JP2017019044A - Bellows cover and cutting device using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent cutting water in spraying form from moving from a lower surface to an upper surface of a bellow cover.SOLUTION: A bellows cover 41 comprises an upper surface (41a) and a lower surface (41b) formed of uneven surfaces, and both side parts supported by support rails (44, 45), and performs telescopic motion. The unevenness (42) of the bellows cover can resist movement of cutting water (Wa), and retain water by forming a gap (46) on the lower surface of the bellows cover in a contracted state. This configuration can prevent the cutting water in spray form from moving from the lower surface to the upper surface of the bellows cover.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a bellows cover in a cutting apparatus that performs cutting while supplying cutting water, and a cutting apparatus using the same.

  2. Description of the Related Art A cutting apparatus is known that includes two cutting means each having a cutting blade, and includes index feeding means that includes two indexing shafts that face the two cutting blades and approach and separate the facing cutting blades (for example, Patent Document 1). In the cutting device, the cutting water supplied to the cutting blade may be sprayed and rolled up by the rotation of the cutting blade.

  Therefore, in the above cutting apparatus, a configuration in which a bellows cover is disposed between the facing cutting means is conceivable. The bellows cover is formed by alternately folding back ridges and valleys. The bellows cover is expanded and contracted in the approaching and separating directions of the cutting blade, and both side portions in the extending and contracting direction are supported by support rails. The bellows cover is contracted or expanded when the cutting means is indexed and the distance (distance) between the two cutting means changes. Therefore, even if the interval between the two cutting means changes, the spray of cutting water adheres to the lower surface of the bellows cover, and the cutting water such as the index feeding means and the cutting feeding means is disposed on the parts disposed above the cutting means. Is prevented from adhering to the spray.

JP 2014-207309 A

  When the bellows cover is contracted from the expanded state, the inclined surfaces sandwiching the ridges or valleys overlap on the lower surface of the bellows cover, so that the spray of cutting water adhering to the lower surface of the bellows cover is crushed by the inclined surface. . The crushed spray (cutting water) is pushed out on both sides of the bellows cover in the expansion and contraction direction and sticks so that it jumps out from both sides, and when the bellows cover is expanded again, it moves so as to wrap around the upper surface from both sides To do. Since sprayed cutting water contains cutting waste discharged by cutting, there is a problem that when the cutting water adhering to the upper surface of the bellows cover dries, the upper surface of the bellows cover is damaged by the dry cutting waste. . Furthermore, when dry cutting waste is generated, there is a problem that it is scattered on a movable shaft such as an index feed shaft provided in the apparatus.

  This invention is made in view of this point, and provides the bellows cover which can prevent the cutting water which became the spray form from moving from the lower surface of a bellows cover to an upper surface, and a cutting device using the same. The purpose is to do.

  The bellows cover of the present invention is a bellows cover that is supported by support rails on both sides and expands and contracts, and is characterized in that the upper surface and the lower surface are formed as uneven surfaces.

  According to this structure, when the bellows cover is contracted and the cutting water adhering to the lower surface is pushed out to both sides, resistance to movement of the cutting water can be imparted by the unevenness of the bellows cover. Moreover, since the upper surface and the lower surface of the bellows cover are formed with uneven surfaces, when the bellows cover is shrunk, the inclined surfaces sandwiching the ridges or valleys on the lower surface are deformed so as not to adhere to each other, A gap can be formed between them. Spray-like cutting water adhering to the lower surface can be accumulated in the gap, and even if the bellows cover is contracted, the cutting water can be prevented from being pushed out to both sides. Thus, it is possible to prevent the cutting water adhering to the lower surface of the bellows cover from entering the upper surface.

  A cutting apparatus according to the present invention includes a chuck table for holding a workpiece, and a first cutting means having a rotary shaft on which a first cutting blade for cutting the workpiece held by the chuck table is rotatably mounted. First index feeding means for index feeding the first cutting means, second cutting means for rotatably mounting a second cutting blade facing the first cutting blade, A second index feeding means for index feeding the two cutting means, a cover means for expanding and contracting between the first cutting means and the second cutting means to close the upper side of the chuck table, and cutting water A cutting device comprising: a cutting water supply means for supplying, wherein the cover means includes a bellows cover having an upper surface and a lower surface formed of a concave and convex surface, and a support rail that supports both side portions of the bellows cover. And wherein the door.

