JP2001272640A - Liquid crystal dropping device and liquid crystal dropping method - Google Patents

Liquid crystal dropping device and liquid crystal dropping method

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Publication number
JP2001272640A
JP2001272640A JP2000087231A JP2000087231A JP2001272640A JP 2001272640 A JP2001272640 A JP 2001272640A JP 2000087231 A JP2000087231 A JP 2000087231A JP 2000087231 A JP2000087231 A JP 2000087231A JP 2001272640 A JP2001272640 A JP 2001272640A
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Japan
Prior art keywords
liquid crystal
flow path
switching valve
microsyringe
dropping
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JP2000087231A
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Japanese (ja)
Inventor
Kuniaki Furukawa
訓朗 古川
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Fujitsu Ltd
富士通株式会社
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Priority to JP2000087231A priority Critical patent/JP2001272640A/en
Publication of JP2001272640A publication Critical patent/JP2001272640A/en
Application status is Withdrawn legal-status Critical

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Abstract

PROBLEM TO BE SOLVED: To suppress the dispersion of dropping quantity of a liquid crystal and to omit frequent supplements of the liquid crystal to a micro syringe, when the liquid crystal is dropped onto a substrate by using the micro syringe. SOLUTION: A liquid crystal dropping device provided with a liquid crystal tank 4 and a switching valve 1 for switching passages is used. After a passage communicating from the liquid crystal tank 4 to a recovering vessel 5 through the switching valve 1 is formed and a passage 3a of the switching valve 1 is filled with the liquid crystal L, a passage communicating from the liquid crystal tank 4 to the micro syringe 6 through the switching valve 1 is formed and the liquid crystal L is taken in the micro syringe 6. Then a passage communicating from the micro syringe 6 to a dropping nozzle 9 through the switching valve 1 is formed and a prescribed quantity of liquid crystal L is ejected from the micro syringe 6 by the precise feeding of a piston 7. Then a passage communicating from a pressurized gas source G to the dropping nozzle 9 through the switching valve 1 is formed and the pressurized gas is introduced to eject the all quantity of the liquid crystal L in the passage from the dropping nozzle 9.

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【発明の属する技術分野】本発明は、液晶パネルの製造に係り、特に大型液晶パネルの組立工程においてガラス基板に液晶を滴下する装置及び方法に関する。 The present invention relates to relates to the production of liquid crystal panels, to an apparatus and method for dropping the liquid crystal on the glass substrate in particular assembly process of the large LCD panel.

【0002】 [0002]

【従来の技術】パソコンやパーソナルテレビ等に使用される大型液晶パネルとしては、TFT方式のアクティブマトリックス型カラー液晶パネルが主流となっている。 2. Description of the Related Art As a large-sized liquid crystal panel, which is used in personal computers and personal televisions and the like, active matrix color liquid crystal panel of TFT system has become the mainstream.
この液晶パネルは、従来は、電極を形成したガラス基板2枚を対向させてその周辺部をシール材により接着し、 The liquid crystal panel is conventionally two glass substrates having electrodes formed by facing adhered to its periphery by a sealing material,
2枚のガラス基板の隙間部分に液晶を真空注入する方法で製造されていた。 LCD two glass substrates gap section of were produced by the method of vacuum injection.

【0003】しかし、この方法では大型パネルの場合、 [0003] However, if in this way a large panel,
液晶の注入に極めて長時間を要する(例えば、20インチのパネルで略1日)という問題等があり、最近では次のような方法がとられている。 Require extremely long time to inject a liquid crystal (e.g., approximately 1 day panel 20-inch) has a problem such that, the following methods have been taken in recent. 即ち、先ず1枚のガラス基板の周辺部にシール材を塗布した後、その内側の画像表示領域に一定量の液晶を滴下する。 That is, after the sealing material is applied first to the periphery of one glass substrate, is dropped a certain amount of liquid crystal in the image display area of ​​the inside. 次にこのガラス基板ともう1枚のガラス基板を真空中で貼り合わせる。 Then bonded to each other one glass substrate and the glass substrate in a vacuum. その後大気圧に戻し、加熱してシール材を硬化させる。 Then returned to atmospheric pressure, followed by heating to cure the sealing material.

