JP5407277B2 - XY stage device - Google Patents

Description

  The present invention relates to an XY stage apparatus that can position a transfer stage in an XY orthogonal coordinate system.

  In general, in a machine tool or the like, an XY stage is used as an apparatus for positioning a workpiece or other positioning object at a desired position in two orthogonal directions, that is, in an XY orthogonal coordinate system, while being placed on a transfer stage. The device is known.

  As one of this type of XY stage apparatus, for example, an apparatus whose outline is shown in FIG. 7 and FIG. 8 is proposed.

  That is, the XY stage apparatus includes a base (wafer base surface plate) 1 whose upper surface serves as a guide surface that supports an XY stage main body 2 as a transfer stage so as to be movable in an XY two-dimensional direction.

  Y-axis direction drive motors 3, which are shaft motors composed of a stator 3 a and a mover 3 b extending in the Y-axis direction, are disposed at both side positions in the X-axis direction of the base 1, respectively. 3, both ends of the stator 3a in the longitudinal direction are attached to the support member 4 installed on the floor surface outside the base 1 via the holding member 5.

  On the upper side of the base 1, an air pad support member 6 comprising a hollow container having an open top surface extending in the X-axis direction and having a plurality of air pads 6a on the bottom surface is placed. Are attached to the upper side of the mover 3 b of each Y-axis direction drive motor 3.

  Further, an X-axis direction drive motor 7 which is a shaft motor composed of a stator 7a and a mover 7b extending in the X-axis direction is arranged inside the air pad support member 6, and both longitudinal ends of the stator 7a are arranged. However, the air pad support member 6 is attached to the inner side of both ends in the longitudinal direction via the holding mechanism 8.

  A concave groove provided on the bottom surface side of the XY stage main body 2 is fitted into the air pad support member 6 so that the XY stage main body 2 can be guided by the air pad support member 6 and slide in the X-axis direction. In addition, the movable element 7b of the X-axis direction drive motor 7 arranged on the inner side of the air pad support member 6 is attached to the bottom surface inside the concave groove of the XY stage main body 2.

  According to the XY stage apparatus having the above-described configuration, each mover 3b of each Y-axis direction drive motor 3 is attached to each mover 3b by being driven in synchronization with the stator 3a. The XY stage main body 2 can be moved in the Y-axis direction together with the air pad support member 6, and the mover 7b of the X-axis direction drive motor 7 is driven along the stator 7a. The XY stage main body 2 can be moved in the X-axis direction integrally with the mover 7b.

  Therefore, by combining the driving of each Y-axis direction drive motor 3 and X-axis direction drive motor 7, the XY stage body 2 can be positioned on the base 1 at an arbitrary position in the XY orthogonal coordinate system. It is.

  In the XY stage apparatus, the X-axis direction drive motor 7 and the Y-axis direction drive motors 3 are both shaft motors in which the stators 7a, 3a and the movers 7b, 3b are not in contact with each other. When the X-axis direction drive motor 7 is driven and the XY stage main body 2 is moved at high speed in the X-axis direction integrally with the mover 7b, a reaction force during acceleration acts on the stator 7a. Therefore, each Y-axis direction drive in which the reaction force is arranged orthogonally to the X-axis direction drive motor 7 from the stator 7a of the X-axis direction drive motor 7 via each holding mechanism 8 and the air pad support member 6. When transmitted to the mover 3b of the motor 3, there is a concern that the distance between the mover 3b and the stator 3a in the Y-axis direction drive motor 3 may fluctuate and the stator 3a vibrates.

  Therefore, in the XY stage apparatus, the holding mechanism 8 is provided inside the both ends in the longitudinal direction of the air pad support member 6 to hold the both ends in the longitudinal direction of the stator 7a of the X-axis direction drive motor 7, As shown in FIG. 8, a housing 9 having a round hole for inserting and arranging each end portion of the stator 7a of the X-axis direction drive motor 7, and end surfaces in the longitudinal direction of the housing 9 and the stator 7a. And a second actuator comprising a piezoelectric element interposed between the inner peripheral surface of the housing 9 and the outer peripheral surface of each end of the stator 7a. When the movable element 7b of the X-axis direction drive motor 7 is driven, the first actuator is provided corresponding to each end face in the longitudinal direction of the stator 7a. The feedforward control is performed so as to generate a driving force that cancels a reaction force acting on the stator 7 a of the X-axis direction drive motor 7, so that at least one of the motors 10 of the X-axis direction drive motor 7. The reaction force acting on the stator 7a when the mover 7b is driven causes the housing 9 of the holding mechanism 8 that holds both ends of the stator 7a, the air pad support member 6, and the Y-axis direction drive motors 3 to move. Is not transmitted to the movable element 3b.

  On the other hand, the Y-axis direction drive motors 3 are driven to move the XY stage main body 2 together with the movable elements 3b together with the air pad support member 6 and the X-axis direction drive motor 7 in the Y-axis direction at high speed. When moved, the reaction force during acceleration acts on each stator 3a. However, in the XY stage device, each end of each stator 3a of each Y-axis direction drive motor 3 is connected to the outside of the base 1. By adopting a configuration in which the holding member 5 is attached to the provided support member 4, the reaction force input to each stator 3 a when each of the movers 3 b is driven is changed to each of the holding members 5 and each of the support members. 4 is transmitted to the floor outside the base 1 to prevent vibration from occurring in the base 1 (see, for example, Patent Document 1).