  According to the present invention, the unevenness of the bellows cover can impart resistance to the movement of the cutting water, or a gap can be formed between the lower surfaces of the bellows cover. The movement from the lower surface to the upper surface can be prevented.

It is a perspective view of a cutting device provided with the bellows cover concerning this embodiment. It is a figure which shows the operation | movement transition of the bellows cover which concerns on a comparative example. It is a schematic perspective view of the cover means concerning this Embodiment. It is a figure which shows the operation | movement transition of the bellows cover which concerns on this Embodiment.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a perspective view of a cutting apparatus provided with a bellows cover according to the present embodiment. The cutting apparatus 1 of the present embodiment relatively moves a pair of cutting means 5a and 5b having a cutting blade 52a (the cutting blade of the cutting means 5b is not shown) and the chuck table 3 holding the workpiece W. The workpiece W is configured to be cut. The workpiece W is carried into the cutting apparatus 1 while being supported by the ring frame F via the dicing tape T. The workpiece W may be a semiconductor wafer in which a semiconductor device is formed on a semiconductor substrate such as silicon or gallium arsenide, or an optical device wafer in which an optical device is formed on a ceramic, glass, or sapphire inorganic material substrate. Good.

  As shown in FIG. 1, the cutting apparatus 1 includes a rectangular parallelepiped casing 61 having a space formed therein. The casing 61 accommodates a first cutting means 5a having a first cutting blade 52a and a second cutting means 5b having a second cutting blade (not shown). A movable plate 31 that can move between the inside and the outside of the housing 61 is disposed below the housing 61. A chuck table 3 is provided above the moving plate 31. FIG. 1 shows a state where the moving plate 31 and the chuck table 3 are positioned outside the housing 61.

  A loading / unloading section 62 for loading or unloading the workpiece W is provided in front of the housing 61 so as to be adjacent to the movable plate 31 and the chuck table 3. The carry-in / carry-out unit 62 includes a cassette elevator 65 on which a cassette (not shown) that accommodates the workpiece W is placed. The cassette elevator 65 is configured to be movable up and down, and adjusts the position of the workpiece W accommodated in the cassette in the Z-axis direction.

  The moving plate 31 is moved in the X-axis direction by a moving mechanism (not shown) provided at the lower part. A cylindrical chuck table base (not shown) is provided on the moving plate 31. The chuck table base includes a rotation mechanism (not shown) and rotates around the Z axis. A chuck table 3 for attracting and holding the workpiece W is detachably attached to the upper portion of the chuck table base. The workpiece W held on the chuck table 3 moves relative to the first cutting means 5a and the second cutting means 5b in the housing 61 by the movement of the moving plate 31 and the rotation of the chuck table base. It is rotated.

  The center of the upper surface of the base 2 of the cutting device 1 is opened in a rectangular shape so as to extend in the X-axis direction, and a moving plate 31 and a waterproof cover 32 are provided so as to cover the opening. A holding surface 33 for holding the workpiece W is formed on the upper surface of the chuck table 3.

  In addition, a column portion 21 is provided inside the housing 61. The column portion 21 includes a first index feeding means 7a, a second index feeding means 7b for index feeding the first cutting means 5a and the second cutting means 5b in the Y-axis direction, and a first cutting means 5a. First cutting means 8a and second cutting means 8b for moving the second cutting means 5b in the Z-axis direction are provided. The first index feeding means 7a and the second index feeding means 7b are slidably installed on the guide rails 71a and 71b arranged in front of the column portion 21 and parallel to the Y-axis direction, and the guide rails 71a and 71b. A first Y-axis table 72a and a second Y-axis table 72b driven by a motor. The first notch feed means 8a and the second notch feed means 8b are guide rails 81a and 81b arranged in front of the first Y axis table 72a and the second Y axis table 72b and parallel to the Z axis direction. The first Z-axis table 82a and the second Z-axis table 82b are slidably installed on the guide rails 81a and 81b.

