JP2000509559A - 炭化ケイ素金属絶縁体半導体電界効果トランジスタ - Google Patents
炭化ケイ素金属絶縁体半導体電界効果トランジスタInfo
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- JP2000509559A JP2000509559A JP10500936A JP50093698A JP2000509559A JP 2000509559 A JP2000509559 A JP 2000509559A JP 10500936 A JP10500936 A JP 10500936A JP 50093698 A JP50093698 A JP 50093698A JP 2000509559 A JP2000509559 A JP 2000509559A
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- silicon carbide
- epitaxial layer
- trench
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 183
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 176
- 239000004065 semiconductor Substances 0.000 title claims abstract description 54
- 239000012212 insulator Substances 0.000 title claims abstract description 48
- 230000005669 field effect Effects 0.000 title claims abstract description 34
- 229910052751 metal Inorganic materials 0.000 title claims description 16
- 239000002184 metal Substances 0.000 title claims description 16
- 239000000758 substrate Substances 0.000 claims abstract description 60
- 238000000034 method Methods 0.000 claims description 20
- 229910044991 metal oxide Inorganic materials 0.000 claims description 15
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 9
- 150000004706 metal oxides Chemical class 0.000 claims description 8
- -1 silicon carbide metal oxide Chemical class 0.000 claims description 7
- 238000000407 epitaxy Methods 0.000 claims description 5
- 229910021419 crystalline silicon Inorganic materials 0.000 claims 1
- 239000013078 crystal Substances 0.000 abstract 1
- 230000015556 catabolic process Effects 0.000 description 21
- 238000002513 implantation Methods 0.000 description 20
- 230000000903 blocking effect Effects 0.000 description 17
- 230000005684 electric field Effects 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 11
- 238000002347 injection Methods 0.000 description 9
- 239000007924 injection Substances 0.000 description 9
- 230000009467 reduction Effects 0.000 description 8
- 238000005468 ion implantation Methods 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000007943 implant Substances 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000012010 growth Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 241000282376 Panthera tigris Species 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- SDTHIDMOBRXVOQ-UHFFFAOYSA-N 5-[bis(2-chloroethyl)amino]-6-methyl-1h-pyrimidine-2,4-dione Chemical compound CC=1NC(=O)NC(=O)C=1N(CCCl)CCCl SDTHIDMOBRXVOQ-UHFFFAOYSA-N 0.000 description 1
