TW201703922A - Bellows cover and cutting device using the same prevent mist-spraying-like cutting water from moving to the upper surface from the lower surface of the bellows cover - Google Patents

Abstract

The topic of the invention is to prevent mist-spraying-like cutting water from moving to the upper surface from the lower surface of the bellows cover. The solution is to form, in concave and convex surface, the upper and lower surfaces of the telescopic bellows cover by supporting both sides with a supporting rail. The concave and convex shape of bellows cover can provide resistance force for the moving of cutting water and can store water by forming a gap on the lower surface of bellows cover at the compressed state. As a result, it can prevent mist-spraying-like cutting water from moving to the upper surface from the lower surface of the bellows cover.

Description

Snake belly cover and cutting device using the same Field of invention

The present invention relates to a bellows cover in a cutting device for cutting while supplying cutting water, and a cutting device using the same.

Background of the invention

There is known a cutting device comprising: two cutting devices having a cutting blade; and an indexing feed including an indexing feed axis that brings the two cutting blades toward each other and brings the opposing cutting blades closer to and away from each other Equipment (for example, Patent Document 1). In the cutting device, the cutting water supplied to the cutting blade may be wound up in a spray shape due to the rotation of the cutting blade.

Therefore, in the above-described cutting device, a configuration in which a bellows cover is disposed between opposing cutting devices has been considered. The bellows cover is formed by folding the mountain and the valley. The bellows cover expands and contracts in the approaching and moving direction of the cutting blade, and supports both sides of the telescopic direction on the support rail. When the cutting device is indexed and the interval (distance) of the two cutting devices is changed, the bellows cover is compressed or expanded. Therefore, even if the interval between the two cutting devices is changed, the spray of the cutting water adheres to the lower surface of the bellows cover, and can be prevented from being disposed on the upper side of the cutting device disposed on the indexing feeding device and the cutting feed device. A case where a spray of cutting water is attached to the part.

Prior technical literature Patent literature

Patent Document 1: Japanese Patent Laid-Open Publication No. 2014-207309

Summary of invention

When the bellows cover is compressed from the expanded state, since the inclined surface of the mountain or the valley portion overlaps the surface of the bellows cover, the spray of the cutting water attached to the lower surface of the bellows cover may be caused by Squeeze the surface and squeeze it. The squeezing spray (cutting water) is adhered to the both sides of the bellows cover in the direction of expansion and contraction, and is splashed from the both sides, and when the bellows cover is again expanded, from both sides The part moves back to the upper surface. Since the spray-like cut water contains the cutting chips discharged during the cutting process, there is a problem that the cut water adhering to the upper surface of the bellows cover is dried and the upper surface of the bellows cover is damaged by the dried cutting chips. Further, when dry cutting chips are generated, there is a problem that the movable shaft is spread to an indexing feed shaft or the like disposed in the apparatus.

The present invention has been made in view of the above problems, and an object of the invention is to provide a bellows cover capable of preventing a sprayed cut water from moving from a lower surface of a bellows cover to an upper surface, and a cutting device using the same.

The bellows cover of the present invention is a bellows cover that supports both sides of the support rail to expand and contract, and is characterized in that the upper surface and the lower surface are formed as concave and convex surfaces.

According to this configuration, when the bellows cover is compressed and the cutting water adhering to the lower surface is pushed out to both side portions, the movement of the cutting water can be imparted with the unevenness of the bellows cover. Moreover, since the upper surface and the lower surface of the bellows cover are formed by the concave-convex surface, when the bellows cover is compressed, it can be deformed so that the inclined surfaces of the breadcrumbs or the valleys in the lower table are not in close contact with each other. The inclined faces form a gap with each other. This gap can accumulate the spray-shaped cutting water adhering to the lower surface, and even if the bellows cover is compressed, the cutting water can be prevented from being pushed out to both sides. Thereby, it is possible to prevent the cut water that has adhered to the lower surface of the bellows back to the upper surface.

