DE69622277D1 - Halbleitermaterial, verfahren zur herstellung des halbleitermaterials und eine halbleitervorrichtung - Google Patents

Halbleitermaterial, verfahren zur herstellung des halbleitermaterials und eine halbleitervorrichtung

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Publication number
DE69622277D1
DE69622277D1 DE69622277T DE69622277T DE69622277D1 DE 69622277 D1 DE69622277 D1 DE 69622277D1 DE 69622277 T DE69622277 T DE 69622277T DE 69622277 T DE69622277 T DE 69622277T DE 69622277 D1 DE69622277 D1 DE 69622277D1
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Prior art keywords
semiconductor material
semiconductor
producing
semiconductor device
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Expired - Lifetime
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DE69622277T
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DE69622277T2 (de
Inventor
Toshiaki Tanaka
Shigeru Aoki
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Opnext Japan Inc
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Hitachi Ltd
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Publication of DE69622277T2 publication Critical patent/DE69622277T2/de
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    • HELECTRICITY
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    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/025Physical imperfections, e.g. particular concentration or distribution of impurities
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00Nanooptics, e.g. quantum optics or photonic crystals
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    • H01S5/183Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
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    • H01S5/18344Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] characterized by the mesa, e.g. dimensions or shape of the mesa
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    • H01S5/2054Methods of obtaining the confinement
    • H01S5/2077Methods of obtaining the confinement using lateral bandgap control during growth, e.g. selective growth, mask induced
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    • H01S5/32Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/3202Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures grown on specifically orientated substrates, or using orientation dependent growth
    • H01S5/320225Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures grown on specifically orientated substrates, or using orientation dependent growth polar orientation
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    • H01S5/323Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/32308Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm
    • H01S5/32341Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm blue laser based on GaN or GaP
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    • H01S5/34Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/343Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/34333Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser
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DE69622277T 1995-09-18 1996-09-17 Halbleitermaterial, verfahren zur herstellung des halbleitermaterials und eine halbleitervorrichtung Expired - Lifetime DE69622277T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP23814295 1995-09-18
JP23165896 1996-09-02
PCT/JP1996/002663 WO1997011518A1 (en) 1995-09-18 1996-09-17 Semiconductor material, method of producing the semiconductor material, and semiconductor device

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DE69622277D1 true DE69622277D1 (de) 2002-08-14
DE69622277T2 DE69622277T2 (de) 2003-03-27

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DE69622277T Expired - Lifetime DE69622277T2 (de) 1995-09-18 1996-09-17 Halbleitermaterial, verfahren zur herstellung des halbleitermaterials und eine halbleitervorrichtung

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US (2) US6377596B1 (de)
EP (2) EP0852416B1 (de)
JP (1) JP3830051B2 (de)
AU (1) AU6946196A (de)
DE (2) DE69633203T2 (de)
WO (1) WO1997011518A1 (de)

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EP0852416A1 (de) 1998-07-08
DE69622277T2 (de) 2003-03-27
WO1997011518A1 (en) 1997-03-27
AU6946196A (en) 1997-04-09
EP1081818B1 (de) 2004-08-18
JP3830051B2 (ja) 2006-10-04
US20010038655A1 (en) 2001-11-08
US6377596B1 (en) 2002-04-23
US6459712B2 (en) 2002-10-01
EP1081818A2 (de) 2001-03-07
DE69633203T2 (de) 2005-09-01
EP0852416B1 (de) 2002-07-10
EP0852416A4 (de) 1999-04-07
DE69633203D1 (de) 2004-09-23

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