JPH05154923A - Substrate assembling device - Google Patents

Substrate assembling device

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Publication number
JPH05154923A
JPH05154923A JP32313891A JP32313891A JPH05154923A JP H05154923 A JPH05154923 A JP H05154923A JP 32313891 A JP32313891 A JP 32313891A JP 32313891 A JP32313891 A JP 32313891A JP H05154923 A JPH05154923 A JP H05154923A
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Japan
Prior art keywords
substrate
table
sealant
stage
substrates
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Granted
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JP32313891A
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Japanese (ja)
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JP2609386B2 (en
Inventor
Shigeru Ishida
Katsumi Kondo
Haruo Sankai
Fukuo Yoneda
春夫 三階
茂 石田
福男 米田
克己 近藤
Original Assignee
Hitachi Ltd
Hitachi Techno Eng Co Ltd
日立テクノエンジニアリング株式会社
株式会社日立製作所
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Priority to JP32313891A priority Critical patent/JP2609386B2/en
Publication of JPH05154923A publication Critical patent/JPH05154923A/en
Application granted granted Critical
Publication of JP2609386B2 publication Critical patent/JP2609386B2/en
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Application status is Expired - Fee Related legal-status Critical

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Abstract

PURPOSE: To obtain a device, by which substrates can be pasted together with sealant with no introduction of dust during assembling work.
CONSTITUTION: A table 4, which travels between sealant drawing station S1 and substrate pasting station S2, is provided. Further, first substrate 13 is mounted on a stage 5, which travels on the table 4 normal to the travelling direction of the table 4, so as to emit sealant from an emitter, on which a downward directing nozzle tip is provided, and simultaneously move the stage to normal direction in order to draw pattern in S1. Second substrate 14 is horizontally hung with suction table 15 in S2. By moving the table 4 to S2, the first substrate is arranged below the second substrate. Finally, by narrowing the opposing interval between both the substrates, the substrates are pasted together.
COPYRIGHT: (C)1993,JPO&Japio

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【産業上の利用分野】本発明は基板組立装置に係り、特に液晶表示パネルのように2枚の基板を極めて接近させ且つ組立作業中に塵埃を取り込まずに貼り合わすことができる基板組立装置に関する。 The present invention relates relates to a substrate assembly apparatus, particularly to a substrate assembly apparatus that can match stick without incorporated dust extremely approaching the allowed and assembly operation the two substrates as a liquid crystal display panel .

【0002】 [0002]

【従来の技術】従来の液晶表示パネルは透明電極や薄膜トランジスタアレイを付けた2枚のガラス基板を数μm Conventional liquid crystal display panel is the number of two glass substrates which attached a transparent electrode or a thin film transistor array μm
程度の極めて接近した間隔をもってシール剤で貼り合わし、それによって形成される密閉空間に液晶を封止したものである。 Awashi bonded with a sealing agent with a very close spacing of the extent, in which sealing a liquid crystal in a sealed space formed thereby. この液晶表示パネルのシール剤をガラス基板に設ける手段として、ノズルから基板上に抵抗ペーストを吐出させつつ基板を移動させることにより所定のパターンを描画させて抵抗パターンを設ける技術を利用することができ、このような従来技術として特開平2−5 As a means of providing a sealant for the liquid crystal display panel in a glass substrate, it is possible to use a technique for providing a resistor pattern by drawing a predetermined pattern by moving the substrate while ejecting the resistance paste on a substrate from a nozzle , JP-2-5 as such prior art
2742号公報に記載のものがある。 It is disclosed in 2742 JP. また従来の液晶表示パネルの基板の組立にあたってはシール剤を設けたガラス基板を搬送手段で貼り合わせ作業台に移し、そこで手作業で2枚のガラス基板の面方向の位置合わせを行ってから、スペーサとなる粒子等をシール剤に含ませておくことによって数μm程度の極めて接近した間隔に2枚のガラス基板を貼り合わせていた。 Also after performing transferred to workbench bonding the glass substrate provided with sealing agent conveying means when the assembly of the substrate of the conventional liquid crystal display panel, where the two alignment surface direction of the glass substrate by hand, had bonding two glass substrates to very close spacing of about several μm by made to contain the particles or the like serving as a spacer sealant.

