JPH05154923A - Substrate assembling device - Google Patents
Substrate assembling deviceInfo
- Publication number
- JPH05154923A JPH05154923A JP32313891A JP32313891A JPH05154923A JP H05154923 A JPH05154923 A JP H05154923A JP 32313891 A JP32313891 A JP 32313891A JP 32313891 A JP32313891 A JP 32313891A JP H05154923 A JPH05154923 A JP H05154923A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sealant
- stage
- glass substrate
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Liquid Crystal (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は基板組立装置に係り、特
に液晶表示パネルのように2枚の基板を極めて接近させ
且つ組立作業中に塵埃を取り込まずに貼り合わすことが
できる基板組立装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate assembling apparatus, and more particularly to a substrate assembling apparatus such as a liquid crystal display panel which can bring two substrates into close proximity to each other and attach them without taking in dust during assembly. ..
【0002】[0002]
【従来の技術】従来の液晶表示パネルは透明電極や薄膜
トランジスタアレイを付けた2枚のガラス基板を数μm
程度の極めて接近した間隔をもってシール剤で貼り合わ
し、それによって形成される密閉空間に液晶を封止した
ものである。この液晶表示パネルのシール剤をガラス基
板に設ける手段として、ノズルから基板上に抵抗ペース
トを吐出させつつ基板を移動させることにより所定のパ
ターンを描画させて抵抗パターンを設ける技術を利用す
ることができ、このような従来技術として特開平2−5
2742号公報に記載のものがある。また従来の液晶表
示パネルの基板の組立にあたってはシール剤を設けたガ
ラス基板を搬送手段で貼り合わせ作業台に移し、そこで
手作業で2枚のガラス基板の面方向の位置合わせを行っ
てから、スペーサとなる粒子等をシール剤に含ませてお
くことによって数μm程度の極めて接近した間隔に2枚
のガラス基板を貼り合わせていた。2. Description of the Related Art A conventional liquid crystal display panel has two glass substrates each having a transparent electrode and a thin film transistor array of several μm.
The liquid crystal is sealed in a hermetically sealed space formed by sticking together with a sealant at extremely close intervals. As a means for providing the sealant for the liquid crystal display panel on the glass substrate, it is possible to use a technique of forming a resistance pattern by drawing a predetermined pattern by moving the substrate while discharging the resistance paste from the nozzle onto the substrate. As such a conventional technique, Japanese Patent Laid-Open No. 2-5
There is one described in Japanese Patent No. 2742. Further, when assembling a substrate of a conventional liquid crystal display panel, a glass substrate provided with a sealing agent is transferred to a work table by a transfer means, and then two glass substrates are manually aligned in the plane direction, Particles to be spacers are included in the sealant, so that two glass substrates are bonded to each other at an extremely close interval of about several μm.
【0003】[0003]
【発明が解決しようとする課題】上記従来技術の液晶表
示パネルは微細な透明電極や薄膜トランジスタアレイが
ガラス基板に設けられており、それによって構成される
画素は極めて小さいものである。したがって組立作業中
にガラス基板上に塵埃が積もって密閉空間に塵埃が取り
込まれると、その塵埃の存在する箇所は画素欠陥とな
り、モノクロ表示パネルでは欠陥部が黒点となり、また
カラー表示パネルでは欠陥部が赤・緑・青のいずれかの
色となって、画面に表示される映像が見にくいものとな
る。この液晶表示パネルのシール剤をガラス基板に設け
る手段として、上記特開平2−52742号公報に記載
のものを利用すると、そこでは基板とノズルが非接触の
状態で抵抗ペーストを吐出させ、基板を移動させて所定
の抵抗パターンを描画させており、ノズルを固定してい
ることによって基板上に塵埃が積りにくいものとなって
いる。しかしながら、ここでは抵抗パターン描画後の基
板の取扱いについては格別言及されていない。また従来
の液晶表示パネルの上記基板の組立にあたってはシール
剤を設けたガラス基板を搬送手段で貼り合わせ作業台に
移し、手作業で2枚のガラス基板の位置合わせを行って
から貼り合わせているため、その組立作業中にガラス基
板上に塵埃が積もって、密閉空間に塵埃が取り込まれる
度合いが非常に高いという問題があった。In the above-mentioned liquid crystal display panel of the prior art, fine transparent electrodes and thin film transistor arrays are provided on the glass substrate, and the pixels formed by them are extremely small. Therefore, if dust accumulates on the glass substrate during the assembly work and is taken into the enclosed space, the place where the dust exists becomes a pixel defect, the defective part becomes a black spot in the monochrome display panel, and the defective part in the color display panel. Becomes red, green, or blue, making it difficult to see the image on the screen. As a means for providing the sealant for the liquid crystal display panel on the glass substrate, the one described in JP-A-2-52742 is used, in which the resistance paste is discharged in a state where the substrate and the nozzle are not in contact with each other, and the substrate is The predetermined resistance pattern is drawn by moving the nozzle, and the fixed nozzle prevents dust from accumulating on the substrate. However, no special mention is made here of how to handle the substrate after drawing the resistance pattern. Further, when assembling the above-mentioned substrates of a conventional liquid crystal display panel, a glass substrate provided with a sealant is moved to a work table for bonding by a conveying means, and the two glass substrates are manually positioned and then bonded. Therefore, there is a problem that dust is accumulated on the glass substrate during the assembling work, and the dust is taken into the enclosed space to a very high degree.
