JP2001274355A - 半導体記憶装置及びデータ処理装置 - Google Patents

半導体記憶装置及びデータ処理装置

Info

Publication number
JP2001274355A
JP2001274355A JP2001008434A JP2001008434A JP2001274355A JP 2001274355 A JP2001274355 A JP 2001274355A JP 2001008434 A JP2001008434 A JP 2001008434A JP 2001008434 A JP2001008434 A JP 2001008434A JP 2001274355 A JP2001274355 A JP 2001274355A
Authority
JP
Japan
Prior art keywords
semiconductor memory
memory cell
semiconductor
memory device
memory
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2001008434A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001274355A5 (enExample
Inventor
Tomoyuki Ishii
智之 石井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2001008434A priority Critical patent/JP2001274355A/ja
Publication of JP2001274355A publication Critical patent/JP2001274355A/ja
Publication of JP2001274355A5 publication Critical patent/JP2001274355A5/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C5/00Details of stores covered by group G11C11/00
    • G11C5/06Arrangements for interconnecting storage elements electrically, e.g. by wiring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/005Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor comprising combined but independently operative RAM-ROM, RAM-PROM, RAM-EPROM cells
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/04Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0408Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
    • G11C16/0416Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing a single floating gate transistor and no select transistor, e.g. UV EPROM
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/10Programming or data input circuits
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/34Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
    • G11C16/3436Arrangements for verifying correct programming or erasure
    • G11C16/3454Arrangements for verifying correct programming or for detecting overprogrammed cells
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/34Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
    • G11C16/3436Arrangements for verifying correct programming or erasure
    • G11C16/3454Arrangements for verifying correct programming or for detecting overprogrammed cells
    • G11C16/3459Circuits or methods to verify correct programming of nonvolatile memory cells
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C5/00Details of stores covered by group G11C11/00
    • G11C5/02Disposition of storage elements, e.g. in the form of a matrix array
    • G11C5/025Geometric lay-out considerations of storage- and peripheral-blocks in a semiconductor storage device
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C7/00Arrangements for writing information into, or reading information out from, a digital store
    • G11C7/24Memory cell safety or protection circuits, e.g. arrangements for preventing inadvertent reading or writing; Status cells; Test cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/57Protection from inspection, reverse engineering or tampering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of semiconductor or other solid state devices
    • H01L25/18Assemblies consisting of a plurality of semiconductor or other solid state devices the devices being of the types provided for in two or more different main groups of the same subclass of H10B, H10D, H10F, H10H, H10K or H10N
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B10/00Static random access memory [SRAM] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B10/00Static random access memory [SRAM] devices
    • H10B10/12Static random access memory [SRAM] devices comprising a MOSFET load element
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B10/00Static random access memory [SRAM] devices
    • H10B10/18Peripheral circuit regions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B12/00Dynamic random access memory [DRAM] devices
    • H10B12/50Peripheral circuit region structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B41/00Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/20Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B69/00Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00Three-dimensional [3D] integrated devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/10Integrated device layouts
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C2216/00Indexing scheme relating to G11C16/00 and subgroups, for features not directly covered by these groups
    • G11C2216/02Structural aspects of erasable programmable read-only memories
    • G11C2216/06Floating gate cells in which the floating gate consists of multiple isolated silicon islands, e.g. nanocrystals

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
  • Read Only Memory (AREA)
  • Mram Or Spin Memory Techniques (AREA)
  • Static Random-Access Memory (AREA)
  • Dram (AREA)
JP2001008434A 2000-01-18 2001-01-17 半導体記憶装置及びデータ処理装置 Withdrawn JP2001274355A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001008434A JP2001274355A (ja) 2000-01-18 2001-01-17 半導体記憶装置及びデータ処理装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000013893 2000-01-18
JP2000-13893 2000-01-18
JP2001008434A JP2001274355A (ja) 2000-01-18 2001-01-17 半導体記憶装置及びデータ処理装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009142286A Division JP2009260364A (ja) 2000-01-18 2009-06-15 半導体記憶装置

Publications (2)

Publication Number Publication Date
JP2001274355A true JP2001274355A (ja) 2001-10-05
JP2001274355A5 JP2001274355A5 (enExample) 2006-03-23

Family

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Family Applications (2)

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JP2001008434A Withdrawn JP2001274355A (ja) 2000-01-18 2001-01-17 半導体記憶装置及びデータ処理装置
JP2009142286A Pending JP2009260364A (ja) 2000-01-18 2009-06-15 半導体記憶装置

Family Applications After (1)