  By the way, in precision machines that perform precise positioning for semiconductor-related manufacturing, inspection, etc., when moving a moving body such as a transfer stage (transfer table) relative to a fixed part of the machine, For example, it may be required to perform positioning with an accuracy of the order of μm or less.

  Therefore, as a drive mechanism for enabling the movable body in the precision machine as described above to move linearly and to accurately position the movable body, the applicant of the present invention is not required to transport the movable body as a movable body. As a drive mechanism of the friction drive conveying apparatus that can achieve a long stroke while ensuring the straightness of the stage, a friction drive mechanism as shown in FIGS. 9 and 10 has been proposed.

  That is, the friction drive mechanism shown in FIGS. 9 and 10 includes a slide bar 13 that extends in the moving direction of the transport table 12, and one side surface that contacts one side surface of the slide bar 13 on the transport table 12 side. A roller 14, a plurality of other side rollers 15 that are in contact with the other side of the slide bar 13 at front and rear positions in the table moving direction with respect to the one side roller 14, the one side roller 14, and the other side roller 15 Any one of a displacement mechanism 16 such as a piezo actuator for individually displacing all or any of the above in a direction perpendicular to the table moving direction, and the rollers 14 and 15 on the one side surface side and the other side surface side. A driving motor 18 is connected to one roller 14 via a flexible joint 17 and rotationally drives the roller 14 as a driving roller 14. There as a structure in which a.

  According to the friction drive mechanism having the above-described configuration, the drive roller 14 is placed on one side of the slide bar 13 by the displacement mechanisms 16, and the other rollers 15 are backup rollers 15. The drive roller 14 is rotationally driven by the forward / reverse drive of the drive motor 18 in the state of pressing against the side surfaces, thereby utilizing the friction acting on the contact surface between the drive roller 14 and the slide bar 13. Thus, the transport table 12 as the moving body can be moved in the longitudinal direction of the slide bar 13.

  Moreover, the displacement table 16 displaces the relative positions of the drive roller 14 and the backup rollers 15 relative to the conveyance table 12 in the direction perpendicular to the traveling direction of the conveyance table 12, thereby the conveyance table. The positions of the twelve slide bars 13 can be shifted. Further, the backup rollers 15 that are in contact with the other side surface of the slide bar 13 are arranged by the corresponding displacement mechanisms 16 so as to be aligned along a direction deviated by a required angle from the direction of the transport table 12 itself. Thus, the direction of the transfer table 12 itself, which is the moving body, can be slightly rotated in the plane with reference to the axial direction of the slide bar 13 that makes each backup roller 15 contact the other side surface. (For example, refer to Patent Document 2).

Japanese Patent Laid-Open No. 2001-23894 JP 2008-103663 A

  However, in the XY stage apparatus disclosed in Patent Document 1, the reaction force acting on the stator 7a when the XY stage body 2 is moved by driving the mover 7b of the X-axis direction drive motor 7 is the X-axis direction drive motor. In order to prevent transmission to the movable element 3b of the Y-axis direction drive motor 3 arranged so as to be orthogonal to the piezoelectric element 7, the piezoelectric elements arranged on the respective end faces of the stator 7a of the X-axis direction drive motor 7 The first actuator 10 made of an element is driven, but the stator 7a is driven according to the weight of the object mounted on the XY stage main body 2 and the acceleration of the mover 7b of the X-axis direction drive motor 7. Since the acting reaction force changes, the control of the first actuator 10 is very complicated, and the apparatus configuration is also complicated, which increases the cost.

  Moreover, in the XY stage apparatus disclosed in Patent Document 1, when the XY stage main body 2 is moved at a high speed in the Y axis direction together with the air pad support member 6 by driving the mover 3b of each Y axis direction drive motor 3. Further, due to inertia, the distance between the stator 7a of the X-axis direction drive motor 7 arranged orthogonal to the Y-axis direction drive motor 3 and the mover 7b to which the XY stage main body 2 is attached varies. No particular countermeasure has been proposed for the possibility of vibrations occurring in the XY stage body 2.

  Therefore, in the XY stage apparatus shown in Patent Document 1, the stators 7a, 7b, 3b of the drive motors 7, 3 in the X-axis direction and the Y-axis direction, which are shaft motors, are driven. Although the possibility that the base 1 vibrates due to the reaction force acting on 3a is prevented in advance, there is a problem that the possibility that the XY stage main body 2 that is the transfer stage is shaken has not been sufficiently solved. Such a vibration of the transfer stage cannot be ignored when the positioning object is precisely positioned.

  Therefore, the present invention applies the friction drive mechanism proposed by the present applicant in the previous application, and drives the transport stage on the base in an arbitrary direction in the XY rectangular coordinate system. It is an object of the present invention to provide an XY stage apparatus that can prevent the carrier stage on the base from being slightly shaken by the reaction force and can increase the precision of the precision positioning of the carrier stage.