【0003】 [0003]

【発明が解決しようとする課題】上記従来技術の液晶表示パネルは微細な透明電極や薄膜トランジスタアレイがガラス基板に設けられており、それによって構成される画素は極めて小さいものである。 [0007] The prior art liquid crystal display panel has a fine transparent electrode and a thin film transistor array is provided on a glass substrate, a pixel composed of it is very small. したがって組立作業中にガラス基板上に塵埃が積もって密閉空間に塵埃が取り込まれると、その塵埃の存在する箇所は画素欠陥となり、モノクロ表示パネルでは欠陥部が黒点となり、またカラー表示パネルでは欠陥部が赤・緑・青のいずれかの色となって、画面に表示される映像が見にくいものとなる。 Therefore, when dust on the glass substrate during the assembly work is dust taken into the sealed space accumulated, the present location of the dust becomes pixel defect, the defect portion becomes black dots in monochrome display panel, also defective portion is a color display panel There become one of the colors of red, green, and blue, becomes hard to see the video to be displayed on the screen. この液晶表示パネルのシール剤をガラス基板に設ける手段として、上記特開平2−52742号公報に記載のものを利用すると、そこでは基板とノズルが非接触の状態で抵抗ペーストを吐出させ、基板を移動させて所定の抵抗パターンを描画させており、ノズルを固定していることによって基板上に塵埃が積りにくいものとなっている。 As a means of providing a sealant for the liquid crystal display panel on the glass substrate, the use of those described in JP-A Hei 2-52742, wherein a discharging the resistive paste board and the nozzle is in a non-contact state, the substrate the moved by and by drawing a predetermined resistance pattern, dust has become a food estimates on the substrate by holding the nozzle. しかしながら、ここでは抵抗パターン描画後の基板の取扱いについては格別言及されていない。 However, not particularly mention the handling of the substrate after the resistor pattern drawing here. また従来の液晶表示パネルの上記基板の組立にあたってはシール剤を設けたガラス基板を搬送手段で貼り合わせ作業台に移し、手作業で2枚のガラス基板の位置合わせを行ってから貼り合わせているため、その組立作業中にガラス基板上に塵埃が積もって、密閉空間に塵埃が取り込まれる度合いが非常に高いという問題があった。 Also transferred to workbench bonding the glass substrate provided with sealing agent conveying means when the assembly of the substrate of the conventional liquid crystal display panel, are bonded after performing the alignment of the two glass substrates by hand Therefore, the in during assembly work accumulated dust on the glass substrate, the degree to which dust is taken into the closed space there is a problem that very high.

【0004】本発明の目的は上記従来技術の問題点を解決し、液晶表示パネルのように基板にシール剤を設けたのち2枚の基板を極めて接近させて貼り合わせる組立作業中に塵埃を取り込まずに貼り合わすことができる簡単な構成の基板組立装置を提供することにある。 An object of the present invention is to solve the problems of the prior art, incorporated dust during assembly operations for bonding to a substrate a sealing material highly to approximate two substrates after providing the like of the liquid crystal display panel it is to provide a substrate assembly apparatus having a simple configuration that can match stick without.

【0005】 [0005]

【課題を解決するための手段】上記目的を達成するために、本発明の基板組立装置はシール剤描画ステーションと基板貼り合わせステーションとの間を移動可能なテーブルと、上記シール剤描画ステーションに設けられシール剤を吐出する先端が下方を向いたノズルと、上記テーブル上に設けられ第1の基板を搭載する少なくとも直交方向に移動可能なステージと、上記ノズルからシール剤を吐出させつつ上記ステージを直交方向に移動させることにより上記第1の基板にシール剤を所望のパターンで描画させる手段と、上記テーブルが上記基板貼り合わせステーションに移動されたときに第2の基板を上記ステージに搭載された上記第1の基板と平行でその上方になるように支持する手段と、上記支持する手段で平行に配置された上記第1 Means for Solving the Problems] To achieve the above object, a table movable between the substrate assembly apparatus of the present invention the sealant drawing station and the substrate bonding station, provided in the sealant drawing station is a nozzle tip for discharging the sealant is directed downward, and movable in at least a direction orthogonal stage mounting the first substrate provided on the table, the stage while ejecting the sealant from the nozzle and means for drawing a sealing agent to the first substrate in a desired pattern by moving in the orthogonal direction, a second substrate mounted on the stage when said table has been moved to the substrate bonding station means and said first arranged parallel to at means for the support for supporting such that the upper parallel to the first substrate 第2の両基板の対向間隔を狭めることにより両基板をシール剤で貼り合わせる手段とを備えるようにしたものである。 It is obtained by such and means for bonding both substrates with a sealing agent by narrowing the opposing interval between the second of the two substrates. また上記基板組立装置において、上記ステージが搭載する第1の基板をさらに上下方向に移動可能にしたものであり、また装置の天井部と側周の一部が網カバーで蔽われるようにしたものである。 In the above substrate assembly apparatus, are as hereinbefore movable in further vertically a first substrate on which the stage is mounted, also those ceiling and a side peripheral portion of the device is to be covered with a net cover it is.

