JP2009096087A - Dicing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dicing apparatus in which a waste material collected by a solid-liquid separating member can be easily discarded even during machining of a workpiece. <P>SOLUTION: A waste material recovering apparatus 80 is composed of a punching metal 82, a frame 84 for holding the punching metal 82, and an air cylinder device 90 that reciprocates the punching metal 82 through the frame 84 between an upper position of a liquid draining section 86 and an upper position of a waste material discarding section 88. The punching metal 82 is normally arranged below a liquid draining port 21 that is formed at a prescribed position of an oil pan 20. Liquid drainage collected in the oil pan 20 is drained through the punching metal 82 into the liquid draining section 86 installed below the liquid draining port 21. The waste material is collected by the punching metal 82 without passing through it, and the punching metal 82 is arranged from the upper position of the liquid draining section 86 to the upper position of the waste material discarding section 88. Thereby, the waste material is dropped into the waste material discarding section 88 and processed. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a dicing apparatus, and more particularly to a dicing apparatus that performs grooving or cutting on a workpiece such as a semiconductor or electronic component material.

  In a conventional dicing apparatus that performs grooving or cutting (hereinafter referred to as processing) on a workpiece such as a semiconductor or electronic component material, the workpiece placed on the work table is ground by a thin grindstone called a blade that rotates at high speed. Process with water. In this dicing apparatus, a spindle holding a thin grindstone performs index feed in the Y-axis direction and infeed feed in the Z-axis direction, and a work table on which a workpiece is placed is ground and fed in the X-axis direction. Has been. A microscope for observing the upper surface of the workpiece is fixed to a spindle holding a thin grindstone via a holder arm. Using this microscope, the upper surface of the workpiece is observed to align the workpiece or to evaluate the cut groove after processing. A CCD camera is connected to the microscope, and an image picked up by the CCD camera is subjected to image processing by a pattern matching means or the like to perform workpiece alignment (see Patent Document 1).

On the other hand, grinding water used for processing the workpiece and scrap scrap material of the workpiece generated by the processing (hereinafter referred to as “end material”) are collected in an oil pan provided below the work table. The cutting water and the scraps collected in the oil pan flow down toward the discharge port formed at a predetermined position of the oil pan. This discharge port is provided with a solid-liquid separation member such as a punching metal plate (perforated plate) that separates the milled material from the grinding water, so that the grinding water collected in the oil pan passes through the solid-liquid separation member Then, the end material discharged from the discharge port to the drainage part and collected in the oil pan is collected by the solid-liquid separation member. The mill ends collected by the solid-liquid separation member are collected irregularly by the operator and discarded in the mill scrap disposal section.
JP 2006-15509 A

  However, since the conventional dicing apparatus collects the end material collected by the solid-liquid separation member by an operator, it is difficult to collect the workpiece while the blade is rotating at a high speed. Even if it is clogged with mill ends, there is a problem that it is difficult to collect it immediately. When clogging occurs in the solid-liquid separation member, the grinding water overflows into the oil pan, and there is a risk that the end material in the grinding water will bite into the bellows to protect the moving means for moving the work table and damage the bellows. .

  The present invention has been made in view of such circumstances, and an object thereof is to provide a dicing apparatus capable of easily discarding the end material collected by the solid-liquid separation member even during the processing of the workpiece. .

  In order to achieve the object, the invention described in claim 1 is characterized in that a processing means for processing a work placed on a work table by a rotary blade, a liquid provided below the processing means and used for processing, and An oil pan that collects the end material of the workpiece, a drainage unit that drains the liquid collected in the oil pan, an end material disposal unit that discards the end material collected by the oil pan, and the oil pan A solid-liquid separation means for passing the liquid recovered by the step of collecting the end material, and a movement for moving the solid-liquid separation means between an upper position of the drainage section and an upper position of the end material disposal section And a dicing apparatus comprising the means.

  According to the first aspect of the present invention, before the solid-liquid separation means is clogged with the end material, the solid-liquid separation means is moved by the moving means from the upper position of the normal drainage section to the upper position of the end material disposal section. The scrap material collected by the solid-liquid separation means is discarded in the scrap material disposal section. Thereby, according to this invention, the end material collected by the solid-liquid separation member can be easily discarded even during the processing of the workpiece.

