JP2000310759A - Device for manufacturing liquid crystal display element and its method - Google Patents

Device for manufacturing liquid crystal display element and its method

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Publication number
JP2000310759A
JP2000310759A JP12123699A JP12123699A JP2000310759A JP 2000310759 A JP2000310759 A JP 2000310759A JP 12123699 A JP12123699 A JP 12123699A JP 12123699 A JP12123699 A JP 12123699A JP 2000310759 A JP2000310759 A JP 2000310759A
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substrate
vacuum
liquid crystal
suction
lower
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Norihiko Egami
典彦 江上
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Matsushita Electric Ind Co Ltd
松下電器産業株式会社
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Abstract

PROBLEM TO BE SOLVED: To stick together two substrates placed in positions opposite to each other without being broken and with excellent accuracy. SOLUTION: Relating to the device for manufacturing a liquid crystal display element the lower substrate 3 of which the upper surface is coated with an adhesive 1 and a liquid crystal material 2 is dropped thereon, is arranged in a vacuum vessel C in air so as to fix its lower full surface by vacuum suction, the upper substrate 6 is arranged so as to be placed opposite to the lower substrate 3 at prescribed interval to fix its upper full surface by vacuum suction and both or one of the substrates 3, 6 are moved and made close to be pressurized each other in vacuum to allow both substrates 3, 6 to be stuck together. In this case, plural suction systems 7a, 7b are provided on a suction mechanism 7 which sucks the upper full surface of the upper substrate 6 so as to suppress the suction power for sucking and fixing the upper substrate 6 in air and to prevent breaking of the upper substrate 6.

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【発明の属する技術分野】本発明は、パーソナルコンピュータやTV受像機等の画像表示パネルとして用いられる液晶表示素子の製造装置および方法に関するものである。 The present invention relates to relates to a manufacturing apparatus and method of the liquid crystal display device used as an image display panel such as a personal computer or a TV receiver.

【0002】 [0002]

【従来の技術】従来の液晶表示素子の製造装置について、図7〜図10を参照して説明する。 The Background of the manufacturing apparatus of a conventional liquid crystal display device will be described with reference to Figs.

【0003】液晶表示素子の構造は、図7に示すように、対向配置された透光性材料からなる下基板11と上基板12との間に一定ギャップを保つとともに、その間の空間に液晶材料13を充填した状態で両者が紫外線硬化型の接着剤14にて貼り合わされている。 [0003] structure of the liquid crystal display device, as shown in FIG. 7, with keeping a constant gap between the lower substrate 11 and upper substrate 12 made of oppositely disposed light-transmitting material, liquid crystal material therebetween a space both are bonded by an ultraviolet curing adhesive 14 in a state where 13 filled with. 接着剤14 Adhesive 14
には下基板11と上基板12の間隔を一定に保つためのスペーサ15(径5μm)が含まれている。 It contains spacers 15 (diameter 5 [mu] m) to maintain a constant distance between the lower substrate 11 and the upper substrate 12 in.

【0004】このように液晶材料13を接着剤14の内側に配置する一方法として、図8に示すように、下基板11に接着剤14を厚み30μmで塗布した後(工程a)、接着剤14の内側に液晶材料13を滴下し(工程b)、次に上基板12を重ね合わせて上基板12と下基板11の間隔が5μmになるまで加圧し(工程c)、その後紫外線16により接着剤14を硬化させ(工程d)、液晶表示素子を完成させる液晶滴下工法が知られている。 [0004] As one method of arranging the liquid crystal material 13 inside the adhesive 14, as shown in FIG. 8, after the adhesive 14 was applied with a thickness of 30μm on the lower substrate 11 (step a), the adhesive was added dropwise a liquid crystal material 13 inside the 14 (step b), warm to then superposed on the substrate 12 spacing of the upper substrate 12 and lower substrate 11 is 5μm pressure (a) (step c), adhesion by the subsequent UV 16 agent 14 is cured (step d), and the liquid crystal dropping process is known to complete a liquid crystal display device.

【0005】以下、上記2枚の基板の貼り合わせ方法について、図9、図10を参照して説明する。 [0005] Hereinafter, the bonding method of the above two substrates, Fig. 9 will be described with reference to FIG. 10.

【0006】まず、表面に紫外線硬化型の接着剤14が厚み30μmで塗布され、その接着剤14の内側に液晶材料13が配置された透光性材料からなる下基板11 [0006] First, the surface adhesive 14 of ultraviolet curing type is applied to a thickness 30μm, the lower substrate 11 made of a translucent material disposed liquid crystal material 13 inside the adhesive 14
を、水平方向に移動可能なテーブル17上に搭載し、下基板11の下側の全面を吸着機構18による真空吸着で固定する(工程a)。 And is mounted on horizontally movable table 17, fixes the lower whole surface of the lower substrate 11 by vacuum suction by the suction mechanism 18 (step a).