【0006】 [0006]

【作用】上記基板組立装置はシール剤描画ステーションで上記ノズルからシール剤を吐出させつつ上記ステージを直交方向に移動させつつ第1の基板にシール剤パターンを描画する工程で第1の基板の上部に動くものが存在しないため第1の基板上に塵埃が落下しないし、またシール剤描画後に第1の基板がステージごと基板貼り合わせステーションに移動して第2の基板の下方に配置されるため別の搬送手段が介在されないことと第1の基板の上部で動くものが存在しないこととによって第1の基板の移動する工程でも第1の基板上に塵埃が落下しないし、さらに両基板の貼り合わせ工程では上下で平行に配置された両基板の対向間隔を狭めることにより両基板が貼り合わされるため両基板の間に動くものが存在しないことによって第1の [Action] upper part of the first substrate in the step of drawing the sealant pattern to the first substrate while moving the stage in the perpendicular direction while discharging the sealing material from the nozzle above the substrate assembly apparatus sealant drawing station dust do not fall on the first substrate for what is not present to move, and because the first substrate is disposed below the second substrate is moved to the station bonded substrate each stage after sealant drawing it further conveying means dust first substrate moving the first substrate in step a by the fact that there is nothing to move on top of that a first substrate is not interposed is not falling, stuck more of the substrates the combined upper and lower parallel-arranged between both substrates by narrowing the opposing interval two substrates bonded by the absence of things that move between the two substrates for the combined first in step 板上に塵埃が落下しないし、このように組立作業の如何なる工程でも第1の基板上に塵埃が落下しないため両基板のシール剤による貼り合わせで形成される空間内に塵埃が取り込まれることがなく、装置の構成も簡単にできる。 It dust does not fall on the plate, that the dust is captured in this way space dust on the first substrate in any step of the assembly operation to be formed by bonding according to the substrates of the sealant for not falling no, it is also easy configuration of the device. また上記ステージは搭載する第1の基板をさらに上下方向に移動させることが可能であることにより装置構成をさらに簡単にすることが可能であり、さらに装置の天井部と側周の一部は網カバーで蔽われることによって装置をダウンフロー式クリーンルームに置いて空気流で装置内の塵埃が外部に排出される。 Also the stage it is possible to further simplify the apparatus arrangement by being able to move further down direction of the first substrate for mounting further devices ceiling and the side periphery of the part web of dust in the device in an air stream at a device down flow type clean room by being covered by the cover is discharged to the outside.

【0007】 [0007]

【実施例】以下に本発明の一実施例を図1から図3により説明する。 An example of the embodiment of the present invention will be described by FIGS. 1-3. 図1は本発明による基板組立装置の一実施例を示す液晶表示パネル組立装置の正面図である。 Figure 1 is a front view of a liquid crystal display panel assembly apparatus according to an embodiment of the substrate assembly apparatus according to the present invention. 図1 Figure 1
において、液晶表示パネル組立装置1はシール剤描画ステーションS1と、基板貼り合わせステーションS2との2部分から構成され、この両ステーションS1,S2 In the liquid crystal display panel assembly apparatus 1 includes a sealant drawing station S1, is composed of two parts with the substrate bonding station S2, the two stations S1, S2
は隣接して並べられている。 They are arranged adjacent to each other. 基台2の上方に支柱2aで梁持された架台3があり、基台2の上面には両ステーションS1,S2に亘るレール7を備えている。 There are platform 3 which is Hariji above the posts 2a of the base 2, the upper surface of the base 2 is provided with a rail 7 over both stations S1, S2. このレール7上をステージ移動テーブル4がステージ駆動モータ6により、図面上で左右に即ち両ステーションS1,S The rail 7 the upper stage moving table 4 is stage drive motor 6, two stations S1 viz to the right and left in the figure, S
2間を移動できるようになっている。 And it is adapted to be movable between 2. テーブル4上にはXYθステージ5およびその上面で第1のガラス基板1 On table 4 the first in XYθ stage 5 and the upper surface 1 of the glass substrate 1
3を真空吸着などにより支持する下側吸着テーブル8が載置されている。 3 the lower suction table 8 for supporting by vacuum suction is placed on. ここでXYθステージ5について説明するに、第1のガラス基板13が水平に搭載されているとすると、第1のガラス基板13を水平にX軸・Y軸方向に移動させるとともに、第1のガラス基板13を水平に回転すなわちθ軸移動させるものであり、もし第1のガラス基板13がXY方向に正確に配置されるならばθ Here, a description will be given XYθ stage 5, the first glass substrate 13 is to be mounted horizontally moves the first glass substrate 13 horizontally in the X-axis · Y-axis direction, first glass are those in which a plate 13 is rotated, or moved theta axis horizontally, theta if the first glass substrate 13 is accurately positioned in the XY direction
軸移動は不要である。 Axis movement is not required.

