JPH0895066A - Manufacture of liquid crystal element and device thereof - Google Patents

Manufacture of liquid crystal element and device thereof

Info

Publication number
JPH0895066A
JPH0895066A JP6231030A JP23103094A JPH0895066A JP H0895066 A JPH0895066 A JP H0895066A JP 6231030 A JP6231030 A JP 6231030A JP 23103094 A JP23103094 A JP 23103094A JP H0895066 A JPH0895066 A JP H0895066A
Authority
JP
Japan
Prior art keywords
substrate
spacer
liquid crystal
spacers
dispersed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6231030A
Other languages
Japanese (ja)
Other versions
JP3189591B2 (en
Inventor
Kazuhiro Nishiyama
和廣 西山
Junko Asayama
純子 朝山
Akio Takimoto
昭雄 滝本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP23103094A priority Critical patent/JP3189591B2/en
Publication of JPH0895066A publication Critical patent/JPH0895066A/en
Application granted granted Critical
Publication of JP3189591B2 publication Critical patent/JP3189591B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1341—Filling or closing of cells
    • G02F1/13415—Drop filling process

Landscapes

  • Liquid Crystal (AREA)

Abstract

PURPOSE: To uniformly scatter spacers on the surface of a substrate by dropping down the dispersion solution of spacers on the surface of the substrate, and rotating the substrate. CONSTITUTION: A substrate 6 is fixed to a rotatable stage 7, dispersion liquid 2 dispersing spacers 1 therein is dropped down on the surface of the substrate through a vessel 3, a connecting pipe 5, and a nozzle 4, the substrate 6 is rotated, and hence the spacers 1 are uniformly scattered on the surface of the substrate 6. This scattering method is very effective for scattering of the spacer of about 1μm size which is hitherto difficult.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は、液晶を用いた液晶素子
の製造方法、特に液晶パネルの基板間のギャップ厚を所
定の距離で、均一に作製するためのスペーサー粒子の散
布工程を有する液晶素子の製造方法及びその装置に関す
るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a liquid crystal element using liquid crystal, and more particularly, a liquid crystal having a step of spraying spacer particles for uniformly manufacturing a gap thickness between substrates of a liquid crystal panel at a predetermined distance The present invention relates to an element manufacturing method and an apparatus thereof.

【０００２】[0002]

【従来の技術】従来のスペーサーの散布方法としては、
乾式散布方法と湿式散布方法がある。従来の乾式散布方
法とは、不活性気体を噴出させると同時にスペーサーを
気体中に分散させ、基板上に堆積させる方法である。湿
式散布方法は、スペーサーをアルコール等の溶媒に混合
分散させた混合液を霧状にし基板に散布する方法であ
る。2. Description of the Related Art As a conventional spacer spraying method,
There are dry spray method and wet spray method. The conventional dry spraying method is a method of spraying an inert gas and at the same time dispersing the spacer in the gas and depositing it on the substrate. The wet spraying method is a method in which a mixed solution prepared by mixing and dispersing a spacer in a solvent such as alcohol is atomized and sprayed on a substrate.

【０００３】[0003]

【発明が解決しようとする課題】しかしながら従来の乾
式散布方法では、スペーサーが帯電することによりスペ
ーサーが凝集してしまう。また湿式方法では、同じく数
μｍ以下の小さなスペーサーにおいては凝集しやすく、
また基板上での溶媒が蒸発する時においても、凝集して
しまう傾向があり、スペーサーが均一に分散されず、ギ
ャップ精度が得られず、このスペーサーの凝集が配向乱
れの原因ともなり問題とされてきた。However, in the conventional dry spraying method, the spacers are agglomerated due to the charging of the spacers. Also, in the wet method, a small spacer of a few μm or less is likely to aggregate,
Moreover, even when the solvent on the substrate evaporates, it tends to aggregate, the spacers are not evenly dispersed, gap accuracy cannot be obtained, and this aggregation of spacers causes alignment disorder and is a problem. Came.