【0004】本発明の目的は上記従来技術の問題点を解
決し、液晶表示パネルのように基板にシール剤を設けた
のち2枚の基板を極めて接近させて貼り合わせる組立作
業中に塵埃を取り込まずに貼り合わすことができる簡単
な構成の基板組立装置を提供することにある。The object of the present invention is to solve the above-mentioned problems of the prior art, and to collect dust during the assembly work in which the two substrates are brought very close to each other after the sealant is provided on the substrates as in a liquid crystal display panel and then bonded. An object of the present invention is to provide a substrate assembling device having a simple structure that can be bonded without being attached.
【0005】[0005]
【課題を解決するための手段】上記目的を達成するため
に、本発明の基板組立装置はシール剤描画ステーション
と基板貼り合わせステーションとの間を移動可能なテー
ブルと、上記シール剤描画ステーションに設けられシー
ル剤を吐出する先端が下方を向いたノズルと、上記テー
ブル上に設けられ第1の基板を搭載する少なくとも直交
方向に移動可能なステージと、上記ノズルからシール剤
を吐出させつつ上記ステージを直交方向に移動させるこ
とにより上記第1の基板にシール剤を所望のパターンで
描画させる手段と、上記テーブルが上記基板貼り合わせ
ステーションに移動されたときに第2の基板を上記ステ
ージに搭載された上記第1の基板と平行でその上方にな
るように支持する手段と、上記支持する手段で平行に配
置された上記第1と第2の両基板の対向間隔を狭めるこ
とにより両基板をシール剤で貼り合わせる手段とを備え
るようにしたものである。また上記基板組立装置におい
て、上記ステージが搭載する第1の基板をさらに上下方
向に移動可能にしたものであり、また装置の天井部と側
周の一部が網カバーで蔽われるようにしたものである。In order to achieve the above object, a substrate assembling apparatus of the present invention is provided with a table movable between a sealant drawing station and a substrate bonding station, and the sealant drawing station. A nozzle whose tip for discharging the sealant is directed downward, a stage provided on the table and movable in at least an orthogonal direction, and a stage for discharging the sealant from the nozzle A means for drawing a sealant in a desired pattern on the first substrate by moving in the orthogonal direction, and a second substrate mounted on the stage when the table is moved to the substrate bonding station. A means for supporting the first substrate in parallel to and above the first substrate, and the first means arranged in parallel by the supporting means. It is obtained by such and means for bonding both substrates with a sealing agent by narrowing the opposing interval between the second of the two substrates. In the above board assembly apparatus, the first board mounted on the stage is further movable in the vertical direction, and the ceiling and a part of the side circumference of the apparatus are covered with a net cover. Is.
【0006】[0006]
【作用】上記基板組立装置はシール剤描画ステーション
で上記ノズルからシール剤を吐出させつつ上記ステージ
を直交方向に移動させつつ第1の基板にシール剤パター
ンを描画する工程で第1の基板の上部に動くものが存在
しないため第1の基板上に塵埃が落下しないし、またシ
ール剤描画後に第1の基板がステージごと基板貼り合わ
せステーションに移動して第2の基板の下方に配置され
るため別の搬送手段が介在されないことと第1の基板の
上部で動くものが存在しないこととによって第1の基板
の移動する工程でも第1の基板上に塵埃が落下しない
し、さらに両基板の貼り合わせ工程では上下で平行に配
置された両基板の対向間隔を狭めることにより両基板が
貼り合わされるため両基板の間に動くものが存在しない
ことによって第1の基板上に塵埃が落下しないし、この
ように組立作業の如何なる工程でも第1の基板上に塵埃
が落下しないため両基板のシール剤による貼り合わせで
形成される空間内に塵埃が取り込まれることがなく、装
置の構成も簡単にできる。また上記ステージは搭載する
第1の基板をさらに上下方向に移動させることが可能で
あることにより装置構成をさらに簡単にすることが可能
であり、さらに装置の天井部と側周の一部は網カバーで
蔽われることによって装置をダウンフロー式クリーンル
ームに置いて空気流で装置内の塵埃が外部に排出され
る。In the substrate assembling apparatus, the sealing agent drawing station discharges the sealing agent from the nozzle and moves the stage in the orthogonal direction to draw a sealing agent pattern on the first substrate. Since there is no moving object, dust does not drop on the first substrate, and after drawing the sealant, the first substrate moves to the substrate bonding station together with the stage and is arranged below the second substrate. Due to the absence of another transfer means and the fact that there is nothing moving above the first substrate, dust does not drop onto the first substrate even in the step of moving the first substrate, and further the bonding of both substrates is prevented. In the aligning step, since the two substrates, which are vertically arranged in parallel with each other, are narrowed to face each other so that the two substrates are bonded together, there is no moving object between the two substrates. Since dust does not fall onto the plate and thus does not fall onto the first substrate in any step of the assembly work, dust may be taken into the space formed by bonding the two substrates with the sealant. Also, the configuration of the device can be simplified. In addition, the stage can further simplify the device configuration by moving the mounted first substrate further in the vertical direction, and further, the ceiling part and a part of the side circumference of the device are screened. By being covered with the cover, the device is placed in a downflow type clean room, and dust inside the device is discharged to the outside by an air flow.