【0004】この液晶の滴下は、2枚のガラス基板を貼り合わせた後に中の液晶が速やかに均一に拡がるように、多数の液滴(数十滴以上)に分けて広範囲に行う必要がある。 [0004] dropping of the liquid crystal, as liquid crystal medium after bonding two glass substrates spreads rapidly uniformly, it is necessary to perform a wide range divided into a number of droplets (several tens or more drops) . 滴下総重量が 500mgの場合には1滴が数mgとなる。 Dropping a total weight of 1 drop is several mg in the case of 500 mg. このような液晶滴下を行う装置及び方法の具体例としては、垂直に立てたマイクロシリンジに液晶を入れ、そのピストン(プランジャ)を精密送りすることでノズルから微量の液晶を吐出させてこれをガラス基板の上に滴下させ、ガラス基板かマイクロシリンジのいずれか一方を移動しつつ、この滴下を繰り返すものがある。 Specific examples of the apparatus and method for such a liquid crystal dropping, to get the liquid crystal in the micro-syringe upright, glass this by discharging liquid traces from a nozzle by precisely sending the piston (plunger) was dropped on the substrate, while moving one of the glass substrates or microsyringe is to repeat the dropwise.

【0005】 [0005]

【発明が解決しようとする課題】ところが、このような装置及び方法では、1回の滴下量が極めて微量(例えば、数mg程度)であるから、液晶のノズル先端への付着等の影響で毎回の滴下量にばらつきを生じ易く、その結果、滴下総重量の要求精度(例えば、±1%)を満足させることが困難である、という問題があった。 [SUMMARY OF THE INVENTION However, in such apparatus and methods, one drop amount is very small (e.g., about several mg) because it is, each time under the influence of adhesion of the nozzle tip of the liquid crystal tend to cause variations in the dropping amount, as a result, dropping the total weight of the required accuracy (e.g., ± 1%) it is difficult to satisfy, there is a problem that. また、マイクロシリンジ内に液晶を頻繁に補充する手間を要する、という問題もあった。 Moreover, time-consuming to frequently replenish the liquid in the micro-syringe, there is a problem that.

【0006】本発明は、このような問題を解決して、液晶滴下量のばらつきがなく、且つマイクロシリンジ内へ液晶を頻繁に補充する手間を省くことができる液晶滴下装置及び液晶滴下方法を提供することを目的とする。 The present invention, such problems are solved, no variation in the liquid crystal dropping amount, and provides a liquid crystal dropping device and liquid crystal dropping method which can avoid having to frequently replenish the liquid crystal into a microsyringe an object of the present invention is to.

【0007】 [0007]

【課題を解決するための手段】この目的を達成するため、本発明においては、液晶を貯留する液晶タンクと、 Means for Solving the Problems] To achieve this object, the present invention, a liquid crystal tank for storing liquid,
マイクロシリンジと、該マイクロシリンジのピストンを設定量だけ移動させるピストン精密送り機構と、滴下ノズルと、流路を切り換える切換弁とを有し、該切換弁の切り換えにより、該液晶タンクから該切換弁を介して該マイクロシリンジに連通する第一の流路と、該マイクロシリンジから該切換弁を介して該滴下ノズルに連通する第二の流路と、圧縮気体源から該切換弁を介して該滴下ノズルに連通する第三の流路とを順次形成し、該第一の流路形成時に該マイクロシリンジに液晶を取り込み、該第二の流路形成時に該液晶を該ピストン精密送り機構により該マイクロシリンジから所定量だけ吐出し、該第三の流路形成時に該第三の流路に圧縮気体を導入して該第三の流路内の液晶を該滴下ノズルから吐出することを特徴とする液晶滴下 And microsyringe, a piston precision feed mechanism for moving only the piston setting the amount of the micro-syringe, comprises a dropping nozzle, and a switching valve for switching the flow path, by switching the switching valve, the switching valve from the liquid tank a first flow path communicating with the microsyringe through the through the second flow channel communicating with the drip nozzle via the switching valve from the microsyringe, the switching valve from a compressed gas source the and a third flow path are sequentially formed communicating with the dropping nozzle takes in liquid in the micro-syringe when said first flow path forming, the said liquid crystal by the piston precision feed mechanism when said second flow path forming discharged from a micro syringe by a predetermined amount, and characterized in that by introducing a compressed gas into said third flow path when said third flow path forming ejects liquid crystal of said third flow path from the drip nozzle liquid crystal dropping to 置としている。 It is the location.