【０００４】本発明は前記従来技術の課題を解決するた
めに、非常に容易でかつ高度に均一にスペーサーを分散
させ、ギャップ精度の優れた液晶素子の製造方法を提供
することを目的とする。In order to solve the above-mentioned problems of the prior art, it is an object of the present invention to provide a method of manufacturing a liquid crystal device in which spacers are dispersed very easily and highly uniformly and the gap accuracy is excellent.

【０００５】[0005]

【課題を解決するための手段】前記目的を達成するため
に、本発明の第一のスペーサーの分散工程は、溶媒中に
分散したスペーサーを前記溶媒と共に基板上に塗布し基
板を回転させ溶媒を蒸発させ、前記基板上に均一にスペ
ーサーを分散させることを特徴とする。In order to achieve the above object, in the first spacer dispersion step of the present invention, the spacer dispersed in a solvent is applied onto the substrate together with the solvent, and the substrate is rotated to remove the solvent. It is characterized in that the spacers are evaporated and the spacers are uniformly dispersed on the substrate.

【０００６】また、本発明の第二のスペーサーの分散工
程は、溶媒中に分散したスペーサーを前記溶媒と共に、
高速で回転させた基板上にスプレーした後、さらに基板
を回転させ溶媒を蒸発させ、基板上に均一にスペーサー
を分散させることを特徴とする。In the second spacer dispersion step of the present invention, the spacer dispersed in a solvent together with the solvent is
After spraying on the substrate rotated at a high speed, the substrate is further rotated to evaporate the solvent and uniformly disperse the spacers on the substrate.

【０００７】さらに、本発明の液晶素子の製造装置は、
基板を固定し回転することのできるステージと前記ステ
ージの上部に液体を滴下することのできるノズルと、前
記ノズルと連結したスペーサーを分散させた溶液を保持
する容器とを具備していることを特徴とする。Furthermore, the liquid crystal device manufacturing apparatus of the present invention is
It is provided with a stage capable of fixing and rotating a substrate, a nozzle capable of dropping a liquid onto the stage, and a container for holding a solution in which a spacer connected to the nozzle is dispersed. And

【０００８】[0008]

【作用】本発明によれば、あらかじめスペーサーを溶媒
中に分散させておいた混合分散液を基板表面に塗布し、
スピナー等を用いて基板を高速回転させるか、または、
高速回転させている基板にスプレーすれば良いため、非
常に容易でかつ高度に分散した状態のビーズ散布が可能
であり、また、それにより、ギャップ精度の優れた液晶
素子を製造することが可能となる。According to the present invention, the mixed dispersion liquid in which the spacer is previously dispersed in the solvent is applied to the surface of the substrate,
Spin the substrate at high speed using a spinner, or
Since it is only necessary to spray onto a substrate that is rotating at a high speed, it is possible to spray beads in a highly dispersed state very easily, and it is possible to manufacture a liquid crystal element with excellent gap accuracy. Become.

【０００９】[0009]

【実施例】本発明に用いる溶媒は配向膜に悪影響を与え
るもの以外であれば何でもよいが、ビーズが溶媒中で凝
集してはいけないことから、極性の高い溶媒が良い。そ
ういう意味では最もアルコールが用い易い。また基板の
回転中に溶媒が蒸発しないといけないこと、またあまり
にも速く蒸発してしまうと分散液の塗布時間に分散濃度
が大きく依存し、再現性が悪くなることから、散布場所
の環境温度において、蒸気圧が３ｍｍＨｇ〜５０ｍｍＨ
ｇの溶媒が最も適している。Examples Any solvent may be used in the present invention as long as it does not adversely affect the alignment film. However, since the beads should not aggregate in the solvent, a solvent having high polarity is preferable. In that sense, alcohol is the easiest to use. In addition, the solvent must be evaporated during the rotation of the substrate, and if it evaporates too quickly, the dispersion concentration greatly depends on the coating time of the dispersion liquid and reproducibility deteriorates. , Vapor pressure is 3mmHg-50mmH
g of solvent is most suitable.