- 241001354791 Baliga Species 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 241000989913 Gunnera petaloidea Species 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000010261 cell growth Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 235000015067 sauces Nutrition 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
- H01L29/66068—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41741—Source or drain electrodes for field effect devices for vertical or pseudo-vertical devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41766—Source or drain electrodes for field effect devices with at least part of the source or drain electrode having contact below the semiconductor surface, e.g. the source or drain electrode formed at least partially in a groove or with inclusions of conductor inside the semiconductor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
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- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
- Junction Field-Effect Transistors (AREA)
- Thin Film Transistor (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Bipolar Transistors (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1. u字形ゲートトレンチと; n型炭化ケイ素ドリフト層と; 該炭化ケイ素ドリフト層よりも高いキャリア濃度を有するp型炭化ケイ素ベー ス層と; 前記ゲートトレンチのコーナー部での電界集中を防ぐように、前記炭化ケイ素 ドリフト層中に前記u字形ゲートトレンチと隣接しかつ接触せずに形成され、か つ、前記u字形ゲートトレンチの底部の下の深さにまで延在するp型領域と; を備える炭化ケイ素金属絶縁体半導体電界効果トランジスタ。 2. 前記p型炭化ケイ素ベース層は、前記トランジスタのオン状態抵抗を低減 し同時に前記ベース層のバックデプレションを防ぐように選択された、前記炭化 ケイ素ベース層のキャリア濃度と前記炭化ケイ素ベース層の厚さとの少なくとも 1つを有する、請求項1に記載の炭化ケイ素金属絶縁体半導体電界効果トランジ スタ。 3. 前記p型炭化ケイ素ベース層は、前記炭化ケイ素ドリフト層中に形成され る前記p型炭化ケイ素領域を有さない対応する炭化ケイ素電界効果トランジスタ 中のバックデプレションを防ぐのに必要な厚さよりも少ない厚さを有する、請求 項2に記載の炭化ケイ素金属絶縁体半導体電界効果トランジスタ。 4. 前記p型炭化ケイ素ベース層は厚さ約5μm未満を有する、請求項1に記 載の炭化ケイ素金属絶縁体半導体電界効果トランジスタ。 5. 前記p型炭化ケイ素ベース層は、キャリア濃度約2×1018cm-3未満を有 する、請求項1に記載の炭化ケイ素金属絶縁体半導体電界効果トランジスタ。 6. 金属絶縁体半導体トランジスタの単位セルにおいて: n型伝導性炭化ケイ素のバルク単結晶炭化ケイ素基板と、該基板は上面と該上 面の反対側の下面とを有することと; 前記基板の前記上面に接して形成されたn型伝導性炭化ケイ素の第一のエピタ キシャル層と、前記基板のキャリア濃度は前記第一のエピタキシャル層のキャリ ア濃度よりも高いことと、前記第一のエピタキシャル層は前記トランジスタのド リフト層を形成することと; 前記第一のエピタキシャル層上に形成されたp型伝導性炭化ケイ素の第二のエ ピタキシャル層と、該第二のエピタキシャル層は前記トランジスタのベース層を 形成することと; 前記第二のエピタキシャル層を通って前記第一のエピタキシャル層の中へと下 方に延在する第一のトレンチと、該トレンチは側壁と底部とを有することと; 前記第一のトレンチとの間にベース領域を形成するように、前記第一のトレン チに隣接し、かつ、前記第二のエピタキシャル層を通って前記第一のエピタキシ ャル層の中へと下方に延在する第二のトレンチと、該第二のトレンチは側壁と底 部とを有することと; 前記第一のトレンチと前記第二のトレンチとの間に、かつ、前記第二のエピタ キシャル層に隣接して形成されたn型伝導性の領域と、該n型伝導性領域は前記 第一と前記第二のエピタキシャル層よりも高いキャリア濃度を有することと、前 記n型領域は前記第二のエピタキシャル層の反対側の上面を有することと; 前記第一のトレンチの前記側壁と前記底部とに接して形成され、かつ、前記第 一と前記第二のトレンチとの間の前記n型領域の前記上面の上に延在して、ゲー ト絶緑体層を作る絶緑体層と、前記第一のトレンチの底部上に形成された前記ゲ ート酸化物層の上面は前記第二のエピタキシャル層の下面の下にあることと; 前記第一のエピタキシャル層中に前記第二のトレンチの下に形成されたp型伝 導性炭化ケイ素の領域と、該p型伝導性炭化ケイ素の領域は、前記第二のエピタ キシャル層よりも高いキャリア濃度を有することと; 前記基板の前記下面に接して形成されて、ドレイン接触を形成するオーム接触 と; 前記第二のトレンチの前記側壁と前記底部とに接して形成され、かつ、前記第 一と前記第二のトレンチとの間の前記n型領域の前記上面の上に延在して、ソー ス接触を形成するオーム接触と; 前記第一のトレンチ中に形成されてゲート接触を形成する伝導層と; を備える単位セル。 