  A cylinder device is preferably used as the moving means. There is also a device that collects the end material by a rotating belt conveyor, but this collecting device has a complicated structure because it has rotating machine elements such as a belt conveyor and a motor. On the other hand, the cylinder device, that is, the mechanism for moving the solid-liquid separation member only by the expansion and contraction operation of the piston has a simple structure including a cylinder and a valve, and is economically advantageous because it does not require power.

  As the solid-liquid separation means, perforated plates such as punching metal, nets, filter paper, etc. can be applied. Are preferred.

  The moving means moves the solid-liquid separation means from the position above the drainage section to the position above the scrap disposal section, discards the scrap collected by the solid-liquid separation means to the scrap disposal section, and then immediately drains the liquid. The solid-liquid separation means is returned to a position above the section. It is preferable that the time during which the solid-liquid separating means stays at the upper position of the drainage part, that is, the recovery time of the end material is controlled based on the amount of the end material generated per unit time. In short, the recovery time may be shortened as the amount of scrap material increases. The time is shorter than the time during which clogging with the scrap occurs in the solid-liquid separation means, and is determined empirically.

  According to a second aspect of the present invention, in the first aspect, the solid-liquid separation unit is tilted by the tilting unit and collected by the solid-liquid separation unit when the solid-liquid separation unit is positioned above the end material disposal unit. It is characterized in that the material is dropped toward the scrap scrap disposal part.

  According to invention of Claim 2, when a solid-liquid separation means is located in the upper position of a scrap disposal part, it will be tilted by a tilting means. For example, if the solid-liquid separation means whose posture is in the horizontal direction is tilted in the vertical direction, the end material collected in the horizontal direction falls to the end material discarding section by its own weight. It can be easily disposed of in the material disposal section.

  According to a third aspect of the present invention, in the first or second aspect, the solid-liquid separation means is a perforated plate.

  According to the third aspect of the present invention, since the solid-liquid separation means is a porous plate, the end material and the liquid can be stably separated.

  According to the dicing apparatus according to the present invention, the solid-liquid separation means is moved from the upper position of the normal drainage section to the upper position of the scrap disposal section by the moving means before the solid-liquid separation means is clogged with the scrap. Since the end material collected by the solid-liquid separation means is discarded in the end material discarding section, the end material collected by the solid-liquid separation member can be easily discarded even during processing of the workpiece.

  A preferred embodiment of a dicing apparatus according to the present invention will be described in detail below with reference to the accompanying drawings.

  The dicing apparatus 1 according to the embodiment shown in FIG. 1 has a load port 2 for transferring a cassette storing a plurality of workpieces to and from an external device, a suction unit 3, and transports a workpiece W to each part of the device. Means 4, a pair of microscopes 5 and 5 for observing the upper surface of the work W, a processing part (processing means) 6, a spinner 7 for cleaning and drying the processed work W, a controller 8 for controlling the operation of each part of the apparatus, etc. It is composed of

  The processing unit 6 is provided with air bearing spindles (or spindles of mechanical bearing type) 10 and 10 with two built-in high-frequency motors arranged opposite to each other and having a rotating blade 9 attached thereto. 10 and 10 are rotated at a high speed, and index feed in the Y direction and cut feed in the Z direction are performed independently of each other.

  The blade 9 is surrounded by a flange cover (not shown) opened on the front side and the lower side, and grinding water is supplied from a grinding nozzle provided on the flange cover toward a processing point. The flange cover is provided with a cleaning nozzle (not shown), and cleaning water is supplied from the cleaning nozzle toward the processing point. The blade 9 is a thin disk-shaped grindstone, and an electrodeposition blade in which diamond abrasive grains or CBN abrasive grains are electrodeposited with nickel, or a resin blade bonded with resin is used. Further, the processing unit 6 is provided with two identical work tables 12 and 14 for sucking and placing the work W, which are moved in the X direction of FIG. 1 by the movement of the X tables 16 and 18 of FIG. It is comprised so that it may be ground and fed.

