JP2012118545A5 - - Google Patents
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- Publication number
- JP2012118545A5 JP2012118545A5 JP2012003869A JP2012003869A JP2012118545A5 JP 2012118545 A5 JP2012118545 A5 JP 2012118545A5 JP 2012003869 A JP2012003869 A JP 2012003869A JP 2012003869 A JP2012003869 A JP 2012003869A JP 2012118545 A5 JP2012118545 A5 JP 2012118545A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- insulating layer
- forming
- wiring
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims 17
- 238000000034 method Methods 0.000 claims 7
- 229910052710 silicon Inorganic materials 0.000 claims 6
- 239000010703 silicon Substances 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 5
- 238000005530 etching Methods 0.000 claims 4
- 239000000126 substance Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 2
- 238000001039 wet etching Methods 0.000 claims 2
- 239000012044 organic layer Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012003869A JP5298208B2 (ja) | 1999-06-21 | 2012-01-12 | 表示装置の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17473499 | 1999-06-21 | ||
| JP1999174734 | 1999-06-21 | ||
| JP2012003869A JP5298208B2 (ja) | 1999-06-21 | 2012-01-12 | 表示装置の作製方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000177639A Division JP5210473B2 (ja) | 1999-06-21 | 2000-06-13 | 表示装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013056395A Division JP5459921B2 (ja) | 1999-06-21 | 2013-03-19 | 表示装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012118545A JP2012118545A (ja) | 2012-06-21 |
| JP2012118545A5 true JP2012118545A5 (enExample) | 2012-12-13 |
| JP5298208B2 JP5298208B2 (ja) | 2013-09-25 |
Family
ID=15983742
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000177639A Expired - Fee Related JP5210473B2 (ja) | 1999-06-21 | 2000-06-13 | 表示装置 |
| JP2012003869A Expired - Fee Related JP5298208B2 (ja) | 1999-06-21 | 2012-01-12 | 表示装置の作製方法 |
| JP2013056395A Expired - Lifetime JP5459921B2 (ja) | 1999-06-21 | 2013-03-19 | 表示装置 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000177639A Expired - Fee Related JP5210473B2 (ja) | 1999-06-21 | 2000-06-13 | 表示装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013056395A Expired - Lifetime JP5459921B2 (ja) | 1999-06-21 | 2013-03-19 | 表示装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (10) | US6452341B1 (enExample) |
| EP (2) | EP2385557A1 (enExample) |
| JP (3) | JP5210473B2 (enExample) |
| KR (4) | KR100653405B1 (enExample) |
| CN (4) | CN100423617C (enExample) |
| TW (1) | TW483287B (enExample) |
Families Citing this family (139)
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2004
- 2004-11-04 US US10/980,603 patent/US7466293B2/en not_active Expired - Lifetime
- 2004-11-04 US US10/980,600 patent/US7312572B2/en not_active Expired - Lifetime
-
2005
- 2005-06-15 KR KR1020050051311A patent/KR100653791B1/ko not_active Expired - Lifetime
- 2005-06-15 KR KR1020050051310A patent/KR100653761B1/ko not_active Expired - Lifetime
- 2005-06-15 KR KR1020050051312A patent/KR100653809B1/ko not_active Expired - Lifetime
-
2007
- 2007-10-18 US US11/907,860 patent/US7821200B2/en not_active Expired - Fee Related
-
2010
- 2010-09-28 US US12/892,277 patent/US8405594B2/en not_active Expired - Fee Related
-
2012
- 2012-01-12 JP JP2012003869A patent/JP5298208B2/ja not_active Expired - Fee Related
-
2013
- 2013-02-26 US US13/776,772 patent/US8558773B2/en not_active Expired - Fee Related
- 2013-03-19 JP JP2013056395A patent/JP5459921B2/ja not_active Expired - Lifetime
- 2013-09-19 US US14/031,088 patent/US8830146B2/en not_active Expired - Fee Related
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2014
- 2014-08-11 US US14/456,294 patent/US8941565B2/en not_active Expired - Fee Related
- 2014-12-16 US US14/571,897 patent/US9659524B2/en not_active Expired - Fee Related
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