The cutting device of the present invention includes a first cutting device for holding a rotating shaft of a workpiece, and a rotating shaft for rotatably mounting a first cutting blade for cutting a workpiece to be held by the working table. The first cutting device that feeds the first cutting device, the second cutting device that rotatably mounts the second cutting blade opposite to the first cutting blade, and the indexing feed the second cutting a second indexing feeding device of the device, a capping device that stretches between the first cutting device and the second cutting device to cover the working chuck, and a cutting water supply device that supplies cutting water, the cutting The device is characterized in that the cover device includes a bellows cover formed with an uneven surface on the upper surface and the lower surface, and a support rail supporting both side portions of the bellows cover.

According to the present invention, since the unevenness of the bellows cover can impart resistance to the movement of the cutting water and form a gap between the surfaces of the bellows cover, it is possible to prevent the sprayed water from being sprayed from the lower surface of the bellows cover. Move to the upper surface.

1‧‧‧ cutting device

2‧‧‧Abutment

21‧‧‧ Column Department

3‧‧‧Working table

31‧‧‧Mobile board

32‧‧‧Waterproof cover

33‧‧‧ Keep face

4‧‧‧Cover equipment

41, 91‧‧ ‧ snake belly cover

41a‧‧‧ (the upper surface of the snake's belly)

41b‧‧‧(the surface of the snake belly)

41A‧‧‧Mountain

41B‧‧‧谷部

41C‧‧‧ sloped surface

42‧‧‧ bump

43a, 43b‧‧‧Installation Department

44, 45‧‧‧Support track

44a, 45a‧‧‧ side section

44b, 45b‧‧‧ highlights

46‧‧‧ gap

5a‧‧‧1st cutting device

5b‧‧‧2nd cutting equipment

51a, 51b‧‧‧shell

52a‧‧‧1st cutting knife

61‧‧‧Shell

62‧‧‧ Moving in and out

65‧‧‧ piece lift

7a‧‧‧1st indexing equipment

7b‧‧‧2nd indexing feed device

71a, 71b, 81a, 81b‧‧‧ rails

72a‧‧‧1st Axis Abutment

72b‧‧‧2nd Y-axis abutment

73a, 73b, 83a, 83b‧‧‧ ball screw

74b, 84a, 84b‧‧‧ drive motor

8a‧‧‧1st cut-in feed device

8b‧‧‧2nd cut-in feed device

82a‧‧‧1Z Axis Abutment

82b‧‧‧2nd Z-axis abutment

91a‧‧‧Upper surface

91b‧‧‧ lower surface

W‧‧‧Processed objects

Wa‧‧‧cutting water

T‧‧‧ cutting tape

F‧‧‧ ring frame

X, Y, Z‧‧ Direction

Fig. 1 is a perspective view of a cutting device including a bellows cover of the embodiment.

2A to 2C are views showing the action transition of the bellows cover of the comparative example.

Fig. 3 is a schematic perspective view of a cover device of the embodiment.

4A to 4C are views showing the operation transition of the bellows cover of the embodiment.

Form for implementing the invention

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a perspective view of a cutting device including a bellows cover of the embodiment. The cutting device 1 of the present embodiment is configured such that the cutting devices 5a and 5b having one pair of the cutting blades 52a (the cutting blades of the cutting device 5b are not shown) move relative to the working table 3 holding the workpiece W. The workpiece W is cut. The workpiece W is carried into the cutting device 1 in a state of being supported by the annular frame F through the dicing tape T. Further, the workpiece W may be a semiconductor wafer in which a semiconductor element is formed on a semiconductor substrate such as tantalum or gallium arsenide, or an optical element in which an optical element is formed on a ceramic, glass or sapphire-based inorganic material substrate. Wafer.