【００１０】本発明に用いるスペーサーの形状には全く
制限がない。また、スペーサーの大きさも制限がなく、
強誘電性液晶素子に用いられる１μｍ程度のビーズであ
っても、非常に高度に分散可能である。特にこの場合、
従来の湿式法や乾式法では、ビーズの凝集が避けられな
い領域であるため、本発明の分散法は非常に有効であ
る。本発明で使用可能な基板の大きさは、１分間に１０
００回転以上回転させることができる基板であれば本発
明の散布方法が使用可能なため、１００インチや２００
インチのような大きな基板であっても可能である。There is no limitation on the shape of the spacer used in the present invention. Also, the size of the spacer is not limited,
Even beads having a size of about 1 μm used in a ferroelectric liquid crystal element can be dispersed to a very high degree. Especially in this case,
In the conventional wet method and dry method, since the beads are inevitably agglomerated, the dispersion method of the present invention is very effective. The size of the substrate that can be used in the present invention is 10 per minute.
Since the spraying method of the present invention can be used as long as the substrate can be rotated over 100 rotations, 100 inches or 200 inches can be used.
Even large substrates such as inches are possible.

【００１１】また本発明の液晶素子の製造装置に使用す
るスペーサーの分散装置は、図１に示すように、液体中
にスペーサー１を分散させて調製した分散液２を保持し
ておく容器３とその分散液を取り出すためのノズル４が
連結管５でつながっており、そのノズル４の下部には基
板６を固定し回転させることのできるステージ７があ
る。容器３には超音波発生装置（図示せず）が取り付け
てあればさらにスペーサーの分散性は向上する。またノ
ズル４はスプレー噴射、滴下の両方可能なノズルが望ま
しい。Further, as shown in FIG. 1, the spacer dispersing device used in the liquid crystal device manufacturing apparatus of the present invention comprises a container 3 for holding a dispersion 2 prepared by dispersing the spacer 1 in a liquid. A nozzle 4 for taking out the dispersion liquid is connected by a connecting pipe 5, and a stage 7 capable of fixing and rotating a substrate 6 is provided below the nozzle 4. If an ultrasonic wave generator (not shown) is attached to the container 3, the dispersibility of the spacer is further improved. Further, the nozzle 4 is preferably a nozzle capable of both spraying and dropping.

【００１２】以下本発明の各実施例について説明する。 （実施例１）成分がＳｉＯ2 からなる直径１．０μｍの
球形のスペーサを５ｍｇとりイソブチルアルコール５０
ｍｌを加え、超音波で１時間拡散させ、混合分散液を調
製しこれを容器１に入れる。次に、配向処理を施したガ
ラス基板（５５ｍｍ×６５ｍｍ×１．１ｍｍ）をステー
ジ４に設置し、先ほど調製した混合分散液をノズル２を
通して基板表面に塗布し、３０００ｒｐｍで３０秒回転
させる。すると約１０００個／ｍｍ2 の密度で非常に均
一にスペーサーが分散できる。Each embodiment of the present invention will be described below. Example 1 5 mg of a spherical spacer 1.0 μm in diameter composed of SiO 2 was taken as isobutyl alcohol 50.
ml is added and the mixture is ultrasonically diffused for 1 hour to prepare a mixed dispersion, which is placed in the container 1. Next, a glass substrate (55 mm × 65 mm × 1.1 mm) that has been subjected to orientation treatment is set on the stage 4, the mixed dispersion liquid prepared above is applied to the substrate surface through the nozzle 2, and rotated at 3000 rpm for 30 seconds. Then, the spacers can be dispersed very uniformly at a density of about 1000 pieces / mm 2 .

【００１３】次に同じく配向処理を施したガラス基板
（５５ｍｍ×６５ｍｍ×１．１ｍｍ）に接着剤をシール
印刷し、先ほどのスペーサーを分散させたガラス基板を
貼合わせ液晶を注入すると、非常に基板間のギャップ厚
が均一な液晶表示素子が得られるものである。Next, an adhesive is seal-printed on a glass substrate (55 mm × 65 mm × 1.1 mm) which has also been subjected to an orientation treatment, and the glass substrate in which the spacers are dispersed is pasted and liquid crystal is injected. Thus, a liquid crystal display device having a uniform gap thickness can be obtained.