【0007】次に、透光性材料からなる上基板12の上側の全面を吸着機構19による真空吸着で固定し、真空容器Cを閉じて真空引きを行い、吸着機構19を垂直方向に下降させて、上基板12と液晶材料13または接着剤14を接触させる(工程b)。 [0007] Next, the upper entire surface of the upper substrate 12 made of a translucent material fixed with vacuum suction by the suction mechanism 19 performs vacuum by closing the vacuum chamber C, lowers the suction mechanism 19 in the vertical direction Te, contacting the upper substrate 12 and the liquid crystal material 13 or adhesive 14 (step b). 次に、下基板11を搭載したテーブル17を水平方向に移動させて、下基板1 Then, by moving the table 17 mounted with the lower substrate 11 in the horizontal direction, the lower substrate 1
1と上基板12の位置合わせを行う(工程c)。 1 and positioning of the upper substrate 12 carries out (step c).

【0008】次に、吸着機構19を垂直方向に下降させ、上基板12を接着剤14を介して下基板11に貼り合わせ、5μmまで加圧させる(工程d)。 [0008] Then, lowering the suction mechanism 19 in the vertical direction, bonded to the lower substrate 11 on the substrate 12 via an adhesive 14, thereby pressurized to 5 [mu] m (step d). その後、一体となった下基板11と上基板12を吸着機構20により真空吸着して真空容器Cから取り出して搬送する(工程e)。 Then conveyed taken out of the vacuum chamber C by vacuum suction by the suction mechanism 20 to lower substrate 11 and upper substrate 12 together (step e). 次に、紫外線16を照射して接着剤を硬化させて下基板11と上基板12の貼り合わせが完了する(工程f)。 Next, bonding is completed the lower substrate 11 and upper substrate 12 to cure the adhesive by irradiating ultraviolet rays 16 (step f).

【0009】 [0009]

【発明が解決しようとする課題】しかしながら、このような従来の装置では、真空容器の中で上基板の真空吸着を行うため、真空中での吸着力を確保するために広い吸着面積を要する。 [SUMMARY OF THE INVENTION However, in such a conventional apparatus, for performing the vacuum suction of the upper substrate in a vacuum chamber, requiring a large adsorption area in order to secure the suction force in vacuum. 例えば、上基板の厚さが0.7mmのガラスの場合は70%の開口率を要する。 For example, if the thickness of the upper substrate is a glass of 0.7mm require an aperture ratio of 70%. そうすると、 Then,
大気中で上基板12の上側の全面を吸着機構19で真空吸着して固定する時に吸着力が強すぎて、上基板12が吸着機構19に衝撃的に接触し、上基板12を破損するという問題があった。 That in the suction force is too strong when fixing by vacuum suction an upper entire surface of the upper substrate 12 by the suction mechanism 19 in the air, impulsively contacts the upper substrate 12 is suction mechanism 19, damage on the substrate 12 there was a problem.

【0010】また、下基板11と上基板12を貼り合わせ、5μmまで加圧し、一体となった下基板11と上基板12を吸着機構20による真空吸着で真空容器Cから取り出して搬送を行う時に、吸着パッド等による点吸着であるため、図10の工程eに図示のごとく、下基板1 Further, bonding the lower substrate 11 and upper substrate 12, 5 [mu] m to pressurized, when performing transport is removed from the vacuum chamber C the lower substrate 11 and upper substrate 12 which is integral with the vacuum suction by the suction mechanism 20 , because it is adsorbed point by the suction pad or the like, as shown in step e of FIG. 10, the lower substrate 1
1と上基板12が撓んでしまい、下基板11と上基板1 Will deflect 1 and the upper substrate 12, the lower substrate 11 and upper substrate 1
2とが位置ずれを起こすという問題があった。 2 and there has been a problem that causes a position shift.

【0011】また、一体となった下基板11と上基板1 [0011] In addition, the lower substrate 11, which together with the upper substrate 1
2を吸着機構20による真空吸着で真空容器Cから取り出して搬送を行い、別の装置により紫外線を照射して接着剤を硬化させるため、その間の移動により下基板11 2 was subjected to convey taken out from the vacuum vessel C by vacuum suction by the suction mechanism 20, for curing the adhesive by irradiating ultraviolet rays by a separate device, the lower substrate 11 by the movement therebetween
と上基板12が撓んでしまい、下基板11と上基板12 The upper substrate 12 will deflect and, the lower substrate 11 and upper substrate 12
とが位置ずれを起こすという問題があった。 Theft there has been a problem that causes a position shift.

【0012】本発明は、上記従来の問題点に鑑み、対向する位置に配置された2枚の基板を破損することなく精度良く貼り合わせることができる液晶表示素子製造装置を提供することを目的としている。 The present invention, in order to provide a liquid crystal display device manufacturing apparatus which can be tailored precisely attached without damaging the two substrates disposed in the light of the conventional problems, opposite position there.