As shown in Fig. 1, the cutting device 1 is provided with a housing 61 having a rectangular parallelepiped shape in which a space is formed. Inside the casing 61, a first cutting device 5a having a first cutting blade 52a and a second cutting device 5b having a second cutting blade (not shown) are housed. A moving plate 31 that can move between the inside and the outside of the casing 61 is disposed at a lower portion of the casing 61. Above the moving plate 31, a working chuck 3 is provided. Furthermore, what is shown in Figure 1 is that the moving board 31 will work. The clamping table 3 is positioned outside the casing 61.

In the front side of the casing 61, a loading/unloading portion 62 for loading or unloading the workpiece W is provided adjacent to the moving plate 31 and the work chuck 3. The loading/unloading unit 62 is provided with a cassette elevator 65 on which a cassette (not shown) for storing the workpiece W is placed. The cassette elevator 65 is configured to be movable up and down, and the position of the workpiece W accommodated by the cassette can be adjusted in the Z-axis direction.

The moving plate 31 is movable in the X-axis direction by a moving mechanism (not shown) provided at the lower portion. A cylindrical working clamping base (not shown) is disposed on the upper portion of the moving plate 31. The working table base is provided with a rotating mechanism (not shown) for rotation about the Z axis. On the upper portion of the work chuck base, the work chuck 3 that sucks and holds the workpiece W is detachably mounted. The workpiece W held by the work chuck 3 can be relatively opposed to the first cutting device 5a and the second cutting device 5b in the casing 61 by the movement of the moving plate 31 and the rotation of the work chuck base. Move and rotate relative to each other.

The center of the upper surface of the base 2 of the cutting device 1 is provided with a rectangular opening extending in the X-axis direction, and a moving plate 31 and a waterproof cover 32 are provided so as to cover the opening. A holding surface 33 for holding the workpiece W is formed on the upper surface of the work chuck 3.

Further, a column portion 21 is provided inside the casing 61. The column portion 21 is provided with a first indexing device 7a and a second indexing device 7b for indexing the first cutting device 5a and the second cutting device 5b in the Y-axis direction, and The first cutting-in feeding device 8a and the second cutting-in feeding device 8b that move the cutting device 5a and the second cutting device 5b in the Z-axis direction. The first indexing feeding device 7a, The second index feeding device 7b has: guide rails 71a and 71b disposed in front of the column portion 21 in parallel with the Y-axis direction; and a motor-driven first Y-axis base 72a slidably provided on the guide rails 71a and 71b. The second Y-axis base 72b. The first cutting-in feeding device 8a and the second cutting-in feeding device 8b have guide rails 81a and 81b that are disposed in front of the first Y-axis base 72a and the second Y-axis base 72b in the Z-axis direction, and slidably The first Z-axis base 82a and the second Z-axis base 82b that are driven by the motors on the guide rails 81a and 81b are provided.

The first cutting device 5a and the second cutting device 5b that cut the workpiece W are provided on the lower portion of the first Z-axis base 82a and the second Z-axis base 82b. Further, on the back side of the first Y-axis base 72a and the second Y-axis base 72b, a nut portion (not shown) is formed, and ball screws 73a and 73b are screwed into these nut portions. Further, on the back side of the first Z-axis base 82a and the second Z-axis base 82b, a nut portion (not shown) is formed, and ball screws 83a and 83b are screwed into the nut portions. The drive motor 74b (the drive motor for the ball screw 73a) is connected to one end of each of the ball screws 83a and 83b for the Y-axis bases 72a and 72b and the ball screws 83a and 83b for the Z-axis bases 82a and 82b. Not shown), 84a, 84b. By rotating the ball screws 73a, 73b, 83a, 83b by the drive motors 74b (the drive motors for 73a are not shown), 84a, 84b, the first cutting device 5a and the second cutting device 5b can be guided along the guide rail 71a. 71b, 81a, and 81b move in the Y-axis direction and the Z-axis direction.

