JP6828493B2 - Light irradiation device and light irradiation method - Google Patents

Description

The present invention relates to a light irradiation device and a light irradiation method. More specifically, the present invention relates to a light irradiation device and a light irradiation method capable of hermetically sealing a processing space with a sealing member while uniformly forming a gap between a window member and a stage.

Conventionally, for example, optical ashing treatment of resist in the manufacturing process of semiconductors and liquid crystal panels, removal treatment of resist adhering to the pattern surface of a template in a nanoimprinting apparatus, dry cleaning treatment of glass substrate and silicon wafer for liquid crystal, printed circuit board. As a light treatment apparatus and a light treatment method used for removing smears (desmear) in a manufacturing process, a light treatment apparatus and a light treatment method using ultraviolet rays are known. In particular, devices and methods using active species such as ozone and oxygen radicals generated by vacuum ultraviolet rays radiated from excimer lamps and the like can be preferably used because they can perform a predetermined treatment more efficiently and in a short time. Has been done.

For example, Patent Document 1 proposes a method of irradiating a substrate with vacuum ultraviolet rays as a desmear treatment of a via hole, and proposes irradiating a substrate on which a via hole is formed with vacuum ultraviolet rays in an atmosphere containing oxygen. .. When oxygen is irradiated with vacuum ultraviolet rays, active species such as ozone and oxygen radicals are generated. Smear binds to these active species and is removed as carbon dioxide and water vapor. Then, carbon dioxide and water vapor become exhaust gas and are exhausted to the outside of the treatment room.

The processing chamber in which the object to be processed such as a substrate is arranged and the light source portion that emits vacuum ultraviolet rays are separated by a transparent window member. The distance between the window member and the object to be processed is set to a narrow space such as 1 mm or less, and the processing chamber airtightly seals the space between the window member and the stage on which the object to be processed is placed by a sealing member. It is a stopped processing space.

JP-A-2016-189394

In the conventional light irradiation device, the processing space between the window member and the stage is airtightly sealed by interposing a sealing member between the peripheral edge of the upper surface of the stage on which the object to be processed is placed and the window member. doing. Since this processing space is opened each time the object to be processed is carried in and out, an elastic member such as a rubber member is used as the seal member.
By the way, the above-mentioned processing space is required to accurately form an extremely minute gap between the window and the stage. However, in the above-mentioned conventional device configuration, the window member is pushed up by the repulsive force of the seal member when the seal member is pressed against the window member, and the gap between the window member and the stage (object to be processed) becomes non-uniform. There's a problem. Since the ultraviolet rays from the light source are absorbed by the processing gas in the processing space, if the gap between the window member and the object to be processed is non-uniform, the amount of ultraviolet rays reaching the object to be processed is non-uniform depending on the location of the work W. As a result, non-uniformity occurs in the processing.
Therefore, it is an object of the present invention to hermetically seal the processing space with a sealing member while uniformly forming a gap between the window member and the stage.

In order to solve the above problems, one aspect of the light irradiation device according to the present invention includes a light source unit that irradiates light through a window member, a stage that is arranged to face the window member and on which an object to be processed is placed, and the above. The space between the support member that supports the peripheral edge of the window member and the window member and the stage, and the processing space in which the object to be processed placed on the stage is processed by the light is airtight. A sealing member for sealing is provided, and the sealing member is an expansion seal formed in a hollow cross section and whose cross section expands by injecting a fluid into the hollow, and is between the support member and the outer peripheral side surface of the stage. Arranged, the window member and the stage are expanded in a second direction perpendicular to the first direction facing each other to press the outer peripheral side surface of the stage, and the processing space is airtightly sealed.
In this way, since the seal member is not pressed against the window member but is pressed against the side surface of the stage, it is possible to prevent the window member from being pushed up by the repulsive force of the seal member as in the conventional device, and the window member and the stage. It is possible to prevent the gap with and from becoming non-uniform. Further, since the seal member composed of the expansion seal is expanded in the direction perpendicular to the direction in which the window member and the stage face each other, the outer peripheral side surface of the stage can be pressed vertically by the seal member. Therefore, when the seal member is pressed against the outer peripheral side surface of the stage, it is possible to prevent the stage from tilting due to the pressing force of the seal member. Therefore, uniform processing can be applied to the entire surface of the object to be processed.

Further, the above-mentioned light irradiation device may further include an expansion direction regulating unit that regulates the expansion direction of the seal member in the second direction. In this case, the seal member can be pressed accurately and perpendicularly to the outer peripheral side surface of the stage, and the stage can be more appropriately prevented from tilting when the seal member is in close contact with the stage.

Further, in the above-mentioned light irradiation device, at least three fluid pressure cylinders that support a surface of the stage opposite to the surface facing the window member and expand and contract in the first direction, and the fluid pressure cylinder. A cylinder unit having a pressure control mechanism capable of individually adjusting the set pressures of the above may be further provided. By supporting the stage by the cylinder unit in this way, the stage can be displaced when the parallelism between the stage and the window member is deviated due to the assembly accuracy of the device, the accuracy of parts, etc., or when the seal member is in close contact with the stage. Even when tilting, it is possible to correct the deviation of the parallelism between the stage and the window member and keep the gap uniform.