【0008】また、本発明においては、液晶を貯留する液晶タンクと、マイクロシリンジと、該マイクロシリンジのピストンを設定量だけ移動させるピストン精密送り機構と、滴下ノズルと、流路を切り替える切換弁とを有する液晶滴下装置を使用し、該液晶タンクから該切換弁を介して該マイクロシリンジに連通する第一の流路を形成して該液晶を該マイクロシリンジに取り込む工程と、 [0008] In the present invention, a liquid crystal tank for storing liquid, and a micro-syringe, a piston precision feed mechanism for moving only amount setting piston of the microsyringe, and dropping nozzle, a switching valve for switching the flow path a step of using a liquid crystal dropping device captures a first flow path the liquid crystal to form a communicating with the microsyringe through the switching valve from the liquid tank to the microsyringe having,
該マイクロシリンジから該切換弁を介して該滴下ノズルに連通する第二の流路を形成して該液晶を該ピストン精密送り機構により該マイクロシリンジから所定量だけ吐出する工程と、圧縮気体源から該切換弁を介して該滴下ノズルに連通する第三の流路を形成して該第三の流路に圧縮気体を導入することで該第三の流路内の液晶全量を該滴下ノズルから吐出する工程と、を有することを特徴とする液晶滴下方法としている。 A step of discharging the liquid by a predetermined amount from said microsyringe by the piston precision feed mechanism to form a second flow path communicating with the drip nozzle via the switching valve from the microsyringe, from the compressed gas source LCD total amount of said third flow path from the drip nozzle by introducing the third flow path formed by compressed gas to said third flow passage communicating with the drip nozzle via a switching valve and a liquid crystal dropping method characterized by having a step of discharging.

【0009】即ち、切換弁を含む流路に液晶を充填した後、切換弁により流路を切り換えるから、液晶が充填された流路が切換弁により分断されて液晶量が画定し、画定された液晶は圧縮気体で全量が滴下ノズルから押し出されるから、毎回の滴下量にばらつきを生じない。 [0009] That is, after filling the liquid crystal in a flow path including the switching valve, because switching the flow path by the switching valve, the liquid crystal amount flow path in which liquid crystal is filled is divided by switching valve defining, defined since the liquid crystal is the total amount in the compressed gas is pushed out from the drip nozzle, no variations in each of the dropping amount. また、この流路切り換えの1サイクル内に液晶を液晶タンクからマイクロシリンジに取り込む工程を含んでいるから、作業者が液晶をマイクロシリンジに補充する必要はない。 Further, since it includes the step of incorporating a microsyringe liquid crystal from the liquid crystal tank 1 cycle of the channel switching, the operator does not need to replenish the liquid in the micro-syringe.

【0010】 [0010]

【発明の実施の形態】以下、本発明の第一の実施の形態を、図1及び図2を参照しながら説明する。 DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. 図1は本発明の第一の実施の形態を示す装置構成図である。 Figure 1 is a device configuration diagram showing a first embodiment of the present invention. 同図において、1は切換弁、2は切換弁1の弁胴、3は切換弁1の弁体、4は液晶Lを貯留する液晶タンク、5は液晶Lの回収容器、6はマイクロシリンジ、7はマイクロシリンジ6のピストン(プランジャ)、8はピストン精密送り機構、9は滴下ノズルである。 In the figure, 1 is switching valve 2 is of the switching valve 1 valve body, the switching valve 1 valve body 3, the liquid crystal tank for storing the liquid crystal L 4, the collection container of the liquid crystal L 5, 6 is microsyringe, 7 of microsyringe 6 piston (plunger), 8 piston precision feed mechanism 9 is dropping nozzle.