The first cutting device 5a is configured such that the first cutting blade 52a is rotatably attached to the distal end of a main shaft (rotation shaft, not shown) that protrudes from the casing 51a. The second cutting device 5b is a tip end of a main shaft (rotation shaft, not shown) that protrudes from the casing 51b, and a second cutting blade (not shown) faces the first cutting blade 52a. It is constructed by being rotatably mounted. The first cutting blade 52a and the second cutting blade are formed into a disk shape by, for example, fixing the diamond abrasive grains with a resin binder. In addition, each of the first cutting blade 52a and the second cutting blade is covered with a blade cover (not shown), and each of the blade covers is provided with a jetting nozzle as a cutting water supply device that supplies cutting water toward the cutting portion. (not shown). The first cutting device 5a and the second cutting device 5b rotate the first cutting blade 52a and the second cutting blade at a high speed, and the cutting nozzles spray the cutting water toward the workpiece W and the cutting blades 52a at the cutting portion by the plurality of ejection nozzles. The workpiece W is cut while being processed.

When the cut water is sprayed toward the workpiece W and each of the cutter blades 52a, the cut water may be sprayed and rolled up. Therefore, the configuration in which the bellows cover is disposed between the opposing cutting devices 5a and 5b so as to cover from above is reviewed. However, there is a problem that the cut water attached to the lower surface of the bellows cover when the flap is compressed is returned from the both sides to the upper surface.

For this problem, a comparative example shown in FIG. 2 will be described as follows. Fig. 2 is a view showing the action transition of the bellows cover of the comparative example. As shown in FIG. 2A, when the bellows cover 91 of the comparative example is expanded, the sprayed cutting water Wa is adhered to the lower surface 91b of the bellows cover 91. In this state, as shown in Fig. 2B, when the bellows cover 91 is compressed, the inclined surfaces are brought into contact with each other or in close proximity to the lower surface 91b of the mountain portion of the bellows cover 91 to press the cut water Wa. The extruded cutting water is pushed out toward both sides of the bellows cover 91 in the direction of expansion and contraction (both sides in the direction orthogonal to the plane of the paper of Fig. 2B), and is attached to both side portions of the telescopic direction. The cutting water Wa thus attached to both side portions penetrates into the gap formed by the inclined surfaces on the upper surface 91a of the valley portion of the bellows cover 91 by capillary action. That is, when the bellows cover 91 is compressed, it is attached to the bellows cover 91. The cut water Wa of the surface 91b is moved to wrap back from both side portions to the upper surface 91a side. Further, as shown in Fig. 2C, when the bellows cover 91 is again expanded, the cutting water Wa is diffused into the plane of the upper surface 91a.

In this state, after the cutting water Wa that has adhered to the upper surface 91a of the bellows cover 91 is dried, the cutting debris contained in the cutting water Wa remains on the upper surface 91a of the bellows cover 91, and is stretched and contracted by the bellows cover 91. The action causes the cutting chips to rub against the upper surface 91a to cause damage to the upper surface 91a. Further, in the cutting device 1 of Fig. 1, the cutting chips are scattered into the ball screws 73a, 73b, 83a, 83b and the like.

Therefore, in the present embodiment, irregularities are formed on the upper surface and the lower surface of the bellows cover. Thereby, when the bellows cap is compressed, it is possible to impart resistance to the movement of the spray-shaped cutting water adhering to the lower surface toward both side portions. Further, by forming the upper surface and the lower surface of the bellows surface as the uneven surface, when the bellows cover is compressed, a cavity can be formed between the inclined surfaces to accumulate the cut water. Thereby, the both sides of the cutting water in the direction of expansion and contraction in the bellows cover are prevented from being pushed out.

Hereinafter, the configuration and operation transition of the cover device will be described in detail with reference to FIGS. 1, 3, and 4. As shown in Fig. 1, the cover device 4 is disposed between the first cutting device 5a and the second cutting device 5b, and covers the upper portion of the work table 3 during cutting of the workpiece W. The cover device 4 includes a bellows cover 41 that expands and contracts in a direction in which the first cutting blade 52a approaches the second cutting blade and in a direction away from the second cutting blade (that is, in the Y-axis direction).