【0008】上記レール7と対面するシール剤描画ステーションS1部の架台3にはZ軸駆動モータ9によって上下に移動するZ軸移動テーブル10が設けられている。 [0008] The platform 3 of the sealant drawing station S1 parts facing the said rail 7 Z-axis moving table 10 which moves up and down by the Z-axis drive motor 9 is provided. このテーブル10には光学式非接触変位計11とノズルを持つシール剤吐出機12とが取付けられており、 This is the table 10 is mounted a sealing agent ejection unit 12 having an optical non-contact displacement meter 11 and the nozzle,
そのノズル先端は下方の第1のガラス基板13を向いている。 That nozzle tip facing the first glass substrate 13 of the lower. 一方の上記レール7と対面する基板貼り合わせステーションS2部の架台3の上部には、さらに支柱2b On one of the top of the platform 3 of the substrate bonding station S2 parts facing with the rail 7, further struts 2b
で梁持された架台18に加圧用駆動機構17が載置され、その下方に延びたボールねじ17aを介して該駆動機構17で架台3の下側に設けられた加圧吸着テーブル15を上下に移動するようになっている。 In the Hariji been pressurization drive mechanism 17 is mounted to the gantry 18, the upper and lower pressurized pressure suction table 15 provided on the lower side of the frame 3 by the drive mechanism 17 through a ball screw 17a extending thereunder It is adapted to move in. この加圧吸着テーブル15はその下面に第2のガラス基板14を上記第1のガラス基板13と平行になるように真空吸着などにより水平に吊り下げる形に支持するようになっている。 The pressurized pressure adsorption table 15 is adapted to support a form for suspending the second glass substrate 14 on its lower surface to the horizontal by vacuum suction so as to be parallel with the first glass substrate 13. またこのテーブル15には2箇所に孔15a,15 The holes 15a, 15 in two locations in this table 15
bが穿けられており、このテーブル15に穿けられた孔15a,15bに対応する架台3の部署にはCCD内蔵の画像認識用カメラ16a,16bが取付けられている。 b has been pierced, CCD-chip image recognition camera 16a, 16b is attached to the department of the gantry 3 corresponding to the holes 15a, 15b which is drilled on the table 15. この両カメラ16a,16bは下方を向いており、 Both cameras 16a, 16b are directed downward,
従ってカメラ16a,16bはテーブル15の両孔15 Accordingly camera 16a, both holes 15 and 16b are tables 15
a,15bを通して第2のガラス基板14などの下部に存在する物体を確認することができる。 a, it is possible to check the object existing in the lower portion of such second glass substrate 14 through 15b. なおこの液晶表示パネル組立装置には上記した各駆動部の図示していない制御装置が設けられている。 Note controller (not shown) of the drive units described above is provided in the liquid crystal display panel assembly apparatus.

【0009】図2は図1の液晶表示パネル組立装置の動作説明用の概略図である。 [0009] FIG. 2 is a schematic diagram for explaining the operation of the liquid crystal display panel assembly apparatus of FIG. つぎに図2により図1の液晶表示パネル組立装置の動作および機能を説明する。 A processing 2 will be described the operation and function of the liquid crystal display panel assembly apparatus of FIG. なお図2ではXYθステージ5および下側吸着テーブル8を貼り合わせステーションS2に移動させた場合を2点鎖線で示し、その各々に5φ,8φの符号を符した。 Note the case of moving the mating station S2 attaching the XYθ stage 5 and the lower suction table 8 in FIG. 2 indicated by a two-dot chain line, and marks 5Fai, the sign of 8φ to each. 図2 Figure 2
において、初めに貼り合わせステーションS2にステージ移動テーブル4が基台2上のレール7上を図1のステージ駆動モータ6により走行されると、XYθステージ5φ上の下側吸着テーブル8φ上にアダプタ14aを介して第2のガラス基板14が載置される。 In, the stage moving table 4 to the mating station S2 adhered initially is running on a rail 7 on the base 2 by the stage drive motor 6 of FIG. 1, the adapter 14a on the lower suction table 8φ on XYθ stage 5φ the second glass substrate 14 is placed through. このアダプタ14aは第2のガラス基板14の下面が下側吸着テーブル8φに接触することを阻止するためのもので、第2のガラス基板14の周縁を支持する額縁状のものである。 The adapter 14a is used to prevent the lower surface of the second glass substrate 14 contacts the lower suction table 8Fai, those frame-shaped supporting the peripheral edge of the second glass substrate 14.
ここで両カメラ16a,16bで第2のガラス基板14 Here both cameras 16a, the second glass substrate 14 in 16b
に設けられた図示していない位置合わせマークを読み取りつつ、第2のガラス基板14が貼り合わせステーションS2の所定位置に置かれるようにXYθステージ5φ While reading an alignment mark (not shown) provided on, XY.theta. Stage to be placed at a predetermined position of the second glass substrate 14 is bonded station S2 5Fai
を制御する。 To control. 次いで図1の加圧用駆動機構17で加圧吸着テーブル15を下方に移動させて、第2のガラス基板14を該テーブル15で水平に吊り下げる形に吸着支持し、そのまま駆動機構17で加圧吸着テーブル15を介して第2のガラス基板14を上方に移動させて待機させ、そしてアダプタ14aは除去される。 Then pressurized pressure adsorption table 15 is moved downward by the pressurizing drive mechanism 17 of FIG. 1, the second glass substrate 14 adsorbed supported form hung horizontally the table 15, as the pressure in the drive mechanism 17 the second glass substrate 14 via the suction table 15 is moved upward to standby, and the adapter 14a is removed. この動作で塵埃が遊離しても塵埃を避ける必要のない第2のガラス基板14上面に落下するだけで何等の問題がない。 There is no any way problems simply by dropping the second glass substrate 14 upper surface is not necessary to avoid dust be liberated dust in this operation.

