JP2001091727A - Production method of color filter substrate, color filter substrate and liquid crystal display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To produce a color filter substrate which does not lower the display grade of a liquid crystal panel and ensures no increase in cost while adopting columnar spacers. SOLUTION: A colored layer 16 (16R) is formed on a glass substrate 2a, exposed and developed, red, green and blue colored pixels 6R, 6G, 6B are formed in the required pattern shape and a light shielding layer 16K is formed on the pixels 6R, 6G, 6B, exposed from the rear face of the substrate 2a through the pixels 6R, 6G, 6B as a light shielding mask and exposed from the front face of the substrate 2a through a mask 17b having a columnar spacer pattern formed in a prescribed shape. The exposed light shielding layer 16K is developed to form a light shielding film 32 and columnar spacers 33 in one united body.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a color filter substrate for colorizing a liquid crystal display device, and more particularly, to forming a columnar spacer on a substrate and dispersing the spacers when forming the liquid crystal display device. The present invention relates to a color filter substrate and a method of manufacturing the same and a liquid crystal display device using the same.

[0002]

FIG. 9 shows a conventional thin film transistor (Th).
in Film Transistor, hereinafter referred to as "TF
T ". ) Type liquid crystal display device (hereinafter "liquid crystal panel")
Called. 10) shows a cross-sectional configuration, and FIG. 10 shows a plan configuration of a display area of the liquid crystal panel.

As shown in FIG. 9, a liquid crystal panel 1 has an array substrate 4 in which switching active elements (hereinafter, referred to as "active elements") 3 are formed on a glass substrate 2b, and R and R on the glass substrate 2a. G, B colored pixels 6R, 6G, 6B
Is bonded to the color filter substrate 5 with the sealing material 8 via the spherical spacers 7 scattered on one substrate (4 or 5), and the two glass substrates 2a and 2b are bonded together. It is configured by interposing a liquid crystal 9 in the gap.

As an example of an array substrate 4 used for the liquid crystal panel 1, active elements 3 formed along with signal lines and scanning lines are arranged in a matrix on a glass substrate 2b, and a flattening film 10 and pixels are formed thereon. An electrode 11 is formed. The active element 3 and the pixel electrode 11 are electrically connected via the contact hole 12. On the other hand, as shown in a plan view of FIG. 10 as an example of the color filter substrate 5, the color filter substrate 5 is a glass substrate 2a.
A matrix-like light-shielding film 13 is formed on the
RGB color pixels 6R, 6G, and 6B are formed in the gaps, and a transparent electrode 21 (see FIG. 9) is formed on the film surface of the light shielding film 13.

[0005] Opposing surfaces of the color filter substrate 5 and the array substrate 4 are provided with alignment films 14a and 14a, respectively.
b is formed, and a polarizing plate is attached to the front and back surfaces of the liquid crystal panel 1 according to the application. Here, a method for forming a general color filter substrate 5 will be described. In the color filter substrate 5, a chromium film, a resin black film in which a pigment is dispersed, or the like is used as the light shielding film 13. In addition, as a method for forming each of the colored pixels 6R, 6G, and 6B of the color filter substrate, methods such as a dyeing method, a pigment dispersion method, a printing method, an electrodeposition method, a film transfer method, and an inkjet method have been developed and disclosed. I have.

[0006] Among these methods, the film transfer method is cited as one of the effective methods because of high yield and easy handling of large substrates. The film transfer method will be described below. FIG. 11A shows a colored layer forming film of the film transfer method (the colored layer of the colored layer forming film is black,
11 (b) is a cross-sectional view of a colored layer forming film used in a film transfer method, and FIG. 12 (a) to FIG.
(F) is sectional drawing which shows each process of a film transfer method, respectively.