【００１４】（実施例２）成分がＳｉＯ2 からなる直径
０．８μｍの球形のスペーサーを５ｍｇとりイソプロピ
ルアルコール５０ｍｌを加え、超音波で１時間拡散さ
せ、混合分散液を調製し容器１に入れる。次に、配向処
理を施したガラス基板（５５ｍｍ×６５ｍｍ×１．１ｍ
ｍ）をステージ４に設置し、先ほど調製した混合分散液
を基板表面に塗布し、６０００ｒｐｍで３０秒回転させ
る。すると約１０００個／ｍｍ2 の密度で非常に均一に
スペーサーが分散できる。(Example 2) 5 mg of a spherical spacer having a diameter of 0.8 μm and composed of SiO 2 was taken, 50 ml of isopropyl alcohol was added, and the mixture was ultrasonically dispersed for 1 hour to prepare a mixed dispersion liquid, and the container 1 was placed in the container 1. Next, a glass substrate (55 mm × 65 mm × 1.1 m) that has been subjected to orientation treatment
m) is placed on stage 4, the mixed dispersion prepared above is applied to the surface of the substrate, and rotated at 6000 rpm for 30 seconds. Then, the spacers can be dispersed very uniformly at a density of about 1000 pieces / mm 2 .

【００１５】次に同じく配向処理を施したガラス基板
（５５ｍｍ×６５ｍｍ×１．１ｍｍ）に接着剤をシール
印刷し、先ほどのスペーサーを分散させたガラス基板を
貼合わせ液晶を注入すると、非常に基板間のギャップ厚
が均一な液晶表示素子が得られる。Next, an adhesive is seal-printed on a glass substrate (55 mm × 65 mm × 1.1 mm) that has also been subjected to an orientation treatment, and the glass substrate in which the spacers are dispersed is pasted and liquid crystal is injected. A liquid crystal display device having a uniform gap thickness can be obtained.

【００１６】（実施例３）成分がＳｉＯ2 からなる直径
０．８μｍの球形のスペーサーを２ｍｇとりプロピルア
ルコール５０ｍｌを加え、超音波で２時間拡散させて、
混合分散液を調製し容器１に入れる。次に、配向処理を
施したガラス基板（５００ｍｍ×５００ｍｍ×５ｍｍ）
をステージ４に設置し、先ほど調製した混合分散液を基
板表面に塗布し、２０００ｒｐｍで６０秒回転させる。
すると約３００個／ｍｍ2 の密度で非常に均一にスペー
サーが分散できる。(Example 3) 2 mg of a spherical spacer having a diameter of 0.8 μm and composed of SiO 2 was added, 50 ml of propyl alcohol was added, and the mixture was ultrasonically dispersed for 2 hours,
A mixed dispersion is prepared and placed in container 1. Next, a glass substrate (500 mm x 500 mm x 5 mm) that has been subjected to orientation treatment
Is placed on stage 4, the mixed dispersion prepared above is applied to the surface of the substrate, and it is rotated at 2000 rpm for 60 seconds.
Then, the spacers can be dispersed very uniformly at a density of about 300 / mm 2 .

【００１７】次に同じく配向処理を施したガラス基板
（５００ｍｍ×５００ｍｍ×５ｍｍ）に接着剤をシール
印刷し、先ほどのスペーサーを分散させたガラス基板を
貼合わせ液晶を注入すると、非常に基板間のギャップ厚
が均一な液晶表示素子が得られる。Next, an adhesive is seal-printed on a glass substrate (500 mm × 500 mm × 5 mm) that has also been subjected to an orientation treatment, and the glass substrate in which the spacers are dispersed is pasted and liquid crystal is injected. A liquid crystal display device having a uniform gap thickness can be obtained.