【0010】次に下側吸着テーブル8φ上に第1のガラス基板13を載置し、そして第1のガラス基板13が貼り合わせステーションS2の所定位置に置かれるようにXYθステージ5φを制御する。 [0010] The first glass substrate 13 is placed on the lower suction table 8φ then, and controls the XYθ stage 5φ to be placed at a predetermined position of the first glass substrate 13 is bonded station S2. ここで第1のガラス基板13の位置合わせが終わったら、今度はXYθステージ5φをシール剤描画ステーションS1に移動させる。 After alignment of the first glass substrate 13 is finished here, now it moves the XYθ stage 5φ the sealant drawing station S1.
次にシール剤描画ステーションS1で、Z軸移動テーブル10上の光学式非接触変位計11の出力により図1のZ軸駆動モータ9を制御して、Z軸移動テーブル10上のシール剤吐出機12のノズル先端と下側吸着テーブル8上の第1のガラス基板13上面とのギャップを設定する。 Next, in the sealant drawing station S1, the Z-axis by the output of the moving table 10 on the optical non-contact displacement meter 11 by controlling the Z-axis drive motor 9 of Fig. 1, Z-axis moving table 10 on the sealant dispenser to set the gap between the first glass substrate 13 upper surface on the nozzle tip and the lower suction table 8 of 12. この動作でギャップ設定のためのシール剤吐出機1 Sealant dispenser 1 for this behavior gap setting
2のノズル移動距離はわずかであり、これによる塵埃の遊離は殆どない。 Second nozzle moving distance is small, which by free little dust. また塵埃の遊離を極度に嫌う場合には、図2中に1点鎖線で示すようにシール剤吐出機12 Further, when hate free dust in extreme may sealant dispenser 12 as shown by the one-dot chain line in FIG. 2
のZ軸移動テーブル10を含む駆動部を密閉し、その密閉空間を真空引きすればよい。 Of sealing the driving section including the Z-axis moving table 10, the sealed space may be evacuated. そしてXYθステージ5 And XYθ stage 5
を所定の描画パターンに従ってXY方向に移動させつつ、シール剤吐出機12のノズルからシール剤を吐出させて、シール剤の第1のガラス基板13への塗布を行う。 While allowed to move in the XY directions in accordance with a predetermined plotting pattern, by ejecting the sealant from the nozzle of the sealant dispenser 12, performing coating to the first glass substrate 13 of the sealant. この描きたいシール剤パターンは図示していない。 The sealant pattern you want to draw is not shown.
また図示していない制御装置で所謂パソコン描画パターンを格納記憶させておくことによって、同じ描画パターンを何枚もの第1のガラス基板13への塗布を行うことが可能であり、また格納データの変更で各種の描画パターンを得ることもできる。 Also by allowed to store stores a so-called computer drawing patterns shown to have no control, it is possible to perform the application of the same drawing pattern to the first glass substrate 13 several sheets, also changes the stored data in can be obtained various drawing pattern. この動作でシール剤の吐出描画中に第1のガラス基板13の上部で動くものが存在しないため、第1のガラス基板13の上面への塵埃の落下はない。 The operation for those in discharging and drawing of the sealant runs on top of the first glass substrate 13 is not present in, not falling dust into the upper surface of the first glass substrate 13.