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JP2009142286A Pending JP2009260364A (ja) 2000-01-18 2009-06-15 半導体記憶装置

Country Status (4)

Country Link
US (5) US6839260B2 (enExample)
JP (2) JP2001274355A (enExample)
KR (1) KR100817657B1 (enExample)
TW (1) TW587252B (enExample)

Cited By (31)

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JP2001358315A (ja) * 2000-04-14 2001-12-26 Infineon Technologies Ag Mramメモリ
JP2005353912A (ja) * 2004-06-11 2005-12-22 Renesas Technology Corp 半導体記憶装置
JP2007172826A (ja) * 2001-07-17 2007-07-05 Sanyo Electric Co Ltd 半導体メモリ装置
JP2008527585A (ja) * 2004-12-30 2008-07-24 サンディスク・スリー・ディ・リミテッド・ライアビリティ・カンパニー 複数ヘッドデコーダの複数のレベルを使用した高密度メモリアレイの階層復号化のための機器および方法
JP2008529270A (ja) * 2005-01-25 2008-07-31 ノーザン ライツ セミコンダクター コーポレイション 磁気抵抗メモリを有するシングルチップ
JP2008529275A (ja) * 2005-01-26 2008-07-31 フリースケール セミコンダクター インコーポレイテッド 窒化酸化物層を有する半導体デバイスおよびこのための方法
JP2008192277A (ja) * 2007-01-31 2008-08-21 Northern Lights Semiconductor Corp 磁性メモリを備えた集積回路
JP2009099814A (ja) * 2007-10-17 2009-05-07 Spansion Llc 半導体装置
JP2010146722A (ja) * 2002-01-18 2010-07-01 Sandisk Corp 複数読出しにより不揮発性メモリにおけるノイズの影響を低減する方法
US7916538B2 (en) 2008-01-28 2011-03-29 Samsung Electronics Co., Ltd. Memory device employing NVRAM and flash memory cells
JP2011165240A (ja) * 2010-02-05 2011-08-25 Toshiba Corp 半導体記憶装置
JP2011228709A (ja) * 2010-04-20 2011-11-10 Micron Technology Inc マルチレベルアーキテクチャを有するフラッシュメモリ
JP2012501038A (ja) * 2008-08-25 2012-01-12 サンディスク スリーディー,エルエルシー 区分データ線を有するメモリシステム
JP2012178554A (ja) * 2011-02-02 2012-09-13 Semiconductor Energy Lab Co Ltd 半導体メモリ装置
JP2012178555A (ja) * 2011-02-02 2012-09-13 Semiconductor Energy Lab Co Ltd 半導体メモリ装置
JP2013008937A (ja) * 2010-11-05 2013-01-10 Semiconductor Energy Lab Co Ltd 半導体装置
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JP2013109818A (ja) * 2011-10-24 2013-06-06 Semiconductor Energy Lab Co Ltd 半導体メモリ装置およびその駆動方法
JP2013145875A (ja) * 2011-12-15 2013-07-25 Semiconductor Energy Lab Co Ltd 記憶装置
US8565016B2 (en) 2001-12-20 2013-10-22 Micron Technology, Inc. System having improved surface planarity for bit material deposition
JP2016187047A (ja) * 2010-09-13 2016-10-27 株式会社半導体エネルギー研究所 記憶装置
JP2017092492A (ja) * 2009-12-25 2017-05-25 株式会社半導体エネルギー研究所 半導体装置
JP2017527976A (ja) * 2014-06-16 2017-09-21 インテル・コーポレーション 高電圧デバイスを集積させたシリコンダイ
JPWO2016181256A1 (ja) * 2015-05-12 2018-03-08 株式会社半導体エネルギー研究所 半導体装置、電子部品および電子機器
JP2018041985A (ja) * 2010-09-14 2018-03-15 株式会社半導体エネルギー研究所 半導体装置
JP2019091914A (ja) * 2012-02-29 2019-06-13 株式会社半導体エネルギー研究所 半導体装置
JP2019179925A (ja) * 2010-07-02 2019-10-17 株式会社半導体エネルギー研究所 半導体装置
JP2020150282A (ja) * 2011-03-10 2020-09-17 株式会社半導体エネルギー研究所 メモリ装置
JP2021044045A (ja) * 2019-09-13 2021-03-18 本田技研工業株式会社 半導体装置
JP2022529165A (ja) * 2019-04-30 2022-06-17 長江存儲科技有限責任公司 3次元相変化メモリを伴う3次元メモリデバイス
JP2022153594A (ja) * 2011-01-26 2022-10-12 株式会社半導体エネルギー研究所 半導体装置

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