JP4649917B2 - Dicing machine - Google Patents

Description

  The present invention relates to a dicing apparatus, and more particularly to a dicing apparatus in which residual contamination is reduced.

  A dicing apparatus that divides a work such as a wafer on which a semiconductor device or an electronic component is formed into individual chips includes at least a blade that is rotated at high speed by a spindle, a work table on which the work is placed, a work table and a blade X, Y, Z, and θ moving axes that change the relative positions of the workpieces are provided, and the workpieces are grooved and cut by the operations of these moving axes.

And in this processing, since contaminants such as grinding scraps (called contamination or contamination) are generated from the workpiece, the dicing device is provided in the vicinity of the workpiece table, and a nozzle that constantly injects cleaning liquid onto the workpiece upper surface, etc. Various cleaning liquid ejecting members are attached (for example, see Patent Document 1).
JP 2002-329685 A

  By the way, there are a large number of irregularities on the workpiece surface, and in recent years, the types of workpieces to be machined have become various, and many workpieces with special shapes and special machining procedures have appeared. However, when such a special workpiece is processed, since the flow of the cleaning liquid is directed only in a certain direction when using an injection member such as that described in Patent Document 1, the area around the uneven portion or a specific place In some cases, contamination may remain, resulting in problems in processing quality.

  The present invention has been made for such a problem, and it is an object of the present invention to provide a dicing apparatus capable of preventing contamination from remaining on an uneven portion of a workpiece or a specific location.

In order to achieve the above object, the present invention includes a blade that is rotated at a high speed by a spindle and a work table on which a work is placed to perform relative movement with the blade. In the dicing apparatus for performing grooving or cutting on the workpiece by the blade, a rotary actuator attached to the side surface of the spindle so that the rotating portion rotates about an axis perpendicular to the work table, and a base end parts are connected via a movable joint rotation of the rotary actuator, a nozzle tip is placed in the lower part of the spindle, the spindle than the blade from the tip with respect to the workpiece during machining a nozzle for injecting the cleaning liquid toward the side of the work surface, the cleaning liquid to the nozzle is connected to the movable joint supply And a control means for controlling the swing of the nozzle by controlling the rotary actuator, and the cleaning liquid ejected from the tip of the nozzle by swinging the nozzle with the rotary actuator The injection direction can be varied around an axis perpendicular to the work table.
According to a second aspect of the present invention, in the first aspect of the present invention, the nozzle is connected to the rotating portion of the rotary actuator via the movable joint and is arranged perpendicular to the work table. A base end portion, a first straight portion that is provided bent at the front end of the base end portion, and is provided at a front end of the first straight portion; A second linear portion disposed in parallel with the work table, and a distal end portion provided to be bent at the distal end of the second linear portion and disposed to be inclined with respect to the work table, The second linear portion is characterized in that it is arranged in parallel with the spindle axis at a lower position of the spindle when the first linear portion is orthogonal to the spindle axis.
According to a third aspect of the present invention, in the first or second aspect of the present invention, two opposed spindles are provided .

According to the present invention, since the cleaning liquid spraying direction can be changed in response to the movement of the workpiece during processing, the cleaning liquid can be supplied in a concentrated manner where contamination is likely to remain. Can be improved.

According to the present invention, since the cleaning liquid can be supplied to a specific location on the work surface by controlling the posture of the injection member by the control means, it is possible to effectively clean a place where contamination is particularly likely to remain. It becomes.

According to the present invention, the cleaning liquid can be supplied for a predetermined time by designating a specific place on the work surface, so that it is possible to effectively clean a plurality of places where contamination is likely to remain.

  As described above, according to the dicing apparatus of the present invention, it is possible to change the spraying direction of the cleaning liquid sprayed onto the workpiece to an arbitrary direction during the processing of the workpiece, and concentrate the cleaning liquid on a place where contamination easily remains. As a result, residual contamination can be suppressed and the processing quality can be improved.

  A preferred embodiment of a dicing apparatus according to the present invention will be described in detail below with reference to the accompanying drawings. In addition, in each figure, the same number or the code | symbol is attached | subjected about the same member.

