itself to which the winding rod is attached is wound. In this way, the telescopic curtain 2 is pulled out when a tensile force acts on the attachment portions 211 and 221, and when the tensile force acting on the attachment portions 211 and 221 is released, the portion pulled out by its own winding action is wound. Therefore, it can be expanded and contracted according to the force acting on the attachment portions 211 and 221.

  However, the retractable curtain 2 described above pulls both or one of the attachment portions 211 and 221 of the first film piece 21 and the second film piece 22, and the winding portion 200 with the curl is sequentially rewound. In the pulled-out state, the first film piece 21 and the second film piece 22 have a habit of bending in a direction orthogonal to the winding directions A1 and A2 as shown in FIG. In order to suppress this bending, in the present invention, the bending is suppressed between the intermediate portion 201 and the mounting portions 211 and 221 in the first film piece 21 and the second film piece 22 constituting the telescopic curtain 2. Bending suppression means is provided. This bending suppression means will be described with reference to the embodiment shown in FIGS.

  The curving suppression means 5 in the embodiment shown in FIG. 2 is formed at intervals in the winding directions A1 and A2 in the first film piece 21 and the second film piece 22 and is orthogonal to the winding directions A1 and A2. It consists of a plurality of bent portions 51 extending in the direction. The plurality of bent portions 51 may be bent into a mountain shape protruding upward as shown in FIG. 2, or may be bent into a valley shape protruding downward. In addition, the space | interval of the some bending part 51 may be 10-40 mm. In the illustrated embodiment, two attachment holes 211a and 221a are formed in the attachment portions 211 and 221 of the first film piece 21 and the second film piece 22, respectively. In this way, the first film piece 21 and the second film piece 22 are formed with a plurality of bent portions 51 extending in the direction perpendicular to the winding directions A1 and A2 with a spacing in the winding directions A1 and A2. Thereby, since the 1st film piece 21 and the 2nd film piece 22 are reinforced in the direction orthogonal to winding direction A1, A2, curvature is suppressed.

Next, the bending suppression means 5 shown in FIG. 3 will be described.
The curving suppression means 5 in the embodiment shown in FIG. 3 is disposed on the first film piece 21 and the second film piece 22 at intervals in the winding direction A1, A2, and is orthogonal to the winding direction A1, A2. It consists of a plurality of reinforcing members 52 extending in the direction. The plurality of reinforcing members 52 are composed of piano wires having a diameter of about 0.2 mm in the illustrated embodiment, and are fixed to the surfaces of the first film piece 21 and the second film piece 22 with an appropriate adhesive. Yes. The interval between the plurality of reinforcing members 52 may be 10 to 40 mm. As described above, the first film piece 21 and the second film piece 22 are provided with a plurality of reinforcing members 52 extending in a direction orthogonal to the winding directions A1 and A2 with a spacing from the winding directions A1 and A2. As a result, the first film piece 21 and the second film piece 22 are reinforced in a direction orthogonal to the winding directions A1 and A2, so that the bending is suppressed.

Next, an example in which the telescopic curtain 2 configured according to the present invention is used in a cutting device will be described with reference to FIG.
FIG. 4 shows a perspective view of a main part of a cutting apparatus equipped with the telescopic curtain 2 constructed according to the present invention.
The cutting apparatus shown in FIG. 4 includes a base 6. A chuck table mechanism 7 is disposed on the base 6 to hold the workpiece and move it in the cutting feed direction indicated by the arrow X. The chuck table mechanism 7 includes a first chuck table 71a and a second chuck table 71b that hold a workpiece. The first chuck table 71a and the second chuck table 71b are disposed on the first guide rail 72a and the second guide rail 72b, respectively, and the first cutting feed means 73a and the second cutting feed, respectively. The means 73b is moved in the cutting feed direction indicated by the arrow X in FIG.

  The cutting apparatus in the illustrated embodiment includes a gate-type support frame 8 disposed across the first guide rail 72a and the second guide rail 72b. The gate-shaped support frame 8 includes a first pillar portion 81 disposed on the side of the first guide rail 72a and a second pillar portion disposed on the side of the second guide rail 72b. 82, and a support portion 83 arranged along an index feed direction indicated by an arrow Y orthogonal to a cutting feed direction indicated by an arrow X by connecting the upper ends of the first pillar portion 81 and the second pillar portion 82. It has become. A pair of guide rails 831 and 831 are provided on one surface of the support portion 83 of the gate-type support frame 8, and the first alignment means 9a is movable along the pair of guide rails 831 and 831. And second alignment means 9b. The first alignment means 9a and the second alignment means 9b are selectively moved in the index feed direction Y orthogonal to the cutting feed direction X by the moving means 9a and 9b, respectively.

  On the other surface of the support portion 83 constituting the gate-shaped support frame 8 (the surface opposite to the surface on which the first alignment means 9a and the second alignment means 9b are disposed) A cutting means 10a and a second cutting means 10b are provided. The first cutting means 10a and the second cutting means 10b will be described with reference to FIG. The first cutting means 10a and the second cutting means 10b include an indexing movement base 11, a cutting movement base 12, and a spindle unit 13, respectively. The indexing movement base 11 is disposed so as to be movable in the indexing feed direction indicated by an arrow Y in FIG. 5 along a pair of guide rails (not shown) provided on the other surface of the support portion 83. The index movement base 11 is moved in the index feed direction indicated by the arrow Y in FIG. 5 by the index feed means 14 comprising the male screw rod 141, the bearing 142, and the pulse motor 143 for driving the male screw rod 141, respectively.

