JP2002329685A - Dicing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a contamination-free dicing apparatus which never contaminates the surface of even a large work with cut chips, etc. SOLUTION: A cleaning water nozzle 26 is provided for always supplying cleaning water over the entire top surface of a machined work W. The nozzle 26 moves together with a work table 31 to make always invariant with its relative position to the work table 31.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dicing apparatus, and more particularly, to a dicing apparatus in which cutting chips hardly adhere to an upper surface of a workpiece processed by the dicing apparatus.

[0002]

2. Description of the Related Art FIG. 5 is an enlarged view of a processing portion of a conventional dicing apparatus. In the processing section of this conventional dicing apparatus, a spindle 22 with a built-in high-frequency motor having a rotary blade 21 for processing a work W attached to the tip is index-fed in the Y direction indicated by Y-Y in the drawing. . The work W is placed on a work table (not shown) and cut and fed in the X direction indicated by XX in the figure. Furthermore, the rotary blade 21
A flange cover 23 for covering the cutting water nozzle 2 is attached to the spindle 22.
4 and a pair of cooling water nozzles 25, 25 are attached so as to sandwich the rotary blade 21 in front and rear. This cutting water nozzle 2
4 is a cutting water supply pipe 24A and a pair of cooling water nozzles 2
5 and 25 are a cooling water supply pipe 25A and a flange cover 2 respectively.
It communicates within 3.

[0003] When processing a workpiece W with this conventional dicing apparatus, first, a rotating blade 21 rotating at a high speed is fed in the Y direction and positioned on a first processing line. Next, the cutting water is supplied from the cutting nozzle 24 to the cutting edge of the rotary blade 21 through the cutting water supply pipe 24A, and the cooling water is supplied from the pair of cooling water nozzles 25, 25 through the cooling water supply pipe. Supplied to the side. In this state, the work W
The first line is processed by being cut and fed in the direction. Next, the rotary blade 21 is fed by one pitch index in the Y direction, and the next line is processed. By repeating this operation, all the lines are machined, but the cutting chips generated during the machining are washed away from the surface of the workpiece W by the cutting water and the cooling water.

[0004]

However, the cutting chips are not completely washed away, and the remaining chips adhere to the surface of the work W. In this case, the conventional cutting water nozzle,
Since the cooling water nozzle is attached to the rotary blade 21 side, the cutting chips remaining in the initial portion of the processing are separated from the cutting water and the cooling water, so that the chips are dried over time. The cutting waste generated during the processing is a very fine powder, and has a property that once dried and adhered, it is hard to fall off. As described above, the cutting chips adhering to the vicinity of the line processed at the beginning are dried when the line at the end is processed, and cannot be completely removed by spin cleaning after dicing. In particular, when the work W is a semiconductor wafer, the contamination on the surface lowers the quality and is a problem. In addition, this problem becomes more remarkable as the size of the work W increases, and must be solved for a semiconductor wafer having a diameter of 300 mm.

The present invention has been made in view of such circumstances, and has as its object to provide a contamination-free dicing apparatus in which dirt such as cutting chips does not adhere to the surface of a large workpiece. .

[0006]

According to the present invention, in order to achieve the above object, a rotary blade for processing a work, and a rotary blade for mounting the work on the rotary blade are provided. A work table moving relatively in the X and Y directions, a washing water nozzle for forming a water film or a flow of water covering the entire upper surface of the work is provided near the outer periphery of the work table. The cleaning water nozzle moves relative to the rotary blade in the X and Y directions together with the work table.

According to the first aspect of the present invention, during processing of the work, the entire upper surface of the work is always covered with the water film or the flow of the water is formed, so that the cutting debris is generated on the work surface. Does not adhere to

The cleaning water nozzle is provided so as to supply the cleaning water in the same direction as the direction in which the cutting water supplied to the rotary blade flows on the work upper surface. It is characterized by being.

According to the second aspect of the present invention, since the cleaning water flows in the same direction as the direction in which the cutting water flows on the upper surface of the work, cutting chips and dirt can be efficiently flown.

Further, as set forth in claim 3, the cleaning water nozzle is characterized in that an ultrasonic transmission source for transmitting vibration to the supplied cleaning water is incorporated.

According to the third aspect of the present invention, since ultrasonic vibrations are transmitted to the cleaning water, cutting debris and dirt hardly adhere to the work surface and are easily washed away, so that no contamination remains. .