  FIG. 2 is a perspective view illustrating a main part of the processing unit 6 of the dicing apparatus 1.

  As shown in the figure, a box-shaped oil pan 20 is horizontally disposed below the work tables 12 and 14 of the processing unit 6. A pair of guide rails 22, 22 are arranged on the left side surface of the oil pan 20 along the arrow X direction in the figure, and a drive mechanism is provided between the guide rails 22, 22. A ball screw 24 is provided in parallel to the guide rails 22 and 22 and along the left side surface of the oil pan 20.

  In addition, a servo motor (which may be a linear motor) 26 that rotationally drives the ball screw 24 is disposed on the back side in the depth direction of the oil pan 20. Further, an X table 16 guided in the guide rails 22 and 22 and driven in the X direction by the rotation of the ball screw 24 by the servo motor 26 is arranged in the vertical direction. As shown in FIG. 3, the X table 16 is provided with a ball nut 28 screwed into the ball screw 24, and sliders 30 and 30 slidably engaged with the guide rails 22 and 22, and in the Z direction (see FIG. 1), and a work table 12 is attached to the θ table 32. The side surface of the rotation axis of the θ table 32 is fixed to the X table 16 so that the work table 12 rotates in the θ direction on a horizontal plane.

  Further, a pair of bellows 34 and 34 that are extended and contracted as the X table 16 moves in the X direction and covers the guide rails 22 and 22 and the ball screw 24 are disposed on the left side surface of the oil pan 20. One bellows 34 has one end fixed to the front side in the depth direction of the oil pan 20 and the other end fixed to the front side edge in the depth direction of the X table 16. The other bellows 34 has one end fixed to the depth side of the oil pan 20 and the other end fixed to the depth side edge of the X table 16. In FIG. 2, the other bellows 34 is omitted.

  On the other hand, as shown in FIG. 2, a pair of guide rails 36, 36 are also provided on the right side surface of the oil pan 20 along the direction of the arrow X in FIG. Also in the middle, a ball screw 38 constituting a driving mechanism is disposed in parallel with the guide rails 36 and 36 and along the right side surface of the oil pan 20.

  In addition, a servo motor 40 that rotationally drives the ball screw 38 is disposed on the back side in the depth direction of the oil pan 20. Further, an X table 18 guided by the guide rails 36 and 36 and driven in the X direction by the rotation of the ball screw 38 by the servo motor 40 is disposed. The X table 18 is provided with a ball nut (not shown) that is screwed with the ball screw 38, and a slider (not shown) that is slidably engaged with the guide rails 36, 36, and in the Z direction (see FIG. 1). ) Is mounted on the θ table 44, and the work table 14 is attached to the θ table 44. The side surface of the rotation axis of the θ table 44 is fixed to the X table 18 so that the work table 14 rotates in the θ direction on a horizontal plane.

  Furthermore, a pair of bellows 46 and 46 that are extended and contracted as the X table 18 moves in the X direction and covers the guide rails 36 and 36 and the ball screw 38 are disposed on the right side surface of the oil pan 20. One bellows 46 has one end fixed to the front side in the depth direction of the oil pan 20 and the other end fixed to the front side edge in the depth direction of the X table 18. One end of the other bellows 46 is fixed to the depth direction depth side of the oil pan 20, and the other end is fixed to the depth direction depth side edge of the X table 18. In FIG. 2, the other bellows 46 is omitted.

  As shown in FIGS. 4 and 5, a gate-shaped guide base 48 is erected on the processing portion 6. A spindle Y guide 50 is attached horizontally to the left side of the guide base 48 in FIG. 5 in the direction of the arrow Y in the figure, guided by the spindle Y guide 50, and indexed in the Y direction by a drive mechanism (not shown). Two spindle Y tables 52, 52 are provided. Each spindle Y table 52 is provided with a spindle Z table 54 which is cut and fed in the direction of arrow Z in the figure by a guide rail (not shown) and a driving mechanism. Each spindle Z table 54 is connected to a spindle via a holder 56. 10 is attached. The two spindles 10 and 10 are disposed so as to face each other, and a rotating blade 9 is attached to the tip of each spindle 10. By such a mechanism, the two rotary blades 9 and 9 are independently fed in the Z direction by cutting and in the Y direction by index feed. Further, the drive mechanism of the spindle Y tables 16 and 18 and the spindle Z table 54 may use a linear motor, or may use a servo motor and a lead screw.