【0013】 [0013]

【課題を解決するための手段】本発明の第1発明は、上面に接着剤が塗布され液晶材料が滴下された下基板を大気雰囲気中にて真空容器内に配置して下側の全面を真空吸着で固定し、下基板に対向するように所定の間隔で上基板を配置して上側の全面を真空吸着して固定し、真空雰囲気中にて両方又は一方の基板を接近移動させて相互に加圧し、両基板を貼り合わせるようにした液晶表示素子製造装置において、上基板の上側全面を真空吸着する吸着機構に複数の吸着系統を設けたものであり、大気中で上基板の上側の全面を吸着固定する時に吸着力を抑制できるので、上基板が吸着機構に衝撃的に接触して上基板が破損するのを防止できる。 SUMMARY OF THE INVENTION The first aspect of the present invention, the lower the entire surface beneath the substrate which adhesive is dripped liquid crystal material is applied is the upper surface disposed in a vacuum container in air atmosphere fixed with vacuum suction, and disposed on the substrate upper whole surface and fixed by vacuum suction, it is moved closer to one or both of the substrate in a vacuum atmosphere at a predetermined interval so as to face the lower substrate each other pressurized, the liquid crystal display device manufacturing apparatus that bonding both substrates, which has a plurality of suction lines to the suction mechanism for vacuum chucking the entire upper surface of the upper substrate, the upper of the upper substrate in the atmosphere it is possible to suppress the suction force over the entire surface when adsorbed and fixed, it is possible to prevent the upper substrate that is on the substrate damaged by impact contact with the suction mechanism.

【0014】両吸着系統は、大気圧中での吸着穴開口率よりも真空中での吸着穴開口率が大きくなるように構成される。 [0014] Both adsorption system is configured such that the suction holes opening ratio in a vacuum than suction holes opening ratio at atmospheric pressure increases.

【0015】また、本発明の第2発明は、上面に接着剤が塗布され液晶材料が滴下された下基板を大気雰囲気中にて真空容器内に配置して下側の全面を真空吸着で固定し、下基板に対向するように所定の間隔で上基板を配置して上側の全面を真空吸着して固定し、真空雰囲気中にて両方又は一方の基板を接近移動させて相互に加圧し、 [0015] The second aspect of the present invention is fixed in a vacuum suction the lower whole surface of the lower substrate which adhesive is dripped liquid crystal material is applied is the upper surface disposed in a vacuum container in air atmosphere and, the upper whole surface and fixed by vacuum suction by placing the upper substrate at a predetermined interval so as to face the lower substrate, another pressurizing one or both of the substrate was moved closer at a vacuum atmosphere,
両基板を貼り合わせるようにした液晶表示素子製造装置において、大気中で基板全面を平面で規制して吸着搬送する平面規制吸着搬送機構を設けたものであり、貼り合わせて一体となった下基板と上基板を撓みを生じさせることなく真空容器から搬送することができ、上基板と下基板の位置ずれを防止できる。 In the liquid crystal display device manufacturing apparatus that bonding both substrates, which provided a flat regulating suction conveying mechanism of the suction conveyance to regulate the entire surface of the substrate in plan in the air, the lower is integral bonded substrate and the deflection on the substrate can be conveyed from the vacuum chamber without causing, can prevent displacement of the upper and lower substrates.

【0016】また、本発明の第3発明は、上面に接着剤が塗布され液晶材料が滴下された下基板を大気雰囲気中にて真空容器内に配置して下側の全面を真空吸着で固定し、下基板に対向するように所定の間隔で上基板を配置して上側の全面を真空吸着して固定し、真空雰囲気中にて両方又は一方の基板を接近移動させて相互に加圧し、 [0016] A third aspect of the present invention is fixed in a vacuum suction the lower whole surface of the lower substrate which adhesive is dripped liquid crystal material is applied is the upper surface disposed in a vacuum container in air atmosphere and, the upper whole surface and fixed by vacuum suction by placing the upper substrate at a predetermined interval so as to face the lower substrate, another pressurizing one or both of the substrate was moved closer at a vacuum atmosphere,
両基板を貼り合わせるようにした液晶表示素子製造装置において、上基板と下基板を加圧した後真空容器内で接着剤を硬化する手段を設けたものであり、上基板と下基板を加圧した後真空容器内で接着剤を硬化し、その後に真空容器から搬送することにより上基板と下基板の位置ずれを防止できる。 In the liquid crystal display device manufacturing apparatus that bonding both substrates, which is provided with means for curing the adhesive in a vacuum vessel after pressurizing the upper and lower substrates, the upper and lower substrates pressure and curing the adhesive in a vacuum vessel after, can prevent displacement of the upper and lower substrates by then be conveyed from the vacuum vessel.

【0017】接着剤を硬化する手段は、紫外線照射手段を備え、また大気中で接着剤を硬化するようにしたものが好適であるが、真空中で硬化させてもよい。 The means for curing the adhesive comprises an ultraviolet irradiation means, also it is preferred that so as to cure the adhesive in the air, may be cured in vacuum.