Furthermore, in the light irradiation device, the stage is sandwiched between the stage moving mechanism capable of moving the stage in the first direction and the window member and the surface of the object to be processed, and the window member and the fluid are covered. Further provided with a spacer that keeps a distance from the surface of the object to be processed, the pressure control mechanism brings the set pressure of the fluid pressure cylinder to the stage moving mechanism so that the stage approaches the window member in the first direction. The fluid pressure cylinder may be adjusted to a set pressure that contracts when the object to be processed abuts on the spacer by moving in the direction.
In this case, even if the parallelism between the stage and the window member is deviated due to the assembly accuracy of the device, the accuracy of the parts, etc., the stage is brought close to the window member and the object to be processed is brought into contact with the spacer. At that time, the deviation of the parallelism can be corrected. Therefore, the gap between the window member and the stage can be made uniform.

In the above-described light irradiation device is formed in the distal end portion of the front Symbol fluid pressure cylinder, which is arranged at a position corresponding to the side edge of at least three of the stage, the projection body having a curved-edge A V-groove body formed on the opposite surface of the stage and engaging with each of the protrusions is further provided, and the V-groove bodies are arranged so that their central axes intersect at one point. You may be. As a result, even when thermal expansion (or contraction) occurs due to a temperature change of the stage or the cylinder unit, the stage can be appropriately supported by the cylinder unit.

Further, one aspect of the light irradiation device according to the present invention includes a light source unit that irradiates light through a window member, a stage that is arranged to face the window member and mounts an object to be processed, and the window member and the stage. The space between the seal member that airtightly seals the processing space in which the object to be processed placed on the stage is processed by the light and the surface of the stage facing the window member A cylinder unit that supports a surface on the opposite side is provided, and the cylinder unit includes at least three fluid pressure cylinders that can expand and contract in the first direction in which the window member and the stage face each other, and the fluid pressure cylinder. It is equipped with a pressure control mechanism that can individually adjust the set pressure.
As a result, the processing space can be hermetically sealed by the sealing member while uniformly forming the gap between the window member and the stage. Therefore, uniform processing can be applied to the entire surface of the object to be processed.

Further, one aspect of the light irradiation method according to the present invention is arranged between a support member that supports the peripheral edge of the window member and an outer peripheral side surface of a stage that is arranged to face the window member and on which an object to be processed is placed. The expanded seal, which is formed in a hollow cross section and whose cross section expands by injecting fluid into the hollow, is expanded in a second direction perpendicular to the first direction in which the window member and the stage face each other. A processing space that presses the outer peripheral side surface of the stage and is a space between the window member and the stage, in which the object to be processed placed on the stage is processed by light emitted through the window member. The step of airtightly sealing and the step of irradiating the object to be processed with the light through the window member are included.
As a result, the processing space can be hermetically sealed by the sealing member while uniformly forming the gap between the window member and the stage. Therefore, uniform processing can be applied to the entire surface of the object to be processed.

Further, one aspect of the light irradiation method according to the present invention is a space between a window member and a stage which is arranged to face the window member and on which an object to be processed is placed, and is placed on the stage. A step of airtightly sealing a processing space in which the object to be processed is processed by light emitted through the window member by a sealing member, and at least a process of expanding and contracting in the first direction in which the window member and the stage face each other. The step includes adjusting the set pressures of the three fluid pressure cylinders and supporting the surface of the stage opposite to the surface facing the window member by the fluid pressure cylinders.
As a result, the processing space can be hermetically sealed by the sealing member while uniformly forming the gap between the window member and the stage. Therefore, uniform processing can be applied to the entire surface of the object to be processed.

According to the present invention, the processing space can be hermetically sealed by the sealing member while uniformly forming the gap between the window member and the stage.

It is a schematic block diagram which shows the light irradiation apparatus of this embodiment. It is a perspective view which shows the state at the time of stage descent. It is a perspective view which shows the state when the stage rises. It is sectional drawing for demonstrating the expansion direction regulation part. It is a figure which shows the structure of a cylinder unit. This is an example of a pneumatic circuit. It is a figure which shows the V-groove support structure. It is a figure which shows the operation when there is an initial parallelism deviation between a window member and a work. It is a figure which shows the operation when it is tilted by pushing down the seal member.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic configuration diagram showing a light irradiation device of the present embodiment. In this embodiment, as an example of the light irradiation device, for example, an application example to a desmear processing device will be described.
(Configuration of light irradiation device)
The light irradiation device 100 includes a light source unit 10 and a processing unit 20 that holds a substrate (work) W, which is an example of an object to be processed. The light source unit 10 houses a plurality of ultraviolet light sources 11 that emit light such as vacuum ultraviolet rays, and irradiates the work W held by the processing unit 20 with the light from the ultraviolet light sources 11.