  Two microscope driving means 58 and 60 are provided on the right side of the guide base 48 in FIG. These microscope driving means 58 and 60 are attached to the right side surface of the guide base 48 and are supported so as to be movable in the arrow Y direction along the microscope Y guides 62 and 62 disposed horizontally in the arrow Y direction in the figure. The Note that the microscope moving means 58 and 60 may be movably supported by another guide other than the microscope Y guides 62 and 62.

  The microscope driving means 58 and 60 include a microscope Y table 64 guided by the microscope Y guides 62 and 62, respectively. The microscope Y table 64 of the microscope driving means 58 is arranged in parallel with the microscope Y guides 62 and 62, the ball nud (not shown) is screwed onto the ball screw 70 of FIG. 4, and the servo that drives the ball screw 70 to rotate. It is moved in the Y direction by the rotational force of the motor 72. Similarly, the microscope Y table 64 of the microscope driving means 60 has a ball nud (not shown) screwed into a ball screw 74 arranged in parallel with the microscope Y guides 62, 62, and a servo motor that rotationally drives the ball screw 74. It is moved in the Y direction by the rotational force of 76. These ball screws 70 and 74 are provided over the work tables 12 and 14 as shown in FIG. 5, whereby the microscope driving means 58 and 60 are arranged above both the work tables 12 and 14. The position can be moved independently.

  On the other hand, each microscope Y table 64 is provided with a microscope Z table 66 that is sent in the direction of arrow Z in the figure, and the microscope 5 that observes the upper surface of the workpiece W is attached to each microscope Z table 66. Yes. The microscopes 5 and 5 are sent in the Y direction and Z direction in the figure by the microscope driving means 58 and 60 configured as described above, and both the microscopes 5 and 5 are mounted on the work tables 12 and 14, respectively. The workpiece W can be imaged.

  The microscope 5 incorporates a CCD camera (not shown). The image of the workpiece W picked up by the CCD camera is subjected to pattern patching by an image processing device provided in the controller 8 of FIG. Done. Control of the driving means of these parts, control of the alignment operation, control of the processing section 6, control of the transport means 4, etc. are all performed by the controller 8.

  Next, the operation of the dicing apparatus 1 configured as described above will be described.

  First, the cassette in which the workpiece W is stored is delivered to the load port 2 of the dicing apparatus 1 by the external conveyance means. In this cassette, a plurality of workpieces W attached to the frame via dicing tape are stored. Next, the workpieces W are pulled out from the cassette one by one by the conveying means 4 of the dicing apparatus 1 and are attracted to the workpiece table 12. Thereafter, the work table 12 moves below the microscope Y guide 62, and the two microscopes 5 and 5 are conveyed directly above the work W by the microscope Y table 64. Here, the two microscopes 5 and 5 are focused by the microscope Z table 66. Next, the pattern portion formed on the upper surface of the workpiece W is imaged by a CCD camera incorporated in the two microscopes 5 and 5, and is aligned using a known pattern matching technique. Note that the next workpiece W is placed on the workpiece table 14 when the workpiece is aligned.

  The aligned workpiece W is conveyed to the processing unit 6 by the work table 12. Here, the two rotary blades 10 and 10 are respectively cut and fed as necessary, and the two machining areas (streets) are simultaneously machined by the X-direction grinding feed of the work table 12. Next, the rotary blades 10 and 10 are indexed by a necessary pitch in the Y direction and positioned on the next street, and these two lines are also processed by the X direction grinding feed of the work table 12. This operation is repeated to process all streets in one direction of the workpiece W. When all the lines in one direction are processed, the workpiece W is rotated 90 degrees by the rotation of the θ table 32, and the street that is orthogonal to the previous street is processed.