【0018】 [0018]

【発明の実施の形態】(第1の実施形態)本発明の第1 DETAILED DESCRIPTION OF THE INVENTION (First Embodiment) The first of the present invention
の実施形態の液晶表示素子の製造装置について、図1、 An embodiment of an apparatus for manufacturing a liquid crystal display element, FIG. 1,
図2を参照して製造工程に沿って説明する。 Referring to FIG. 2 will be described with reference to manufacturing process.

【0019】まず、表面に厚み30μmで塗布された紫外線硬化型の接着剤1及びその接着剤1の内側に液晶材料2が配置された透光性材料からなる下基板3を、水平方向に移動可能なテーブル4上に搭載し、下基板3の下側の全面を大気圧中にて吸着機構5による真空吸着で固定する(工程a)。 Firstly, the lower substrate 3 made of a transparent material in which the liquid crystal material 2 is disposed on the inner side of the adhesive 1 and the adhesive 1 ultraviolet curable coated to a thickness 30μm on the surface, moved in a horizontal direction mounted on the available table 4, the lower the entire surface of the lower substrate 3 is fixed by vacuum suction by the suction mechanism 5 at atmospheric pressure (step a).

【0020】次に、下基板3に対向するように所定間隔で、透光性材料からなる上基板6を配置し、この上基板6の上側面を大気中にて吸着機構7による真空吸着で固定する(工程b)。 Next, at predetermined intervals so as to face the lower substrate 3, the upper substrate 6 made of a translucent material is disposed, the upper surface of the upper substrate 6 by vacuum suction by the suction mechanism 7 in the atmosphere fixed (step b). この時、吸着機構7の第1の吸着系統7aのみによって吸着固定する。 At this time, it adsorbs fixed only by the first adsorption system 7a of the suction mechanism 7. 次に、第2の吸着系統7bによる真空吸着を追加して吸着穴の開口率を大きくし、上基板6の全面を第1及び第2の吸着系統7a、 Next, add the vacuum suction by the second adsorption system 7b to increase the aperture ratio of the suction holes, the entire surface of the upper substrate 6 first and second adsorption systems 7a,
7bにて吸着固定する(工程c)。 Adsorption fixed at 7b (step c).

【0021】次に、真空容器Cを閉じて真空引きを行い、真空雰囲気中にて両方又は一方の基板3、6を基板の対向方向に相対移動させて位置合わせを行う(工程d)。 [0021] Next, the vacuum by closing the vacuum chamber C, to align by relatively moving one or both of the substrates 3,6 in the opposite direction of the substrate in a vacuum atmosphere (step d). 次に、両方又は一方の基板3、6を接近移動させて相互に加圧し、両基板3、6を貼り合わせる(工程e)。 Then, both or one of the substrates 3,6 is brought closer moving pressurized to each other, bonding both substrates 3,6 (step e).

【0022】その後、貼り合わせた両基板3、6を真空容器Cの外部に搬送し、紫外線照射手段8にて紫外線を照射して接着剤1を硬化させて、下基板3と上基板6の貼り合わせが完了する(工程f)。 [0022] Thereafter, the two substrates 3,6 by bonding of the vacuum chamber C is conveyed to the outside, by ultraviolet irradiation at the ultraviolet light irradiation means 8 to cure the adhesive 1, the lower substrate 3 and the upper substrate 6 bonding is completed (step f).

【0023】本実施形態によれば、大気中で上基板6の上側の全面を吸着機構7による真空吸着で固定する時に、第1の吸着系統7aのみで吸着することで吸着力を抑制できるので、上基板6が吸着機構7a及び7bに衝撃的に接触することがなく、上基板6を破損することがなくなる。 According to the present embodiment, when fixing the upper entire surface of the upper substrate 6 by vacuum suction by the suction mechanism 7 in the atmosphere, it is possible to suppress the suction force by suction only the first adsorption system 7a , without the upper substrate 6 is impulsively contacts the suction mechanism 7a and 7b, thereby preventing damage on the substrate 6. また、真空雰囲気中では第1と第2の吸着系統7a、7bで吸着固定するので、確実に固定される。 Further, the first and second adsorption system 7a is in a vacuum atmosphere, since the adsorption fixed 7b, is securely fixed.

【0024】(第2の実施形態)次に、本発明の第2の実施形態の液晶表示素子の製造装置について、図3、図4を参照して製造工程に沿って説明する。 [0024] (Second Embodiment) Next, a manufacturing device of a liquid crystal display device of the second embodiment of the present invention, FIG 3 will be described with reference to the manufacturing process with reference to FIG.