  First, the configuration of the dicing apparatus will be described. FIG. 1 is a perspective view showing the appearance of the dicing apparatus. The dicing apparatus 1 includes a machining unit 2 having high-frequency motor built-in spindles 22 and 22 that are arranged to face each other and have a blade 21 attached to the tip, and a work table 31 that holds and holds a workpiece W, and a machined workpiece A cleaning unit 52 that spin-washes W, a load port 51 on which a cassette that stores a large number of workpieces W is placed, a transport unit 53 that transports the workpieces W, a controller 10 that controls the operation of each unit, and the like. Has been.

  As shown in FIG. 2, the structure of the processing unit 2 is guided by X guides 34, 34 provided on the X base 36, and is driven by a linear motor 35 in the X direction indicated by XX in the drawing. The X table 33 is provided with a work table 31 via a rotary table 32 that rotates in the θ direction.

  On the other hand, Y tables 41 and 41 guided by Y guides 42 and 42 and driven in the Y direction indicated by YY in the figure by a stepping motor and a ball screw (not shown) are provided on the side surface of the Y base 44. . Each Y table 41 is provided with a Z table 43 that is driven in the Z direction by a driving means (not shown). A spindle 22 with a built-in high-frequency motor with a blade 21 attached to the tip is fixed to the Z table 43. . Since the structure of the processing unit 2 is as described above, the blade 21 is index-fed in the Y direction and cut and fed in the Z direction, and the work table 31 is cut and fed in the X direction.

  The controller 10 that controls the operation of each unit of the dicing apparatus 1 includes a CPU, a memory, an input / output circuit unit, various control circuit units, and the like, and is incorporated in the frame of the dicing apparatus 1.

  Next, main parts of the dicing apparatus according to the present invention will be described with reference to FIGS.

  FIG. 3 is a plan view of the processing unit 2, and FIG. 4 is a side view of the processing unit 2. As described above, the dicing apparatus 1 has the spindle 22 with a built-in high-frequency motor with the blade 21 attached to the tip. The blade 21 is fixed to the rotating shaft 68 of the spindle 22 by a flange 67.

  In the present invention, as shown in FIGS. 3 and 4, a rotary actuator 61 is attached to the side surface of the spindle 22 by a bracket 66, and a nozzle (injection) connected to the rotary actuator 61 via a movable joint 69. Member) 62, a tube 63, and a tube 64 are attached. A tube 65 is connected to the movable joint 69, and the cleaning liquid is supplied from the tube 65 to the nozzle 62, and the cleaning liquid is ejected from the tip of the nozzle 62 toward the workpiece W.

  When the rotary actuator 61 is supplied with pulsed compressed air from the tube 63 or the tube 64, the rotating unit 70 is index-rotated clockwise or counterclockwise. The air is supplied and stopped by an opening / closing mechanism (not shown), and the opening / closing mechanism is controlled by a controller 10 as control means. Thereby, it is possible to control the posture of the nozzle 62 swinging in the direction of arrow R shown in FIG. 3 within a certain angle range.

  The injection means 91 of the present invention is composed of the nozzle 62 which is an injection member provided in such a manner as to be capable of posture control and the controller 10 as a control means.

  With this configuration, it is possible to change the direction in which the cleaning liquid is sprayed to a specific position where contamination is likely to remain on the workpiece W in accordance with a change in the position of the workpiece W, thereby preventing contamination from remaining. Therefore, the processing quality is improved.

  In the above-described embodiment, the rotary actuator driven by compressed air is used as the rotary actuator. However, the present invention is not limited to this, and other known rotary actuators such as an electric motor may be used.

  Next, the operation of the dicing apparatus 1 according to the present invention configured as described above will be described. First, when a cassette storing a large number of workpieces W is placed on the load port 51, the workpieces W are pulled out of the cassette by the transfer means 53 and transferred to the processing unit 2. In the processing unit 2, the position of the work W is confirmed by an imaging unit (not shown), and the work table 31 is rotated to adjust the positions of the processing line and the blade 21.

  After the adjustment is completed, the blade 21 rotating at high speed and the other blade 21 arranged opposite to each other are sent in the Y direction, and are positioned on the first processing line. Next, the supply of the cutting fluid and the cleaning fluid is started from a nozzle (not shown) provided near the blades 21 and 21. At this time, the spraying of the cleaning liquid starts from the nozzle 62 and the processing operation is started. When the processing is started, the blades 21 and 21 perform processing simultaneously, whereby two lines are processed simultaneously.

