JP2023114174A - Table device - Google Patents

Abstract

To provide a table device capable of tilting a table with a simple structure.SOLUTION: A table device includes: a first vertical drive device which may drive a first connection member in a vertical direction; a second vertical drive device which may drive a second connection member in the vertical direction; a third vertical drive device which may drive a third connection member in the vertical direction; and a table supported by the first vertical drive device, the second vertical drive device, and the third vertical drive device and extends in a horizontal direction orthogonal to the vertical direction. The first connection member, the second connection member, and the third connection member are connected to a lower surface of the table. Rigidity in a horizontal direction of the first connection member is larger than rigidities in the horizontal direction of the second connection member and the third connection member.SELECTED DRAWING: Figure 6

Description

The present invention relates to a table device.

In a transport device, a table device with a movable table is used, for example as disclosed in US Pat.

JP 2012-51054 A

The table device disclosed in Patent Document 1 has a positioning table that converts horizontal driving to vertical driving by a wedge method. The table on the upper surface is supported by a spherical bearing and a linear motion bearing, and these bearings are combined to achieve tilting of the table and to accurately position an object. In addition, this table device suppresses deformation of the table due to concentrated stress acting on the support points when the table is tilted.

However, in the above-described configuration, since the rigidity of the bearing portion is connected and supported by the series spring, there is a problem that not only the rigidity is lowered, but also the manufacturing cost is increased.

SUMMARY OF THE INVENTION The present invention provides a table device capable of tilting a table with a simple configuration.

The above objects of the present invention are achieved by the following configurations.
(1) a first vertical driving device capable of driving the first connecting member in a vertical direction;
a second vertical driving device capable of driving the second connecting member in a vertical direction;
a third vertical driving device capable of driving the third connecting member in a vertical direction;
a table supported by the first vertical drive, the second vertical drive, and the third vertical drive and extending in a horizontal direction orthogonal to the vertical direction;
A table apparatus comprising:
the first connection member, the second connection member, and the third connection member are connected to the lower surface of the table;
the rigidity of the first connection member in the horizontal direction is greater than the rigidity of the second connection member and the third connection member in the horizontal direction;
table device.
(2) when the amounts of displacement in the vertical direction of the first connection member, the second connection member, and the third connection member are the same, the table is maintained in a horizontal state;
When the amounts of displacement in the vertical direction of the first connection member, the second connection member, and the third connection member are different, the second connection member and the third connection member are deformed so as to bend, and the table is tilting from the horizontal direction;
The table device according to (1).
(3) each of the first vertical drive, the second vertical drive, and the third vertical drive,
a first member movable in the first horizontal direction;
a second member supporting the first connecting member, the second connecting member or the third connecting member and movable in the vertical direction;
positioned between the first member and the second member to guide the second member such that movement of the first member in the first direction causes movement of the second member in the vertical direction; a guide device for
The table device according to (1) or (2).
(4) In (3), the second vertical drive device, the first vertical drive device, and the third vertical drive device are arranged in this order along a second direction orthogonal to the first direction in the horizontal direction. Table device as described.
(5) The table apparatus according to (4), wherein the first vertical drive is arranged opposite to the second vertical drive and the third vertical drive in the first direction.
(6) each of the first connection member, the second connection member, and the third connection member is configured by a columnar pin;
The table device according to any one of (1) to (5).
(7) the outer diameter of the first connecting member is larger than the outer diameters of the second connecting member and the third connecting member;
The table device according to (6).

ADVANTAGE OF THE INVENTION According to this invention, the table apparatus which can implement|achieve the inclination of a table by simple structure can be provided.

FIG. 1 is a top view of a table device according to an embodiment of the present invention as seen from the Z-axis direction. FIG. 2 is a top view showing the table of the table device of FIG. 1 with a two-dot chain line. FIG. 3 is a side view of the table device of FIG. 1 as seen from the Y-axis direction. FIG. 4 is a side view of the table device of FIG. 1 as seen from the X-axis direction. 5 is a side view of the table device of FIG. 1 as seen from the X-axis direction opposite to that of FIG. 4. FIG. FIG. 6 is a side view of the table device of FIG. 1 viewed from the Y-axis direction with the table tilted.