【0025】まず、表面に厚み30μmで塗布された紫外線硬化型の接着剤1及びその接着剤1の内側に液晶材料2が配置された透光性材料からなる下基板3を、水平方向に移動可能なテーブル4上に搭載し、下基板3の下側の全面を大気圧中にて吸着機構5による真空吸着で固定する(工程a)。 Firstly, the lower substrate 3 made of a transparent material in which the liquid crystal material 2 is disposed on the inner side of the adhesive 1 and the adhesive 1 ultraviolet curable coated to a thickness 30μm on the surface, moved in a horizontal direction mounted on the available table 4, the lower the entire surface of the lower substrate 3 is fixed by vacuum suction by the suction mechanism 5 at atmospheric pressure (step a).

【0026】次に、下基板3に対向するように所定間隔で、透光性材料からなる上基板6の上側の全面を吸着機構7による真空吸着で固定する(工程b)。 Next, at predetermined intervals so as to face the lower substrate 3, the upper entire surface of the upper substrate 6 made of a translucent material fixed in a vacuum suction by the suction mechanism 7 (step b). 次に、真空容器Cを閉じて真空引きを行い、真空雰囲気中にて、両方又は一方の基板3、6を基板の対向方向に相対移動させて位置合わせを行う(工程c)。 Next, the vacuum by closing the vacuum chamber C, in a vacuum atmosphere, one or both of the substrates 3,6 aligning are relatively moved in the opposite direction of the substrate (step c). 次に、両方又は一方の基板3、6を接近移動させて相互に加圧し、両基板3、6を貼り合わせる(工程d)。 Then, both or one of the substrates 3,6 is brought closer moving pressurized to each other, bonding both substrates 3,6 (step d).

【0027】次に、貼り合わせた両基板3、6の基板全面を平面規制した状態で吸着する平面規制吸着搬送機構9にて真空吸着して真空容器Cの外部に搬送する(工程e)。 Next, to convey to the outside of the vacuum chamber C by vacuum suction in a planar restricted suction conveying mechanism 9 for adsorbing the entire surface of the substrate of the two substrates 3 and 6 by bonding in a state where the plane restricted (step e). 次に、紫外線照射手段8にて紫外線を照射して接着剤1を硬化させて、下基板3と上基板6の貼り合わせが完了する(工程f)。 Then, by ultraviolet irradiation at the ultraviolet light irradiation means 8 to cure the adhesive 1, bonding of the lower substrate 3 and the upper substrate 6 is completed (step f).

【0028】本実施形態によれば、下基板3と上基板6 According to the present embodiment, the lower substrate 3 and the upper substrate 6
を貼り合わせ、5μmまで加圧後、一体となった下基板3と上基板6を平面規制吸着搬送機構9にて吸着して真空容器Cから取り出して搬送するので、搬送中に下基板3と上基板6が撓むことがなく、位置ずれを起こすことがない。 The bonded, 5 [mu] m up after pressurization, they carry is removed from the vacuum chamber C by adsorbing the lower substrate 3 and the upper substrate 6 together in a planar restricted suction conveying mechanism 9, the lower substrate 3 during transport without the upper substrate 6 deflects, never causing a positional shift.

【0029】(第3の実施形態)次に、本発明の第3の実施形態の液晶表示素子の製造装置について、図5、図6を参照して製造工程に沿って説明する。 [0029] (Third Embodiment) Next, a manufacturing device of a liquid crystal display device of the third embodiment of the present invention, FIG. 5 will be described with reference to manufacturing process with reference to FIG.

【0030】まず、表面に厚み30μmで塗布された紫外線硬化型の接着剤1及びその接着剤1の内側に液晶材料2が配置された透光性材料からなる下基板3を、水平方向に移動可能なテーブル4上に搭載し、下基板3の下側の全面を大気圧中にて吸着機構5による真空吸着で固定する(工程a)。 [0030] First, the lower substrate 3 made of a transparent material in which the liquid crystal material 2 is disposed on the inner side of the adhesive 1 and the adhesive 1 ultraviolet curable coated to a thickness 30μm on the surface, moved in a horizontal direction mounted on the available table 4, the lower the entire surface of the lower substrate 3 is fixed by vacuum suction by the suction mechanism 5 at atmospheric pressure (step a).

【0031】次に、下基板3に対向するように所定間隔で、透光性材料からなる上基板6の上側の全面を吸着機構7による真空吸着で固定する(工程b)。 Next, at predetermined intervals so as to face the lower substrate 3, the upper entire surface of the upper substrate 6 made of a translucent material fixed in a vacuum suction by the suction mechanism 7 (step b). 次に、真空容器Cを閉じて真空引きを行い、真空雰囲気中にて、両方又は一方の基板3、6を基板の対向方向に相対移動させて位置合わせを行う(工程c)。 Next, the vacuum by closing the vacuum chamber C, in a vacuum atmosphere, one or both of the substrates 3,6 aligning are relatively moved in the opposite direction of the substrate (step c). 次に、両方又は一方の基板3、6を接近移動させて相互に加圧し、両基板3、6を貼り合わせる(工程d)。 Then, both or one of the substrates 3,6 is brought closer moving pressurized to each other, bonding both substrates 3,6 (step d).