【0011】次に該シール剤塗布終了後にXYθステージ5は再び貼り合わせステーションS2に移動されて、 [0011] Next XYθ stage 5 after completion of the sealant coating is moved in the mating station S2 adhered again,
初めに第2のガラス基板14を抱えた加圧吸着テーブル15の真下に位置決めされる。 It is positioned directly below the second pressurizing pressure suction table 15 holding a glass substrate 14 initially. この動作でも第1のガラス基板13はXYθステージ5および下側吸着テーブル8ごと第2のガラス基板14の下方に配置され、別の搬送手段が介在されないことと第1のガラス基板13の上部で動くものが存在しないことによって、第1のガラス基板13の移動に際しても第1のガラス基板13の上面に塵埃が落下しない。 The first glass substrate 13 in operation is disposed below the second glass substrate 14 by XYθ stage 5 and the lower suction table 8, by another conveyance means is not interposed with the top of the first glass substrate 13 by moving what is not present, dust does not fall on the upper surface of the first glass substrate 13 also during the movement of the first glass substrate 13. さらに別の搬送手段を必要としないので簡単な装置構成となっている。 It has a simple device structure because further does not require a separate transport means. 次に両カメラ16 Then both cameras 16
a,16bの焦点を第1のガラス基板13の図示していない位置合わせマークに合わせ、両カメラ16a,16 a, focus and 16b in the alignment mark (not shown) of the first glass substrate 13, both cameras 16a, 16
bでマークを読み取りながらXYθステージ5φを駆動制御して、第1のガラス基板13と第2のガラス基板1 And drive control of the XYθ stage 5φ while reading a mark b, or the first glass substrate 13 and the second glass substrate 1
4との凡その位置合わせを行う。 4 to align the approximately with. そして図1の加圧用駆動機構17で加圧吸着テーブル15を下方に徐々に移動させて、両カメラ16a,16bで第2のガラス基板1 The pressurized pressure adsorption table 15 is gradually moved downward pressurization driving mechanism 17 of FIG. 1, both cameras 16a, a second glass substrate 16b 1
4の図示していない位置合わせマークが読み取れるようになったら、XYθステージ5φを駆動制御して第1のガラス基板13と第2のガラス基板14との正確な位置合わせを行いつつ、加圧吸着テーブル15をさらに徐々に下降させて2枚のガラス基板13,14をシール剤で貼り合わせる。 4 When so illustrated non alignment mark can be read, while performing accurate alignment between the first glass substrate 13 drives and controls the XYθ stage 5φ the second glass substrate 14, pressing pressure adsorption the table 15 is further gradually lowered by bonding two glass substrates 13, 14 with sealant. この動作で両ガラス基板13,14の貼り合わせでは、両ガラス基板13,14の間に動くものが存在しないことによって、第1のガラス基板13の上面に塵埃が落下しない。 In bonding the two glass substrates 13 and 14 in this operation, by which moves between the two glass substrates 13, 14 is not present, dust does not fall on the upper surface of the first glass substrate 13. 以上のように組立作業の如何なる工程でも第1のガラス基板13の上面に塵埃が落下しないため、両ガラス基板13,14のシール剤による貼り合わせで形成される空間内に塵埃が取り込まれることがない。 Since more in any step of the assembly operation dust on the upper surface of the first glass substrate 13 does not fall so, that the dust is taken into the space formed by bonding by sealant of both glass substrates 13 and 14 Absent. また以上のシール剤描画工程と、基板貼り合わせ工程と、そのシール剤描画と基板貼り合わせの両ステーション間の移動工程とは簡単なシーケンス制御で処理できるので、図示していない制御装置により一連の動作をプログラム化してパソコンで制御してもよい。 Further and more sealant drawing step, and the substrate bonding step, since the process of moving between the stations of the sealant drawing and the substrate bonding can be processed by a simple sequence control, a series of the not-shown control device it may be controlled by a personal computer to program the behavior.

【0012】図3は図1の液晶表示パネル組立装置の外観の斜視図である。 [0012] FIG. 3 is a perspective view of the external appearance of the liquid crystal display panel assembly apparatus of FIG. 図3において、図1の液晶表示パネル組立装置1の前面と裏面の下部には網カバー19,2 3, the network covers a lower portion of the front surface and rear surface of the liquid crystal display panel assembly apparatus 1 in FIG. 1 19, 2
0が設けられ、両側面には蔽いカバー21,22が設けられ、蔽いカバー22の脇に各駆動部の図示していない制御装置の制御パネル23が設置されている。 0 is provided, the cover 21 covered on both sides is provided, the control panel 23 of the control device on the side of the covering cover 22 is not shown for the driver is installed. また天井には網カバー24が設けられ、前面の上部にはアクリル製の透明カバー25が設けられて内部が見えるようになっている。 The net cover 24 is provided on the ceiling, the front surface of the upper so that the visible inside provided with a transparent cover 25 made of acrylic. 本液晶表示パネル組立装置1はダウンフロー式クリーンルームに置かれ、矢印Aで示した空気が流されると、装置1に天井の網カバー24から入った空気は矢印B,Cで示すように装置1の前面と裏面の下部の網カバー19,20から流出し、その空気流で装置1内の塵埃は外部に排出される。 This liquid crystal display panel assembly apparatus 1 is placed in the down flow type clean room, the air indicated by the arrow A is flowed, air entering from the ceiling of the net cover 24 to the apparatus 1 of arrow B, apparatus as shown in C 1 flows out from the front and back of the lower portion of the net cover 19, dust in the device 1 in that the air stream is discharged to the outside.