In order to solve the above-mentioned problems, the present invention corresponds to claim 1, and a pair of slide bars along one axial direction of the XY rectangular coordinate system is provided at a required height position from the upper surface of the base at a required interval. Are arranged in parallel with each other, and both longitudinal ends of each slide bar are attached to a support member provided outside the base, and each slide bar along one axial direction of the XY orthogonal coordinate system is attached to the slide bar. a stage having a friction drive mechanism having a roller contacting each slide bar mounted respectively as driven by the friction drive mechanism along the longitudinal direction of the respective slide bars, further between the adjacent said each stage, Attach both ends of the slide bar along the other axial direction of the XY rectangular coordinate system, and attach a roller to the slide bar along the other axial direction of the XY rectangular coordinate system to contact the slide bar. A stage having a friction drive mechanism having, attached as Rika moving by the said friction drive mechanism along the longitudinal direction of the slide bar and attached to the slide bar along the other axis direction of the XY orthogonal coordinate system The reaction force acting on the slide bar when the stage is driven is transmitted to the slide bar via the stage attached to each slide bar along one axial direction of the XY rectangular coordinate system and its friction drive mechanism. The configuration is as follows.

  Further, in the above configuration, one side roller that makes the friction drive mechanism of each stage attached to each slide bar along one axial direction and the other axial direction of the XY orthogonal coordinate system contact one side surface of the corresponding slide bar; Any one of a plurality of other side rollers that are brought into contact with the other side of the slide bar at both front and rear positions in the stage moving direction with respect to the one side roller, and each of the rollers on the one side and the other side. A driving motor for rotating the roller as a driving roller is provided.

  Similarly, in the configuration described above, the friction drive mechanism of the stage attached to each slide bar along one axial direction of the XY orthogonal coordinate system is brought into contact with one surface in the vertical direction of each slide bar along the one axial direction. A first unidirectional roller, and a plurality of other upper and lower rollers that are in contact with the other upper and lower surfaces of the slide bar along the one axial direction at both front and rear positions in the stage moving direction with respect to the first vertical roller. A drive motor for rotating and driving any one of the rollers on the one surface side in the vertical direction and the other surface side as a drive roller, and for each slide bar along one axial direction of the XY orthogonal coordinate system A stage mounted on a slide bar along the other axial direction of the XY Cartesian coordinate system, with side rollers in contact with both side surfaces. A one-side roller that causes the rubbing drive mechanism to contact one side surface of the slide bar along the other axial direction, and a slide bar along the other axial direction at both front and rear positions in the stage moving direction relative to the one side-side roller. A plurality of other side rollers that are brought into contact with the other side surface, and a drive motor for rotating and driving any one of the rollers on the one side surface and the other side surface as a drive roller. .

According to the XY stage apparatus of the present invention, the following excellent effects are exhibited.
(1) A pair of slide bars along one axial direction of the XY Cartesian coordinate system are arranged in parallel at a required height position from the upper surface of the base with a predetermined interval therebetween, and both longitudinal ends of the respective slide bars The stage is attached to a support member provided outside the base, and a stage having a friction drive mechanism having a roller that contacts each slide bar on each slide bar along one axial direction of the XY rectangular coordinate system. In addition, each of the slide bars is attached so as to be driven by the friction drive mechanism along the longitudinal direction of each slide bar , and further, both ends of the slide bar along the other axial direction of the XY orthogonal coordinate system are disposed between the stages. A stage having a friction drive mechanism attached to each of the slide bars along the other axial direction of the XY Cartesian coordinate system and having a roller in contact with the slide bar is attached to the slide bar. Mounting As Rica moving by the said friction drive mechanism along the longitudinal direction of the over stage mounted on a slide bar along the other axis direction of the XY orthogonal coordinate system is applied to the slide bar when driving The reaction force is transmitted to each slide bar via a stage attached to each slide bar along one axial direction of the XY rectangular coordinate system and its friction drive mechanism. Each stage in the axial direction is equipped with a roller structure that makes contact with the corresponding slide bar, so that each stage and the corresponding slide bar can be contacted with high rigidity without any non-contact elements such as a shaft motor. Can be made. For this reason, when driving each of the stages along the corresponding slide bar, it is possible to prevent the possibility of a vibration due to inertia in the orthogonal axial stage. Also, when driving each stage along the corresponding slide bar, the reaction force acting on each slide bar can be transmitted to the support member provided outside the base and received. The possibility that the base is affected can be prevented. Therefore, the above-mentioned stages can be positioned with high accuracy.
(2) Furthermore, the apparatus configuration for preventing the influence of the reaction force acting on the corresponding slide bar at the time of driving each stage can be simplified, and complicated control is not required. Therefore, the cost can be reduced.
(3) One side-side roller for bringing the friction drive mechanism of each stage attached to each slide bar along one axial direction and the other axial direction of the XY orthogonal coordinate system into contact with one side surface of the corresponding slide bar; Drives one of the plurality of other side rollers that are brought into contact with the other side surface of the slide bar at both front and rear positions in the stage movement direction with respect to the side roller, and each of the one side surface side roller and the other side surface roller. By adopting a configuration including a drive motor for rotationally driving as a roller, the friction drive mechanism of the XY stage apparatus having the effects (1) and (2) can be easily realized.
(4) Up-down direction one side roller which makes the friction drive mechanism of the stage attached to each slide bar along one axial direction of an XY orthogonal coordinate system contact one surface of each slide bar along the one axial direction. A plurality of other upper and lower rollers on the other side of the slide bar along the one axial direction at both front and rear positions in the stage moving direction with respect to the upper and lower one roller, and the upper and lower one surface And a drive motor for rotating and driving any one of the rollers on the other surface side as a drive roller, and contacting both side surfaces of each slide bar along one axial direction of the XY rectangular coordinate system And a friction drive mechanism for the stage attached to the slide bar along the other axial direction of the XY Cartesian coordinate system. A side roller that contacts one side surface of the slide bar along one axial direction, and a plurality of rollers that contact the other side surface of the slide bar along the other axial direction at both front and rear positions in the stage moving direction with respect to the one side roller. The above-mentioned (1) is provided by including a driving motor for rotationally driving another roller on the other side and one of the rollers on the one side and the other side as a driving roller. ) The friction drive mechanism of the XY stage apparatus having the effect of (2) can be easily realized, and the load of the stage attached to each slide bar along one axial direction of the XY orthogonal coordinate system is further converted into the friction drive mechanism. It is possible to support each slide bar along the one axial direction via the one of the slide bars along the one axial direction of the XY rectangular coordinate system. And it is possible to eliminate the need to provide kicking a support portion for supporting the load of the stage separately, the device configured as a more simple, can be advantageous configuration for more compact device size.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