【0011】切換弁1は5ポート4ポジションであり、 [0011] The switching valve 1 is a 5-port 4-position,
5個のポート2a〜2eを備えた弁胴2の中を、微細な貫通孔からなる通路3aを備えた弁体3が1回転して、 Through the valve body 2 provided with five ports 2a to 2e, and the valve element 3 is rotated 1 having a passageway 3a made of fine through-holes,
流路を4回切り換える。 It switched four times the flow path. 5個のポート2a〜2eは等しいピッチで配置されており(この例では中心角が各々60 5 ports 2a~2e are arranged at equal pitch (center angle in this example are each 60
°)、通路3aの両端間の距離は上記ポートの1ピッチに等しい。 °), the distance between the ends of the passage 3a is equal to one pitch of the port. ポート2aには回収容器5に至る回収管5a Recovery pipe 5a leading to the collection container 5 to the port 2a
が、ポート2bには液晶タンク4からの給液管4aが、 But the port 2b is the liquid supply pipe 4a of the liquid crystal tank 4,
ポート2cにはマイクロシリンジ6が、ポート2dには滴下ノズル9に至る吐出管9aが、ポート2eには圧縮気体源Gに連通する給気管9bが、それぞれ接続されている。 The port 2c microsyringe 6, a discharge pipe 9a leading to the dropping nozzle 9 to the port 2d is, the port 2e supply pipe 9b communicating with the compressed gas source G is connected, respectively. 液晶タンク4には圧縮気体源Gに連通する給気管4bが接続されている。 The liquid crystal tank 4 supply pipe 4b which communicates with the compressed gas source G is connected.

【0012】マイクロシリンジ6は細管(例えば内径が1mm以下)内をピストン7が滑動するものである。 [0012] microsyringe 6 is a piston 7 through the narrow pipe (e.g. inner diameter 1mm or less) to slide. ピストン精密送り機構8は例えばパルスモータとボールねじで構成され、ピストン7を設定量だけ精密送りする。 Piston precision feeding mechanism 8 is formed of, for example, a pulse motor and a ball screw, to precisely feed a set amount of the piston 7. 滴下ノズル9の先端の材質は、液晶をはじき易いテフロン(登録商標)等が望ましい。 The material of the tip of the dropping nozzle 9 is likely Teflon repel liquid crystal (registered trademark) is preferable.

【0013】図2(A)〜(D)は本発明の第一の実施の形態を示す流路図である。 [0013] FIG. 2 (A) ~ (D) is a flow path diagram showing a first embodiment of the present invention. 同図において、図1と同じものには同一の符号を付与した。 In the figure, it was given the same reference numerals the same as the FIG. 先ず切換弁1の通路3 First switching valve 1 passage 3
aがポート2aからポート2bに通じる第一のポジション(図2(A)参照)で、液晶タンク4に圧縮気体(窒素等の不活性ガス)を導入することで液晶Lを切換弁1 a is in the first position leading from the port 2a to port 2b (see FIG. 2 (A)), the switching valve to the liquid crystal L by introducing (inert gas such as nitrogen) compressed gas in the liquid crystal tank 4 1
の通路3aに充填する。 Filling the passageway 3a. 余分な液晶Lは回収管5aに逃がす。 Extra liquid L is released to the recovery pipe 5a. 次に通路3aがポート2bからポート2cに通じる第二のポジション(図2(B)参照)で、ピストン7 Next, in a second position in which passage 3a is communicated from the port 2b to the port 2c (see FIG. 2 (B)), the piston 7
をピストン精密送り機構により設定量だけ引き出すことでマイクロシリンジ6内に所定量の液晶Lを吸引する。 The sucking the liquid L having a predetermined amount of microsyringe 6 by withdrawing a set amount by a piston precision feeding mechanism.

【0014】次にポート2cからポート2dに通じる第三のポジション(図2(C)参照)で、ピストン7をピストン精密送り機構8により設定量だけ押し戻す。 [0014] Next, in a third position leading from port 2c to port 2d (see FIG. 2 (C)), pushing back the piston 7 by the set amount by a piston precision feeding mechanism 8. これにより所定量の液晶Lが通路3aから吐出管9a内に押し出される。 Thus the liquid crystal L in the predetermined amount is extruded from the passageway 3a into the discharge pipe 9a. 次にポート2dからポート2eに通じる第四のポジション(図2(D)参照)で、切換弁1に圧縮気体(窒素等の不活性ガス)を導入することで通路3a Fourth position (FIG. 2 (D) refer), the passage by introducing a compressed gas into the switching valve 1 (an inert gas such as nitrogen) 3a then leading from the port 2d to port 2e
内と吐出管9a内の液晶L全量を残らず滴下ノズル9から吐出させる。 Not remain liquid crystal L total amount of the inner and the discharge pipe 9a is ejected from the dropping nozzle 9. その後、第一のポジションに戻って、上記の工程を繰り返す。 Then, returning to the first position, repeat the above steps. 1滴当たり例えば3〜7mg、等間隔で数十滴以上に分けて広範囲に滴下する。 1 drop per example 3~7Mg, equidistant extensively dropwise in portions over a few tens of drops in.