  Below the first Z-axis table 82a and the second Z-axis table 82b, a first cutting means 5a and a second cutting means 5b for cutting the workpiece W are provided. In addition, nut portions (not shown) are formed on the back side of the first Y-axis table 72a and the second Y-axis table 72b, and ball screws 73a and 73b are screwed to these nut portions. Further, nut portions (not shown) are formed on the back side of the first Z-axis table 82a and the second Z-axis table 82b, and ball screws 83a and 83b are screwed to these nut portions. One end of each of the ball screws 73a and 73b for each Y-axis table 72a and 72b and each of the ball screws 83a and 83b for each Z-axis table 82a and 82b is provided with a drive motor 74b (a drive motor for the ball screw 73a is not shown), 84a. , 84b are connected. These drive motors 74b (a drive motor for 73a is not shown), 84a and 84b are driven to rotate the ball screws 73a, 73b, 83a and 83b, so that the first cutting means 5a and the second cutting means 5b are guided. It is moved along the rails 71a, 71b, 81a, 81b in the Y-axis direction and the Z-axis direction.

  The first cutting means 5a is configured by rotatably mounting a first cutting blade 52a on the tip of a spindle (rotating shaft, not shown) protruding from the housing 51a. The second cutting means 5b has a second cutting blade (not shown) rotatably mounted on the tip of a spindle (rotating shaft, not shown) protruding from the housing 51b so as to face the first cutting blade 52a. Configured. For example, the first cutting blade 52a and the second cutting blade are formed into a disk shape by solidifying diamond abrasive grains with a resin bond. The first cutting blade 52a and the second cutting blade are each covered with a blade cover (not shown), and each blade cover is supplied with cutting water supply means for supplying cutting water toward the cutting portion. As shown, an injection nozzle (not shown) is provided. The 1st cutting means 5a and the 2nd cutting means 5b rotate the 1st cutting blade 52a and the 2nd cutting blade at high speed, and the to-be-processed object W which is a cutting part and each cutting blade 52a from several injection nozzles. The workpiece W is cut while spraying cutting water.

  When cutting water is sprayed onto the workpiece W and each cutting blade 52a, the cutting water may be sprayed and rolled up. Then, the structure which arrange | positions a bellows cover so that between the cutting means 5a and 5b which faces may be covered from the top is examined. However, there has been a problem that when the bellows cover is shrunk, the cutting water adhering to the lower surface of the bellows cover wraps around the upper surface from both sides.

  This problem will be described below using a comparative example shown in FIG. FIG. 2 is a diagram illustrating an operation transition of the bellows cover according to the comparative example. As shown in FIG. 2A, when the bellows cover 91 according to the comparative example is expanded, the sprayed cutting water Wa is attached to the lower surface 91 b of the bellows cover 91. In this state, as shown in FIG. 2B, when the bellows cover 91 is contracted, the inclined surfaces come into contact with each other or extremely close to each other on the lower surface 91b of the mountain portion of the bellows cover 91, and the cutting water Wa is crushed. The crushed cutting water is pushed out to both sides of the bellows cover 91 in the expansion / contraction direction (both sides in the direction perpendicular to the paper surface of FIG. 2B) and adheres to both sides in the expansion / contraction direction. Thus, the cutting water Wa adhering to both sides enters the gap formed by the inclined surfaces close to each other on the upper surface 91a of the valley portion of the bellows cover 91 by capillarity. That is, when the bellows cover 91 is contracted, the cutting water Wa attached to the lower surface 91b of the bellows cover 91 moves so as to go around from both sides to the upper surface 91a side. Then, as shown in FIG. 2C, when the bellows cover 91 is expanded again, the cutting water Wa expands in the plane of the upper surface 91a.

  In this state, when the cutting water Wa adhering to the upper surface 91 a of the bellows cover 91 is dried, the cutting waste contained in the cutting water Wa remains on the upper surface 91 a of the bellows cover 91, and the cutting waste is generated by the expansion and contraction operation of the bellows cover 91. Is rubbed against the upper surface 91a and the upper surface 91a is damaged. Further, in the cutting apparatus 1 as shown in FIG. 1, the cutting waste is scattered on the ball screws 73a, 73b, 83a, 83b and the like.

  Therefore, in the present embodiment, irregularities are formed on the upper and lower surfaces of the bellows cover. Thereby, when the bellows cover is shrunk, resistance can be given to the movement of the sprayed cutting water adhering to the lower surface to both sides. Further, by forming the upper and lower surfaces of the bellows cover with uneven surfaces, when the bellows cover is contracted, a cavity can be formed between the inclined surfaces to collect cutting water. By these, cutting water is prevented from being pushed out to the both sides of the expansion-contraction direction in a bellows cover.