Embodiments of the present invention will be described below with reference to the drawings, but the present invention is not limited thereto. The requirements of each embodiment described below can be combined as appropriate. Also, some components may not be used. In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each part will be described with reference to this XYZ orthogonal coordinate system. One direction in the horizontal direction is the X-axis direction, the direction perpendicular to the X-axis direction in the horizontal direction is the Y-axis direction, and the vertical direction (that is, vertical direction) perpendicular to each of the X-axis direction and the Y-axis direction is the Z-axis direction. . The X-axis is orthogonal to the YZ plane. The Y-axis is orthogonal to the XZ plane. The Z axis is orthogonal to the XY plane (horizontal direction).

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of a table device according to the present invention will be described in detail based on the drawings. FIG. 1 is a top view of a table device 100 according to an embodiment of the present invention as seen from the Z-axis direction. FIG. 2 is a top view showing the table 3 of the table device 100 of FIG. 1 with a chain double-dashed line. FIG. 3 is a side view of the table device 100 of FIG. 1 as seen from the Y direction. FIG. 4 is a side view of the table device 100 of FIG. 1 as seen from the X direction. FIG. 5 is a side view of the table device 100 of FIG. 1 viewed from the X-axis direction opposite to that of FIG.

The table device 100 has a plate-like base member 8 on the bottom surface. The base member 8 is arranged, for example, on the floor of a facility (for example, a factory) where the table device 100 is installed.

The table device 100 includes a first vertical drive device 10A, a second vertical drive device 10B, and a third vertical drive device 10C, which are installed on the upper surface of the base member 8, respectively. The table device 100 further includes a table 3 that is supported by the first vertical drive device 10A, the second vertical drive device 10B, and the third vertical drive device 10C and extends in the horizontal direction (XY-axis directions).

The table 3 has an upper surface 3A and a lower surface 3B, which are opposite surfaces in the Z direction. The upper surface 3A and the lower surface 3B are flat surfaces extending in the horizontal direction, and as shown in FIG. 1, are circular when viewed from the Z direction. An object to be transported by the table device 100 is arranged on the upper surface 3A. Such objects include, for example, semiconductor wafers, flat panels, etc., and are not particularly limited in type. The table device 100 conveys objects for manufacturing, processing, inspecting, etc. such objects.

The first vertical drive device 10A has a first connection member 22A configured by a columnar pin. The second vertical drive device 10B has a second connection member 22B configured by a columnar pin. The third vertical drive device 10C has a third connecting member 22C configured by a columnar pin. The first vertical drive device 10A, the second vertical drive device 10B, and the third vertical drive device 10C can vertically drive the first connection member 22A, the second connection member 22B, and the third connection member 22C, respectively. be. A driving method will be described later.

By connecting the first connecting member 22A, the second connecting member 22B, and the third connecting member 22C to different locations on the lower surface 3B of the table 3, the table 3 can be configured to have the first vertical drive device 10A and the second vertical drive device 10A. It is supported by a vertical drive 10B and a third vertical drive 10C. Therefore, when the first vertical drive device 10A, the second vertical drive device 10B, and the third vertical drive device 10C drive the first connection member 22A, the second connection member 22B, and the third connection member 22C in the vertical direction, The table 3 can be driven vertically.

Next, configurations of the first vertical drive device 10A, the second vertical drive device 10B, and the third vertical drive device 10C will be described. In particular, FIG. 3 shows the entire side surface of the third vertical drive device 10C in the Y-axis direction, so the following description will focus on the third vertical drive device 10C. However, the first vertical drive device 10A, the second vertical drive device 10B, and the third vertical drive device 10C are equivalent except for the first connection member 22A, the second connection member 22B, and the third connection member 22C. The following description is common to the three vertical drives.

The third vertical drive device 10</b>C includes a first member 1 , a second member 2 and a first guide device (guide device) 4 . The first member 1 is movable in a first direction, which is the X-axis direction. The second member 2 is movable in a second direction, which is the Z-axis direction (vertical direction), and is movable relative to the first member 1 .

The second member 2 of the third vertical drive device 10C supports the third connection member 22C upward in the Z-axis direction. Similarly, the second member 2 of the first vertical drive device 10A supports the first connecting member 22A upward in the Z-axis direction, and the second member 2 of the second vertical drive device 10B supports upward in the Z-axis direction. It supports the second connection member 22B.

The first guide device 4 is arranged between the first member 1 and the second member 2, and is arranged so that the movement of the first member 1 in the X-axis direction causes the second member 2 to move in the Z-axis direction. It guides the second member 2 .