Fig. 3 is a schematic perspective view of a cover device of the embodiment. The bellows cover 41 constituting the cover device 4 is formed by alternately folding the mountain portion 41A and the valley portion 41B, and an inclined surface 41C is formed between them.

The cover device 4 is further provided with support rails 44, 45, and both side portions of the bellows cover 41 in the telescopic direction are supported by the support rails 44, 45. The support rails 44, 45 are respectively constituted by side surface portions 44a, 45a and projecting portions 44b, 45b projecting from the lower ends of the side surface portions 44a, 45a. The protruding portions 44b and 45b are provided to support both side portions of the bellows cover 41 from the lower side.

Plate-shaped attachment portions 43a and 43b are provided on both end sides of the bellows cover 41 in the expansion and contraction direction. The bellows cover 41 is attached to the first Z-axis base 82a and the second Z-axis base 82b via the attachment portions 43a and 43b (see Fig. 1). The mounting positions of the mounting portions 43a and 43b with respect to the respective Z-axis bases 82a and 82b are set to be higher in the vicinity of the first cutting device 5a and the second cutting device 5b (see FIG. 1).

The mounting portion 43a on one side is fixed to the support rails 44, 45. The other mounting portion 43b is supported by the protruding portions 44b and 45a from the lower side, and is provided to be movable in the telescopic direction of the bellows cover 41. Therefore, when the interval between the first cutting device 5a and the second cutting device 5b is changed, the mounting portion 43b moves between the support rails 44 and 45 to expand and contract the bellows cover 41. Thereby, even if the interval between the first cutting device 5a and the second cutting device 5b is changed, the state in which the bellows cover 41 covers the upper portion of the chuck cover 3 can be maintained, and the sprayed cutting water can be attached to the lower surface of the bellows cover 41. 41b. Therefore, it is possible to prevent the cutting water from adhering to the parts disposed on the upper side of each of the cutting apparatuses 5a, 5b.

Fig. 4 is a view showing the operation transition of the bellows cover of the embodiment. Shown from Fig. 4A to Fig. 4C is a side view of the bellows cover.

As shown in FIG. 4A, the upper surface 41a and the lower surface of the bellows cover 41 41b is formed by an uneven surface having a plurality of concavities and convexities 42. The material of the bellows cover 41 can be exemplified by a resin or the like. When the workability of the unevenness 42 is considered, polycarbonate or the like is preferable. As a method of forming the unevenness 42, a embossing process in which a mold having irregularities on its surface is transferred onto a resin is preferable. The size of the unevenness 42 is not particularly limited.

Fig. 4A shows a state in which the bellows cover 41 is expanded. When the first cutting device 5a and the second cutting device 5b (see FIG. 1) are moved away, the bellows cover 41 is expanded as the interval becomes larger, and the spray-shaped cutting water Wa is attached to the lower surface 41b of the bellows cover 41. .

Fig. 4B shows a state in which the bellows cover 41 is compressed. When the first cutting device 5a approaches the second cutting device 5b (see FIG. 1) and the interval becomes small, as shown in FIG. 4B, the bellows cover 41 is compressed. At this time, although the inclined surface 41C of the bellows cover 41 is overlapped with each other, since the upper surface 41a and the lower surface 41b of the bellows cover 41 are formed with the unevenness 42, the inclined surface 41C which covers the mountain portion 41A on the lower surface 41b becomes mutually It is difficult to close. In other words, a gap 46 in which the cut water Wa is accumulated can be formed between the inclined surface 41C of the wrap portion 41A at a position directly below the mountain portion 41A, and the cut water Wa adhering to the lower surface 41b can be accumulated in the gap 46.