【0013】本基板組立装置は以下の態様で実施できる。 [0013] The substrate assembly apparatus can be carried out in the following manner. 第1の態様は図1のZ軸移動テーブル10に代えてZ軸移動テーブルをXYθステージ5に設け、シール剤描画ステーションS1部の架台3にノズルを持つシール剤吐出機12および光学式非接触変位計11を直接固定し、該Z軸移動テーブルでシール剤吐出機12のノズル先端と下側吸着テーブル8上の第1のガラス基板13とのギャップを設定するようにしたものである。 The first aspect is provided with a Z-axis moving table XYθ stage 5 in place of the Z-axis moving table 10 in FIG. 1, the sealing agent ejection unit 12 and optical non-contact with the nozzle to the frame 3 of the sealant drawing station S1 parts the displacement meter 11 directly fixed, is obtained so as to set the gap between the first glass substrate 13 on the nozzle tip and the lower suction table 8 of the sealant dispenser 12 in the Z-axis moving table. この態様はシール剤描画ステーションS1では下側吸着テーブル8に載置される第1の基板13の上方に可動部が全く存在しないため、第1の基板13への塵埃の落下が皆無である。 This embodiment is the movable part above the first substrate 13 placed on the lower suction table 8 in the sealant drawing station S1 does not exist at all, falling of dust to the first substrate 13 is eliminated. 第2の態様は図1の基板貼り合わせステーションS2における加圧用駆動機構17および架台18を省略し、架台3に第2の基板14の吸着テーブル15を直接固定して、Z軸移動テーブルをXYθステージ5に設け、該Z軸移動テーブルで第2の基板14を上昇させて吸着テーブル15に吸着固定し、また3枚の基板13, The second aspect is omitted pressurization driving mechanism 17 and the rack 18 in the substrate bonding station S2 in FIG. 1, the suction table 15 of the second substrate 14 directly fixed to the frame 3, XY.theta. The Z-axis moving table installed on a stage 5, the Z-axis to raise the second substrate 14 by moving table adsorbed and fixed to the suction table 15, also three substrates 13,
14を貼り合わせるようにしたものである。 It is obtained by the so bonded together 14. この態様は基板貼り合わせステーションS2では吸着テーブル15 This aspect suction table 15, the substrate bonding station S2
の上方に可動部が全く存在せず、塵埃の第1の基板13 Upward without any exist movable portion of the first substrate 13 of the dust
への落下が皆無であり、また加圧用駆動機構17と架台18の省略により装置構成が一層簡略化できる。 Fall into is nil and device configuration by omitting pressurizing drive mechanism 17 and the rack 18 can be further simplified. 第3の態様は基板吸着機能をXYθステージ5に設けて、下側吸着テーブル8を省略したものである。 The third aspect is provided with a substrate adsorbing function in XYθ stage 5 is obtained by omitting the lower suction table 8. この態様はステージ移動テーブル4上に乗せられる部材が減少して、軽量化によりステージ移動テーブル4の走行が軽快になる。 This embodiment decreases the member to be placed on the stage moving table 4, the travel of the stage moving table 4 is lightly by weight. 第4の態様はシール剤の固定化仕様に応じて、シール剤固化のための紫外線照射手段等をシール剤描画ステーションS1と基板貼り合わせステーションS2のいずれかに設けたものである。 A fourth aspect in accordance with the immobilized specification of the sealant, in which the like ultraviolet light irradiation means for sealant solidified provided in any of the sealant drawing station S1 and the substrate lamination station S2. この態様はシール剤の固化のための別置きの装置を必要とせず、装置構成を簡略化できる。 This embodiment does not require a separate every other device for solidifying the sealant, the apparatus structure can be simplified.

【0014】 [0014]

【発明の効果】以上説明したように本発明によれば、液晶表示パネルのように2枚の基板を接近させてシール剤で貼り合わせる基板組立装置での組立作業中に塵埃を取り込まずに貼り合わすことができ、また基板組立装置の構成を簡単にできる効果がある。 According to the present invention described above, according to the present invention, adhered to without taking dust during assembly of the substrate assembly device to approximate two substrates as a liquid crystal display panel bonded with a sealing agent you can match and there is an effect of easily the configuration of the substrate assembly apparatus.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】図1は本発明による基板組立装置の一実施例を示す液晶表示パネル組立装置の正面図 Figure 1 is a front view of a liquid crystal display panel assembly apparatus 1 showing an embodiment of a substrate assembly apparatus according to the present invention