The table 3 is supported by three second members 2 . In this embodiment, the connection plate 21 is arranged on the upper surface of each second member 2, and the first to third connection members 22A, 22B, 22C are arranged on the upper surface of the connection plate 21. As shown in FIG. Therefore, each second member 2 supports the table 3 via the connection plate 21 and the first to third connection members 22A, 22B, 22C. The second member 2, the connection plate 21, and the first to third connection members 22A, 22B, 22C are fixed to each other. Note that the connection plate 21 can be omitted.

Each of the first member 1 and the second member 2 moves in the space below the table 3 (space on the -Z side). Each of the first member 1 and the second member 2 moves in the space above the base member 8 (space on the +Z side).

The first member 1 is movable within the XY plane (horizontal plane). In this embodiment, the first member 1 is movable in the X-axis direction (first direction). The outer shape of the first member 1 in the XZ plane is substantially triangular (wedge-shaped). As shown in FIG. 3, the first member 1 has a lower surface 1B parallel to the XY plane, a slope 1G inclined with respect to the XY plane, and side surfaces 1S parallel to the Z axis. The slope 1G and the side surface 1S are arranged above (+Z side) the lower surface 1B. The slope 1G is inclined upward (+Z direction) toward the +X direction. The bottom end of the slope 1G and the −X side end of the bottom surface 1B are connected. The upper end of the slope 1G and the upper end of the side surface 1S are connected. The lower end of the side surface 1S and the +X side end of the lower surface 1B are connected.

The second member 2 is movably supported by the first member 1 . The first member 1 and the second member 2 are relatively movable. The second member 2 moves relative to the first member 1 above the first member 1 (on the +Z side).

The second member 2 is movable at least in the Z-axis direction (vertical direction). In this embodiment, the movement of the first member 1 in the X-axis direction causes the second member 2 to move in the Z-axis direction. The outer shape of the second member 2 in the XZ plane is substantially triangular (wedge-shaped). As shown in FIG. 3, the second member 2 has an upper surface 2A parallel to the XY plane, a slope 2G inclined with respect to the XY plane, and side surfaces 2S parallel to the Z axis. The upper surface 2A is arranged above (+Z side) the side surface 2S and the slope 2G. The slope 2G is inclined upward (+Z direction) toward the +X direction. In this embodiment, the slope 1G and the slope 2G are parallel and face each other with a gap therebetween. The upper end of the slope 2G and the +X side end of the upper surface 2A are connected. A lower end portion of the slope 2G and a lower end portion of the side surface 2S are connected. The upper end of the side surface 2S and the −X side end of the upper surface 2A are connected.

The first guide device 4 guides the second member 2 so that the movement of the first member 1 in the X-axis direction causes the second member 2 to move in the Z-axis direction. In this embodiment, the first guide device 4 includes a rail 41 arranged on the first member 1 and a slider 42 arranged on the second member 2 and movable on the rail 41 . The rail 41 is arranged on the slope 1</b>G of the first member 1 . The slider 42 is arranged on the slope 2G of the second member 2 .

In this embodiment, two sliders 42 are arranged on the slope 2G of the second member 2 . One slider 42 may be arranged on the second member 2, or three or more sliders 42 may be arranged.

As will be described later, the first vertical drive device 10A is arranged in the opposite direction to the second vertical drive device 10B and the third vertical drive device 10C in the X-axis direction. Therefore, the shape and arrangement of the first member 1, the second member 2, and the first guide device 4 in the second and third vertical drive devices 10B and 10C are as described above, but the first vertical drive device 10A The shape and arrangement of the first member 1, the second member 2, and the first guide device 4 in the above description are reversed in the X direction.

The first to third vertical drive devices 10A, 10B, 10C further include a second guide device (guide device) 5. As shown in FIG. The second guide device 5 cooperates with the first guide device 4 to guide the second member 2 so that the movement of the first member 1 in the X-axis direction causes the second member 2 to move in the Z-axis direction. . At least part of the second guide device 5 is arranged on the second member 2 . In this embodiment, the second guide device 5 includes a rail 51 arranged on the wall member 15 standing from the base member 8 and a slider 52 arranged on the second member 2 and movable on the rail 51 . The slider 52 is arranged on the side surface 2S of the second member 2 .