7. 前記第二のエピタキシャル層は厚さ約5μm未満を有する、請求項6に記 載 の炭化ケイ素金属絶縁体半導体電界効果トランジスタの単位セル。 8. 前記第二のエピタキシャル層は、キャリア濃度約2×1018cm-3未満を有 する、請求項6に記載の炭化ケイ素金属絶縁体半導体電界効果トランジスタの単 位セル。 9. 請求項6の単位セルを複数個備える、炭化ケイ素金属絶縁体半導体トラン ジスタ。 10. 前記絶縁層は酸化物層を含む、請求項6に記載の炭化ケイ素金属絶縁体 半導体電界効果トランジスタの単位セル。 11. 前記n型領域は、前記第二のエピタキシャル層上に形成されかつ前記第 二のエピタキシャル層の反対側の上面を有するn型炭化ケイ素の第三のエピタキ シャル層を含み、かつ、前記第一と前記第二のトレンチは、前記第三と前記第二 のエピタキシャル層を通って下方に延在する、請求項10に記載の炭化ケイ素金 属酸化物半導体電界効果トランジスタの単位セル。 12. 前記第一のエピタキシャル層と前記基板との間に形成されたn型炭化ケ イ素の緩衝層をさらに備える、請求項6に記載の炭化ケイ素金属絶縁体半導体電 界効果トランジスタの単位セル。 13. 金属酸化物半導体トランジスタにおいて: n型伝導性炭化ケイ素のバルク単結晶炭化ケイ素基板と、該基板は上面と該上 面の反対側の下面とを有することと; 前記基板の前記上面に接して形成されたn型伝導性炭化ケイ素の第一のエピタ キシャル層と、前記基板のキャリア濃度は前記第一のエピタキシャル層のキャリ ア濃度よりも高いことと; 前記第一のエピタキシャル層上に形成されたp型伝導性炭化ケイ素の第二のエ ピタキシャル層と; 前記第二のエピタキシャル層を通って前記第一のエピタキシャル層の中へと下 方に延在する第一のトレンチと、該トレンチは側壁と底部とを有することと; 前記第一のトレンチとの間にベース領域を形成するように、前記第一のトレン チに隣接し、かつ、前記第二のエピタキシャル層を通って前記第一のエピタキシ ャル層の中へと下方に延在する第二のトレンチと、該第二のトレンチは側壁と底 部とを有することと; 前記第一のトレンチに隣接しかつ前記第二のトレンチの反対側の第三のトレン チであり、この結果、前記第一のトレンチは前記第二のトレンチと前記第三のト レンチとの間に配置されるような第三のトレンチと、該第三のトレンチは前記第 二のエピタキシャル層を通って前記第一のエピタキシャル層の中へと下方に延在 することと、前記第三のトレンチは側壁と底部とを有することと; 前記第一と前記第二のトレンチと前記第一と前記第三のトレンチとの間に、か つ、前記第二のエピタキシャル層に隣接して形成されたn型伝導性炭化ケイ素の 領域と、該n型伝導性炭化ケイ素の領域は前記第一と前記第二のエピタキシャル 層よりも高いキャリア濃度を有することと、前記n型伝導性炭化ケイ素の領域は 前記第二のエピタキシャル層の反対側の上面を有することと; 前記第一のトレンチの前記側壁と前記底部とに接して形成され、かつ、前記第 一と前記第二のトレンチとの間の前記n型伝導性炭化ケイ素の領域の前記上面の 上に延在して、ゲート酸化物層を作る酸化物層と、前記第一のトレンチの底部上 に形成された前記ゲート酸化物層の上面は前記第二のエピタキシャル層の下にあ ることと; 前記第一のエピタキシャル層中に前記第二のトレンチと前記第三のトレンチと の下に形成されたp型伝導性炭化ケイ素の領域と、該p型伝導性炭化ケイ素の領 域は、前記第二のエピタキシャル層よりも高いキャリア濃度を有することと; 前記基板の前記下面に接して形成されて、ドレイン接触を形成するオーム性ド レイン接触と; 前記第二のトレンチの前記側壁と前記底部とに接して形成され、かつ、前記第 一と前記第二のトレンチとの間の前記n型伝導性炭化ケイ素の領域の前記上面の 上に延在して、ソース接触を形成するオーム性ソース接触と; 前記第三のトレンチの前記側壁と前記底部とに接して形成され、かつ、前記オ ーム性ソース接触に電気的に接続したオーム接触と; 前記第一のトレンチ中に前記酸化物層に接して形成されてゲート接触を形成す る伝導層と; を備えるトランジスタ。 14. 前記第二のエピタキシャル層は厚さ約5μm未満を有する、請求項13 に記載の炭化ケイ素金属酸化物半導体電界効果トランジスタ。 15. 前記第二のエピタキシャル層は、キャリア濃度約2×1018cm-3未満を 有する、請求項13に記載の炭化ケイ素金属酸化物半導体電界効果トランジスタ 。 16. 前記第一のエピタキシャル層と前記基板との間に形成されたn型伝導性 炭化ケイ素の緩衝層をさらに備える、請求項13に記載の炭化ケイ素金属酸化物 半導体電界効果トランジスタ。 17. 前記n型領域は、前記第二のエピタキシャル層上に形成されかつ前記第 二のエピタキシャル層の反対側の上面を有するn型炭化ケイ素の第三のエピタキ シャル層を含み、かつ、前記第一と前記第二のトレンチは、前記第三と前記第二 のエピタキシャル層を通って下方に延在する、請求項16に記載の炭化ケイ素金 属酸化物半導体電界効果トランジスタ。 