The light source unit 10 includes a box-shaped casing 14 having an opening at the bottom. A window member 12 that transmits light, such as quartz glass, is airtightly provided in the opening of the casing 14 via a window frame member (support member) 16.
The inside of the light source unit 10 (casing 14) is maintained in an inert gas atmosphere by supplying an inert gas such as nitrogen gas from the supply port 15. Further, a reflector 13 is provided above the ultraviolet light source 11 in the light source unit 10. The reflector 13 reflects the light emitted from the ultraviolet light source 11 toward the window member 12. With such a configuration, the light of the ultraviolet light source 11 is almost evenly applied to the region R substantially corresponding to the entire width of the reflector 13.

The ultraviolet light source 11 emits ultraviolet rays (vacuum ultraviolet rays) having a wavelength of 220 nm or less, preferably 190 nm or less, and various known lamps can be used. Here, the wavelength of 220 nm is set because it is difficult for the desmear processing apparatus to decompose and remove smear caused by an organic substance such as a resin when the wavelength of ultraviolet rays exceeds 220 nm.
As the ultraviolet light source 11, for example, a xenon excimer lamp (peak wavelength 172 nm) or a low-pressure mercury lamp (185 nm emission line) filled with xenon gas can be used. Among them, for example, a xenon excimer lamp is suitable for the desmear treatment.

The window frame member 16 sandwiches a portion that becomes the outer shell of the window member 12 in the vertical direction. An outer peripheral groove 16a is formed on the surface of the window frame member 16 facing the lower surface of the window member 12, and an elastic member such as an O-ring 16b is interposed between the outer peripheral groove 16a and the lower surface of the window member 12. ing. That is, the window frame member 16 is fixed so as to elastically sandwich the window member 12 via the O-ring 16b. Since the O-ring 16b sandwiches and fixes the outer shell of the window member 12 and does not move, the shape of the window member 12 is not warped. Further, the O-ring 16b can be replaced with another member if it has a function of fixing the window member 12.

The processing unit 20 includes a stage 21 that adsorbs and holds the work W to be subjected to the ultraviolet irradiation treatment (desmear treatment) on the surface. The stage 21 is arranged so as to face the window member 12 of the light source unit 10. The stage 21 is provided with, for example, a suction hole (not shown) for sucking the work W. The stage 21 is made of, for example, an aluminum material in order to ensure flatness.

A mounting groove 16c for mounting the seal member 17 is formed on the surface of the window frame member 16 facing the outer peripheral surface (side surface) of the stage 21. The seal member 17 is an annular member having a hollow cross section arranged along the side surface of the stage 21, and the cross section expands to the inner peripheral side of the seal member 17 by injecting a fluid such as gas or liquid into the hollow. An expansion seal whose cross section contracts due to the discharge of fluid.
In this embodiment, a case where air is used as the fluid will be described. That is, it is assumed that the seal member 17 is an air expansion seal that expands by injecting air and contracts by discharging air.

The mounting groove 16c has a shape in which the opening is formed in the second direction perpendicular to the first direction (Z direction) in which the window member 12 and the stage 21 face each other, and the expansion direction of the seal member 17 is in the Z direction. It is regulated so that it is perpendicular to the direction. Here, the window frame member 16 is set in a shape (thickness) around the mounting groove 16c so that the shape of the mounting groove 16c is not deformed by the expansion pressure of the sealing member 17 when the sealing member 17 expands. That is, the mounting groove 16c functions as an expansion direction regulating portion that regulates the expansion direction of the seal member 17.
The inner peripheral surface of the seal member 17 is in contact with the side surface of the stage 21 in the expanded state, and the inner peripheral surface thereof is separated from the side surface of the stage 21 in the contracted state. FIG. 1 shows an expanded state of the seal member 17. In this way, the seal member 17 is in close contact with the side surface of the stage 21 in the expanded state, so that the processing space between the window member 12 and the stage 21 is airtightly sealed.
That is, the shape of the seal member 17 has nothing to do with the gap between the window member 12 and the stage 21 in the Z direction, and the direction of expansion and pressing is also the direction perpendicular to the Z direction. Therefore, the window member 12 and the stage There is no action that affects the gap in the Z direction with 21. Therefore, the sealing member 17 can airtightly seal the processing space while accurately and uniformly forming a gap in the Z direction between the window member 12 and the stage 21.

On the stage 21, a processing area R1 in which the work W is placed and the work W can be subjected to ultraviolet irradiation treatment (desmear treatment), and a processing in the processing area R1 in which the work W is prohibited from being placed. A preparation area R2 for performing preparation is formed.
The processing space between the window member 12 and the stage 21 has an atmosphere of a processing gas containing ozone, and the work W placed in the processing region R1 on the stage 21 is vacuumed in the atmosphere of the processing gas. It is designed to be treated by being exposed to ultraviolet rays.