  1 to 4 show an embodiment of an XY stage apparatus of the present invention, which has the following configuration.

  That is, in the XY stage apparatus of the present invention, a base 21 whose upper surface is a guide surface for moving the transfer stage 20 is provided on a base 19 such as a floor surface.

  An XY orthogonal coordinate system is set on the base 21, and a required height above a position near one end in one axial direction of the base 21 such as a position near both ends in the Y axis direction of the base 21 is set. In this position, X-direction slide bars 22 extending across the base 21 in the X-axis direction as the other axial direction are respectively arranged, and both ends of each X-direction slide bar 22 are arranged on the outside of the base 21. Each is attached to and supported by a support member 23 having a required height dimension provided on the foundation 19.

  Each of the X-direction slide bars 22 has a movement along the longitudinal direction of the X-direction slide bar 22 of the moving body and the X-direction slide bar 22 of the moving body, similarly to the friction drive mechanism shown in FIGS. X as a moving body provided with a friction drive mechanism 25 that is capable of shifting in a direction perpendicular to the axis and rotating the moving body itself in a minute plane with reference to the axial direction of the X-direction slide bar 22. The stage 24 is attached individually.

  Further, a Y-direction slide bar 26 extending in the Y-axis direction is disposed between the X stages 24, and both ends of the Y-direction slide bar 26 are attached to the corresponding X stages 24.

  Similarly to the friction drive mechanism shown in FIGS. 9 and 10, the Y-direction slide bar 26 is moved along the longitudinal direction of the Y-direction slide bar 26 and perpendicular to the Y-direction slide bar 26. And a Y stage 27 as a moving body provided with a friction drive mechanism 28 that can perform a minute in-plane rotation of the moving body itself with reference to the axial direction of the Y-direction slide bar 26. Is mounted on the top of the Y stage 27 to provide a transfer stage 20 for placing a workpiece or other positioning object on the top, thereby constituting an XY stage apparatus.

  More specifically, each X stage 24 is provided with a friction reducing member made of a material having a small friction coefficient at the bottom, or a friction reducing mechanism 29 configured to reduce frictional resistance by ejecting gas or the like. The frame 30 is slidable in the X-axis direction on the base 21. The frame 30 includes a driving roller 31 that is brought into contact with one side surface of the X-direction slide bar 22 and a plurality of pieces that are brought into contact with the other side surface of the X-direction sliding bar 22 at both front and rear positions in the X-stage moving direction with respect to the driving roller 31. For example, two backup rollers 32, a displacement mechanism 33 such as a piezo actuator for individually displacing the drive roller 31 and the backup roller 32 in a lateral direction perpendicular to the X stage moving direction, and the drive roller 31 A drive motor 34 is provided for connecting and driving the drive roller 31 to rotate. Accordingly, the drive roller 31 is moved forward and backward by the drive motor 34 in a state where the drive roller 31 and the backup roller 32 are pressed against both side surfaces of the X-direction slide bar 22 by the displacement mechanisms 33. By rotating, the X stage 24 as the moving body is moved in the longitudinal direction of the X-direction slide bar 22 using the friction acting on the contact surface between the drive roller 31 and the X-direction slide bar 22. You can make it. Furthermore, by displacing the relative positions of the drive roller 31 and the backup rollers 32 with respect to the X stage 24 in the direction perpendicular to the traveling direction of the X stage 24 by the displacement mechanisms 33, The position of the X stage 24 relative to the X direction slide bar 22 can be shifted in a direction perpendicular to the X stage moving direction. Further, the backup rollers 32 that are in contact with the other side surface of the X-direction slide bar 22 are lined up along the direction shifted by a required angle from the direction of the X stage 24 itself by the corresponding displacement mechanisms 33. With the arrangement, the X stage 24 can be slightly rotated in-plane with respect to the axial direction of the X-direction slide bar 22 in which each backup roller 32 is brought into contact with the other side surface. It is.