  Then, each time one line is processed, the blades 21 and 21 are indexed in the Y direction to process the next line. At this time, the nozzle 62 is index-fed together with the blade 21 and the spindle 22 to change the position, and the workpiece W is also processed and fed in the X direction, so that the relative position to the nozzle 62 changes.

  In accordance with this, the orientation of the nozzle 62 is controlled by the rotary actuator 61 controlled by the controller 10 so that the cleaning liquid sprayed to a specific position on the workpiece W surface set in advance to the controller 10 is changed. As a result, the cleaning liquid sprayed from the nozzle 62 can always spray the cleaning liquid to a specific position on the surface of the workpiece W for a predetermined time during the machining operation, and the remaining contamination can be effectively removed.

  When this operation is repeated and machining of all lines in one direction is completed, the work table 31 rotates to change the direction of the work W in the next machining direction, and the blade 21 moves to the first machining position and moves in that direction. Start processing. Normally, the workpiece W is processed into a square shape, so it is generally rotated 90 degrees.

  When machining in all directions is thus completed, the workpiece W is transferred to the cleaning unit 52 by the transfer means 53 and spin cleaned. The workpiece W that has been cleaned is returned to the original cassette by the conveying means 53 again. The above is the flow of the workpiece W processed by the dicing apparatus 1.

  As described above, according to the present invention, the cleaning liquid can be sprayed to a specific position where the contamination on the workpiece W is likely to remain for a predetermined time in accordance with the relative position change between the workpiece W and the blade 21, and the contamination remains. Since it can be prevented, the processing quality is improved.

In the following, FIG. 5 Other examples of dicing, dicing apparatus will be described with reference to FIG. 6, and FIG.

  5 is a plan view of the periphery of the work table 31, FIG. 6 is a side view of the periphery of the work table, and FIG. 7 is a piping system diagram of the nozzle portion.

  As described above, the dicing apparatus 1 includes a machining unit 2 having high-frequency motor built-in spindles 22 and 22 that are opposed to each other and have a blade 21 attached to the tip, and a work table 31 that holds the work W by suction. , A cleaning unit 52 that spin-cleans the processed workpiece W, a load port 51 on which a cassette storing a large number of workpieces W is placed, a transport unit 53 that transports the workpiece W, and a controller that controls the operation of each unit 10 grades.

  In the present embodiment, a nozzle 71A, a nozzle 71B, a nozzle 71C, a nozzle 71D, a nozzle 71E, and a nozzle 71F are provided along the outer periphery of the work table 31 as ejection members constituting the ejection means 92. The cleaning liquid can be ejected from each nozzle toward the work W on the work table 31. As shown in FIG. 7, each nozzle is connected with an electromagnetic valve 81A, an electromagnetic valve 81B, an electromagnetic valve 81C, an electromagnetic valve 81D, an electromagnetic valve 81E, and an electromagnetic valve 81F. This is controlled by the controller 10 as the control means, and the operation of jetting and stopping the cleaning liquid sent to each nozzle from the nozzle 71A to the nozzle 71F is performed.

  With this configuration, for example, when the cleaning liquid is ejected from the nozzle 71A and the nozzle 71B, the liquid flow flows in the direction of the arrow A in FIG. 5, and when the cleaning liquid is ejected from the nozzle 71C and the nozzle 71D, the liquid flow is in the direction of the arrow B. When the liquid is ejected from the nozzle 71E and the nozzle 71F, the liquid flow flows in the direction of arrow C. Therefore, it is possible to change the flow direction of the cleaning liquid formed on the upper surface of the work according to the change of the processing position, and it is possible to remove the contamination that was difficult to remove with the liquid flow from one direction, so the processing quality is improved. Improve.

Next, the operation of dicing, dicing apparatus 1 configured as described above.

  In the dicing apparatus 1, as described above, the blades 21 and 21 that rotate at high speed are sent in the Y direction and positioned on the first processing line. Next, the supply of the cutting fluid and the cleaning fluid is started from a nozzle (not shown) provided near the blades 21 and 21.

  At this time, each of the solenoid valves from the solenoid valve 81A to the solenoid valve 81F is controlled by the controller 10 as the control means, and any combination from the nozzle 71A to the nozzle 71F is a combination of nozzles that creates an optimal liquid flow for the first processing line. Also, the spray of the cleaning liquid starts and the machining operation is started.