【００１８】（実施例４）成分がＳｉＯ2 からなる直径
１．５μｍの球形のスペーサーを５ｍｇとり１ーブタノ
ール５０ｍｌを加え、超音波で１時間拡散させて、混合
分散液を調製し、容器１に入れる。次に、配向処理を施
したガラス基板（１００ｍｍ×１００ｍｍ×１．５ｍ
ｍ）をステージ４に設置し、先ほど調製した混合分散液
を基板表面に塗布し、３０００ｒｐｍで５０秒回転させ
る。すると約１０００個／ｍｍ2 の密度で非常に均一に
スペーサーが分散できる。Example 4 5 mg of a spherical spacer having a diameter of 1.5 μm and composed of SiO 2 was added to 50 ml of 1-butanol, and the mixture was ultrasonically dispersed for 1 hour to prepare a mixed dispersion, which was then placed in a container 1. Put in. Next, a glass substrate (100 mm × 100 mm × 1.5 m) that has been subjected to orientation treatment
m) is placed on the stage 4, the mixed dispersion prepared above is applied to the surface of the substrate, and the substrate is rotated at 3000 rpm for 50 seconds. Then, the spacers can be dispersed very uniformly at a density of about 1000 pieces / mm 2 .

【００１９】次に同じく配向処理を施したガラス基板
（１００ｍｍ×１００ｍｍ×１．５ｍｍ）に接着剤をシ
ール印刷し、先ほどのスペーサーを分散させたガラス基
板を貼合わせ液晶を注入すると、非常に基板間のギャッ
プ厚が均一な液晶表示素子が得られる。Next, an adhesive is seal-printed on a glass substrate (100 mm × 100 mm × 1.5 mm) which has also been subjected to an orientation treatment, and the glass substrate in which the spacers are dispersed is laminated and liquid crystal is injected. A liquid crystal display device having a uniform gap thickness can be obtained.

【００２０】（実施例５）成分がＳｉＯ2 からなる直径
１．０μｍの球形のスペーサーを５ｍｇとりイソブチル
アルコール５０ｍｌを加え、超音波で１時間拡散させ、
混合分散液を調製しこれを容器１に入れる。次に、配向
処理を施したガラス基板（５５ｍｍ×６５ｍｍ×１．１
ｍｍ）をステージ４に設置し、３０００ｒｐｍで３０秒
回転させ、先ほど調製した混合分散液をノズル２を通し
て基板表面にスプレー散布し、さらに３０００ｒｐｍで
３０秒回転させる。すると約１０００個／ｍｍ2 の密度
で非常に均一にスペーサーが分散できる。Example 5 5 mg of a spherical spacer 1.0 μm in diameter composed of SiO 2 was added, 50 ml of isobutyl alcohol was added, and the mixture was ultrasonically diffused for 1 hour.
A mixed dispersion is prepared and placed in a container 1. Next, a glass substrate (55 mm × 65 mm × 1.1) that has been subjected to orientation treatment.
mm) is placed on the stage 4 and rotated at 3000 rpm for 30 seconds, the mixed dispersion prepared above is sprayed onto the substrate surface through the nozzle 2, and further rotated at 3000 rpm for 30 seconds. Then, the spacers can be dispersed very uniformly at a density of about 1000 pieces / mm 2 .

【００２１】次に同じく配向処理を施したガラス基板
（５５ｍｍ×６５ｍｍ×１．１ｍｍ）に接着剤をシール
印刷し、先ほどのスペーサーを分散させたガラス基板を
貼合わせ液晶を注入すると、非常に基板間のギャップ厚
が均一な液晶表示素子が得られる。Next, a glass substrate (55 mm × 65 mm × 1.1 mm) similarly subjected to orientation treatment is seal-printed with an adhesive, and the glass substrate in which the spacers are dispersed is pasted and liquid crystal is injected. A liquid crystal display device having a uniform gap thickness can be obtained.

【００２２】（実施例６）成分がＳｉＯ2 からなる直径
０．８μｍの球形のスペーサーを５ｍｇとりイソプロピ
ルアルコール５０ｍｌを加え、超音波で１時間拡散さ
せ、混合分散液を調製し容器１に入れる。次に、配向処
理を施したガラス基板（５５ｍｍ×６５ｍｍ×１．１ｍ
ｍ）をステージ４に設置し、６０００ｒｐｍで３０秒回
転させ、先ほど調製した混合分散液を基板表面にスプレ
ー散布し、さらに６０００ｒｐｍで３０秒回転させる。
すると約１０００個／ｍｍ2 の密度で非常に均一にスペ
ーサーが分散できる。(Example 6) 5 mg of a spherical spacer having a diameter of 0.8 µm and composed of SiO 2 was taken, 50 ml of isopropyl alcohol was added, and the mixture was ultrasonically dispersed for 1 hour to prepare a mixed dispersion liquid, which was put in a container 1. Next, a glass substrate (55 mm × 65 mm × 1.1 m) that has been subjected to orientation treatment
m) is placed on the stage 4 and rotated at 6000 rpm for 30 seconds, the mixed dispersion prepared above is spray-sprayed on the substrate surface, and further rotated at 6000 rpm for 30 seconds.
Then, the spacers can be dispersed very uniformly at a density of about 1000 pieces / mm 2 .