【0015】次に、本発明の第二の実施の形態を、図3 [0015] Next, a second embodiment of the present invention, FIG. 3
を参照しながら説明する。 It refers to the will be described. 図3(A),(B)は本発明の第二の実施の形態を示す流路図である。 Figure 3 (A), (B) is a flow path diagram showing a second embodiment of the present invention. 同図において、図1,図2と同じものには同一の符号を付与した。 In the drawing, Figure 1, and the same reference numerals are the same as the FIG.
11は切換弁である。 11 is a switching valve. 切換弁11は4ポート2ポジションであり、4個のポート12a〜12dを備えた弁胴の中を、微細な貫通孔からなる2個の通路13a,13b Switching valve 11 is a four-port two-position, two passages 13a made through the valve body with four ports 12 a to 12 d, the fine through-hole, 13b
を備えた弁体が一定の範囲(この例では回転角90°)を回動して、流路を2回切り換える。 The valve body a certain range having a (the rotation angle of 90 ° in the example) by turning the switches twice the flow path.

【0016】4個のポート12a〜12dは等しいピッチで配置されており(この例では中心角が各々90°)、 The four ports 12a~12d are arranged at equal pitches (each 90 ° center angle in this example),
通路13a及び13bの両端間の距離はいずれも上記ポートの1ピッチに等しい。 Both the distance between the ends of the passages 13a and 13b is equal to one pitch of the port. ポート12aには液晶タンクからの給液管4aが、ポート12bにはマイクロシリンジ6が、ポート2dには滴下ノズル9に至る吐出管9a Liquid supply pipe 4a from the liquid crystal reservoir to the port 12a is microsyringe 6 the port 12b is, the port 2d discharge pipe 9a leading to the dropping nozzle 9
が、ポート12dには圧縮気体源に連通する給気管9b But supply pipe 9b communicating with the compressed gas source to the port 12d
が、それぞれ接続されている。 There are respectively connected.

【0017】先ず切換弁11の通路13aがポート12 The passage 13a of the first switching valve 11 is a port 12
aからポート12bに通じ、通路13bがポート12c Through the port 12b from a, passage 13b has ports 12c
からポート12dに通じる第一のポジション(図3 First position leading to the port 12d (Fig. 3
(A)参照)で、通路13aを含む流路では、ピストン7をピストン精密送り機構により設定量だけ引き出すことでマイクロシリンジ6内に所定量の液晶を液晶が充填された通路13aを介して吸引し、一方、通路13bを含む流路では、ポート12dから通路13bに圧縮気体(窒素等の不活性ガス)を導入し、前工程で吐出管9a In (A) reference), the flow path includes a passage 13a, the suction piston 7 via the piston precision feed mechanism by passage 13a filled liquid is a predetermined amount of liquid crystal in the micro-syringe 6 by withdrawing a set amount and, on the other hand, the flow path includes a passage 13b, introducing a compressed gas (inert gas such as nitrogen) from the port 12d to the passage 13b, the discharge pipe 9a in the previous step
内に充填されていた液晶全量を残らず滴下ノズル9から吐出させる。 Not remain a liquid crystal total amount that has been filled within discharged from dropping nozzle 9.