  Hereinafter, with reference to FIG. 1, FIG. 3 and FIG. 4, the configuration and operation transition of the cover means will be described in detail. As shown in FIG. 1, the cover unit 4 is disposed between the first cutting unit 5 a and the second cutting unit 5 b and closes the upper portion of the chuck table 3 during the cutting of the workpiece W. The cover means 4 includes a bellows cover 41, and the bellows cover 41 is expanded and contracted in the approach and separation directions of the first cutting blade 52a and the second cutting blade, that is, the Y-axis direction.

  FIG. 3 is a schematic perspective view of the cover means according to the present embodiment. The bellows cover 41 constituting the cover means 4 is formed by alternately folding the peak portions 41A and the valley portions 41B, and forms an inclined surface 41C therebetween.

  The cover means 4 further includes support rails 44 and 45, and both sides of the bellows cover 41 in the expansion / contraction direction are supported by the support rails 44 and 45. The support rails 44 and 45 include side surface portions 44a and 45a and projecting portions 44b and 45b projecting from the lower ends of the side surface portions 44a and 45a, respectively. The protrusions 44b and 45b are provided so as to support both side portions of the bellows cover 41 from below.

  Plate-shaped attachment portions 43a and 43b are provided on both end sides of the bellows cover 41 in the expansion / contraction direction. The bellows cover 41 is attached to the first Z-axis table 82a and the second Z-axis table 82b (see FIG. 1) via the attachment portions 43a and 43b, respectively. The attachment positions of the attachment portions 43a and 43b with respect to the Z-axis tables 82a and 82b are positions close to the upper side of the first cutting means 5a and the second cutting means 5b (see FIG. 1).

  One mounting portion 43 a is fixed to the support rails 44 and 45. The other mounting portion 43b is provided so as to be movable in the extending and contracting direction of the bellows cover 41 while being supported from below by the protruding portions 44b and 45a. Therefore, when the distance between the first cutting means 5a and the second cutting means 5b changes, the attachment portion 43b moves between the support rails 44 and 45, and the bellows cover 41 is expanded and contracted. Thereby, even if the space | interval of the 1st cutting means 5a and the 2nd cutting means 5b changes, the state which the bellows cover 41 closed the upper part of the chuck cover 3 is maintained, and it sprayed on the lower surface 41b of the bellows cover 41 Cutting water adheres. Therefore, the cutting water is prevented from adhering to the parts arranged on the upper side of the respective cutting means 5a and 5b.

  FIG. 4 is a diagram showing an operation transition of the bellows cover according to the present embodiment. 4A to 4C show side views of the bellows cover.

  As shown in FIG. 4A, the upper surface 41 a and the lower surface 41 b of the bellows cover 41 are formed as uneven surfaces having a large number of uneven surfaces 42. Resin etc. are mentioned as a material of the bellows cover 41, and the polycarbonate etc. are preferable when the workability of the unevenness | corrugation 42 is considered. As a method for forming the irregularities 42, it is preferable to apply a textured process in which a mold having irregularities on the surface is transferred to a resin. The size of the unevenness 42 is not particularly limited.

  FIG. 4A shows a state in which the bellows cover 41 is expanded. As the first cutting means 5a and the second cutting means 5b (see FIG. 1) are separated from each other and the distance between them increases, the bellows cover 41 is expanded, and the lower surface 41b of the bellows cover 41 is sprayed. Water Wa adheres.

  FIG. 4B shows a state in which the bellows cover 41 is contracted. When the first cutting means 5a and the second cutting means 5b (see FIG. 1) approach and the interval decreases, the bellows cover 41 is shrunk as shown in FIG. 4B. At this time, the inclined surfaces 41C of the bellows cover 41 overlap each other. However, since the concave and convex portions 42 are formed on the upper surface 41a and the lower surface 41b of the bellows cover 41, the inclined surfaces 41C sandwiching the mountain portion 41A on the lower surface 41b are hardly adhered to each other. Become. In other words, it is possible to form a gap 46 in which the cutting water Wa accumulates between the inclined surfaces 41C sandwiching the mountain portion 41A and immediately below the mountain portion 41A, and the cutting water Wa attached to the lower surface 41b in the gap 46. Can be stored.

