EP1081818A3 - Halbleiterlaser-Vorrichtungen - Google Patents

Halbleiterlaser-Vorrichtungen Download PDF

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Publication number
EP1081818A3
EP1081818A3 EP00122472A EP00122472A EP1081818A3 EP 1081818 A3 EP1081818 A3 EP 1081818A3 EP 00122472 A EP00122472 A EP 00122472A EP 00122472 A EP00122472 A EP 00122472A EP 1081818 A3 EP1081818 A3 EP 1081818A3
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EP
European Patent Office
Prior art keywords
semiconductor material
semiconductor laser
laser devices
substrate
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00122472A
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English (en)
French (fr)
Other versions
EP1081818B1 (de
EP1081818A2 (de
Inventor
Toshiaki Tanaka
Shigeru Aoki
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Hitachi Ltd
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Hitachi Ltd
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Publication of EP1081818A3 publication Critical patent/EP1081818A3/de
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Publication of EP1081818B1 publication Critical patent/EP1081818B1/de
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/025—Physical imperfections, e.g. particular concentration or distribution of impurities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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    • H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
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    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/42—Arrays of surface emitting lasers
    • H01S5/423—Arrays of surface emitting lasers having a vertical cavity

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  • Condensed Matter Physics & Semiconductors (AREA)
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  • Recrystallisation Techniques (AREA)
EP00122472A 1995-09-18 1996-09-17 Halbleiterlaser-Vorrichtungen Expired - Lifetime EP1081818B1 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP23814295 1995-09-18
JP23814295 1995-09-18
JP23165896 1996-09-02
JP23165896 1996-09-02
EP96930428A EP0852416B1 (de) 1995-09-18 1996-09-17 Halbleitermaterial, verfahren zur herstellung des halbleitermaterials und eine halbleitervorrichtung

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP96930428.6 Division 1997-03-27

Publications (3)

Publication Number Publication Date
EP1081818A2 EP1081818A2 (de) 2001-03-07
EP1081818A3 true EP1081818A3 (de) 2001-08-08
EP1081818B1 EP1081818B1 (de) 2004-08-18

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JP3830051B2 (ja) 2006-10-04
EP1081818B1 (de) 2004-08-18
DE69633203T2 (de) 2005-09-01
US6459712B2 (en) 2002-10-01
US6377596B1 (en) 2002-04-23
AU6946196A (en) 1997-04-09
DE69622277D1 (de) 2002-08-14
DE69622277T2 (de) 2003-03-27
EP0852416A4 (de) 1999-04-07
EP0852416A1 (de) 1998-07-08
EP1081818A2 (de) 2001-03-07
DE69633203D1 (de) 2004-09-23
WO1997011518A1 (en) 1997-03-27
US20010038655A1 (en) 2001-11-08

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