The stage 21 is supported by an actuator 51 that can move the stage 21 in a direction (Z direction) that approaches and dissociates from the window member 12. The drive of the actuator 51 is controlled by the control unit 52. The actuator 51 moves the stage 21 in the vertical direction as shown in FIGS. 2 and 3. Here, FIGS. 2 and 3 are perspective views of a portion of the light irradiation device 100 shown in FIG. 1 below the window member 12, where FIG. 2 shows the stage 21 descending and FIG. 3 shows the stage 21 rising. It shows the state of time.
It is assumed that the seal member 17 maintains the contracted state while the stage 21 is moved up and down, and a gap is formed between the inner peripheral surface of the seal member 17 and the side surface of the stage 21. With such a configuration, when the stage 21 moves up and down, the seal member 17 can be prevented from being rubbed while being pressed against the side surface of the stage 21, and damage to the seal member 17 can be prevented.
Further, in the present embodiment, in order to more appropriately secure the parallelism between the window member 21 and the stage 21, the stage 21 is supported by the cylinder unit 53. The cylinder unit 53 is installed between the stage 21 and the actuator 52. The configuration of the cylinder unit 53 will be described later.

Further, an air supply path 24 for supplying the processing gas to the processing space is formed on one side edge of the stage 21 (on the right side in FIG. 1). A supply device 41 for supplying processing gas is connected to the air supply passage 24.
Further, an exhaust passage 25 for discharging the exhaust gas after the desmear treatment to the outside of the stage 21 is formed on the other side edge portion of the stage 21 (left side in FIG. 1). An ejector 42 is attached to the exhaust passage 25. The ejector 42 uses a fluid to create a decompressed state, and for example, a flow of compressed air generated by the compressor 45 can be used. When the ejector 42 is attached to the exhaust passage 25, the processing gas (processing gas) in the processing unit 20 is forcibly discharged. The pipe connecting the exhaust passage 25 and the ejector 42 is provided with a cock 46 that is opened and closed by a motor drive to adjust the opening degree of the pipe. The opening degree of the cock 46 is controlled by the control unit 52.

Here, as the processing gas, for example, oxygen gas, a mixed gas of oxygen and ozone or steam, or a gas obtained by mixing these gases with an inert gas or the like can be used. While the substrate W is irradiated with ultraviolet rays from the light source unit 10, the processing gas is supplied to the processing space from the air supply port 24a formed on the upper surface of the stage 21 through the air supply path 24, and is also supplied to the processing space. Exhaust gas is discharged to the outside of the stage 21 as exhaust gas from the exhaust port 25a formed on the upper surface of the 21 through the exhaust passage 25.
As shown in FIG. 2, the air supply port 24a and the exhaust port 25a are formed in a row along the horizontal direction (Y direction) orthogonal to the direction in which the processing gas flows (X direction). As a result, the processing gas flows through the processing space between the window member 12 and the work W from the right to the left in FIG. As described above, the light irradiation device 100 in the present embodiment includes a gas supply / discharge unit that allows the processing gas to flow along the surface of the work W to form a flow path for the processing gas.

In the preparation region R2 in the treatment space, for example, the treatment gas, which is oxygen gas, is irradiated with ultraviolet rays from the light source unit 10, and active species such as ozone and oxygen radicals are generated. Since there is no work W (that is, no smear) in the preparation region R2, the active species generated in this preparation region R2 are gradually concentrated while being pushed downstream by the newly supplied processing gas. It rises and stabilizes.
That is, the processing gas is a gas supplied to the preparation region R2 in order to keep the ozone concentration of the processing gas, which is the atmosphere of the processing space, constant (for example, 3%), and ozone is generated by irradiation with ultraviolet rays. Can be gas. It can be said that the preparation region R2 is a region that plays a role of stabilizing the concentration of the active species by irradiating the treatment gas with ultraviolet rays. The processing gas may be ozone itself.

The light irradiation device 100 may be provided with a barrier gas supply unit for barriering the seal member 17 with a gas containing no ozone so that the seal member 17 does not come into contact with ozone. As shown in FIG. 4, for example, the barrier gas supply unit may be configured to include the barrier gas supply path 16d provided in the window frame member 16. Here, the barrier gas supply path 16d is formed at a position facing the side surface of the stage 21 along at least a part of the seal member 17 in the vicinity of the seal member 17 and above the seal member 17. To be equipped.
In this case, the barrier gas supply unit is below the mounting surface of the work W on the side surface of the stage 21 in a state where the stage 21 is raised to the processing position of the ultraviolet irradiation treatment shown by the broken line in FIG. The barrier gas can be ejected above the contact position of the expanded seal member 17 shown by the broken line with the stage 21.

Here, the processing position is a position where the Y-direction end portion on the upper surface of the work W abuts on the lower surface of the minute streak protrusion 12a formed on the lower surface of the window member 12. The thickness of the streak protrusion 12a in the Z direction is equal to the set interval between the window member 12 and the work W during the ultraviolet irradiation treatment, and is, for example, 1 mm or less. At least two streaky protrusions 12a are formed so as to abut on both ends of the work W in the Y direction. However, the number of streak protrusions 12a is not limited to two, and may be three or more. Further, the length of the streak protrusion 12a in the X direction may be equal to the length of the work W in the X direction or slightly longer than the length of the work W in the X direction. The streak protrusion 12a is a spacer that is sandwiched between the window member 12 and the surface of the work W to maintain a distance between the window member 12 and the surface of the work W.