【0007】[0007]
【実施例】以下に本発明の一実施例を図1から図3によ
り説明する。図1は本発明による基板組立装置の一実施
例を示す液晶表示パネル組立装置の正面図である。図1
において、液晶表示パネル組立装置1はシール剤描画ス
テーションS1と、基板貼り合わせステーションS2と
の2部分から構成され、この両ステーションS1,S2
は隣接して並べられている。基台2の上方に支柱2aで
梁持された架台3があり、基台2の上面には両ステーシ
ョンS1,S2に亘るレール7を備えている。このレー
ル7上をステージ移動テーブル4がステージ駆動モータ
6により、図面上で左右に即ち両ステーションS1,S
2間を移動できるようになっている。テーブル4上には
XYθステージ5およびその上面で第1のガラス基板1
3を真空吸着などにより支持する下側吸着テーブル8が
載置されている。ここでXYθステージ5について説明
するに、第1のガラス基板13が水平に搭載されている
とすると、第1のガラス基板13を水平にX軸・Y軸方
向に移動させるとともに、第1のガラス基板13を水平
に回転すなわちθ軸移動させるものであり、もし第1の
ガラス基板13がXY方向に正確に配置されるならばθ
軸移動は不要である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a front view of a liquid crystal display panel assembling apparatus showing an embodiment of a substrate assembling apparatus according to the present invention. Figure 1
In FIG. 1, the liquid crystal display panel assembling apparatus 1 is composed of two parts, a sealant drawing station S1 and a substrate bonding station S2. Both stations S1 and S2.
Are adjacent to each other. A pedestal 3 supported by a column 2a is provided above the base 2, and a rail 7 extending over both stations S1 and S2 is provided on the upper surface of the base 2. On the rail 7, the stage moving table 4 is moved by the stage drive motor 6 to the left and right in the drawing, that is, both stations S1, S.
You can move between the two. The XYθ stage 5 and the first glass substrate 1 on the upper surface of the XYθ stage 5 are placed on the table 4.
A lower suction table 8 that supports 3 by vacuum suction or the like is placed. Here, the XYθ stage 5 will be described. If the first glass substrate 13 is mounted horizontally, the first glass substrate 13 is moved horizontally in the X-axis and Y-axis directions, and the first glass substrate 13 is moved. The substrate 13 is rotated horizontally, that is, moved by the θ axis, and if the first glass substrate 13 is accurately arranged in the XY directions, then θ
No axis movement is required.
【0008】上記レール7と対面するシール剤描画ステ
ーションS1部の架台3にはZ軸駆動モータ9によって
上下に移動するZ軸移動テーブル10が設けられてい
る。このテーブル10には光学式非接触変位計11とノ
ズルを持つシール剤吐出機12とが取付けられており、
そのノズル先端は下方の第1のガラス基板13を向いて
いる。一方の上記レール7と対面する基板貼り合わせス
テーションS2部の架台3の上部には、さらに支柱2b
で梁持された架台18に加圧用駆動機構17が載置さ
れ、その下方に延びたボールねじ17aを介して該駆動
機構17で架台3の下側に設けられた加圧吸着テーブル
15を上下に移動するようになっている。この加圧吸着
テーブル15はその下面に第2のガラス基板14を上記
第1のガラス基板13と平行になるように真空吸着など
により水平に吊り下げる形に支持するようになってい
る。またこのテーブル15には2箇所に孔15a,15
bが穿けられており、このテーブル15に穿けられた孔
15a,15bに対応する架台3の部署にはCCD内蔵
の画像認識用カメラ16a,16bが取付けられてい
る。この両カメラ16a,16bは下方を向いており、
従ってカメラ16a,16bはテーブル15の両孔15
a,15bを通して第2のガラス基板14などの下部に
存在する物体を確認することができる。なおこの液晶表
示パネル組立装置には上記した各駆動部の図示していな
い制御装置が設けられている。A Z-axis moving table 10 which moves up and down by a Z-axis drive motor 9 is provided on the pedestal 3 of the sealing agent drawing station S1 portion facing the rail 7. An optical non-contact displacement gauge 11 and a sealant ejector 12 having a nozzle are attached to the table 10.