【0018】次に通路13aがポート12bからポート12cに通じ、通路13bがポート12aからポート1 [0018] Then leads from the passage 13a is port 12b to the port 12c, the port first passage 13b from port 12a
2dに通じる第二のポジション(図3(B)参照)で、 In the second position leading to 2d (see Fig. 3 (B)),
通路13aを含む流路では、ピストン7をピストン精密送り機構により設定量だけ押し戻し、これにより所定量の液晶が通路13aから吐出管9a内に押し出される。 The flow path includes a passage 13a, pushes back the piston 7 by the set amount by a piston precision feed mechanism, thereby predetermined amount of liquid crystal is pushed out from the passage 13a into the discharge pipe 9a.
一方、通路13bを含む流路では、動きがない。 On the other hand, the flow path includes a passage 13b, there is no movement. その後、第一のポジションに戻って、上記の工程を繰り返す。 Then, returning to the first position, repeat the above steps.

【0019】次に、本発明の第三の実施の形態を、図4 Next, a third embodiment of the present invention, FIG. 4
を参照しながら説明する。 It refers to the will be described. 図4は本発明の第三の実施の形態を示す部品断面図である。 Figure 4 is a part cross-sectional view showing a third embodiment of the present invention. 同図において、図1及び図2と同じものには同一の符号を付与した。 In the figure, it was given the same reference numerals the same as the FIGS. これは、前述の第一及び第二の実施の形態における滴下ノズル9に換えて、先端部が、吐出管9aが接続される内管19a This is instead of the dropping nozzle 9 in the first and second embodiment described above, the tip portion, the tube 19a of the discharge pipe 9a is connected
と給気管19cを介し圧縮気体源に連通する外管19b Outer tube 19b which communicates with the compressed gas source through the air supply pipe 19c and
からなる二重管構造をなす滴下ノズル19が装備されており、液晶が圧縮気体により内管19aから吐出する際に、別途、圧縮気体(窒素等の不活性ガス)を外管に導入して、液晶の吐出方向と平行に圧縮気体を吹き出すものである。 Dropping nozzle 19 forming a double tube structure is equipped consisting, when the liquid crystal is discharged from the inner tube 19a by compressed gas, separately, a compressed gas (inert gas such as nitrogen) is introduced into the outer tube it is intended to blow the liquid discharge direction parallel to compressed gas.

【0020】これにより、滴下ノズル先端の材質が液晶をはじきにくいものであっても、液晶がノズル先端に付着することはなく、従って、液晶の付着によって滴下量のばらつきを生じることはない。 [0020] Thus, also the material of the drip nozzle tip be those difficult repel liquid, liquid crystal is not able to adhere to the nozzle tip, thus, does not cause variations in the dropping amount by the liquid crystal adhesion of.

【0021】本発明は以上の例に限定されることなく、 [0021] The present invention is not limited to the above examples,
更に種々変形して実施することができる。 It can be carried out with further various modifications.

【0022】 [0022]

【発明の効果】以上説明したように、本発明によれば、 As described in the foregoing, according to the present invention,
毎回の液晶滴下量のばらつきがなく、且つマイクロシリンジ内へ液晶を頻繁に補充する手間を省くことができる液晶滴下装置及び液晶滴下方法を提供することができる。 No variation in each of the liquid crystal dropping amount, and it is possible to provide a liquid crystal dropping device and liquid crystal dropping method which can avoid having to frequently replenish the liquid crystal into a microsyringe.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】 本発明の第一の実施の形態を示す装置構成図である。 1 is a system configuration diagram showing a first embodiment of the present invention.

【図2】 本発明の第一の実施の形態を示す流路図である。 2 is a flow path diagram showing a configuration of a first embodiment of the present invention.

【図3】 本発明の第二の実施の形態を示す流路図である。 3 is a flow path diagram showing a configuration of a second embodiment of the present invention.

【図4】 本発明の第三の実施の形態を示す部品断面図である。 4 is a part cross-sectional view showing a third embodiment of the present invention.