As described above, in the light irradiation device 100 of the present embodiment, the expansion seal is applied as the seal member 17, and the seal member 17 is pressed perpendicularly to the side surface of the stage 21 to form the window member 12 and the stage 21. The processing space between them was airtightly sealed.
Conventionally, in a light irradiation device such as a desmear processing device, an outer peripheral groove is formed on the outer peripheral portion of the upper surface of the stage on which the work W is placed, and a sealing member such as an O-ring is interposed between the outer peripheral groove and the window member. Therefore, the processing space between the window member and the stage was hermetically sealed. However, in the above-mentioned configuration of the conventional device, the window member is pushed up by the repulsive force of the seal member when the seal member is pressed against the window member, and the gap between the window member and the stage (work W) becomes non-uniform. There's a problem. Since the ultraviolet rays from the light source are absorbed by the processing gas in the processing space, if the gap between the window member and the work W is non-uniform, the amount of ultraviolet rays reaching the work W becomes non-uniform depending on the location of the work W. As a result, the processing becomes non-uniform.

On the other hand, in the present embodiment, the seal member 17 is not pressed against the window member 12, but is pressed against the side surface of the stage 21. As a result, it is possible to prevent the window member 12 from being pushed up by the repulsive force of the seal member 17, and to prevent the gap between the work W and the window member 12 from becoming non-uniform. Therefore, it is possible to prevent uneven processing due to non-uniformity of the gap.
Further, the window member 12 is a thin member in consideration of the transmittance of the emitted light, and for example, the thickness is 1/100 or less with respect to the length of one side. Therefore, if only the peripheral edge portion of the window member 12 is supported by the window frame member 16, the window member 12 tends to bend downward in a convex manner. Therefore, in the present embodiment, as shown in FIG. 4, a streak protrusion 12a is provided on the lower surface of the window member 12, and the streak protrusion 12a abuts on the work W to provide an appropriate distance between the work W and the window member 12. It is designed to keep. As a result, the distance between the work W and the window member 12 can be appropriately defined, and the ultraviolet irradiation treatment for the work W can be appropriately performed.

Further, in the present embodiment, the seal member 17 is expanded in a direction perpendicular to the facing direction (Z direction) between the window member 12 and the stage 21, and the window member 12 and the stage 21 are placed on the side surface of the stage 21. It is configured to be pressed perpendicular to the opposite direction.
For example, when the axis of the seal member 17 is tilted with respect to the axis in the Z direction, when the seal member 17 is expanded to the inner peripheral side, the seal member 17 is pressed diagonally against the side surface of the stage 21. become. Then, the stage 21 may tilt in the direction in which the axis of the seal member 17 is tilted. When the stage 21 is tilted, the parallelism between the window member 12 and the stage 21 is deviated, and the gap between the window member 12 and the stage 21 becomes non-uniform.
On the other hand, in the present embodiment, as described above, the seal member 17 is pressed perpendicularly to the side surface of the stage 21, so that the stage when the seal member 17 is pressed against the side surface of the stage 21. The movement of 21 can be prevented. As a result, it is possible to prevent the gap between the work W and the window member 12 from becoming non-uniform.

Further, the seal member 17 is attached to the mounting groove 16c, which is the expansion direction regulating portion, so that the expansion direction is regulated so as to be perpendicular to the Z direction. Specifically, when the seal member 17 is mounted in the mounting groove 16c, its upper and lower surfaces (surfaces facing the Z direction) and outer peripheral surfaces (surfaces opposite to the side facing the side surface of the stage 21). Is in contact with the inner surface of the mounting groove 16c. As a result, the seal member 17 can be configured to be expandable only on the inner peripheral side thereof. Therefore, the seal member 17 can be pressed accurately and perpendicularly to the side surface of the stage 21.

Further, the mounting groove 16c has a structure that is not deformed by the expansion pressure of the seal member 17. If the mounting groove 16c is deformed, for example, the opening of the mounting groove 16c is widened by the expansion pressure of the sealing member 17, the sealing member 17 cannot expand in the direction perpendicular to the Z direction, and the side surface of the stage 21 is vertical. Cannot be pressed. In that case, when the seal member 17 comes into close contact with the side surface of the stage 21, the stage 21 is pushed down, and the parallelism between the window member 21 and the stage 21 may be lost. By making the mounting groove 16c not deformed by the expansion pressure of the seal member 17, it is possible to avoid pushing down the stage 21 by the seal member 17 and prevent the gap between the work W and the window member 12 from becoming uneven. be able to.