The tip of the nozzle faces the first glass substrate 13 below. On the upper part of the pedestal 3 of the substrate bonding station S2 portion facing one of the rails 7, there is a support 2b.
The pressurizing drive mechanism 17 is mounted on the gantry 18 supported by the. The pressurizing suction table 15 provided on the lower side of the gantry 3 is vertically moved by the drive mechanism 17 via the ball screw 17a extending downward. To move to. The pressure adsorption table 15 supports the second glass substrate 14 on its lower surface so as to be horizontally suspended by vacuum adsorption or the like so as to be parallel to the first glass substrate 13. The table 15 has holes 15a, 15 at two locations.
Image recognition cameras 16a and 16b with built-in CCDs are attached to the sections of the gantry 3 corresponding to the holes 15a and 15b formed in the table 15. Both cameras 16a and 16b face downwards,
Therefore, the cameras 16a and 16b are installed in both holes 15 of the table 15.
Objects existing under the second glass substrate 14 or the like can be confirmed through a and 15b. The liquid crystal display panel assembling apparatus is provided with a control device (not shown) for each of the drive units described above.
【0009】図2は図1の液晶表示パネル組立装置の動
作説明用の概略図である。つぎに図2により図1の液晶
表示パネル組立装置の動作および機能を説明する。なお
図2ではXYθステージ5および下側吸着テーブル8を
貼り合わせステーションS2に移動させた場合を2点鎖
線で示し、その各々に5φ,8φの符号を符した。図2
において、初めに貼り合わせステーションS2にステー
ジ移動テーブル4が基台2上のレール7上を図1のステ
ージ駆動モータ6により走行されると、XYθステージ
5φ上の下側吸着テーブル8φ上にアダプタ14aを介
して第2のガラス基板14が載置される。このアダプタ
14aは第2のガラス基板14の下面が下側吸着テーブ
ル8φに接触することを阻止するためのもので、第2の
ガラス基板14の周縁を支持する額縁状のものである。
ここで両カメラ16a,16bで第2のガラス基板14
に設けられた図示していない位置合わせマークを読み取
りつつ、第2のガラス基板14が貼り合わせステーショ
ンS2の所定位置に置かれるようにXYθステージ5φ
を制御する。次いで図1の加圧用駆動機構17で加圧吸
着テーブル15を下方に移動させて、第2のガラス基板
14を該テーブル15で水平に吊り下げる形に吸着支持
し、そのまま駆動機構17で加圧吸着テーブル15を介
して第2のガラス基板14を上方に移動させて待機さ
せ、そしてアダプタ14aは除去される。この動作で塵
埃が遊離しても塵埃を避ける必要のない第2のガラス基
板14上面に落下するだけで何等の問題がない。FIG. 2 is a schematic view for explaining the operation of the liquid crystal display panel assembling apparatus of FIG. The operation and function of the liquid crystal display panel assembling apparatus shown in FIG. 1 will be described with reference to FIG. Note that, in FIG. 2, the case where the XYθ stage 5 and the lower suction table 8 are moved to the bonding station S2 is shown by a chain double-dashed line, and the symbols 5φ and 8φ are assigned to each of them. Figure 2
First, when the stage moving table 4 is first moved to the bonding station S2 on the rail 7 on the base 2 by the stage drive motor 6 of FIG. 1, the adapter 14a is placed on the lower suction table 8φ on the XYθ stage 5φ. The second glass substrate 14 is placed via the. This adapter 14a is for preventing the lower surface of the second glass substrate 14 from coming into contact with the lower suction table 8φ, and is a frame-shaped one that supports the peripheral edge of the second glass substrate 14.
Here, the second glass substrate 14 is used by both cameras 16a and 16b.
XYθ stage 5φ so that the second glass substrate 14 is placed at a predetermined position of the bonding station S2 while reading the alignment mark (not shown) provided in
To control. Then, the pressurization drive mechanism 17 of FIG. 1 moves the pressurization adsorption table 15 downward to adsorb and support the second glass substrate 14 so that the second glass substrate 14 is horizontally suspended by the table 15, and the drive mechanism 17 pressurizes the second glass substrate 14 horizontally. The second glass substrate 14 is moved upward through the suction table 15 to stand by, and the adapter 14a is removed. Even if dust is released by this operation, it does not need to avoid the dust and only falls onto the upper surface of the second glass substrate 14, which causes no problem.