  While the first workpiece W is being processed by the processing unit 6, the next workpiece W is moved under the microscope Y guide 62, and the two microscopes 5, 5 are directly above the workpiece W by the microscope Y table 64. It is conveyed to. Here again, the two microscopes 5 and 5 are focused by the microscope Z table 66, and the pattern portion formed on the upper surface of the next workpiece W is incorporated in the two microscopes 5 and 5. The image is captured by the camera and alignment is performed. When the processing of the first workpiece W is completed, the next workpiece W after the alignment is carried into the processing unit 6 and processed in the same manner. During processing by the blades 9 and 9, when alignment is performed by the two microscopes 5 and 5, the same street is imaged by the microscopes 5 and 5, and the accuracy of the camera axis of each microscope is confirmed, or calibration is performed. Can be reflected (accuracy check by temperature change or calibration value between cameras when two cameras are mounted).

  The first workpiece W that has been completely processed is evaluated by measuring the shape of the processing groove and the chipping state under the two microscopes 5 and 5 as necessary. When the evaluation of the machining groove is completed, the workpiece W is transferred to the spinner 7 by the transfer means 4, where spin cleaning and spin drying are performed. The workpiece W that has been cleaned and dried is again stored in the original cassette by the conveying means 4. Similarly, the next workpiece W is processed, washed, and dried, and stored in the original cassette. The above operations are repeated one after another to process all the workpieces W in the cassette. The above is the flow when the workpiece W is processed by the dicing apparatus according to the present invention. During the alignment of the workpiece W by the microscopes 5 and 5, the wear amount of the blade 9 can be confirmed or the blade 9 can be replaced.

  6 and 7 are perspective views of the end material recovery apparatus 80 provided in the processing unit 6 of the dicing apparatus 1. The end material recovery device 80 is disposed below the oil pan 20 shown in FIG. 2, and drains (liquid used for processing (grinding water, washing water)) generated in the processing unit 6 to end the workpiece W. A device that separates and collects materials.

  As shown in FIG. 6, the scrap material collecting device 80 has a rectangular punching metal 82 that is a solid-liquid separating means, a frame 84 that holds the punching metal 82, and the punching metal 82 through the frame 84. It is composed of an air cylinder device (moving means) 90 that reciprocates between an upper position and an upper position of the scrap disposal unit 88.

  As shown in FIG. 2, the punching metal 82 is normally disposed below the drain port 21 formed at a predetermined position of the oil pan 20. The normal time is when the workpiece W is processed. A drainage portion 86 shown in FIG. 6 is disposed below the drainage port 21. In addition, the oil pan 20 around the drain port 21 in FIG. 2 is formed with an inclined surface 20A toward the drain port 21, whereby the drained liquid and the end material collected in the oil pan 20 are oil pans. 20 flows down along the inclined surface 20 </ b> A, flows toward the drainage port 21, and is collected by the punching metal 82 disposed below the drainage port 21. At this time, the drainage fluid passes through the hole of the punching metal 82 and is drained to the drainage portion 86 of FIG. 6 installed below the drainage port 21. On the other hand, the end material is collected by the punching metal 82 without passing through the punching metal 82.

  The end material collected by the punching metal 82 extends from the piston 91 of the air cylinder device 90, and the frame 84 connected to the tip of the piston 91 is pushed outward from the drainage portion. It is arranged from a position above the drainage part 86 to a position above the scrap disposal part 88. By this operation, the punching metal 82 is detached from the support plate (not shown) that holds the posture of the punching metal 82 in a horizontal state, so that the punching metal 82 is tilted by its own weight as shown in FIG. As a result, the scraps 94, 94... Collected by the punching metal 82 fall into the scrap disposal unit 88 and are processed.

  Further, when the piston 91 contracts from this state, the punching metal 82 is pulled by the piston 91 through the frame 84 and rides on the support plate, so that the drainage port 21 is changed while the posture of the punching metal 82 is changed to the horizontal state. Is positioned as shown in FIG. Thereby, the separate collection of the drainage liquid and the mill ends continues. The support plate is a pair of metal plates provided so as to sandwich the drainage port 21 above the drainage portion 86, and a surface of the support plate is lubricated to increase the slipperiness with the punching metal 82. Is applied or coated.

