JP7457521B2 - water injection device - Google Patents

Description

The present invention relates to a water injection device.

There is a processing apparatus that includes a holding means that can hold and rotate a workpiece, a processing means that is equipped with a processing tool and can rotate the processing tool, and a water supply means that supplies processing water to the workpiece (for example, (See Patent Document 1).

In some of these processing devices, processing water is supplied from a nozzle on the outer periphery of the holding means. In this case, it may be necessary to switch the landing position of the processing water between two locations depending on the processing conditions.

For example, when using an annular grindstone as a processing tool to grind the top surface of a workpiece held in a holding means, the arc-shaped part of the bottom surface of the rotating grindstone that comes into contact with the workpiece is used for grinding. will be done. Depending on the rotation direction of the grindstone, there are cases in which it is better to supply machining water to one end of the arc, and cases in which it is better to supply machining water to the center of the arc. For this reason, the landing position of the processed water is changed by changing the direction in which the processed water is jetted from the nozzle.

Japanese Patent Application Publication No. 2019-013989

However, the spray direction in the nozzle is changed by an operator changing the direction of the nozzle. Therefore, changing the position of this nozzle increases the number of work steps.
As a countermeasure, it is possible to provide a drive unit that can change the direction of the nozzle. However, in this case, a drive section and a control section for controlling the drive section are required, resulting in an increase in the size of the processing apparatus.

Therefore, an object of the present invention is to easily switch the injection direction of machining water while suppressing an increase in the size of a machining device.

The water injection device of the present invention (the present water injection device) is a water injection device that injects water in one of at least two different directions selected from the two directions, and comprises: a straight water pipe connected to a water source and having an injection port at its tip; an air introduction pipe arranged at an angle from a direction parallel to the extension direction of the water pipe and having one end that joins the injection port and the other end that is open to the atmosphere; an opening/closing valve arranged in the air introduction pipe; and a control unit that controls the opening and closing of the opening/closing valve, wherein the injection port has a shape that increases in diameter toward the tip, and one end of the air introduction pipe is connected to the base end side of the injection port, and the control unit closes the opening/closing valve to inject water flowing through the water pipe from the injection port in a predetermined direction, or opens the opening/closing valve to introduce air from the air introduction pipe depending on the flow rate of the water flowing through the water pipe and cause the water and air to join at the injection port, thereby spraying the water from the injection port in a direction different from the predetermined direction.

The water injection device may include a plurality of air introduction pipes and a plurality of on-off valves arranged in each air introduction pipe, and the control unit closes all of the plurality of on-off valves. Alternatively, the direction in which the water is jetted from the jetting port may be switchable by selectively opening any one of the plurality of opening/closing valves.

In this water injection device, the control unit can switch the direction of water injected from the injection port by controlling the opening/closing state of the opening/closing valve disposed in the air introduction pipe. Therefore, the present water injection device does not require a drive unit or the like for switching the water injection direction, so it is possible to easily switch the water injection direction while suppressing the increase in size of the device.

FIG. 2 is a perspective view showing the configuration of a grinding device. It is an explanatory view showing the composition of a grinding water nozzle. FIG. 3 is an explanatory diagram showing a state in which the direction of water jetted from the grinding water nozzle shown in FIG. 2 is changed; FIG. 11 is an explanatory diagram showing the configuration of a grinding water nozzle according to another embodiment. FIG. 5 is an explanatory diagram showing the grinding water nozzle shown in FIG. 4 from the injection port side. FIG. 5 is an explanatory diagram showing how the direction of water jetted from the grinding water nozzle shown in FIG. 4 is changed; FIG. 5 is an explanatory diagram showing how the direction of water jetted from the grinding water nozzle shown in FIG. 4 is changed;

The grinding device 1 shown in FIG. 1 is an example of a processing device, and is a device for performing a grinding process on a wafer 100 as a workpiece. The wafer 100 shown in FIG. 1 is, for example, a circular semiconductor wafer.

On the surface 101 of the wafer 100, devices (not shown) are formed. The surface 101 faces downward in FIG. 1, and is protected by pasting a protective tape 103. The back surface 104 of the wafer 100 serves as a surface to be processed by grinding.