  Both ends of the Y-direction slide bar 26 are integrally attached to a required portion of the frame 30 of each X stage 24, for example, an end near the center of the base 21.

  The Y stage 27 has a friction reducing member 35 having a material having a small friction coefficient attached to the bottom and the friction stage 35 having a small friction coefficient attached to the top, or a friction reducing mechanism 35 that can reduce the frictional resistance. A frame 36 that can slide in any direction on the base 21 is provided. The frame 36 includes a driving roller 37 that is in contact with one side surface of the Y-direction slide bar 26, and a plurality of contacts that are in contact with the other side surface of the Y-direction slide bar 26 at both front and rear positions in the Y-stage moving direction with respect to the driving roller 37. For example, two backup rollers 38, a drive mechanism 37 such as a piezo actuator for individually displacing the drive roller 37 and each backup roller 38 in a direction perpendicular to the Y-stage moving direction, and the drive roller 37 are connected. The driving roller 37 is configured to include a driving motor 40 for rotationally driving the driving roller 37. As a result, the drive roller 37 is moved forward and backward by the drive motor 40 in a state where the drive roller 37 and the backup roller 38 are pressed against both side surfaces of the Y-direction slide bar 26 by the displacement mechanisms 39. By rotating and driving, the Y stage 27 as the moving body is moved in the longitudinal direction of the Y-direction slide bar 26 using the friction acting on the contact surface between the drive roller 37 and the Y-direction slide bar 26. You can make it. Furthermore, by displacing the relative positions of the drive roller 37 and the backup rollers 38 with respect to the Y stage 27 in the direction perpendicular to the traveling direction of the Y stage 27 by the displacement mechanisms 39, The position of the Y stage 27 with respect to the Y direction slide bar 26 can be shifted in a direction perpendicular to the Y stage moving direction. Further, the backup rollers 38 that are in contact with the other side surface of the Y-direction slide bar 26 are arranged along the direction shifted by a required angle from the direction of the Y stage 27 itself by the corresponding displacement mechanisms 39. By arranging them, the direction of the Y stage 27 can be finely rotated in the plane with reference to the axial direction of the Y-direction slide bar 26 in which each backup roller 38 is brought into contact with the other side surface. It is.

  Note that the structure of the mechanism for holding the drive rollers 31 and 37 and the backup rollers 32 and 38 in the X stage 24 and the Y stage 27 so as to be displaceable in the direction perpendicular to the respective stage moving directions is as follows. 9 and 10 proposed in Patent Document 2, the structure of a mechanism for holding the drive roller 14 and the backup roller 15 in the friction drive mechanism of the friction drive apparatus as shown in FIG. The detailed description is omitted here.

  When using the XY stage having the above configuration, each X stage 24 is driven along the X-direction slide bar 22 by the friction drive mechanism 25 of each X stage 24, and each X stage 24 is driven. Are moved in parallel to a predetermined position to move the Y-direction slide bar 26 provided between the X stages 24 to a position corresponding to the X coordinate position of the target position where the transport stage 20 is to be positioned. . Further, the Y stage 27 is driven along the Y-direction slide bar 26 by the friction drive mechanism 28 of the Y stage 27 so that the Y stage 27 is positioned at the Y coordinate of the target position where the transfer stage 20 is to be positioned. When moved to a position corresponding to the position, the transfer stage 20 provided on the top of the Y stage 27 is moved to a position corresponding to the XY coordinates of the target position to be positioned. Therefore, the transfer stage 20 can be positioned at an arbitrary position in the XY orthogonal coordinate system.

  In the above, when each X stage 24 is driven along each X direction slide bar 22 by each friction drive mechanism 25, the reaction force is applied to each X direction slide bar 22 in the longitudinal direction. It acts as a force in the direction opposite to the moving direction of the stage 24. At this time, each X-direction slide bar 22 is supported by the support members 23 provided on the base 19 outside the base 21 at both ends in the longitudinal direction. The reaction force at the time of driving each X stage 24 is directly received by the base 19 via the support member 23 from each X-direction slide bar 22, and therefore does not affect the base 21 at all. .

  Further, when each X stage 24 is driven along each X direction slide bar 22, the Y direction slide bar 26 moves in the longitudinal direction of each X direction slide bar 22 together with each X stage 24. Therefore, a force in a direction perpendicular to the Y-direction slide bar 26 acts on the Y stage 27 due to inertia. At this time, the friction roller mechanism 28 provided on the Y stage 27 has a driving roller 37. And the respective backup rollers 38 are pressed against both side surfaces of the Y-direction slide bar 26 so as to be in direct contact with each other, there is no gap between the friction drive mechanism 28 and the Y-direction slide bar 26. The swing of the Y stage 27 itself in the direction perpendicular to the Y-direction slide bar 26 is prevented.