【0032】次に、真空容器C内のテーブル4上で、貼り合わされた両基板3、6が吸着固定された状態で紫外線照射手段8にて紫外線を照射して接着剤1を硬化させて、下基板3と上基板6の貼り合わせが完了する(工程e)。 Next, on the table 4 in the vacuum chamber C, the substrates 3,6 are bonded together is to cure the adhesive 1 was irradiated with ultraviolet in the ultraviolet light irradiation means 8 in a state of being sucked and secured, bonding is completed the lower substrate 3 and the upper substrate 6 (step e). その後、適宜搬送手段(図示せず)にて真空容器Cから取り出して搬送される。 Then it conveyed removed from the vacuum chamber C by appropriate conveying means (not shown).

【0033】本実施形態によれば、下基板3と上基板6 According to the present embodiment, the lower substrate 3 and the upper substrate 6
を貼り合わせ、5μmまで加圧後、一体となった下基板3と上基板6に対して、同じ装置に設置した紫外線照射手段8にて紫外線を照射して接着剤1を硬化させるため、下基板3と上基板6が撓むことがなく、位置ずれを起こすことがない。 The bonded, 5 [mu] m up after pressurization, to cure with respect to the lower substrate 3 and the upper substrate 6 together, the adhesive 1 is irradiated with ultraviolet in the ultraviolet light irradiation means 8 installed in the same apparatus, under without substrate 3 and the upper substrate 6 deflects, never causing a positional shift. なお、紫外線照射は、真空加圧中に行ってもよい。 Incidentally, the ultraviolet irradiation may be carried out in a vacuum during pressurization.

【0034】 [0034]

【発明の効果】本発明の第1発明によれば、上基板の上側全面を真空吸着する吸着機構に複数の吸着系統を設けたので、大気中で上基板の上側の全面を吸着固定する時に吸着力を抑制できるので、上基板が吸着機構に衝撃的に接触して上基板が破損するのを防止できる。 According to a first aspect of the present invention, the entire upper surface of the upper substrate is provided with the plurality of suction lines to the suction mechanism for vacuum suction, when chucking the upper entire surface of the upper substrate in the atmosphere it is possible to suppress the suction force, thereby preventing the upper substrate that is on the substrate damaged by impact contact with the suction mechanism.

【0035】また、第2発明によれば、大気中で基板全面を平面で規制して吸着搬送する平面規制吸着搬送機構を設けたので、貼り合わせて一体となった下基板と上基板を撓みを生じさせることなく真空容器から搬送することができ、上基板と下基板の位置ずれを防止できる。 Further, according to the second invention, since there is provided a flat regulating suction conveying mechanism of the suction conveyance to regulate the entire surface of the substrate in plan in the air, bending the lower substrate and the upper substrate which is integral bonded can be transported from the vacuum chamber without causing, it can prevent displacement of the upper and lower substrates.

【0036】また、第3発明によれば、上基板と下基板を加圧した後真空容器内で接着剤を硬化する手段を設けたので、上基板と下基板を加圧した後真空容器内で接着剤を硬化し、その後に真空容器から搬送することにより上基板と下基板の位置ずれを防止できる。 Further, according to the third invention, since a means for curing the adhesive in a vacuum vessel after pressurizing the upper and lower substrates, the vacuum chamber after pressurizing the upper and lower substrates in the adhesive cures, it is possible to prevent positional deviation of the upper and lower substrates by then be conveyed from the vacuum vessel.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】本発明の第1の実施形態の液晶素子製造装置による製造工程を示す模式断面図である。 1 is a schematic sectional view showing the manufacturing process by the liquid crystal device manufacturing apparatus of the first embodiment of the present invention.

【図2】同実施形態の製造工程の続きを示す模式断面図である。 2 is a schematic sectional view showing a continuation of the manufacturing process of the embodiment.

【図3】本発明の第2の実施形態の液晶素子製造装置による製造工程を示す模式断面図である。 3 is a schematic sectional view showing the manufacturing process by the liquid crystal device manufacturing apparatus of the second embodiment of the present invention.

【図4】同実施形態の製造工程の続きを示す模式断面図である。 4 is a schematic sectional view showing a continuation of the manufacturing process of the embodiment.

【図5】本発明の第3の実施形態の液晶素子製造装置による製造工程を示す模式断面図である。 5 is a schematic sectional view showing the manufacturing process by the liquid crystal device manufacturing apparatus of the third embodiment of the present invention.

【図6】同実施形態の製造工程の続きを示す模式断面図である。 6 is a schematic sectional view showing a continuation of the manufacturing process of the embodiment.

【図7】液晶表示装置の構造を示す模式断面図である。 7 is a schematic sectional view showing a structure of a liquid crystal display device.

【図8】液晶表示装置の製造工程を示す模式断面図である。 8 is a schematic sectional view showing a manufacturing process of a liquid crystal display device.