18. 前記炭化ケイ素は4H炭化ケイ素を含む、請求項13に記載の炭化ケイ 素金属酸化物半導体電界効果トランジスタ。 19. 金属絶縁体半導体トランジスタの単位セルにおいて: n型伝導性炭化ケイ素のバルク単結晶炭化ケイ素基板と、該基板は上面と該上 面の反対側の下面とを有することと; 前記基板の前記上面に接して形成されたn型伝導性炭化ケイ素の第一のエピタ キシャル層と、前記基板のキャリア濃度は前記第一と前記第二のエピタキシャル 層のキャリア濃度よりも高いことと; 前記第一のエピタキシャル層上に形成されたp型伝導性炭化ケイ素の第二のエ ピタキシャル層と; 前記第二のエピタキシャル層を通って前記第一のエピタキシャル層の中へと下 方に延在する第一のトレンチと、該トレンチは側壁と底部とを有することと; 前記第二のエピタキシャル層中に前記第一のトレンチに隣接して形成され、か つ、前記第二のエピタキシャル層の上面にまで延在して、前記第二のエピタキシ ャル層中にn型伝導性炭化ケイ素の上面を有する領域を作るn型伝導性炭化ケイ 素の領域と、該n型伝導性炭化ケイ素の領域は前記第一と前記第二のエピタキシ ャル層よりも高いキャリア濃度を有することと; 前記第一のトレンチの前記側壁と前記底部とに接して形成され、かつ、前記第 二のエピタキシャル層中に形成された前記n型伝導性炭化ケイ素の前記上面の上 に延在して、ゲート酸化物層を作る絶緑体層と、前記第一のトレンチの底部上に 形成された前記ゲート絶縁体層の上面は前記第二のエピタキシャル層の下にある ことと; 前記基板の前記下面に接して形成されて、ドレイン接触を形成するオーム接触 と; 前記第二のエピタキシャル層の前記上面に接して形成され、かつ、前記第二の エピタキシャル層の前記n型伝導性領域の前記上面に接触して、ソース接触を形 成し、その結果、前記n型伝導性炭化ケイ素の領域を前記p型伝導性第二のエピ タキシャル層に電気的に接続するオーム接触と; 前記第一のエピタキシャル層中に、前記第一のトレンチに隣接しかつ接触して いない前記ソース接触の下に形成された、p型伝導性炭化ケイ素の領域と、該p 型伝導性炭化ケイ素の領域は、前記第二のエピタキシャル層よりも高いキャリア 濃度を有することと; 前記第一のトレンチ中に形成されてゲート接触を形成する伝導層と; を備える単位セル。 20. 前記第二のエピタキシャル層は厚さ約5μm未満を有する、請求項19 に記載の炭化ケイ素金属絶縁体半導体電界効果トランジスタの単位セル。 21. 前記第二のエピタキシャル層は、キャリア濃度約2×1018cm-3未満を 有する、請求項19に記載の炭化ケイ素金属絶縁体半導体電界効果トランジスタ の単位セル。 22. 請求項19の単位セルを複数個備える、炭化ケイ素金属絶縁体半導体ト ランジスタ。 23. 前記絶縁層は酸化物層を含む、請求項19に記載の炭化ケイ素金属絶縁 体半導体電界効果トランジスタの単位セル。 24 前記第二のエピタキシャル層中に前記ソース接触の下に形成され、かつ、 前記第二のエピタキシャル層よりも高いキャリア濃度を有する、p型伝導性炭化 ケイ素の第二の領域をさらに備える、請求項19に記載の炭化ケイ素金属絶縁体 半導体電界効果トランジスタの単位セル。 25. 前記炭化ケイ素は4H炭化ケイ素を含む、請求項19に記載の炭化ケイ 素金属絶縁体半導体電界効果トランジスタの単位セル。 26. 前記第一のエピタキシャル層と前記基板との間に形成されたn型伝導性 炭化ケイ素の緩衝層をさらに備える、請求項19に記載の炭化ケイ素金属絶縁体 半導体電界効果トランジスタの単位セル。
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US10192960B2 (en) | 2013-07-26 | 2019-01-29 | Sumitomo Electric Industries, Ltd. | Silicon carbide semiconductor device and method for manufacturing same |
US9012923B2 (en) | 2013-08-01 | 2015-04-21 | Kabushiki Kaisha Toshiba | Semiconductor device |
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Also Published As
Publication number | Publication date |
---|---|
DE69718477T2 (de) | 2003-09-11 |
ATE231288T1 (de) | 2003-02-15 |
KR20000016383A (ko) | 2000-03-25 |
EP0916160A1 (en) | 1999-05-19 |
EP0916160B1 (en) | 2003-01-15 |
JP3462506B2 (ja) | 2003-11-05 |
CA2257232C (en) | 2004-03-30 |
WO1997047045A1 (en) | 1997-12-11 |
KR100339794B1 (ko) | 2002-08-22 |
CA2257232A1 (en) | 1997-12-11 |
DE69718477D1 (de) | 2003-02-20 |
US5831288A (en) | 1998-11-03 |
US5719409A (en) | 1998-02-17 |
AU3234597A (en) | 1998-01-05 |
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