【図2】図2は図1の動作説明用の概略図 Figure 2 is a schematic diagram for explaining the operation of Figure 1

【図3】図3は図1の外観の斜視図 Figure 3 is a perspective view of the appearance of FIG. 1

【符号の説明】 DESCRIPTION OF SYMBOLS

S1…シール剤描画ステーション、S2…基板貼り合わせステーション、4…ステージ移動テーブル、5…XY S1 ... sealant drawing station, S2 ... substrate bonding station, 4 ... stage moving table, 5 ... XY
θステージ、7…レール、8…下側吸着テーブル、10 θ stage, 7 ... rails, 8 ... lower suction table, 10
…Z軸移動テーブル、11…光学式非接触変位計、12 ... Z-axis moving table, 11 ... optical non-contact displacement meter, 12
…ノズルを持つシール剤吐出機、13…第1の基板、1 ... sealant dispenser having a nozzle, 13 ... first substrate, 1
4…第2の基板、15…加圧吸着テーブル、16a,1 4 ... second substrate, 15 ... pressure pressure adsorption table, 16a, 1
6b…カメラ、17…加圧用駆動機構、19,20,2 6b ... camera, 17 ... pressurizing the drive mechanism, 19,20,2
4…網カバー。 4 ... net cover.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 石田 茂 茨城県竜ヶ崎市向陽台5丁目2番 日立テ クノエンジニアリング株式会社開発研究所 内 (72)発明者 三階 春夫 茨城県竜ヶ崎市向陽台5丁目2番 日立テ クノエンジニアリング株式会社開発研究所 内 (72)発明者 近藤 克己 茨城県日立市久慈町4026番地 株式会社日 立製作所日立研究所内 ────────────────────────────────────────────────── ─── of the front page continued (72) inventor Shigeru Ishida Ibaraki Prefecture Ryugasaki City Koyodai 5-chome No. 2 Hitachi Te Techno engineering Co., Ltd. developed the laboratory (72) invention's third floor Haruo Ibaraki Prefecture Ryugasaki City Koyodai 5-chome No. 2 Hitachi Te Techno engineering Co., Ltd. developed the laboratory (72) inventor Katsumi Kondo Hitachi City, Ibaraki Prefecture Kuji-cho, 4026 address, Inc. Date falling Works Hitachi within the Institute

Claims (3)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 シール剤描画ステーションと基板貼り合わせステーションとの間を移動可能なテーブルと、上記シール剤描画ステーションに設けられシール剤を吐出する先端が下方を向いたノズルと、上記テーブル上に設けられ第1の基板を搭載する少なくとも直交方向に移動可能なステージと、上記ノズルからシール剤を吐出させつつ上記ステージを直交方向に移動させることにより上記第1の基板にシール剤を所望のパターンで描画させる手段と、上記テーブルが上記基板貼り合わせステーションに移動されたときに第2の基板を上記ステージに搭載された上記第1の基板と平行でその上方になるように支持する手段と、上記支持する手段で平行に配置された上記第1と第2の両基板の対向間隔を狭めることにより両基板をシール剤で貼り And 1. A sealant drawing station and the substrate lamination movable between a station table, a nozzle tip facing downward for discharging the sealant provided in the sealing agent drawing stations, on the table at least a direction perpendicular to the movable stage for mounting a first substrate provided, a desired pattern sealant to the first substrate by moving the stage while discharging a sealing agent in the orthogonal direction from the nozzle in a means for drawing, and means for the table is supported so as a second substrate made thereabove parallel to the first substrate mounted on the stage when it is moved to the substrate bonding station, bonding the two substrates with a sealing agent by narrowing the parallel-arranged opposing distance of the first and second two substrates with means for the support 合わせる手段とを備えたことを特徴とする基板組立装置。 Board assembly apparatus comprising the means for aligning.
  2. 【請求項2】 請求項1記載の基板組立装置において、 2. A substrate assembly apparatus according to claim 1,
    上記ステージは搭載する第1の基板をさらに上下方向に移動可能であることを特徴とする基板組立装置。 Substrate assembly apparatus, wherein said stage is movable in the further vertically a first substrate for mounting.
  3. 【請求項3】 請求項1記載の基板組立装置において、 3. A substrate assembly apparatus according to claim 1,
    その天井部と側周の一部とが網カバーで蔽われたことを特徴とする基板組立装置。 Board assembly apparatus with a portion of the side peripheral its ceiling is characterized in that it covered with a net cover.
JP32313891A 1991-12-06 1991-12-06 Board assembly equipment Expired - Fee Related JP2609386B2 (en)

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JPH05154923A true JPH05154923A (en) 1993-06-22
JP2609386B2 JP2609386B2 (en) 1997-05-14

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