The grinding device 1 includes a base 10 extending in the Y-axis direction, and a column 15 erected on the +Y direction side on the base 10.

A rectangular opening extending in the X-axis direction is formed in the upper surface of the base 10. This opening is covered by a movable plate 11 and a bellows-shaped waterproof cover 12.

A chuck table 20 is provided on the moving plate 11. The chuck table 20 is a disk-shaped table for holding the wafer 100, and includes a holding surface 21 made of porous material. With the wafer 100 placed on the holding surface 21 , suction force exerted by a suction source (not shown) is transmitted to the holding surface 21 , so that the wafer 100 is suction-held by the holding surface 21 .

The waterproof cover 12 is connected to the movable plate 11 so that it can expand and contract freely. The chuck table 20 and the movable plate 11 move back and forth together in the Y-axis direction during grinding of the wafer 100 by a Y-axis movement means disposed inside the base 10. The waterproof cover 12 expands and contracts in accordance with the movement of the movable plate 11 in the Y-axis direction.

A thickness sensor 55 is attached to the upper surface of the base 10 near the chuck table 20. Thickness sensor 55 measures the thickness of wafer 100 held on holding surface 21 .

On the front side of the column 15 on the base 10, there is provided a grinding means 40 for grinding the wafer 100, and a grinding feed means 30 for moving the grinding means 40 in the Z-axis direction, which is the grinding feed direction.

The grinding feed means 30 includes a pair of guide rails 31 parallel to the Z-axis direction, a moving table 32 sliding on the guide rails 31, a ball screw 33 parallel to the guide rails 31, a motor 34, and a front surface of the moving table 32 ( A holder 35 is attached to the front surface). The holder 35 holds a grinding means 40.

The moving table 32 is slidably installed on the guide rail 31. A nut portion (not shown) is fixed to the rear side (back side) of the movable table 32. A ball screw 33 is screwed into this nut portion. The motor 34 is connected to one end of the ball screw 33.

In the grinding feed means 30, the motor 34 rotates the ball screw 33, so that the movable table 32 moves in the Z-axis direction along the guide rail 31. As a result, the holder 35 attached to the movable table 32 and the grinding means 40 held by the holder 35 also move in the Z-axis direction together with the movable table 32. In this way, the grinding feed means 30 grinds and feeds the grinding means 40 along the Z-axis direction.

The grinding means 40 includes a spindle housing 41 fixed to the holder 35, a spindle 42 rotatably held by the spindle housing 41, a motor 43 that rotationally drives the spindle 42, a wheel mount 44 attached to the lower end of the spindle 42, and , a grinding wheel 45 is detachably connected to the lower surface of the wheel mount 44.

The spindle housing 41 is held by the holder 35 so as to extend in the Z-axis direction. The spindle 42 extends in the Z-axis direction perpendicularly to the holding surface 21 of the chuck table 20, and is rotatably supported by the spindle housing 41.

The motor 43 is connected to the upper end of the spindle 42 . The motor 43 causes the spindle 42 to rotate about a rotation shaft extending in the Z-axis direction.

The wheel mount 44 is formed in a disk shape and is fixed to the lower end (tip) of the spindle 42, and rotates in response to the rotation of the spindle 42. The wheel mount 44 supports the grinding wheel 45.

The grinding wheel 45 is formed to have approximately the same diameter as the wheel mount 44. The grinding wheel 45 includes an annular wheel base (annular base) 46 made of a metal material such as stainless steel. A plurality of grinding wheels 47, each having an approximately rectangular parallelepiped shape, are arranged and fixed in an annular shape around the entire circumference of the underside of the wheel base 46. The grinding wheels 47 rotate in accordance with the rotation of the spindle 42, thereby grinding the back surface 104 of the wafer 100 held on the chuck table 20. The grinding wheels 47 are an example of a processing tool.

The grinding device 1 also includes a control unit 50 that controls each component of the grinding device 1. The control unit 50 includes a CPU that performs arithmetic processing according to a control program, a storage medium such as a memory, and the like. The control unit 50 controls each component of the grinding apparatus 1 described above to perform processing desired by the operator on the wafer 100.