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a dicing apparatus according to the present invention will be described below in detail with reference to the accompanying drawings. In the drawings, the same members are given the same numbers or symbols.

FIG. 1 is a perspective view showing the appearance of a dicing apparatus. The dicing apparatus 1 has a processing unit 2 having spindles 22 and 22 with a built-in high-frequency motor having a rotary blade 21 attached to the tip and a work table 31 for suction-holding the work W, and spin-cleans the processed work W. The cleaning unit 52 includes a cleaning unit 52, a load port 51 on which a cassette containing a large number of works W is placed, and conveyance means 53 for conveying the works W. The structure of the processing part 2 is shown in FIG.
The X guide 3 provided on the X base 36 as shown in FIG.
4 and 34, there is an X table 33 driven in the X direction indicated by XX in the figure by a linear motor 35. The X table 33 has a work table 31 via a rotary table 32 that rotates in the θ direction. Is provided. On the other hand, on the side surface of the Y base 44, Y guides 42 are guided by Y guides 42, and are driven by a stepping motor and a ball screw (not shown) in the Y direction shown by YY in the drawing.
There are tables 41, 41, and each of the Y tables 41, 41 is driven in the Z direction by driving means (not shown).
A table 43 is provided, and a high-frequency motor built-in spindle 22 having a rotary blade 21 attached to the tip is fixed to the Z table 43. Since the structure of the processing section 2 is as described above, the rotary blade 21 is index-fed in the Y direction and cut and fed in the Z direction, and the work table 31 is cut and fed in the X direction.

Next, the configuration of the main part of the present invention will be described with reference to FIGS. As shown in FIG. 3, the rotary blade 21 has a flange cover 23 having an opening at the front surface and a lower portion.
Covered with. The flange cover 23 has a pair of cooling water nozzles 2 that sandwich the rotary blade 21 between the cutting water nozzle 24 and the front and rear sides (spindle side) of the rotary blade 21.
5 and 25 are provided. The cutting water nozzle 24 communicates with the cutting water supply pipe 24A, and the pair of cooling water nozzles 25, 25 communicates with the cooling water supply pipe 25A in the flange cover 23, respectively. On the other hand, the work W processed by the dicing device
Is a ring-shaped frame F via a dicing sheet S
And is adsorbed and held on the work table 31. The work table 31 is placed on an X table 33 via a rotation table 32 in the θ direction. The X table 33 is provided with a washing water nozzle 26 via a mounting block 28 on the right side of the work table 31 in FIG. The position where the cleaning water nozzle 26 is attached is a position near the outer periphery of the work table 31 and close to the frame F.
Are moved together even if they move, so that the position relative to the work table 31 does not change. The washing water nozzle 26 has a hollow portion 26A inside, and communicates with a number of small holes 26B, 26B,. The cleaning water nozzle 26 has a number of small holes 26 as shown in the perspective view of FIG.
The opening surfaces of B, 26B,... Form a part of a circle surrounding the frame F, and have a plate shape having a depth sufficient to supply cleaning water to the entire surface of the work W. The small holes 26B are formed in parallel with the X direction. In addition, as shown in FIG.
The ultrasonic transmission source 61 is incorporated in the hollow portion 26A, and propagates ultrasonic vibration to the supplied cleaning water. Although a piezoelectric element such as a piezo element is used as the ultrasonic transmission source 61, the invention is not limited thereto, and various known ultrasonic transmission units may be incorporated.