  In addition, although the gap 46 can be formed, pressure is applied to the cutting water Wa by the inclined surfaces 41 </ b> C approaching each other, and the cutting water Wa is washed away toward both sides of the bellows cover 41 in the expansion / contraction direction. Resistance can be imparted to this flow by the irregularities 42 formed on the lower surface 41b of the bellows cover 41, and cutting water can be prevented from moving to both sides of the bellows cover 41 in the expansion / contraction direction. Accordingly, even when the bellows cover 41 is contracted, the cutting water Wa can be prevented from being pushed out from both sides of the bellows cover 41 in the expansion / contraction direction.

  FIG. 4C shows a state in which the bellows cover 41 is expanded again from the state of FIG. 4B. As shown in FIG. 4C, even if the bellows cover 41 is expanded again, the cutting water Wa is hardly pushed out from both sides of the bellows cover 41 in the expansion / contraction direction, so that the cutting water Wa is prevented from flowing around the upper surface 41a. For this reason, it becomes difficult for cutting water to remain in the bellows cover 41, and even if the cutting water Wa dries, it is difficult for cutting waste to remain, and the bellows cover 41 is prevented from being damaged. Further, since the cutting water Wa does not enter the upper surface 41a, the cutting water Wa does not adhere to the upper surface 41a of the bellows cover 41, and the cutting waste is prevented from being scattered by the ball screws 73a, 73b, 83a, 83b and the like. .

  As described above, the bellows cover 41 can impart resistance to the movement of the cutting water Wa by the irregularities 42 of the bellows cover 41 and form a gap 46 on the lower surface 41b of the bellows cover 41 in a contracted state. Thus, the sprayed cutting water Wa can be prevented from flowing from the lower surface 41b of the bellows cover 41 to the upper surface 41a. Therefore, since the structure does not move the water to the upper surface 41a of the bellows cover 41 without providing hanging portions that are folded downward from both sides, it is easy to attach the support rails 44 and 45 that support the bellows cover 41. Thus, the cover means 4 can be produced at a low cost.

  In addition, this invention is not limited to the said embodiment, It can change and implement variously. In the above-described embodiment, the size, shape, direction, and the like illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within a range in which the effect of the present invention is exhibited. In addition, various modifications can be made without departing from the scope of the object of the present invention.

  For example, the shape of the gap 46 shown in FIG. 4B is merely an example, and other shapes may be formed by changing the shape of the protrusions and the protrusion height in the protrusions 42.

  Further, the cover means 4 may be provided with a slider or the like for guiding the operation of the bellows cover 41 and the attachment portions 43a and 43b so as to facilitate the operation thereof.

  As described above, the present invention has the effect of preventing sprayed cutting water from flowing from the lower surface to the upper surface of the bellows cover, and in particular, the bellows in the cutting apparatus that performs cutting while supplying the cutting water. It is useful in a cover and a cutting apparatus using the cover.

DESCRIPTION OF SYMBOLS 1 Cutting apparatus 3 Chuck table 4 Cover means 5a 1st cutting means 5b 2nd cutting means 7a 1st index feed means 7b 2nd index feed means 41 Bellows cover 41a (bellows cover) upper surface 41b (bellows cover) ) Lower surface 41A Mountain portion 41B Valley portion 41C Inclined surface 42 Concavity and convexity 43a, 43b Mounting portion 44, 45 Support rail 44a, 45a Side surface portion 44b, 45b Protruding portion 46 Clearance 52a First cutting blade W Workpiece

Claims (2)

A bellows cover whose both sides are supported and extended by support rails,
An accordion cover in which an upper surface and a lower surface are formed of uneven surfaces. A chuck table for holding a workpiece, a first cutting means having a rotation shaft for rotatably mounting a first cutting blade for cutting the workpiece held by the chuck table, and the first cutting A first index feeding means for index feeding means, a second cutting means for rotatably mounting a second cutting blade facing the first cutting blade, and an index feeding for the second cutting means. Second index feeding means, cover means extending and contracting between the first cutting means and the second cutting means to close the upper portion of the chuck table, and cutting water supply means for supplying cutting water A cutting device comprising:
The cover means includes a bellows cover having an upper surface and a lower surface formed of a concave and convex surface, and a support rail that supports both side portions of the bellows cover.

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