The second member 2 is guided by the first guide device 4 and the second guide device 5 so as to move in the Z-axis direction as the first member 1 moves in the X-axis direction. In the second and third vertical drive devices 10B and 10C, when the first member 1 moves in the -X direction, the second member 2 moves (rises) in the +Z direction, and when the first member 1 moves in the +X direction, , the second member 2 moves (lowers) in the -Z direction. In the first vertical drive device 10A, when the first member 1 moves in the +X direction, the second member 2 moves (rises) in the +Z direction, and when the first member 1 moves in the -X direction, the second member 2 moves (falls) in the -Z direction.

The table 3 is supported by the second member 2 . Therefore, the table 3 is also moved (lifted) together with the second member 2 by the movement (lifting) of the second member 2 in the Z-axis direction. That is, when the second member 2 moves (rises) in the +Z direction, the table 3 moves (rises) in the +Z direction together with the second member 2 . When the second member 2 moves (lowers) in the -Z direction, the table 3 moves (lowers) together with the second member 2 in the -Z direction.

In addition, in the first guide device 4 , the slider 42 may be arranged on the slope 1</b>G of the first member 1 and the rail 41 may be arranged on the slope 2</b>G of the second member 2 . Moreover, in the second guide device 5 , the rail 51 may be arranged on the side surface 2</b>S of the second member 2 and the slider 52 may be arranged on the wall member 15 .

The outer shape of the first member 1 is substantially triangular (wedge-shaped). The outer shape of the second member 2 is also substantially triangular (wedge-shaped). That is, in this embodiment, the table device 100 includes a so-called wedge-shaped lifting device. The first member 1 may also be called a wedge member (first wedge member) 1 . The second member 2 may also be referred to as a wedge member (second wedge member) 2 .

The first to third vertical drives 10A, 10B, 10C further include an actuator 7 that drives the first member 1 in the X-axis direction. The actuator 7 can move the first member 1 within the XY plane. Actuator 7 generates power for moving first member 1 . The actuator 7 generates power to move the first member 1 within the XY plane. In this embodiment, the actuation of the actuator 7 causes the first member 1 to move in the X-axis direction. Actuator 7 includes a rotary motor and is operated by supplied electric power. As shown in FIGS. 2 and 3 , actuator 7 and first member 1 are connected via power transmission device 11 . Power (driving force) of the actuator 7 is transmitted to the first member 1 via the power transmission device 11 .

In this embodiment, the power transmission device 11 converts the rotary motion of the actuator 7 into linear motion. In this embodiment, the shaft of the actuator (rotary motor) 7 rotates, and the power transmission device 11 converts this rotary motion into linear motion in the X-axis direction and transmits it to the first member 1 . The first member 1 moves in the X-axis direction by power (driving force) of the actuator 7 transmitted via the power transmission device 11 .

In this embodiment, the power transmission device 11 includes a ball screw 11B. The ball screw 11B includes a screw shaft rotated by the operation of the actuator 7, a nut connected to the first member 1 and arranged around the screw shaft, and balls arranged between the screw shaft and the nut. include. A screw shaft of the ball screw 11B is rotatably supported by a support bearing 12 . In this embodiment, when the ball screw 11B rotates, the nut and the first member 1 to which the nut is connected move (linearly move) in the X-axis direction.

When the actuator (rotary motor) 7 rotates the screw shaft of the ball screw 11B in one direction, the rotation of the screw shaft moves the first member 1 in the +X direction. When the actuator (rotary motor) 7 rotates the screw shaft of the ball screw 11B in the opposite direction, the rotation of the screw shaft causes the first member 1 to move in the -X direction. That is, the moving direction of the first member 1 in the X-axis direction (one of the +X direction and the −X direction) is determined based on the rotation direction of the actuator 7 (the rotation direction of the screw shaft of the ball screw 11B). be. Based on the moving direction of the first member 1, the moving direction of the second member 2 (table 3) in relation to the Z-axis direction (one of the -Z direction and the +Z direction) is determined.

The first to third vertical drive devices 10A, 10B, 10C further have a third guide device (guide device) 9 that guides the first member 1. As shown in FIG. The third guide device 9 guides the first member 1 in the X-axis direction. The third guide device 9 guides the first member 1 so that the first member 1 moves in the X-axis direction when the actuator 7 is operated. At least part of the third guide device 9 is arranged on the base member 8 . In this embodiment, the third guide device 9 includes a rail 91 arranged on the base member 8 and a slider 92 arranged on the first member 1 and movable on the rail 91 . The rail 91 is arranged on the upper surface of the base member 8 . The slider 92 is arranged on the bottom surface 1B of the first member 1 .