Furthermore, a grinding water nozzle 60 is attached to the end of the moving plate 11 on the +X side and +Y side.
Some of the grinding water nozzles 60 supply grinding water from the outer peripheral side of the chuck table 20 to the back surface 104, which is the surface to be ground, of the wafer 100 held on the holding surface 21 during the grinding process.

In this embodiment, when grinding the back surface 104 of the wafer 100 held on the holding surface 21, the grinding is performed at an arc-shaped portion of the lower surface of the rotating grinding wheel 47 that contacts the back surface 104. Then, on the back surface 104, an arcuate locus 400 corresponding to this arcuate portion is generated. The grinding water nozzle 60 is configured to make the grinding water land, for example, at a first water landing point 401 that is the center of an arc-shaped trajectory 400 or a second water landing point 402 that is a point at one end of this trajectory 400. , supply grinding water.

For this purpose, the grinding water nozzle 60 is equipped with a straight water pipe 67 having an injection port 73 at its tip, as shown in FIGS. 1 and 2. In this embodiment, the water pipe 67 is provided in the center of the nozzle body 61 extending toward the holding surface 21 of the grinding water nozzle 60 so as to extend parallel to the nozzle body 61 . Further, the water pipe 67 is connected to a water source 69 via a water source valve 71.

Further, the grinding water nozzle 60 has an air introduction pipe 63. The air introduction pipe 63 is arranged at an angle from a direction parallel to the extending direction of the water pipe 67, and is introduced into the nozzle main body 61 from the side surface of the nozzle main body 61, and is introduced into the injection port 73 at the tip of the water pipe 67. connected.

That is, the air introduction pipe 63 has one end that joins the injection port 73 of the water pipe 67 and the other end that is opened to the atmosphere. An on-off valve 65 is arranged on the other end side of the air introduction pipe 63. Therefore, the air introduction pipe 63 can be opened to the atmosphere via the on-off valve 65. The opening/closing valve 65 and the water source valve 71 connected to the injection port 73 are controlled to open/close by the control unit 50 .

In this embodiment, as described above, during the grinding process, the back surface 104 of the wafer 100 held on the holding surface 21 of the chuck table 20 has an arc-shaped shape formed by the grinding wheel 47 as shown in FIG. A trajectory 400 results.
In this embodiment, the nozzle body 61 (that is, the water pipe 67) of the grinding water nozzle 60 is moved in a first direction 301 (see FIG. 2), which is the direction of the first water landing point 401 at the center of this trajectory 400, for example. facing. Further, a second water landing point 402, which is a point at one end of the trajectory 400, is located in a second direction 302 (see FIG. 3) that is different from the first direction 301. The first direction 301 is an example of a predetermined direction.

When the control unit 50 wants to cause the grinding water to land at the first water landing point 401 on the trajectory 400 based on the operator's instructions during the grinding process, the control unit 50 controls the water source as shown in FIG. While opening the valve 71, the opening/closing valve 65 disposed in the air introduction pipe 63 is closed. Thereby, the control unit 50 causes the water flowing through the water pipe 67 to be jetted from the jetting port 73 in the first direction 301 . As a result, the water jetted from the jetting port 73 lands on the first water landing point 401 .
In the drawings used in this embodiment, open valves are shown in white (white), while closed valves are shown in black (black).

On the other hand, when the control unit 50 wants to cause the grinding water to land on the second water landing point 402, which is the point at one end of the trajectory 400, as shown in FIG. Open valve 65. Thereby, the control unit 50 opens the other end of the air introduction pipe 63 to the atmosphere, and introduces air from the air introduction pipe 63 toward the injection port 73 according to the flow rate of the water flowing through the water pipe 67. Thereby, the control unit 50 merges the water from the water pipe 67 and the air from the air introduction pipe 63 at the injection port 73, thereby converting the water from the water pipe 67 injected from the injection port 73 into air. It is pushed by air from the introduction pipe 63 and is injected in a second direction 302 that is different from the first direction 301 . As a result, the water injected from the injection port 73 lands at the second water landing point 402 on the trajectory 400.