【0010】次に下側吸着テーブル8φ上に第1のガラ
ス基板13を載置し、そして第1のガラス基板13が貼
り合わせステーションS2の所定位置に置かれるように
XYθステージ5φを制御する。ここで第1のガラス基
板13の位置合わせが終わったら、今度はXYθステー
ジ5φをシール剤描画ステーションS1に移動させる。
次にシール剤描画ステーションS1で、Z軸移動テーブ
ル10上の光学式非接触変位計11の出力により図1の
Z軸駆動モータ9を制御して、Z軸移動テーブル10上
のシール剤吐出機12のノズル先端と下側吸着テーブル
8上の第1のガラス基板13上面とのギャップを設定す
る。この動作でギャップ設定のためのシール剤吐出機1
2のノズル移動距離はわずかであり、これによる塵埃の
遊離は殆どない。また塵埃の遊離を極度に嫌う場合に
は、図2中に1点鎖線で示すようにシール剤吐出機12
のZ軸移動テーブル10を含む駆動部を密閉し、その密
閉空間を真空引きすればよい。そしてXYθステージ5
を所定の描画パターンに従ってXY方向に移動させつ
つ、シール剤吐出機12のノズルからシール剤を吐出さ
せて、シール剤の第1のガラス基板13への塗布を行
う。この描きたいシール剤パターンは図示していない。
また図示していない制御装置で所謂パソコン描画パター
ンを格納記憶させておくことによって、同じ描画パター
ンを何枚もの第1のガラス基板13への塗布を行うこと
が可能であり、また格納データの変更で各種の描画パタ
ーンを得ることもできる。この動作でシール剤の吐出描
画中に第1のガラス基板13の上部で動くものが存在し
ないため、第1のガラス基板13の上面への塵埃の落下
はない。Next, the first glass substrate 13 is placed on the lower suction table 8φ, and the XYθ stage 5φ is controlled so that the first glass substrate 13 is placed at a predetermined position of the bonding station S2. When the alignment of the first glass substrate 13 is completed, the XYθ stage 5φ is moved to the sealant drawing station S1 this time.
Next, in the sealant drawing station S1, the Z-axis drive motor 9 of FIG. 1 is controlled by the output of the optical non-contact displacement gauge 11 on the Z-axis movable table 10, and the sealant ejector on the Z-axis movable table 10 is controlled. A gap between the tip of the nozzle 12 and the upper surface of the first glass substrate 13 on the lower suction table 8 is set. With this operation, the sealant ejector 1 for setting the gap
The nozzle moving distance of 2 is small, and dust is hardly released due to this. Further, in the case where the release of dust is extremely disliked, the sealant ejector 12 is used as indicated by the one-dot chain line in FIG.
The drive unit including the Z-axis moving table 10 may be sealed, and the sealed space may be evacuated. And XYθ stage 5
While moving in the XY directions in accordance with a predetermined drawing pattern, the sealant is discharged from the nozzle of the sealant discharger 12 to apply the sealant to the first glass substrate 13. The sealant pattern to be drawn is not shown.
Further, by storing and storing a so-called personal computer drawing pattern in a control device (not shown), it is possible to apply the same drawing pattern to many first glass substrates 13 and change stored data. Various drawing patterns can be obtained with. With this operation, there is no object that moves above the first glass substrate 13 during the discharge drawing of the sealant, so that dust does not drop onto the upper surface of the first glass substrate 13.