The operation of the dicing apparatus 1 according to the present invention configured as described above will be described. First, when a cassette containing a large number of works W is placed on the load port 51, the works W are pulled out of the cassette by the conveyance means 53 and conveyed to the processing section 2. In the processing section 2, the rotary blade 21 rotating at a high speed is fed in the Y direction and positioned on the first processing line. Next, cutting water is supplied from the cutting nozzle 24 to the cutting edge of the rotary blade 21 through the cutting water supply pipe 24A, and cooling water is supplied from the pair of cooling water nozzles 25 and 25 to the rotary blade 21 through the cooling water supply pipe. Supplied to the side.
The cutting water supplied to the tip of the rotary blade 21 is supplied to the processing point on the rotary blade 21 and then flows to the left side in FIG. 3 due to the centrifugal force of the rotary blade 21. Further, the cooling water supplied from the pair of cooling water nozzles 25, 25 to both sides of the rotary blade 21 prevents the rotary blade 21 from rising in temperature due to processing heat, and after being supplied, merges into the flow of cutting water. Then, it flows to the left side in FIG. Further, the cleaning water is supplied from the cleaning water nozzle 26 in the same direction as the flow of the cutting water, and a water film is formed on the entire upper surface of the work W, or the amount of the water is increased and the cutting water is supplied on the entire upper surface of the work W. Form a stream of wash water in the same direction as the stream. In addition, ultrasonic vibration generated by the ultrasonic transmission source 61 is propagated to the cleaning water. In this state, the workpiece W is cut and fed in the X direction, thereby processing the first one line. Next, the rotary blade 21 is fed by one pitch index in the Y direction, and the next line is processed. By repeating this operation, all lines are processed. Most of the cuttings generated during processing are washed away by the flow of the cutting water and the cooling water, but the remaining cuttings that cannot be completely removed are also washed away by the flow of the cleaning water formed on the entire upper surface of the work W. Left. Alternatively, even when only the water film of the cleaning water is formed, the entire upper surface of the workpiece W does not dry, so that the cutting chips do not stick and are washed off by spin cleaning after processing. . Further, the ultrasonic vibration transmitted to the cleaning water suppresses the attachment of the cutting chips and further enhances the effect of flowing away the chips. Whether to form the flow of the cleaning water or only the water film is appropriately selected according to the type of the workpiece W and the processing conditions.

When the processing is completed, the cleaning unit 5
It is transported to 2 and spin-cleaned. The work W after the cleaning is returned to the original cassette by the transport means 53 again. The flow of one work W processed by the dicing apparatus 1 has been described above.

As described above, according to the present invention, the work W processed by the dicing apparatus 1 is not contaminated by cutting chips and the like, and does not cause quality deterioration.

In the embodiment of the present invention, the washing water nozzle 26 is provided on the X table 33 via the mounting block 28. However, the present invention is not limited to this. It may be attached to the site.

[0019]

As described above, according to the present invention, the work being processed is always covered with a water film on the entire upper surface or a water flow is formed, so that cutting chips are formed on the surface of the work. Does not adhere.

Further, since the washing water flows in the same direction as the direction in which the cutting water flows on the upper surface of the work, cutting chips and dirt can be efficiently flown.

Furthermore, since ultrasonic vibrations are transmitted to the cleaning water, cutting chips and dirt hardly adhere to the work surface and are easily washed away, so that no contamination remains.

Accordingly, a contamination-free dicing apparatus can be obtained in which dirt such as cutting chips does not adhere to the surface of a large workpiece.

[Brief description of the drawings]

FIG. 1 is an external perspective view of a dicing apparatus according to an embodiment of the present invention.

FIG. 2 is a perspective view illustrating a structure of a processing unit of the dicing apparatus according to the embodiment of the present invention.

FIG. 3 is a front view illustrating a main part of the dicing apparatus according to the embodiment of the present invention;

FIG. 4 is a perspective view illustrating a shape of a cleaning water nozzle of the dicing apparatus according to the embodiment of the present invention.

FIG. 5 is an enlarged view of a processing portion of a conventional dicing apparatus.

[Explanation of symbols]

W: Work, 1: Dicing device, 21: Rotating blade, 24
... cutting water nozzle, 25 ... cooling water nozzle, 26 ... washing water nozzle, 31 ... work table, 61 ... ultrasonic transmission source

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Takayuki Kaneko 9-7-1, Shimorenjaku, Mitaka-shi, Tokyo F-term (reference) 3B201 AA03 AB03 BB21 BB83

Claims (3)

[Claims] 1. A dicing apparatus comprising: a rotary blade for processing a work; and a work table on which the work is placed and which moves in the X and Y directions relative to the rotary blade. Provided in the vicinity of the outer periphery of the work table, the washing water nozzle moves relatively to the rotary blade in the X and Y directions together with the work table,
A dicing apparatus wherein a water film or a flow of water is constantly formed on the entire upper surface of the work until the processing of the work is completed. 2. The cleaning water nozzle according to claim 1, wherein the cleaning water nozzle is provided to supply the cleaning water in the same direction as the direction in which the cutting water supplied to the rotary blade flows on the work upper surface. Item 7. A dicing apparatus according to Item 1. 3. The dicing apparatus according to claim 1, wherein an ultrasonic wave transmission source for transmitting vibration to the supplied cleaning water is incorporated in the cleaning water nozzle.