As shown in FIG. 11 (b), the film transfer method involves forming a red layer forming film 1 by forming a middle layer 19 on a base film 15 and coating a red layer 16R thereon.
8R, as shown in FIG.
The base film 15 is attached to the glass substrate 2a by thermocompression bonding between the base films 15a and 15b (see FIG. 12A).
Is removed, the red layer 16R is exposed to ultraviolet rays 20a using a mask 17a and developed (see FIG. 12B), thereby forming a red pixel 6R as shown in FIG. 12C. By repeating these steps three times, FIG.
As shown in FIG. 2D, the colored pixels 6R, 6
G and 6B are obtained. Further, FIG. 12 (e), FIG.
As shown in (b), a light-shielding layer forming film 1 formed by applying a light-shielding layer 16K on these pixels 6R, 6G, and 6B.
8K is thermocompressed and the base film 15 (omitted in FIG. 12) is peeled off.
Glass substrate 2 without using a photomask using the pattern of B colored pixels 6R, 6G, 6B as a mask pattern.
The light-shielding film 13 (see FIGS. 12 (f), 9 and 10) is formed by exposing from the back side of a (hereinafter referred to as "backside exposure") and developing. However, at the time of back surface exposure, the back surface exposure mask 17c is used to pattern the outer peripheral portion of the light shielding film 13.

Although the light-shielding film 13 can be formed only by back-surface exposure as described above, in some cases, in order to improve the surface properties of the light-shielding film 13, a mask 17 b having a desired light-shielding film pattern shape is formed from the front surface simultaneously with the back-surface exposure. It can be realized by exposing using. FIG.
20a and 20b in (e) are ultraviolet rays, respectively.

In recent years, for the purpose of improving the performance of the liquid crystal panel 1 such as simplification of the process of the liquid crystal panel and improvement of the contrast, a color filter substrate is used instead of the spherical spacers 7 formed on the surfaces of the glass substrates 2a and 2b. Attempts have been made to form columnar spacers for No. 5. When forming a columnar spacer on the color filter substrate 5,
The light-shielding film 13 is formed by exposing and developing the light-shielding film 13 in advance between the colored pixels 6R, 6G, and 6B formed in the required pattern shape on the glass substrate 2a, and then the columnar spacer is formed thereon.

[0010]

However, when the columnar spacer is formed on the color filter substrate 5, even if the height of the columnar spacer is uniform in the plane, the exposure and development of the light shielding film 13 formed at the lower portion are performed. Due to variations in film thickness at the time, the height of the columnar spacer forming portion becomes non-uniform in the plane, and when a liquid crystal panel is formed, there is a problem that the in-plane display quality is reduced due to gap unevenness.

Further, when a columnar spacer forming step, which is a new step, is provided, and a coating, exposure, and development of a spacer agent are performed, the number of manufacturing steps increases, leading to an increase in cost. The present invention solves the above-described problems, and a method of manufacturing a color filter substrate and a color filter substrate that can adopt a columnar spacer but do not reduce display quality as a liquid crystal panel or increase costs. And a liquid crystal display device.

[0012]

In order to solve such a problem, the present invention is to form a columnar spacer at the same time as a step of forming a light shielding film. That is, after forming the pixels of each color of RGB, after forming the light-shielding layer on the RGB pixels, together with the step of exposing the back surface to the light-shielding layer using the pixels of each color of RGB as a mask, The light-shielding layer is exposed to light using a mask of a columnar spacer pattern formed in a predetermined shape, and is developed to form a columnar spacer having a predetermined shape on the light-shielding film formed of the light-shielding layer.

As described above, by developing the light-shielding layer and forming the light-shielding film and the columnar spacer collectively, the total film thickness of the light-shielding film and the columnar spacer after development can be made constant. In addition, the gap of the liquid crystal panel can be made uniform.
As another method, a light-shielding layer and a resin layer for a spacer are laminated and formed by thermocompression bonding using a film for forming a light-shielding layer and a film for forming a resin layer for a spacer. By collectively developing, a columnar spacer having a predetermined shape is formed on the light shielding film.

Further, as another method of the above method, a colored layer forming film in which a light shielding layer and a spacer resin layer are previously formed on a base film is thermocompression-bonded to a substrate, and a light shielding layer and a spacer resin are formed on a glass substrate. After laminating the layers, exposure with a mask from the back surface exposure and the substrate surface,
A columnar spacer having a predetermined shape is formed on the light shielding film by collectively developing the stack.