As described above, in this embodiment, the air introduction pipe 63, the on-off valve 65, the water pipe 67, and the control unit 50 are arranged in a direction selected from at least two different directions (the first direction 301 and the second direction 302). This constitutes a water injection device that injects water in one of two directions.

In the present embodiment, the control unit 50 controls the direction of the water injected from the injection port 73 in the first direction 301 or in the first direction 301 or By switching between the two directions 302, the grinding water can land on the first water landing point 401 or the second water landing point 402 on the trajectory 400. Therefore, in this embodiment, the water jet direction (that is, the position of the water landing point) can be changed without changing the direction of the grinding water nozzle 60. Therefore, this embodiment does not require a drive unit or the like to change the direction of the grinding water nozzle 60, so it is possible to easily switch the water jet direction while suppressing the increase in size of the device. .

In addition, in this embodiment, the grinding water nozzle 60 is configured to include one air introduction pipe 63. However, the present invention is not limited to this, and the grinding water nozzle 60 may be configured to include a plurality of air introduction pipes and a plurality of on-off valves arranged in each air introduction pipe.

For example, in the configuration shown in FIG. 4 and FIG. 5 showing the grinding water nozzle 60 shown in FIG. Instead of the valve 65, a first air introduction pipe 81 and a second air introduction pipe 85, a first opening/closing valve 83 arranged in the first air introduction pipe 81, and a second air introduction pipe 85 arranged in the second air introduction pipe 85 are used. An on-off valve 87 is provided.

The first air introduction pipe 81 and the first on-off valve 83 have the same configuration as the air introduction pipe 63 and the on-off valve 65 shown in FIG. 3, and are similarly arranged in the grinding water nozzle 60.

Like the first air introduction pipe 81, the second air introduction pipe 85 is arranged at an angle from the direction parallel to the extending direction of the water pipe 67, and is introduced into the nozzle main body 61 from the side surface of the nozzle main body 61. , is connected to the injection port 73 at the tip of the water pipe 67. That is, like the first air introduction pipe 81, the second air introduction pipe 85 has one end that joins the injection port 73 of the water pipe 67, and the other end that is opened to the atmosphere.

The second opening/closing valve 87 is arranged on the other end side of the second air introduction pipe 85. The second air introduction pipe 85 can be opened to the atmosphere via the second opening/closing valve 87. The first on-off valve 83 and the second on-off valve 87 are also controlled to open and close by the control unit 50, similarly to the on-off valve 65 and the like.

For example, the second air introduction pipe 85 is connected to the grinding water nozzle so as to be symmetrical with the first air introduction pipe 81 with respect to the water pipe 67, that is, to sandwich the water pipe 67 together with the first air introduction pipe 81. It is located at 60. Therefore, the first air introduction pipe 81 and the second air introduction pipe 85 are inclined to each other so as to merge with the injection port 73 of the water pipe 67 at one end.
Note that the second air introduction pipe 85 does not have to be arranged symmetrically with the first air introduction pipe 81 with respect to the water pipe 67.

In this configuration, when the control unit 50 wants to make the grinding water land on the first water landing point 401, as shown in FIG. 2. Close the on-off valve 87. Thereby, the control unit 50 causes the water flowing through the water pipe 67 to be jetted from the jetting port 73 in the first direction 301 . As a result, the water injected from the injection port 73 lands at the first water landing point 401 on the trajectory 400 .

On the other hand, when the control unit 50 attempts to land the grinding water at the second landing point 402, which is one end point of the trajectory 400 shown in FIG. 1, it opens the water source valve 71, opens the first opening/closing valve 83, and closes the second opening/closing valve 87, as shown in FIG. 6.

Thereby, the control unit 50 opens the other end of the first air introduction pipe 81 to the atmosphere and introduces air from the first air introduction pipe 81 toward the injection port 73 according to the flow rate of the water flowing through the water pipe 67. do. As a result, the water injected from the injection port 73 lands at the second water landing point 402 on the trajectory 400, similar to the case where the on-off valve 65 shown in FIG. 3 is opened.