As shown in FIG. 4, the mounting groove 16c to which the seal member 17 is attached can also be formed by attaching the expansion direction regulating member 16f to the window frame member 16. Here, the expansion direction regulating member 16f is composed of an annular main body portion with which the outer peripheral surface of the seal member 17 abuts, and a projecting portion projecting toward the inner peripheral side of the main body portion and abutting the lower surface of the seal member 17. Can be done. Here, the thickness of the protruding portion in the Z direction is such that the shape of the mounting groove 16c formed when the expansion direction regulating member 16f is attached to the window frame member 16 is not deformed by the expansion pressure of the seal member 17. Set to.
Further, the expansion direction regulating portion 16f may be detachably fixed to the window frame member 16 by a screw or the like. When the expansion direction regulating portion 16f is detachable from the window frame member 16, the sealing member 17 can be easily replaced.

(Structure of Cylinder Unit 53)
Hereinafter, the configuration of the cylinder unit 53 will be specifically described. The cylinder unit 53 is provided between the stage 21 and the actuator 51 in order to make the gap between the window member 12 and the stage 21 more uniform.
The cylinder unit 53 supports the stage 21 from the lower surface and includes at least three fluid pressure cylinders that can expand and contract in the Z direction. Here, the fluid pressure cylinder can be a cylinder using an arbitrary fluid pressure such as a pneumatic cylinder or a hydraulic cylinder. In the light irradiation device 100 of the present embodiment, the fluid pressure cylinder is used for the purpose of adjusting a very small gap between the window member 12 and the stage 21. Therefore, a pneumatic cylinder that does not get dirty even if CDA (clean dry air) or the like leaks is more preferable because it does not require as much force as a hydraulic cylinder and is often used in an extremely clean environment such as a clean room.

FIG. 5 is a diagram showing the configuration of the cylinder unit 53. Here, FIG. 5A is a top view, FIG. 5B is a longitudinal side view, and FIG. 5C is a lateral side view.
As shown in FIG. 5, the cylinder unit 53 in the present embodiment includes a cylinder base 53a and four pneumatic cylinders 53b supported by the cylinder base 53a. The cylinder base 53a is connected to the actuator 51 and the pneumatic cylinder 53b is engaged with the stage 21. That is, the actuator 51 is configured to be able to move the stage 21 in the Z direction via the cylinder unit 53.
The operation of the pneumatic cylinder 53b is controlled by the pneumatic circuit 54 shown in FIG. The pneumatic circuit 54 is provided between the air supply source for supplying the CDA and each pneumatic cylinder 53b, and the set pressure of each pneumatic cylinder 53b can be individually controlled. The pneumatic circuit 54 includes a regulator 54a, a pressure gauge 54b, and a speed controller 54c that adjusts the extrusion and pull-in speeds of the pistons in this order from the upstream side when air is supplied. The pneumatic circuit 54 corresponds to a pressure control mechanism that can individually adjust the set pressure of the pneumatic cylinder 53b.

A steel sphere 53c is provided at the tip of each pneumatic cylinder 53b on the stage 21 side as a protrusion having a curved surface at the tip. The protrusion may be a member having a curved surface at the tip, and is not limited to a steel ball. Further, on the lower surface of the stage 21, a steel ball support member that engages with the steel ball 53c is provided. Here, one of the steel ball support members is a concave groove body 53d in which a conical (or pyramidal) groove is formed, and the remaining three are V groove bodies 53e in which a V groove is formed. is there.
FIG. 7 is a conceptual diagram illustrating a V-groove support system. As shown in FIG. 7, the three V-groove bodies 53d are arranged so that the directions of the grooves intersect at one point at the center position of the groove formed in the concave groove body 53d.

In the light irradiation device 100 that performs the desmear treatment, the work W heated to a certain constant temperature (for example, 150 ° C.) is subjected to the ultraviolet irradiation treatment (desmear treatment) in an atmosphere containing oxygen. Therefore, the stage 21 incorporates a heating mechanism (heater) that heats the processing region R1 on which the work W is placed together with the work W. Here, as the heating mechanism, for example, a sheath heater, a cartridge heater, or the like can be used.
In the present embodiment, since the V-groove support method is adopted as described above, the steel sphere 53c is reliably supported by the V-groove 53e even when the stage 21 is thermally expanded by heating by the heating mechanism. be able to. Further, since the V-groove bodies 53e are arranged so that the directions of the grooves intersect at one point at the center position of the concave groove body 53d, the stage 21 can be positioned with reference to the center position of the concave groove body 53d. ..