As described above, in the conventional method, the thickness of the light-shielding film varies when developed alone, but in the present invention, the light-shielding layer and the resin layer for the spacer are collectively developed. In addition, the total thickness of the light-shielding film and the resin film (columnar spacer) after development can be made constant, and as a result,
The gap of the liquid crystal panel can be made uniform. Further, since the mask used for the front and back exposure for forming the columnar spacer and the formation of the light shielding film can be used repeatedly, the mask cost can be reduced. In addition, by performing simultaneous exposure and development of the light-shielding layer and the spacer resin layer on the substrate on which the RGB is formed, the light-shielding film and the columnar spacer can be collectively formed, and the process can be simplified.

[0016]

According to the first aspect of the present invention, a light-shielding film is formed between colored pixels formed in a required pattern on a glass substrate, and a columnar spacer having a predetermined columnar shape is formed on the light-shielding film. A method for manufacturing a color filter substrate, comprising: forming a colored film on a glass substrate;
After forming each colored pixel of B in a required pattern shape, a light-shielding layer is formed on the colored pixel, and the light-shielding layer is exposed to light from the back surface of the glass substrate using the colored pixel as a light-shielding mask; From above, the light-shielding layer is exposed using a mask of a columnar spacer pattern formed in a predetermined shape, and the light-shielding layer is developed, whereby the light-shielding film and the columnar spacer are integrally formed. I do.

According to a second aspect of the present invention, there is provided a color filter substrate in which a light shielding film is formed between colored pixels formed in a required pattern on a glass substrate, and a columnar spacer having a predetermined columnar shape is formed on the light shielding film. Forming a colored film on a glass substrate, exposing and developing, forming each colored pixel of RGB into a required pattern shape, and then forming a light shielding layer and a spacer on the glass substrate on which each colored pixel is formed. For the light-shielding layer from the back of the glass substrate using the colored pixels as a light-shielding mask, and from the surface of the glass substrate using a columnar spacer pattern mask formed in a predetermined shape. Exposure to the spacer resin layer,
The method is characterized in that the light shielding layer and the columnar spacer are collectively formed by simultaneously developing the light shielding layer and the spacer resin layer.

According to a third aspect of the present invention, in the method for manufacturing a color filter substrate according to the second aspect, the light-shielding layer and the resin layer for the spacer are formed by coating a light-shielding layer formed on a base film. Is applied to a glass substrate on which each colored pixel is formed, and further, a resin layer for a spacer formed by coating the base film is applied.

According to a fourth aspect of the present invention, in the method for manufacturing a color filter substrate according to the second aspect, the light-shielding layer and the resin layer for the spacer are formed by laminating and coating the light-shielding layer and the resin layer on the base film. The laminated portion formed as described above is attached to a glass substrate on which each colored pixel is formed. In the color filter substrate according to the fifth aspect of the present invention, a colored pixel is formed in a required pattern shape on a glass substrate, a light shielding film is formed between the colored pixels, and a columnar spacer is integrally formed with the light shielding film. It is characterized by being formed.

According to a sixth aspect of the present invention, in the color filter substrate according to the fifth aspect, the columnar spacer is made of the same material as the light shielding film. According to a seventh aspect of the present invention, in the color filter substrate of the fifth aspect, the light shielding film is formed of a light shielding material, and the columnar spacer is formed of a resin suitable for the spacer.

According to an eighth aspect of the present invention, in the color filter substrate according to the seventh aspect, the light shielding layer and the resin layer for the spacer are laminated to a required thickness.
According to a ninth aspect of the present invention, in the color filter substrate according to the eighth aspect, the total thickness of the layers constituting the light shielding film and the columnar spacer is larger than the thickness of the colored pixel portion.