【００２３】次に同じく配向処理を施したガラス基板
（５５ｍｍ×６５ｍｍ×１．１ｍｍ）に接着剤をシール
印刷し、先ほどのスペーサーを分散させたガラス基板を
貼合わせ液晶を注入すると、非常に基板間のギャップ厚
が均一な液晶表示素子が得られる。Next, an adhesive is seal-printed on a glass substrate (55 mm × 65 mm × 1.1 mm) that has also been subjected to an orientation treatment, and the glass substrate in which the spacers are dispersed is pasted and liquid crystal is injected. A liquid crystal display device having a uniform gap thickness can be obtained.

【００２４】（実施例７）成分がＳｉＯ2 からなる直径
０．８μｍの球形のスペーサーを２ｍｇとりプロピルア
ルコール５０ｍｌを加え、超音波で２時間拡散させ、混
合分散液を調製し容器１に入れる。次に、配向処理を施
したガラス基板（５００ｍｍ×５００ｍｍ×５ｍｍ）を
ステージ４に設置し、２０００ｒｐｍで３０秒回転さ
せ、先ほど調製した混合分散液を基板表面にスプレー散
布し、さらに２０００ｒｐｍで６０秒回転させる。する
と約３００個／ｍｍ2 の密度で非常に均一にスペーサー
が分散できる。(Example 7) 2 mg of a spherical spacer having a diameter of 0.8 μm and composed of SiO 2 was taken, 50 ml of propyl alcohol was added, and the mixture was ultrasonically diffused for 2 hours to prepare a mixed dispersion, which was placed in the container 1. Next, a glass substrate (500 mm × 500 mm × 5 mm) that has been subjected to orientation treatment is set on the stage 4 and rotated at 2000 rpm for 30 seconds, and the mixed dispersion prepared above is spray-sprayed on the substrate surface, and further at 2000 rpm for 60 seconds. Rotate. Then, the spacers can be dispersed very uniformly at a density of about 300 / mm 2 .

【００２５】次に同じく配向処理を施したガラス基板
（５００ｍｍ×５００ｍｍ×５ｍｍ）に接着剤をシール
印刷し、先ほどのスペーサーを分散させたガラス基板を
貼合わせ液晶を注入すると、非常に基板間のギャップ厚
が均一な液晶表示素子が得られる。Next, an adhesive agent is seal-printed on a glass substrate (500 mm × 500 mm × 5 mm) which has also been subjected to an orientation treatment, and the glass substrate in which the spacers are dispersed is stuck and the liquid crystal is injected. A liquid crystal display device having a uniform gap thickness can be obtained.

【００２６】（実施例８）成分がＳｉＯ2 からなる直径
１．５μｍの球形のスペーサーを５ｍｇとり１ーブタノ
ール５０ｍｌを加え、超音波で１時間拡散させ、混合分
散液を調製し容器１に入れる。次に、配向処理を施した
ガラス基板（１００ｍｍ×１００ｍｍ×１．５ｍｍ）を
ステージ４に設置し、３０００ｒｐｍで３０秒回転さ
せ、先ほど調製した混合分散液を基板表面にスプレー散
布し、さらに３０００ｒｐｍで５０秒回転させる。する
と約１０００個／ｍｍ2 の密度で非常に均一にスペーサ
ーが分散できる。(Example 8) 5 mg of a spherical spacer having a diameter of 1.5 μm and composed of SiO 2 was added to 50 ml of 1-butanol, and the mixture was dispersed by ultrasonic waves for 1 hour to prepare a mixed dispersion, which was placed in a container 1. Next, a glass substrate (100 mm × 100 mm × 1.5 mm) that has been subjected to an orientation treatment is set on the stage 4 and rotated at 3000 rpm for 30 seconds, and the mixed dispersion prepared above is spray-sprayed on the substrate surface, and further at 3000 rpm. Rotate for 50 seconds. Then, the spacers can be dispersed very uniformly at a density of about 1000 pieces / mm 2 .