Next, the pressing control by the cylinder unit 53 will be described with reference to FIGS. 8 and 9. Note that in FIGS. 8 and 9, the work W on the stage 21 is not shown. The cylinder unit 53 can always and constantly support the load of the stage 21 with a force corresponding to the air pressure set by the regulator 54a, which is different for each pneumatic cylinder 53b.
FIG. 8 shows an example in which the cylinder unit 53 corrects the initial parallelism deviation between the window member 12 and the stage 21 that occurs at the stage of incorporating the stage 21 into the light irradiation device 100. As shown in FIG. 8 (a), when the stage 21 is tilted with respect to the window member 12 in the original assembly adjustment, as shown in FIG. 8 (b) by the actuator 51 (not shown in FIG. 8). It is assumed that the stage 21 is raised. In this case, as shown by the broken line in FIG. 8B, first, at one end of the stage 21 (the right end in FIG. 8B), the work W on the stage 21 is placed on the lower surface of the window member 12. It abuts on the formed streak projection 12a.
When the stage 21 is further raised by the actuator 51 from this state, the pneumatic cylinder 53b arranged on one side of the stage 21 contracts, and as shown by the solid line in FIG. 8B, the inclination of the work W is a window. The stage 21 tilts so as to follow the inclination of the member 12. After that, when the stage 21 is further raised by the actuator 51, all the pneumatic cylinders 53b are contracted, and the entire surface of the work W is brought into close contact with the streak projection 12a.

As described above, each of the four pneumatic cylinders 53b is configured to be expandable and contractible in the Z direction, and each has a damper function of contracting as needed. Here, the set pressure of each pneumatic cylinder 53b moves (rises) in the direction in which the stage 21 approaches the window member 12, and when the work W on the stage 21 comes into contact with the streak projection 12a, the pneumatic cylinder 53b Is adjusted to the set pressure that contracts. Therefore, these pneumatic cylinders 53b mutually absorb the force from below, and the work W mounted on the stage 21 and the window member 12 are kept parallel to each other without pushing up the window member 12, and are uniform in the plane. Force can be applied to the window member 12.

FIG. 9 shows an example in which the cylinder unit 53 corrects the tilt of the stage 21 that occurs when the seal member 17 is in close contact with the seal member 17. As shown by the broken line in FIG. 9A, the seal member 17 is placed on the stage 21 even when the window member 12 and the stage 21 are kept parallel to each other in a state where the stage 21 is raised to the processing position. When the stage 21 is brought into close contact with the side surface, one end of the stage 21 (the left end in FIG. 9A) may be pushed down and tilted as shown by the solid line in FIG. 9A. This is because the axis of the seal member 17 is not originally perpendicular to the mounting surface of the work W on the stage 21 due to the mounting accuracy of the seal member 17 or the like.
In this case, the tilt amount due to the pressing of the seal member 17 is reproducible. That is, when the seal member 17 is in close contact, the stage 21 is always tilted in the same direction by the same amount. Therefore, as shown in FIG. 9B, the pressure of the four pneumatic cylinders 53b is adjusted individually. Specifically, the pressing of the pneumatic cylinder 53b on the side pushed down by the seal member 17 is set to be larger than the pressing of the other pneumatic cylinder 53b (F1> F2). At this time, the pressing of each pneumatic cylinder 53b can be set according to the tilt direction and the tilt amount of the stage 21 caused by the pressing of the seal member 17.
In this way, by giving the cylinder unit 53 a force that resists the pushing down of the seal member 17, the work W mounted on the stage 21 and the window member 12 are kept parallel, and a uniform in-plane force is generated. It can be applied to the window member 12.

As described above, by controlling the pressing of the cylinder unit 53, the inclination of the window member 12 and the inclination of the stage 21 can be made equal, and the gap between the window member 12 and the stage 21 can be made uniform in the plane.
Further, by setting the pressing of each pneumatic cylinder 53b to be equal to or less than the allowable stress of the window member 12, there is a risk that the window member 12 will be damaged when the stage 21 is pressed against the window member 12. Can be reduced.

Hereinafter, the operation procedure of the light irradiation device 100 will be described.
(1) The light source unit 10 and the processing unit 20 are configured to be separable vertically. The window member 12 is attached to the light source portion 10 side.
(2) With the processing unit 20 lowered, the conveyed work W is placed on the stage 21 and fixed by vacuum suction.
(3) The control unit 52 controls the actuator 51 and raises the processing unit 20 until a part of the upper surface of the work W comes into contact with the streak projection 12a formed on the lower surface of the window member 12. From here, the processing unit 20 is further raised, and the entire surface of the work W is brought into contact with the streak projection 12a while contracting each pneumatic cylinder 53b constituting the cylinder unit 53. As a result, the distance between the window member 12 and the work W is set to a preset distance of, for example, 1 mm or less.
(4) Air is injected into the seal member 17 formed of the air expansion seal to airtightly seal the outer periphery of the stage 21. As a result, an airtight processing space is formed between the window member 12 and the stage 21. At this time, the parallelism of the stage 21 is ensured against the pressing of the stage 21 by the seal member 17 by the pressing individually set for each of the pneumatic cylinders 53b.