According to a tenth aspect of the present invention, there is provided a liquid crystal display device including the color filter substrate according to any one of the fifth to ninth aspects. (Embodiment 1) FIG. 1 is a sectional view of a liquid crystal panel using a color filter substrate according to a first embodiment of the present invention. FIG. 2 is a plan view of the color filter substrate.
(A)-(f) is sectional drawing of each process of the manufacturing method of the same color filter substrate, respectively. Components having the same functions as those of the conventional liquid crystal panel are denoted by the same reference numerals, and description thereof will be omitted.

In the color filter substrate 31 of the liquid crystal panel 30, colored pixels 6R, 6G and 6B are formed in a required pattern on the glass substrate 2a.
A light shielding film is formed between R, 6G and 6B,
A columnar spacer 33 is formed integrally with the light shielding film 32. Here, the columnar spacer 33 is formed of the same material as the light shielding film 32. The height of the columnar spacer 33 is
As shown in FIG. 3F, the height is designed in accordance with the panel gap thickness required for the liquid crystal panel 30.
As shown in FIG. 1, the columnar spacers 33 are formed in the areas of the light-shielding film 32 between the colored pixels 6R, 6G, and 6B in a controlled shape and density (number of formations) as needed. .

The color filter substrate 31 is manufactured as follows. First, as shown in FIG. 3A, a colored layer 16R is formed on a glass substrate 2a by a spinner coating method or the like. At this time, in some cases, if the coloring layer 16 </ b> R contains an ultraviolet light shielding agent that blocks ultraviolet rays, the subsequent steps can be performed more effectively. Thereafter, as shown in FIG. 3B, exposure and development are performed using a photomask 17a to form a colored pixel 6 having a required pattern shape shown in FIG.
R is patterned. Thereafter, by repeating the same steps, the RGB colored pixels 6R, 6G, and 6B as shown in FIG. 3D are formed. Note that reference numeral 20a in FIG. 3B denotes ultraviolet light.

Next, as shown in FIG. 3E, a light-shielding layer 16K in which a pigment is dispersed on the colored pixels 6R, 6G, and 6B.
To form Thereafter, the back surface is exposed using the colored pixels 6R, 6G, and 6B as masks from the back surface side of the glass substrate 2a, and further exposed from the front surface side of the glass substrate 2a using a mask 17b of a columnar spacer pattern having a desired shape. By performing development, as shown in FIG.
Filter substrate 31 having columnar spacers 33 formed thereon
Can be formed. At this time, the back surface exposure mask 17c is used to form a peripheral pattern of the light shielding film 32. Note that 20a and 20b in FIG. 3E are ultraviolet rays.

As described above, by developing the light-shielding layer 16K exposed from both sides to form the light-shielding film 32 and the columnar spacers 33, the total thickness of the developed light-shielding film 32 and the columnar spacers 33 is kept constant. As a result, the gap of the liquid crystal panel 30 can be made uniform, and good display quality can be obtained. (Embodiment 2) FIG. 4 is a sectional view of a liquid crystal panel using a color filter substrate according to a second embodiment of the present invention. FIG. 5 is a plan view of the color filter substrate.
(A)-(f) is sectional drawing of each process of the manufacturing method of the same color filter substrate, respectively. Components having the same functions as those of the liquid crystal panel according to the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

In the color filter substrate 41 of the liquid crystal panel 40, colored pixels 6R, 6G and 6B are formed in a required pattern on the glass substrate 2a.
A light shielding film is formed between R, 6G and 6B,
A columnar spacer 43 is formed integrally with the light shielding film 42. Here, the light shielding film 42 is formed of a material suitable for light shielding, and the columnar spacer 43 is formed of a resin suitable for the spacer. Also, the height of the columnar spacer 43 is as shown in FIG.
As shown in (f), the control is performed by changing the film thickness of a spacer resin layer 45 described later according to the panel gap thickness required for each liquid crystal panel 40. As shown in FIG. 4, the columnar spacer 43 is formed in the area of the light-shielding film 42 between the colored pixels 6R, 6G, and 6B in a controlled shape and formation density (number of formations) as needed. .