  In the embodiment, the punched metal 82 is tilted and the collected end material is discarded in the end material discarding unit 88, but the present invention is not limited to this. For example, when the punching metal 82 is moved to the end material discarding part 88 side, a mechanism that discards the end material collected by the punching metal 82 to the end material discarding part 88 is used. What is necessary is just to provide in the scrap material disposal part 88. FIG. Further, the punching metal 96 shown in FIG. 6 and FIG. 7 is located at the lower side of the drainage port 21 when the punching metal 82 is tilted as shown in FIG. Means. The end material collected by the punching metal 96 is collected and removed by the operator while the dicing apparatus 1 is not in operation.

  By the way, the operation of the air cylinder device 90 is controlled by the control unit 98 so as to move the punching metal 82 from the position above the drainage part 86 to the position above the end material discarding part 88. That is, the control unit 98 discards the end materials 94, 94... Collected by the punching metal 82 in the end material discarding unit 88 and immediately returns the punching metal 82 to a position above the drainage unit 86. The opening / closing operation | movement of the valve | bulb (not shown) of the apparatus 90 is controlled. Further, the control unit 98 controls the time during which the punching metal 82 stays above the drainage unit 86, that is, the recovery time of the end material 94 based on the amount of the end material 94 generated per unit time. . In short, the collection time is controlled to be shortened as the amount of the scrap 94 generated increases. Thereby, clogging of the punching metal 82 by the end material 94 is prevented.

  On the other hand, in the embodiment, since the punching metal 82 is applied as the solid-liquid separation means, the end material 94 and the liquid can be stably separated, and the end material 94 collected by the punching metal 82 can be The material processing unit 88 can be disposed of smoothly.

The perspective view which shows the external appearance of the dicing apparatus which concerns on embodiment of this invention The perspective view which showed the structure of the process part of the dicing apparatus shown in FIG. Sectional drawing which showed the principal part structure of the process part shown in FIG. The perspective view of the process part shown in FIG. Plan view of the processing section shown in FIG. The perspective view which the punching metal of a scrap recovery device is in the upper position of a drainage part The perspective view which the punching metal of a scrap recovery device is in the upper position of scrap scrap disposal

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Dicing apparatus, 5 ... Microscope, 9 ... Rotary blade, 10 ... Spindle, 12, 14 ... Work table, 16, 18 ... X table, 20 ... Oil pan, 22 ... Guide rail, 24 ... Ball screw, 26 ... Servo Motor, 28 ... Ball nut, 30 ... Slider, 32 ... θ table, 34 ... Bellow, 36 ... Guide rail, 38 ... Ball screw, 40 ... Servo motor, 44 ... θ table, 46 ... Bellow, 48 ... Guide base, 50 ... Spindle Y guide, 52 ... Spindle Y table, 54 ... Spindle Z table, 56 ... Holder, 58, 60 ... Microscope drive means, 62 ... Microscope Y guide, 64 ... Microscope Y table, 66 ... Microscope Z table, 70, 74 ... Ball screw, 72, 76 ... Servo motor, 80 ... End material recovery device. 82 ... Punching metal, 84 ... Frame, 86 ... Drainage part, 88 ... End material discarding part, 90 ... Air cylinder device, 92 ... Hinge, 94 ... End material, 96 ... Punching metal, 98 ... Control part

Claims (3)

Processing means for processing the work placed on the work table with a rotary blade;
An oil pan that is provided below the processing means and collects the liquid used for processing and the end material of the workpiece;
A drainage section for draining the liquid collected in the oil pan;
A scrap disposal unit for discarding scrap collected by the oil pan;
Solid-liquid separation means for passing the liquid collected by the oil pan and collecting the mill ends; and
Moving means for moving the solid-liquid separation means between an upper position of the drainage part and an upper position of the scrap material disposal part;
A dicing apparatus comprising:   The solid-liquid separation unit is tilted by a tilting unit when the solid-liquid separation unit is positioned above the end material disposal unit, and the end material collected by the solid-liquid separation unit is dropped toward the end material disposal unit. 2. The dicing apparatus according to 1.   The dicing apparatus according to claim 1, wherein the solid-liquid separation unit is a perforated plate.

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