【図9】従来例の液晶表示装置の製造工程を示す模式断面図である。 9 is a schematic sectional view showing a manufacturing process of a conventional liquid crystal display device.

【図10】同従来例の液晶表示装置の製造工程の続きを示す模式断面図である。 10 is a schematic sectional view showing a continuation of the manufacturing process of the conventional liquid crystal display device.

【符号の説明】 DESCRIPTION OF SYMBOLS

1 接着剤 2 液晶材料 3 下基板 5 吸着機構 6 上基板 7 吸着機構 7a 第1の吸着系統 7b 第2の吸着系統 8 紫外線照射手段 9 平面規制吸着搬送機構 C 真空容器 1 adhesive 2 crystal material 3 lower substrate 5 suction mechanism 6 on the substrate 7 suction mechanism 7a first adsorption system 7b second adsorption system 8 ultraviolet light irradiation means 9 plan regulating suction conveying mechanism C vacuum vessel

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2H088 EA02 FA03 FA04 FA16 FA17 FA20 FA30 HA01 KA02 MA17 MA20 4D075 AC06 AC82 AC88 BB46Z CA47 DA06 DB11 DC19 DC22 EA21 EA35 4F042 AA06 BA06 DB41 DF09 5F031 CA05 GA08 ────────────────────────────────────────────────── ─── front page of continued F-term (reference) 2H088 EA02 FA03 FA04 FA16 FA17 FA20 FA30 HA01 KA02 MA17 MA20 4D075 AC06 AC82 AC88 BB46Z CA47 DA06 DB11 DC19 DC22 EA21 EA35 4F042 AA06 BA06 DB41 DF09 5F031 CA05 GA08