The color filter substrate 41 is manufactured as follows. First, as shown in FIGS. 11A and 11B, a colored layer forming film 18 having a red layer 16R provided on a base film 15 with an intermediate layer 19 interposed therebetween is placed on a glass substrate 2a which has been heated in advance. Heat roll 22 in state
a, 22b and bonded to the glass substrate 2a. Then, after cooling the glass substrate 2a, the base film 15 is peeled off to form a film of the colored pixel 6R (see FIG. 6A). At this time, in some cases, if the film of the colored pixel 6R contains an ultraviolet light shielding agent that blocks ultraviolet light, the subsequent steps can be performed more effectively. After this, FIG.
As shown in FIG. 6B, the colored pixels 6R having a required pattern shape as shown in FIG. 6C are patterned by exposing and developing using a photomask 17a. Thereafter, by repeating the same steps, the RGB colored pixels 6R, 6G, and 6B as shown in FIG. 6D are formed. Note that 18a in FIG. 6B is ultraviolet light.

Next, as shown in FIG. 6E, a light-shielding layer 16K formed by dispersing a black pigment in a resin is formed on the colored pixels 6R, 6G, and 6B in the same manner as described above.
The light-shielding layer 16K is formed by coating on the glass substrate 2a, and the light-shielding layer 16K is thermocompression-bonded to the glass substrate 2a. Thereafter, the base film 15 is peeled off to form the light-shielding layer 16K. As shown, the photosensitive spacer resin layer 45 is thermocompression-bonded in a similar manner to form a laminated structure.

Thereafter, the back side is exposed from the back side of the glass substrate 2a using the colored pixels 6R, 6G, 6B as a mask, and further exposed from the front side of the glass substrate 2a using a mask 17b of a columnar spacer pattern having a desired shape. Light shielding layer 16K
6G, the color filter substrate 41 in which the columnar spacers 43 of the resin layer are formed on the light shielding film 42 as shown in FIG.
Can be obtained. At this time, in order to form a peripheral pattern of the light shielding film 42, the back surface exposure mask 17c is used.

As described above, by simultaneously developing the light shielding layer 16K and the spacer resin layer 45, the total film thickness of the light shielding film 42 and the spacer resin layer 45 after development becomes constant. As a result, the gap of the liquid crystal panel 40 can be made uniform, and good display quality can be obtained. Further, the color filter substrate 4 of the liquid crystal panel 40 may be manufactured as follows.

First, as shown in FIGS. 11A and 11B, a colored layer forming film 18 in which a red layer 16R is provided on a base film 15 via an intermediate layer 19 on a glass substrate 2a heated in advance. With the heat roll 22a,
22b and bonded to the glass substrate 2a by thermocompression. Then, after cooling the glass substrate 2a, the base film 15 is peeled off to form a film of the colored pixel 6R (see FIG. 7A). At this time, in some cases, the colored pixel 6
If the R film contains an ultraviolet light shielding agent that blocks ultraviolet light, the subsequent steps can be performed more effectively. After this, FIG.
As shown in FIG. 7B, exposure and development are performed using a photomask 17a to pattern the colored pixels 6R having a required pattern shape as shown in FIG. 7C. Thereafter, by repeating the same steps, the RGB colored pixels 6R, 6G, and 6B as shown in FIG. 7D are formed. Note that 18a in FIG. 7B is ultraviolet light.

Next, as shown in FIG. 7 (e), on the colored pixels 6R, 6G, 6B, as shown in FIG. Are laminated, and a colored layer forming film 46 on which a black light-shielding layer 16K is laminated is thermocompression-bonded, and then the base film 15 is peeled off. Thereafter, the back surface of the glass substrate 2a is exposed using the colored pixels 6R, 6G, and 6B as a mask, and the surface of the glass substrate 2a is exposed using a mask 17b of a columnar spacer pattern having a desired shape. And the spacer resin layer 45 are collectively developed, as shown in FIG.
The color filter substrate 41 in which the column spacer 43 of the resin layer is formed on the light shielding film 42 can be obtained. At this time,
In order to form a peripheral pattern of the light-shielding film 42, the back surface exposure mask 17c is used.