  The incision moving base 12 includes a supported portion 121 extending in the vertical direction and a mounting portion 122 extending horizontally at a right angle from the lower end of the supported portion 121. The cutting movement base 12 is disposed so as to be movable in a cutting feeding direction indicated by an arrow Z in FIG. 5 along a pair of guide rails (not shown) provided on the indexing movement base 11. Then, the cutting movement base 12 is moved in the cutting feeding direction indicated by the arrow Z in FIG.

  The spindle unit 13 is mounted on the lower surface of the mounting portion 122 that forms the cutting movement base 12 of the first cutting means 10a and the second cutting means 10b. As shown in FIG. 5, the spindle unit 13 includes a spindle housing 131, a rotary spindle 132 rotatably supported on the spindle housing 131, a cutting blade 133 attached to one end of the rotary spindle 132, and a cutting blade. A cutting water nozzle 134 for supplying water is provided, and the axial direction of the rotary spindle 132 is arranged along the index feed direction indicated by the arrow Y. Note that the cutting blade 133 of the first cutting means 10a and the cutting blade 133 of the second cutting means 10b are arranged to face each other.

  The above-described telescopic curtain 2 is disposed between the mounting portions 122 and 122 forming the incision moving bases 12 and 12 of the first cutting means 10a and the second cutting means 10b configured as described above. Is done. That is, the mounting portion 221 of the second film piece 22 constituting the telescopic curtain 2 is mounted on the upper surface of the mounting portion 122 forming the cutting movement base 12 of the first cutting means 10a, and the first film piece 21 is mounted. Is attached to the upper surface of the mounting portion 122 that forms the cutting movement base 12 of the second cutting means 10b. In addition, the attachment part 211 of the 1st film piece 21 and the attachment part 221 of the 2nd film piece 22 to the attachment parts 122 and 122 are attached to the attachment holes 211a and 221a formed in the attachment parts 211 and 221, respectively. It can be attached by inserting the bolt 16 and screwing it into a female screw hole (not shown) formed in the mounting portions 122 and 122. In this way, the telescopic curtain 2 is disposed between the mounting portions 122 and 122 that form the cutting movement bases 12 and 12 of the first cutting means 10a and the second cutting means 10b, whereby the first The male threaded rod 141 and the bearing 142 constituting the indexing and feeding means 14 of the cutting means 10a and the second cutting means 10b are from the cutting blade 133 side of the first cutting means 10a and the cutting blade 133 side of the second cutting means 10b. It will be shielded.

  As described above, the telescopic curtain 2 disposed between the mounting portions 122 and 122 forming the cutting movement bases 12 and 12 of the first cutting means 10a and the second cutting means 10b is the first cutting means 10a. When the cutting movement base 12 of the means 10a and the cutting movement base 12 of the second cutting means 10b move in the index feed direction indicated by the arrow Y, respectively, the first film piece 21 and the second film piece 21 When the film piece 22 is wound and the distance between the two moving bases becomes large, the first film piece 21 and the second film piece 22 are pulled out, so that the change in the distance between the two moving bases can be followed. . The first film piece 21 and the second film piece 22 constituting the telescopic curtain 2 are provided with the bending suppressing means 5 for suppressing the bending as described above and are generated in a direction perpendicular to the winding direction. Therefore, the cutting waste scattered by the rotation of the cutting blade 133 of the first cutting means 10a and the cutting blade 133 of the second cutting means 10b can be effectively shielded.

  The retractable curtain according to the present invention is configured as described above, and is composed of a first film piece and a second film piece obtained by bending a synthetic resin film at an intermediate portion, and is wound by a winding portion with a curl. Since it has a take-off function, it can be manufactured at low cost and a lightweight curtain can be obtained. And since the 1st film piece and the 2nd film piece are provided with the curve suppression means which suppresses the curve which generate | occur | produces in the direction orthogonal to the winding direction of the 1st film piece and the 2nd film piece. The bending that occurs in the direction orthogonal to the winding direction is suppressed.

Explanatory drawing which shows the manufacturing process of the front stage which provides the curvature suppression means in the telescopic curtain comprised according to this invention. 1 is a perspective view illustrating one embodiment of a telescopic curtain constructed in accordance with the present invention. The perspective view which shows other embodiment of the telescopic curtain comprised according to this invention. 1 is a perspective view of a cutting device equipped with a telescopic curtain constructed in accordance with the present invention. The perspective view which shows the state which mounted | wore the cutting means which comprises the cutting apparatus shown in FIG. 4 with the telescopic curtain comprised according to this invention. The perspective view of the conventional telescopic curtain.

Explanation of symbols

2: Telescopic curtain 20: Shape memory resin film 200: Winding part 201: Intermediate part
21: 1st film piece 211: Attachment part 22: 2nd film piece 221: Attachment part 3: Mandrel 4: Heating furnace 5: Bending suppression means 51: Bending part 52: Reinforcement member

Claims (3)

A synthetic resin film is bent at an intermediate part to form a first film piece and a second film piece, and the film part is polymerized and curled from the bent intermediate part to attach a curl to the winding part. In the stretchable curtain with both ends formed as attachment parts,
The first film piece and the second film piece are provided with a curving suppression means for suppressing curving that occurs in a direction perpendicular to the winding direction of the first film piece and the second film piece.
A telescopic curtain characterized by that.   The curving suppression means includes a plurality of bent portions formed at intervals in the winding direction in the first film piece and the second film piece and extending in a direction perpendicular to the winding direction. Item 1. The telescopic curtain according to item 1.   The curving suppression means includes a plurality of reinforcing members that are disposed at intervals in the winding direction in the first film piece and the second film piece and extend in a direction orthogonal to the winding direction. The telescopic curtain according to claim 1.

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