【0011】次に該シール剤塗布終了後にXYθステー
ジ5は再び貼り合わせステーションS2に移動されて、
初めに第2のガラス基板14を抱えた加圧吸着テーブル
15の真下に位置決めされる。この動作でも第1のガラ
ス基板13はXYθステージ5および下側吸着テーブル
8ごと第2のガラス基板14の下方に配置され、別の搬
送手段が介在されないことと第1のガラス基板13の上
部で動くものが存在しないことによって、第1のガラス
基板13の移動に際しても第1のガラス基板13の上面
に塵埃が落下しない。さらに別の搬送手段を必要としな
いので簡単な装置構成となっている。次に両カメラ16
a,16bの焦点を第1のガラス基板13の図示してい
ない位置合わせマークに合わせ、両カメラ16a,16
bでマークを読み取りながらXYθステージ5φを駆動
制御して、第1のガラス基板13と第2のガラス基板1
4との凡その位置合わせを行う。そして図1の加圧用駆
動機構17で加圧吸着テーブル15を下方に徐々に移動
させて、両カメラ16a,16bで第2のガラス基板1
4の図示していない位置合わせマークが読み取れるよう
になったら、XYθステージ5φを駆動制御して第1の
ガラス基板13と第2のガラス基板14との正確な位置
合わせを行いつつ、加圧吸着テーブル15をさらに徐々
に下降させて2枚のガラス基板13,14をシール剤で
貼り合わせる。この動作で両ガラス基板13,14の貼
り合わせでは、両ガラス基板13,14の間に動くもの
が存在しないことによって、第1のガラス基板13の上
面に塵埃が落下しない。以上のように組立作業の如何な
る工程でも第1のガラス基板13の上面に塵埃が落下し
ないため、両ガラス基板13,14のシール剤による貼
り合わせで形成される空間内に塵埃が取り込まれること
がない。また以上のシール剤描画工程と、基板貼り合わ
せ工程と、そのシール剤描画と基板貼り合わせの両ステ
ーション間の移動工程とは簡単なシーケンス制御で処理
できるので、図示していない制御装置により一連の動作
をプログラム化してパソコンで制御してもよい。Next, after the application of the sealing agent is completed, the XYθ stage 5 is moved again to the bonding station S2,
First, the second glass substrate 14 is positioned immediately below the pressure adsorption table 15 holding the second glass substrate 14. Even in this operation, the first glass substrate 13 is arranged below the second glass substrate 14 together with the XYθ stage 5 and the lower suction table 8, so that another transport means is not interposed and the first glass substrate 13 is provided above the first glass substrate 13. Since there is no moving object, dust does not drop on the upper surface of the first glass substrate 13 even when the first glass substrate 13 moves. Further, since another transport means is not required, the device configuration is simple. Next, both cameras 16
The focal points of a and 16b are aligned with an alignment mark (not shown) of the first glass substrate 13 and the two cameras 16a and 16b are aligned.
The XYθ stage 5φ is driven and controlled while the mark is read by b, and the first glass substrate 13 and the second glass substrate 1 are controlled.
Approximately align with 4. Then, the pressurizing drive mechanism 17 of FIG. 1 gradually moves the pressurizing / sucking table 15 downward so that the second glass substrate 1 is moved by the cameras 16a and 16b.
4, when the alignment mark (not shown) can be read, the XYθ stage 5φ is drive-controlled to perform accurate alignment between the first glass substrate 13 and the second glass substrate 14 and pressurize and adsorb. The table 15 is further gradually lowered to bond the two glass substrates 13 and 14 with a sealant. With this operation, when the two glass substrates 13 and 14 are bonded together, since there is nothing moving between the two glass substrates 13 and 14, dust does not drop on the upper surface of the first glass substrate 13. As described above, since dust does not fall onto the upper surface of the first glass substrate 13 in any step of the assembling work, dust may be taken into the space formed by bonding the glass substrates 13 and 14 with the sealant. Absent. Further, since the above-mentioned sealing agent drawing step, substrate bonding step, and moving step between the sealing agent drawing and substrate bonding stations can be performed by simple sequence control, a series of operations can be performed by a controller (not shown). The operation may be programmed and controlled by a personal computer.
【0012】図3は図1の液晶表示パネル組立装置の外
観の斜視図である。図3において、図1の液晶表示パネ
ル組立装置1の前面と裏面の下部には網カバー19,2
0が設けられ、両側面には蔽いカバー21,22が設け
られ、蔽いカバー22の脇に各駆動部の図示していない
制御装置の制御パネル23が設置されている。また天井
には網カバー24が設けられ、前面の上部にはアクリル
製の透明カバー25が設けられて内部が見えるようにな
っている。本液晶表示パネル組立装置1はダウンフロー
式クリーンルームに置かれ、矢印Aで示した空気が流さ
れると、装置1に天井の網カバー24から入った空気は
矢印B,Cで示すように装置1の前面と裏面の下部の網
カバー19,20から流出し、その空気流で装置1内の
塵埃は外部に排出される。FIG. 3 is a perspective view of the appearance of the liquid crystal display panel assembling apparatus shown in FIG. In FIG. 3, the net covers 19 and 2 are provided on the lower portions of the front and back surfaces of the liquid crystal display panel assembling apparatus 1 of FIG.
0, the cover covers 21 and 22 are provided on both sides, and the control panel 23 of the control device (not shown) for each drive unit is installed beside the cover cover 22. Further, a net cover 24 is provided on the ceiling, and an acrylic transparent cover 25 is provided on the upper part of the front surface so that the inside can be seen. The liquid crystal display panel assembling apparatus 1 is placed in a downflow type clean room, and when the air shown by the arrow A is flowed, the air that has entered the apparatus 1 from the net cover 24 of the ceiling is shown by the arrows B and C. Out of the net covers 19 and 20 at the lower part of the front and back surfaces of the device, and the dust in the device 1 is discharged to the outside by the air flow.