When the Y stage 27 is driven along the Y-direction slide bar 26 by the friction drive mechanism 28, the reaction force is moved in the longitudinal direction with respect to the Y-direction slide bar 26. It acts as a force in the opposite direction. At this time, in each X stage 24 to which both ends of the Y-direction slide bar 26 are respectively attached, the driving roller 31 and each backup roller 32 are moved by the friction drive mechanism 25 provided in the X stage 24. Since the two sides of the directional slide bar 22 are pressed against and directly contacted with each other, there is no gap between the friction drive mechanism 25 and the X-direction slide bar 22. Accordingly, the reaction force when driving the Y stage 27 acting on the Y-direction slide bar 26 passes through the X stage 24 and the friction drive mechanism 25 from both ends of the Y-direction slide bar 26 and the X stages. After being transmitted to the direction slide bar 22, it can be directly received by the foundation 19 through the support member 23 from each X direction slide bar 22. Therefore, the base 21 is not affected at all.

  Thus, according to the XY stage apparatus of the present invention, the mechanism that drives each X stage 24 along each X direction slide bar 22 and the Y stage 27 that drives along the Y direction slide bar 26 are driven. By using the friction drive mechanisms 25 and 28 as the mechanisms, the X-axis direction drive motor 7 and the Y-axis direction drive motor 3 of the XY stage main body 2 in the conventional XY stage apparatus as shown in FIGS. Since the non-contact elements such as the shaft motor stators 7a, 3a and the movers 7b, 3b used in the above are not used, the drive mechanisms of the X stage 24 and the Y stage 27 should be highly rigid. Can do. Therefore, it is possible to prevent the Y stage 27 from being displaced relative to the Y-direction slide bar 26 due to inertia. Moreover, the reaction force acting on each X-direction slide bar 22 when driving each X-stage 24 and the reaction force acting on the Y-direction slide bar 26 when driving the Y-stage 27 are all base. Since it can be transmitted to the base 19 without affecting the base 21, there is no possibility of the base shaking. Accordingly, the stages 24 and 27 can be moved with high accuracy, so that the transfer stage 20 attached to the Y stage 27 can be positioned with high accuracy in the XY orthogonal coordinate system.

  In addition, since it is not necessary to provide a piezo element requiring complicated control at the connecting portion between the both ends of the Y-direction slide bar 26 and each X stage 24, the apparatus configuration can be simplified. This makes it possible to reduce costs.

  Further, the friction drive mechanism 25 provided in each X stage 24 displaces the drive roller 31 and each backup roller 32 by the corresponding displacement mechanism 33, thereby changing the direction of each X stage 24 itself. The X direction slide bar 22 that is the moving direction can be rotated at a required angle with reference to the axial direction, and each X stage 24 can be shifted in a direction perpendicular to the X direction slide bar 22. By controlling the movement stroke amount of each X stage 24 in the longitudinal direction of the X direction slide bar 22 independently, the direction of the Y direction slide bar 26 provided between the X stages 24 is changed to the Y axis direction. The Y stage 27 attached to the Y-direction slide bar 26 and The body, it is possible to provide a displacement of the small-plane rotation direction to the transfer stage 20.

  Further, as described above, instead of independently controlling the movement stroke amount of each X stage 24 in the longitudinal direction of the X-direction slide bar 22, a driving roller is provided by the friction drive mechanism 28 provided in the Y stage 27. 37 and each backup roller 38 are also displaced by the corresponding displacement mechanisms 39, so that the direction of the Y stage 27 itself is rotated by a required angle with respect to the axial direction of the Y-direction slide bar 26 as the Y-stage moving direction. Thus, a minute displacement in the in-plane rotation direction can be given to the transfer stage 20.

  Therefore, for example, the X-direction slide bar 22 and the Y-direction slide bar 26 have their original movements of the stages 24 and 27 corresponding to the axial directions of the slide bars 22 and 26 due to errors in manufacturing. Even if it is slightly bent from the direction, each X stage 24 or Y stage 27 is rotated in the required angle in the plane with respect to the axial direction of each X direction slide bar 22 or Y direction slide bar 26 as described above. It is possible to correct the orientation of the transfer stage 20 provided on the top of the Y stage 27 so that it is accurately aligned in the X-axis direction and the Y-axis direction.

  Next, FIGS. 5 and 6 show another embodiment of the present invention. In the same configuration as the embodiment of FIGS. 1 to 4, each X stage 24 has a friction reducing member or a friction at the bottom. Instead of a configuration in which a frame 30 provided with a reduction mechanism 29 is provided and slidable in the X-axis direction on the base 21, the load of each X stage 24 itself is supported by the base 21. Each X stage 24a is configured such that the load of each X stage 24a itself can be supported by the X-direction slide bar 22, and is specifically as follows.