  Then, each time one line is processed, the blades 21 and 21 are indexed in the Y direction to process the next line. Since the machining position changes as machining progresses, the cleaning liquid is ejected by the solenoid valves from the solenoid valve 81A to the solenoid valve 81F controlled by the controller 10 so as to change the flow in the optimum fluid flow direction at the changed machining position. Any nozzle from the nozzle 71A to the nozzle 71F that is in use changes the nozzle that sequentially injects the cleaning liquid into a nozzle that creates an optimal liquid flow direction. Thereby, it becomes possible to make the liquid flow direction suitable for another processing direction, and it becomes possible to wash away the remaining contamination effectively.

  In this way, when all the machinings in one direction are completed, the work table 31 rotates and the work W changes its direction in the next machining direction, and machining is similarly started. When the machining in all directions is completed, the workpiece W is transferred to the cleaning unit 52 by the transfer means 53 and spin cleaned as described above. The workpiece W that has been cleaned is returned to the original cassette by the conveying means 53 again.

  In the above embodiment, the nozzles 71A to 71F are used for cleaning during the processing operation. However, for cleaning after the processing is completed, the work table 31 is rotated back and forth while the work table 31 is rotated back and forth. The cleaning liquid may be ejected from each of the nozzles until the contamination is removed.

  In the embodiment according to the present invention, the dicing apparatus 1 includes the two spindles 22 and 22 facing each other. However, the present invention is not limited to this, and is a dicing apparatus having only one spindle 22. Also good.

  As described above, according to the present invention, it becomes possible to supply cleaning liquid intensively to a specific place where contamination is likely to remain, and the flow direction of the cleaning liquid formed on the workpiece upper surface changes the machining position. Since it is possible to change according to the process, residual contamination is suppressed and machining quality can be improved.

The perspective view showing the external appearance of the dicing apparatus concerning an embodiment of the invention The perspective view showing the process part of the dicing apparatus which concerns on embodiment of this invention. The top view showing the process part of the dicing apparatus which concerns on embodiment of this invention The side view showing the process part of the dicing apparatus which concerns on embodiment of this invention The top view showing the process part of the other example of a dicing apparatus Side view showing the machining part of another example of the dicing machine Piping system diagram of nozzles around the work table of other examples of dicing equipment

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Dicing apparatus, 10 ... Controller (control means), 21 ... Blade, 22 ... Spindle, 31 ... Work table, 61 ... Rotary actuator, 62 ... Nozzle (injection member), 71A ... Nozzle (injection member), 71B ... Nozzle (Injection member), 71C ... nozzle (injection member), 71D ... nozzle (injection member), 71E ... nozzle (injection member), 71F ... nozzle (injection member), 91 ... injection means, 92 ... injection means, A ... liquid Flow direction, B ... Liquid flow direction, C ... Liquid flow direction, R ... Swing direction, W ... Workpiece

Claims (3)

In a dicing apparatus that has a blade that is rotated at high speed by a spindle and a work table that places a workpiece and moves relative to the blade, and performs groove processing and cutting processing on the workpiece by the blade,
A rotary actuator attached to the side of the spindle such that the rotating part rotates about an axis perpendicular to the work table;
Proximal end is connected via a movable joint rotation of the rotary actuator, a nozzle tip is placed in the lower part of the spindle, than the blade from the tip with respect to the workpiece during machining A nozzle for injecting a cleaning liquid toward the work surface on the spindle side ;
A tube connected to the movable joint for supplying a cleaning liquid to the nozzle;
Control means for controlling the rotary actuator to control the oscillation of the nozzle;
The dicing apparatus is characterized in that the spraying direction of the cleaning liquid sprayed from the tip of the nozzle can be varied around an axis perpendicular to the work table by swinging the nozzle with the rotary actuator. The nozzle is
A base end portion connected to the rotary portion of the rotary actuator via the movable joint and arranged perpendicular to the work table;
A first straight portion that is bent at the distal end of the base end portion and is arranged in parallel with the work table;
A second linear portion that is bent at the tip of the first linear portion and is arranged in parallel with the work table;
A tip portion that is bent and provided at the tip of the second straight portion, and is inclined with respect to the work table;
The second linear portion is arranged parallel to the spindle axis at a lower position of the spindle when the first linear portion is orthogonal to the spindle axis. The dicing apparatus according to claim 1.   The dicing apparatus according to claim 1, comprising two spindles facing each other.

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