【符号の説明】 DESCRIPTION OF SYMBOLS

1 切換弁 2 弁胴 2a,2b,2c,2d,2e ポート 3 弁体 3a 通路 4 液晶タンク 4a 給液管 4b 給気管 5 回収容器 5a 回収管 6 マイクロシリンジ 7 ピストン 8 ピストン精密送り機構 9 滴下ノズル 9a 吐出管 9b 給気管 11 切換弁 12a,12b,12c,12d ポート 13a,13b 通路 19 滴下ノズル 19a 内管 19b 外管 19c 給気管 1 switching valve 2 valve body 2a, 2b, 2c, 2d, 2e port 3 valve body 3a passage 4 crystal tank 4a and liquid feed line 4b supply pipe 5 collection container 5a recovery pipe 6 microsyringe 7 piston 8 piston precision feed mechanism 9 dropping nozzle 9a discharge pipe 9b supply pipe 11 switching valve 12a, 12b, 12c, 12d ports 13a, 13b passage 19 dropping nozzle 19a within tube 19b outer tube 19c supply pipe

Claims (3)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 液晶を貯留する液晶タンクと、マイクロシリンジと、該マイクロシリンジのピストンを設定量だけ移動させるピストン精密送り機構と、滴下ノズルと、 And 1. A liquid crystal tank for storing liquid, and a micro-syringe, a piston precision feed mechanism for moving only amount setting piston of the microsyringe, and dropping nozzle,
    流路を切り換える切換弁とを有し、該切換弁の切り換えにより形成される流路は、該液晶タンクから該切換弁を介して該マイクロシリンジに連通する第一の流路と、該マイクロシリンジから該切換弁を介して該滴下ノズルに連通する第二の流路と、圧縮気体源から該切換弁を介して該滴下ノズルに連通する第三の流路とが含まれ、該第一の流路は該マイクロシリンジに液晶を取り込み、該第二の流路は液晶を該ピストン精密送り機構により該マイクロシリンジから所定量だけ吐出し、該第三の流路は液晶を該滴下ノズルから吐出するものであることを特徴とする液晶滴下装置。 And a switching valve for switching the flow path, flow path formed by switching the switching valve has a first flow path communicating with the microsyringe through the switching valve from the liquid crystal tank, the microsyringe from a second flow path communicating with drip nozzle via a switching valve, includes a third flow passage communicating with the drip nozzle via the switching valve from a compressed gas source, said first flow path takes the liquid to the micro syringe, said second flow path discharges a liquid by a predetermined amount from said microsyringe by the piston precision feeding mechanism, said third flow path discharging the liquid from the drip nozzle a liquid crystal dropping device, characterized in that it is intended to.
  2. 【請求項2】 前記滴下ノズルは先端部が内管と外管からなる二重管構造をなし、該外管は圧縮気体源に連通し、前記液晶が該内管から吐出する際に該外管から圧縮気体を吹き出すことを特徴とする請求項1記載の液晶滴下装置。 Wherein said dropping nozzle forms a double pipe structure in which the tip portion is composed of inner and outer tubes, the outer tube communicates with the compressed gas source, external when the liquid crystal is discharged from the inner tube the liquid crystal dropping device according to claim 1, wherein a blowing compressed gas from the tube.
  3. 【請求項3】 請求項1記載の液晶滴下装置を使用し、 3. Using the liquid crystal dropping device according to claim 1,
    前記液晶タンクから前記切換弁を介して前記マイクロシリンジに連通する第一の流路を形成して液晶を該マイクロシリンジに取り込む工程と、該マイクロシリンジから該切換弁を介して前記滴下ノズルに連通する第二の流路を形成して該液晶を前記ピストン精密送り機構により該マイクロシリンジから所定量だけ吐出する工程と、圧縮気体源から該切換弁を介して該滴下ノズルに連通する第三の流路を形成して該第三の流路に圧縮気体を導入し、 A step of taking a liquid crystal to said microsyringe to form a first flow path communicating with the microsyringe through the switching valve from the liquid tank, communicating with the dropping nozzle via the switching valve from the microsyringe to the step of discharging a predetermined amount of said liquid crystal to form a second flow path from said microsyringe by the piston precision feed mechanism, from a compressed gas source third communicating with the drip nozzle via a switching valve to form a flow path introducing a compressed gas into said third flow passage,
    該第三の流路内の液晶全量を該滴下ノズルから吐出する工程と、を有することを特徴とする液晶滴下方法。 Liquid crystal dropping method characterized by comprising the step of discharging the liquid total amount of said third flow path from the drip nozzle, the.
JP2000087231A 2000-03-27 2000-03-27 Liquid crystal dropping device and liquid crystal dropping method Withdrawn JP2001272640A (en)

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