Also according to this manufacturing method, the light-shielding layer 16K and the spacer resin layer 45 are simultaneously developed, so that the total thickness of the light-shielding film 42 and the spacer resin layer 45 after development is made constant. As a result, the gap of the liquid crystal panel 40 can be made uniform, and good display quality can be obtained. Note that the colored layer forming film 46 used in this embodiment may be manufactured as follows. As shown in FIG. 8, an intermediate layer 19 is formed on a base film 15 using a polyethylene terephthalate film by applying a gravure coater, a die coater, a reverse coater, or the like, and then performing a heat treatment or the like to evaporate a solvent. Thereafter, the spacer resin layer 45 and the black light-shielding layer 1 are formed.
By applying 6K, a colored layer forming film 46 in which the intermediate layer 19, the spacer resin layer 45, and the light shielding layer 16K are laminated on the base film 15 can be formed. At this time, the thickness of the black light-shielding layer 16K is controlled in accordance with the required OD value (light-shielding ratio) and the level difference of the color filter. This is set according to the gap to be set.

(Embodiment 3) Next, the liquid crystal panel 3 using the color filter substrates 31 and 41 of the above embodiment will be described.
0 and 40 will be described with reference to FIGS. First, the liquid crystal panels 30 and 40 are the same as the array substrate 4 in which the active elements 3 are formed on the glass substrate 2b, as shown in FIG.
A color filter substrate in which projections composed of columnar spacers 33 and 43 are formed on the light-shielding films 32 and 42 between the R, G and B colored pixels 6R, 6G and 6B shown in FIG. 31 and 41 are bonded together with the sealing material 8 via the columnar spacers 33 and 43, and both glass substrates 2a,
It is constituted by interposing a liquid crystal 9 in the gap 2b.

As an example of the array substrate 4 used for the liquid crystal panels 30, 40, active elements 3 formed along with signal lines and scanning lines are arranged in a matrix on a glass substrate 2b, and a planarizing film is formed thereon. 10 and pixel electrode 1
1 is formed. The active element 3 and the pixel electrode 11
It is electrically conducted through the contact hole 12.

The color filter substrates 31,
On the surfaces of the liquid crystal panel 3 and the array substrate 4 opposite to each other, alignment films 14a and 14b are formed.
A polarizing plate is attached to the front and back surfaces of 0 and 40 depending on the use.

[0038]

As described above, the film thickness varies in the conventional development of the light shielding film alone. According to the present invention, the light shielding layer is developed to form the light shielding film and the columnar spacer. By forming the light-shielding layer and the spacer resin layer collectively, the total film thickness of the light-shielding film and the columnar spacer after development can be made constant within the plane, and as a result, the display quality with a uniform gap can be achieved. A liquid crystal panel excellent in is obtained.

Further, since the mask used for the front and back exposure for forming the columnar spacer and the formation of the light shielding film can be used repeatedly, the mask cost can be reduced. In addition, by performing simultaneous exposure and development of the light-shielding layer and the spacer resin layer on the substrate on which the RGB is formed, the light-shielding film and the columnar spacer can be collectively formed, and the process can be simplified.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a liquid crystal panel using a color filter substrate provided with columnar spacers according to a first embodiment of the present invention.

FIG. 2 is a plan view of the color filter substrate according to the embodiment.

FIGS. 3A to 3F are cross-sectional views showing respective manufacturing steps of the color filter substrate according to the embodiment.

FIG. 4 is a sectional view of a liquid crystal panel using a color filter substrate provided with columnar spacers according to a second embodiment of the present invention.

FIG. 5 is a plan view of the color filter substrate according to the embodiment.

FIGS. 6A to 6G are cross-sectional views illustrating respective manufacturing steps of the color filter substrate according to the same embodiment.

FIGS. 7A to 7F are cross-sectional views illustrating respective manufacturing steps of a color filter substrate according to another embodiment.

FIG. 8 is a cross-sectional view of a colored film for forming a columnar spacer used in manufacturing the color filter substrate according to the same embodiment.

FIG. 9 is a cross-sectional view of a liquid crystal panel using a color filter substrate by a conventional film transfer method.