(5) The supply device 41 operates to introduce the processing gas into the processing space, and the ejector 42 operates to discharge the gas from the processing space (gas supply / discharge process). The barrier gas supply unit operates at the same time as or substantially at the same time as this gas supply / discharge process, and the barrier gas is supplied to the groove on the outer periphery of the stage 21.
(6) The ultraviolet light source 11 is turned on, and the ultraviolet irradiation treatment (desmear treatment) is started.
(7) When the ultraviolet irradiation treatment (desmear treatment) is completed, the ultraviolet light source 11 is turned off.
(8) The introduction of the processing gas into the processing space and the operation of the ejector are stopped. In addition, the supply of barrier gas will be stopped.
(9) Air is discharged from the seal member 17, and the light source unit 10 and the processing unit 20 are separated.
(10) The control unit 52 controls the actuator and lowers the processing unit 20. As a result, the light source unit 10 and the processing unit 20 are separated vertically.
(11) Take out the work W.
By the above procedure, the processing space can be hermetically sealed by the seal member 17 while uniformly forming the gap between the window member 12 and the stage 21 (work W). Therefore, a uniform ultraviolet irradiation treatment (desmear treatment) can be applied to the entire surface of the work W.

(Modification example)
In the above embodiment, an example of applying the light irradiation device to the desmear processing device has been described, but the present invention may be applied to a light ashing treatment of a resist, a resist removal treatment, a dry cleaning treatment, and the like.

100 ... light irradiation device, 10 ... light source unit, 12 ... window member, 16 ... window frame member (support member), 16d ... barrier gas supply path, 16e ... barrier gas supply port, 17 ... seal member, 20 ... processing unit, 21 ... Stage, 24 ... Air supply path, 25 ... Exhaust path, 51 ... Actuator, 52 ... Control unit, 53 ... Cylinder unit, 53a ... Cylinder base, 53b ... Pneumatic cylinder, W ... Work

Claims (8)

A light source that irradiates light through the window member,
A stage that is placed facing the window member and on which an object to be processed is placed,
A support member that supports the peripheral edge of the window member and
A space between the window member and the stage, the seal member for airtightly sealing the processing space in which the object to be processed placed on the stage is processed by the light.
The seal member is
An expansion seal that is formed with a hollow cross section and whose cross section expands when fluid is injected into the hollow.
It is arranged between the support member and the outer peripheral side surface of the stage, and is expanded in the second direction perpendicular to the first direction in which the window member and the stage face each other to press the outer peripheral side surface of the stage. A light irradiation device characterized in that the processing space is hermetically sealed. The light irradiation device according to claim 1, further comprising an expansion direction regulating unit that regulates the expansion direction of the seal member in the second direction. At least three fluid pressure cylinders that support a surface of the stage opposite to the surface facing the window member and can expand and contract in the first direction.
The light irradiation device according to claim 1 or 2, further comprising a cylinder unit having a pressure control mechanism capable of individually adjusting the set pressure of the fluid pressure cylinder. A stage moving mechanism that can move the stage in the first direction,
A spacer that is sandwiched between the window member and the surface of the object to be processed and keeps a distance between the window member and the surface of the object to be processed is further provided.
The pressure control mechanism is
The set pressure of the fluid pressure cylinder is moved in the direction in which the stage approaches the window member in the first direction by the stage moving mechanism, and the object to be processed mounted on the stage comes into contact with the spacer. The light irradiation device according to claim 3, wherein the fluid pressure cylinder is adjusted to a set pressure at which the fluid pressure cylinder contracts. Formed at the end of the previous SL fluid pressure cylinder, which is arranged at a position corresponding to the side edge of at least three of the stage, the projection body having a curved-edge,
A V-groove body formed on the opposite surface of the stage and engaging with each of the protrusions is further provided.
The light irradiation device according to claim 3 or 4, wherein the V-groove bodies are arranged so that their central axes intersect at one point. A light source that irradiates light through the window member,
A stage that is placed facing the window member and on which an object to be processed is placed,
A sealing member which is a space between the window member and the stage and airtightly seals the processing space in which the object to be processed placed on the stage is processed by the light.
A cylinder unit that supports a surface of the stage opposite to the surface facing the window member is provided.
The cylinder unit is
At least three fluid pressure cylinders that can expand and contract in the first direction in which the window member and the stage face each other,
A light irradiation device including a pressure control mechanism capable of individually adjusting the set pressure of the fluid pressure cylinder. A support member that supports the peripheral edge of the window member and an outer peripheral side surface of a stage that is arranged to face the window member and on which an object to be processed is placed are formed in a hollow cross section, and the fluid into the hollow is formed. The expansion seal whose cross section expands due to injection is expanded in a second direction perpendicular to the first direction in which the window member and the stage face each other to press the outer peripheral side surface of the stage, and the window member and the stage are pressed. A step of airtightly sealing the processing space between the two and the processing space where the object to be processed placed on the stage is processed by the light emitted through the window member.
A light irradiation method comprising a step of irradiating the object to be processed with the light through the window member. A space between a window member and a stage on which an object to be processed is placed, which is arranged to face the window member, and is irradiated by light emitted from the object to be processed placed on the stage through the window member. The process of airtightly sealing the processing space to be processed with a sealing member,
The set pressures of at least three fluid pressure cylinders that can expand and contract in the first direction in which the window member and the stage face each other are individually adjusted, and the fluid pressure cylinders meet the surface of the stage facing the window member. Is a light irradiation method comprising a step of supporting a surface on the opposite side.

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