Further, as shown in FIG. 7, when the control unit 50 wants to cause the grinding water to land on a third water landing point 403, which is another point on the trajectory 400, the control unit 50 opens the water source valve 71, and The first on-off valve 83 is closed and the second on-off valve 87 is opened. Thereby, the control unit 50 opens the other end of the second air introduction pipe 85 to the atmosphere, and introduces air from the second air introduction pipe 85 toward the injection port 73 . As a result, the water injected from the injection port 73 is pushed by the air from the second air introduction pipe 85 and is injected toward a third direction 303 that is different from the first direction 301 and the second direction 302, and is It lands on the water at the third water landing point 403 at 400.

Thus, in the configuration shown in Figures 4 to 7, the control unit 50 can close the first opening/closing valve 83 and the second opening/closing valve 87 to spray water flowing through the water piping 67 from the nozzle 73 in the first direction 301. The control unit 50 can also switch the direction of water spray from the nozzle 73 between the second direction 302 and the third direction 303 by selectively opening one of the multiple opening/closing valves 83 and 85. With this configuration, it is possible to spray water in three different directions and land the water on three different water landing points. This increases the degree of freedom regarding water spray and landing.

Note that the grinding water nozzle 60 may be provided with three or more air introduction pipes and an on-off valve for each air introduction pipe. In this case, the control unit 50 can switch the direction of water injection from the injection port 73 by closing all of the plurality of on-off valves or selectively opening any one of the plurality of on-off valves. It is.
That is, when the control unit 50 closes all of the plurality of on-off valves, water is injected from the injection port in the extending direction of the central pipe. When the control unit 50 selects and opens any one of the plurality of on-off valves, water is injected from the injection port in the extending direction of the air introduction pipe in which the opened on-off valve is disposed. .

Further, in this embodiment, for example, as shown in FIG. 3, by opening the on-off valve 65, the water from the water pipe 67 that is injected from the injection port 73 is pushed by the air from the air introduction pipe 63. It can be ejected in a second direction 302 that is different from the first direction. When the on-off valve 65 is closed in this state, in this embodiment, the water injection direction from the injection port 73 is maintained as the second direction 302. Therefore, the operator may close all the on-off valves except the water source valve 71 after setting the water injection direction to a desired direction.

1: grinding device, 10: base, 15: column,
20: chuck table, 21: holding surface,
30: grinding feed means, 40: grinding means, 47: grinding wheel,
50: control unit,
60: grinding water nozzle, 61: nozzle body,
63: air introduction pipe, 65: opening and closing valve,
67: water piping, 69: water source, 71: water source valve, 73: nozzle,
81: first air introduction pipe; 83: first opening/closing valve;
85: second air introduction pipe, 87: second opening/closing valve,
100: wafer, 101: front surface, 103: protective tape, 104: back surface,
301: first direction, 302: second direction, 303: third direction,
400: trajectory, 401: first landing point, 402: second landing point, 403: third landing point

Claims (2)

A water injection device that injects water in one direction selected from at least two directions that are different from each other,
A straight water pipe connected to a water source and having an injection port at its tip;
an air introduction pipe that is inclined from a direction parallel to the extending direction of the water pipe and has one end that joins the injection port and the other end that is opened to the atmosphere;
an on-off valve disposed on the air introduction pipe;
A control unit that controls opening and closing of the opening/closing valve,
The injection port has a shape in which the diameter increases toward the tip, and one end of the air introduction pipe is connected to the base end side of the injection port,
The control unit closes the on-off valve to inject the water flowing through the water pipe in a predetermined direction from the injection port, or opens the on-off valve to inject the air according to the flow rate of the water flowing through the water pipe. Injecting the water from the injection port in a direction different from the predetermined direction by introducing air from the introduction pipe and merging the water and the air at the injection port;
Water injection device. A plurality of air introduction pipes and a plurality of on-off valves respectively arranged on each air introduction pipe,
The control unit switches the injection direction of the water from the injection port by closing all of the plurality of on-off valves or selectively opening any one of the plurality of on-off valves. It is possible,
The water injection device according to claim 1.

Images