【0013】本基板組立装置は以下の態様で実施でき
る。第1の態様は図1のZ軸移動テーブル10に代えて
Z軸移動テーブルをXYθステージ5に設け、シール剤
描画ステーションS1部の架台3にノズルを持つシール
剤吐出機12および光学式非接触変位計11を直接固定
し、該Z軸移動テーブルでシール剤吐出機12のノズル
先端と下側吸着テーブル8上の第1のガラス基板13と
のギャップを設定するようにしたものである。この態様
はシール剤描画ステーションS1では下側吸着テーブル
8に載置される第1の基板13の上方に可動部が全く存
在しないため、第1の基板13への塵埃の落下が皆無で
ある。第2の態様は図1の基板貼り合わせステーション
S2における加圧用駆動機構17および架台18を省略
し、架台3に第2の基板14の吸着テーブル15を直接
固定して、Z軸移動テーブルをXYθステージ5に設
け、該Z軸移動テーブルで第2の基板14を上昇させて
吸着テーブル15に吸着固定し、また3枚の基板13,
14を貼り合わせるようにしたものである。この態様は
基板貼り合わせステーションS2では吸着テーブル15
の上方に可動部が全く存在せず、塵埃の第1の基板13
への落下が皆無であり、また加圧用駆動機構17と架台
18の省略により装置構成が一層簡略化できる。第3の
態様は基板吸着機能をXYθステージ5に設けて、下側
吸着テーブル8を省略したものである。この態様はステ
ージ移動テーブル4上に乗せられる部材が減少して、軽
量化によりステージ移動テーブル4の走行が軽快にな
る。第4の態様はシール剤の固定化仕様に応じて、シー
ル剤固化のための紫外線照射手段等をシール剤描画ステ
ーションS1と基板貼り合わせステーションS2のいず
れかに設けたものである。この態様はシール剤の固化の
ための別置きの装置を必要とせず、装置構成を簡略化で
きる。The substrate assembly apparatus can be implemented in the following modes. In the first mode, a Z-axis moving table 10 is provided on the XYθ stage 5 instead of the Z-axis moving table 10 of FIG. 1, and a sealant ejecting machine 12 having a nozzle on the frame 3 of the sealant drawing station S1 and an optical non-contact type. The displacement meter 11 is directly fixed, and the gap between the tip of the nozzle of the sealant discharger 12 and the first glass substrate 13 on the lower suction table 8 is set by the Z-axis moving table. In this mode, in the sealant drawing station S1, there is no movable portion above the first substrate 13 placed on the lower suction table 8, so that no dust is dropped onto the first substrate 13. In the second mode, the pressing drive mechanism 17 and the gantry 18 in the substrate bonding station S2 of FIG. 1 are omitted, the suction table 15 of the second substrate 14 is directly fixed to the gantry 3, and the Z-axis moving table is changed to XYθ. The second substrate 14 is provided on the stage 5 and is raised by the Z-axis moving table to be fixed to the suction table 15 by suction.
14 is attached. In this mode, the suction table 15 is used in the substrate bonding station S2.
No moving parts above the first substrate 13
There is no drop into the device, and the device structure can be further simplified by omitting the pressurizing drive mechanism 17 and the gantry 18. In the third mode, the substrate suction function is provided on the XYθ stage 5, and the lower suction table 8 is omitted. In this mode, the number of members placed on the stage moving table 4 is reduced, and the traveling of the stage moving table 4 becomes lighter due to the weight reduction. In the fourth aspect, an ultraviolet irradiation means for solidifying the sealant or the like is provided in either the sealant drawing station S1 or the substrate bonding station S2 according to the fixing specification of the sealant. This mode does not require a separate device for solidifying the sealant, and can simplify the device configuration.
【0014】[0014]
【発明の効果】以上説明したように本発明によれば、液
晶表示パネルのように2枚の基板を接近させてシール剤
で貼り合わせる基板組立装置での組立作業中に塵埃を取
り込まずに貼り合わすことができ、また基板組立装置の
構成を簡単にできる効果がある。As described above, according to the present invention, like a liquid crystal display panel, two substrates are brought close to each other and pasted with a sealant without sticking dust during assembly work in a substrate assembling apparatus. There is an effect that they can be combined and the structure of the board assembling apparatus can be simplified.
【図1】図1は本発明による基板組立装置の一実施例を
示す液晶表示パネル組立装置の正面図FIG. 1 is a front view of a liquid crystal display panel assembling apparatus showing an embodiment of a substrate assembling apparatus according to the present invention.