  That is, each X stage 24a in the present embodiment is disposed on the frame 30a at a required height position above the base 21 in the same manner as in the above-described embodiment, and both ends in the longitudinal direction are the foundations 19 outside the base 21. A driving roller 31 that is brought into contact with one surface in the vertical direction of each X-direction slide bar 22 supported by the support member 23 provided above, for example, the lower surface of the X-direction slide bar 22, and the X with respect to the driving roller 31 A plurality of, for example, two backup rollers 32, and the drive roller 31 and the backup roller 32, which are in contact with the upper surface of the X-direction slide bar 22 at the other side in the front-rear direction of the stage moving direction, are placed on the X-stage. A displacement mechanism 33 such as a piezoelectric actuator for individually displacing in the vertical direction perpendicular to the moving direction; Linked to 31 is a configuration in which a friction drive mechanism 25 comprising a driving motor 34. for rotationally driving the driving roller 31. Thus, the load of each X stage 24 a is obtained by pressing the backup roller 32 and the drive roller 31 against the upper and lower surfaces of the X-direction slide bar 22 by the displacement mechanisms 33 of the friction drive mechanism 25. Can be transmitted to and supported by each X-direction slide bar 22 via each backup roller 32 disposed on the upper side of each X-direction slide bar 22. By rotating the drive roller 31 by forward / reverse drive of the drive motor 34, the X stage 24 is moved to the X position by utilizing friction acting on the contact surface between the drive roller 31 and the X-direction slide bar 22. The direction slide bar 22 can be moved (traveled) in the longitudinal direction.

  Further, a side roller 41 for pressing against each side surface of the corresponding X-direction slide bar 22 is provided at a required portion of the frame 30a of each X stage 24a.

  Furthermore, both ends of the Y-direction slide bar 26 similar to the embodiment of FIGS. 1 to 4 are respectively provided at required portions of the frame 30 of each X stage 24a, for example, at the end near the center of the base 21. It is attached integrally.

  In the present embodiment, since each X stage 24a does not contact the base 21, the base 21 has a shape in which a portion located immediately below the movement region in the X-axis direction of each X stage 24a is omitted. It is as. Other configurations are the same as those shown in FIGS. 1 to 4, and the same components are denoted by the same reference numerals.

  According to the XY stage apparatus of the present embodiment having the above-described configuration, each X stage 24a is driven along the X-direction slide bar 22 by the friction drive mechanism 25 of each X stage 24a. Each X stage 24a is translated in parallel to a predetermined position so that the Y-direction slide bar 26 provided between the X stages 24a corresponds to the X coordinate position of the target position where the transport stage 20 should be positioned. The Y stage 27 is driven along the Y-direction slide bar 26 by the friction drive mechanism 28 of the Y stage 27, and the Y stage 27 should be positioned with respect to the transport stage 20. The transfer stage 20 provided on the top of the Y stage 27 should be positioned by moving to a position corresponding to the Y coordinate position of the location. It can be moved to a position corresponding to the XY coordinates of the specific point. Therefore, the transfer stage 20 can be positioned at an arbitrary position in the XY orthogonal coordinate system.

  In the above description, when each X stage 24a is driven along each X direction slide bar 22 by each friction drive mechanism 25, the reaction force acting on each X direction slide bar 22 causes the support member 23 to move. It can be directly received by the foundation 19 via

  When the Y stage 27 is driven along the Y-direction slide bar 26 by the friction drive mechanism 28, the reaction force acts on the Y-direction slide bar 26. In each X stage 24a to which both ends of the bar 26 are respectively attached, each side roller 41 is in direct contact with both side surfaces of the X direction slide bar 22, so that the Y direction slide bar 26 is in contact. After the reaction force acting on the Y stage 27 is driven, the reaction force is transmitted from both ends of the Y direction slide bar 26 to the X direction slide bars 22 through the X stages 24a and the side rollers 41. The base 19 can be directly received from each X-direction slide bar 22 via the support member 23.

  Therefore, according to the present embodiment, the stages 24a and 27 can be moved with high accuracy in the same manner as the above-described embodiment. Therefore, the XY orthogonal coordinates of the transfer stage 20 attached to the Y stage 27 are also possible. High-precision positioning in the system can be performed.

  Furthermore, it is possible to reduce the installation space of the apparatus by reducing the size of the base 21 in a state where a desired movement range in the XY orthogonal coordinate system of the transfer table 20 is secured.

  The present invention is not limited to the above embodiment, and the friction drive mechanism 25 provided on the X stage 24 in the embodiment of FIGS. 1 to 4 is provided on both side surfaces of the corresponding X direction slide bar 22. If the drive roller 31 and the backup roller 32 are pressed from both sides, the drive roller 31 can be driven forward and reverse, and the arrangement of the drive roller 31 and one of the backup rollers 32 may be interchanged. The number of rollers 32 may be increased.

  The friction drive mechanism 25 provided on the X stage 24a in the embodiment of FIGS. 5 and 6 is configured so that the drive roller 31 and the backup roller 32 are pressed against the upper and lower surfaces of the corresponding X-direction slide bar 22 from both the upper and lower sides. As long as 31 can be driven forward and backward, the arrangement of the drive roller 31 and one of the backup rollers 32 may be interchanged, and the number of backup rollers 32 may be increased.

  The friction drive mechanism 28 provided on the Y stage 27 in each of the above embodiments can drive the drive roller 37 forward and reversely with the drive roller 37 and the backup roller 38 pressed from both sides of the Y-direction slide bar 26 from both sides. If so, the arrangement of the drive roller 37 and one backup roller 38 may be interchanged, and the number of backup rollers 38 may be increased.