In addition, in the third guide device 9 , the slider 92 may be arranged on the upper surface of the base member 8 and the rail 91 may be arranged on the lower surface 1B of the first member 1 .

Each of the first guide device 4, the second guide device 5, and the third guide device 9 includes a direct-acting bearing. In this embodiment, each of the first guide device 4, the second guide device 5, and the third guide device 9 includes a rolling bearing. A rolling bearing has rolling elements. Rolling elements include one or both of balls and rollers. That is, rolling bearings include one or both of ball bearings and roller bearings. In this embodiment, each of the first guide device 4, the second guide device 5 and the third guide device 9 includes a linear ball bearing.

In addition, in this embodiment, the first guide device 4 is assumed to include a rolling bearing having rolling elements. The first guide device 4 may include a direct-acting slide bearing that does not have rolling elements, or may include a direct-acting gas bearing. Note that the first guide device 4 may not have a slider. For example, the slope 2G of the second member 2 may be moved along a rail provided on the first member 1 so that the second member 2 moves in the Z-axis direction. In this case, the rail provided on the first member 1 functions as a guide device that guides the second member 2 . Similarly, the second guide device 5 and the third guide device 9 may include direct-acting slide bearings, or may include direct-acting gas bearings. Note that the second guide device 5 and the third guide device 9 may not have sliders.

Next, the arrangement form of the first vertical drive device 10A, the second vertical drive device 10B, and the third vertical drive device 10C, and the first connection member 22A, the second connection member 22B, and the third connection member 22C will be described. As shown in FIGS. 1, 2, 4, and 5, the table device 100 extends along the second direction, which is the Y-axis direction orthogonal to the X-axis direction, in the XY plane (horizontal plane). It has three vertical drives arranged in the order of drive 10B, first vertical drive 10A, and third vertical drive 10C (-Y-axis direction). That is, the table apparatus 100 is a triple vertical drive having three vertical drives.

Also, the first vertical drive device 10A is arranged in the opposite direction to the second and third vertical drive devices 10B and 10C in the X-axis direction. That is, in the first vertical drive device 10A, the actuator 7 is arranged at the -X-axis direction end, whereas in the second vertical drive device 10B and the third vertical drive device 10C, the +X-axis direction end is arranged. An actuator 7 is arranged. The second member 2, the connection plate 21, and the first connection member 22A of the first vertical drive device 10A are arranged so as to be adjacent to the actuators 7 of the second and third vertical drive devices 10B and 10C in the Y-axis direction. It is Also, in FIG. 3, the second vertical drive device 10B is arranged so as to exactly overlap the third vertical drive device 10C on the far side (+Y-axis direction) of the third vertical drive device 10C.

With this arrangement, the first connection member 22A of the first vertical drive device 10A, the second connection member 22B of the second vertical drive device 10B, and the third connection member 22C of the third vertical drive device 10C are arranged in the XY plane. are arranged at positions different from each other. Also, the second connection member 22B of the second vertical drive device 10B and the third connection member 22C of the third vertical drive device 10C are arranged at the same position in the X-axis direction. That is, as shown in FIG. 1, the first connecting member 22A is arranged at the coordinate I on the X axis, while the second connecting member 22B and the third connecting member 22C are arranged at the coordinate II on the X axis. is placed in the position of

In this embodiment, each of the first connecting member 22A, the second connecting member 22B, and the third connecting member 22C is configured by a columnar pin. More specifically, the columnar pin is a columnar pin having a circular cross section when viewed in the Z-axis direction, and has an outer diameter in a plane parallel to the XY plane. As shown in FIG. 2, the outer diameter of the first connecting member 22A is D1, and the outer diameters of the second connecting member 22B and the third connecting member 22C are D2.

The outer diameter D1 of the first connecting member 22A is larger than the outer diameter D2 of the second connecting member 22B and the third connecting member 22C (outer diameter D1>outer diameter D2). That is, the first connecting member 22A is composed of a thick pin, and the second connecting member 22B and the third connecting member 22C are composed of thin pins.