Claims (9)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 上面に接着剤が塗布され液晶材料が滴下された下基板を大気雰囲気中にて真空容器内に配置して下側の全面を真空吸着で固定し、下基板に対向するように所定の間隔で上基板を配置して上側の全面を真空吸着して固定し、真空雰囲気中にて両方又は一方の基板を接近移動させて相互に加圧し、両基板を貼り合わせるようにした液晶表示素子製造装置において、上基板の上側全面を真空吸着する吸着機構に複数の吸着系統を設けたことを特徴とする液晶表示素子製造装置。 1. A a lower substrate in which the adhesive is dropped liquid crystal material is applied is the upper surface of the lower side of the whole surface and fixed with vacuum suction disposed in a vacuum container in the air atmosphere, so as to face the lower substrate disposed on the substrate at a predetermined interval in the upper side of the whole surface and fixed by vacuum suction, one or both of the substrate is brought closer moving pressurized to each other in a vacuum atmosphere, so as to bond the two substrates in the liquid crystal display device manufacturing apparatus, a liquid crystal display device manufacturing apparatus characterized in that a plurality of suction lines to the entire upper surface of the upper substrate suction mechanism to vacuum suction.
  2. 【請求項2】 両吸着系統は、大気圧中での吸着穴開口率よりも真空中での吸着穴開口率が大きくなるように構成したことを特徴とする請求項1記載の液晶表示素子製造装置。 Wherein both adsorption system includes a liquid crystal display device manufactured according to claim 1, characterized by being configured such that suction holes opening ratio in a vacuum than suction holes opening ratio at atmospheric pressure increases apparatus.
  3. 【請求項3】 上面に接着剤が塗布され液晶材料が滴下された下基板を大気雰囲気中にて真空容器内に配置して下側の全面を真空吸着で固定し、下基板に対向するように所定の間隔で上基板を配置して上側の全面を真空吸着して固定し、真空雰囲気中にて両方又は一方の基板を接近移動させて相互に加圧し、両基板を貼り合わせるようにした液晶表示素子製造装置において、大気中で基板全面を平面で規制して吸着搬送する平面規制吸着搬送機構を設けたことを特徴とする液晶表示素子製造装置。 Wherein the lower substrate which adhesive is dripped liquid crystal material is applied is the upper surface fixed with vacuum suction the lower whole surface and placed in a vacuum chamber in the air atmosphere, so as to face the lower substrate disposed on the substrate at a predetermined interval in the upper side of the whole surface and fixed by vacuum suction, one or both of the substrate is brought closer moving pressurized to each other in a vacuum atmosphere, so as to bond the two substrates in the liquid crystal display device manufacturing apparatus, a liquid crystal display device manufacturing apparatus characterized in that a flat regulating suction conveying mechanism of the suction conveyance to regulate the entire surface of the substrate in plan in the air.
  4. 【請求項4】 上面に接着剤が塗布され液晶材料が滴下された下基板を大気雰囲気中にて真空容器内に配置して下側の全面を真空吸着で固定し、下基板に対向するように所定の間隔で上基板を配置して上側の全面を真空吸着して固定し、真空雰囲気中にて両方又は一方の基板を接近移動させて相互に加圧し、両基板を貼り合わせるようにした液晶表示素子製造装置において、上基板と下基板を加圧した後真空容器内で接着剤を硬化する手段を設けたことを特徴とする液晶表示素子製造装置。 Wherein the lower substrate which adhesive is dripped liquid crystal material is applied is the upper surface fixed with vacuum suction the lower whole surface and placed in a vacuum chamber in the air atmosphere, so as to face the lower substrate disposed on the substrate at a predetermined interval in the upper side of the whole surface and fixed by vacuum suction, one or both of the substrate is brought closer moving pressurized to each other in a vacuum atmosphere, so as to bond the two substrates in the liquid crystal display device manufacturing apparatus, a liquid crystal display device manufacturing apparatus characterized in that a means for curing the adhesive in a vacuum vessel after pressurizing the upper and lower substrates.
  5. 【請求項5】 接着剤を硬化する手段が紫外線照射手段を備えることを特徴とする請求項4記載の液晶表示素子製造装置。 5. A means for curing the adhesive liquid crystal display device manufacturing apparatus according to claim 4, characterized in that it comprises the ultraviolet light irradiation means.
  6. 【請求項6】 接着剤を硬化する手段を大気中で接着剤を硬化するようにしたことを特徴とする請求項4記載の液晶表示素子製造装置。 Wherein the means for curing the adhesive, characterized in that so as to cure the adhesive in the air according to claim 4 liquid crystal display element manufacturing apparatus according.
  7. 【請求項7】 上面に接着剤が塗布され液晶材料が滴下された下基板を大気雰囲気中にて真空容器内に配置して下側の全面を真空吸着で固定し、下基板に対向するように所定の間隔で上基板を配置して上側の全面を真空吸着して固定し、真空雰囲気中にて両方又は一方の基板を接近移動させて相互に加圧し、両基板を貼り合わせるようにする液晶表示素子製造方法において、複数の吸着系統を設けた吸着機構によって上基板の上側全面を真空吸着することを特徴とする液晶表示素子製造方法。 7. The lower substrate which adhesive is dripped liquid crystal material is applied is the upper surface fixed with vacuum suction the lower whole surface and placed in a vacuum chamber in the air atmosphere, so as to face the lower substrate disposed on the substrate at a predetermined interval in the upper side of the whole surface and fixed by vacuum suction, both or one of the substrate was moved closer to each other under pressure, so that bonding both substrates in a vacuum atmosphere in the liquid crystal display device manufacturing method, a liquid crystal display device manufacturing method characterized by vacuum suction entire upper surface of the upper substrate by adsorption mechanism provided with a plurality of suction lines.
  8. 【請求項8】 上面に接着剤が塗布され液晶材料が滴下された下基板を大気雰囲気中にて真空容器内に配置して下側の全面を真空吸着で固定し、下基板に対向するように所定の間隔で上基板を配置して上側の全面を真空吸着して固定し、真空雰囲気中にて両方又は一方の基板を接近移動させて相互に加圧し、両基板を貼り合わせるようにした液晶表示素子製造方法において、平面規制吸着搬送機構によって、大気中で基板全面を平面で規制して吸着搬送することを特徴とする液晶表示素子製造方法。 8. The lower substrate which adhesive is dripped liquid crystal material is applied is the upper surface fixed with vacuum suction the lower whole surface and placed in a vacuum chamber in the air atmosphere, so as to face the lower substrate disposed on the substrate at a predetermined interval in the upper side of the whole surface and fixed by vacuum suction, one or both of the substrate is brought closer moving pressurized to each other in a vacuum atmosphere, so as to bond the two substrates in the liquid crystal display device manufacturing method, a liquid crystal display device manufacturing method of the planar regulating suction conveying mechanism, characterized in that the suction conveyance to regulate the entire surface of the substrate in plan in the air.
  9. 【請求項9】 上面に接着剤が塗布され液晶材料が滴下された下基板を大気雰囲気中にて真空容器内に配置して下側の全面を真空吸着で固定し、下基板に対向するように所定の間隔で上基板を配置して上側の全面を真空吸着して固定し、真空雰囲気中にて両方又は一方の基板を接近移動させて相互に加圧し、両基板を貼り合わせるようにした液晶表示素子製造方法において、上基板と下基板を加圧した後真空容器内で接着剤を硬化することを特徴とする液晶表示素子製造方法。 9. The lower substrate which adhesive is dripped liquid crystal material is applied is the upper surface of the lower side of the whole surface and fixed with vacuum suction disposed in a vacuum container in the air atmosphere, so as to face the lower substrate disposed on the substrate at a predetermined interval in the upper side of the whole surface and fixed by vacuum suction, one or both of the substrate is brought closer moving pressurized to each other in a vacuum atmosphere, so as to bond the two substrates in the liquid crystal display device manufacturing method, a liquid crystal display device manufacturing method characterized by curing the adhesive in a vacuum vessel after pressurizing the upper and lower substrates.
JP12123699A 1999-04-28 1999-04-28 Device for manufacturing liquid crystal display element and its method Pending JP2000310759A (en)

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