FIG. 10 is a plan view of the conventional color filter substrate.

FIGS. 11A and 11B are a perspective view showing a state at the time of film thermal transfer in a film transfer method and a cross-sectional view of a colored film used in the film transfer method.

12 (a) to 12 (f) are cross-sectional views showing respective manufacturing steps of a conventional color filter substrate.

[Explanation of symbols]

2a Glass substrate 6R, 6G, 6B Colored pixel 15 Base film 16, 16R Colored layer 16K Light shielding layer 17a, 17b, 17c Mask 30, 40 Liquid crystal panel (liquid crystal display device) 31, 41 Color filter substrate 32, 42 Light shielding film 33, 43 Pillar spacer 45 Resin layer for spacer

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Hideki Matsukawa 1006 Kazuma, Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. F-term (reference) 2H048 BA11 BA43 BA45 BB02 BB07 BB08 BB44 2H089 LA09 LA11 NA07 NA14 QA12 QA14 QA16 TA09 TA12 TA13 2H091 FA02Y FA08X FA08Z FA34Y FB08 FC01 FC05 FC12 GA13 LA12 LA17 LA30

Claims (10)

[Claims] 1. A method for manufacturing a color filter substrate, comprising: forming a light-shielding film between colored pixels formed in a required pattern on a glass substrate; and forming a columnar spacer having a predetermined columnar shape on the light-shielding film. After a colored film is formed on a glass substrate and exposed and developed to form each of the colored pixels of RGB into a required pattern shape, a light shielding layer is formed on the colored pixels, and the colored pixels are shielded from the back surface of the glass substrate by a light shielding mask. Exposure to the light-shielding layer, and from the surface of the glass substrate to the light-shielding layer using a mask of a columnar spacer pattern formed in a predetermined shape, and developing the light-shielding layer, And a columnar spacer formed integrally with the color filter substrate. 2. A method for manufacturing a color filter substrate, comprising: forming a light-shielding film between colored pixels formed in a required pattern shape on a glass substrate; and forming a columnar spacer having a predetermined columnar shape on the light-shielding film. After forming a colored film on a glass substrate, exposing and developing to form each colored pixel of RGB into a required pattern shape, a light shielding layer and a resin layer for spacers are formed on the glass substrate on which each colored pixel is formed. The light-shielding layer is exposed to light using the colored pixels as a light-shielding mask from the rear surface of the glass substrate, and the resin layer for the spacer is exposed from the surface of the glass substrate using a columnar spacer pattern mask formed in a predetermined shape. A method of manufacturing a color filter substrate, comprising: forming a light-shielding film and a columnar spacer at a time by exposing and developing the light-shielding layer and the resin layer for a spacer at once. Method. 3. The light-shielding layer and the resin layer for a spacer are formed by applying a light-shielding layer formed by coating on a base film to a glass substrate on which each colored pixel is formed, and 3. The method for producing a color filter substrate according to claim 2, wherein the method is performed by attaching a resin layer for a spacer formed by coating the color filter substrate. 4. The light-shielding layer and the resin layer for a spacer are formed by laminating a light-shielding layer and a resin layer on a base film and pasting the laminated portion on a glass substrate on which each colored pixel is formed. 3. The method according to claim 2, wherein the color filter substrate is attached. 5. A colored pixel is formed in a required pattern on a glass substrate, a light shielding film is formed between the colored pixels, and a columnar spacer is formed integrally with the light shielding film. Color filter substrate. 6. The color filter substrate according to claim 5, wherein the columnar spacer is made of the same material as the light shielding film. 7. The color filter substrate according to claim 5, wherein the light shielding film is formed of a light shielding material, and the columnar spacer is formed of a resin suitable for the spacer. 8. The color filter substrate according to claim 7, wherein the light shielding layer and the spacer resin layer are laminated to a required thickness. 9. The color filter substrate according to claim 8, wherein the total thickness of the layers constituting the light shielding film and the columnar spacer is larger than the thickness of the colored pixel portion. 10. A liquid crystal display device comprising the color filter substrate according to claim 5.