Further, although the gap 46 can be formed, the cutting water Wa is pressed against the inclined surface 41C which is close to each other, and the cut water Wa is pressed and flows toward both sides in the expansion and contraction direction of the bellows cover 41. With this flow, the resistance can be imparted by the unevenness 42 formed on the lower surface 41b of the bellows cover 41, and the movement of the cut water to both sides of the bellows cover 41 in the expansion and contraction direction can be suppressed. With these, even when the snake belly cover 41 is compressed, it is possible to block the cutting water Wa from the snake. The both sides of the bellows 41 in the direction of expansion and contraction are pressed out.

Fig. 4C is a state in which the bellows cover 41 is again expanded from the state of Fig. 4B. As shown in FIG. 4C, even if the bellows cover 41 is again expanded, the cutting water Wa is hardly pressed out from both sides of the bellows 41 in the expansion and contraction direction, so that the cut water Wa can be prevented from being returned to the upper surface 41a. Therefore, it becomes difficult for the cutting water to remain on the bellows cover 41, and even if the cutting water Wa is dried, it is difficult to leave the cutting chips, and the damage of the bellows cover 41 can be prevented. Further, since the cutting water Wa does not wander back to the upper surface 41a, it is possible to prevent the cutting chips from being scattered to the ball screws 73a, 73b, 83a, 83b, etc. without causing the cutting water Wa to adhere to the upper surface 41a of the bellows cover 41. Happening.

As described above, the bellows cover 41 can impart resistance to the movement of the cutting water Wa by the unevenness 42 of the bellows cover 41, and a gap 46 is formed in the lower surface 41b of the bellows cover 41 in the compressed state. With this, it is possible to prevent the sprayed water Wa from being drawn back from the lower surface 41b of the bellows cover 41 to the upper surface 41a. Therefore, since it is not necessary to fold the lower hanging portion from the both side portions in the downward direction, the configuration in which the water does not move to the upper surface 41a of the bellows cover 41 can be formed, thereby mounting the support rails 44, 45 supporting the bellows cover 41. The work becomes easy, and the cover device 4 can be manufactured at low cost.

Furthermore, the present invention is not limited to the embodiments described above, and can be implemented in various modifications. In the above-described embodiments, the size, shape, and the like shown in the drawings are not limited thereto, and may be appropriately changed within the scope of exerting the effects of the present invention. Further, the invention can be carried out with appropriate modifications without departing from the scope of the invention.

For example, the shape of the gap 46 shown in FIG. 4B is only one of them. For example, other shapes may be adopted by changing the shape of the convex portion or the protruding height in the unevenness 42.

Further, in the cover device 4, a slider or the like for guiding the operation of the bellows cover 41 and the attachment portions 43a and 43b may be provided so as to smooth the operation of the same.

Industrial availability

As described above, the present invention has an effect of preventing the cutting water which is sprayed from being drawn back from the lower surface of the bellows cover to the upper surface, in particular, the bellows cover in the cutting device which performs cutting while supplying the cutting water, and the use thereof Useful on cutting devices.

41‧‧‧The belly cover

41a‧‧‧ (the upper surface of the snake's belly)

41b‧‧‧(the surface of the snake belly)

41A‧‧‧Mountain

41B‧‧‧谷部

41C‧‧‧ sloped surface

42‧‧‧ bump

46‧‧‧ gap

Wa‧‧‧cutting water

Claims (2)

A bellows cover is formed by supporting both sides of a support rail to expand and contract, and the bellows cover is formed by forming an upper surface and a lower surface with an uneven surface. A cutting device comprising: a working chuck for holding a workpiece; and a first cutting device having a rotating shaft for rotatably mounting a first cutting blade for cutting a workpiece to be held by the working chuck; The first cutting device that feeds the first cutting device, the second cutting device that rotatably mounts the second cutting blade opposite to the first cutting blade, and the indexing feed the second cutting a second index feeding device of the device, a cover device that expands and contracts between the first cutting device and the second cutting device to cover the working chuck, and a cutting water supply device that supplies cutting water, the cover The capping device includes a bellows cover formed with an uneven surface on the upper surface and the lower surface, and a support rail supporting both side portions of the bellows cover.