  The shapes of the frames 30, 30a, and 36 of the X stage 24, 24a and the Y stage 27 may be changed as appropriate. You may change suitably the height position which arrange | positions each slide bar 22 and 26 of the X direction above the base 21, and a Y direction.

  The positioning object such as a workpiece (not shown) placed on the upper side of the transfer stage 20 provided on the top of the Y stage 27 is not preferably affected by the heat, vibration, magnetic field, etc. generated by the drive motor 40 of the Y stage 27. Is a drive provided in correspondence with the position of the drive roller 37 of the Y stage 27 which is set to be wide in the direction perpendicular to the longitudinal direction of the Y direction slide bar 26 and is brought into contact with one side surface of the Y direction slide bar 25. The position of the motor 40 can be set to a position away from the central portion of the Y stage 27, or two motors 40 arranged in parallel with a required interval between the pair of X stages 24 and 24a. A Y-direction slide bar 26 is attached, and a pair of Y stages 27 each having a friction drive mechanism 28 are individually attached to each Y-direction slide bar 26 so that each Y-stay 27, the distance between the position where the positioning object is placed on the upper side of the transfer stage 20 and the position where the drive motor 40 of the friction drive mechanism 28 of each Y stage 27 is installed is separated. It is good also as such a structure.

  Of course, various modifications can be made without departing from the scope of the present invention.

It is a partial cutting schematic plan view which shows one Embodiment of the XY stage apparatus of this invention. It is an AA direction arrow enlarged view of the apparatus of FIG. It is a BB direction arrow enlarged view of the apparatus of FIG. It is CC direction arrow enlarged view of the apparatus of FIG. It is a partially cut schematic plan view which shows the other form of implementation of this invention. It is a DD direction arrow enlarged view of FIG. It is a perspective view which shows the outline of an example of the XY stage apparatus proposed conventionally. It is a cutting | disconnection schematic side view of the XY stage apparatus of FIG. It is a general | schematic cutting top view which shows the friction drive conveyance apparatus which the present applicant has proposed. It is an EE direction arrow line view of FIG.

Explanation of symbols

21 Base 22 X direction slide bar (slide bar along one axial direction of XY Cartesian coordinate system)
23 Support member 24, 24a X stage (stage)
25 Friction drive mechanism 26 Y-direction slide bar (slide bar along the other axial direction of the XY rectangular coordinate system)
27 Y stage 28 Friction drive mechanism 31 Drive roller (roller)
32 Backup roller (roller)
34 Drive motor 37 Drive roller (roller)
38 Backup roller (roller)
40 Drive motor 41 Side roller

Claims (3)

A pair of slide bars along one axial direction of the XY Cartesian coordinate system are arranged in parallel with a predetermined interval at a required height position from the upper surface of the base, and both longitudinal ends of each slide bar are attached to a support member provided on the base of the external, the respective slide bar along one of the axial direction of the XY orthogonal coordinate system, the stage having a friction drive mechanism having a roller contacting a respective slide bar, each of said respectively attached as driven by along said friction drive mechanism in the longitudinal direction of the slide bar, further between the adjacent the respective stages, by attaching the opposite ends of the slide bar along the other axis direction XY orthogonal coordinate system, respectively A stage provided with a friction drive mechanism having a roller that is brought into contact with the slide bar on a slide bar along the other axial direction of the XY orthogonal coordinate system is Reaction force acting on the slide bar when mounted as Rika moving by the said friction drive mechanism along the longitudinal direction, the stage mounted on a slide bar along the other axis direction of the XY orthogonal coordinate system is driven the, XY stage apparatus characterized by having the structure through the stage and its friction drive mechanism attached to each slide bar along one of the axial direction of the XY orthogonal coordinate system to tell the respective slide bar.   One side roller for contacting a friction drive mechanism of each stage attached to each slide bar along one axial direction and the other axial direction of the XY orthogonal coordinate system to one side surface of the corresponding slide bar, and the one side roller Rotate using any one of a plurality of other side rollers in contact with the other side of the slide bar at both front and rear positions in the stage moving direction with respect to the roller, and one of the rollers on the one side and the other side as a driving roller. The XY stage apparatus according to claim 1, wherein the XY stage apparatus is configured to include a drive motor for driving.   A vertical one-side roller for bringing a friction drive mechanism of a stage attached to each slide bar along one axial direction of the XY orthogonal coordinate system into contact with one vertical surface of each slide bar along the one axial direction; A plurality of upside down rollers on the other side of the slide bar along the one axial direction at both the front and back sides in the stage moving direction with respect to the upside down one side roller, and the upside down one side and the other side A side roller provided with a drive motor for rotationally driving any one of the rollers on the side as a drive roller and contacting both side surfaces of each slide bar along one axial direction of the XY orthogonal coordinate system And a friction drive mechanism of a stage attached to a slide bar along the other axial direction of the XY orthogonal coordinate system. One side roller that is in contact with one side of the slide bar along the direction, and a plurality of other side surfaces that are in contact with the other side of the slide bar along the other axial direction at both front and rear positions in the stage moving direction relative to the one side roller The XY stage apparatus according to claim 1, further comprising: a side roller; and a drive motor for rotating and driving any one of the rollers on the one side surface and the other side surface as a drive roller.

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