【図2】図2は図1の動作説明用の概略図FIG. 2 is a schematic diagram for explaining the operation of FIG.
【図3】図3は図1の外観の斜視図FIG. 3 is a perspective view of the appearance of FIG.
S1…シール剤描画ステーション、S2…基板貼り合わ
せステーション、4…ステージ移動テーブル、5…XY
θステージ、7…レール、8…下側吸着テーブル、10
…Z軸移動テーブル、11…光学式非接触変位計、12
…ノズルを持つシール剤吐出機、13…第1の基板、1
4…第2の基板、15…加圧吸着テーブル、16a,1
6b…カメラ、17…加圧用駆動機構、19,20,2
4…網カバー。S1 ... Sealing agent drawing station, S2 ... Substrate bonding station, 4 ... Stage moving table, 5 ... XY
θ stage, 7 ... Rail, 8 ... Lower suction table, 10
... Z-axis moving table, 11 ... Optical non-contact displacement meter, 12
... Sealant ejector with nozzle, 13 ... First substrate, 1
4 ... 2nd board | substrate, 15 ... Pressure adsorption table, 16a, 1
6b ... Camera, 17 ... Pressure drive mechanism, 19, 20, 2
4 ... Net cover.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 石田 茂 茨城県竜ヶ崎市向陽台5丁目2番 日立テ クノエンジニアリング株式会社開発研究所 内 (72)発明者 三階 春夫 茨城県竜ヶ崎市向陽台5丁目2番 日立テ クノエンジニアリング株式会社開発研究所 内 (72)発明者 近藤 克己 茨城県日立市久慈町4026番地 株式会社日 立製作所日立研究所内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Shigeru Ishida 5-2 Koyodai, Ryugasaki-shi, Ibaraki Hitachi Techno Engineering Co., Ltd. Research & Development Laboratory (72) Haruo Sankai 5-2 Koyodai, Ryugasaki-shi, Ibaraki Hitachi Techno Engineering Co., Ltd. Research & Development Laboratory (72) Inventor Katsumi Kondo 4026, Kuji Town, Hitachi City, Ibaraki Prefecture Hitachi Research Laboratory, Hitachi Co., Ltd.
Claims (3)
わせステーションとの間を移動可能なテーブルと、上記
シール剤描画ステーションに設けられシール剤を吐出す
る先端が下方を向いたノズルと、上記テーブル上に設け
られ第1の基板を搭載する少なくとも直交方向に移動可
能なステージと、上記ノズルからシール剤を吐出させつ
つ上記ステージを直交方向に移動させることにより上記
第1の基板にシール剤を所望のパターンで描画させる手
段と、上記テーブルが上記基板貼り合わせステーション
に移動されたときに第2の基板を上記ステージに搭載さ
れた上記第1の基板と平行でその上方になるように支持
する手段と、上記支持する手段で平行に配置された上記
第1と第2の両基板の対向間隔を狭めることにより両基
板をシール剤で貼り合わせる手段とを備えたことを特徴
とする基板組立装置。1. A table movable between a sealing agent drawing station and a substrate bonding station, a nozzle provided in the sealing agent drawing station, the tip of which discharges the sealing agent facing downward, and the table above the table. A stage provided with the first substrate, which is movable in at least an orthogonal direction, and a desired pattern of the sealing agent on the first substrate by moving the stage in the orthogonal direction while discharging the sealing agent from the nozzle. And a means for supporting the second substrate so as to be parallel to and above the first substrate mounted on the stage when the table is moved to the substrate bonding station. By narrowing the facing interval between the first and second substrates arranged in parallel by the supporting means, both substrates are bonded with a sealant. A substrate assembling apparatus comprising: a unit for aligning.
上記ステージは搭載する第1の基板をさらに上下方向に
移動可能であることを特徴とする基板組立装置。2. The board assembling apparatus according to claim 1,
The substrate assembling apparatus, wherein the stage is capable of further moving the mounted first substrate in the vertical direction.
その天井部と側周の一部とが網カバーで蔽われたことを
特徴とする基板組立装置。3. The board assembly apparatus according to claim 1,
A board assembling apparatus characterized in that a ceiling cover and a part of a side periphery are covered with a net cover.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32313891A JP2609386B2 (en) | 1991-12-06 | 1991-12-06 | Board assembly equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32313891A JP2609386B2 (en) | 1991-12-06 | 1991-12-06 | Board assembly equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH05154923A true JPH05154923A (en) | 1993-06-22 |
JP2609386B2 JP2609386B2 (en) | 1997-05-14 |
Family
ID=18151512
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP32313891A Expired - Fee Related JP2609386B2 (en) | 1991-12-06 | 1991-12-06 | Board assembly equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2609386B2 (en) |
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