【００２７】次に同じく配向処理を施したガラス基板
（１００ｍｍ×１００ｍｍ×１．５ｍｍ）に接着剤をシ
ール印刷し、先ほどのスペーサーを分散させたガラス基
板を貼合わせ液晶を注入すると、非常に基板間のギャッ
プ厚が均一な液晶表示素子が得られる。Next, an adhesive is seal-printed on a glass substrate (100 mm × 100 mm × 1.5 mm) similarly subjected to the orientation treatment, and the glass substrate in which the spacers are dispersed is pasted and liquid crystal is injected. A liquid crystal display device having a uniform gap thickness can be obtained.

【００２８】[0028]

【発明の効果】以上のように本発明は、溶液中に分散さ
せたスペーサーを基板上に塗布し、基板を高速で回転さ
せることにより、溶媒を蒸発させスペーサーを基板上に
均一に散布させるため、スペーサーの散布としては非常
に簡単であり、しかも高度に再現性良く分散させること
が可能であるという特徴を有する。As described above, according to the present invention, the spacer dispersed in the solution is applied on the substrate and the substrate is rotated at a high speed to evaporate the solvent and uniformly disperse the spacer on the substrate. The spraying of the spacers is very simple, and the spacers can be dispersed with high reproducibility.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明の一実施例の液晶素子の製造装置におけ
るスペーサー散布装置の概略図FIG. 1 is a schematic view of a spacer spraying device in a liquid crystal device manufacturing apparatus according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

１ スペーサー ２ 分散液 ３ 容器 ４ ノズル ５ 連結管 ６ 基板 ７ ステージ ８ 基板回転装置 1 spacer 2 dispersion liquid 3 container 4 nozzle 5 connecting pipe 6 substrate 7 stage 8 substrate rotating device

Claims (3)

【特許請求の範囲】[Claims] 【請求項１】溶媒中に分散したスペーサーを前記溶媒と
共に基板上に塗布し前記基板を回転させ溶媒を蒸発さ
せ、前記基板上に均一に前記スペーサーを分散させる工
程を有することを特徴とした液晶素子の製造方法。1. A liquid crystal comprising a step of coating a spacer dispersed in a solvent together with the solvent on a substrate, rotating the substrate to evaporate the solvent, and uniformly dispersing the spacer on the substrate. Device manufacturing method. 【請求項２】溶媒中に分散したスペーサーを前記溶媒と
共に高速で回転させた基板上にスプレーした後、さらに
基板を回転させ溶媒を蒸発させ、基板上に均一にスペー
サーを分散させる工程を有することを特徴とした液晶素
子の製造方法。2. A step of spraying a spacer dispersed in a solvent together with the solvent onto a substrate rotated at a high speed, and further rotating the substrate to evaporate the solvent to uniformly disperse the spacer on the substrate. And a method for manufacturing a liquid crystal element. 【請求項３】基板を固定し回転するステージと、前記ス
テージの上部に液体を滴下することができるノズルと、
前記ノズルと連結したスペーサーを分散させた溶液を保
持する容器とを備えたスペーサーの散布装置を有する液
晶素子の製造装置。3. A stage for fixing and rotating a substrate, and a nozzle capable of dropping liquid onto the stage.
An apparatus for manufacturing a liquid crystal element, comprising a spacer spraying device including a container holding a solution in which spacers connected to the nozzles are dispersed.
JP23103094A 1994-09-27 1994-09-27 Manufacturing method of liquid crystal element Expired - Fee Related JP3189591B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
JP23103094A JP3189591B2 (en) 1994-09-27 1994-09-27 Manufacturing method of liquid crystal element

Publications (2)

Publication Number Publication Date
JPH0895066A true JPH0895066A (en) 1996-04-12
JP3189591B2 JP3189591B2 (en) 2001-07-16

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