The first vertical drive device 10A, the second vertical drive device 10B, and the third vertical drive device 10C can independently drive the first connection member 22A, the second connection member 22B, and the third connection member 22C, respectively. . If all of the first connecting member 22A, the second connecting member 22B, and the third connecting member 22C rise by the same amount from the state of FIG. 3, the table 3 rises while maintaining a horizontal state. After the table 3 is lifted, if all of the first connecting member 22A, the second connecting member 22B, and the third connecting member 22C are lowered by the same amount, the table 3 is lowered while maintaining a horizontal state. That is, when the amount of displacement in the Z direction (the amount of elevation and the amount of descent) of the first connection member 22A, the second connection member 22B, and the third connection member 22C is the same, the table 3 moves in the Z direction while maintaining the horizontal state. Displace (rise, descend). In this manner, the table device 100 can transport an object placed on the table 3 . In this case, the object placed on the table 3 naturally maintains a horizontal state.

By the way, the table device 100 may need to be manufactured, processed, inspected, etc., in a state in which the object placed on the table 3 is tilted. In such a case, the amount of displacement in the Z direction of at least one connection member among the first connection member 22A, the second connection member 22B, and the third connection member 22C is the amount of displacement in the Z direction of the other connection members. , the table device 100 can tilt the table 3 and the object placed on the table 3 . The first vertical drive device 10A, the second vertical drive device 10B, and the third vertical drive device 10C can independently drive the first connection member 22A, the second connection member 22B, and the third connection member 22C, respectively. Therefore, such an operation is possible.

FIG. 6 is a side view of the table device 100 of FIG. 1 viewed from the Y-axis direction with the table 3 tilted. This state is a state in which only the first vertical drive device 10A drives the first connection member 22A upward in the Z-axis direction (vertical direction) from the state of FIG. That is, the actuator 7 of the first vertical drive device 10A rotates the screw shaft of the ball screw 11B in one direction, and the first member 1 of the first vertical drive device 10A moves in the +X direction. As the first member 1 of the first vertical drive 10A moves in the +X direction, the second member 2 of the first vertical drive 10A rises in the +Z direction. As the second member 2 rises in the Z-axis direction, the connection plate 21 and the first connection member 22A of the first vertical drive device 10A rise, and the side of the table 3 connected to the first connection member 22A also rises.

In FIG. 6, the first vertical drive 10A and the second vertical drive 10B are not driven, so the second connecting member 22B and the third connecting member 22C have not moved from the state of FIG. Of course, the side of the table 3 connected to the second connecting member 22B and the third connecting member 22C also does not move. As a result, the table 3 is tilted along the X-axis direction as indicated by the two-dot chain line. granted to.

Here, in the present embodiment, as described above, the outer diameter D1 of the first connecting member 22A is set to be larger than the outer diameter D2 of the second connecting member 22B and the third connecting member 22C ( Outer diameter D1>Outer diameter D2). This means that the rigidity of the first connection member 22A in the horizontal direction (XY-axis direction) is greater than the rigidity of the second connection member 22B and the third connection member 22C in the XY-axis direction.

When the stress associated with the inclination of the table 3 is applied to the first connecting member 22A, the second connecting member 22B, and the third connecting member 22C, the second connecting member 22B and the third connecting member 22C bend slightly. This bending occurs depending on the difference between the horizontal rigidity of the first connecting member 22A and the horizontal rigidity of the second connecting member 22B and the third connecting member 22C. In addition, in FIG. 6, the deformation of the third connecting member 22C is drawn in an exaggerated manner.

When the second connecting member 22B and the third connecting member 22C deform so as to bend, the second connecting member 22B and the third connecting member 22C absorb the stress caused by the inclination of the table 3 . As a result, the table 3 can be smoothly tilted, and the tilted state can be stably maintained. This makes it possible to prevent adverse effects such as deformation of the table 3 and unexpected movement (deformation) of the table 3 within the XY plane. In addition, the tilting drive of the table 3 can be realized with a simple configuration, and it is also possible to reduce the cost.

In addition to the tilting of the table 3, the vertical movement of the table 3 while maintaining the horizontal state also independently adjusts the elevation amounts of the first connection member 22A, the second connection member 22B, and the third connection member 22C. By doing so, it is possible to maintain a horizontal state on the order of sub-μm and to perform precise transportation with high reproducibility. The moving distance of the table 3 in the Z-axis direction caused by the inclination of the table 3 shown in FIG. 6 is about several μm to several tens of μm in an actual apparatus.

As described above, in the present embodiment, the rigidity in at least the horizontal direction (XY-axis directions) of the first connection member 22A is greater than the rigidity in the horizontal direction of the second connection member 22B and the third connection member 22C. That is, a difference in rigidity is provided between the first connecting member 22A and the second connecting member 22B and the third connecting member 22C along the tilting direction of the table 3 . Furthermore, in the present embodiment, each of the first connection member 22A, the second connection member 22B, and the third connection member 22C is a columnar pin having a circular cross section, and is oriented 360 degrees in the XY plane along the cross section. has a symmetrical shape. Therefore, the horizontal rigidity of the first connecting member 22A is greater than the horizontal rigidity of the second connecting member 22B and the third connecting member 22C. This allows the second connection member 22B and the third connection member 22C to deform and bend more smoothly.

In the above-described embodiment, the horizontal rigidity of the first connection member 22A is increased by making the outer diameter of the first connection member 22A different from the outer diameters of the second connection member 22B and the third connection member 22C. , the horizontal rigidity of the second connecting member 22B and the third connecting member 22C. However, such a difference in stiffness can be produced not only by the difference in outer diameter of the connecting members, but also by other methods. For example, a difference in stiffness may be produced by using different materials for the first connecting member 22A and the second connecting member 22B and the third connecting member 22C. Moreover, a difference in rigidity may be produced by making the shape of the first connection member 22A different from the shape of the second connection member 22B and the third connection member 22C. In this way, it is sufficient that at least the horizontal rigidity of the first connecting member 22A and the horizontal rigidity of the second connecting member 22B and the third connecting member 22C are different. The form of the third connection member 22C is not particularly limited.

Also, in the above-described embodiment, the number of vertical drive devices and connection members is three, but it is possible to further increase the number of vertical drive devices and connection members.

It should be noted that the present invention is not limited to the above-described embodiments, and can be modified, improved, etc. as appropriate. In addition, the material, shape, size, numerical value, form, number, location, etc. of each component in the above-described embodiment are arbitrary and not limited as long as the present invention can be achieved.

1 First member 1B Lower surface 1G Slope 1S Side 2 Second member 2A Upper surface 2G Slope 2S Side 21 Connection plate 22A First connection member 22B Second connection member 22C Third connection member 3 Table 3A Upper surface 3B Lower surface 4 First guide device ( guide device)
41 Rail 42 Slider 5 Second Guide Device 51 Rail 52 Slider 7 Actuator 8 Base Member 9 Third Guide Device 91 Rail 92 Slider 10A First Vertical Drive Device 10B Second Vertical Drive Device 10C Third Vertical Drive Device 11 Power Transmission Device 11B Ball screw 12 Support bearing 15 Wall member 100 Table device

Claims (7)

a first vertical driving device capable of driving the first connecting member in a vertical direction;
a second vertical driving device capable of driving the second connecting member in a vertical direction;
a third vertical driving device capable of driving the third connecting member in a vertical direction;
a table supported by the first vertical drive, the second vertical drive, and the third vertical drive and extending in a horizontal direction orthogonal to the vertical direction;
A table apparatus comprising:
the first connection member, the second connection member, and the third connection member are connected to the lower surface of the table;
the rigidity of the first connection member in the horizontal direction is greater than the rigidity of the second connection member and the third connection member in the horizontal direction;
table device. When the displacement amounts in the vertical direction of the first connection member, the second connection member, and the third connection member are the same, the table is maintained in a horizontal state,
When the amounts of displacement in the vertical direction of the first connection member, the second connection member, and the third connection member are different, the second connection member and the third connection member are deformed so as to bend, and the table is tilting from the horizontal direction;
The table device according to claim 1. each of the first vertical drive, the second vertical drive, and the third vertical drive,
a first member movable in the first horizontal direction;
a second member supporting the first connecting member, the second connecting member or the third connecting member and movable in the vertical direction;
positioned between the first member and the second member to guide the second member such that movement of the first member in the first direction causes movement of the second member in the vertical direction; a guide device for
The table device according to claim 1 or 2, comprising: 4. The table according to claim 3, wherein the second vertical drive unit, the first vertical drive unit, and the third vertical drive unit are arranged in this order along a second direction orthogonal to the first direction in the horizontal direction. Device. 5. The table apparatus of claim 4, wherein the first vertical drive is arranged oppositely to the second vertical drive and the third vertical drive in the first direction. Each of the first connection member, the second connection member, and the third connection member is configured by a columnar pin,
The table device according to any one of claims 1 to 5. The outer diameter of the first connecting member is larger than the outer diameters of the second connecting member and the third connecting member,
7. The table device according to claim 6.

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